CN113176717A - Noise protection plate of photoetching machine - Google Patents

Noise protection plate of photoetching machine Download PDF

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Publication number
CN113176717A
CN113176717A CN202110511276.6A CN202110511276A CN113176717A CN 113176717 A CN113176717 A CN 113176717A CN 202110511276 A CN202110511276 A CN 202110511276A CN 113176717 A CN113176717 A CN 113176717A
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CN
China
Prior art keywords
sound insulation
box
insulation box
boxes
thin plate
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Withdrawn
Application number
CN202110511276.6A
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Chinese (zh)
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顾思家
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Individual
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Individual
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Priority to CN202110511276.6A priority Critical patent/CN113176717A/en
Publication of CN113176717A publication Critical patent/CN113176717A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Building Environments (AREA)

Abstract

The invention discloses a noise protection plate of a photoetching machine, which belongs to the technical field of semiconductor manufacturing and comprises a hollow thin plate and at least two first sound insulation boxes arranged in the hollow thin plate, wherein the hollow thin plate is rectangular, and the first sound insulation boxes are uniformly arranged at intervals along the transverse direction of the hollow thin plate; follow the horizontal of hollow sheet metal is in logical groove has been seted up to the both sides face of hollow sheet metal, first through-hole has been seted up to the both ends face of first box that gives sound insulation, and the first through-hole at first box both ends that gives sound insulation corresponds with the logical groove of hollow sheet metal both sides respectively, transversely is provided with adjustable spacer block between the adjacent two first boxes that give sound insulation, adjustable spacer block is used for adjusting the interval between the adjacent two first boxes that give sound insulation. The device can reduce the vibration of the main substrate, the objective lens, the interferometer and other parts of the photoetching machine caused by low-frequency noise, and improve the precision and the stability of the photoetching machine.

Description

Noise protection plate of photoetching machine
Technical Field
The invention belongs to the technical field of semiconductor manufacturing equipment, and particularly relates to a noise protection plate of a photoetching machine.
Background
The lithography machine is a key device in the semiconductor industry, and the requirement of the lithography machine on vibration is extremely strict. With the rapid development and improvement of the lithography precision, the internal vibration of the lithography machine caused by noise is more and more emphasized. The noise is liable to affect the precision and stability of high-precision components such as an objective lens, an interferometer and the like, thereby affecting the measurement precision and the lithography precision of the lithography machine. Therefore, it is urgently needed to provide a noise protection plate for a lithography machine, which can be applied to a noise protection system of the lithography machine, reduce the vibration of parts such as a main substrate, an objective lens and an interferometer of the lithography machine caused by low-frequency noise, and improve the precision and the stability of the lithography machine.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a noise protection plate for a lithography machine, which can reduce the vibration of the main substrate, the objective lens, the interferometer and other components of the lithography machine caused by low frequency noise, and improve the precision and stability of the lithography machine.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention relates to a noise protection plate of a photoetching machine, which comprises a hollow thin plate and at least two first sound insulation boxes arranged in the hollow thin plate, wherein the hollow thin plate is rectangular, and the first sound insulation boxes are uniformly arranged at intervals along the transverse direction of the hollow thin plate; follow the horizontal of hollow sheet metal is in logical groove has been seted up to the both sides face of hollow sheet metal, first through-hole has been seted up to the both ends face of first box that gives sound insulation, and the first through-hole at first box both ends that gives sound insulation corresponds with the logical groove of hollow sheet metal both sides respectively, transversely is provided with adjustable spacer block between the adjacent two first boxes that give sound insulation, adjustable spacer block is used for adjusting the interval between the adjacent two first boxes that give sound insulation.
Further, first sound-proof box is the rectangle, adjustable spacer element divides to be established the both sides of first sound-proof box.
Further, adjustable interval part includes first screw rod and second screw rod, first screw rod and second screw rod divide establish in the both sides of first sound-proof box and respectively with first sound-proof box threaded connection, through first screw rod and second screw rod butt between two adjacent first sound-proof boxes, through rotatory first screw rod or second screw rod can adjust the spaced position between two adjacent first sound-proof boxes.
Further, the first through hole is located at two ends of the first sound insulation box, a first sleeve is arranged in the first through hole, and the first sleeve can move along the axial direction of the first sleeve so as to adjust the position of the first sleeve relative to the first sound insulation box.
Furthermore, second through holes are formed in two sides of the first sound insulation box, second sleeves are fixedly arranged in the second through holes and located in the first sound insulation box, and the second sleeves are in threaded connection with the first screw rods or the second screw rods.
Further, the noise prevention plate further comprises second soundproof boxes which are arranged at even intervals in the longitudinal direction of the hollow thin plate.
Further, be provided with first bead and second bead on the inner wall of hollow sheet metal, form between first bead and the second bead and be used for the installation the mounting groove of second sound-proof box.
Furthermore, an elastic abutting device is arranged between the first sound insulation box and the second sound insulation box.
Further, elasticity butt device includes that inner tube, slip cover establish outer tube outside the inner tube, be used for connecting the spring of inner tube and outer tube, the inner tube is fixed continuous with first sound-proof box, the outer tube gives sound insulation with the second and box butt.
Furthermore, the four corners of the hollow sheet are fixedly connected with right-angle plates, a third sound insulation box is encircled between the right-angle plates and the inner wall of the hollow sheet, a third through hole is formed in the third sound insulation box, and the third through hole is located on the plane where the through groove is located.
The invention has the beneficial effects that:
the invention relates to a noise protection plate of a photoetching machine, which comprises a hollow thin plate and at least two first sound insulation boxes arranged in the hollow thin plate, wherein the hollow thin plate is rectangular, and a resonance structure is formed between the hollow thin plate and the first sound insulation boxes together and is used for eliminating noise with specific frequency. The first sound insulation boxes are uniformly arranged along the transverse direction of the hollow thin plate at intervals, so that the first sound insulation boxes can be flatly laid on the inner side surface of the hollow thin plate, and the noise reduction effect of a large area is achieved; first through-hole at first box both ends that gives sound insulation corresponds with logical groove of hollow sheet metal both sides respectively for the noise absorption, transversely being provided with adjustable spacer block between the adjacent two first boxes that give sound insulation, adjustable spacer block is used for adjusting the interval between the adjacent two first boxes that give sound insulation, selects different intervals as required, also can hold the first box that gives sound insulation of different quantity, can be used for adjusting the resonant frequency who absorbs the main noise.
Additional advantages, objects, and features of the invention will be set forth in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the means of the instrumentalities and combinations particularly pointed out hereinafter.
Drawings
In order to make the object, technical scheme and beneficial effect of the invention more clear, the invention provides the following drawings for explanation:
FIG. 1 is a schematic view of the structure of the fender of the present invention;
FIG. 2 is a schematic view of the internal structure of the fender panel of the present invention;
FIG. 3 is a schematic view of a second sound isolation box;
FIG. 4 is a top view of a second sound isolation box;
FIG. 5 is a cross-sectional view taken along A-A of FIG. 4;
fig. 6 is a schematic structural view of the elastic abutting device.
The drawings are numbered as follows: hollow sheet 1, first sound insulation box 2, through groove 3, first through hole 4, first screw 5, second screw 6, first sleeve 7, second through hole 8, second sleeve 9, second sound insulation box 10, first rib 11, second rib 12, elastic abutting device 13, inner tube 131, outer tube 132, spring 133, rectangular plate 14, third through hole 15, wedge-shaped groove 16.
Detailed Description
As shown in fig. 1 to 6, the noise protection plate for the lithography machine according to the present invention comprises a hollow thin plate 1 and at least two first sound-proof boxes 2 arranged in the hollow thin plate 1, wherein the hollow thin plate 1 is rectangular and is formed by surrounding six thin plates, the first sound-proof boxes 2 are uniformly arranged along the transverse direction of the hollow thin plate 1 at intervals, the first sound-proof boxes 2 are also rectangular, and the length of the first sound-proof boxes is equal to the width of the hollow thin plate 1; follow hollow sheet 1 transversely be in logical groove 3 has been seted up to hollow sheet 1's both sides face, lead to the length direction setting of groove 3 along hollow sheet 1, first through-hole 4 has been seted up to first box 2's both ends face that gives sound insulation, and first through-hole 4 at first box 2 both ends that gives sound insulation corresponds with logical groove 3 of hollow sheet 1 both sides respectively for first through-hole 4 can normally inhale the sound, and the noise also can be followed and led to in groove 3 gets into the interval between the first box 2 that gives sound insulation, makes the cavity between first box 2 and the hollow sheet 1 that gives sound insulation also can form resonance, plays better noise reduction, transversely is provided with adjustable spacer block between the adjacent two first box 2 that gives sound insulation, adjustable spacer block is used for adjusting the interval between the adjacent two first box 2 that gives sound insulation.
The invention discloses a noise protection plate of a photoetching machine, which comprises a hollow thin plate 1 and at least two first sound insulation boxes 2 arranged in the hollow thin plate 1, wherein the hollow thin plate 1 is rectangular, and a resonance structure is formed between the hollow thin plate 1 and the first sound insulation boxes 2 together and is used for eliminating noise with specific frequency. The first sound insulation boxes 2 are uniformly arranged along the transverse direction of the hollow sheet 1 at intervals, so that the first sound insulation boxes 2 can be flatly laid on the inner side surface of the hollow sheet 1, and a large-area noise reduction effect is achieved; the first through-hole 4 at 2 both ends of first box 2 that gives sound insulation corresponds with logical groove 3 of hollow sheet 1 both sides respectively for the noise absorption, transversely being provided with adjustable spacer block between two adjacent first box 2 that gives sound insulation, adjustable spacer block is used for adjusting the interval between two adjacent first box 2 that give sound insulation, selects different intervals as required, also can hold the first box 2 that gives sound insulation of different quantity, can be used for adjusting the resonant frequency who absorbs the main noise.
In this embodiment, first box 2 that gives sound insulation is the rectangle, adjustable spacer block divides to establish first box 2's both sides give sound insulation are through the length of adjusting adjustable spacer block to can adjust the interval between the adjacent two first box 2 that gives sound insulation, adjust its frequency of making an uproar that falls, can understand, frequency accessible is experimental verification many times, makes its and the interval between the adjacent two first box 2 that gives sound insulation correspond, compares when conveniently adjusting.
In this embodiment, the adjustable spacing part includes first screw rod 5 and second screw rod 6, first screw rod 5 and second screw rod 6 divide establish in the both sides of first sound-proof box 2 and respectively with first sound-proof box 2 threaded connection, through first screw rod 5 and 6 butts of second screw rod between two adjacent first sound-proof boxes 2, through rotatory first screw rod 5 or second screw rod 6, can adjust the interval position between two adjacent first sound-proof boxes 2, the device is simple and convenient, and is quick detachable, and threaded connected mode can also play certain sealed effect, and noise cancelling effect is more stable.
In this embodiment, the first through hole 4 is located at two ends of the first sound insulation box 2, the first sleeve 7 is disposed in the first through hole 4, the first sleeve 7 can move axially along the first through hole, so that the position of the first sleeve 7 can be adjusted relative to the first sound insulation box 2, the first sleeve 7 can be connected with the first through hole 4 through threads, and the frequency can be adjusted conveniently.
In this embodiment, the two sides of the first sound insulation box 2 are provided with second through holes 8, a second sleeve 9 is fixedly arranged in the second through hole 8, the second sleeve 9 is located in the first sound insulation box 2, the second sleeve 9 is in threaded connection with the first screw 5 or the second screw 6, and the extension length of the second sleeve can be adjusted by directly rotating the first screw 5 or the second screw 6.
In this embodiment, the noise protection plate further comprises a second sound insulation box 10, the second sound insulation box 10 is arranged along the longitudinal uniform interval of the hollow thin plate 1, and the second sound insulation box 10 is matched with the first sound insulation box 2, so that a better sound insulation effect can be achieved.
In this embodiment, the inner wall of the hollow thin plate 1 is provided with a first rib 11 and a second rib 12, and an installation groove for installing the second sound insulation box 10 is formed between the first rib 11 and the second rib 12, so that the second sound insulation box 10 is conveniently installed.
In the present embodiment, an elastic abutting device 13 is provided between the first soundproof box 2 and the second soundproof box 10.
In this embodiment, the elastic abutting device 13 includes an inner tube 131, a sliding sleeve, an outer tube 132 outside the inner tube 131, and a spring 133 for connecting the inner tube 131 and the outer tube 132, the inner tube 131 is fixedly connected to the first sound insulation box 2, the outer tube 132 abuts against the second sound insulation box 10, wherein the wedge-shaped groove 16 is formed on the outer surface of the second sound insulation box 10, the first sound insulation box 2 is installed first, and when the second sound insulation box 10 is installed, the outer tube 132 can slide along the wedge-shaped groove 16 and then be compressed, thereby facilitating the installation of the second sound insulation box 10.
In this embodiment, the four corners of the hollow thin plate 1 are fixedly connected with right-angle plates 14, a third sound insulation box is defined by the right-angle plates 14 and the inner wall of the hollow thin plate 1, a third through hole 15 is formed in the third sound insulation box, and the third through hole 15 is located on the plane where the through groove 3 is located.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.

Claims (10)

1. The utility model provides a photoetching machine noise guard plate which characterized in that: the sound insulation device comprises a hollow thin plate and at least two first sound insulation boxes arranged in the hollow thin plate, wherein the hollow thin plate is rectangular, and the first sound insulation boxes are uniformly arranged at intervals along the transverse direction of the hollow thin plate; follow the horizontal of hollow sheet metal is in logical groove has been seted up to the both sides face of hollow sheet metal, first through-hole has been seted up to the both ends face of first box that gives sound insulation, and the first through-hole at first box both ends that gives sound insulation corresponds with the logical groove of hollow sheet metal both sides respectively, transversely is provided with adjustable spacer block between the adjacent two first boxes that give sound insulation, adjustable spacer block is used for adjusting the interval between the adjacent two first boxes that give sound insulation.
2. The mask aligner noise guard of claim 1, wherein: the first sound insulation box is rectangular, and the adjustable spacing components are respectively arranged on two sides of the first sound insulation box.
3. The mask aligner noise guard of claim 2, wherein: the adjustable spacing part comprises a first screw and a second screw, the first screw and the second screw are respectively arranged on two sides of the first sound insulation box and are respectively in threaded connection with the first sound insulation box, two adjacent first sound insulation boxes are abutted by the first screw and the second screw, and the spacing position between two adjacent first sound insulation boxes can be adjusted by rotating the first screw or the second screw.
4. A mask aligner noise prevention plate according to claim 3, wherein: the first through hole is positioned at two ends of the first sound insulation box, a first sleeve is arranged in the first through hole, and the first sleeve can move along the axial direction of the first sleeve so as to adjust the position relative to the first sound insulation box.
5. The mask aligner noise guard of claim 4, wherein: second through holes are formed in two sides of the first sound insulation box, second sleeves are fixedly arranged in the second through holes and located in the first sound insulation box, and the second sleeves are in threaded connection with the first screw rods or the second screw rods.
6. The mask aligner noise guard of claim 1, wherein: the noise protection plate further comprises a second sound insulation box which is uniformly arranged along the longitudinal direction of the hollow thin plate at intervals.
7. The mask aligner noise guard of claim 6, wherein: the inner wall of the hollow thin plate is provided with a first rib and a second rib, and an installation groove for installing the second sound insulation box is formed between the first rib and the second rib.
8. The mask aligner noise guard of claim 6, wherein: an elastic abutting device is arranged between the first sound insulation box and the second sound insulation box.
9. The mask aligner noise guard of claim 8, wherein: the elastic abutting device comprises an inner pipe, an outer pipe outside the inner pipe and a spring used for connecting the inner pipe and the outer pipe, wherein the inner pipe is fixedly connected with the first sound insulation box, and the outer pipe is abutted to the second sound insulation box.
10. A noise guard plate for lithography machines according to any one of claims 1 to 9, wherein: the four corners of the hollow sheet are fixedly connected with right-angle plates, a third sound insulation box is encircled between the right-angle plates and the inner wall of the hollow sheet, a third through hole is formed in the third sound insulation box, and the third through hole is located on the plane where the through groove is located.
CN202110511276.6A 2021-05-11 2021-05-11 Noise protection plate of photoetching machine Withdrawn CN113176717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110511276.6A CN113176717A (en) 2021-05-11 2021-05-11 Noise protection plate of photoetching machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110511276.6A CN113176717A (en) 2021-05-11 2021-05-11 Noise protection plate of photoetching machine

Publications (1)

Publication Number Publication Date
CN113176717A true CN113176717A (en) 2021-07-27

Family

ID=76928773

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110511276.6A Withdrawn CN113176717A (en) 2021-05-11 2021-05-11 Noise protection plate of photoetching machine

Country Status (1)

Country Link
CN (1) CN113176717A (en)

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Application publication date: 20210727