CN113174577B - Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane - Google Patents
Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane Download PDFInfo
- Publication number
- CN113174577B CN113174577B CN202110456507.8A CN202110456507A CN113174577B CN 113174577 B CN113174577 B CN 113174577B CN 202110456507 A CN202110456507 A CN 202110456507A CN 113174577 B CN113174577 B CN 113174577B
- Authority
- CN
- China
- Prior art keywords
- nano
- tio
- magnetron sputtering
- cellulose
- finished product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/26—Anodisation of refractory metals or alloys based thereon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps: s1: adding TiO into the mixture 2 Preserving heat for 2-4h at 450-550 ℃, and naturally cooling after heat preservation; s2: vacuum filtering the nano cellulose suspension, drying to obtain a nano cellulose membrane, and placing the nano cellulose membrane in a magnetron sputtering device, wherein the TiO in the step S1 is used 2 Performing magnetron sputtering on the target material; s3: after the step S2 is finished, replacing the target material in the magnetron sputtering device with metal titanium, performing magnetron sputtering again to obtain a composite film semi-finished product; and S4, taking the semi-finished product of the composite film as an anode to carry out anodic oxidation, washing the prepared sample with deionized water after oxidation treatment, and naturally drying to obtain the finished product. The invention can react TiO with 2 The material and the nano-cellulose are integrated, so that the performance of the finished semiconductor material is improved.
Description
Technical Field
The invention relates to the field of semiconductor materials, in particular to porous TiO 2 An in-situ growth preparation method of a nano-cellulose network composite membrane.
Background
With the development of modern industrial technology, global environmental problems are increasingly highlighted, and people pay more attention to detection and treatment technology of pollution components in the environment. Nano titanium dioxide (TiO) 2 ) The material has the advantages of excellent photocatalytic performance, gas sensitivity, no secondary pollution and the like, and becomes one of the popular semiconductor materials. In addition, tiO due to porous irregular morphology 2 The nanotubes have a large specific surface areaAnd the surface appearance is special, so that the photocatalytic performance is improved, and more possibilities are brought. Especially under the condition of rapid development of flexible devices, how to ensure nano TiO 2 The flexible functional material is obtained on the basis of the material characteristics, which is a problem to be solved urgently.
The nano-cellulose has good biocompatibility, renewability, biodegradability and mechanical properties, and fibers are connected in a staggered manner, so that a porous structure convenient for ion and electron transmission is easily formed. Therefore, from the perspective of environmental protection and high-value utilization of renewable resources, development and application of a green renewable flexible functional composite membrane material prepared from nanocellulose as a raw material are an effective research direction.
However, the semiconductor materials for photocatalytic or sensitive performance analysis are basically processed on the substrate material by a coating method, which cannot make the catalytic material and the flexible substrate material tightly combined and is nano TiO 2 The preparation and application of the material pose obstacles.
Disclosure of Invention
The invention aims to provide porous TiO 2 An in-situ growth preparation method of a nano-cellulose network composite membrane. The invention can mix TiO with 2 The material and the nano-cellulose are integrated, so that the performance of the finished semiconductor material is improved.
In order to solve the technical problems, the technical scheme provided by the invention is as follows: porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps:
s1: mixing TiO with 2 Preserving heat for 2-4h in an environment of 450-550 ℃, and naturally cooling after heat preservation;
s2: vacuum filtering the nano cellulose suspension, drying to obtain a nano cellulose membrane, and placing the nano cellulose membrane in a magnetron sputtering device, wherein the TiO in the step S1 is used 2 Performing magnetron sputtering on the target material;
s3: after the step S2 is finished, replacing the target material in the magnetron sputtering device with metal titanium, performing magnetron sputtering again to obtain a composite film semi-finished product;
and S4, connecting the composite film semi-finished product serving as an anode to a positive electrode of a power supply for oxidation treatment, washing the prepared sample with deionized water after the oxidation treatment, and naturally drying to obtain a finished product.
The above porous TiO 2 In the step S2, the concentration of the nano-cellulose suspension is 0.05-0.3%.
Porous TiO of the foregoing 2 In-situ growth preparation method of nano cellulose network composite membrane on TiO 2 When magnetron sputtering is carried out on the target material, argon is introduced as working gas, the sputtering power is 150-350W, and the sputtering time is 30min-2h.
Porous TiO of the foregoing 2 In the step S3, argon is introduced as working gas, the sputtering power is 50-100W, and the sputtering time is 90-450S.
Porous TiO of the foregoing 2 In step S4, a semi-finished product of the composite membrane is used as an anode and connected with a power supply anode, a platinum electrode is used as a cathode and connected with a cathode, the distance between the two electrodes is 2.0-3.0cm, and an electrolyte is an ethylene glycol solution containing 0.5-0.6wt% of ammonium fluoride and 20-30wt% of deionized water; anodizing at 15-30V for 10-60min at room temperature.
Compared with the prior art, the titanium dioxide is firstly placed in a heat preservation and then cooling area under a high-temperature environment, the titanium dioxide can be prevented from cracking as a target material, the titanium dioxide target material and the metal titanium target material are uniformly sputtered onto the nanofiber membrane through magnetron sputtering, and then a finished product is prepared through an anodic oxidation method. The invention utilizes the crosslinking characteristic of nano-cellulose and TiO 2 The nanometer porous structure is obtained through in-situ growth, the integrated composite flexible membrane material can be simply and quickly obtained, the performance of the composite flexible membrane material as a semiconductor material is improved, and meanwhile, the composite flexible membrane material is promoted to be applied to the field of flexible wearable devices and can also be widely applied to the field of environmental protection research.
Drawings
FIG. 1 is a porous TiO 2 SEM top view of the nano-cellulose network composite membrane;
FIG. 2 is a porous TiO 2 A nano cellulose network composite membrane SEM side view;
FIG. 3 is a porous TiO 2 XRD pattern of nanocellulose network composite membrane.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the invention is not limited thereto.
Example 1: porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps:
s1, mixing TiO with the purity of 99.99 percent 2 Placing the target material in a muffle furnace, heating the muffle furnace to 450 ℃, preserving the temperature for 2 hours, and cooling along with the furnace to prevent the target material from cracking;
s2, carrying out vacuum filtration on 100mL of nano cellulose suspension with the concentration of 0.1%, drying to obtain a nano cellulose membrane, placing the nano cellulose membrane in a magnetron sputtering device, and annealing the TiO treated in the step 1 2 Introducing pure argon into a vacuum chamber as a target material, controlling the sputtering power to be 300W and the sputtering time to be 2h, and obtaining a raw material for preparing the nano porous material;
s3, after the step S2 is finished, replacing the target in the magnetron sputtering device with a metal titanium target with the purity of 99.99%, continuously processing the material in the step 2, introducing pure argon into a vacuum chamber, controlling the sputtering power to be 100W, and controlling the sputtering time to be 450S to obtain a semi-finished product of the composite film; sputtering a layer of metal titanium is performed to ensure that the anodic oxidation process in the step S4 is smoothly performed, because the metal titanium is conductive, an electric loop can be formed between the two electrodes, the anodic oxidation process is started, the metal titanium is oxidized into titanium dioxide, and in the subsequent anodic oxidation process, the titanium dioxide in the step S2 is continuously used as a raw material to form the nano-porous titanium dioxide on the nano-cellulose membrane in an in-situ growth mode.
S4, connecting the semi-finished product of the composite film obtained in the step S3 as an anode to a power supply anode, connecting a platinum electrode as a cathode to a cathode, wherein the distance between the two electrodes is 2.0cm, the electrolyte is a glycol solution containing 0.5wt% of ammonium fluoride and 20wt% of deionized water, and anodizing at 30V for 60min at room temperature; after the reaction is finished, the prepared sample isWashing with deionized water, and naturally drying to obtain porous TiO 40 μm in thickness 2 The nanocellulose network is compounded with the flexible film.
Upon examination, the porous TiO was shown in the SEM top view of fig. 1 and the SEM side view of fig. 2 2 Cellular porous TiO densely arranged is grown on the surface of the nano-cellulose network composite flexible film 2 And having a layered structure, tiO 2 Has an average pore diameter of 80nm.
Example 2: porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps:
s1, mixing TiO with the purity of 99.99 percent 2 Placing the target material in a muffle furnace, heating the muffle furnace to 450 ℃, preserving the temperature for 2 hours, and cooling along with the furnace to prevent the target material from cracking;
s2, carrying out vacuum filtration on 100mL of nano cellulose suspension with the concentration of 0.1%, drying to obtain a nano cellulose membrane, placing the nano cellulose membrane in a magnetron sputtering device, and annealing the TiO treated in the step 1 2 Introducing pure argon into a vacuum chamber as a target material, wherein the sputtering power is 300W, and the sputtering time is controlled to be 1h;
s3, after the step S2 is finished, replacing the target in the magnetron sputtering device with a metal titanium target with the purity of 99.99%, continuously processing the material in the step 2, introducing pure argon into a vacuum chamber, controlling the sputtering power to be 100W, and controlling the sputtering time to be 450S to obtain a semi-finished product of the composite film;
s4, connecting the semi-finished product of the composite film obtained in the step S3 as an anode to a power supply anode, connecting a platinum electrode as a cathode to a cathode, wherein the distance between the two electrodes is 2.5cm, the electrolyte is a glycol solution containing 0.5wt% of ammonium fluoride and 20wt% of deionized water, and anodizing at 20V for 60min at room temperature; after the reaction is finished, the prepared sample is washed by deionized water and naturally dried to obtain porous TiO with the thickness of 40 mu m 2 The nanocellulose network is compounded with a flexible film.
Detected, porous TiO 2 Cellular porous TiO on surface of nano-cellulose network composite flexible film 2 The average pore diameter was 70nm.
Example 3: porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps:
s1, mixing TiO with the purity of 99.99 percent 2 Placing the target material in a muffle furnace, heating the muffle furnace to 500 ℃, preserving the heat for 3 hours, and cooling along with the furnace to prevent the target material from cracking;
s2, carrying out vacuum filtration on 200mL of 0.1% nanocellulose suspension, drying to obtain a nanocellulose membrane, placing the nanocellulose membrane in a magnetron sputtering device, and carrying out annealing treatment on the TiO subjected to annealing treatment in the step 1 2 Introducing pure argon into a vacuum chamber as a target material, wherein the sputtering power is 200W, and the sputtering time is controlled to be 1h;
s3, after the step S2 is finished, replacing the target in the magnetron sputtering device with a metal titanium target with the purity of 99.99%, continuously processing the material in the step 2, introducing pure argon into a vacuum chamber, controlling the sputtering power to be 100W, and controlling the sputtering time to be 350S to obtain a semi-finished product of the composite film;
s4, connecting the semi-finished product of the composite film obtained in the step S3 as an anode to a power supply anode, connecting a platinum electrode as a cathode to a cathode, wherein the distance between the two electrodes is 2.5cm, the electrolyte is a glycol solution containing 0.6wt% of ammonium fluoride and 25wt% of deionized water, and anodizing at 15V for 30min at room temperature; after the reaction is finished, the prepared sample is washed by deionized water and naturally dried to obtain porous TiO with the thickness of 50 mu m 2 The nanocellulose network is compounded with the flexible film.
Detected, porous TiO 2 Cellular porous TiO of nano-cellulose network composite flexible film 2 The average pore diameter was 65nm.
Example 4: porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane comprises the following steps:
s1, mixing TiO with the purity of 99.99 percent 2 Placing the target material in a muffle furnace, heating the muffle furnace to 550 ℃, preserving the heat for 4 hours, and cooling along with the furnace to prevent the target material from cracking;
s2, carrying out vacuum filtration on 100mL of nano cellulose suspension with the concentration of 0.2%, drying to obtain a nano cellulose membrane, placing the nano cellulose membrane in a magnetron sputtering device, and annealing the TiO treated in the step 1 2 Introducing pure argon into a vacuum chamber as a target material, wherein the sputtering power is 300W, and the sputtering time is controlled to be 1h;
s3, after the step 2 is finished, replacing the target in the magnetron sputtering device with a metal titanium target with the purity of 99.99%, continuously processing the material in the step 2, introducing pure argon into a vacuum chamber, controlling the sputtering power to be 100W, and controlling the sputtering time to be 450S to obtain a semi-finished product of the composite film;
s4, connecting the composite membrane obtained in the step 3 with a positive electrode of a power supply, connecting a platinum electrode with a negative electrode, wherein the distance between the two electrodes is 2.5cm, the electrolyte is an ethylene glycol solution containing 0.5wt% of ammonium fluoride and 30wt% of deionized water, and anodizing at 15V for 60min at room temperature; after the reaction is finished, the prepared sample is washed by deionized water and naturally dried to obtain porous TiO with the thickness of 50 mu m 2 The nanocellulose network is compounded with a flexible film.
Detected, porous TiO 2 Honeycomb porous TiO of nano-cellulose network composite flexible film 2 The average pore diameter was 70nm.
Further, the applicant employed the porous TiO prepared in example 1 2 Subjecting the nanocellulose network composite flexible film to X-ray diffraction (XDR) to obtain porous TiO shown in figure 3 2 XRD pattern of nanocellulose network composite flexible film. As can be seen from FIG. 3, the curves in the graph are anatase phase TiO in the vicinity of 25 °, 38 °, 48 °, 55 ° and 63 ° except for the diffraction peaks (16 ° and 22 °) of nanocellulose 2 Diffraction peak of (2) and anatase phase TiO 2 The standard card is compliant. This illustrates the porous TiO produced by the process of the invention 2 The nano-cellulose network composite flexible film contains nano-cellulose crystals and anatase phase TiO 2 And (4) crystals. It can be seen that the present invention utilizes the nanocellulose crosslinking characteristics and TiO 2 The nanometer porous structure is obtained through in-situ growth, the integrated composite flexible membrane material can be simply and quickly obtained, the performance of the composite flexible membrane material as a semiconductor material is improved, and meanwhile, the composite flexible membrane material is promoted to be applied to the field of flexible wearable devices and can also be widely applied to the field of environmental protection research.
Claims (1)
1. Porous TiO 2 The in-situ growth preparation method of the nano-cellulose network composite membrane is characterized by comprising the following steps: the method comprises the following steps:
s1: adding TiO into the mixture 2 Preserving heat for 2-4h in an environment of 450-550 ℃, and naturally cooling after heat preservation;
s2: vacuum filtering the nano cellulose suspension, drying to obtain a nano cellulose membrane, and placing the nano cellulose membrane in a magnetron sputtering device, wherein the TiO in the step S1 is used 2 Performing magnetron sputtering on the target material;
s3: after the step S2 is finished, replacing the target material in the magnetron sputtering device with metal titanium, performing magnetron sputtering again to obtain a composite film semi-finished product;
s4, connecting the composite film semi-finished product serving as an anode to a positive electrode of a power supply for oxidation treatment, cleaning the prepared sample with deionized water after the oxidation treatment, and naturally drying to obtain a finished product;
in the step S2, the concentration of the nano-cellulose suspension is 0.1-0.3%;
in TiO 2 When magnetron sputtering is carried out on the target material, argon is introduced as working gas, the sputtering power is 150-350W, and the sputtering time is 30min-2h;
in the step S3, argon is introduced as working gas, the sputtering power is 50-100W, and the sputtering time is 90-450S;
step S4, connecting the semi-finished product of the composite film as an anode to a power supply anode, connecting a platinum electrode as a cathode to a cathode, wherein the distance between the two electrodes is 2.0-3.0cm, and the electrolyte is an ethylene glycol solution containing 0.5-0.6wt% of ammonium fluoride and 20-30wt% of deionized water; anodizing at 15-30V for 10-60min at room temperature.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110456507.8A CN113174577B (en) | 2021-04-23 | 2021-04-23 | Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane |
| LU501287A LU501287B1 (en) | 2021-04-23 | 2022-01-20 | METHOD FOR PREPARING POROUS TiO2 NANOCELLULOSE NETWORK COMPOSITE FILM THROUGH IN-SITU GROWTH |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110456507.8A CN113174577B (en) | 2021-04-23 | 2021-04-23 | Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113174577A CN113174577A (en) | 2021-07-27 |
| CN113174577B true CN113174577B (en) | 2023-02-07 |
Family
ID=76926527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110456507.8A Active CN113174577B (en) | 2021-04-23 | 2021-04-23 | Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113174577B (en) |
| LU (1) | LU501287B1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007224370A (en) * | 2006-02-24 | 2007-09-06 | National Institute For Materials Science | MANUFACTURING METHOD OF TiO2 SPUTTER COATING FILM |
| CN100554521C (en) * | 2008-05-29 | 2009-10-28 | 南京航空航天大学 | The room temperature preparation method of titania nanotube combined electrode |
| CN101892460A (en) * | 2010-06-22 | 2010-11-24 | 浙江大学 | Method for preparing titanium dioxide porous membrane |
| CN102623186B (en) * | 2012-04-01 | 2015-05-13 | 东华大学 | Titanium-foil-based flexible dye-sensitized solar cell and preparation method thereof |
| CN106498478B (en) * | 2016-11-22 | 2019-05-14 | 华南理工大学 | A kind of preparation method of transparent independent titanium dioxide nano-pipe array thin film |
| CN112630181B (en) * | 2020-12-15 | 2024-03-22 | 浙江科技学院 | Preparation method of ultraviolet light excited nanocellulose flexible gas sensor |
-
2021
- 2021-04-23 CN CN202110456507.8A patent/CN113174577B/en active Active
-
2022
- 2022-01-20 LU LU501287A patent/LU501287B1/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| LU501287B1 (en) | 2022-07-20 |
| CN113174577A (en) | 2021-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Malekshahi Byranvand et al. | A review on synthesis of nano-TiO2 via different methods | |
| US9518335B2 (en) | Method of fabricating improved porous metallic material and resulting structure thereof | |
| CN112310377B (en) | Battery negative electrode material and preparation method thereof | |
| CN108192247B (en) | A kind of ferroelectric polymers electric card material and preparation method thereof | |
| US20200083528A1 (en) | Linear hierarchical structure lithium titanate material, preparation and application thereof | |
| CN112957912B (en) | Multilayer selective hydrogen permeation composite membrane and preparation and application thereof | |
| WO2002049965A1 (en) | Method of forming titanium oxide film and titanium electrolytic capacitor | |
| CN113174577B (en) | Porous TiO 2 In-situ growth preparation method of nano-cellulose network composite membrane | |
| CN109326791B (en) | Linear porous lithium titanate material and preparation and product thereof | |
| JP5875035B2 (en) | Electrode member and manufacturing method thereof | |
| KR20100032841A (en) | Manufacturing method of nanotube-shaped tio2 | |
| KR101689145B1 (en) | Process of producting metal filter for water treatment using metal fiber | |
| CN109321932A (en) | Graphene and the preparation method and application thereof | |
| CN113046784A (en) | Oxygen-rich defect IrO2-TiO2Solid solution material, its preparation method and application | |
| CN116676633A (en) | Shape-adjustable Pt-TiO 2 Preparation method and application of catalyst | |
| KR20150091447A (en) | Electrochemical method of graphene oxide deposition, graphene oxide deposited substrate made by the same, and electric device including the same | |
| KR101122630B1 (en) | The preparation of V2O5 thin films using e-beam irradiation and the V2O5 thin films improved energy storage capacity | |
| RU2601904C2 (en) | Method for formation of crystal nano-porous oxide on titanium-aluminium alloy | |
| KR100819870B1 (en) | Preparation method of vanadium penoxide thin films having mesoporous structure by electrochemical deposition and vanadium penoxide thin films prepared using the same | |
| KR102099644B1 (en) | Photoanode with Tungsten oxide film and preparing method of the same | |
| JP2017128458A (en) | Oxynitride fine particle, photocatalyst for water decomposition, photocatalyst electrode for generating hydrogen and oxygen, photocatalyst module for generating hydrogen and oxygen and manufacturing method of oxynitride fine particle | |
| Taziwa et al. | A microscopy study of the effect of annealing temperature on the morphological and structural properties of titanium dioxide nanotubes fabricated on functional substrates | |
| JP4554063B2 (en) | Method for forming titanium oxide film and titanium electrolytic capacitor | |
| KR102176123B1 (en) | Method of functional surface treatment of housing for a consumer electronics device | |
| Lupiwana et al. | Structural, morphological, topographical characterization of titanium dioxide nanotubes metal substrates for solar cell application |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |