CN113161482A

CN113161482A - Integrated inductor

Info

Publication number: CN113161482A
Application number: CN202010015031.XA
Authority: CN
Inventors: 罗正玮; 张介斌; 黄凯易; 叶达勳
Original assignee: Realtek Semiconductor Corp
Current assignee: Realtek Semiconductor Corp
Priority date: 2020-01-07
Filing date: 2020-01-07
Publication date: 2021-07-23

Abstract

The present disclosure relates to integrated inductors. An integrated inductor includes a first winding and a second winding, and has a first terminal, a second terminal, and a node. The first winding takes the first end point and the node as two end points and comprises a first coil and a second coil, and the first coil and the second coil are not overlapped. The second winding takes the second end point and the node as two end points and comprises a third coil and a fourth coil, and the third coil and the fourth coil are not overlapped. The first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges. The first coil is surrounded by the third coil, and the fourth coil is surrounded by the second coil.

Description

Integrated inductor

Technical Field

The present invention relates to integrated inductors, and more particularly, to integrated inductors having high symmetry.

Background

The inductor is a main component of the transformer, and the inductor and the transformer are important components for implementing single-ended to differential signal conversion, signal coupling, impedance matching, and the like in the rf integrated circuit. As integrated circuits (ics) are developed into System on Chip (SoC), integrated inductors (ic) have gradually replaced conventional discrete components and are widely used in radio frequency integrated circuits. The layout of the integrated inductor greatly affects the characteristics of the integrated inductor (such as inductance and quality factor, Q, etc.), so that designing a highly symmetrical integrated inductor is an important issue.

Disclosure of Invention

In view of the deficiencies of the prior art, it is an object of the present invention to provide an integrated inductor.

The invention discloses an integrated inductor. The integrated inductor comprises a first winding and a second winding, and has a first end point, a second end point and a node. The first winding takes the first end point and the node as two end points and comprises a first coil and a second coil, and the first coil and the second coil are not overlapped. The second winding takes the second end point and the node as two end points and comprises a third coil and a fourth coil, and the third coil and the fourth coil are not overlapped. The first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges. The integrated inductor is substantially symmetrical about an axis of symmetry that does not overlap the first, second, third, and fourth coils, and the first and second terminals are located on different sides of the axis of symmetry.

The invention further discloses an integrated inductor. The integrated inductor comprises a first winding and a second winding, and has a first end point, a second end point and a node. The first winding takes the first end point and the node as two end points and comprises a first coil and a second coil, and the first coil and the second coil are not overlapped. The second winding takes the second end point and the node as two end points and comprises a third coil and a fourth coil, and the third coil and the fourth coil are not overlapped. The first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges. The first coil is surrounded by the third coil, and the fourth coil is surrounded by the second coil.

Compared with the prior art, the integrated inductor has excellent symmetry, so that the integrated inductor has better component characteristics and performance.

The features, implementations and functions of the present invention will be described in detail with reference to the drawings.

Drawings

FIGS. 1A-1C illustrate an integrated inductor structure according to an embodiment of the present invention;

FIGS. 2A-2B are two windings of the integrated inductor of FIG. 1;

fig. 3 is a structure of an integrated inductor according to an embodiment of the present invention;

fig. 4 is a structure of an integrated inductor according to another embodiment of the present invention;

FIG. 5 is a graph showing the relationship between the inductance and the frequency of two sub-inductors of the integrated inductor according to the present invention;

FIGS. 6A-6C illustrate integrated inductor structures according to another embodiment of the present invention; and

fig. 7A-7C show integrated inductor structures according to another embodiment of the present invention.

Detailed Description

The technical terms in the following description refer to conventional terms in the technical field, and some terms are explained or defined in the specification, and the explanation of the terms is based on the explanation or definition in the specification.

The present disclosure includes an integrated inductor. Since some of the components included in the integrated inductor of the present invention may be known components alone, the following description will omit details of the known components without affecting the full disclosure and feasibility of the present invention.

Fig. 1A-1C show an integrated inductor structure according to an embodiment of the invention. The integrated inductor 100 is implemented in a first conductive layer and a second conductive layer of a semiconductor structure. In some embodiments, the first conductive layer may be one of an ultra-thick metal (UTM) layer and a redistribution layer (RDL), and the second conductive layer is the other of the UTM and the RDL. Fig. 1A shows a complete structure of the integrated inductor 100, fig. 1B shows a layout of the integrated inductor 100 on a first conductive layer, and fig. 1C shows a layout of the integrated inductor 100 on a second conductive layer. The line segments or traces (trace) of the integrated inductor 100 are located in the first conductive layer except for the bridging line segment 145 and the jumper line segment 195. The crossover segment 145 and the crossover segment 195 connect the line segments of the first conductor layer through a via structure, which may be a via (via) or a via array (via array).

As shown in fig. 1A, the integrated inductor 100 has a highly symmetrical structure. More specifically, the integrated inductor 100 is substantially symmetrical to the horizontal symmetry axis R1H and the vertical symmetry axis R1V (the horizontal symmetry axis R1H and the vertical symmetry axis R1V are substantially perpendicular to each other). Terminal 111 and terminal 161 are two terminals of the integrated inductor 100, and reference numeral 102 represents a node of the integrated inductor 100. After the signal (i.e., current) enters the integrated inductor 100 from the terminal 111, it flows through the integrated inductor 100 in the following order: the outer circle on the right side of vertical axis of symmetry R1V (i.e., mostly dark gray line segment) → the inner circle on the left side of vertical axis of symmetry R1V (dark gray line segment) → crossover line segment 145 → dark gray line segment between crossover line segment 145 and node 102 → the outer circle on the left side of vertical axis of symmetry R1V (i.e., mostly light gray line segment) → crossover line segment 195 → the inner circle on the right side of vertical axis of symmetry R1V (light gray line segment) → a small light gray line segment on the left side of vertical axis of symmetry R1V → exit the integrated inductor 100 by endpoint 161. In other words, the current direction 151 of the right half of the integrated inductor 100 is different from the current direction 152 of the left half of the integrated inductor 100 (one is clockwise and the other is counterclockwise), so that the magnetic field generated by the integrated inductor 100 is less divergent, thereby avoiding affecting other components or the integrated inductor 100 from being affected by external magnetic fields.

Integrated inductor 100 can be considered to be formed of two windings (winding): winding 110 (fig. 2A) and winding 160 (fig. 2B). Winding 110 includes the dark gray trace and jumper segments 145 of fig. 1A, while winding 160 includes the light gray trace and jumper segments 195 of fig. 1A. The terminal 111 and the node 102 are two terminals of the winding 110, and the terminal 161 and the node 102 are two terminals of the winding 160. In other words, winding 110 and winding 160 are connected through node 102. In some embodiments, the length of the trace between node 102 and endpoint 111 is substantially equal to the length of the trace between node 102 and endpoint 161; in other words, the total length of the traces of the winding 110 is substantially equal to the total length of the traces of the winding 160. The current entering the integrated inductor 100 flows through all of one of the

windings

110 and 160, then flows into the other through the node 102, and then flows through all of the other. As shown in fig. 2A and 2B, since the

windings

110 and 160 have substantially equal lengths of traces on the first conductive layer and substantially equal lengths of traces on the second conductive layer (i.e., the

jumper segments

145 and 195 have substantially equal lengths), the

windings

110 and 160 are electrically symmetrical.

Winding 110 includes coil (coil)120 and coil 130. The coil 120 and the coil 130 are connected through a cross structure 140, and the coil 120 and the coil 130 do not overlap. The direction of current flow in coil 120 is opposite to the direction of current flow in coil 130 (one clockwise and the other counterclockwise). Winding 110 is symmetrical about horizontal axis of symmetry R1H, but is asymmetrical about vertical axis of symmetry R1V. The horizontal axis of symmetry R1H overlaps with the

coils

120 and 130, but the vertical axis of symmetry R1V does not overlap with the

coils

120 and 130.

The winding 160 includes a coil 170 and a coil 180. The coil 170 and the coil 180 are connected by a cross structure 190, and the coil 170 and the coil 180 do not overlap. The direction of the current flow of coil 170 is opposite to the direction of the current flow of coil 180. The direction of current flow for coil 170 is the same as the direction of current flow for coil 120, and the direction of current flow for coil 180 is the same as the direction of current flow for coil 130. The windings 160 are symmetrical about the horizontal axis of symmetry R1H, but are asymmetrical about the vertical axis of symmetry R1V. The horizontal axis of symmetry R1H overlaps with the

coils

170 and 180, but the vertical axis of symmetry R1V does not overlap with the

coils

170 and 180.

As shown in fig. 2A and 2B, the coil 120 and the coil 180 have substantially the same size (i.e., the line segments or traces of the two are substantially equal in length), and the coil 130 and the coil 170 have substantially the same size (i.e., the line segments or traces of the two are substantially equal in length).

Referring to fig. 1A, fig. 2A and fig. 2B, the coil 120 and the coil 170 have an overlapping range and the coil 170 surrounds the coil 120, and the coil 130 and the coil 180 have an overlapping range and the coil 130 surrounds the coil 180. In other words, the area enclosed by coil 120 (e.g., about the area of dashed box 125) overlaps the area enclosed by coil 170 (e.g., about the area of dashed box 175). Similarly, the area encompassed by coil 130 overlaps the area encompassed by coil 180. Coil 120, coil 130, coil 170, and coil 180 are all of a single turn structure, such that integrated inductor 100 is of a two turn structure on each of the left and right sides (relative to vertical axis of symmetry R1V).

As shown in fig. 1A, the terminal 111, the terminal 161 and the node 102 are located on the same side of the integrated inductor 100 (i.e., below the horizontal symmetry axis R1H), and the coil 120 is located between the terminal 111 and the terminal 161. Furthermore, the

end points

111 and 161 are located on different sides of the vertical symmetry axis R1V.

The through structure on the terminal 161 is used for signal (i.e. current) feed-in (feed-in) or feed-out (feed-out). In other embodiments, the through structure may be implemented on the terminal 111 to improve the electrical symmetry of the

windings

110 and 160. As shown in fig. 3, the terminal 111 is connected to the extension line segment 112 through the through structure, the terminal 161 is connected to the extension line segment 162 through the through structure, and the current is fed into or out of the integrated inductor 100 through the extension line segment 112 and the extension line segment 162. The line segment 112 and the line segment 162 are located on different sides of the vertical axis of symmetry R1V. Referring to fig. 2B and fig. 3, the extension segment 162 intersects the coil 170.

Fig. 4 is a structure of an integrated inductor according to an embodiment of the present invention. Fig. 4 shows a complete structure of the integrated inductor 200, wherein the integrated inductor 200 is implemented in a first conductive layer and a second conductive layer. The segments or traces of the integrated inductor 200 are located in the first conductive layer except for the crossover segment 222, the crossover segment 245 and the crossover segment 295.

As shown in fig. 4, the integrated inductor 200 is substantially symmetrical to the horizontal symmetry axis R2H and the vertical symmetry axis R2V (the horizontal symmetry axis R2H and the vertical symmetry axis R2V are substantially perpendicular to each other). The

terminals

211 and 261 are two terminals of the integrated inductor 200, and the reference numeral 202 represents a node of the integrated inductor 200. Integrated inductor 200 is similar to integrated inductor 100 with the difference that the two windings of integrated inductor 200 are connected through crossover segment 222, and node 202 is located on crossover segment 222. Other features of the integrated inductor 200 can be understood by those skilled in the art from fig. 2A-2B and the related description, and thus are not described in detail. In some embodiments, the terminal 261 may extend downward to facilitate signal feeding or signal feeding; in this case, the jumper segment 222 crosses a segment directly connecting the end points 261, i.e. the jumper segment 222 crosses one of the coils of one of the windings (winding represented by light grey segment) of the integrated inductor 200.

When the integrated inductor 100 and the integrated inductor 200 are applied to a single-ended signal (single-ended signal), signals are not fed in or out from the node 102 and the node 202. When the integrated inductor 100 and the integrated inductor 200 are applied to a differential signal (differential signal), the node 102 and the node 202 are respectively used as a center tap (center tap) of the integrated inductor 100 and the integrated inductor 200, and the center tap is coupled to or receives a common mode voltage of the differential signal. When the integrated inductor 100 and the integrated inductor 200 are applied to a differential signal, the winding 110 forms one sub-inductor of the integrated inductor 100, and the winding 160 forms the other sub-inductor of the integrated inductor 100. Similarly, the integrated inductor 200 includes two sub-inductors. Since the integrated inductor 100 and the integrated inductor 200 have excellent symmetry in structure, the two sub-inductors of the integrated inductor 100 and the integrated inductor 200 are extremely electrically matched. Fig. 5 shows the relationship between the inductance values of the two sub-inductors and the frequency, and the inductance values of the two sub-inductors are almost equal in the range of the frequency less than 30 GHz. In other words, the two sub-inductances of the integrated inductance of the present invention are fairly matched.

Fig. 6A-6C show integrated inductor structures according to another embodiment of the present invention. Fig. 6A shows a complete structure of the integrated inductor 600, in which the integrated inductor 600 is implemented in a first conductive layer and a second conductive layer of a semiconductor structure, and most of the line segments or traces of the integrated inductor 600 are located in the first conductive layer.

As shown in fig. 6A, the integrated inductor 600 is a highly symmetrical structure. More specifically, the integrated inductor 600 is substantially symmetrical to the horizontal symmetry axis R6H and the vertical symmetry axis R6V (the horizontal symmetry axis R6H and the vertical symmetry axis R6V are substantially perpendicular to each other). Terminal 611 and terminal 661 are two terminals of the integrated inductor 600, and reference numeral 602 represents a node of the integrated inductor 600. After entering integrated inductor 600 from terminal 611, the signal (i.e., current) flows through complete winding 610 (as shown in fig. 6B), passes through node 602, then flows through complete winding 660 (as shown in fig. 6C), and finally exits integrated inductor 600 from terminal 661. A person skilled in the art can know the detailed current path of the integrated inductor 600 from the above description of the integrated inductor 100, and therefore will not be described in detail. In other words, the current direction 651 of the right half of the integrated inductor 600 is different from the current direction 652 of the left half of the integrated inductor 600 (one clockwise and the other counter-clockwise).

Integrated inductor 600 can be viewed as being made up of two windings: winding 610 (fig. 6B) and winding 660 (fig. 6C). End 611 and node 602 are the two ends of winding 610, while end 661 and node 602 are the two ends of winding 660. In other words, winding 610 and winding 660 are connected through node 602. In some embodiments, the length of the trace between node 602 and endpoint 611 is substantially equal to the length of the trace between node 602 and endpoint 661; in other words, the total length of the trace of winding 610 is substantially equal to the total length of the trace of winding 660. As shown in fig. 6B and 6C, since the

windings

610 and 660 have substantially equal lengths of traces on the first conductor layer and substantially equal lengths of traces on the second conductor layer, the

windings

610 and 660 are electrically symmetrical.

Winding 610 includes coil 620 and coil 630. The

coils

620 and 630 are connected by a cross structure 640, and the

coils

620 and 630 do not overlap. The direction of the current flow in coil 620 is opposite to the direction of the current flow in coil 630. Winding 610 is symmetric about horizontal axis of symmetry R6H, but asymmetric about vertical axis of symmetry R6V. The horizontal symmetry axis R6H overlaps with the

coils

620 and 630, but the vertical symmetry axis R6V does not overlap with the

coils

620 and 630.

Winding 660 includes coil 670 and coil 680. Coil 670 and coil 680 are connected by crossover 690, and coil 670 and coil 680 do not overlap. The direction of the current in coil 670 is opposite to the direction of the current in coil 680. The direction of current flow for coil 670 is the same as the direction of current flow for coil 620 and the direction of current flow for coil 680 is the same as the direction of current flow for coil 630. Winding 660 is symmetric about horizontal axis of symmetry R6H, but asymmetric about vertical axis of symmetry R6V. The horizontal symmetry axis R6H overlaps with the

coils

670 and 680, but the vertical symmetry axis R6V does not overlap with the

coils

670 and 680.

Referring to fig. 6A, 6B and 6C, coil 620 and coil 670 have overlapping ranges and coil 670 surrounds coil 620, and coil 630 and coil 680 have overlapping ranges and coil 630 surrounds coil 680. In other words, the area enclosed by coil 620 (e.g., about the area of dashed box 625) overlaps the area enclosed by coil 670 (e.g., about the area of dashed box 675). Similarly, the area encompassed by coil 630 overlaps the area encompassed by coil 680. Coil 620, coil 630, coil 670 and coil 680 are all two-turn structures, such that integrated inductor 600 has four-turn structures on each of the left and right sides (relative to vertical axis of symmetry R6V). In other embodiments, the

coils

620, 630, 670 and 680 can be four, six, eight, etc. even-numbered coils, and those skilled in the art can understand the implementation variations based on the above disclosure, so that further description of the embodiments is omitted.

Referring to fig. 6A, 6B and 6C, the coil 630 includes a first sub-coil (i.e., an outer ring formed by a line segment outside the dashed frame 635) and a second sub-coil (i.e., an inner ring formed by a line segment inside the dashed frame 635), the coil 680 includes a third sub-coil (i.e., an outer ring formed by a line segment outside the dashed frame 685) and a fourth sub-coil (i.e., an inner ring formed by a line segment inside the dashed frame 685), and the first sub-coil, the second sub-coil, the third sub-coil and the fourth sub-coil are sequentially arranged from outside to inside. In other words, the outer turn of coil 680 is surrounded by the inner turn of coil 630. Similarly, the outer turns of coil 620 are surrounded by the inner turns of coil 670.

As shown in fig. 6B and 6C, the outer and inner turns of coil 620 are substantially equal in size to the outer and inner turns of coil 680, respectively, and the outer and inner turns of coil 630 are substantially equal in size to the outer and inner turns of coil 670, respectively.

As shown in fig. 6A, the terminal 611, the terminal 661 and the node 602 are located on the same side of the integrated inductor 600 (i.e., below the horizontal symmetry axis R6H), and the node 602 is located between the terminal 611 and the terminal 661. Furthermore, the

ends

611 and 661 are located on different sides of the vertical axis of symmetry R6V.

The through structure on the terminal 661 is used for feeding signal (i.e. current) into or out of the circuit. In other embodiments, a through structure may be implemented on the end point 611 to improve the symmetry of the

windings

610 and 660 in electrical terms. For details of the implementation, refer to fig. 3 and the related description.

Fig. 7A-7C show integrated inductor structures according to another embodiment of the present invention. Fig. 7A shows a complete structure of the integrated inductor 700, in which the integrated inductor 700 is implemented in a first conductive layer and a second conductive layer of a semiconductor structure, and most of the line segments or traces of the integrated inductor 700 are located in the first conductive layer.

As shown in fig. 7A, the integrated inductor 700 is a highly symmetrical structure. More specifically, the integrated inductor 700 is substantially symmetrical about the horizontal symmetry axis R7H and the vertical symmetry axis R7V (the horizontal symmetry axis R7H and the vertical symmetry axis R7V are substantially perpendicular to each other). Terminal 711 and terminal 761 are two terminals of the integrated inductor 700, and reference numeral 702 represents a node of the integrated inductor 700. After entering the integrated inductor 700 from the terminal 711, the signal (i.e., current) flows through the complete winding 710 (as shown in fig. 7B), passes through the node 702, then flows through the complete winding 760 (as shown in fig. 7C), and finally exits the integrated inductor 700 from the terminal 761. A person skilled in the art can know the detailed current path of the integrated inductor 700 from the above description of the integrated inductor 100, and therefore will not be described in detail. In other words, the current direction 751 of the right half of the integrated inductor 700 is different from the current direction 752 of the left half of the integrated inductor 700 (one clockwise and the other counter-clockwise).

The integrated inductor 700 can be viewed as being made up of two windings: winding 710 (fig. 7B) and winding 760 (fig. 7C). Terminal 711 and node 702 are the two terminals of winding 710, while terminal 761 and node 702 are the two terminals of winding 760. In other words, winding 710 and winding 760 are connected via node 702. In some embodiments, the length of the trace between node 702 and end 711 is substantially equal to the length of the trace between node 702 and end 761; in other words, the total length of the traces of the winding 710 is substantially equal to the total length of the traces of the winding 760. As shown in fig. 7B and 7C, since the

windings

710 and 760 have substantially equal length of traces in the first conductive layer and substantially equal length of traces in the second conductive layer, the

windings

710 and 760 are electrically symmetrical.

Winding 710 includes coil 720 and coil 730. The coil 720 and the coil 730 are connected by a cross structure 740, and the coil 720 and the coil 730 do not overlap. The direction of the current flow in coil 720 is opposite to the direction of the current flow in coil 730. Winding 710 is symmetrical about horizontal axis of symmetry R7H, but is asymmetrical about vertical axis of symmetry R7V. The horizontal symmetry axis R7H overlaps with the

coils

720 and 730, but the vertical symmetry axis R7V does not overlap with the

coils

720 and 730.

Winding 760 includes coil 770 and coil 780. Coil 770 and coil 780 are connected through crossover structure 790, and coil 770 and coil 780 do not overlap. The direction of current flow to coil 770 is opposite to the direction of current flow to coil 780. The direction of current flow for coil 770 is the same as the direction of current flow for coil 720 and the direction of current flow for coil 780 is the same as the direction of current flow for coil 730. Winding 760 is symmetric about horizontal axis of symmetry R7H, but asymmetric about vertical axis of symmetry R7V. The horizontal symmetry axis R7H overlaps with the coil 770 and the coil 780, but the vertical symmetry axis R7V does not overlap with the coil 770 and the coil 780.

Referring to fig. 7A, 7B and 7C, the coil 720 and the coil 770 have an overlapping range and the coil 770 surrounds the coil 720, and the coil 730 and the coil 780 have an overlapping range and the coil 730 surrounds the coil 780. In other words, the area encompassed by coil 720 (e.g., about the area of dashed box 725) overlaps the area encompassed by coil 770 (e.g., about the area of dashed box 775). Similarly, the area encompassed by coil 730 overlaps with the area encompassed by coil 780. Coil 720, coil 730, coil 770 and coil 780 are all two-turn structures, so that integrated inductor 700 is four-turn structures on each of the left and right sides (relative to vertical symmetry axis R7V). In other embodiments, the

coils

720, 730, 770 and 780 can be four, six, eight, etc. even-numbered coils, and those skilled in the art can understand the implementation variations based on the above disclosure, so that further description of the embodiments is omitted.

Referring to fig. 7A, 7B and 7C, the coil 730 includes a first sub-coil (i.e., an outer ring formed by a line segment outside the dashed frame 735) and a second sub-coil (i.e., an inner ring formed by a line segment inside the dashed frame 735), the coil 780 includes a third sub-coil (i.e., an outer ring formed by a line segment outside the dashed frame 785) and a fourth sub-coil (i.e., an inner ring formed by a line segment inside the dashed frame 785), and the first sub-coil, the third sub-coil, the second sub-coil and the fourth sub-coil are sequentially arranged from outside to inside. In other words, the sub-coils of coil 730 are interleaved with the sub-coils of coil 780. Similarly, the sub-coils of coil 720 are staggered with respect to the sub-coils of coil 770.

As shown in fig. 7B and 7C, the outer and inner turns of coil 720 are substantially equal in size to the outer and inner turns of coil 780, respectively, and the outer and inner turns of coil 730 are substantially equal in size to the outer and inner turns of coil 770, respectively.

As shown in fig. 7A, the terminal 711, the terminal 761 and the node 702 are located on the same side of the integrated inductor 700 (i.e., below the horizontal symmetry axis R7H), and the node 702 is located between the terminal 711 and the terminal 761. Furthermore, the end 711 and the end 761 are located on different sides of the vertical axis of symmetry R7V.

The through structure on the terminal 761 is used for feeding signal (i.e. current) into or out of the circuit. In other embodiments, a through structure may be implemented on the terminal 711 to improve the electrical symmetry of the

windings

710 and 760. For details of the implementation, refer to fig. 3 and the related description.

Although the coils of the embodiments disclosed above are illustrated as being square, the invention is not limited thereto, and the coils may be other polygonal or circular.

Since the details and variations of the present invention can be understood by those skilled in the art from the disclosure of the present invention, the repetitive description is omitted here for the sake of avoiding unnecessary detail without affecting the disclosure requirements and the feasibility of the present invention. It should be noted that the shapes, sizes and proportions of the elements in the drawings are illustrative only and are not intended to be limiting, since those skilled in the art will understand the present invention.

Although the embodiments of the present invention have been described above, these embodiments are not intended to limit the present invention, and those skilled in the art can make variations on the technical features of the present invention according to the explicit or implicit contents of the present invention, and all such variations may fall within the scope of the patent protection sought by the present invention.

Description of the symbols

100. 200, 600, 700 integrated inductor

145. 195, 222, 245, 295 jumper segments

111. 161, 211, 261, 611, 661, 711, 761 end points

102. 202, 602, 702 node

151. 152, 651, 652, 751, 752 current direction

110. 160, 610, 660, 710, 760 windings

120. 130, 170, 180, 620, 630, 670, 680, 720, 730, 770, 780 coils

140. 190, 640, 690, 740, 790 Cross Structure

125. 175, 625, 675, 635, 685, 725, 775, 735, 785 dashed boxes

112. 162 line segment

R1H, R2H, R6H and R7H horizontal symmetry axis

R1V, R2V, R6V and R7V are perpendicular to the symmetry axis

Claims

1. An integrated inductor having a first terminal, a second terminal, and a node, the integrated inductor comprising:

a first winding, having the first end and the node as two ends, and comprising a first coil and a second coil, wherein the first coil and the second coil do not overlap; and

a second winding having the second end and the node as two ends and comprising a third coil and a fourth coil, wherein the third coil and the fourth coil do not overlap;

wherein the first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges;

wherein the integrated inductor is substantially symmetric about an axis of symmetry that does not overlap the first, second, third, and fourth coils, and the first and second endpoints are on different sides of the axis of symmetry.

2. The integrated inductor of claim 1, wherein the first coil is surrounded by the third coil and the fourth coil is surrounded by the second coil.

3. The integrated inductor of claim 1, wherein the first coil and the second coil are connected through a first cross structure, and the third coil and the fourth coil are connected through a second cross structure.

4. The integrated inductor of claim 1, further comprising:

and the extension line segment is connected with the first end point and is crossed with the first coil or the second coil.

5. The integrated inductor of claim 1, further comprising:

a crossover section connecting the first winding and the second winding through a through structure, wherein the node is located at the crossover section.

6. The integrated inductor of claim 1, wherein the axis of symmetry is a first axis of symmetry, the first winding is substantially symmetric about a second axis of symmetry, the second winding is substantially symmetric about the second axis of symmetry, and the first axis of symmetry and the second axis of symmetry are substantially perpendicular to each other.

7. The integrated inductor of claim 1, wherein the first terminal, the second terminal, and the node are located on a same side of the integrated inductor, and the node is located between the first terminal and the second terminal.

8. The integrated inductor of claim 1, wherein the first coil, the second coil, the third coil, and the fourth coil are even turns.

9. The integrated inductor of claim 1, wherein the first coil has a first sub-coil and a second sub-coil, the third coil has a third sub-coil and a fourth sub-coil, and the first sub-coil and the second sub-coil are surrounded by the third sub-coil and the fourth sub-coil.

10. An integrated inductor having a first terminal, a second terminal, and a node, the integrated inductor comprising:

wherein the first coil is surrounded by the third coil and the fourth coil is surrounded by the second coil.