CN113156778A - Illumination module convenient to adjust depth of field - Google Patents
Illumination module convenient to adjust depth of field Download PDFInfo
- Publication number
- CN113156778A CN113156778A CN202110469486.3A CN202110469486A CN113156778A CN 113156778 A CN113156778 A CN 113156778A CN 202110469486 A CN202110469486 A CN 202110469486A CN 113156778 A CN113156778 A CN 113156778A
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- China
- Prior art keywords
- lens
- collimating lens
- depth
- field
- lighting module
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70125—Use of illumination settings tailored to particular mask patterns
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
- Y02B20/40—Control techniques providing energy savings, e.g. smart controller or presence detection
Abstract
The invention discloses a lighting module convenient for adjusting depth of field, which comprises a collimating lens group, a converging lens, a diaphragm, an installation cylinder and a pressing ring, wherein the collimating lens group comprises a first collimating lens which is a concave-convex lens; the second collimating lens is a biconvex lens; the third collimating lens is a biconvex lens; the fourth collimating lens is a plano-convex lens; when the depth of field of the illumination module convenient for adjusting the depth of field needs to be adjusted, the pressing ring only needs to be screwed off from the mounting cylinder, and the diaphragm in the mounting cylinder can be taken out and replaced by different diaphragms so as to adjust the depth of field, so that the depth of field of the illumination module is convenient to adjust.
Description
Technical Field
The present disclosure relates to optical lenses, and particularly to an illumination module with adjustable depth of field.
Background
In micro-processing fields such as micro-electronics, optics, circuit boards and the like, the ultraviolet exposure machine has very important application. The traditional mask exposure machine uses a large-size parallel ultraviolet light source plus a mask exposure form. The existing maskless exposure machine adopts a structure of a light source, a light source collimation system, a DMD chip and a projection module. However, the existing lighting module cannot adjust the depth of field or is inconvenient to operate when the depth of field is adjusted.
Disclosure of Invention
In order to overcome the disadvantages of the prior art, an object of the present invention is to provide an illumination module with convenient operation when adjusting the depth of field.
One of the purposes of the invention is realized by adopting the following technical scheme:
a lighting module convenient for adjusting depth of field comprises a collimating lens group, a converging lens, an aperture, an installation cylinder and a pressing ring, wherein the collimating lens group comprises first collimating lenses which are sequentially arranged, and the first collimating lenses are concave-convex lenses; a second collimating lens, which is a biconvex lens; a third collimating lens, which is a biconvex lens; a fourth collimating lens, which is a plano-convex lens; the convergent lens is a biconvex lens, the diaphragm is positioned between the second collimating lens and the third collimating lens, the diaphragm is installed in the installation cylinder, and the pressing ring is matched with the installation cylinder to prevent the diaphragm from being separated from the installation cylinder.
Furthermore, the lighting module convenient for adjusting the depth of field further comprises a sleeve, the third collimating lens and the fourth collimating lens are mounted in the sleeve, and the sleeve is mounted in the mounting cylinder and located between the aperture and the pressing ring.
Furthermore, the lighting module convenient for adjusting the depth of field further comprises a lens barrel, and the first collimating lens and the second collimating lens are mounted on the lens barrel.
Furthermore, the lighting module convenient for adjusting the depth of field further comprises a light homogenizing rod, the lens barrel and the sleeve are positioned on the same straight line, and the lens barrel is positioned between the light homogenizing rod and the sleeve.
Further, the pressing ring is in threaded fit with the mounting cylinder.
Furthermore, the first collimating lens is a concave surface close to the object plane and a convex surface close to the image plane, and the curvature radius of the concave surface is larger than that of the convex surface.
Further, the curvature radius of the second collimating lens close to the object plane is larger than that close to the image plane.
Furthermore, the third collimating lens is a convex surface close to the object plane and a concave surface close to the image plane, and the curvature radius of the convex surface is greater than that of the concave surface.
Furthermore, the fourth collimating lens is a plane close to the object plane and a convex plane close to the image plane.
Further, the curvature radius of the converging lens close to the object plane is equal to the curvature radius of the converging lens close to the image plane.
Compared with the prior art, when the depth of field of the illumination module convenient for adjusting the depth of field needs to be adjusted, the pressing ring only needs to be screwed off from the mounting cylinder, and the diaphragm in the mounting cylinder can be taken out and replaced by different diaphragms, so that the depth of field is adjusted conveniently, and therefore the depth of field of the illumination module is adjusted conveniently.
Drawings
FIG. 1 is a light path diagram of an illumination module of the present invention that facilitates depth of field adjustment;
FIG. 2 is a perspective view of the lighting module of FIG. 1 facilitating depth of field adjustment;
FIG. 3 is a cross-sectional view of the lighting module of FIG. 2 facilitating depth of field adjustment;
FIG. 4 is a perspective view of a portion of the illumination module of FIG. 2 facilitating depth of field adjustment;
fig. 5 is a partial exploded view of the lighting module of fig. 4 for facilitating depth of field adjustment.
In the figure: 20. a lens barrel; 30. mounting the cylinder; 40. a sleeve; 50. pressing a ring; 60. a collimating lens group; 61. a first collimating lens; 62. a second collimating lens; 63. a third collimating lens; 64. a fourth collimating lens; 70. a converging lens; 80. an aperture; 90. an adapter; 100. a light homogenizing rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present, secured by intervening elements. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly disposed on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 5, an illumination module for adjusting depth of field conveniently according to the present invention includes a lens barrel 20, a mounting barrel 30, a sleeve 40, a pressing ring 50, a collimating lens group 60, a converging lens 70, an aperture 80, an adaptor 90, and a light homogenizing rod 100. The object plane of the illumination module is a light emergent surface of the dodging rod 100, and the image plane is a DMD chip.
The object plane may be located in front of collimating lens group 60 and the image plane is located behind converging lens 70. If the object plane is behind the converging lens 70 and the image plane is in front of the collimating lens group 60, the order of lens arrangement is unchanged, and the lenses are turned over by 180 degrees. Taking the first collimating lens 61 as an example, the first collimating lens 61 is a meniscus lens, the object plane is located in front of the collimating lens group 60, and when the image plane is located behind the converging lens 70, the position of the first collimating lens 61 close to the object plane is a concave surface, and the position close to the image plane is a convex surface. If the object plane is located behind the converging lens 70 and the image plane is located in front of the collimating lens group 60, the first collimating lens 61 is still concave near the object plane and convex near the image plane after being turned over by 180 degrees. That is, the range of the radius of curvature of the lens toward the object plane is the same whether the object plane is located in front of the collimating lens group 60 or behind the converging lens 70, and correspondingly, the range of the radius of curvature of the lens toward the image plane is the same.
The collimating lens group 60 includes a first collimating lens 61, a second collimating lens 62, a third collimating lens 63, and a fourth collimating lens 64. The first collimating lens 61 is a concave-convex lens, the first collimating lens 61 is a concave surface close to the object plane and a convex surface close to the image plane, and the curvature radius of the concave surface is larger than that of the convex surface. The second collimating lens 62 is a biconvex lens, and the radius of curvature of the second collimating lens 62 near the object plane is larger than the radius of curvature near the image plane. The third collimating lens 63 is a convex-concave lens, the third collimating lens 63 is a convex surface close to the object plane and a concave surface close to the image plane, and the curvature radius of the convex surface is larger than that of the concave surface. The fourth collimating lens 64 is a plano-convex lens, and the fourth collimating lens 64 is a plane near the object plane and a convex near the image plane.
The converging lens 70 is a biconvex lens, and the radius of curvature of the converging lens 70 near the object plane is equal to the radius of curvature near the image plane.
It should be noted that, the descriptions of the first collimating lens 61, the second collimating lens 62, and the fourth collimating lens 64, the first, the second, and the like are only for distinguishing the naming modes of the lenses, and do not represent the arrangement order.
Preferably, the range of the curvature radius R of the lighting module for conveniently adjusting the depth of field is as follows:
object side of the first collimating lens 61: 5mm < R <7.5mm, image side of the first collimating lens 61: 4mm < R <6.5 mm;
object side of the second collimator lens 62: 110mm < R <140mm, image side of the second collimating lens 62: 11mm < R <15 mm;
object side of the third collimator lens 63: 8.5mm < R <11mm, image side of the third collimator lens 63: 7.5mm < R <9.5 mm;
object side of the fourth collimator lens 64: infinity, image side of the fourth collimating lens 64: 23mm < R <27 mm;
object side of the condensing lens 70: 80mm < R <95mm, image side of the converging lens 70: 80mm < R <95 mm.
The lens is made of flint glass, crown glass or other materials.
In the following, specific examples are described, and the parameters of the lighting module are as follows:
| name (R) | Surface of lens | Radius of curvature | Center thickness | Material nd | Material vd |
| Article surface | Plane surface | ∞ | 3 | ||
| |
Concave surface | 6.802 | 3 | 1.5168 | 64.212 |
| Convex surface | 4.83 | 1.35 | |||
| |
Convex surface | 129.63 | 2.5 | 1.5168 | 64.212 |
| Convex surface | 13 | 9 | |||
| |
Convex surface | 9.6 | 4 | 1.5168 | 64.212 |
| Concave surface | 8.35 | 3.45 | |||
| |
Plane surface | ∞ | 2.5 | 1.5168 | 64.212 |
| Convex surface | 25.32 | 61.8 | |||
| Converging |
Convex surface | 86.23 | 6 | 1.5168 | 64.212 |
| Convex surface | 86.23 | 136 | |||
| Image plane | Plane surface | ∞ | 0 |
When the illumination module for adjusting the depth of field is assembled, the first collimating lens 61 and the second collimating lens 62 are mounted on the lens barrel 20. The third collimating lens 63 and the fourth collimating lens 64 are mounted to the sleeve 40. The diaphragm 80 and the sleeve 40 are mounted in the mounting tube 30, and the pressing ring 50 is mounted at the bottom of the mounting tube 30 to prevent the diaphragm 80 and the sleeve 40 from being separated from the mounting tube 30. The sleeve 40 is now located between the diaphragm 80 and the clamping ring 50. The light equalizing rod 100, the lens barrel 20, the mounting cylinder 30 and the adaptor 90 are sequentially mounted to each other and located on a straight line. The converging lens 70 is mounted to an adapter 90.
And carrying out optical detection on the illumination module convenient for adjusting the depth of field, wherein the wavelength of a detection light source is 405 nm. Detection shows that the field curvature aberration is small and the distortion is small. The telecentricity curve of the image plane center of the exposure lens is within 0.3mrad, and the exposure lens has very good telecentricity.
When the depth of field needs to be adjusted, only the pressing ring 50 needs to be screwed off from the mounting cylinder 30, and the diaphragm 80 in the mounting cylinder 30 can be taken out and replaced by different diaphragms 80, so that the depth of field can be adjusted conveniently, and therefore the depth of field of the lighting module is adjusted conveniently.
The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, variations and modifications can be made without departing from the spirit of the invention, and all equivalent modifications and changes can be made to the above embodiments according to the essential technology of the invention, which falls into the protection scope of the invention.
Claims (10)
1. The utility model provides a lighting module convenient to adjust depth of field, includes collimating lens group and convergent lens, its characterized in that: the illumination module convenient for adjusting the depth of field further comprises an aperture, an installation cylinder and a pressing ring, the collimating lens group comprises first collimating lenses which are arranged in sequence, and the first collimating lenses are concave-convex lenses; a second collimating lens, which is a biconvex lens; a third collimating lens, which is a biconvex lens; a fourth collimating lens, which is a plano-convex lens; the convergent lens is a biconvex lens, the diaphragm is positioned between the second collimating lens and the third collimating lens, the diaphragm is installed in the installation cylinder, and the pressing ring is matched with the installation cylinder to prevent the diaphragm from being separated from the installation cylinder.
2. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the lighting module convenient for adjusting the depth of field further comprises a sleeve, the third collimating lens and the fourth collimating lens are arranged in the sleeve, and the sleeve is arranged in the mounting cylinder and located between the aperture and the pressing ring.
3. The lighting module of claim 2, wherein: the lighting module convenient for adjusting the depth of field further comprises a lens barrel, and the first collimating lens and the second collimating lens are mounted on the lens barrel.
4. The lighting module of claim 3, wherein: the illumination module convenient for adjusting the depth of field further comprises a light homogenizing rod, the lens cone and the sleeve are located on the same straight line, and the lens cone is located between the light homogenizing rod and the sleeve.
5. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the pressing ring is in threaded fit with the mounting cylinder.
6. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the first collimating lens is a concave surface close to the object plane and a convex surface close to the image plane, and the curvature radius of the concave surface is larger than that of the convex surface.
7. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the curvature radius of the second collimating lens close to the object plane is larger than that of the second collimating lens close to the image plane.
8. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the third collimating lens is a convex surface close to the object surface and a concave surface close to the image surface, and the curvature radius of the convex surface is larger than that of the concave surface.
9. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the fourth collimating lens is a plane close to the object plane and a convex plane close to the image plane.
10. The lighting module for facilitating depth of field adjustment of claim 1, wherein: the curvature radius of the converging lens close to the object plane is equal to the curvature radius of the converging lens close to the image plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110469486.3A CN113156778B (en) | 2021-04-28 | 2021-04-28 | Lighting module convenient to adjust depth of field |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110469486.3A CN113156778B (en) | 2021-04-28 | 2021-04-28 | Lighting module convenient to adjust depth of field |
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| Publication Number | Publication Date |
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| CN113156778A true CN113156778A (en) | 2021-07-23 |
| CN113156778B CN113156778B (en) | 2023-06-02 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN204575984U (en) * | 2015-05-21 | 2015-08-19 | 秦皇岛本征晶体科技有限公司 | Two waveband laser alignment camera lens |
| CN111736439A (en) * | 2020-07-24 | 2020-10-02 | 苏州天准科技股份有限公司 | Laser direct imaging optical system |
| CN111811431A (en) * | 2020-06-12 | 2020-10-23 | 北京天远三维科技股份有限公司 | Three-dimensional scanner, three-dimensional scanning system and method |
| CN212410941U (en) * | 2020-06-14 | 2021-01-26 | 钟文奇 | Telecentric lens focusing adjusting device |
| CN112422807A (en) * | 2019-08-23 | 2021-02-26 | 上海光启智城网络科技有限公司 | Method for adjusting depth of field range |
| CN112435286A (en) * | 2020-07-11 | 2021-03-02 | 海南蓝瑞科技有限公司 | Method for measuring dimension of fish based on optical image |
-
2021
- 2021-04-28 CN CN202110469486.3A patent/CN113156778B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204575984U (en) * | 2015-05-21 | 2015-08-19 | 秦皇岛本征晶体科技有限公司 | Two waveband laser alignment camera lens |
| CN112422807A (en) * | 2019-08-23 | 2021-02-26 | 上海光启智城网络科技有限公司 | Method for adjusting depth of field range |
| CN111811431A (en) * | 2020-06-12 | 2020-10-23 | 北京天远三维科技股份有限公司 | Three-dimensional scanner, three-dimensional scanning system and method |
| CN212410941U (en) * | 2020-06-14 | 2021-01-26 | 钟文奇 | Telecentric lens focusing adjusting device |
| CN112435286A (en) * | 2020-07-11 | 2021-03-02 | 海南蓝瑞科技有限公司 | Method for measuring dimension of fish based on optical image |
| CN111736439A (en) * | 2020-07-24 | 2020-10-02 | 苏州天准科技股份有限公司 | Laser direct imaging optical system |
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| CN113156778B (en) | 2023-06-02 |
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