CN113155402B - Gas hydrostatic bearing micro-gap gas film flow field observation device - Google Patents

Gas hydrostatic bearing micro-gap gas film flow field observation device Download PDF

Info

Publication number
CN113155402B
CN113155402B CN202110231050.0A CN202110231050A CN113155402B CN 113155402 B CN113155402 B CN 113155402B CN 202110231050 A CN202110231050 A CN 202110231050A CN 113155402 B CN113155402 B CN 113155402B
Authority
CN
China
Prior art keywords
bearing
gas
light
gap
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110231050.0A
Other languages
Chinese (zh)
Other versions
CN113155402A (en
Inventor
陈国达
张伟
卢奇
陈燚杰
葛一帆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University of Technology ZJUT
Original Assignee
Zhejiang University of Technology ZJUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University of Technology ZJUT filed Critical Zhejiang University of Technology ZJUT
Priority to CN202110231050.0A priority Critical patent/CN113155402B/en
Publication of CN113155402A publication Critical patent/CN113155402A/en
Application granted granted Critical
Publication of CN113155402B publication Critical patent/CN113155402B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M9/00Aerodynamic testing; Arrangements in or on wind tunnels
    • G01M9/06Measuring arrangements specially adapted for aerodynamic testing
    • G01M9/065Measuring arrangements specially adapted for aerodynamic testing dealing with flow
    • G01M9/067Measuring arrangements specially adapted for aerodynamic testing dealing with flow visualisation

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)

Abstract

A gas hydrostatic bearing micro-gap gas film flow field observation device comprises a gas source system, a bearing system and a laser observation system, wherein the gas source system comprises a compressor for generating high-pressure gas, a trace particle generator for generating trace particles and a trace particle box for forming high-pressure trace particle mixed gas; the air outlet end of the tracer particle box is connected with the bearing system through an air pressure sensor; the bearing system comprises a bearing thrust plate and a bearing surface which are horizontally arranged up and down, and a bearing air film gap is formed between the bearing thrust plate and the bearing surface; the laser observation system comprises a first beam group and a second beam group, wherein the light paths of the first beam group and the second beam group are mutually vertical, and the first beam group, the bearing air film gap, the light filtering concave lens, the microscope objective and the high-speed camera are sequentially and coaxially arranged. The invention adopts a pinhole imaging principle, takes the outlet boundary of the bearing air film gap as an imaging pinhole, and utilizes the filtering concave lens to change the light path into parallel light to observe the flow field.

Description

Gas hydrostatic bearing micro-gap gas film flow field observation device
Technical Field
The invention relates to the technical field of ultra-precision gas bearing lubrication, in particular to a device for observing a micro-gap gas film flow field of a gas hydrostatic bearing.
Background
The aerostatic bearing is widely applied to the fields of aerospace, precision instruments, ultra-precision machine tools and the like. The aerostatic bearing gas film flow field has a significant impact on the performance of the bearing. However, the gas film gap is very small, which is very unfavorable for on-line observation, thereby influencing the deep study of the gas film flow field characteristics. Therefore, the existing research at home and abroad basically researches the gas film flow field characteristics of the aerostatic bearing from the aspects of theoretical analysis and numerical simulation, and the research based on experiments is very few. The observation experiment of the gas film flow field of the aerostatic bearing has very important significance for really knowing the flow field characteristics and the influence of the flow field characteristics on the bearing performance. Therefore, it is necessary to develop a gas film flow field observation device for a gas hydrostatic bearing.
Chinese patent No. CN201511028940.2 discloses an observation device for gas flow field in aerostatic bearing and a method for using the same, which uses the conventional PIV technology to observe the internal gas flow field. However, since the device irradiates a flow field through a laser beam through the bearing surface, transparent glass or novel plastic must be selected as a material, and the material limits the inlet pressure and has a certain difference with the gas film flow field of the actual aerostatic bearing. Secondly, because the laser can shine the particle through the bearing surface, let the light that the particle reflected receive and form images through the bearing surface again, can produce the refraction of light and the loss of luminous intensity, influence formation of image quality, cause the distortion of image, lead to great experimental error.
Disclosure of Invention
In order to overcome the problems, the invention provides a device for observing a gas film flow field of a micro-gap of a gas hydrostatic bearing.
The technical scheme adopted by the invention is as follows: a gas hydrostatic bearing micro-gap gas film flow field observation device comprises a gas source system, a bearing system and a laser observation system;
the gas source system comprises a compressor (1) for generating high-pressure gas, a trace particle generator (6) for generating trace particles, and a trace particle box (9) for forming high-pressure trace particle mixed gas; the compressor (1) is connected with the gas storage tank (3) through a gas pipe I (2), the gas storage tank (3) is connected with a first gas inlet end of the tracer particle box (9) through a gas pipe II (4), and a valve I (5) is arranged on the gas pipe II (4); the tracer particle generator (6) is connected with a second air inlet end of the tracer particle box (9) through an air pipe III (7), and a valve II (8) is arranged on the air pipe III (7); the air outlet end of the tracer particle box (9) is connected with an air pressure sensor (12) through an air pipe IV (11), and a valve III (10) is arranged on the air pipe IV (11);
the bearing system comprises a bearing thrust plate (13) and a bearing surface (17) which are horizontally arranged up and down, and a bearing air film gap is formed between the bearing thrust plate (13) and the bearing surface (17); a bearing air inlet hole is formed in the center of the bearing thrust plate (13), the other end of the air pressure sensor (12) is connected with the bearing air inlet hole of the bearing thrust plate (13) and is communicated with the bearing air film gap, and the high-pressure trace particle mixed gas forms an air film in the bearing air film gap through the air pressure sensor (12);
the laser observation system comprises a first light beam group and a second light beam group, wherein the light paths of the first light beam group and the second light beam group are perpendicular to each other, the first light beam group comprises a light source II (21) and a condenser II (20) which are arranged on the left side of the bearing air film gap, and the condenser II (20) focuses a first light beam emitted by the light source II (21) to the bearing air film gap; the second light beam group comprises a light source I (18) and a collecting lens I (19) which are arranged on the front side of the bearing air film gap, and the collecting lens I (19) focuses the second light beam emitted by the light source I (18) to the bearing air film gap; the light colors of the second light beam and the first light beam are respectively two different colors of red, green and blue; the first light beam enters the air film from the left end of the bearing air film gap, the second light beam enters the air film from the front end of the bearing air film gap, and the second light beam is perpendicular to the first light beam; taking the outlet boundary at the right end of the bearing gas film gap as a small hole, and emitting the trace particles in the gas film along the small hole by reflected light which is irradiated and superposed by the first light beam and the second tube bundle to form small hole imaging; a light filtering concave lens (16), a microscope objective lens (15) and a high-speed camera (14) are sequentially arranged on the right side of the bearing air film gap, and a light source II (21), a condenser lens II (20), the bearing air film gap, the light filtering concave lens (16), the microscope objective lens (15) and the high-speed camera (14) are coaxially arranged; the filtering concave lens (16) filters out interference light emitted from the small hole, and filters out color light formed by combining the second light beam and the first light beam; the image filtered by the concave filter lens (16) is amplified by the micro objective lens (15), and the high-speed camera (14) is used for shooting.
Further, the size of the bearing air film gap is 10-30 μm.
Further, the diameter of the tracer particles is less than 1 μm.
Furthermore, the light source I (18) and the light source II (21) are continuous light sources or high-frequency pulse light sources.
Furthermore, the bearing thrust plate (13) and the bearing surface (17) are made of opaque metal materials.
The invention has the beneficial effects that:
1) the invention adopts a pinhole imaging principle, takes the outlet boundary of the gas film as an imaging pinhole, and utilizes the filtering concave lens to change the light path into parallel light to observe the flow field.
2) The invention adopts two laser sources, which can effectively compensate the weakening of imaging brightness caused by undersize of the hole in pinhole imaging.
3) The invention adopts two laser sources with different light colors, filters out the reflected light of a single color through the light filtering concave lens, and only filters out the synthesized colored light, thereby effectively reducing the interference in the experimental imaging and improving the accuracy of the experiment.
4) The invention can adopt opaque metal materials to manufacture the observation device, can realize the effective observation of the micro-gap gas film flow field of the gas hydrostatic bearing, has high observation quality, and can truly reflect the gas film flow field characteristics of the actual gas hydrostatic bearing.
Drawings
Fig. 1 is a schematic structural view of the present invention.
FIG. 2 is a top view of the laser vision system and bearing system of the present invention
Description of reference numerals: the method comprises the following steps of 1-a compressor, 2-an air pipe I, 3-an air storage tank, 4-an air pipe II, 5-a valve I, 6-a tracer particle generator, 7-an air pipe III, 8-a valve II, 9-a tracer particle box, 10-a valve III, 11-an air pipe IV, 12-an air pressure sensor, 13-a bearing thrust plate, 14-a high-speed camera, 15-a microscope objective, 16-a filter concave lens, 17-a bearing surface, 18-a light source I, 19-a condenser I, 20-a condenser II, 21-a light source II.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments, but not all embodiments, of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the orientations or positional relationships indicated as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., appear based on the orientations or positional relationships shown in the drawings only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" as appearing herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to the attached drawings, the device for observing the flow field of the micro-gap gas film of the aerostatic bearing comprises a gas source system, a bearing system and a laser observation system;
the gas source system comprises a compressor 1 for generating high-pressure gas, a trace particle generator 6 for generating trace particles, and a trace particle box 9 for forming high-pressure trace particle mixed gas; the compressor 1 is connected with the gas storage tank 3 through a gas pipe I2, the gas storage tank 3 is connected with a first gas inlet end of the tracer particle box 9 through a gas pipe II 4, and a valve I5 is arranged on the gas pipe II 4; the tracer particle generator 6 is connected with a second air inlet end of the tracer particle box 9 through an air pipe III 7, and a valve II 8 is arranged on the air pipe III 7; the air outlet end of the tracing particle box 9 is connected with an air pressure sensor 12 through an air pipe IV 11, and a valve III 10 is arranged on the air pipe IV 11;
the bearing system comprises a bearing thrust plate 13 and a bearing surface 17 which are horizontally arranged up and down, a bearing air film gap is formed between the bearing thrust plate 13 and the bearing surface 17, and the bearing thrust plate 13 and the bearing surface 17 can be made of metal non-transparent materials so as to be convenient to observe; the bearing air film gap is kept at 10-30 μm; a bearing air inlet hole is formed in the center of the bearing thrust plate 13, the other end of the air pressure sensor 12 is connected with the bearing air inlet hole of the bearing thrust plate 13 and is communicated with the bearing air film gap, a high-pressure trace particle mixed gas forms an air film in the bearing air film gap through the air pressure sensor 12, and trace particles are selected from particles with the diameter smaller than 1 mu m;
the laser observation system comprises a first light beam group and a second light beam group, wherein the light paths of the first light beam group and the second light beam group are perpendicular to each other, the first light beam group comprises a light source II 21 and a condenser II 20 which are arranged on the left side of the bearing air film gap, and the condenser II 20 focuses a first light beam emitted by the light source II 21 to the bearing air film gap; the second light beam group comprises a light source I18 and a collecting lens I19 which are arranged on the front side of the bearing air film gap, and the collecting lens I19 focuses the second light beam emitted by the light source I18 to the bearing air film gap; the light colors of the second light beam and the first light beam are respectively two different colors of red, green and blue; the first light beam enters the air film from the left end of the bearing air film gap, the second light beam enters the air film from the front end of the bearing air film gap, and the second light beam is perpendicular to the first light beam; taking the outlet boundary at the right end of the bearing gas film gap as a small hole, and emitting the trace particles in the gas film along the small hole by reflected light which is irradiated and superposed by the first light beam and the second tube bundle to form small hole imaging; the right side of the bearing air film gap is sequentially provided with a light filtering concave lens 16, a microscope objective lens 15 and a high-speed camera 14, and a light source II 21, a condenser lens II 20, the bearing air film gap, the light filtering concave lens 16, the microscope objective lens 15 and the high-speed camera 14 are coaxially arranged; the filter concave lens 16 filters out the interference light emitted from the small hole, and filters out the color light formed by combining the second light beam and the first light beam; the image filtered by the concave filter lens 16 is magnified by the microscope objective lens 15, and the high-speed camera 14 is used for photographing.
The specific working principle is as follows: referring to fig. 1, the bearing air film gap outlet boundary formed by the aerostatic bearing thrust plate and the bearing surface is regarded as a small hole, light reflected by trace particles irradiated by a light source is emitted along the small hole by using a small hole imaging principle to form small hole imaging, interference light (the interference light generally only presents the light color of laser) is filtered by the filter concave lens, and the interference of an imaging result is effectively reduced and the imaging accuracy is improved only by the synthesized color light (the field is irradiated by two beams of laser together). The right side of the bearing air film gap is provided with the light filtering concave lens, the microscope objective and the high-speed camera from left to right respectively, the microscope objective can amplify images filtered by the light filtering concave lens, and then the high-speed camera shoots the images, so that clearer images can be obtained conveniently. The filter concave lens, the microscope objective and the high-speed camera can be wholly adjusted in position along the longitudinal direction in the horizontal plane (namely, the filter concave lens, the microscope objective and the high-speed camera are inward or outward perpendicular to the plane), and can also be respectively translated in the horizontal plane in the transverse direction (namely, the filter concave lens, the microscope objective and the high-speed camera are leftward or rightward parallel to the plane), so that the focal length is adjusted, and a clearer image is obtained.
Referring to fig. 2, a light source i and a light source ii, which are composed of two laser emitters, respectively irradiate the trace particles in the micro gap through a condenser i and a condenser ii, which are matched with each other, together to form an image. The condenser lens can reduce the diameter of laser facula and improve imaging precision. The two light sources adopt two colors of three primary colors (red, green and blue) of light, when the two light sources irradiate simultaneously, the overlapped part of the irradiation can generate different colors, when the pinhole imaging is completed, the light reflected by the particles in other areas in the same time is ensured to be filtered only through the color under the action of the filter concave lens, so that the precision of the final imaging can be ensured, and the high-quality imaging result can be obtained. In addition, the two light sources are independent and vertical light sources, the light sources can respectively move along the boundary direction of the bearing air film gap to achieve the purpose of irradiating different positions of the air film gap, and the right-end filter concave lens, the microscope objective and the high-speed camera correspondingly move, so that the air film flow field states of different positions in the bearing air film gap can be observed, and finally, the analysis method can be used for analyzing the air film flow field characteristics.
The embodiments described in this specification are merely illustrative of implementations of the inventive concept and the scope of the present invention should not be considered limited to the specific forms set forth in the embodiments but rather by the equivalents thereof as may occur to those skilled in the art upon consideration of the present inventive concept.

Claims (5)

1. The utility model provides a aerostatic bearing micro-gap air film flow field observation device which characterized in that: the device comprises an air source system, a bearing system and a laser observation system;
the gas source system comprises a compressor (1) for generating high-pressure gas, a trace particle generator (6) for generating trace particles, and a trace particle box (9) for forming high-pressure trace particle mixed gas; the compressor (1) is connected with the gas storage tank (3) through a gas pipe I (2), the gas storage tank (3) is connected with a first gas inlet end of the tracer particle box (9) through a gas pipe II (4), and a valve I (5) is arranged on the gas pipe II (4); the tracer particle generator (6) is connected with a second air inlet end of the tracer particle box (9) through an air pipe III (7), and a valve II (8) is arranged on the air pipe III (7); the air outlet end of the tracer particle box (9) is connected with an air pressure sensor (12) through an air pipe IV (11), and a valve III (10) is arranged on the air pipe IV (11);
the bearing system comprises a bearing thrust plate (13) and a bearing surface (17) which are horizontally arranged up and down, and a bearing air film gap is formed between the bearing thrust plate (13) and the bearing surface (17); a bearing air inlet hole is formed in the center of the bearing thrust plate (13), the other end of the air pressure sensor (12) is connected with the bearing air inlet hole of the bearing thrust plate (13) and is communicated with the bearing air film gap, and the high-pressure trace particle mixed gas forms an air film in the bearing air film gap through the air pressure sensor (12);
the laser observation system comprises a first light beam group and a second light beam group, wherein the light paths of the first light beam group and the second light beam group are perpendicular to each other, the first light beam group comprises a light source II (21) and a condenser II (20) which are arranged on the left side of the bearing air film gap, and the condenser II (20) focuses a first light beam emitted by the light source II (21) to the bearing air film gap; the second light beam group comprises a light source I (18) and a collecting lens I (19) which are arranged on the front side of the bearing air film gap, and the collecting lens I (19) focuses the second light beam emitted by the light source I (18) to the bearing air film gap; the light colors of the second light beam and the first light beam are respectively two different colors of red, green and blue; the first light beam enters the air film from the left end of the bearing air film gap, the second light beam enters the air film from the front end of the bearing air film gap, and the second light beam is perpendicular to the first light beam; taking the outlet boundary at the right end of the bearing gas film gap as a small hole, and emitting the trace particles in the gas film along the small hole by reflected light which is irradiated and superposed by the first light beam and the second tube bundle to form small hole imaging; a light filtering concave lens (16), a microscope objective lens (15) and a high-speed camera (14) are sequentially arranged on the right side of the bearing air film gap, and a light source II (21), a condenser lens II (20), the bearing air film gap, the light filtering concave lens (16), the microscope objective lens (15) and the high-speed camera (14) are coaxially arranged; the filtering concave lens (16) filters out interference light emitted from the small hole, and filters out color light formed by combining the second light beam and the first light beam; the image filtered by the concave filter lens (16) is amplified by the micro objective lens (15), and the high-speed camera (14) is used for shooting.
2. The aerostatic bearing micro-gap gas film flow field observing device of claim 1, wherein: the size of the bearing air film gap is 10-30 μm.
3. The aerostatic bearing micro-gap gas film flow field observing device of claim 1, wherein: the diameter of the tracer particles is less than 1 μm.
4. The aerostatic bearing micro-gap gas film flow field observing device of claim 1, wherein: the light source I (18) and the light source II (21) are continuous light sources or high-frequency pulse light sources.
5. The aerostatic bearing micro-gap gas film flow field observing device of claim 1, wherein: the bearing thrust plate (13) and the bearing surface (17) are made of opaque metal materials.
CN202110231050.0A 2021-03-02 2021-03-02 Gas hydrostatic bearing micro-gap gas film flow field observation device Active CN113155402B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110231050.0A CN113155402B (en) 2021-03-02 2021-03-02 Gas hydrostatic bearing micro-gap gas film flow field observation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110231050.0A CN113155402B (en) 2021-03-02 2021-03-02 Gas hydrostatic bearing micro-gap gas film flow field observation device

Publications (2)

Publication Number Publication Date
CN113155402A CN113155402A (en) 2021-07-23
CN113155402B true CN113155402B (en) 2022-04-19

Family

ID=76884055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110231050.0A Active CN113155402B (en) 2021-03-02 2021-03-02 Gas hydrostatic bearing micro-gap gas film flow field observation device

Country Status (1)

Country Link
CN (1) CN113155402B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012103041A (en) * 2010-11-08 2012-05-31 Mitsui Eng & Shipbuild Co Ltd Visualizing device and visualizing method for fluid flows
CN206618556U (en) * 2017-03-06 2017-11-07 浙江工业大学 A kind of non-contacting gas hydrostatic spindle air film flow field test system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012103041A (en) * 2010-11-08 2012-05-31 Mitsui Eng & Shipbuild Co Ltd Visualizing device and visualizing method for fluid flows
CN206618556U (en) * 2017-03-06 2017-11-07 浙江工业大学 A kind of non-contacting gas hydrostatic spindle air film flow field test system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
均压槽结构形状对静压干气密封性能影响分析;赵艳凤等;《摩擦学学报》;20170930;第37卷(第5期);全文 *

Also Published As

Publication number Publication date
CN113155402A (en) 2021-07-23

Similar Documents

Publication Publication Date Title
CN207717594U (en) A kind of light path and detection system of flow cytometer
CN207336917U (en) Microscope
CN105269147B (en) Three-dimensional vacuum laser machining device and method for carrying out laser machining through device
CN106018280B (en) A kind of while measuring speed field and concentration field device and method
CN207516234U (en) A kind of device of optical projection tomography
CN102743159B (en) Optical projection tomographic imaging system
CN202639649U (en) Laser welding processing head
DE102011054914A1 (en) Method and arrangement for illuminating a sample
CN104568873B (en) A kind of laser scanning co-focusing microscope being imaged to fluorescent material
CN107764781A (en) Second harmonic micro imaging system based on bessel beam shaping pulse
CN106199941A (en) A kind of shift frequency light field microscope and three-dimensional super-resolution microcosmic display packing
CN101590570A (en) A kind of method of welding tube type heat exchanger by using laser scanning and device
CN207689370U (en) Second harmonic micro imaging system based on bessel beam shaping pulse
DE202011110077U1 (en) Arrangement for illuminating a sample
CN104502255A (en) Three-dimensional imaging flow cytometer device
CN113155402B (en) Gas hydrostatic bearing micro-gap gas film flow field observation device
CN108303402A (en) A kind of micro- scan imaging method of big visual field salt free ligands Bezier mating plate and system
WO2020207215A1 (en) Portable miniature fluorescence microscope
CN112924392B (en) Measuring method and measuring system device for measuring optical gain coefficient of nano material in micro-area
CN104777602B (en) It is a kind of to bore optical tweezer classification with hollow optic fibre and collect the device of air PM2.5 particles
CN104279984A (en) Two-photon-method-based device and method for measuring smooth free-form surface sample
CN110108232B (en) Three-mode digital holographic microscopic imaging system
CN109690381A (en) Observe device
CN109765684B (en) Multi-light-path multi-azimuth real-time microscopic imaging system
CN205880366U (en) Incoherent light source does not have diffracted beam imaging system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant