CN113148940B - Microchannel radiator with comb-shaped baffling convex structure and preparation method thereof - Google Patents
Microchannel radiator with comb-shaped baffling convex structure and preparation method thereof Download PDFInfo
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- CN113148940B CN113148940B CN202110055749.6A CN202110055749A CN113148940B CN 113148940 B CN113148940 B CN 113148940B CN 202110055749 A CN202110055749 A CN 202110055749A CN 113148940 B CN113148940 B CN 113148940B
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- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0083—Temperature control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
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- B81B7/009—Maintaining a constant temperature by heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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Abstract
The invention provides a microchannel radiator with comb-shaped baffling raised structures, which comprises a microchannel substrate, wherein the microchannel substrate comprises a plurality of microchannels which are arranged in parallel at intervals, the cross section of each microchannel along the height direction is in an inverted trapezoid shape, and the two side wall surfaces of each microchannel are periodically staggered with the comb-shaped baffling raised structures, so that the heat exchange area can be remarkably increased, the normal flow of fluid can be damaged, the turbulent flow can be enhanced, and the enhanced heat exchange can be realized. During preparation, an imprinting mold core with a reverse comb-like structure is processed; aligning and positioning the mold core and the substrate, and obtaining a micro-channel matrix with a comb-like baffling bulge structure through hot stamping; and finally, sealing and packaging the micro-channel radiator to obtain the micro-channel radiator. The invention solves the difficult problem of one-step processing and forming of the large-area special-shaped micro-channels of the array, and has the advantages of simple process, low cost and high efficiency.
Description
Technical Field
The invention relates to a heat exchanger for heat transfer, in particular to a microchannel radiator with a comb-shaped baffling convex structure and a manufacturing method thereof.
Background
Micro devices, such as microreactors, micromixers, microfluidic chips, microelectromechanical systems, etc., are widely used in fields of biomedical science, electronic information, optical conduction, etc., due to their small size, high integration, etc. The size of the micro device is continuously reduced, and the heating power is increasingly larger, so that the heat flux density of unit area is greatly improved, and the product failure problem caused by high heat flux density is increasingly serious. The microchannel radiator is considered as an effective means for solving the problem of high heat flux of the micro device, and is characterized in that cooling working medium flows through an internal microchannel, and high-efficiency heat dissipation is realized through convective heat exchange between the wall surface of the microchannel and fluid, so that the temperature of the micro device is effectively reduced. The prior microchannel radiator is mainly processed in metal substrates such as aluminum, copper and the like or semiconductors such as silicon and the like, and the microchannels are generally in parallel rectangular, triangular, V-shaped and trapezoidal structures, so that the heat exchange effect can be inhibited when the flowing working medium thermal boundary layer fully develops. The micro-channel with the baffling structure can destroy the normal flow of fluid, interrupt the development of a thermal boundary layer of a cooling working medium and strengthen turbulent flow; meanwhile, the effective heat exchange area is increased, and the enhanced heat exchange is realized, so that the heat transfer effect of the microchannel radiator is improved.
The key point of the heat transfer enhancement microchannel radiator is to enhance the processing of the microchannels. At present, the micro-channel processing method mainly comprises micro-cutting, etching, laser processing, electric spark processing, electrochemical processing and the like. However, the micro-cutting technology has the defects of limited machining precision, expensive etching technology equipment, great difficulty in laser machining on a three-dimensional complex micro-channel, low electric spark machining and electrochemical machining rates, low machining efficiency, difficulty in one-step forming, relatively complex process and the like when the method is used for forming the special-shaped micro-channel. Imprinting technology is an emerging technology that uses a piece of original template with a micro-scale surface pattern, which is aligned to press into a substrate material, and cured by changing environmental conditions to form a high-precision microstructure. Imprint techniques can be classified into thermal curing imprint and ultraviolet curing imprint according to different curing modes. The ultraviolet curing imprinting has higher flexibility, is limited by illumination conditions, has limited one-time forming area and has relatively higher requirements on equipment; the thermal curing stamping (hot stamping for short) has the advantages of large-area single-pass processing of the array, high efficiency, low cost and the like, and has simple process, low equipment requirement and easy realization. Therefore, the hot embossing technique is more suitable for processing the special-shaped micro-channel structure. However, currently, hot embossing methods are mainly aimed at processing polymers and glass substrates, and the preparation of micro-channels on metal substrates is rarely reported.
Disclosure of Invention
The invention aims to overcome the defects of the prior researches, and provides a microchannel radiator with a comb-tooth-shaped baffling convex structure, which can destroy the normal flow of fluid, interrupt the development of a cooling working medium thermal boundary layer, strengthen turbulent flow, increase the effective heat exchange area and realize intensified heat exchange.
The invention further aims to provide a manufacturing method of the microchannel radiator with the comb-tooth-shaped baffling convex structure, which can realize single-channel hot embossing forming of the opposite microchannel array and realize high-efficiency and low-cost processing forming of the enhanced heat transfer microchannel radiator.
The invention is realized by the following technical scheme:
the microchannel radiator with the comb-shaped baffling protruding structures comprises a microchannel substrate, wherein the microchannel substrate comprises a plurality of microchannels which are arranged in parallel at intervals in an array mode, the cross section of each microchannel along the height direction is inverted trapezoid, and the two side wall surfaces of each microchannel are periodically staggered with the comb-shaped baffling protruding structures.
In a preferred embodiment: the cross section of the micro-channel is in an isosceles inverted trapezoid, the height is 1mm-2mm, the depth-to-width ratio is 1:1-2:1, and the die drawing included angle of the two side wall surfaces of the trapezoid is 10 degrees to 30 degrees.
In a preferred embodiment: the comb-shaped baffling convex structure has a draft angle of 10-30 degrees and a height of 1-2 mm.
In a preferred embodiment: the top surface and the bottom surface of the comb-shaped baffling convex structure are rectangular, triangular or semicircular.
In a preferred embodiment: the micro-channel material is one of aluminum and copper.
The invention also provides a manufacturing method of the microchannel radiator with the comb-shaped baffling convex structure, which comprises the following steps:
(1) Preparing a hot embossing mold core matched with a micro-channel with a comb-shaped baffling convex structure;
(2) Preparing a layer of super-hydrophobic coating on the mold core, and performing hot embossing mold core anti-sticking treatment;
(3) Selecting a metal substrate which is cleaned, decontaminated and dried;
(4) The metal base plate is arranged in a die sleeve of the hot-pressing die through alignment and positioning and is positioned above the hot-pressing die core;
(5) The lower heating flat plate of the hot press is moved upwards to push the lower die and the die core of the hot pressing die, so as to press the substrate, and meanwhile, the substrate is heated for a certain time to be subjected to hot stamping;
(6) Releasing pressure, cooling, and demolding the substrate from the mold core to obtain a micro-channel matrix with a comb-shaped baffling convex structure;
(7) And sealing and packaging the microchannel substrate with the comb-tooth-shaped baffling convex structure, the inlet and outlet runner cavity and the upper cover plate, and connecting the microchannel substrate with an external connecting pipe and a water pump into a whole to finally obtain the complete microchannel radiator.
In a preferred embodiment: the hot stamping temperature in the step (5) is 100-500 ℃, the stamping pressure is 5-25 Mpa, and the stamping time is 5-30 min.
In a preferred embodiment: the die core material in the step (1) is one of die steel, heat-resistant steel and alloy steel.
In a preferred embodiment: the hot-pressing die comprises a lower die, an upper die, a die core, a die sleeve and a spring; the upper surface of the mold core is processed into a reverse structure matched with a micro-channel with a comb-shaped baffling convex structure, and the lower surface is flat; the die sleeve is hollow, and the size of the hollow cavity is the same as the size of the periphery of the die core and the base plate; the lower die is provided with a boss structure, and the size and shape of the boss top surface are the same as those of the die core bottom surface; the upper die is also provided with a boss structure, and the size and the shape of the boss structure are the same as those of the bottom surface of the substrate.
Compared with the prior art, the invention has the remarkable advantages that:
(1) The comb-tooth-shaped baffling bulge structure can destroy the normal flow of fluid, interrupt the development of a thermal boundary layer of a cooling working medium and strengthen turbulent flow; meanwhile, the effective heat exchange area is increased, so that the heat exchange is obviously enhanced.
(2) The hot press forming processing method of the comb-shaped baffling bulge structure has the advantages of large-area single-pass processing of an array, high efficiency, low cost and the like, and is simple in process, low in equipment requirement and easy to realize, so that the difficult problem of processing and forming of the special-shaped micro-channels is solved.
Drawings
Fig. 1: schematic diagram of a micro-channel radiator with comb-shaped baffle bulge structure;
fig. 2: an isometric view of a micro-channel matrix with a comb-shaped baffling bulge structure;
fig. 3: a top view of the micro-channel matrix with a comb-shaped baffling convex structure;
fig. 4: a cross section A-A of a micro-channel matrix with a comb-shaped baffling bulge structure;
fig. 5: a cross section B-B of the micro-channel matrix with a comb-shaped baffling bulge structure;
fig. 6: a longitudinal section C-C section view of the micro-channel matrix with a comb-shaped baffling bulge structure;
fig. 7: an isometric view of a micro-channel matrix mold core with a comb-shaped baffling convex structure.
In the figure: 1. heating the flat plate on the hot press; 2. an upper die; 3. a spring; 4. a die sleeve; 5. a microchannel substrate; 6. a mold core; 7. a lower die; 8. heating the flat plate under a hot press; 9. an upper cover plate; 10. and an inlet and outlet runner cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present invention are within the protection scope of the present invention.
In the description of the present invention, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "engaged/connected," "connected," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, may be a detachable connection, or may be an integral connection, may be a mechanical connection, may be an electrical connection, may be a direct connection, may be an indirect connection via an intermediary, may be a communication between two elements, and for one of ordinary skill in the art, the specific meaning of the terms in this disclosure may be understood in a specific case.
Referring to fig. 1 to 6, the microchannel radiator with the comb-shaped baffling convex structure comprises an upper cover plate 9, a microchannel substrate 5 and an inlet and outlet runner cavity 10. The micro-channel substrate 5 is provided with a plurality of micro-channel structures which are arranged in an array manner and are spaced in parallel, and the cross section of the micro-channel along the height direction is in an inverted trapezoid shape. And the two side wall surfaces of the micro-channel are periodically staggered with a plurality of comb-tooth-shaped baffling convex structures. One end of the micro-channel radiator is connected with an inlet of the cooling working medium, and the other end of the micro-channel radiator is connected with an outlet of the cooling working medium.
The parameters of each section of the micro-channel substrate of the micro-channel radiator are as follows: h=2 mm, h=1.5 mm, l=1 mm, l=0.6 mm, d=1.4 mm, d=1 mm, s=0.5 mm, θ=β=α=14°. The cross section of the micro-channel substrate is isosceles inverted trapezoid, the top surface and the bottom surface of the comb-shaped baffling convex structure are rectangular, H is the thickness of the micro-channel substrate, H is the depth of the micro-channel, L is the width of the trapezoid cross section of the micro-channel with the A-A section, L is the width of the trapezoid cross section of the micro-channel with the B-B section, D is the center distance between two adjacent micro-channels with the A-A section, D is the center distance between two adjacent micro-channels with the B-B section, s is the width of the bottom surface of the convex micro-structure, theta, beta and alpha are the surface draft angles of the micro-channel and the comb-shaped baffling convex structure respectively, and the draft angles of the micro-channel and the comb-shaped baffling convex structure are the same.
The micro-channel matrix material is one of aluminum and copper.
Referring to fig. 7, the present invention provides a method for manufacturing a microchannel radiator having a comb-shaped baffle protrusion structure, comprising the steps of:
(1) Designing and manufacturing a hot-pressing die: selecting a nickel alloy plate 6, cleaning to remove surface stains, wiping and airing, and precisely processing a reverse comb-tooth-shaped boss structure arranged in parallel array by a slow wire electric spark forming method to obtain an embossing mold core 6; selecting a die steel material, and obtaining an upper die 2, a die sleeve 4 and a lower die 7 through precise cutting; the spring 3 is a non-standard support spring member which is adapted to the dimensions of the die sleeve 4 and the upper die 2. 50 reverse comb-shaped boss structures are equidistantly, parallelly and repeatedly arranged on the hot-pressing mold core 6, and 50 special-shaped micro-channels can be formed at one time. The size and shape of the cavity in the die sleeve 4, the lower die 7 and the boss of the upper die 2 are the same as those of the bottom surface of the die core 6.
(2) Anti-sticking treatment of a hot stamping die: polishing and titanizing the lower surface of the upper die 2, the inner surface of the die sleeve 4 and the upper surface of the lower die 7 to reduce friction and increase durability; and polishing the hot stamping die core 6, ultrasonically cleaning by using absolute ethyl alcohol, airing, and preparing a layer of super-hydrophobic coating by adopting one of a spraying method, a soaking method, an evaporation method and a sputtering method.
(3) Installing a microchannel substrate to be processed: selecting an aluminum metal substrate, cleaning and removing surface stains, wiping and airing; stably placing the lower die 7 on a lower heating flat plate 8 of a hot press; the mold core 6 is aligned and positioned, stably attached to a boss of the lower mold 7 and the mold sleeve 4 is sleeved into the boss of the upper mold 7; putting the metal substrate into the die sleeve 4; the upper die 2 is vertically pressed after the spring is arranged on the upper surface of the die sleeve 4. When the materials of all parts are placed, the alignment of the centers of all parts is required to be ensured; the lower surface of the die sleeve 4 is tightly attached to the lower surface of the boss of the lower die 7, the lower surface of the die core 6 is tightly attached to the upper surface of the boss of the lower die 7, the lower surface of the base material 5 is contacted with the upper surface of the die core 6, and the lower surface of the boss of the upper die 2 is contacted with the upper surface of the metal substrate.
(4) Hot stamping processing: the initial gap between the upper heating flat plate 1 and the lower heating flat plate 8 of the hot press is adjusted, the rising speed of the lower heating flat plate 8 is adjusted to be 0.1-0.3mm/min, the working temperature of the upper heating flat plate 1 and the lower heating flat plate 8 is set to be 400-500 ℃, the working pressure is 10-20Mpa, when the upper flat plate 1 contacts the upper surface of the hot pressing upper die 2, the upper flat plate 1 and the lower flat plate 8 are heated to the preset temperature, the imprinting is started with constant pressure, after the imprinting time is kept for 10-20min, the imprinting is completed by cooling and releasing the pressure, and thus the micro-channel matrix 5 is obtained. And after the hot-pressing die and the micro-channel matrix 5 are cooled to a certain temperature, demolding is carried out, and processing is completed. During demolding, the upper die 2, the spring 3 and the die sleeve 4 are sequentially removed, the die core 6 and the micro-channel matrix 5 are taken out, and the micro-channel matrix is obtained by demolding in the vertical direction by using a manual or other auxiliary devices. 50 micro-channel matrixes which are parallel to each other, have the center distance of 1.4mm and the maximum width of 1mm and have the depth-to-width ratio of 1.5:1 and provided with comb-tooth-shaped baffling convex structures can be obtained through one-time hot stamping forming.
(5) Microchannel heat sink package: the microchannel base body 5 is fitted into the inlet/outlet flow channel chamber 10 and brought into close contact therewith. And an upper cover plate 9 is placed on the top of the micro-channel substrate, and sealing packaging and close fitting of the inlet and outlet runner cavity 10, the micro-channel substrate 5 and the upper cover plate 9 are realized through diffusion welding. The upper cover plate 9 is connected with an external connecting pipe and a water pump to form a whole body, so that a forced circulation loop is formed, and a complete micro-channel radiator is obtained.
The foregoing is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and any person skilled in the art will be able to make insubstantial modifications of the present invention within the scope of the present invention disclosed herein by this concept, which falls within the actions of invading the protection scope of the present invention.
Claims (7)
1. Microchannel radiator with broach form baffling protruding structure, including the microchannel base member, its characterized in that: the micro-channel matrix comprises a plurality of micro-channels which are arranged in parallel at intervals in an array manner, the cross section of the micro-channels along the height direction is in an inverted trapezoid shape, and two side wall surfaces of the micro-channels are periodically staggered with a plurality of comb-tooth-shaped baffling protruding structures;
the cross section of the micro-channel is in an isosceles inverted trapezoid shape, the height is 1mm-2mm, the depth-to-width ratio is 1:1-2:1, and the drawing included angle of the two side wall surfaces of the trapezoid is 10 degrees to 30 degrees; the comb-shaped baffling convex structure has a draft angle of 10-30 degrees and a height of 1mm-2mm.
2. The microchannel heat sink with comb-like baffle bump structure according to claim 1, wherein: the top surface and the bottom surface of the comb-shaped baffling convex structure are rectangular, triangular or semicircular.
3. The microchannel heat sink with comb-like baffle bump structure according to claim 1, wherein: the micro-channel material is one of aluminum and copper.
4. A method of manufacturing a microchannel heat sink having a comb-like baffle bump structure as claimed in any one of claims 1 to 3, comprising the steps of:
(1) Preparing a hot embossing mold core matched with a micro-channel with a comb-shaped baffling convex structure;
(2) Preparing a layer of super-hydrophobic coating on the hot stamping die core, and performing anti-sticking treatment on the hot stamping die core;
(3) Selecting a metal substrate which is cleaned, decontaminated and dried;
(4) The metal base plate is arranged in a die sleeve of the hot-pressing die through alignment and positioning and is positioned above the hot-pressing die core;
(5) The lower heating flat plate of the hot press is moved upwards to push the lower die of the hot pressing die and the hot stamping die core to press the metal substrate, and meanwhile, the metal substrate is heated for a certain time to be hot stamped;
(6) Releasing pressure, cooling, and demoulding the metal substrate from the hot stamping die core to obtain a micro-channel matrix with a comb-shaped baffling convex structure;
(7) And sealing and packaging the microchannel substrate with the comb-tooth-shaped baffling convex structure, the inlet and outlet runner cavity and the upper cover plate, and connecting the microchannel substrate with an external connecting pipe and a water pump into a whole to finally obtain the complete microchannel radiator.
5. The method for manufacturing the microchannel heat sink with the comb-shaped baffling projection structure according to claim 4, wherein: the hot stamping temperature in the step (5) is 100-500 ℃, the stamping pressure is 5-25 Mpa, and the stamping time is 5-30 min.
6. The method for manufacturing the microchannel heat sink with the comb-shaped baffling projection structure according to claim 4, wherein: the material of the hot stamping die core in the step (1) is one of die steel, heat-resistant steel and alloy steel.
7. The method for manufacturing the microchannel heat sink with the comb-shaped baffling projection structure according to claim 4, wherein: the hot-pressing die comprises a lower die, an upper die, a hot-pressing die core, a die sleeve and a spring; the upper surface of the hot stamping die core is processed into a reverse structure matched with a micro-channel with a comb-shaped baffling convex structure, and the lower surface is flat; the die sleeve is hollow, and the size of the hollow is the same as that of the hot stamping die core and the periphery of the metal substrate; the lower die is provided with a boss structure, and the size and shape of the top surface of the boss are the same as those of the bottom surface of the hot stamping die core; the upper die is also provided with a boss structure, and the size and the shape of the boss structure are the same as those of the bottom surface of the metal substrate.
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| CN1558448A (en) * | 2004-02-06 | 2004-12-29 | 中国科学院广州能源研究所 | Silicon based micro passage heat exchanger |
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| CN107731767A (en) * | 2017-10-09 | 2018-02-23 | 上海工程技术大学 | A kind of microchannel heat sink with horizontal direction and vertical direction turbulence structure |
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