CN113129324B - Light processing equipment system, light spot adjustment device and method, computer equipment and storage medium - Google Patents

Abstract

The utility model relates to a light spot adjusting method, which comprises the following steps: a first area and second areas positioned on two sides of the first area are divided on the DMD, signals are input to the first area and the second area on the DMD so as to control the first area to be in an off state, and the second area is in an on state; adjusting the collimated light spot to irradiate the first area and the second area, wherein the size of the collimated light spot is larger than that of the first area; forming a first edge bright spot, a second edge bright spot and a dark spot on a substrate; the collimated light spot is adjusted such that a first edge light spot and a second edge light spot are formed on both sides of the dark spot, and the first edge light spot and the second edge light spot are equal in size. The method visualizes the area irradiated by the collimation light spot on the DMD, and adjusts the sizes of the first edge bright spot and the second edge bright spot to be equal, namely adjusts the central area of the collimation light spot to irradiate the first area, thereby being convenient and simple to adjust and easy to operate, and improving the light processing energy and the imaging quality.

Description

Light processing equipment system, light spot adjustment device and method, computer equipment and storage medium

Technical field

The invention relates to a light processing equipment system, a light spot adjustment device and a method, a computer equipment and a storage medium.

Background technique

Light processing equipment uses the principle of light reaction to carry out light reaction on the light-reactive material on the workpiece. In light processing equipment, DMD is a commonly used device for digitally controlling light. In the existing technology, because there are too many wafers on one DMD, if all wafers are used, the amount of data that needs to be processed is too large. In practical applications, only part of the DMD is used. During light processing, a signal is input and the effective area and other areas of the DMD are determined. The collimated light spot is irradiated on the effective area, thereby optically processing a complete image of the effective area on the substrate. The collimated light spot has the characteristics of high center energy and low edge energy. In order to pursue higher light processing surface energy, it is necessary to choose the center area of the collimated light spot to illuminate the effective area of the DMD as much as possible and avoid the edge area of the collimated light spot to illuminate the effective area. .

However, the current method of adjusting the collimated light spot illumination area is that the light spot irradiates the effective area and reflects from the effective area to the substrate. Only the bright spot pattern can be seen on the substrate. The naked eye cannot quickly distinguish the intensity of the energy and cannot judge the collimation. Whether the central area of the light spot is aligned with the effective area of the DMD. Therefore, the collimated light spot may be lower or higher than the effective area, and the light with weaker energy is reflected to the substrate, resulting in insufficient light reaction.

Utility model content

The object of the present invention is to provide a light spot adjustment method to adjust the central area of the collimated light spot to illuminate the effective area of the DMD.

In order to achieve the above object, the present invention provides the following technical solution: a light spot adjustment method, including: dividing a first area and a second area on the DMD, and the second area is located on both sides of the first area;

Input signals to the first area and the second area on the DMD to control the states of the first area and the second area to be opposite; wherein the first area is in the "off" state, and the second area The area is "on";

Adjust the collimated light spot to illuminate the first area and the second area, and the size of the collimated light spot is larger than the size of the first area;

A first edge bright spot, a second edge bright spot and a dark spot are formed on the substrate;

The collimated light spot is adjusted so that the first edge bright spot and the second edge bright spot are formed on both sides of the dark spot, and the first edge bright spot and the second edge bright spot are Sizes are equal.

Further, the DMD is any one of 1080P DMD, 720P DMD, XGA DMD, and WXGA DMD.

Further, the width of the first area is 1/3-1/2 of the width of the DMD.

Further, along the longitudinal direction of the DMD, the first area is located at the center of the DMD.

Further, a measuring device for measuring the size of the first edge bright spot and the second edge bright spot is provided on the substrate.

Further, the longitudinal size of the collimated light spot is larger than the longitudinal size of the first region.

The present invention also provides a light spot adjustment device of a light processing device, which is configured to implement the steps of the light spot adjustment method as described above.

The present invention also provides a light processing equipment system, which includes a light processing equipment and a light spot adjustment device of the light processing equipment as described above.

The present invention also provides a computer storage medium on which a computer program is stored. When the program is executed by a processor, the steps of the light spot adjustment method as described above are implemented.

The present invention also provides a computer device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the program, the steps of the light spot adjustment method as described above are implemented. .

The beneficial effect of the present invention is that by putting the first area on the DMD in the "off" state and the second area in the "on" state, the collimated light spot is irradiated on the first area, because the size of the collimated light spot is larger than that of the first area. size, so the edge area of the collimated light spot will be illuminated on the second area, thereby forming a first edge bright spot, a second edge bright spot and a dark spot on the substrate. This method will illuminate the collimated light spot on the DMD. Regional visualization, by adjusting the size of the first edge bright spot and the second edge bright spot to be equal, that is, adjusting the center area of the collimated light spot to illuminate the first area, the adjustment is convenient, simple and easy to operate, and the light processing energy and imaging efficiency are improved. quality.

The above description is only an overview of the technical solutions of the present invention. In order to have a clearer understanding of the technical means of the present invention and implement them according to the contents of the description, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

Description of drawings

Figure 1 is a schematic structural diagram of the first region and the second region of the DMD according to an embodiment of the present invention;

Figure 2 is a schematic structural diagram of the collimated light spot irradiating on the DMD shown in Figure 1;

Figure 3 is a schematic structural diagram of the first edge bright spot, the second edge bright spot and the dark spot formed on the substrate in Figure 2.

Detailed ways

The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description. It does not indicate or imply that the indicated mechanism or element must have a specific orientation or be in a specific orientation. construction and operation, and therefore should not be construed as limitations of the invention. Furthermore, the terms “first”, “second” and “third” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

The invention provides a light spot adjustment method, which includes:

S1. The DMD is divided into a first area and a second area, and the second area is at least located on both sides of the first area;

S2. Input signals to the first area and the second area on the DMD to control the opposite states of the first area and the second area; where the first area is in the "off" state and the second area is in the "on" state;

S3. Adjust the collimated light spot to illuminate the first area and the second area. The size of the collimated light spot is larger than the size of the first area;

S4. A first edge bright spot, a second edge bright spot and a dark spot are formed on the substrate;

S5. Adjust the collimated light spot so that the first edge bright spot and the second edge bright spot are formed on both sides of the dark spot, and the sizes of the first edge bright spot and the second edge bright spot are equal.

The order of step S2 and step S3 can be exchanged and is not specifically limited here.

Define the first area as the subsequent working area or effective area, and the second area as the subsequent non-working area or other areas, divide the positions and input signals of the first area and the second area to control where the first area and the second area are located are all existing technologies and will not be described again here. Please refer to Figure 1. In this embodiment, in order to illuminate the central area of the collimated light spot on the first area 11, the second area 12 is located on both sides of the first area 11. Along the longitudinal direction of the DMD, the first area 11 is located on the Central location. But it is not limited to this. In other embodiments, the second area can be located on three or four sides of the first area, and the first area is limited to the center of the DMD to facilitate adjustment of the central area of the collimated light spot to illuminate the first area. . It should be noted that DMD is generally a rectangular structure. Here, the side where the longer dimension of DMD is located is defined as the longitudinal direction, the size of the side where the longer dimension is located is the length, the side where the shorter dimension is located is the transverse direction, and the size of the side where the shorter dimension is located is is wide.

A Digital Micromirror Device (DMD) is composed of multiple mirrors. The number of mirrors is determined by the display resolution. One mirror corresponds to one pixel, and is controlled by controlling the on/off duty cycle of each mirror. Create grayscale graphics. Due to its high reflectivity, high contrast, high precision and other characteristics, it is widely used in photolithography technology. Compared with traditional photolithography, DMD photolithography technology does not require a mask. Its main principle is to use a computer to convert the required The photolithography pattern is written into the DMD through software, and the angle of the lens on the DMD is changed according to the distribution of the black and white pixels of the image. The light source is irradiated onto the DMD to form a light pattern consistent with the desired pattern. Finally, the light pattern is projected onto the object. Treatment surface. DMD is any one of 1080P DMD, 720P DMD, XGA DMD, and WXGA DMD, but it is not limited to this. It can also be other types of DMD, which are not listed here.

The "on" state here means that the lens in this area on the DMD reflects light to a specified direction, usually reflecting the light onto the substrate, where the light forms a visible bright spot on the substrate. The "off" state here means that the lens in this area of the DMD does not accept light, does not reflect light, or reflects light in other directions. Therefore, it can be understood that the substrate does not receive light and forms dark spots.

In order to reasonably limit the data processing volume of the wafer using the DMD, the width of the first region is 1/3-1/2 of the width of the DMD. But it is not limited to this. The length of the first region can also be limited to 1/3-1/2 of the length of the DMD, or the length and width of the first region can be simultaneously limited to 1/3-1/ of the length and width of the DMD. 2. Specific settings can be made according to actual needs. For example, the number of wafers of a 1080P DMD is 1920*1080, and the working area used is 1920*336.

Please refer to Figure 2. In order to be able to use the central area of the collimated light spot 2 to illuminate the first area 11, the size of the collimated light spot 2 is adjusted to be larger than the size of the first area 11. In this embodiment, the longitudinal size of the collimated light spot 2 is larger than the size of the first area 11. The longitudinal dimension of a region 11 is such that the collimated light spot 2 can illuminate the second region 12 in the longitudinal direction. The method of adjusting the size of the collimated light spot 2 and adjusting the position of the irradiation on the DMD is an existing technology and will not be described again here.

In order to accurately adjust the irradiation position of the collimated light spot 2, a measuring device for measuring the size of the first edge bright spot and the second edge bright spot can also be provided on the substrate. The measuring device can be a sensor for measuring the size, etc., which can Accurate measurement shows the size of the first edge bright spot and the second edge bright spot.

Please refer to Figure 3. When forming a pattern on the substrate 3, since the first area 11 is in the "off" state and the second area 12 is in the "on" state, the collimated light spot 2 irradiated on the first area 11 is reflected on the substrate 3 Dark spots 33 are formed on the substrate 3 , and the collimated light spots 2 irradiated on the second area 12 are reflected on the substrate 3 to form bright spots. At this time, the first edge bright spot 31 and the second edge bright spot 32 are formed on the substrate 3 in a separated state, and the dark spot 33 is formed between the first edge bright spot 31 and the second edge bright spot 32. If only If an area appears, it is necessary to adjust the position of the collimated light spot 2 on the DMD up and down until the first edge bright spot 31 and the second edge bright spot 32 appear. Then continue to adjust the position of the collimated light spot 2 illuminated on the DMD until the size of the first edge bright spot 31 and the second edge bright spot 32 are the same. At this time, the central area of the collimated light spot 2 is illuminated in the first area 11, and the adjustment is completed. . When the size of the first edge bright spot 31 is larger than the size of the second edge bright spot 32 , adjust the collimated light spot 2 toward the direction of the second edge bright spot 32 , otherwise, adjust the collimated light spot 2 toward the first edge bright spot 31 Adjust the direction. This adjustment method visualizes the position of the collimated light spot 2 illuminated on the DMD, and determines whether the central area of the collimated light spot 2 is illuminated on the first area 11 by judging the size of the first edge bright spot 31 and the second edge bright spot 32 , this method is simple to operate and highly accurate, thereby effectively improving light processing energy and imaging quality.

In this embodiment, the first edge bright spot 31 and the second edge bright spot 32 have the same length, and it is only necessary to adjust their widths to be the same.

After adjustment, the central area of the collimated light spot is illuminated on the first area, and then a signal is input to control the first area to be in the "on" state and the second area to be in the "off" state, then the completed image of the first area can be formed on the substrate. , and the light processing energy is high.

After the above adjustments, the collimated light spot has been aligned with the first area. During normal operation, just adjust the size of the collimated light spot to be the same as the first area.

The present invention also provides a light spot adjustment device of a light processing equipment. The light spot adjustment device of the light processing equipment is configured to implement the steps of the above light spot adjustment method. It should be noted that the light processing equipment is equipment that can utilize light energy to perform operations. The light processing equipment can be an exposure machine, a photolithography machine, and other equipment, which are not listed here.

The light spot adjustment device of the light processing equipment may include:

A control unit configured to control the status of the first area and the second area divided by the DMD, wherein the first area can be in an "on" state or an "off" state, and the second area can be in an "on" state or "off" Status, as needed, the status of the first region and the status of the second region can be the same or opposite;

a target size determination unit configured to determine the size of the first edge bright spot and the second edge bright spot formed on the substrate;

The adjustment unit is configured to adjust the collimated light spot in the DMD according to the size of the first edge bright spot and the size of the second edge bright spot when it is determined that the sizes of the first edge bright spot and the second edge bright spot are different. area until the size of the first edge bright spot and the second edge bright spot are the same.

In specific implementation, the light spot adjustment device of the light processing device may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment that combines software and hardware aspects.

The working principle and specific implementation of the light spot adjustment device of the light processing equipment are the same as those of the above-mentioned adjustment method embodiments. Therefore, the working principle of the light spot adjustment device of the light processing equipment can be found in the details of the above-mentioned embodiments. The implementation is carried out according to the embodiment and will not be described again here.

The present invention also provides a light processing equipment system, including a light processing equipment and a light spot adjustment device of the light processing equipment shown above. The principle of solving the problem of this light processing equipment system is the same as that of the aforementioned light spot adjustment device of the light processing equipment. Therefore, the implementation of this light processing equipment system can be referred to the implementation of the aforementioned light spot adjustment device of the light processing equipment, and the duplication will not be repeated here.

The present invention also provides a computer storage medium on which a computer program is stored. When the program is executed by a processor, the steps of the light spot adjustment method shown above are implemented. Specifically, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including, but not limited to, magnetic disk storage and optical storage, etc.) embodying computer-usable program code therein.

The present invention also provides a computer device, which includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the program, the steps of the light spot adjustment method shown above are implemented.

In summary, by putting the first area on the DMD in the "off" state and the second area in the "on" state, the collimated light spot is irradiated on the first area. Since the size of the collimated light spot is larger than the size of the first area, the collimated light spot is The edge area of the straight light spot will be illuminated on the second area, thereby forming a first edge bright spot, a second edge bright spot and a dark spot on the substrate. This method visualizes the area of the collimated light spot illuminated on the DMD, by Adjusting the size of the first edge bright spot and the second edge bright spot to be equal means adjusting the central area of the collimated light spot to illuminate the first area. The adjustment is convenient and easy to operate, and the light processing energy and imaging quality are improved.

The technical features of the above-described embodiments can be combined in any way. To simplify the description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, All should be considered to be within the scope of this manual.

The above-mentioned embodiments only express several implementation modes of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the scope of protection of the patent of the present invention should be determined by the appended claims.

Claims (10)

1. A light spot adjustment method, characterized in that it includes: The DMD is divided into a first area and a second area, and the second area is located on both sides of the first area; signals are input to the first area and the second area on the DMD to control the first The states of the area and the second area are opposite; wherein, the first area is in the "off" state and the second area is in the "on" state; adjust the collimated light spot to illuminate the first area and the second area , the size of the collimated light spot is larger than the size of the first region; A first edge bright spot, a second edge bright spot and a dark spot are formed on the substrate; The collimated light spot is adjusted so that the first edge bright spot and the second edge bright spot are formed on both sides of the dark spot, and the first edge bright spot and the second edge bright spot are Sizes are equal. 2. The light spot adjustment method according to claim 1, wherein the DMD is any one of 1080P DMD, 720P DMD, XGA DMD, and WXGA DMD. 3. The light spot adjustment method according to claim 1, wherein the width of the first region is 1/3-1/2 of the width of the DMD. 4. The light spot adjustment method according to claim 1, wherein the first area is located at the center of the DMD along the longitudinal direction of the DMD. 5. The light spot adjustment method according to claim 1, wherein a measuring device for measuring the size of the first edge bright spot and the second edge bright spot is provided on the substrate. 6. The light spot adjustment method according to claim 1, wherein the longitudinal size of the collimated light spot is larger than the longitudinal size of the first region. 7. A light spot adjustment device of a light processing equipment, characterized in that the light spot adjustment device of the light processing equipment is configured to implement the steps of the light spot adjustment method according to any one of claims 1 to 6. 8. A light processing equipment system, characterized by comprising a light processing equipment and a light spot adjustment device of the light processing equipment according to claim 7. 9. A computer storage medium with a computer program stored thereon, characterized in that when the program is executed by a processor, the steps of the light spot adjustment method according to any one of claims 1-6 are implemented. 10. A computer device, comprising a memory, a processor and a computer program stored in the memory and executable on the processor, characterized in that when the processor executes the program, it implements any one of claims 1-6 The steps of the light spot adjustment method described in the item above.