CN113129324B - Optical processing device system, light spot adjusting device and method, computer device and storage medium - Google Patents
Optical processing device system, light spot adjusting device and method, computer device and storage medium Download PDFInfo
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- CN113129324B CN113129324B CN202110465318.7A CN202110465318A CN113129324B CN 113129324 B CN113129324 B CN 113129324B CN 202110465318 A CN202110465318 A CN 202110465318A CN 113129324 B CN113129324 B CN 113129324B
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 230000003287 optical effect Effects 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000004590 computer program Methods 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 abstract description 2
- 238000001259 photo etching Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/13—Edge detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
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- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Geometry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The utility model relates to a light spot adjusting method, which comprises the following steps: a first area and second areas positioned on two sides of the first area are divided on the DMD, signals are input to the first area and the second area on the DMD so as to control the first area to be in an off state, and the second area is in an on state; adjusting the collimated light spot to irradiate the first area and the second area, wherein the size of the collimated light spot is larger than that of the first area; forming a first edge bright spot, a second edge bright spot and a dark spot on a substrate; the collimated light spot is adjusted such that a first edge light spot and a second edge light spot are formed on both sides of the dark spot, and the first edge light spot and the second edge light spot are equal in size. The method visualizes the area irradiated by the collimation light spot on the DMD, and adjusts the sizes of the first edge bright spot and the second edge bright spot to be equal, namely adjusts the central area of the collimation light spot to irradiate the first area, thereby being convenient and simple to adjust and easy to operate, and improving the light processing energy and the imaging quality.
Description
Technical Field
The utility model relates to an optical processing device system, a light spot adjusting device and method, a computer device and a storage medium.
Background
The light treatment device is a device for performing a light reaction on a light reaction material on a workpiece by utilizing a light reaction principle. In light processing devices, DMDs are a commonly used device that digitally controls light. In the prior art, because the number of the wafers on one DMD is too large, if all the wafers are used, the data volume to be processed is too large, and in practical application, only a partial area of the DMD is used. During light processing, signals are input, the effective area of the DMD and other areas are determined, and a collimation light spot irradiates on the effective area, so that a complete image of the effective area is light processed on a substrate. The collimated light spot has the characteristics of high central energy and low edge energy, and in order to pursue higher light treatment surface energy, the central area of the collimated light spot needs to be selected as far as possible to irradiate the effective area of the DMD, so that the edge area of the collimated light spot is prevented from irradiating the effective area.
However, the current adjustment method of the collimation light spot illumination area is that the light spot irradiates the effective area, the light spot is reflected to the substrate from the effective area, only a bright spot pattern can be seen on the substrate, the naked eyes can not quickly distinguish the intensity of energy, and whether the central area of the collimation light spot is aligned with the effective area of the DMD can not be judged. Therefore, the collimation light spot may be lower or higher than the effective area, and the light with weaker energy is reflected to the substrate, so that the light reaction is insufficient.
Disclosure of Invention
The utility model aims to provide a light spot adjusting method for adjusting the central area of a collimation light spot to irradiate the effective area of a DMD.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a method of spot adjustment comprising: a first area and a second area are divided on the DMD, and the second area is positioned on two sides of the first area;
inputting signals to a first area and a second area on the DMD so as to control the states of the first area and the second area to be opposite; wherein the first region is in an "off" state and the second region is in an "on" state;
adjusting the collimated light spot to irradiate the first area and the second area, wherein the size of the collimated light spot is larger than that of the first area;
forming a first edge bright spot, a second edge bright spot and a dark spot on a substrate;
the collimation light spots are adjusted so that the first edge bright spots and the second edge bright spots are formed on two sides of the dark spots, and the sizes of the first edge bright spots and the second edge bright spots are equal.
Further, the DMD is any one of 1080P DMD, 720P DMD, XGA DMD, WXGA DMD.
Further, the width of the first area is 1/3-1/2 of the width of the DMD.
Further, the first region is located at a center position of the DMD in a longitudinal direction of the DMD.
Further, a measuring device for measuring the sizes of the first edge bright spots and the second edge bright spots is arranged on the substrate.
Further, the longitudinal dimension of the collimated light spot is greater than the longitudinal dimension of the first region.
The utility model also provides a spot adjusting device of an optical processing apparatus configured to implement the steps of the method of adjusting a spot as described above.
The utility model also provides a light processing device system, which comprises the light processing device and the light spot adjusting device of the light processing device.
The utility model also provides a computer storage medium having stored thereon a computer program which when executed by a processor performs the steps of the spot adjustment method as described above.
The utility model also provides a computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, said processor implementing the steps of the spot adjustment method as described above when executing said program.
The utility model has the beneficial effects that: the first area on the DMD is in an off state, the second area is in an on state, the collimating light spots irradiate the first area, and the edge area of the collimating light spots irradiates the second area because the size of the collimating light spots is larger than that of the first area, so that first edge bright spots, second edge bright spots and dark spots are formed on the substrate.
The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of the structure of a first area and a second area of a DMD according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a collimated light spot impinging on the DMD of FIG. 1;
fig. 3 is a schematic view of the structure of the first edge bright spots, the second edge bright spots, and the dark spots formed on the substrate in fig. 2.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the mechanisms or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
The utility model provides a light spot adjusting method, which comprises the following steps:
s1, dividing a first area and a second area on the DMD, wherein the second area is at least positioned on two sides of the first area;
s2, inputting signals to a first area and a second area on the DMD so as to control the states of the first area and the second area to be opposite; wherein the first region is in an "off" state and the second region is in an "on" state;
s3, adjusting the collimated light spots to irradiate the first area and the second area, wherein the size of the collimated light spots is larger than that of the first area;
s4, forming a first edge bright spot, a second edge bright spot and a dark spot on the substrate;
s5, adjusting the collimation light spots to enable the first edge bright spots and the second edge bright spots to be formed on two sides of the dark spots, wherein the sizes of the first edge bright spots and the second edge bright spots are equal.
The order of the step S2 and the step S3 may be changed, and is not particularly limited herein.
The first area is defined as a subsequent working area or an effective area, the second area is a subsequent non-working area or other areas, and the positions of the first area and the second area and the input signals are divided so as to control the states of the first area and the second area to be in the prior art, which is not described herein. Referring to fig. 1, in this embodiment, in order to collimate the central area of the light spot to irradiate the first area 11, the second area 12 is located at two sides of the first area 11, and the first area 11 is located at the central position of the DMD along the longitudinal direction of the DMD. But is not limited thereto, in other embodiments, the second region may be located on three or four sides of the first region, and the first region is defined at the center of the DMD, so as to facilitate adjusting the center region of the collimated light spot to illuminate the first region. The DMD is generally rectangular, and the side of the DMD having a longer dimension is defined as a longitudinal direction, the side having a longer dimension is defined as a length, the side having a shorter dimension is defined as a transverse direction, and the side having a shorter dimension is defined as a width.
The digital micromirror device (Digita l Micromi rror Device, abbreviated as DMD) is composed of a plurality of mirror surfaces, the number of which is determined by the display resolution, one mirror for each pixel, and a gray pattern is created by controlling the on/off duty ratio of each mirror. Compared with the traditional photoetching technology, the photoetching technology adopting the DMD does not need a mask, and the main principle is that a needed photoetching pattern is written into the DMD through software by a computer, the corner of a lens on the DMD is changed according to the distribution of black and white pixels of the image, the light source irradiates the DMD to form a light pattern consistent with the needed pattern, and finally the light pattern is projected onto the surface of an object to be processed. The DMD is any one of 1080P DMD, 720P DMD, XGA DMD, and WXGA DMD, but is not limited thereto, and other types of DMDs are also possible, and are not listed here.
The "on" state herein refers to the mirror of the area on the DMD reflecting light in a specified direction, typically onto a substrate, where it forms a visible bright spot. The "off" state herein refers to the mirror in this area of the DMD not receiving light, not reflecting light, or reflecting light in other directions, and thus it is understood that no light is received on the substrate, resulting in a dark spot.
In order to reasonably define the data throughput of the wafer using the DMD, the width of the first region is 1/3-1/2 of the width of the DMD. However, the length of the first area is 1/3-1/2 of the length of the DMD, or the length and width of the first area are 1/3-1/2 of the length and width of the DMD, respectively, which may be specifically set according to practical needs. For example, the number of DMD dies of 1080P is 1920×1080, and the operating area used is 1920×336.
Referring to fig. 2, in order to irradiate the first area 11 with the central area of the collimated light spot 2, the size of the collimated light spot 2 is adjusted to be larger than the size of the first area 11, and in this embodiment, the longitudinal size of the collimated light spot 2 is larger than the longitudinal size of the first area 11, so that the collimated light spot 2 can irradiate the second area 12 in the longitudinal direction. The method of adjusting the size of the collimated light spot 2 and adjusting the position of the illumination on the DMD is known in the art and will not be described here.
In order to accurately adjust the irradiation position of the collimation light spot 2, a measuring device for measuring the sizes of the first edge bright spot and the second edge bright spot can be further arranged on the substrate, and the measuring device can be a sensor for measuring the sizes and the like, so that the sizes of the first edge bright spot and the second edge bright spot can be accurately measured and displayed.
Referring to fig. 3, when forming a pattern on the substrate 3, the first area 11 is in the "off" state, the second area 12 is in the "on" state, the collimated light spot 2 irradiated on the first area 11 is reflected to form a dark spot 33 on the substrate 3, and the collimated light spot 2 irradiated on the second area 12 is reflected to form a bright spot on the substrate 3. At this time, the first edge bright spot 31 and the second edge bright spot 32 are formed on the substrate 3 in a separated state, and the dark spot 33 is formed between the first edge bright spot 31 and the second edge bright spot 32, and if only one area appears, it is necessary to adjust the position of the collimated light spot 2 irradiated on the DMD up and down until the first edge bright spot 31 and the second edge bright spot 32 appear. And then continuously adjusting the position of the collimation light spot 2 irradiated on the DMD until the first edge bright spot 31 and the second edge bright spot 32 have the same size, and at the moment, the central area of the collimation light spot 2 irradiates on the first area 11, and the adjustment is finished. When the size of the first edge bright spot 31 is larger than that of the second edge bright spot 32, the collimating light spot 2 is adjusted towards the direction of the second edge bright spot 32, otherwise, the collimating light spot 2 is adjusted towards the direction of the first edge bright spot 31. The adjustment method visualizes the position of the collimation light spot 2 irradiated on the DMD, determines whether the central area of the collimation light spot 2 irradiates on the first area 11 by judging the sizes of the first edge bright spot 31 and the second edge bright spot 32, and has simple operation and high accuracy, thereby effectively improving the light processing energy and the imaging quality.
In this embodiment, the lengths of the first edge bright spot 31 and the second edge bright spot 32 are the same, and the widths of the two are only required to be adjusted to be the same.
After adjustment, the central area of the collimation light spot irradiates on the first area, then a signal is input to control the first area to be in an on state, and the second area to be in an off state, so that a finished image of the first area can be formed on the substrate, and the light processing energy is high.
With the above adjustment, the collimated light spot has been aligned to the first region. In normal operation, the size of the collimated light spot is only required to be adjusted to be the same as that of the first area.
The utility model also provides a light spot adjusting device of the light processing equipment, which is configured to realize the steps of the light spot adjusting method. The light processing apparatus is an apparatus capable of performing work using light energy, and may be an exposure apparatus, a lithography apparatus, or the like, which is not specifically mentioned herein.
The spot adjusting apparatus of the light processing device may include:
a control unit configured to control states of a first area and a second area divided by the DMD, wherein the first area may be in an "on" state or an "off" state, the second area may be in an "on" state or an "off" state, and the states of the first area and the second area may be the same or opposite as required;
a target size determining unit configured to determine sizes of a first edge bright spot and a second edge bright spot formed on a substrate;
and an adjustment unit configured to adjust the area of the collimation light spot on the DMD according to the size of the first edge light spot and the size of the second edge light spot until the sizes of the first edge light spot and the second edge light spot are the same when the sizes of the first edge light spot and the second edge light spot are determined to be different.
In particular implementations, the spot-adjusting apparatus of the light-processing device may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects.
The working principle and the specific implementation manner of the light spot adjusting device of the light processing apparatus are the same as those of the foregoing embodiment of the adjusting method, so the working principle of the light spot adjusting device of the light processing apparatus may be implemented with reference to the specific implementation manner of the foregoing embodiment, and will not be described herein.
The utility model also provides a light processing equipment system, which comprises the light processing equipment and the light spot adjusting device of the light processing equipment. The principle of the optical processing device system for solving the problem is the same as that of the optical spot adjusting device of the optical processing device, so that the implementation of the optical processing device system can be referred to the implementation of the optical spot adjusting device of the optical processing device, and the repetition is omitted here.
The utility model also provides a computer storage medium having stored thereon a computer program which when executed by a processor performs the steps of the spot adjustment method as described above. In particular, the present utility model may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, magnetic disk storage, optical storage, and the like) having computer-usable program code embodied therein.
The utility model also provides a computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor executing the steps of the method for adjusting the light spot as shown above.
In summary, the first area on the DMD is in an off state, the second area is in an on state, the collimated light spot irradiates the first area, and the edge area of the collimated light spot irradiates the second area because the size of the collimated light spot is larger than that of the first area, so that the first edge bright spot, the second edge bright spot and the dark spot are formed on the substrate.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (10)
1. A method for adjusting a spot of light, comprising:
a first area and a second area are divided on the DMD, and the second area is positioned on two sides of the first area; inputting signals to a first area and a second area on the DMD so as to control the states of the first area and the second area to be opposite; wherein the first region is in an "off" state and the second region is in an "on" state; adjusting the collimated light spot to irradiate the first area and the second area, wherein the size of the collimated light spot is larger than that of the first area;
forming a first edge bright spot, a second edge bright spot and a dark spot on a substrate;
the collimation light spots are adjusted so that the first edge bright spots and the second edge bright spots are formed on two sides of the dark spots, and the sizes of the first edge bright spots and the second edge bright spots are equal.
2. The method of adjusting a spot of light according to claim 1, wherein the DMD is any one of 1080P DMD, 720P DMD, XGA DMD, WXGA DMD.
3. The method of adjusting a spot of light of claim 1, wherein the width of the first region is 1/3-1/2 of the width of the DMD.
4. The method of adjusting a spot of light of claim 1, wherein the first region is located at a center position of the DMD in a longitudinal direction of the DMD.
5. The spot adjusting method according to claim 1, wherein a measuring device for measuring the sizes of the first edge bright spot and the second edge bright spot is provided on the substrate.
6. The method of adjusting a spot of light of claim 1, wherein a longitudinal dimension of the collimated spot of light is greater than a longitudinal dimension of the first region.
7. A spot-adjusting device of an optical processing apparatus, characterized in that the spot-adjusting device of the optical processing apparatus is configured to implement the steps of the spot-adjusting method as claimed in any one of claims 1-6.
8. A light processing device system comprising a light processing device and a spot adjusting apparatus of the light processing device as claimed in claim 7.
9. A computer storage medium having stored thereon a computer program, which when executed by a processor performs the steps of the spot adjusting method according to any of claims 1-6.
10. A computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the steps of the method of spot adjustment according to any one of claims 1-6 when the program is executed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110465318.7A CN113129324B (en) | 2021-04-28 | 2021-04-28 | Optical processing device system, light spot adjusting device and method, computer device and storage medium |
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| CN202110465318.7A CN113129324B (en) | 2021-04-28 | 2021-04-28 | Optical processing device system, light spot adjusting device and method, computer device and storage medium |
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| CN113129324B true CN113129324B (en) | 2023-12-15 |
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| CN114326320B (en) * | 2021-10-26 | 2023-11-07 | 江苏迪盛智能科技有限公司 | Control method, device, equipment and storage medium for stepping photoetching |
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| CN101680996A (en) * | 2007-05-31 | 2010-03-24 | 索尼株式会社 | Optical waveguide, signal processing device, and signal processing substrate |
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| KR102120624B1 (en) * | 2013-04-04 | 2020-06-10 | 삼성디스플레이 주식회사 | Digital exposure device using glv and digital exposure device using dmd |
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- 2021-04-28 CN CN202110465318.7A patent/CN113129324B/en active Active
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|---|---|---|---|---|
| WO2002099397A2 (en) * | 2001-06-06 | 2002-12-12 | Digital Optical Imaging Corporation | Light modulated microarray reader and methods relating thereto |
| CN101680996A (en) * | 2007-05-31 | 2010-03-24 | 索尼株式会社 | Optical waveguide, signal processing device, and signal processing substrate |
| CN104802400A (en) * | 2014-01-28 | 2015-07-29 | 上海普利生机电科技有限公司 | Light curing 3D printing equipment and image exposure system |
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