CN113124997A - Piezoelectric composite three-dimensional vector hydrophone and preparation method thereof - Google Patents
Piezoelectric composite three-dimensional vector hydrophone and preparation method thereof Download PDFInfo
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- CN113124997A CN113124997A CN202110264189.5A CN202110264189A CN113124997A CN 113124997 A CN113124997 A CN 113124997A CN 202110264189 A CN202110264189 A CN 202110264189A CN 113124997 A CN113124997 A CN 113124997A
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- 239000002131 composite material Substances 0.000 title claims abstract description 50
- 238000002360 preparation method Methods 0.000 title abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 9
- 229910010272 inorganic material Inorganic materials 0.000 claims description 7
- 239000011147 inorganic material Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000011368 organic material Substances 0.000 claims description 7
- 239000002033 PVDF binder Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 6
- 238000009987 spinning Methods 0.000 claims description 6
- 229910003781 PbTiO3 Inorganic materials 0.000 claims description 5
- 229910002113 barium titanate Inorganic materials 0.000 claims description 5
- 238000010041 electrostatic spinning Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 238000009931 pascalization Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 239000011527 polyurethane coating Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Abstract
The invention discloses a piezoelectric composite three-dimensional vector hydrophone and a preparation method thereof. The method comprises the following steps of fixing the hydrophone units on the surface of the spherical base in different directions periodically according to a certain rule. The invention has the characteristics of simple and reliable structure, easy manufacture, small volume and stable performance, and can detect the acoustic wave vector signals in multiple directions and distinguish the sound or pressure transmission direction.
Description
Technical Field
The invention relates to a hydrophone and a preparation method thereof, in particular to a piezoelectric composite three-dimensional vector hydrophone and a preparation method thereof.
Background
With the continuous progress of underwater low-frequency signal detection technology, deep-sea remote exploration and research are rapidly developed. The method is currently used for deep sea exploration and research of large-depth sonar linear arrays and the like, and the operation depth can reach 500-4000 meters underwater. Under the environmental condition, the maximum hydrostatic pressure borne by the acoustic sensor including the piezoelectric hydrophone can reach over 40 MPa. As the core component of the sonar for acquiring weak acoustic signals, the piezoelectric hydrophone is required to have the conventional basic characteristics of small size, low frequency, wide band, high sensitivity, simple matching and the like, can be suitable for deep sea work, has the outstanding characteristics of high hydrostatic pressure resistance and multi-azimuth acoustic vector detection, and simultaneously has the requirements of good pressure, temperature and time stability.
Heretofore, as a piezoelectric hydrophone for detecting underwater low-frequency signals, piezoelectric ceramics, PVDF film and the like are mainly classified according to the selected materials, and the hydrophone of the former type has excellent pressure resistance due to the structure and material characteristics of piezoelectric ceramics, so that the working depth is deep, but the volume is relatively large, and the manufacturing and using processes are limited. The hydrophone of the latter type generally has higher sensitivity and is simple and convenient to manufacture due to the characteristics of the piezoelectric film, but is limited to be used in the deep sea field due to relatively poor compression resistance.
Patent CN 102901981A discloses a small-size piezoelectric hydrophone of resistant high hydrostatic pressure and preparation method thereof, has proposed a piezoelectric ceramic pipe, high strength polyurethane coating, flexible rubber shutoff, the hydrophone of holding ring etc. constitution with segmentation electrode, and this kind of hydrophone can bear high hydrostatic pressure to the performance can be adjusted as required, however, this hydrophone structure can not regard as vector hydrophone, surveys diversified water sound signal.
Patent CN 110987157A discloses a cantilever beam flexoelectric effect vector hydrophone, including the hydrophone of constituteing such as fixed baseplate, flexible dielectric material, upper and lower electrode and external adjusting resistor, simple structure, convenient operation, convenient to use through the effective combination of a plurality of hydrophones, can survey the sound wave signal in the three-dimensional direction. However, the sealing and waterproof performance of the water-proof sealing rubber is uncertain, and underwater work is limited.
Disclosure of Invention
The purpose of the invention is as follows: it is a first object of the present invention to provide a vector hydrophone for multi-azimuth acoustic detection that discriminates underwater sound or pressure transmission direction.
The second purpose of the invention is to provide a preparation method of the vector hydrophone.
The technical scheme is as follows: the piezoelectric composite three-dimensional vector hydrophone comprises a spherical base and a plurality of hydrophone units arranged on the spherical base, wherein each hydrophone unit comprises an outer protective layer, a flexible substrate arranged in the outer protective layer and an organic/inorganic composite piezoelectric fiber film deposited on the flexible substrate, symmetrical interdigital electrodes are arranged on the composite piezoelectric fiber film, and the interdigital electrodes are connected with leads.
Preferably, the fibers in the organic/inorganic composite piezoelectric fiber film are arranged in an orientation.
Preferably, the inorganic material in the organic/inorganic composite piezoelectric fiber film is BaTiO3、BZT-BCT、Pb(ZrTiO3)、PbTiO3(ii) a The organic material is PVDF and/or P (VDF-TrFE).
The method for the piezoelectric composite three-dimensional vector hydrophone comprises the following steps:
(S1) mixing an inorganic piezoelectric material into a sol of an organic piezoelectric material to form a mixed sol; depositing the mixed sol on the surface of a flexible substrate to form an organic/inorganic composite piezoelectric fiber film, and drying;
(S2) sputtering interdigital electrodes on the surface of the organic/inorganic composite fiber membrane; connecting wires at two ports of the interdigital electrode, and drying and removing an oxidation layer;
(S3) respectively coating protective layers on the outer surfaces of the flexible substrate and the organic/inorganic composite fiber membrane, and curing to form an outer protective layer to obtain a hydrophone unit;
(S4) mounting a plurality of hydrophone units on a spherical base to obtain the piezoelectric composite three-dimensional vector hydrophone.
Preferably, the mass ratio of the inorganic material to the organic material in the organic/inorganic composite piezoelectric fiber film is 1: 10-1: 5.
Preferably, the fibers in the organic/inorganic composite piezoelectric fiber film are arranged in an orientation on the flexible substrate.
Preferably, the preparation method of the organic/inorganic composite piezoelectric fiber film comprises an electrostatic spinning method, a spinning method and a blowing spinning method. The electrostatic spinning method specifically comprises the following steps: the electrostatic spinning method is used under the condition of 10-15 Kv direct current high pressure, the spinning distance is set to be 10-15 cm, the rotating speed of a roller is 400-1000 r.p.m, and the advancing speed is 30-50 mul/min.
Preferably, in the step (S4), the ball-shaped base is made of polyurethane by injecting a gel into the ball-shaped mold through a hot cast molding process.
Preferably, the inorganic material in the organic/inorganic composite piezoelectric fiber film is BaTiO3、BZT-BCT、Pb(ZrTiO3)、PbTiO3(ii) a The organic material is PVDF and P (VDF-TrFE).
Preferably, the thicknesses of the flexible bottom and the organic/inorganic composite piezoelectric fiber film are 1-2 μm.
Has the advantages that: compared with the prior art, the invention has the following remarkable effects: 1. the organic/inorganic composite piezoelectric fiber material is adopted, has vectoriality, can detect sound waves in all directions, and can distinguish underwater sound or multi-azimuth sound wave detection in the pressure transmission direction. 2. The sensor has the advantages of small size, low frequency, high sensitivity and simple matching; 3. the structure is simple and reliable, and the waterproof and oil-resistant rubber belt has the characteristics of water resistance, oil resistance, stable performance and suitability for batch production.
Drawings
FIG. 1 is a schematic diagram of the structure of a hydrophone unit of the invention;
FIG. 2 is a schematic cross-sectional view of a hydrophone unit of the invention;
fig. 3 is a schematic structural diagram of the piezoelectric composite three-dimensional vector hydrophone of the invention.
Detailed Description
The invention is described in further detail below with reference to the drawings.
As shown in FIGS. 1-3, the invention discloses a piezoelectric composite three-dimensional vector hydrophone, which comprises a spherical base 7 and a plurality of hydrophone units 6 arranged on the spherical base 7, wherein each hydrophone unit 6 comprises an external protectionThe flexible piezoelectric fiber film comprises a layer 1, a flexible substrate 3 arranged in an outer protective layer 1, and an organic/inorganic composite piezoelectric fiber film 2 deposited on the flexible substrate 3, wherein fibers in the organic/inorganic composite piezoelectric fiber film 2 are arranged in an orientation mode. The composite piezoelectric fiber film 2 is provided with symmetrical interdigital electrodes 4, and the interdigital electrodes 4 are connected with leads 5. The inorganic material in the organic/inorganic composite piezoelectric fiber film 2 of this embodiment is BZT-BCT, and may also be BaTiO3、Pb(ZrTiO3) Or PbTiO3(ii) a The organic material in this embodiment is PVDF, and may also be P (VDF-TrFE). The outer protective layer 1 is a PDMS layer, and the spherical base 7 is made of polyurethane.
The method for preparing the piezoelectric composite three-dimensional vector hydrophone comprises the following steps:
(1) according to the inorganic-organic composite proportion of 1:5, mixing an inorganic piezoelectric phase into the sol of an organic piezoelectric material to form uniformly mixed sol. Setting a spinning distance to be 15cm, a roller rotating speed to be 400r.p.m and a propelling speed to be 30 mu l/min under 10Kv direct current high pressure by using an electrostatic spinning method, uniformly depositing a layer of organic/inorganic composite fiber film 2 which is orderly arranged and oriented and has a thickness of 2 mu m on the upper surface of a flexible substrate 3 with a thickness of 2 mu m, and drying; wherein the direct current high pressure can be 10-15 Kv, the spinning distance can be 10-15 cm, the rotating speed of the roller can be 400-1000 r.p.m, and the propelling speed can be 30-50 mul/min;
(2) sputtering an interdigital electrode 4 on the upper surface of the composite fiber membrane, respectively welding two thin wires 5 with PVC sheaths at two ports of the interdigital electrode 4 to be used as electrode outgoing lines, and finally drying and removing an oxidation layer.
(3) And uniformly coating the prepared PDMS on the upper and lower surfaces of the hydrophone unit 6 sputtered with the electrodes, putting the hydrophone unit into a vacuum drying oven for curing, and forming the sealed and insulated outer protection layer 1 after curing.
(4) And fixing the prepared sealed single hydrophone unit 6 on the spherical surface of the spherical base 7 periodically according to a certain rule to obtain the piezoelectric composite three-dimensional vector hydrophone.
In the embodiment, the relative magnitude of the output voltage signals of the hydrophone units positioned right in front, at the side and below in the sound pressure transmission direction is selected as a judgment basis, and the hydrophone positioned right in front in the sound pressure transmission direction always has the maximum output voltage signal due to the resolution of the sound pressure. Therefore, when a sound or pressure signal in an unknown direction is transmitted, the actual transmission direction of the sound or pressure signal, that is, the normal direction of the hydrophone with the largest output voltage signal, can be determined by comparing the relative magnitude of the output voltage signals of the hydrophone units, so as to achieve the purpose of identifying the transmission direction of the sound or pressure signal.
Claims (10)
1. The piezoelectric composite three-dimensional vector hydrophone is characterized by comprising a spherical base and a plurality of hydrophone units arranged on the spherical base, wherein each hydrophone unit comprises an outer protective layer (1), a flexible substrate (3) arranged in the outer protective layer (1) and an organic/inorganic composite piezoelectric fiber film (2) deposited on the flexible substrate (3), symmetrical interdigital electrodes (4) are arranged on the composite piezoelectric fiber film (2), and a lead (5) is connected onto each interdigital electrode (4).
2. The piezo-electric composite three-dimensional vector hydrophone according to claim 1, wherein the fibres in the organic/inorganic composite piezoelectric fibre membrane (2) are arranged in an orientation.
3. The method for preparing the piezoelectric composite three-dimensional vector hydrophone according to claim 1, wherein the inorganic material in the organic/inorganic composite piezoelectric fiber film is BaTiO3、BZT-BCT、Pb(ZrTiO3)、PbTiO3(ii) a The organic material is PVDF and/or P (VDF-TrFE).
4. A method of making the piezo-electric composite three-dimensional vector hydrophone of claim 1, comprising the steps of:
(S1) mixing an inorganic piezoelectric material into a sol of an organic piezoelectric material to form a mixed sol; depositing the mixed sol on the surface of a flexible substrate to form an organic/inorganic composite piezoelectric fiber film, and drying;
(S2) sputtering interdigital electrodes on the surface of the organic/inorganic composite fiber membrane; connecting wires at two ports of the interdigital electrode, and drying and removing an oxidation layer;
(S3) respectively coating protective layers on the outer surfaces of the flexible substrate and the organic/inorganic composite fiber membrane, and curing to obtain the hydrophone unit;
(S4) mounting a plurality of hydrophone units on a spherical base to obtain the piezoelectric composite three-dimensional vector hydrophone.
5. The piezoelectric composite three-dimensional vector hydrophone as claimed in claim 4, wherein the mass ratio of the inorganic material to the organic material in the organic/inorganic composite piezoelectric fiber film is 1: 5-1: 10.
6. The method according to claim 4, wherein the fibers in the organic/inorganic composite piezoelectric fiber film are oriented on the flexible substrate.
7. The method for preparing the piezoelectric composite three-dimensional vector hydrophone according to claim 4, wherein the method for preparing the organic/inorganic composite piezoelectric fiber film comprises an electrostatic spinning method, a spinning method and a blowing method.
8. The method according to claim 4, wherein in step (S4), the spherical base is made of polyurethane by injecting a gel into a spherical mold by a hot-cast molding process.
9. The method according to claim 4, wherein the inorganic material in the organic/inorganic composite piezoelectric fiber film is BaTiO3、BZT-BCT、Pb(ZrTiO3)、PbTiO3(ii) a The organic material is PVDF and P (VDF-TrFE).
10. The method according to claim 4, wherein the flexible substrate and the organic/inorganic composite piezoelectric fiber film have a thickness of 1-2 μm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114740461A (en) * | 2022-06-07 | 2022-07-12 | 深圳市晟达通讯设备有限公司 | Sonar system and be used for this sonar system's underwater positioning antenna |
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