CN113122815B - Magnet clamp for tray - Google Patents
Magnet clamp for tray Download PDFInfo
- Publication number
- CN113122815B CN113122815B CN202011311683.4A CN202011311683A CN113122815B CN 113122815 B CN113122815 B CN 113122815B CN 202011311683 A CN202011311683 A CN 202011311683A CN 113122815 B CN113122815 B CN 113122815B
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- CN
- China
- Prior art keywords
- base
- clip
- magnet
- head
- tray
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The magnet holder for a tray according to an embodiment for fixing a lower tray supporting a lower side of a substrate and an upper tray supporting an upper side of the substrate to each other may include: a clip base fixed to the lower tray; a chuck rotatably connected to the clip base and capable of switching a position between a fixing position where the upper tray is fixed and a release position where the upper tray is released; a clip shaft mounted to the clip base and supporting the clip head; a contact part installed at an end of the chuck and capable of pressurizing an upper surface of the upper tray; a base housing fixed to the clip base; a base magnet mounted to the base housing; a head housing fixed to the chuck; and a head magnet mounted to the head housing and facing the base magnet with different polarities.
Description
Technical Field
The following description relates to a magnet holder for a tray.
Background
In the vacuum film forming apparatus, a tray clamp for fixing a tray is used. The tray includes a lower tray for supporting a lower side of the substrate and an upper tray for supporting an upper side of the substrate. The tray clamp may secure the lower tray and the upper tray to each other by switching between a secured position and a released position. In the case where the lower tray and the upper tray support the lower side and the upper side of the substrate, respectively, the tray clamp may press the lower tray and the upper tray to fix the substrate. The tray clamp may be secured to the lower tray and compress the upper surface of the upper tray. In addition, the lower and upper trays may be spaced apart from each other when the tray clamp is in the released position.
In a vacuum film forming apparatus, in order to deposit a film forming material on a substrate with high quality, it is necessary to reduce the generation of particles (particles) in a clamp or the like. Therefore, a technique is required that can reduce particles in the tray clip and smoothly perform position conversion of the clip.
Disclosure of Invention
Technical problem to be solved
An object of an embodiment is to provide a magnet clamp for a tray, which can reduce the number of particles generated during position change while smoothly performing position change of the clamp for the tray.
Technical proposal for solving the problems
The magnet holder for a tray according to an embodiment for fixing a lower tray supporting a lower side of a substrate and an upper tray supporting an upper side of the substrate to each other may include: a clip base fixed to the lower tray; a chuck rotatably connected to the clip base and capable of switching a position between a fixing position where the upper tray is fixed and a release position where the upper tray is released; a clip shaft mounted to the clip base and supporting the clip head; a contact part installed at an end of the chuck and capable of pressurizing an upper surface of the upper tray; a base housing fixed to the clip base; a base magnet mounted to the base housing; a head housing fixed to the chuck; and a head magnet mounted to the head housing and facing the base magnet with different polarities.
The base housing and the head housing may be spaced apart from each other when the contact portion contacts the upper surface of the upper tray and is pressurized.
The clip may not contact the clip base or base housing when the clip is shifted between the secured and released positions.
The contact portion may include: a first fastening member including a fastening head facing the upper tray and a fastening body protruding from a central portion of the fastening head and penetrating the chuck; and a second fastening member for fixing the first fastening member to the chuck.
The contact portion may further include a pad disposed between the fastening head of the first fastening member and the collet and providing a space between the base housing and the head housing when the collet is in the secured position.
The contact portion includes: a packing which is threadably connected along the chuck and has a hollow space at an inner side thereof; a first fastening member facing the upper tray and threadably connected to the hollow space of the pad; and a second fastening member disposed on an opposite side of the first fastening member with respect to the collet and threadably connected to the pad, and the pad is movable with respect to the collet.
The base housing may be formed in plurality so as to be symmetrical about the chuck.
The base housing may have a hollow region for receiving the base magnet.
The hollow region of the base housing may be formed to be open in a direction opposite to a side facing the head magnet.
The base housing may include a base cover for closing an opening of the hollow region in a state where the hollow region accommodates the base magnet.
The base housing may include a cover fixing member for fixing the base cover.
A shaft securing member may be further included for securing the clip shaft to the clip base.
A magnet holder for a tray for fixing a lower tray supporting a lower side of a substrate and an upper tray supporting an upper side of the substrate to each other according to an embodiment, comprising: a clip base fixed to the lower tray; a chuck rotatably connected to the clip base and capable of switching a position between a fixing position where the upper tray is fixed and a release position where the upper tray is released; a base housing fixed to the clip base; a base magnet mounted to the base housing; a head housing fixed to the chuck; and a head magnet mounted to the head housing and facing the base magnet with different polarities, and the collet may not contact the collet base or base housing when the collet is switched between the secured position and the released position.
Effects of the invention
The magnet holder for a tray according to an embodiment can reduce the number of particles generated during a position change between a fixed position and a released position. In particular, the magnet holder for a tray according to an embodiment is designed such that there are no components that collide with each other when switching from the release position to the fixed position, so that generation of particles can be effectively reduced when switching the position.
Also, the magnet holder for a tray according to an embodiment is designed such that when moving from the release position to the fixing position, the space between the magnets acting on the mutual attraction becomes compact, so that the fixing force of the tray can be improved.
Also, according to the magnet clip for a tray of an embodiment, even if the tray is deformed, the base housing and the head housing can be separated from the fixed position by adjusting the contact portion.
Drawings
Fig. 1 is a perspective view showing a magnet holder for a tray according to an embodiment.
Fig. 2 is a sectional view showing a state in which a magnet clamp for a tray is in a release position according to an embodiment.
Fig. 3 is a sectional view showing a state in which a magnet holder for a tray is in a protecting position according to an embodiment.
Fig. 4 is a front view showing a magnet holder for a tray according to an embodiment.
Fig. 5 is a side view showing an enlarged view of a region a of fig. 3.
Fig. 6 is a plan view showing a contact portion according to an embodiment.
Fig. 7 is a cross-sectional view taken along cut line VII-VII of fig. 6.
Detailed Description
Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. In adding a reference numeral to the component of each drawing, it should be noted that even if the same element is indicated on different drawings, the same element should be assigned the same reference numeral as much as possible. In the description with reference to the drawings, the same reference numerals are given to the same components irrespective of the reference numerals, and the repetitive description thereof will be omitted. In describing the embodiments, when it is judged that detailed description of the related art will unnecessarily obscure the embodiments, detailed description thereof will be omitted.
In the description of the constituent elements of the embodiment, terms such as first, second, A, B, (a) and (b) may be used. However, the use of the above terms is merely used to distinguish the constituent element from other constituent elements, and is not intended to limit the essence, arrangement or order of the respective constituent elements. When it is described that one component is "connected", "joined" or "contacted" with another component, the component may be directly connected or contacted with the other component, or another component may be "connected", "joined" or "contacted" with each other component.
In other embodiments, constituent elements included in an embodiment and constituent elements including common functions will be described using the same names. Unless otherwise stated, the description described in one embodiment may be applied to other embodiments, and detailed description will be omitted in the overlapping range.
Fig. 1 is a perspective view showing a magnet clip for a tray according to an embodiment, fig. 2 is a sectional view showing a state in which the magnet clip for a tray according to an embodiment is in a release position, and fig. 3 is a sectional view showing a state in which the magnet clip for a tray according to an embodiment is in a protection position.
Referring to fig. 1 to 3, a magnet clip for a tray according to an embodiment may pressurize the tray in a state of being mounted on the tray. The magnet clips for the trays may be fixed to the lower tray T1 and pressurize the upper tray T2. The lower tray T1 and the upper tray T2 may support the substrate S therebetween. The magnet clips for the tray can assist the lower tray T1 and the upper tray T2 to stably support the substrates. Note that the magnet clips for the tray are different from those for the substrate. The magnet clips for the tray do not directly assist the substrate to be separated, but indirectly assist the substrate S to be separated by pressurizing the tray.
The magnet holder for the tray may include a holder base 11, a holder shaft 12, a base housing 13, a chuck 14, a head housing 15, a contact portion 16, base magnets 81 and 82, a base fixing member 91, and a shaft fixing member 92.
The clip base 11 may be fixed to the lower tray T1. The clip base 11 may be fixed to the lower tray T1 by a base fixing member 91. Clip base 11 may cover both the left and right sides of clip head 14.
The clamp shaft 12 may be mounted to the clamp base 11 and support the clamp head 14. The clip shaft 12 may be formed through the clip base 11. The clip shaft 12 may be fixed to the clip base 11 by a shaft fixing member 92. The clip shaft 12 may be fixed against rotation relative to the clip base 11. Chuck 14 may rotate about chuck axis 12. In this way, the number of particles generated in clamp shaft 12 may be reduced as clamp head 14 rotates relative to clamp base 11.
The base housing 13 may be secured to the clip base 11. The clip housing 13 may have a hollow area for accommodating the base magnet 81. The hollow region of the base housing 13 may be formed to correspond to the shape of the base magnet 81. The base magnet 81 may be fixed to a hollow area within the base housing 13 without shaking.
The base housing 13 may be formed to have a plurality, for example, two, on opposite sides centering on the chuck 14, respectively. According to this shape, the magnet holder for the tray can sufficiently secure a space for accommodating the magnet that generates a magnetic force required for holding the tray.
The gripping head 14 may be rotatably connected to the clip base 11, and may also be shifted in position between a fixing position (see fig. 3) where the upper tray T2 is fixed and a release position (see fig. 2) where it is released from the upper tray T2. The collet 14 may include a head body 141 connected to the collet 12, a head forward extension 142 extending forward from the head body 141 and supporting the contact portion 16, and a head rearward extension 143 extending rearward from the head body 141.
Chuck 14 may be held in the release position by a pressing member (not shown) pressing downward on rearward head extension 143. The pressing member can prevent the base housing 13 and the head housing 15 from approaching each other. Even if the cartridge 14 is in the release position, the base magnet 81 accommodated in the base housing 13 and the head magnet 82 accommodated in the head housing 15 can attract each other. In addition, when the pressing member is released, i.e., when the pressing member no longer presses against the head rear extension 143, the collet 14 may be shifted to the fixed position. Contact portion 16 may pressurize upper tray T2 when chuck 14 is transitioned to the secured position.
Head housing 15 may be secured to chuck 14. Head housing 15 may rotate together in accordance with the rotational movement of chuck 14. The head housing 15 may have a plurality, for example, two, on opposite sides with the chuck 14 as a center. According to this shape, the magnet holder for the tray can sufficiently secure a space for accommodating the magnet that generates a magnetic force required for holding the tray.
The head housing 15 may have a hollow region in its interior for accommodating the head magnet 82. The hollow region of the head housing 15 may be formed to correspond to the shape of the head magnet 82. The head magnet 82 may be fixed to a hollow area within the head housing 15 without shaking. The base magnet 81 and the head magnet 82 may face each other with different polarities so as to attract each other.
The contact portion 16 may be fixed to the chuck 14, and the upper tray T2 may be directly contacted. Contact portion 16 may be positionally adjustable with respect to chuck 14.
The base magnet 81 and the head magnet 82 can be inserted into the base housing 13 and the head housing 15, respectively, while maintaining the magnet shape. The base magnet 81 may not have an element for fixing the base magnet 81 to the arrangement of the clip housing 13, for example, a screw receiving hole or the like. The base magnet 81 may be inserted into the hollow region of the base housing 13 while remaining intact. The head magnet 82 may also be inserted into the hollow region of the head housing 15 while remaining intact. According to this structure, the magnets 81, 82 can be held in the housings 13, 15 in a state having high structural stability, and a sufficient magnetic force can be generated.
The base fixing member 91 may fix the clip base 11 to the lower tray T1. For example, the base fixing member 91 may have a screw shape penetrating the clip base 11 and fixed to the lower tray T1.
The shaft fixing member 92 may be inserted into the clip base 11, thereby fixing the clip shaft 12 to the clip base 11.
The magnet clips for the trays may reduce particle generation during shifting of the clip 14 by preventing the clip 14 from contacting the clip base 11 and/or base housing 13. Specifically, when the cartridge 14 is moved from the release position to the fixed position, the head housing 15 is then brought into contact with the upper tray T2 of the contact portion 16 without contacting the base housing 13. When the contact portion 16 contacts the upper face of the upper tray T2 and is pressurized, the base housing 13 and the head housing 15 may be spaced apart from each other. With this structure, the generation of particles in the magnet holder for the tray can be reduced.
Chuck 14 may not contact either clamp base 11 or base housing 13 when chuck 14 is shifted between the secured position and the released position.
Fig. 4 is a front view showing a magnet holder for a tray according to an embodiment.
Referring to fig. 4, the magnet clip for a tray may include a clip base 11 and base housings 13 formed at left and right sides of the clip base 11. The clip base 11 may be fixed to a tray (not shown) by a plurality of base fixing members 91. The clip shaft may be fixed to the clip base 11 by a plurality of shaft fixing members 92. The head body 141 may be connected to the clip shaft, and the head forward extension 142 may extend forward from the head body 141 and support the contact portion 16.
The base housing 13 may be formed to be symmetrical about the collet. For example, the base housing 13 may be formed with 2 pieces so as to be symmetrical to each other centering on the collet. Note that in fig. 4, the base housing 13 shown on the left side of the collet is fully shown, while the base housing 13 shown on the right side of the collet is shown by omitting a base cover 13a to be described later.
The base housing 13 may have a hollow region for accommodating the base magnet 81, and the hollow region may be formed to be opened in a direction opposite to a side facing the head magnet (not shown). Referring to the base housing 13 shown on the right side of the cartridge, it can be confirmed that the hollow region for accommodating the base magnet 81 may be opened in the opposite direction to the head magnet, i.e., from the cartridge axis toward the contact portion 16.
The base housing 13 may include a base cover 13a for closing an opening of the hollow region in a state where the hollow region accommodates the base magnet 81, and a cover fixing member 13b for fixing the base cover 13 a. The user can release the cover fixing member 13b to replace the base magnet 81. As another example, it should be noted that the base housing 13 may have a base cover attached by welding or the like, without a separate cover fixing member 13b.
Fig. 5 is a side view showing an enlarged view of a region a of fig. 3.
Referring to fig. 5, the contact portions 16a, 16b may include a first fastening member 161, a second fastening member 162, and pads 163a, 163b. Note that the contact portions 16a and 16b are different from each other only in the pads 163a and 163b, and the remaining configurations are the same. The magnet clamp for the tray is a method of setting the thickness of the pads 163a, 163b, and the interval d (see fig. 3) between the base housing 13 and the head housing 15 can be adjusted when the clamp is in the fixed position.
The first fastening member 161 may include a fastening head facing the upper tray and a head front extension 142 protruding from a central portion of the fastening head and penetrating the collet. The fastening head may be formed to have a larger area than the fastening body, and by increasing the contact area with the upper tray T2, the amount of pressure applied to the upper tray T2 from the contact portions 16a, 16b may be reduced.
The second fastening member 162 may secure the first fastening member 161 to the head forward extension 142 of the collet.
The pads 163a, 163b are provided between the first fastening member 161 and the head forward extension 142 of the cartridge, and a space d (see fig. 3) between the base housing 13 and the head housing 15 may also be provided when the cartridge 14 is in the fixed position. For example, when the contact portion 16a includes the pad 163a having a relatively thin thickness, the distance d between the base housing 13 and the head housing 15 may be relatively increased. In addition, when the contact portion 16b includes the pad 163b having a thicker thickness, the distance d between the base housing 13 and the head housing 15 may be relatively reduced.
When film formation is performed in the vacuum film forming apparatus, the lower tray T1 and/or the upper tray T2 may be exposed to high temperature, and thus may be deformed. As the lower tray T1 and/or the upper tray T2 are deformed, the distance d between the base housing 13 and the head housing 15 may be different from the initially set interval. For example, when the interval d between the base housing 13 and the head housing 15 is narrowed, or when the base housing 13 and the head housing 15 are in contact with each other, the user may set the relatively thin pad 163a between the first fastening member 161 and the head front extension 142 of the cartridge, thereby adjusting the interval d back to the initial set distance. In addition, when the interval d between the base housing 13 and the head housing 15 increases, the user can set the relatively thick pad 163b between the first fastening member 161 and the head front extension 142 of the cartridge, thereby adjusting the interval d back to the initial set interval.
Fig. 6 is a plan view showing a contact portion according to an embodiment, and fig. 7 is a sectional view taken along a cutting line VII-VII of fig. 6.
Referring to fig. 6 and 7, unlike the structure described in fig. 6 and 7, the contact portion 16 'may be mounted at the head front extension 142' in a state having a three-part structure. The contact portion 16 'may include a first fastening member 161', a second fastening member 162', and a pad 163'.
The pad 163 'is screwed at its outer side to the head front extension 142', and may have a hollow shape at its inner side. The inner hollow inner surface of the liner 163' may be provided with threads. The spacer 163' may accommodate the first fastening member 161' on its inner side and the second fastening member 162' on its outer side. The pad 163 'is movable relative to the head forward extension 142'. The spacer 163 'may have a jig receiving groove 163a' at an upper side thereof for receiving the jig. The user can move the pad 163 'by inserting the jig into the jig receiving groove 163a' and then rotating it.
The first fastening member 161 'faces the upper tray and may be screw-coupled to the hollow space of the pad 163'.
The second fastening member 162 'is located on the opposite side of the first fastening member 161' with respect to the head forward extension 142 'of the collet, and may be threadedly coupled to the outer surface of the pad 163'. The second fastening member 162' may assist in the cushion 163' being stably secured to the head forward extension 142'.
In the case of separating the second fastening member 162 'or connecting the second fastening member 162' as it is, the user can easily adjust the distance between the lower face of the first fastening member 161 'and the upper face of the upper tray by rotating the pad 163'.
In summary, while the invention has been described with reference to a limited number of drawings and embodiments, those skilled in the art will appreciate numerous modifications and variations therefrom. For example, the described techniques may be performed in a different order than the described methods, and/or the described components may be combined or combined in a different manner than the described methods, or substituted or replaced with other components or equivalents.
Claims (13)
1. A magnet holder for a tray for fixing a lower tray capable of supporting a lower side of a substrate and an upper tray capable of supporting an upper side of the substrate to each other, characterized in that,
comprising the following steps:
a clip base fixed to the lower tray;
a chuck rotatably connected to the clip base and capable of switching a position between a fixing position where the upper tray is fixed and a release position where the upper tray is released;
a clip shaft mounted to the clip base and supporting the clip head;
a contact part installed at an end of the chuck and capable of pressurizing an upper surface of the upper tray;
a base housing fixed to the clip base;
a base magnet mounted to the base housing;
a head housing fixed to the chuck; and
a head magnet mounted to the head housing and facing the base magnet with different polarities.
2. A magnet holder for pallets as claimed in claim 1, wherein,
the base housing and the head housing are spaced apart from each other when the contact portion contacts the upper surface of the upper tray and is pressurized.
3. A magnet holder for a pallet according to claim 2, wherein,
the clip does not contact the clip base or base housing when the clip is shifted between the secured and released positions.
4. A magnet holder for pallets as claimed in claim 1, wherein,
the contact portion includes:
a first fastening member including a fastening head facing the upper tray and a fastening body protruding from a central portion of the fastening head and penetrating the chuck; and
a second fastening member for securing the first fastening member to the collet.
5. A magnet holder for pallets as claimed in claim 4, wherein,
the contact portion further includes:
a spacer is disposed between the tightening head of the first tightening member and the collet and provides a space between the base housing and the head housing when the collet is in the secured position.
6. A magnet holder for pallets as claimed in claim 1, wherein,
the contact portion includes:
a packing which is threadably connected along the chuck and has a hollow space at an inner side thereof;
a first fastening member facing the upper tray and threadably connected to the hollow space of the pad; and
a second fastener disposed on an opposite side of the first fastener member with respect to the collet and threadably coupled to the pad,
the pad is movable relative to the collet.
7. A magnet holder for pallets as claimed in claim 1, wherein,
the base housing is formed in plurality so as to be symmetrical about the chuck.
8. A magnet holder for pallets as claimed in claim 1, wherein,
the base housing has a hollow region for receiving the base magnet.
9. A magnet holder for pallets as claimed in claim 8, wherein,
the hollow region of the base housing is formed to be open in a direction opposite to a side facing the head magnet.
10. A magnet holder for pallets as claimed in claim 9, wherein,
the base housing includes:
a base cover for closing an opening of the hollow region in a state where the hollow region accommodates the base magnet.
11. A magnet holder for pallets as claimed in claim 10, wherein,
the base housing includes a cover fixing member for fixing the base cover.
12. A magnet holder for pallets as claimed in claim 1, wherein,
further comprises:
and a shaft fixing member for fixing the clip shaft to the clip base.
13. A magnet holder for a tray for fixing a lower tray capable of supporting a lower side of a substrate and an upper tray capable of supporting an upper side of the substrate to each other, characterized in that,
comprising the following steps:
a clip base fixed to the lower tray;
a chuck rotatably connected to the clip base and capable of switching a position between a fixing position where the upper tray is fixed and a release position where the upper tray is released;
a base housing fixed to the clip base;
a base magnet mounted to the base housing;
a head housing fixed to the chuck; and
a head magnet mounted to the head housing and facing the base magnet with different polarities,
the clip does not contact the clip base or base housing when the clip is shifted between the secured and released positions.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020200004874A KR20210091557A (en) | 2020-01-14 | 2020-01-14 | Magnet clamp for tray |
| KR10-2020-0004874 | 2020-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113122815A CN113122815A (en) | 2021-07-16 |
| CN113122815B true CN113122815B (en) | 2023-09-15 |
Family
ID=76772074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011311683.4A Active CN113122815B (en) | 2020-01-14 | 2020-11-20 | Magnet clamp for tray |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20210091557A (en) |
| CN (1) | CN113122815B (en) |
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| KR101813581B1 (en) * | 2017-11-13 | 2017-12-29 | 신흥우드테크(주) | Prefabricated pallet |
| CN207464762U (en) * | 2017-11-16 | 2018-06-08 | 昆山泽华精密模具有限公司 | Fast fixture with electromagnetism pallet |
| CN109311605A (en) * | 2017-05-29 | 2019-02-05 | Ulvac韩国股份有限公司 | Rotating clamping device |
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of vacuum magnetic control rotary double-face coating clamp |
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2020
- 2020-01-14 KR KR1020200004874A patent/KR20210091557A/en unknown
- 2020-11-20 CN CN202011311683.4A patent/CN113122815B/en active Active
Patent Citations (10)
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| JPS58102526A (en) * | 1981-12-14 | 1983-06-18 | Nec Corp | Pallet jig for sputtering |
| KR20060068439A (en) * | 2004-12-16 | 2006-06-21 | 삼성에스디아이 주식회사 | Vertical mask tray and deposit apparatus with the same |
| KR100583522B1 (en) * | 2005-01-05 | 2006-05-25 | 삼성에스디아이 주식회사 | Holding tray for substrate, substrate alignment system using the same and method thereof |
| CN101090994A (en) * | 2005-02-23 | 2007-12-19 | 三井造船株式会社 | Mask holding mechanism and film forming apparatus |
| TW201137150A (en) * | 2010-04-16 | 2011-11-01 | Hon Hai Prec Ind Co Ltd | Clamp for lens tray of sputtering machine |
| CN104737283A (en) * | 2012-10-22 | 2015-06-24 | 佳能安内华股份有限公司 | Substrate processing apparatus |
| CN109311605A (en) * | 2017-05-29 | 2019-02-05 | Ulvac韩国股份有限公司 | Rotating clamping device |
| KR101813581B1 (en) * | 2017-11-13 | 2017-12-29 | 신흥우드테크(주) | Prefabricated pallet |
| CN207464762U (en) * | 2017-11-16 | 2018-06-08 | 昆山泽华精密模具有限公司 | Fast fixture with electromagnetism pallet |
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of vacuum magnetic control rotary double-face coating clamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113122815A (en) | 2021-07-16 |
| KR20210091557A (en) | 2021-07-22 |
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