CN113118127B - 一种mems技术用石英基片的清洗装置 - Google Patents
一种mems技术用石英基片的清洗装置 Download PDFInfo
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- CN113118127B CN113118127B CN202110406227.6A CN202110406227A CN113118127B CN 113118127 B CN113118127 B CN 113118127B CN 202110406227 A CN202110406227 A CN 202110406227A CN 113118127 B CN113118127 B CN 113118127B
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- CN
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- Prior art keywords
- cleaning
- side wall
- fixedly connected
- tank body
- electric slide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110406227.6A CN113118127B (zh) | 2021-04-15 | 2021-04-15 | 一种mems技术用石英基片的清洗装置 |
Applications Claiming Priority (1)
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CN202110406227.6A CN113118127B (zh) | 2021-04-15 | 2021-04-15 | 一种mems技术用石英基片的清洗装置 |
Publications (2)
Publication Number | Publication Date |
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CN113118127A CN113118127A (zh) | 2021-07-16 |
CN113118127B true CN113118127B (zh) | 2022-03-08 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202110406227.6A Active CN113118127B (zh) | 2021-04-15 | 2021-04-15 | 一种mems技术用石英基片的清洗装置 |
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CN (1) | CN113118127B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114273329B (zh) * | 2021-12-31 | 2024-07-02 | 辽宁新瑞碳材料科技有限公司 | 一种用于人造金刚石的清洗设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2868398A1 (en) * | 2013-10-29 | 2015-05-06 | Cliris SA | Device and Method for Ultrasonic Cleaning |
CN206689136U (zh) * | 2017-02-13 | 2017-12-01 | 深圳市佳洁农业投资发展有限公司 | 一种带有清洗篮的超声波清洗机 |
CN206794265U (zh) * | 2017-05-08 | 2017-12-26 | 济源石晶光电频率技术有限公司 | 一种清洗大尺寸石英晶片的清洗装置 |
CN109396111A (zh) * | 2018-11-13 | 2019-03-01 | 武汉力诚光学仪器有限公司 | 用于制备光学镜片的超声波清洗机 |
CN210523262U (zh) * | 2019-09-02 | 2020-05-15 | 成都晶宝时频技术股份有限公司 | 石英晶体超声波清洗机 |
CN112547675A (zh) * | 2020-11-23 | 2021-03-26 | 阜阳市世科智能设备有限公司 | 一种五金加工用清洗烘干设备 |
-
2021
- 2021-04-15 CN CN202110406227.6A patent/CN113118127B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2868398A1 (en) * | 2013-10-29 | 2015-05-06 | Cliris SA | Device and Method for Ultrasonic Cleaning |
CN206689136U (zh) * | 2017-02-13 | 2017-12-01 | 深圳市佳洁农业投资发展有限公司 | 一种带有清洗篮的超声波清洗机 |
CN206794265U (zh) * | 2017-05-08 | 2017-12-26 | 济源石晶光电频率技术有限公司 | 一种清洗大尺寸石英晶片的清洗装置 |
CN109396111A (zh) * | 2018-11-13 | 2019-03-01 | 武汉力诚光学仪器有限公司 | 用于制备光学镜片的超声波清洗机 |
CN210523262U (zh) * | 2019-09-02 | 2020-05-15 | 成都晶宝时频技术股份有限公司 | 石英晶体超声波清洗机 |
CN112547675A (zh) * | 2020-11-23 | 2021-03-26 | 阜阳市世科智能设备有限公司 | 一种五金加工用清洗烘干设备 |
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CN113118127A (zh) | 2021-07-16 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Zheng Song Inventor after: Xia Liangjun Inventor before: Dou Guangbin Inventor before: Dong Yide Inventor before: Zheng Song Inventor before: Xia Liangjun |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220623 Address after: 210000 building 02, No. 80, Xingang Avenue, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province Patentee after: NANJING FEILONG TECHNOLOGY Co.,Ltd. Address before: 210000 room 808, building A1, Huizhi Science Park, Hengtai Road, Nanjing Economic and Technological Development Zone, Jiangsu Province Patentee before: Nanjing core optoelectronic Research Institute Co.,Ltd. |