CN113093649A - 13-step measurement method for measuring geometric errors of machine tool - Google Patents

13-step measurement method for measuring geometric errors of machine tool Download PDF

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CN113093649A
CN113093649A CN202110361462.6A CN202110361462A CN113093649A CN 113093649 A CN113093649 A CN 113093649A CN 202110361462 A CN202110361462 A CN 202110361462A CN 113093649 A CN113093649 A CN 113093649A
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measurement
axis
track
machine tool
measuring
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刘焕牢
侯家林
王宇林
刘璨
尹凝霞
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Guangdong Ocean University
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Priority to LU501758A priority patent/LU501758B1/en
Priority to PCT/CN2022/078769 priority patent/WO2022171199A1/en
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37581—Measuring errors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45136—Turning, lathe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a 13-step measuring method for measuring geometric errors of a machine tool, which consists of 9-step linear measuring tracks and 4-step stepped measuring tracks; the 9-step linear measurement track can be specifically summarized as nine measurement tracks of three single-axis motions of an X axis, a Y axis and a Z axis, a geometric space of 1000mm multiplied by 500mm is taken as a measurement object, the track is the measurement track of the X axis motion, the track is the measurement track of the Z axis motion, and the track is the measurement track of the Y axis motion. The invention divides the whole steps into two steps for measurement, can select according to the measurement requirements, adopts a step-type measurement method during multi-axis linkage measurement, adopts a step-type movement track, can more conveniently identify the corner error of a single axis and the verticality error associated with the corner error, and simultaneously reduces the complicated labor during adjusting the light path.

Description

13-step measurement method for measuring geometric errors of machine tool
Technical Field
The invention relates to the technical field of manufacturing and processing of numerical control machine tools, in particular to a 13-step measuring method for measuring geometrical errors of a machine tool.
Background
The numerical control machine tool is an automatic machine tool and is an automatic machine tool with a program control system. The control system can logically process a program provided with control codes or other symbolic instructions, decode the program, represent the program by coded numbers, input the coded numbers into the numerical control device through an information carrier, send various control signals by the numerical control device through arithmetic processing, control the action of a machine tool and automatically machine parts according to the shapes and the sizes required by a drawing.
At present, methods for measuring geometrical errors of a machine tool are various in variety, but the problems of measuring time consumption and measuring error comprehensiveness in the geometrical error measurement are not considered, some methods simplify multi-axis linkage in order to reduce time in the geometrical measurement, and some methods spend more time on optical path adjustment in the multi-axis linkage measurement in order to measure the multi-axis linkage.
Disclosure of Invention
The invention provides a 13-step measuring method for measuring geometrical errors of a machine tool, aiming at the defects in the background technology.
The invention adopts the following technical scheme that a 13-step measuring method for measuring the geometric error of a machine tool consists of 9-step linear measuring tracks and 4-step measuring tracks; the 9-step linear measurement track can be specifically summarized into nine measurement tracks of three single-axis motions of an X axis, a Y axis and a Z axis, a geometric space of 1000mm multiplied by 500mm is taken as a measurement object, the track is the measurement track of the X axis motion, the track is the measurement track of the Z axis motion, and the track is the measurement track of the Y axis motion; the 4-step measurement trace can be summarized as measurement path (R) generated by XY two-axis linkage and measurement path (R) generated by YZ two-axis linkage
Figure BDA0003005725630000011
Measuring path generated by ZX two-axis linkage
Figure BDA0003005725630000012
And a measurement path generated by the linkage of XYZ three axes
Figure BDA0003005725630000013
As a further preferable mode of the invention, the 9-step straight line measurement track is a straight line track along each designated edge of the measured geometric space; the 4-step stepped measurement track is along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, the XY axis linkage motion track is stepped and stepped of other various step-by-step approaches, the YZ axis linkage motion track is stepped of stepped and other various step-by-step approaches, the ZX axis linkage motion track is stepped of stepped and other various step-by-step approaches, and the XYZ three axis linkage motion track is stepped of stepped and other various step-by-step approaches.
As a further preferable mode of the present invention, the measurement sequence of the 13-step measurement method is from the trajectory (i) to the trajectory (ii)
Figure BDA0003005725630000014
And sequentially collecting the positioning errors at the measuring points.
The measuring method comprises the following steps:
s1, taking a geometric space of the numerical control machine tool with the size of 1000mm multiplied by 500mm as a measuring object, setting the left lower corner of the front end of the three-axis numerical control machine tool workbench as an absolute coordinate origin, and establishing a Cartesian coordinate system by the origin;
s2, the 9-step straight line measurement track can be specifically summarized into nine measurement tracks of X-axis, Y-axis and Z-axis motion, namely a track (I) is the measurement track of the X-axis motion, a track (II) is the measurement track of the Z-axis motion, and a track (III) is the measurement track of the Y-axis motion; 9 steps of single-axis motion are all carried out along each appointed edge of the measured geometric space, the track is a straight line, and the measuring instrument is a laser interferometer;
s3, 4-step measurement trace can be specifically summarized as measurement path in (R) generated by XY two-axis linkage, and measurement path in (YZ) two-axis linkage
Figure BDA0003005725630000021
Measuring path generated by ZX two-axis linkage
Figure BDA0003005725630000022
And a measurement path generated by the linkage of XYZ three axes
Figure BDA0003005725630000023
All measuring paths are carried out along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, and the tracks are in a step shape, wherein the XY axis linkage motion track is in a step shape and other step-by-step motion methods, namely the actual running track of the path (R); the YZ axis linkage motion track is stepped and other stepped ways in different steps, i.e. the path
Figure BDA0003005725630000024
The actual running track of (2); the ZX axis linkage motion track is in a step shape and other step-by-step moving methods, i.e. the path
Figure BDA0003005725630000025
The actual running track of (2); the X, Y, Z and three-axis linkage movement locus is in a step shape and other step-by-step walking methods, namely a path
Figure BDA0003005725630000026
The actual running track of (2); the measuring instrument is a laser Doppler displacement measuring instrument.
As a further preferable mode of the present invention, in step S2, the numerical control program is edited to make the machine tool perform a trial run along the trajectory (i.e. perform a single-axis motion along the X-axis direction), after the trial run of the machine tool is completed, the machine tool is installed at a corresponding position on the machine tool according to the installation requirement of the laser interferometer, then a suitable spacing distance is selected according to the ISO230-2 standard to perform quasi-static measurement, wherein the spacing distance is 40mm, 26 corresponding data acquisition points are provided, the machine tool stays at the data acquisition points for 10 seconds, and positioning error data of 5 cycles of the machine tool cycle operation are acquired, and the acquired data are transmitted to the computer to be drawn into an image and other related data.
As a further preferable mode of the present invention, in step S2, the measurement trajectory is measured sequentially from the second step to the ninth step, wherein the distance between the Y axis and the Z axis is 20mm since the distance between the Y axis and the Z axis is short, and the others are the same as those in the first step.
As a further preferred mode of the present invention, in step S3, 4 steps are a multi-axis linkage positioning error measuring method, and in the tenth step, a numerical control program is edited to test the machine tool along the trajectory r, i.e. XY axis linkage is required and the machine tool program is operated according to the step-like trajectory of fig. 2, unlike the body diagonal measuring method in the existing 13-line measuring method, the method does not need to direct the mirror to the direction of diagonal movement, but uses a laser doppler displacement measuring instrument to perform step-like stepwise measurement in two directions X, Y, wherein the measurement increments in X, Y direction are 40mm and 20mm respectively, and a quasi-static measuring point is set at the corner of each line segment, and the specific measuring process can be summarized as starting from the origin, pausing after moving 40mm in the X-axis direction, automatically acquiring data, then moving 20mm in the Y-axis direction, and (5) suspending, automatically acquiring data, wherein 51 corresponding acquisition points exist, and the data of the machine tool positioning errors in 3 periods are acquired.
As a further preferable mode of the present invention, in step S3, the subsequent eleventh step, twelfth step, and thirteenth step, the measurement trajectory is determined in accordance with
Figure BDA0003005725630000031
Sequentially measure, trace
Figure BDA0003005725630000032
Generated for YZ axis linkage
Figure BDA0003005725630000033
For the generation of ZX-axis linkage
Figure BDA0003005725630000035
Generated for XYZ axes linkage, wherein the track
Figure BDA0003005725630000034
The increment in the Z-axis direction was 20mm, and the others were the same as in the tenth step.
The invention divides the whole steps into two steps for measurement, can select according to the measurement requirements, adopts a step-type measurement method during multi-axis linkage measurement, adopts a step-type movement track, can more conveniently identify the corner error of a single axis and the verticality error associated with the corner error, and simultaneously reduces the complicated labor during adjusting the light path.
Drawings
FIG. 1 is a schematic diagram of the 13-step geometric error measurement method of the present invention;
FIG. 2 is a schematic diagram of the stepped trajectory of the XY-axis linkage of the present invention;
FIG. 3 is a schematic view of the stepped trajectory of the YZ axis linkage of the present invention;
FIG. 4 is a schematic stepped trace of the ZX axis linkage of the present invention;
FIG. 5 is a schematic diagram of the stepped trajectory of the XYZ axes linkage of the present invention;
FIG. 6 is a schematic diagram of an XYZ-axis linkage stepped trajectory planar development of the present invention;
FIG. 7 is an image of the locus ((R) positioning error data) of the present invention;
fig. 8 is an image of error data for location of trace r in accordance with the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a technical scheme that: a13-step measuring method for measuring geometric errors of a machine tool consists of 9-step linear measuring tracks and 4-step stepped measuring tracks; the 9-step linear measurement track can be specifically summarized into nine measurement tracks of X-axis, Y-axis and Z-axis single-axis motions, a geometric space of 1000mm multiplied by 500mm is taken as a measurement object, the track is the measurement track of the X-axis motion, the track is the measurement track of the Z-axis motion, and the track is the measurement track of the Z-axis motionIs the measurement trajectory of the Y-axis motion; the 4-step measurement trace can be summarized as measurement path (R) generated by XY two-axis linkage and measurement path (R) generated by YZ two-axis linkage
Figure BDA0003005725630000041
Measuring path generated by ZX two-axis linkage
Figure BDA0003005725630000042
And a measurement path generated by the linkage of XYZ three axes
Figure BDA0003005725630000043
The 9-step linear measurement track is a linear track along each designated edge of the measured geometric space; the 4-step stepped measurement track is along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, the XY axis linkage motion track is stepped and stepped of other various step-by-step walking methods, the YZ axis linkage motion track is stepped of stepped and other various step-by-step walking methods, the ZX axis linkage motion track is stepped of stepped and other various step-by-step walking methods, the XYZ three axis linkage motion track is stepped of stepped and other various step-by-step walking methods, and the measurement sequence of the 13-step measurement method is from the track I to the track I
Figure BDA0003005725630000044
And sequentially collecting the positioning errors at the measuring points.
The measuring method comprises the following steps:
s1, taking a geometric space of the numerical control machine tool with the size of 1000mm multiplied by 500mm as a measuring object, setting the left lower corner of the front end of the three-axis numerical control machine tool workbench as an absolute coordinate origin, and establishing a Cartesian coordinate system by the origin;
s2, the 9-step straight line measurement track can be specifically summarized into nine measurement tracks of X-axis, Y-axis and Z-axis motion, namely a track (I) is the measurement track of the X-axis motion, a track (II) is the measurement track of the Z-axis motion, and a track (III) is the measurement track of the Y-axis motion; 9 steps of single-axis motion are all carried out along each appointed edge of the measured geometric space, the track is a straight line, and the measuring instrument is a laser interferometer;
s3, 4-step measurement trace can be specifically summarized as measurement path in (R) generated by XY two-axis linkage, and measurement path in (YZ) two-axis linkage
Figure BDA0003005725630000046
Measuring path generated by ZX two-axis linkage
Figure BDA0003005725630000045
And a measurement path generated by the linkage of XYZ three axes
Figure BDA0003005725630000047
All measuring paths are carried out along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, and the tracks are in a step shape, wherein the XY axis linkage motion track is in a step shape and other step-by-step motion methods, namely the actual running track of the path (R); the YZ axis linkage motion track is stepped and other stepped ways in different steps, i.e. the path
Figure BDA0003005725630000048
The actual running track of (2); the ZX axis linkage motion track is in a step shape and other step-by-step moving methods, i.e. the path
Figure BDA0003005725630000049
The actual running track of (2); the X, Y, Z and three-axis linkage movement locus is in a step shape and other step-by-step walking methods, namely a path
Figure BDA00030057256300000410
The actual running track of (2); the measuring instrument is a laser Doppler displacement measuring instrument.
In step S2, editing a numerical control program to enable the machine tool to perform trial operation along a trajectory (i.e., perform single-axis motion along the X-axis direction), after the trial operation of the machine tool is completed, installing the laser interferometer at a corresponding position on the machine tool according to the installation requirements of the laser interferometer, then selecting a proper spacing distance to perform quasi-static measurement according to the ISO230-2 standard, wherein the spacing distance is 40mm, 26 corresponding data acquisition points are provided, the machine tool stays at the data acquisition points for 10 seconds, acquires positioning error data of 5 cycles of the machine tool in a circulating operation, and transmits the acquired data to a computer to be drawn into an image and other related data.
In step S2, the measurement trajectory is measured sequentially from two to nine, where the distance between the Y axis and the Z axis is 20mm because the distance between the Y axis and the Z axis is short, and the others are the same as those in the first step.
In step S3, 4 steps are a multi-axis linkage positioning error measurement method, and tenth step, a numerical control program is edited to make the machine tool perform trial operation along the trace r, i.e. XY axis linkage is required and the machine tool program is made to operate according to the step-shaped trace of fig. 2, unlike the existing 13-line measurement method, the method does not need to make the reflector face the direction of diagonal movement, but makes step-shaped measurement in two directions X, Y by using a laser doppler displacement measuring instrument, wherein, the measurement increment in X, Y direction is 40mm and 20mm respectively, the corner of each line segment is set as a quasi-static measurement point, the specific measurement process can be summarized as starting from the origin, moving 40mm along the X axis direction, pausing, automatically acquiring data, then moving 20mm along the Y axis direction, pausing, automatically acquiring data, and corresponding to 51 acquisition points, and collecting the machine tool positioning error data of 3 periods.
In step S3, the measurement trajectory is determined according to the tenth step, the twelfth step, and the thirteenth step
Figure BDA0003005725630000053
Sequentially measure, trace
Figure BDA0003005725630000056
Generated for YZ axis linkage
Figure BDA0003005725630000055
For the generation of ZX-axis linkage
Figure BDA0003005725630000054
For generating linkage of XYZ axesWherein, the track
Figure BDA0003005725630000057
The increment in the Z-axis direction was 20mm, and the others were the same as in the tenth step.
Example one
The invention provides a technical scheme that: a13-step measurement method for measuring geometric errors of a machine tool is used for measuring positioning errors of single-axis motion by using a 13-step geometric error measurement method, the 8 th line (namely, the eighth step) in figure 1 is taken as an example for measurement, and a Cartesian coordinate system is established by taking B as an origin in combination with actual measurement conditions. Firstly, an optical lens group is arranged on a machine tool workbench, then a light path generated by a laser head in a laser interferometer is emitted to a lens, and then the relative position of the optical lens group is adjusted, so that the purpose of measuring distance is achieved, single-axis motion is measured to be linear motion, the adjustment of the light path is convenient, and the obtained data is plotted and displayed in figure 7, wherein the data is-4.265 micrometers, R is 9.958 micrometers, and A is 28.204 micrometers. If other 21 geometric errors are to be obtained, the trajectory (i) to (f) needs to be obtained continuously by the method
Figure BDA0003005725630000058
And then combining error identification methods in the 22-line, 15-line, 12-line and 9-line measurement methods to obtain an angle error, a straightness error and a verticality error.
The error data of the 13-step geometric error measurement method is detected and judged by using the following international standard ISO 230-2:
1. the position deviation being such that the error in the position determined by the measuring instrument is equal to the actual position PijAnd a target position PiThe difference of (i.e. x)ij＝Pij-Pi。
2. The one-way average positional deviation is an average deviation calculated by measuring n times at a certain point, i.e.
Figure BDA0003005725630000051
And
Figure BDA0003005725630000052
3. the bi-directional mean position deviation (described point) is the average of the positive mean position deviation and the negative mean position deviation of a point, i.e. the point is described as the mean of the positive mean position deviation and the negative mean position deviation
Figure BDA0003005725630000061
4. The reverse gap being the difference between the positive and negative mean position deviations of a position, i.e.
Figure BDA0003005725630000062
5. The average reverse gap being the average of m reverse gaps at a point, i.e.
Figure BDA0003005725630000063
6. The one-way repetition accuracy evaluation value is a standard deviation of a position deviation at a certain point, i.e.
Figure BDA0003005725630000064
And
Figure BDA0003005725630000065
7. the one-way position repetition accuracy (description point) is 4 times of the one-way repetition accuracy evaluation value at a certain point, namely Ri↑＝4Si↓ (forward direction) and Ri↓＝4Si↓ (negative direction).
8. Bidirectional position repeat accuracy (description point) Ri＝max[2Si↑+2Si↓+|Bi|；Ri↑；Ri↓]
9. Bi-directional position repeat accuracy (description axis) R ═ max [ R [ ]i]
10. Deviation of two-way positioning system
Figure BDA0003005725630000066
11. Mean bit of two directionsOffset (description axis)
Figure BDA0003005725630000067
12. Two-way positioning accuracy (description axis)
Figure BDA0003005725630000068
Example two
The invention provides a technical scheme that: a13-step measurement method for measuring geometrical errors of a machine tool is used for measuring positioning errors of multi-axis linkage by using a 13-step geometrical error measurement method, taking a 10 th line (namely, a tenth step) in fig. 1 as an example for measurement, and establishing a Cartesian coordinate system by taking B as an origin in combination with actual measurement conditions, wherein a laser Doppler displacement measuring instrument is used as an instrument to be used. The multi-axis linkage type laser distance measuring device is characterized in that an optical lens group is arranged on a machine tool workbench, then a light path generated by a laser head in a laser interferometer is emitted to a lens, and the relative position of the optical lens group is adjusted, so that the distance is measured. The data obtained is now plotted and shown in fig. 8 as 1.693 microns, R5.520 microns, a 24.444 microns. If other 21 geometric errors are to be obtained, the trajectory (i) to (f) needs to be obtained continuously by the method
Figure BDA0003005725630000071
And then combining error identification methods in the 22-line, 15-line, 12-line and 9-line measurement methods to obtain an angle error, a straightness error and a verticality error.
In conclusion, the whole steps are divided into two steps for measurement, selection can be carried out according to measurement requirements, a stepped measurement method is adopted in multi-axis linkage measurement, the adopted stepped motion track can more conveniently identify the corner error of a single axis and the perpendicularity error associated with the corner error, and meanwhile, the tedious labor in adjusting the light path is reduced; in addition, the 13-step geometric error measurement method adopts step-type motion instead of original oblique line motion in a measurement space, so that a pause point can be more conveniently designed for measurement, and data can be more conveniently acquired; meanwhile, the 13-step geometric error measurement method also comprises a nine-step uniaxial motion measurement method, and the method is also applicable to the situation that the measurement instrument only has a laser interferometer.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. A13-step measuring method for measuring geometric errors of a machine tool is characterized by comprising 9-step linear measuring tracks and 4-step stepped measuring tracks; the 9-step linear measurement track can be specifically summarized into nine measurement tracks of three single-axis motions of an X axis, a Y axis and a Z axis, a geometric space of 1000mm multiplied by 500mm is taken as a measurement object, the track is the measurement track of the X axis motion, the track is the measurement track of the Z axis motion, and the track is the measurement track of the Y axis motion; the above-mentionedThe detailed outline of the 4-step measurement trace is measurement path (R) generated by XY two-axis linkage, and measurement path (R) generated by YZ two-axis linkage
Figure FDA0003005725620000011
Measuring path generated by ZX two-axis linkage
Figure FDA0003005725620000012
And a measurement path generated by the linkage of XYZ three axes
Figure FDA0003005725620000013
2. The 13-step measurement method for measuring the geometric errors of the machine tool is characterized in that the 9-step straight line measurement track is a straight line track along each designated edge of the measured geometric space; the 4-step stepped measurement track is along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, the XY axis linkage motion track is stepped and stepped of other various step-by-step approaches, the YZ axis linkage motion track is stepped of stepped and other various step-by-step approaches, the ZX axis linkage motion track is stepped of stepped and other various step-by-step approaches, and the XYZ three axis linkage motion track is stepped of stepped and other various step-by-step approaches.
3. A 13-step measurement method for machine tool geometric error measurement according to claim 1, wherein the measurement sequence of the 13-step measurement method is from trace (i) to trace (i)
Figure FDA0003005725620000014
And sequentially collecting the positioning errors at the measuring points.
4. A 13-step measurement method for machine tool geometric error measurement according to any one of claims 1-3, wherein the measurement step comprises the following steps:
s1: taking a geometric space of a numerical control machine tool with the size of 1000mm multiplied by 500mm as a measuring object, setting the left lower corner of the front end of a three-axis numerical control machine tool workbench as an absolute coordinate origin, and establishing a Cartesian coordinate system by using the origin;
s2: the 9-step linear measurement track can be specifically summarized into nine measurement tracks of three single-axis motions of an X axis, a Y axis and a Z axis, namely a track (I) is the measurement track of the X axis motion, a track (II) is the measurement track of the Z axis motion, and a track (III) is the measurement track of the Y axis motion; 9 steps of single-axis motion are all carried out along each appointed edge of the measured geometric space, the track is a straight line, and the measuring instrument is a laser interferometer;
s3: the 4-step measurement trajectory can be specifically summarized as measurement path in (R) generated by XY two-axis linkage, and measurement path in (YZ) two-axis linkage
Figure FDA0003005725620000015
Measuring path generated by ZX two-axis linkage
Figure FDA0003005725620000016
And a measurement path generated by the linkage of XYZ three axes
Figure FDA0003005725620000017
All measuring paths are carried out along the face diagonal line on each face of the measured geometric space and the body diagonal line on the space, and the tracks are in a step shape, wherein the XY axis linkage motion track is in a step shape and other step-by-step motion methods, namely the actual running track of the path (R); the YZ axis linkage motion track is stepped and other stepped ways in different steps, i.e. the path
Figure FDA0003005725620000018
The actual running track of (2); the ZX axis linkage motion track is in a step shape and other step-by-step moving methods, i.e. the path
Figure FDA0003005725620000019
The actual running track of (2); the X, Y, Z and three-axis linkage motion track isStepped and other steps of step-by-step routing, i.e. paths
Figure FDA0003005725620000021
The actual running track of (2); the measuring instrument is a laser Doppler displacement measuring instrument.
5. The 13-step measurement method for measuring the geometric errors of the machine tool as claimed in claim 4, wherein in step S2, the numerical control program is edited to make the machine tool perform a trial run along the trajectory (i.e. perform a single-axis motion along the X-axis direction), after the trial run of the machine tool is completed, the machine tool is mounted at a corresponding position on the machine tool according to the mounting requirements of the laser interferometer, and then a proper spacing distance is selected to perform quasi-static measurement according to the ISO230-2 standard, wherein the spacing distance is 40mm, 26 corresponding data acquisition points are provided, the machine tool stays at the data acquisition points for 10 seconds, positioning error data of 5 cycles of the circular operation of the machine tool is acquired, and the acquired data is transmitted to the computer to be drawn into an image and other related data.
6. The 13-step measurement method for measuring the geometric errors of the machine tool as claimed in claim 4, wherein in step S2, the measurement trajectories are measured sequentially from the second step to the ninth step, wherein the distance between the Y axis and the Z axis is 20mm since the moving distance is shorter, and the rest distances are the same as the first step.
7. The 13-step measurement method for machine tool geometric error measurement according to claim 4, wherein in step S3, 4 steps are multi-axis linkage positioning error measurement method, and in the tenth step, the numerical control program is edited to make the machine tool perform trial operation along the trace r, i.e. XY axis linkage is required and the machine tool program is made to perform step-by-step measurement in two directions X, Y by using the laser doppler displacement measuring instrument, unlike the existing body diagonal measurement method in 13-line measurement method, the method does not need to make the mirror face the direction of diagonal movement, and the measurement increment in the X, Y direction is 40mm and 20mm respectively, the setting of each line segment is quasi-static measurement point, and the specific measurement process can be summarized as moving from the origin by 40mm in the X-axis direction, and (3) suspending, automatically acquiring data, then moving for 20mm along the Y-axis direction, suspending, automatically acquiring data, wherein 51 corresponding acquisition points exist, and acquiring 3 periods of machine tool positioning error data.
8. The 13-step measurement method for measuring the geometric errors of the machine tool as claimed in claim 4, wherein in the step S3, the subsequent eleventh step, the twelfth step and the thirteenth step, the measurement tracks are measured according to the following steps
Figure FDA0003005725620000022
Sequentially measure, trace
Figure FDA0003005725620000023
Generated for YZ axis linkage
Figure FDA0003005725620000024
For the generation of ZX-axis linkage
Figure FDA0003005725620000025
Generated for XYZ axes linkage, wherein the track
Figure FDA0003005725620000026
The increment in the Z-axis direction was 20mm, and the others were the same as in the tenth step.
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