CN113092616A - Research method for influence degree of sulfur hexafluoride breaker arc discharge decomposition product on nozzle material - Google Patents

Research method for influence degree of sulfur hexafluoride breaker arc discharge decomposition product on nozzle material Download PDF

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Publication number
CN113092616A
CN113092616A CN202110358120.9A CN202110358120A CN113092616A CN 113092616 A CN113092616 A CN 113092616A CN 202110358120 A CN202110358120 A CN 202110358120A CN 113092616 A CN113092616 A CN 113092616A
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isotope
sulfur hexafluoride
arc discharge
influence degree
discharge decomposition
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杨韧
闫静
耿英三
王承玉
汪金星
徐孟元
刘健
王建华
刘志远
杨明昊
郭楠
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State Grid Corp of China SGCC
Xian Jiaotong University
State Grid Shaanxi Electric Power Co Ltd
Electric Power Research Institute of State Grid Shaanxi Electric Power Co Ltd
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State Grid Corp of China SGCC
Xian Jiaotong University
State Grid Shaanxi Electric Power Co Ltd
Electric Power Research Institute of State Grid Shaanxi Electric Power Co Ltd
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Priority to CN202110358120.9A priority Critical patent/CN113092616A/en
Publication of CN113092616A publication Critical patent/CN113092616A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography

Abstract

The invention discloses a research method for the influence degree of arc discharge decomposition products of a sulfur hexafluoride breaker on a nozzle material, and belongs to the technical field of electric power. According to the research on the influence degree of the sulfur hexafluoride circuit breaker arc discharge decomposition product on the spout material, the isotope tracing technology is utilized to mark key elements in the polytetrafluoroethylene material, the spout material is made into a spout and placed into the sulfur hexafluoride circuit breaker for a breaking test, and then the analysis equipment is utilized to measure the type, content and concentration ratio of the product containing the isotope mark in the sulfur hexafluoride circuit breaker arc discharge decomposition product, so that the research on the influence degree of the sulfur hexafluoride circuit breaker arc discharge decomposition product on the spout material is realized. The research method solves the problems of tracking and tracing the reaction path of the damage of the nozzle material of the circuit breaker under the arc discharge working condition, and is SF6Circuit breaker operating condition evaluation or fault diagnosis provides important data support.

Description

Research method for influence degree of sulfur hexafluoride breaker arc discharge decomposition product on nozzle material
Technical Field
The invention belongs to the technical field of electric power, and relates to a research method for the influence degree of arc discharge decomposition products of a sulfur hexafluoride breaker on a nozzle material.
Background
Sulfur hexafluoride (SF)6) The circuit breaker is widely applied to a power grid, is a main circuit breaker type with a voltage grade of 72.5kV or above at present, and is directly related to the safety and stability of the power grid if the operation condition of equipment is safe or not. The nozzle is SF6The circuit breaker blows out the key part of electric arc, directly influences the breaking performance of circuit breaker. The polytetrafluoroethylene has excellent insulating property, chemical stability,The high temperature resistance and the corrosion resistance are widely used for manufacturing the nozzle. When the breaker is opened, the moving contact and the static contact are separated and an electric arc is generated along with the movement of the moving contact, and high-voltage SF6The gas is blown to the electric arc through the opened nozzle, so as to play a role in arc extinction. In the process of opening and closing the circuit breaker, the generated arc current ranges from hundreds of amperes to thousands of amperes, the typical arcing time is 10-20 ms, and the discharge energy is 104To 107J, the central temperature of the electric arc can reach 20000K, the electric arc energy directly or indirectly acts on the inner surface of the nozzle through a thermal radiation, high-temperature thermal boundary layer or an electric arc column, so that the surface material of the nozzle is melted or vaporized, a large amount of polytetrafluoroethylene vapor is formed and participates in the subsequent reaction with low-fluorine sulfide and trace moisture and oxygen impurities, and finally a large amount of SF containing carbon and fluorine elements is formed6Trace amounts of product. The larger the amount of these substances produced, the larger the amount of polytetrafluoroethylene lost, the larger the diameter of the throat of the breaker nozzle, and SF6The air pressure acting on the throat part of the nozzle in the brake opening process can be reduced, so that the rising speed of insulation after the arc is influenced, and the success or failure of the on-off is further influenced. Thus, the study of the PTFE vs. SF under the arc discharge conditions6The influence of trace products is detected by detecting the presence of polytetrafluoroethylene in SF6The damage degree of a nozzle of the circuit breaker is judged by using trace products under a gas background, and the method is very important for timely finding out the defects of the nozzle and preventing equipment accidents from further threatening the safe and stable operation of a power grid.
In a conventional research method, an arc breaking test using different energies is generally used, and the damage of a polytetrafluoroethylene material in a nozzle of a circuit breaker is researched by detecting fluorocarbon substances in the test process. The method has the disadvantages that the polytetrafluoroethylene material of the nozzle in the air chamber of the equipment contains C element, the materials of the insulator, the insulating pull rod and the like in the equipment are also made of epoxy resin materials containing C, and the material can be possibly mixed with SF when the defects such as creeping discharge and the like occur6The interaction generates the fluorocarbon substances, so that the detection of the fluorocarbon substances is difficult to correspond to the operation condition of the polytetrafluoroethylene material of the nozzle.
Disclosure of Invention
To g inIn view of the above-mentioned shortcomings of the prior art, the present invention aims to provide a method for researching the influence degree of the arc discharge decomposition product of a sulfur hexafluoride circuit breaker on the spout material, which solves the problems of reaction path tracing and tracing of the damage of the spout material of the circuit breaker under the discharge working condition, and is SF6Circuit breaker operating condition evaluation or fault diagnosis provides important data support.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a method for researching the influence degree of an arc discharge decomposition product of a sulfur hexafluoride breaker on a nozzle material.
Preferably, the carbon element isotope is used as the key element in the polytetrafluoroethylene material marked by the isotope labeling technology.
Further preferably, the method for measuring the type, content and concentration ratio of the product containing the isotope label in the sulfur hexafluoride decomposition product realizes the research on the influence degree of the arc discharge decomposition product of the sulfur hexafluoride breaker on the spout material, and specifically comprises the following steps: collecting isotope-labeled polytetrafluoroethylene nozzles after a cut-off test, generated sulfur hexafluoride gas decomposition products and generated solid decomposition products for detection, and determining the type, content and concentration ratio of the carbon element-containing isotope-labeled products; and secondly, comparing the detection results, analyzing the generation and evolution rules of the carbon element-containing isotope labeled products, determining the corresponding relation between the arc discharge decomposition products and the isotope carbon element-labeled polytetrafluoroethylene nozzle material, and realizing the research on the influence degree of the sulfur hexafluoride breaker arc discharge decomposition products on the nozzle material.
Preferably, in the second step, the concentrations of the carbon-containing isotope and the carbon-free isotope product in the discharge test detection result are compared, the change rule of the carbon-containing isotope product and the carbon-free isotope product along with the test times and time is analyzed, and the influence degree of the arc discharge decomposition product and the carbon-element isotope-labeled polytetrafluoroethylene nozzle material is determined.
Further preferably, the element for isotopic labeling is13C。
Preferably, the first and second electrodes are formed of a metal,13the C isotope labeled polytetrafluoroethylene material is prepared by the following operations: is composed of13C isotope labeled chloroform13CHCl3Reaction products with hydrogen fluoride13CHClF2After high-temperature cracking, deacidifying and drying, obtaining the monomer tetrafluoroethylene13CF4Then pass through13CF4By polymerization13C isotope labeled polytetrafluoroethylene material.
Preferably, the experimental condition of the discharge is arc discharge.
Preferably, the analysis device comprises: gas chromatograph, mass spectrometer, gas chromatography-mass spectrometer, infrared absorption spectrometer, electrochemical sensor, photoacoustic spectrometer and nuclear magnetic resonance analyzer.
Preferably, the isotopically labeled product comprises:13CF413C2F613C3F8、SF5 13CF3、SF5O13CF313CO213CO、13CS2comprising13C carbon-containing solid product.
Preferably, the polytetrafluoroethylene nozzle containing the isotope label is prepared by adopting a method of mould pressing and sintering molding.
Compared with the prior art, the invention has the following beneficial effects:
the invention discloses a research method for the influence degree of arc discharge decomposition products of a sulfur hexafluoride breaker on a nozzle material, which is characterized in that isotope is utilized to mark sulfur hexafluoride (SF)6) Teflon material for nozzle of circuit breaker, manufacture of Teflon nozzle of circuit breaker containing isotope label, and carry out discharge test on circuit breaker with exchanged nozzleExperiment, the detection and analysis of trace products containing isotope markers generated in the experiment are carried out to research the polytetrafluoroethylene and SF under the discharge working condition6The mutual reaction products can further deduce the generation and evolution rules of related carbon-containing substances, and research the SF of the nozzle material, namely polytetrafluoroethylene6The effects of breaker arc discharge decomposition products. The invention solves the problems of tracing and tracing the reaction path of the damage of the nozzle material of the circuit breaker under the discharge working condition, and can be SF6Circuit breaker operating condition evaluation or fault diagnosis provides important data support.
Furthermore, by using carbon element in the polytetrafluoroethylene material as an isotope labeling element, the influence of other materials containing carbon elements and impurities on the detection result can be effectively eliminated, and the influence of the polytetrafluoroethylene on SF is determined6Influence rule of trace products.
Furthermore, by carrying out discharge tests on polytetrafluoroethylene circuit breaker nozzles made of different voltage grades and different types and detecting and analyzing the variety and content change of the tested product containing the isotope label, SF (sulfur hexafluoride) can be detected and analyzed by the nozzle materials of the polytetrafluoroethylene circuit breakers made of different voltage grades and different types under the discharge condition6Study of the effect of minor products.
Further, by mixing13C is used as an isotope labeling element and can effectively track the discharge working condition of the polytetrafluoroethylene and SF6The reaction path of (1), the analysis of the relevant reaction mechanism, and the improvement of SF based on polytetrafluoroethylene6The detection accuracy of the trace product provides reliable data support for judgment of the working condition of the nozzle of the circuit breaker and evaluation of the service life of the equipment.
Further, by mixing13The carbon element C isotope-labeled chloroform is used as a preparation raw material of polytetrafluoroethylene, so that carbon isotopes can be effectively introduced into the polytetrafluoroethylene material and uniformly distributed, test and detection data are stable and reliable, and the universality of the research method for the influence degree of arc discharge decomposition products of the sulfur hexafluoride circuit breaker on the spout material is improved.
Further, by various detectorsThe device or the combination is used for detecting the carbon-containing trace product, the concentration of the carbon-containing isotope and the concentration of the carbon-free isotope product in the discharge test detection result are compared, the change rule of the content of the carbon-containing trace product along with the test frequency and time is analyzed, and the SF nozzle material by the polytetrafluoroethylene nozzle material can be definite6The extent of effect of trace amounts of product.
Drawings
FIG. 1 is a flow chart of an embodiment of the present invention;
FIG. 2 is a drawing of13A process flow diagram of a C isotope labeled polytetrafluoroethylene material;
fig. 3 is a wiring diagram for a circuit breaker opening test.
Wherein: 1-a capacitor bank; 2-a reactor; 3-a main switch; 4-high voltage probe; 5-SF6A circuit breaker; 6-an oscilloscope; 7-Rogowski coil.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The specific flow of the method for researching the influence degree of the sulfur hexafluoride breaker arc discharge decomposition product on the spout material is shown in fig. 1, and the method comprises the following steps:
1. the carbon isotope is used for marking carbon elements in the polytetrafluoroethylene material. The isotope-labeled polytetrafluoroethylene material is prepared by taking carbon element isotope-labeled chloroform as a raw material for preparing polytetrafluoroethylene, cracking a reaction product of the carbon element isotope-labeled chloroform and hydrogen fluoride at high temperature, deacidifying, drying to obtain monomer tetrafluoroethylene, and then performing polymerization reaction on the monomer to obtain the isotope-labeled polytetrafluoroethylene material.
FIG. 2 illustrates the fabrication of this example13A process flow chart of C carbon isotope labeling polytetrafluoroethylene material. Use of13C-labelled13CHCl3(chloroform) addition of CHCl for the preparation of Polytetrafluoroethylene3In the starting material, reaction with HF (hydrogen fluoride) produces CHClF2(difluoromethane monochloride) and high temperature cracking to produce TFE (monomer tetrafluoroethylene, C)2F4)。
13CHCl3+2HF→13CHClF2+2HCl
Figure BDA0003004430680000061
Deacidifying, drying and purifying to obtain TFE, introducing TFE into a reaction kettle filled with high-purity water by adopting a suspension polymerization process, adding an initiator, strongly stirring at a certain temperature and pressure, polymerizing to obtain large polytetrafluoroethylene particles, crushing and drying to obtain polytetrafluoroethylene suspension resin fine cut material which is used as a production raw material,
2. the polytetrafluoroethylene marked by the carbon element isotope labeling technology is used as a nozzle material to manufactureProcessing a polytetrafluoroethylene nozzle of a circuit breaker containing carbon isotope labels, and replacing parts of the nozzle made of the isotope-labeled polytetrafluoroethylene material with SF6In a circuit breaker. The method comprises the steps of pressing and sintering the obtained polytetrafluoroethylene material containing the isotope label by a mould to form the polytetrafluoroethylene material nozzle containing the isotope label. This embodiment will be described1340.5kV SF made of C-marked polytetrafluoroethylene material6The nozzle in the circuit breaker is replaced with the common nozzle in the circuit breaker.
3. The test was performed under conditions consistent with the on-site arc discharge conditions.
Specifically, in one embodiment of the present invention, referring to fig. 3, the test current is provided by an LC oscillating circuit, wherein the current source capacitor bank 1 is 89.68mF, the reactor 2 is 0.1130mH, and the test current frequency is 50 Hz. Through main switches 3 and SF6The circuit breaker 5 completes the breaking test by time sequence matching, the arc current and the arc voltage are measured by the Rogowski coil 7 and the high-voltage probe 4 in the test process, and the waveform is recorded by the oscilloscope 7. The on-off current is set to be 10kA, the air chamber is switched on and off for 5 times, and the air in the air chamber is sampled and analyzed after each on-off test. The sampling pipeline adopts a polytetrafluoroethylene tube, and the sampling equipment adopts a sampler with the inner wall subjected to inert treatment, so that the adsorption of trace products in the sample is reduced, and the authenticity of the content of the trace products in the sample gas is ensured. The tightness of the connecting lines should be checked during sampling, and the SF in the test circuit breaker should be used each time gas is taken6The gas washes the pipeline, so that the adsorption of the pipeline reaches saturation, and the influence on sampling is reduced. The gas extraction amount of each time is required to ensure the follow-up detection.
4. Detecting the sample gas collected in the test process by using detection equipment to research SF (sulfur hexafluoride) in the test sample6The gas trace product contains13The variety and content of C isotope labeled trace products are changed. In this embodiment, the gas sample is detected and analyzed by a gas chromatography-mass spectrometry method, so as to ensure successful detection and analysis13C marked substance, carrier gas flow rate, sample inlet temperature, sample inlet amount, column box step rise temperature, transmission line temperature, ion source and quadrupole rod temperature, and acquisitionThe mode and the solvent delay are set reasonably. The instrument detection parameters were as follows:
a) and (3) carrier gas control: he, 1.5 mL/min; solvent retardation: 3 min.
b) Sample inlet temperature: 150 ℃; sample introduction amount: 250 microliter, the split ratio is 20: 1.
c) Column temperature: keeping the temperature at 50 ℃ for 5min, and increasing the temperature to 200 ℃ at 10 ℃/min for 10 min.
d) An ion source: EI, temperature 230 ℃, electron energy 70 eV; transmission line temperature: 250 ℃; an acquisition mode: MS, mass range is 32-500 amu.
Determination of utility from mass spectra13And C, determining the content of each trace product according to the total ion current chromatogram.
5. Disintegrating discharge test sample (isotope-labeled polytetrafluoroethylene nozzle), collecting isotope-labeled polytetrafluoroethylene nozzle solid material after test and generated solid decomposed product, detecting, and investigating13The kind of the C isotope-labeled solid substance.
Specifically, this example employed a high resolution mass spectrometer for detection and analysis of solid samples for determination13C-labeled polytetrafluoroethylene produces a solid product species.
In this example, the isotopically labeled products include:13CF413C2F613C3F8、SF5 13CF3、SF5O13CF313CO213CO、13CS2comprising13C carbon-containing solid product.
In other embodiments of the invention, an analytical device for performing detection comprises: a gas chromatograph, a mass spectrometer, a gas chromatography-mass spectrometer, an infrared absorption spectrometer, an electrochemical sensor, a photoacoustic spectrum analyzer and a nuclear magnetic resonance analyzer; the measuring method comprises the following steps: gas chromatography, mass spectrometry, gas chromatography-mass spectrometry, infrared absorption spectrometry, electrochemical sensor, photoacoustic spectrometry, and nuclear magnetic resonance detection.
6. By comparing the types and concentrations of the products containing carbon isotopes and products not containing carbon isotopes in the discharge test detection result, the generation and evolution rules of the products marked by the carbon isotopes are analyzed, and the SF of the polytetrafluoroethylene material are determined6Influence of trace amounts of product.
Specifically, in the present example, the test was conducted under the conditions of the arc discharge test for SF6CF in trace amount of product4For example, 5 circuit breaker disconnections were performed, and the circuit breaker SF was measured after each disconnection by using a gas chromatograph-mass spectrometer6CF in gas4Performing detection to determine therein13CF4Whether or not it is present, and13CF4and12CF4concentration, if detected13CF4Presence, description and use13C-marked polytetrafluoroethylene nozzle material is decomposed and reacted in the electric arc discharge process to generate13CF4If, if13CF4At a concentration of CF4The ratio of the total concentration is larger, which indicates that the polytetrafluoroethylene nozzle material is opposite to CF4Is greatly influenced by the generation of13CF4The change in concentration of (2) can be understood as CF with the increase in the number of arc discharges4The growth rate of the content further infers the damage condition of the polytetrafluoroethylene nozzle under the arc discharge working condition. C2F6、C3F8、SF5CF3、SF5OCF3、CO2、CO、CS2All of them can be analyzed by this method. The method solves the problems of tracking and tracing the reaction path of the damage of the nozzle material of the circuit breaker under the discharge working condition, and can be used for researching the influence degree of the nozzle material on the arc discharge decomposition product of the sulfur hexafluoride circuit breaker. The research method provided by the invention can be SF6Circuit breaker operating condition evaluation or fault diagnosis provides important data support.
In conclusion, the invention discloses a research method for influence degree of arc discharge decomposition products of a sulfur hexafluoride breaker on a nozzle material, and the purpose of realizing SF6Measuring teflon in circuit breakerEne pair SF6Study of the effect of minor products. The method is to label SF with isotope6C element in polytetrafluoroethylene material of circuit breaker nozzle, manufacturing corresponding circuit breaker nozzle part, and replacing the nozzle to SF6In a circuit breaker apparatus, and performing a discharge test using a detection device to measure SF6The variety and the content change of C isotope labeled substances in the trace products are compared with the detection results, the generation and evolution rules of the substances are analyzed, and the influence degree of the sulfur hexafluoride breaker arc discharge decomposition products on the spout material is determined.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.

Claims (9)

1. A method for researching the influence degree of an arc discharge decomposition product of a sulfur hexafluoride breaker on a spout material is characterized in that an isotope tracing technology is used for marking key elements in a polytetrafluoroethylene material, the spout elements are used as the spout material to be made into a spout and are placed into the sulfur hexafluoride breaker to be subjected to a breaking test, then an analysis device is used for measuring the type, content and concentration ratio of the isotope-containing marked product in the sulfur hexafluoride decomposition product, and the influence degree of the arc discharge decomposition product of the sulfur hexafluoride breaker on the spout material is researched.
2. The method for researching influence degree of arc discharge decomposition products of the sulfur hexafluoride breaker on the nozzle material as claimed in claim 1, wherein the key element in the polytetrafluoroethylene material is marked by an isotope tracing technology as a carbon element isotope.
3. The method for researching the influence degree of the sulfur hexafluoride breaker arc discharge decomposition product on the spout material as claimed in claim 2, wherein the type, content and concentration ratio of the product containing the isotope label in the sulfur hexafluoride decomposition product are measured, so as to realize the research on the influence degree of the sulfur hexafluoride breaker arc discharge decomposition product on the spout material, and the method specifically comprises the following steps:
collecting isotope-labeled polytetrafluoroethylene nozzles after a cut-off test, generated sulfur hexafluoride gas decomposition products and generated solid decomposition products for detection, and determining the type, content and concentration ratio of the carbon element-containing isotope-labeled products;
and secondly, comparing the detection results, analyzing the generation and evolution rules of the carbon element-containing isotope labeled products, determining the corresponding relation between the arc discharge decomposition products and the isotope carbon element-labeled polytetrafluoroethylene nozzle material, and realizing the research on the influence degree of the sulfur hexafluoride breaker arc discharge decomposition products on the nozzle material.
4. The method for researching the influence degree of the sulfur hexafluoride breaker arc discharge decomposition product on the nozzle material is characterized in that in the second step, the concentrations of the carbon-containing element isotope and the carbon-free element isotope product in the discharge test detection result are compared, the change rule of the carbon-containing element isotope and the carbon-free element isotope product along with the test times and time is analyzed, and the influence degree of the arc discharge decomposition product and the carbon element isotope labeled polytetrafluoroethylene nozzle material is determined.
5. The method for researching influence degree of arc discharge decomposition products of sulfur hexafluoride breaker on spout material as claimed in claim 2, wherein the element for isotope labeling is13C。
6. The method for researching the influence degree of the arc discharge decomposition products of the sulfur hexafluoride breaker on the spout material as claimed in claim 1,13the C isotope labeled polytetrafluoroethylene material is prepared by the following operations:
is composed of13C isotope labeled chloroform13CHCl3Reaction products with hydrogen fluoride13CHClF2After high-temperature cracking, deacidifying and drying, obtaining the monomer tetrafluoroethylene13CF4Then pass through13CF4By polymerization13C isotope labeled polytetrafluoroethylene material.
7. The method for researching the influence degree of the arc discharge decomposition products of the sulfur hexafluoride breaker on the spout material as claimed in claim 1, wherein the analysis device includes: gas chromatograph, mass spectrometer, gas chromatography-mass spectrometer, infrared absorption spectrometer, electrochemical sensor, photoacoustic spectrometer and nuclear magnetic resonance analyzer.
8. The method for researching influence degree of arc discharge decomposition products of the sulfur hexafluoride breaker on the nozzle material as claimed in claim 1, wherein the product containing isotope labels includes:13CF413C2F613C3F8、SF5 13CF3、SF5O13CF313CO213CO、13CS2comprising13C carbon-containing solid product.
9. The method for researching influence degree of arc discharge decomposition products of the sulfur hexafluoride breaker on nozzle materials as claimed in claim 1, wherein the nozzle containing isotope-labeled polytetrafluoroethylene is manufactured by means of die pressing and sintering molding.
CN202110358120.9A 2021-04-01 2021-04-01 Research method for influence degree of sulfur hexafluoride breaker arc discharge decomposition product on nozzle material Pending CN113092616A (en)

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