CN113092483B - 一种基于深紫外线光斑照明的倾斜物体成像系统 - Google Patents
一种基于深紫外线光斑照明的倾斜物体成像系统 Download PDFInfo
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- CN113092483B CN113092483B CN202110359007.2A CN202110359007A CN113092483B CN 113092483 B CN113092483 B CN 113092483B CN 202110359007 A CN202110359007 A CN 202110359007A CN 113092483 B CN113092483 B CN 113092483B
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
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CN202110359007.2A CN113092483B (zh) | 2021-04-02 | 2021-04-02 | 一种基于深紫外线光斑照明的倾斜物体成像系统 |
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CN115128632B (zh) * | 2022-07-01 | 2025-05-16 | 苏州大学 | 一种基于沙氏成像原理的激光三维关联成像方法及其装置 |
CN117826373B (zh) * | 2024-01-31 | 2025-02-07 | 东莞市宇承科技有限公司 | 一种定焦镜头 |
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CN104155279B (zh) * | 2013-05-13 | 2017-04-26 | 中国科学院大连化学物理研究所 | 一种线形共聚焦紫外拉曼光谱仪 |
CN103557938B (zh) * | 2013-09-10 | 2015-03-04 | 华中科技大学 | 一种带照明和指示光的光谱采集器 |
CN103698885B (zh) * | 2014-01-06 | 2016-01-20 | 中国科学院光电技术研究所 | 一种紫外波段的高像质投影光学系统 |
DE102016224400A1 (de) * | 2016-12-07 | 2018-06-07 | Carl Zeiss Smt Gmbh | Katadioptrisches Projektionsobjektiv und Verfahren zu seiner Herstellung |
CN109580572B (zh) * | 2019-01-11 | 2021-07-27 | 中国科学院上海光学精密机械研究所 | 潜在指印的快速检测装置及检测方法 |
CN112162395A (zh) * | 2020-10-27 | 2021-01-01 | 江苏三米科思半导体设备有限公司 | 一种深紫外斜入射高分辨率暗场照明光学系统 |
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