CN113091962A - Road surface pressure detection device - Google Patents

Road surface pressure detection device Download PDF

Info

Publication number
CN113091962A
CN113091962A CN202110384742.9A CN202110384742A CN113091962A CN 113091962 A CN113091962 A CN 113091962A CN 202110384742 A CN202110384742 A CN 202110384742A CN 113091962 A CN113091962 A CN 113091962A
Authority
CN
China
Prior art keywords
road surface
circuit board
wireless communication
pressure
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110384742.9A
Other languages
Chinese (zh)
Inventor
王志军
付涛
徐伟博
付国新
周震宇
严晨曦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Hi Speed Qilu Construction Group Co ltd
Research Institute of Highway Ministry of Transport
Original Assignee
Shandong Hi Speed Qilu Construction Group Co ltd
Research Institute of Highway Ministry of Transport
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Hi Speed Qilu Construction Group Co ltd, Research Institute of Highway Ministry of Transport filed Critical Shandong Hi Speed Qilu Construction Group Co ltd
Priority to CN202110384742.9A priority Critical patent/CN113091962A/en
Publication of CN113091962A publication Critical patent/CN113091962A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Abstract

The disclosed road surface pressure detection device. Road surface pressure detection device sets up in the inside of waiting to detect the road surface, includes: the pressure sensor comprises a shell, wherein a circuit board is fixedly arranged at the bottom of the shell, and a miniature pressure sensor, a control module and a wireless communication module are arranged on the circuit board, wherein the miniature pressure sensor is used for detecting a pressure signal acting on the miniature pressure sensor; the control module is electrically connected with the miniature pressure sensor and the wireless communication module respectively and used for converting the detected pressure signal into a wireless communication signal; the wireless communication module is used for sending the wireless communication signal. The pavement pressure detection device is small in size, high in bearing performance, capable of being rolled for a long time and not prone to damage, and can be installed in the interior of a to-be-detected pavement for a long time to detect the pressure condition borne by the pavement in real time.

Description

Road surface pressure detection device
Technical Field
The utility model relates to a civil engineering road monitoring technology field especially relates to road surface pressure detection device.
Background
The asphalt pavement is a pavement structure type which is most widely applied, and under the repeated action of road vehicle load, stress damage can occur in the asphalt pavement material and continuously accumulates to cause the damage of the asphalt pavement material, thereby causing the damage of the asphalt pavement. The existing asphalt pavement condition monitoring is usually carried out by large vehicles on the pavement, the monitoring frequency is low, and the change of the pavement condition is difficult to perceive in real time, so that only the diseases which have occurred can be monitored, and the disease occurrence process cannot be monitored. Therefore, the mechanical behavior of the asphalt pavement can be better researched by accurately monitoring the stress state borne by the interior of the asphalt pavement, the health state of the asphalt pavement is further monitored, and a scientific basis is provided for maintenance of the asphalt pavement.
At present, a stress strain gauge is mainly embedded in the asphalt pavement for monitoring the internal stress state of the asphalt pavement, but the stress strain gauge is large in size, difficult to install and construct and easy to damage, and in addition, the strain gauge embedded below the pavement is easy to damage due to long-term vehicle driving extrusion, so that the accuracy and transmission of signals are unreliable.
Disclosure of Invention
To overcome the problems in the related art, the present disclosure provides a road surface pressure detecting device. Road surface pressure detection device sets up in the inside of waiting to detect the road surface, includes: a shell, a circuit board is fixedly arranged at the bottom of the shell, a miniature pressure sensor, a control module and a wireless communication module are arranged on the circuit board, wherein,
the miniature pressure sensor is used for detecting a pressure signal acting on the miniature pressure sensor;
the control module is electrically connected with the miniature pressure sensor and the wireless communication module respectively and used for converting the detected pressure signal into a wireless communication signal;
the wireless communication module is used for sending the wireless communication signal.
In one possible implementation, the micro pressure sensor includes a silicon piezoresistive pressure sensor and a silicon capacitive pressure sensor.
In a possible implementation manner, a miniature angle sensor is further arranged on the circuit board, the miniature angle sensor is electrically connected with the control module, and the miniature angle sensor is used for detecting the inclination angle of the pavement pressure detection device.
In one possible implementation, the miniature angle sensor comprises a solid pendulum angle sensor.
In one possible implementation, at least one direction surface of the housing is made of an elastic material, and the elastic modulus of the elastic material is smaller than a preset value.
In one possible implementation, the top and peripheral side portions of the housing are made of an elastic material.
In one possible implementation, the bottom of the housing is made of a rigid material comprising an epoxy glass cloth plate and ABS resin
In one possible implementation, a medium is filled between the housing and the circuit board.
In one possible implementation, the medium includes silica gel or silicone oil.
In a possible implementation, the casing is further provided with a protective casing on the outside, and the protective casing is made of an elastic material.
In a possible implementation manner, the elastic material comprises epoxy resin colloid and quartz sand material, and the mass ratio of the epoxy resin colloid to the quartz sand is 2: 1-3: 1.
In one possible implementation manner, the elastic modulus of the elastic material comprises 2-3 GPa.
In a possible implementation manner, the inner surface of the protective shell is the same as the shape of the shell, and the outer surface of the protective shell is irregular.
In one possible implementation, the circuit board comprises a rigid circuit board.
In a possible implementation manner, a battery installation groove is formed in the outer surface of the protection shell, a power supply lead is arranged in the battery installation groove, and the power supply lead is electrically connected with the circuit board.
In one possible implementation, the irregular shape of the protective housing is generated by 3D printing.
The technical scheme provided by the embodiment of the disclosure can have the following beneficial effects: the pavement pressure detection device is small in size, has high bearing performance, can be rolled for a long time, is not easy to damage, can be installed in the interior of a pavement to be detected for a long time, and can detect the pressure condition borne by the pavement in real time, so that the pavement pressure detection device can be used for better acquiring the stress state borne by the pavement and researching the mechanical behavior of the pavement. In the embodiment of the disclosure, the road surface pressure detection device is easier to install in the interior of the road surface without damaging the structure of the road surface compared with the traditional stress strain gauge. In addition, the road surface pressure detection device is communicated with the outside in a wireless communication mode, and compared with a traditional wired communication mode, wired transmission is easy to damage inside a road surface, and signal transmission is stable and guaranteed.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
Fig. 1 is a block diagram illustrating a road surface pressure detecting apparatus according to an exemplary embodiment.
Fig. 2 is a block diagram illustrating a road surface pressure detecting device according to an exemplary embodiment.
Fig. 3 is a block diagram illustrating a road surface pressure detecting device according to an exemplary embodiment.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
Fig. 1 is a block diagram illustrating a road surface pressure detecting apparatus according to an exemplary embodiment. Referring to fig. 1, a road surface pressure detecting device 100, the road surface pressure detecting device 100 being disposed inside a road surface to be detected, includes: a housing, a circuit board 104 is fixedly arranged at the bottom of the housing, a miniature pressure sensor 101, a control module 105 and a wireless communication module 103 are arranged on the circuit board 104, wherein,
the miniature pressure sensor 101 is used for detecting a pressure signal acting on the miniature pressure sensor;
the control module 105 is electrically connected to the micro pressure sensor 101 and the wireless communication module 103, respectively, and is configured to convert the detected pressure signal into a wireless communication signal;
the wireless communication module 103 is configured to send the wireless communication signal.
In the embodiment of the present disclosure, the micro pressure sensor may include a silicon-based MEMS (micro electro mechanical Systems) device formed by processing a silicon material by using a chemical etching or an integrated circuit process technology, and may further include a micro pressure sensor manufactured by using an X-ray lithography technology through a method of electroforming and plastic casting. In one example, the miniature pressure sensor comprises a silicon piezoresistive pressure sensor, and a Wheatstone bridge formed by high-precision semiconductor resistance strain gauges is used as a force-electricity conversion measuring circuit, so that the measuring precision is high. In another example, the miniature pressure sensor comprises a silicon capacitance type pressure sensor, a transverse barrier is manufactured on a silicon wafer, an upper transverse barrier and a lower transverse barrier are called as a group of capacitance type pressure sensors, the upper transverse barrier is displaced downwards under the action of pressure, the distance between the upper transverse barrier and the lower transverse barrier is changed, and therefore the capacitance between the plates is changed. The miniature pressure sensor is much smaller in size than a conventional stress strain gage. In one example, the pressure range of the miniature pressure sensor is 100-2000kPa, and the measurement accuracy is 0.5% FS.
In the embodiment of the present disclosure, the wireless communication module may include at least one of infrared communication, bluetooth communication, wifi communication, ZigBee communication, and NFC communication. In one example, the wireless communication module adopts a Bluetooth wireless signal transmission device, and the specification is 4.0BLE, and the frequency band is 2.379-2.496 GHz. In the embodiment of the disclosure, the road surface to be detected may include an asphalt road surface, a cement concrete road surface and a block road surface. In the disclosed embodiment, the control module may include a Micro Control Unit (MCU) or other conversion circuit capable of converting the detected pressure signal into a wireless communication signal.
In the embodiment of the present disclosure, the micro pressure sensor 101, the control module 105, and the wireless communication module 103 may be fixed On the circuit board by a cob (chip On board) bonding process, so as to achieve electrical connection. The COB binding process comprises the steps of implanting a tested wafer onto a special circuit board, connecting a wafer circuit to the circuit board through a gold wire, and covering the wafer with a melted organic material with a special protection function to complete later-stage packaging of a chip. In one example, the micro pressure sensor 101, the control module 105, and the wireless communication module 103 may be fixed on the circuit board by an AB glue, so as to achieve a more stable connection. In one possible implementation, the circuit board comprises a rigid circuit board.
In the working process of the disclosed embodiment, when a vehicle runs on a road surface, pressure is applied to the road surface, the pressure is transmitted to a shell of a road surface pressure detection device inside the road surface from the road surface, the shell deforms, the pressure is transmitted to the miniature pressure sensor, and a pressure signal acting on the miniature pressure sensor is detected by the miniature pressure sensor.
In the embodiment of the disclosure, the pavement pressure detection device is small in size, has high bearing performance, can be rolled for a long time, is not easy to damage, can be installed in the interior of a pavement to be detected for a long time, and can detect the pressure condition borne by the pavement in real time, so that the pavement pressure detection device can be used for acquiring the stress state borne by the pavement, and the mechanical behavior of the pavement can be better researched. In the embodiment of the disclosure, the road surface pressure detection device is easier to install in the interior of the road surface without damaging the structure of the road surface compared with the traditional stress strain gauge. In addition, the road surface pressure detection device is communicated with the outside in a wireless communication mode, and compared with a traditional wired communication mode, wired transmission is easy to damage inside a road surface, and signal transmission is stable and guaranteed.
In a possible implementation manner, referring to fig. 1, a micro angle sensor 102 is further disposed on the circuit board 104, the micro angle sensor 102 is electrically connected to the control module, and the micro angle sensor is configured to detect an inclination angle of the road surface pressure detecting device. In one possible implementation, the miniature angle sensor comprises a solid pendulum angle sensor.
In the embodiment of the disclosure, the miniature angle sensor is used for detecting the inclination angle of the road surface pressure detection device and knowing the installation angle of the road surface pressure detection device, so that the direction of pressure bearing is determined, and more accurate acquisition of data such as the size and the direction of pressure is facilitated.
In a possible implementation manner, the housing is of a closed cavity structure, and at least one direction surface of the housing is made of an elastic material, and the elastic modulus of the elastic material is smaller than a preset value.
Fig. 2 is a block diagram illustrating a road surface pressure detecting device according to an exemplary embodiment. Referring to fig. 2, the housing 200 has a closed cavity structure, and at least one direction surface of the housing is made of an elastic material having an elastic modulus smaller than a predetermined value.
In the embodiment of the present disclosure, the housing 200 is a closed cavity structure, which is beneficial to transmitting deformation generated by the housing under pressure to the micro pressure sensor 101. In one possible implementation, the closed cavity structure is a vacuum structure. In another possible implementation, the housing 200 and the circuit board 104 are filled with a medium therebetween. In one example, the medium may include a silicon gel or a silicon oil, or the like. The pressure generated from the outside acts on the sensor packaging container to cause the deformation of the packaging container, and the packaging silica gel in the sealed cavity is compressed to further cause the induction of the miniature pressure sensor.
In the embodiment of the present disclosure, the circuit board 104 carrying the micro pressure sensor 101, the control module 105, and the wireless communication module 103 is disposed at the bottom 201 of the housing 200. At least one direction surface of the housing 200 is made of an elastic material, and specifically includes: at least one of the four side surfaces of the housing 200 or the top surface of the housing 200 is made of an elastic material. In one example, the resilient material comprises a low modulus of elasticity material including, but not limited to, silicone material, flexible plastic, and the like. In another example, the circuit board 104 is fixed to the bottom 201 of the housing 200 by an adhesive material, including but not limited to a silicone or resin material.
In one possible implementation, the top and peripheral side portions of the housing are made of an elastic material. Under the condition that the top and the surrounding side parts of the shell are both made of elastic materials, the road surface pressure detection device can more effectively detect an external pressure signal and transmit the external pressure signal to the miniature pressure sensor.
In one possible implementation, the bottom of the housing is made of a rigid material that includes an epoxy glass cloth plate and ABS resin. The bottom of the shell is made of rigid materials, and compared with elastic materials, the bottom-bearing circuit board is protected, and the structure of the pavement pressure detection device is more stable.
Fig. 3 is a block diagram illustrating a road surface pressure detecting apparatus according to an exemplary embodiment, and referring to fig. 3, a protective casing 300 is further provided outside the housing, and the protective casing 300 is made of an elastic material. The protective housing 300 can further protect the miniature pressure sensor therein. The elastic material can comprise epoxy resin colloid and quartz sand material, and the mass ratio of the epoxy resin colloid to the quartz sand is 2: 1-3: 1. And the elastic modulus of the cured product is 2-3 GPa. The epoxy resin adhesive may include a single-component high temperature resistant epoxy resin adhesive, such as a 6103 high temperature resistant epoxy resin adhesive.
In a possible implementation manner, the inner surface of the protective casing is the same as the shape of the casing, and the outer surface of the protective casing 300 is irregular. The irregular shape may be, for example, stone, sand, etc. In one possible implementation, a three-dimensional scanner may be used to scan the real aggregate, such as stones, gravel, etc., and the shell 200, and the obtained three-dimensional model is guided into a three-dimensional printing device to print out the same shape as the aggregate. In one example, the print grain size is 10mm to 20 mm. The protective housing 300 may also have a regular shape, such as a cube, etc.
In a possible implementation manner, a battery installation groove 302 is formed in an outer surface of the protection housing 300, a power lead 301 is arranged in the battery installation groove 302, and the power lead 301 is electrically connected with the circuit board through a metalized hole 203. A power battery 303 is arranged in the battery mounting groove 302. The power battery 303 may comprise a lithium iron phosphate battery with a specification parameter of 3V @400 mAh.
According to the embodiment of the disclosure, the sensor is packaged by adopting the three-dimensional printing epoxy resin material of the real aggregate, the coupling performance with the road surface is good, the influence on the road surface performance of the road surface is avoided, the accuracy of the measuring result is ensured, and the stress state of the road surface structure can be monitored in real time.
The stress state of the pavement structure can be detected, and the technical problems that a pressure sensor is large in size, difficult to install and construct, easy to damage and the like in the prior art of pavement stress-strain monitoring are solved.
The wireless Bluetooth signal transmission is adopted to replace wired data transmission, and the risks of damage and data transmission obstacles of a wired data transmission line of a stress strain gauge sensor of the asphalt pavement are overcome.
The embodiment of the disclosure adopts the 3D printing epoxy resin material encapsulation sensor of real aggregate, has little influence on the pavement structure, and ensures the accuracy of the measuring result.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (16)

1. The utility model provides a road surface pressure detection device, its characterized in that, road surface pressure detection device sets up in the inside of waiting to detect the road surface, includes: a shell, a circuit board is fixedly arranged at the bottom of the shell, a miniature pressure sensor, a control module and a wireless communication module are arranged on the circuit board, wherein,
the miniature pressure sensor is used for detecting a pressure signal acting on the miniature pressure sensor;
the control module is electrically connected with the miniature pressure sensor and the wireless communication module respectively and used for converting the detected pressure signal into a wireless communication signal;
the wireless communication module is used for sending the wireless communication signal.
2. The device of claim 1, wherein the micro pressure sensors comprise silicon piezoresistive pressure sensors and silicon capacitive pressure sensors.
3. The device of claim 1, wherein a micro angle sensor is further disposed on the circuit board, the micro angle sensor is electrically connected to the control module, and the micro angle sensor is used for detecting an inclination angle of the road surface pressure detecting device.
4. The apparatus of claim 3, wherein the miniature angle sensor comprises a solid pendulum angle sensor.
5. The device of claim 1, wherein at least one directional face of the housing is made of an elastic material having an elastic modulus smaller than a preset value.
6. The apparatus of claim 5, wherein the top and peripheral sides of the housing are made of an elastic material.
7. The device of claim 1, wherein the bottom of the housing is made of a rigid material comprising an epoxy glass cloth plate and an ABS resin.
8. The device of claim 1, wherein a medium is filled between the housing and the circuit board.
9. The apparatus of claim 8, wherein the medium comprises silicone gel or oil.
10. The device of claim 1, wherein the housing is further provided with a protective outer shell on the exterior thereof, the protective outer shell being made of an elastic material.
11. The device of claim 10, wherein the elastic material comprises epoxy resin colloid and quartz sand material, and the mass ratio of the epoxy resin colloid to the quartz sand is 2: 1-3: 1.
12. The device of claim 10, wherein the elastic material has an elastic modulus of 2-3 GPa.
13. The apparatus of claim 10, wherein the inner surface of the protective outer shell is the same shape as the housing, and the outer surface of the protective outer shell is irregular.
14. The apparatus of claim 13, wherein the irregular shape of the protective housing is generated by 3D printing.
15. The apparatus of claim 1, wherein the circuit board comprises a rigid circuit board.
16. The device of claim 10, wherein the outer surface of the protective housing is provided with a battery mounting groove, a power supply lead is arranged in the battery mounting groove, and the power supply lead is electrically connected with the circuit board.
CN202110384742.9A 2021-04-09 2021-04-09 Road surface pressure detection device Pending CN113091962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110384742.9A CN113091962A (en) 2021-04-09 2021-04-09 Road surface pressure detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110384742.9A CN113091962A (en) 2021-04-09 2021-04-09 Road surface pressure detection device

Publications (1)

Publication Number Publication Date
CN113091962A true CN113091962A (en) 2021-07-09

Family

ID=76675991

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110384742.9A Pending CN113091962A (en) 2021-04-09 2021-04-09 Road surface pressure detection device

Country Status (1)

Country Link
CN (1) CN113091962A (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102322982A (en) * 2011-06-24 2012-01-18 三峡大学 Device and method for measuring inner stress of concrete
JP2012229982A (en) * 2011-04-26 2012-11-22 Toyo Constr Co Ltd Method and apparatus for health monitoring of concrete structure
CN103335752A (en) * 2013-06-20 2013-10-02 中山市拓维电子科技有限公司 Remotely and dynamically surveying system and method for road pre-buried shear stress
CN204286651U (en) * 2014-11-21 2015-04-22 长安大学 A kind of pressure cell
CN105938028A (en) * 2016-05-17 2016-09-14 东北农业大学 Wireless soil pressure sensor based on air pressure monitoring method
CN108507713A (en) * 2018-04-02 2018-09-07 江苏中路工程检测有限公司 A kind of stress detection device for road surface
US20190049324A1 (en) * 2017-08-11 2019-02-14 Ut Battelle, Llc Stress sensor for cement or fluid applications
CN210922798U (en) * 2019-10-14 2020-07-03 同济大学 Road surface dynamic monitoring device and system
CN111649712A (en) * 2020-06-09 2020-09-11 蔡星星 Pressure sensor and highway deformation monitoring method
CN212133945U (en) * 2020-05-08 2020-12-11 大唐定边风力发电有限责任公司 Soil pressure cell capable of correcting inclination angle

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012229982A (en) * 2011-04-26 2012-11-22 Toyo Constr Co Ltd Method and apparatus for health monitoring of concrete structure
CN102322982A (en) * 2011-06-24 2012-01-18 三峡大学 Device and method for measuring inner stress of concrete
CN103335752A (en) * 2013-06-20 2013-10-02 中山市拓维电子科技有限公司 Remotely and dynamically surveying system and method for road pre-buried shear stress
CN204286651U (en) * 2014-11-21 2015-04-22 长安大学 A kind of pressure cell
CN105938028A (en) * 2016-05-17 2016-09-14 东北农业大学 Wireless soil pressure sensor based on air pressure monitoring method
US20190049324A1 (en) * 2017-08-11 2019-02-14 Ut Battelle, Llc Stress sensor for cement or fluid applications
CN108507713A (en) * 2018-04-02 2018-09-07 江苏中路工程检测有限公司 A kind of stress detection device for road surface
CN210922798U (en) * 2019-10-14 2020-07-03 同济大学 Road surface dynamic monitoring device and system
CN212133945U (en) * 2020-05-08 2020-12-11 大唐定边风力发电有限责任公司 Soil pressure cell capable of correcting inclination angle
CN111649712A (en) * 2020-06-09 2020-09-11 蔡星星 Pressure sensor and highway deformation monitoring method

Similar Documents

Publication Publication Date Title
EP3205997B1 (en) Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
CN104040315B (en) Fluid pressure sensor and measuring probe
CN1864054B (en) Capacitive sensor
CN101312904B (en) Method for manufacturing a microelectromechanical component, and a microelectromechanical component
CN205785644U (en) MEMS minute-pressure pressure transducer
CN103743503A (en) Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination
CN105934661A (en) Miniaturized and ruggedized wafer level MEMS force sensors
CN103941041B (en) A kind of single mass three-shaft mems accelerometer of three-frame structure
CN101532889A (en) Force sensor
CN108871653A (en) Media isolation type pressure sensor packaging structure and its packaging method
CN101738281B (en) Improved wind load pressure sensor
CN103630274A (en) Micro electro mechanical system based flexoelectric type micro pressure sensor
CN102374916B (en) Halbleitersensor fur eine physikalische grosse
CN102261979A (en) Low-range piezoresistive pressure sensor for vacuum measurement and manufacturing method thereof
CN106248267B (en) Miniature three-dimensional soil pressure cell and its method of testing
CN104360102A (en) Piezoresistive MEMS high-range acceleration sensor with no lead and manufacturing method thereof
US9510495B2 (en) Electronic devices with cavity-type, permeable material filled packages, and methods of their manufacture
CN108344530A (en) Strength sensor
ITMI20122240A1 (en) INTEGRATED ELECTRONIC DEVICE FOR THE DETECTION OF A LOCAL PARAMETER RELATED TO AN ADVANCED FORCE ALONG A PREDETERMINED DIRECTION, INSIDE A SOLID STRUCTURE
CN113091962A (en) Road surface pressure detection device
CN107014438A (en) High temperature high pressure liquid pressure, sensor for measuring temperature based on ceramic package
US20070228499A1 (en) MEMS device package with thermally compliant insert
CN101734607B (en) Packaging structure of micro-electromechanical system
CN109826069B (en) Wireless monitoring system for internal cracks of asphalt pavement and crack width and position determining method
CN102116697A (en) Center-of-gravity measurement module and action induction module

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20210709