CN113090659B - Bionic active static pressure gas bearing - Google Patents
Bionic active static pressure gas bearing Download PDFInfo
- Publication number
- CN113090659B CN113090659B CN202110237637.2A CN202110237637A CN113090659B CN 113090659 B CN113090659 B CN 113090659B CN 202110237637 A CN202110237637 A CN 202110237637A CN 113090659 B CN113090659 B CN 113090659B
- Authority
- CN
- China
- Prior art keywords
- bionic
- air
- bearing
- gas
- end cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
Abstract
The invention discloses a bionic active static pressure gas bearing, which consists of an end cover and a bearing body, wherein the end cover and the bearing body are connected through a screw, the joint surface is coated with sealant for sealing, the lower side of the end cover is provided with a bionic air flow regulator, the bearing body is internally provided with an air passage, a small hole flow regulator, an air outlet end and a pressure equalizing cavity, an air source introduces high-compressed air into the pleated air bag through an air supply channel, radial expansion/contraction is realized by means of internal and external pressure difference, and the air input is actively controlled, the degree of expansion/contraction of the regulator can be controlled, thereby achieving a change in the throttle area, and then the bearing capacity is directly controlled by changing the throttling area, the change curve of the rigidity along with the thickness of the air film is changed in real time, so that the bearing always works near the maximum rigidity in the whole range of the change interval of the thickness of the air film, and the effect of wide-range high rigidity is realized.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of static pressure gas bearings, in particular to a bionic active static pressure gas bearing.
[ background of the invention ]
Because of the characteristics of near zero friction and no heat generation, the hydrostatic gas bearing has wide and difficult-to-replace important application in the occasions of high speed, light load, precision, ultraprecision machining and the like. In addition, the hydrostatic gas bearing is also considered to be an important machine element of semiconductor processing equipment and nuclear power generation equipment. The bearing rigidity is an important performance index of the static pressure gas bearing and is also the key for ensuring the precision and the precision retentivity of the bearing. However, the low stiffness of the gas bearing limits the application of the hydrostatic gas bearing to some extent. Currently, the rigidity of the aerostatic bearing can be improved by increasing the gas supply pressure, increasing the number of orifices, and the like. However, these methods have their own drawbacks.
Therefore, a new bionic active hydrostatic gas bearing is needed to solve the above technical problems.
[ summary of the invention ]
The invention discloses a bionic active static pressure gas bearing, wherein a bionic gas flow regulator is arranged in the bearing, and the expansion/contraction of the bionic gas flow regulator is controlled, so that the gas throttling area is changed, the change of the throttling area can directly change the bearing capacity of the bearing, the bearing capacity of the bearing can be obviously changed even if the thickness of a gas film is not changed or the thickness of the gas film is slightly changed, and high rigidity is realized. Meanwhile, the bearing can be regulated and controlled to have higher rigidity at any air film thickness based on the method, so that controllable wide-range high rigidity is realized.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a bionic active static pressure gas bearing comprises an end cover, a bearing body and a bionic gas flow regulator, wherein the end cover is connected with the bearing body through screws, the end cover is sealed with the bearing body through a sealant, a mounting hole is formed in the vertical direction of the bearing body in a penetrating mode, the bionic gas flow regulator is fixedly arranged on the lower side of the end cover and is contained in the mounting hole, the bionic gas flow regulator comprises a supporting column and a pleat type air bag, one end of the support column is fixedly arranged on the lower side of the end cover, the pleat type air bag is assembled at the other end of the supporting column, a gas supply channel is arranged in the supporting column, a gas outlet hole for communicating the gas supply channel with the pleat type air bag is formed in the supporting column, the mounting hole sequentially comprises an accommodating cavity, a flow controller and a pressure equalizing cavity which are communicated with each other from top to bottom, and a gas passage for communicating the external environment with the accommodating cavity is formed in the bearing body, the air outlet end of the restrictor is communicated with the pressure equalizing cavity.
As a preferable modification of the present invention, the cross-sectional shape of the air passage is any one of a circle, a rectangle, a diamond, a semicircle, and a triangle.
As a preferable improvement of the present invention, the cross-sectional shape and size of the air passage may be different at each position in the length direction.
As a preferable improvement of the invention, the surface shape of the bionic active hydrostatic gas bearing is circular or rectangular.
As a preferred improvement of the invention, the restriction is a small bore restriction or an annulus restriction.
As a preferable improvement of the present invention, the number of the small-hole restrictors may be one or more, and the arrangement is not limited.
As a preferable improvement of the present invention, the cross-sectional shape of the gas supply channel is any one of a circle, a rectangle, a diamond, a semicircle, and a triangle.
As a preferable improvement of the present invention, the cross-sectional shape of the gas outlet end is any one of a circle, a rectangle, a diamond, a semicircle and a triangle.
As a preferable improvement of the present invention, the cross-sectional shape of the pressure equalizing chamber is any one of a circle, a rectangle, a diamond, a semicircle and a triangle.
As a preferable improvement of the present invention, the number of the screws may be 4, and the arrangement is not limited.
The bionic active static pressure gas bearing provided by the invention has the beneficial effects that:
1. the bionic air flow regulator is used for controllably changing the throttling area, so that the bearing capacity of the bearing is directly changed, the bearing capacity of the bearing can be obviously changed even if the thickness of an air film is not changed or the thickness of the air film is slightly changed, and high rigidity is realized;
2. the quantity relation of the throttlers can be flexibly configured according to the requirements of performance and cost, and meanwhile, the throttling area is actively controlled by changing the expansion degree of the bionic air flow regulator, so that the wide-area high-rigidity adjustability of the gas bearing is realized.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a side sectional view of a bionic active hydrostatic gas bearing according to embodiment 1 of the present invention;
FIG. 2 is a top view of a bionic active hydrostatic gas bearing according to embodiment 1 of the present invention;
FIG. 3 is a cross-sectional view of the bionic active hydrostatic gas bearing expanded after the bionic gas regulator is filled with high-pressure gas in embodiment 1 of the present invention;
FIG. 4 is a bearing pattern cross-sectional view of embodiment 2 of the present invention employing a split arrangement of a bearing end cap and a bionic damper;
FIG. 5 is a top view of a bionic air flow regulator employing a bearing end cap and a bionic air flow regulator split arrangement bearing according to embodiment 2 of the present invention;
FIG. 6 is a bottom view of a bionic active hydrostatic gas bearing according to embodiment 3 of the present invention;
FIG. 7 is a bottom view of a bionic active hydrostatic gas bearing according to embodiment 4 of the present invention;
FIG. 8 is a bottom view of a bionic active hydrostatic gas bearing according to embodiment 5 of the present invention;
FIG. 9 is a bottom view of a bionic active hydrostatic gas bearing according to embodiment 6 of the present invention;
FIG. 10 is a bottom view of a bionic active hydrostatic gas bearing according to embodiment 7 of the present invention;
fig. 11 is a bottom view of the bionic active hydrostatic gas bearing in embodiment 8 of the present invention.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1-3, the invention provides a bionic active static pressure gas bearing, which comprises an end cover 1, a bearing body 2 and a bionic gas flow regulator 3, wherein the end cover 1 is connected with the bearing body 2 through a screw 12, the end cover 1 and the bearing body 2 are sealed through a sealant, a mounting hole is vertically penetrated through the bearing body 2, and the bionic gas flow regulator 3 is fixedly arranged on the lower side of the end cover 1 and is accommodated in the mounting hole. The bionic air flow regulator 3 expands/contracts by controlling the amount of high-pressure air introduced into the bionic air flow regulator 3, so that the air throttling area is changed, and the bearing can keep high rigidity in a wider air film thickness area.
The bionic air flow regulator 3 comprises a supporting column 5 with one end fixedly arranged on the lower side of the end cover 1 and a pleated air bag 4 assembled at the other end of the supporting column 5, wherein the pleated air bag 4 is a soft hollow rubber tube, and the outside of the tube is coaxially wrapped by a layer of braided sheath. The basic working principle is that high-pressure compressed air is introduced into the pleated air bag 4 from an air source through an air inlet, and radial expansion/contraction is realized by means of internal and external pressure difference. By actively controlling the air inflow, the expansion/contraction degree of the bionic air flow regulator 3 can be controlled, so that the change of the throttle area is realized, the bearing capacity of the bearing can be obviously changed even if the thickness of an air film is not changed or the thickness of the air film is slightly changed, and high rigidity is realized.
It should be further noted that when the bionic air flow regulator 3 is inflated, the mouth is closed similarly to the frog inhaling, and the external air is sucked into the mouth from the nostrils, so that the oral cavity is inflated. When the bionic airflow regulator 4 exhausts and contracts, air is introduced into the lung through the larynx similarly to a frog, and the swollen oral cavity returns to be normal.
The end cover 1 with be equipped with air feed channel 6 in the support column 5, be equipped with the intercommunication on the support column 5 air feed channel 6 with the venthole 7 of pleat type gasbag 4, the mounting hole includes from last to down in proper order that to accept chamber 13, flow controller 9 and the pressure-equalizing chamber 11 of intercommunication, be equipped with in the bearing body 2 communicate external environment with accept the air flue 8 of chamber 13, the end 10 and the pressure-equalizing chamber 11 intercommunication of giving vent to anger of flow controller 9.
Specifically, the cross-sectional shape of the air duct 8 is any one of circular, rectangular, rhombic, semicircular, and triangular. The cross-sectional shape and size of the air duct 8 may be different at various positions along the length direction. The cross section of the air supply channel 6 is any one of circular, rectangular, rhombic, semicircular and triangular. The cross-sectional shape of the air outlet end 10 is any one of circular, rectangular, rhombic, semicircular and triangular. The cross section of the pressure equalizing cavity 11 is any one of circular, rectangular, rhombic, semicircular and triangular.
The surface shape of the bionic active hydrostatic gas bearing is circular or rectangular.
The throttler 9 can be a small hole throttler or an annular throttler, and the number of the throttlers 9 can be one or more, and the arrangement mode is not limited. The small-hole throttler is different from the toroidal throttler in that the pressure equalizing cavity 11 is arranged at the air outlet end 10 of the small-hole throttler, and the pressure equalizing cavity 11 is not arranged at the air outlet end of the toroidal throttler.
The number of the screws 12 may be 4, and the arrangement is not limited, and of course, the number of the screws 12 may also be other suitable numbers.
It needs to be further explained that:
example 2
The basic structure of the embodiment 2 is the same as that of the embodiment 1, except that the bionic air flow regulator is not fixedly connected with the bearing end cover any more, but is constructed by a single component. The bionic air flow regulator is adhered to the wall surface of the air passage by adopting sealant, and an air supply passage arranged on the bearing end cover is connected with the bionic air flow regulator so as to realize air supply. The individual bionic air flow regulator is shown in a top view in fig. 5, and the overall bearing structure is shown in fig. 4.
Example 3
The basic structure of the present embodiment 3 is the same as that of embodiment 1, and a restrictor is arranged on the end face of the bearing, as shown in fig. 6.
Example 4
This embodiment 4 is the same as the basic structure of embodiment 1 except that four restrictors are arranged on the bearing end surface, as shown in fig. 7.
Example 5
This embodiment 5 is the same as the basic structure of embodiment 1 except that five restrictors are arranged on the bearing end surface, as shown in fig. 8.
Example 6
This embodiment 6 is the same as the basic structure of embodiment 1 except that the shape of the bearing is rectangular, as shown in fig. 9.
Example 7
This embodiment 7 has the same basic structure as embodiment 1 except that the bearing is rectangular in shape and four restrictors are arranged on the end faces of the bearing, as shown in fig. 10.
Example 8
This embodiment 8 has the same basic structure as embodiment 1 except that the bearing is rectangular in shape and five restrictors are arranged on the end face of the bearing, as shown in fig. 11.
While embodiments of the invention have been disclosed above, it is not limited to the applications set forth in the specification and the embodiments, which are fully applicable to various fields of endeavor for which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.
Claims (10)
1. The bionic active static pressure gas bearing is characterized by comprising an end cover (1), a bearing body (2) and a bionic gas flow regulator (3), wherein the end cover (1) is connected with the bearing body (2) through a screw (12), the end cover (1) and the bearing body (2) are sealed through a sealant, the bearing body (2) penetrates through a mounting hole in the vertical direction, the bionic gas flow regulator (3) is fixedly arranged at the lower side of the end cover (1) and is contained in the mounting hole, the bionic gas flow regulator (3) comprises a support pillar (5) with one end fixedly arranged at the lower side of the end cover (1) and a pleated air bag (4) assembled at the other end of the support pillar (5), a gas supply channel (6) is arranged in the support pillar (5), and a gas outlet hole (7) communicated with the gas supply channel (6) and the pleated air bag (4) is arranged on the support pillar (5), the mounting hole comprises an accommodating cavity (13), a restrictor (9) and a pressure equalizing cavity (11) which are communicated with each other from top to bottom in sequence, an air passage (8) which is used for communicating with the external environment and accommodating the cavity (13) is arranged in the bearing body (2), and an air outlet end (10) of the restrictor (9) is communicated with the pressure equalizing cavity (11).
2. A bionic active hydrostatic gas bearing according to claim 1, characterized in that the cross-sectional shape of the gas passages (8) is any one of circular, rectangular, diamond-shaped, semicircular and triangular.
3. A bionic active hydrostatic gas bearing according to claim 1, characterized in that the cross-sectional shape and size of the gas passages (8) are not uniform at each position along the length direction.
4. The bionic active hydrostatic gas bearing of claim 1, wherein the surface shape of the bionic active hydrostatic gas bearing is circular or rectangular.
5. The bionic active static pressure gas bearing according to claim 1, wherein the restrictor is a small hole restrictor or an annular restrictor.
6. A bionic active hydrostatic gas bearing according to claim 5, characterized in that the number of the small-hole throttles (9) is one or more, and the arrangement is not limited.
7. A bionic active hydrostatic gas bearing according to claim 1, characterized in that the cross-sectional shape of the gas supply channel (6) is any one of circular, rectangular, diamond-shaped, semicircular and triangular.
8. The bionic active static pressure gas bearing according to claim 1, wherein the cross-sectional shape of the gas outlet end (10) is any one of circular, rectangular, diamond-shaped, semicircular and triangular.
9. A bionic active hydrostatic gas bearing according to claim 1, characterized in that the cross-sectional shape of the pressure-equalizing chamber (11) is any one of circular, rectangular, diamond-shaped, semicircular and triangular.
10. A bionic active hydrostatic gas bearing according to claim 1, characterized in that the number of the screws (12) is 4, and the arrangement is not limited.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110237637.2A CN113090659B (en) | 2021-03-04 | 2021-03-04 | Bionic active static pressure gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110237637.2A CN113090659B (en) | 2021-03-04 | 2021-03-04 | Bionic active static pressure gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113090659A CN113090659A (en) | 2021-07-09 |
| CN113090659B true CN113090659B (en) | 2022-03-29 |
Family
ID=76666284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110237637.2A Active CN113090659B (en) | 2021-03-04 | 2021-03-04 | Bionic active static pressure gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113090659B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0122474A2 (en) * | 1983-04-13 | 1984-10-24 | Schwäbische Hüttenwerke Gesellschaft mit beschränkter Haftung | Vertically adjustable bearing for the transfer and raising or lowering of heavy loads |
| JPH06337014A (en) * | 1993-05-28 | 1994-12-06 | Nippon Seiko Kk | Hydrostatic gas bearing |
| JPH1130246A (en) * | 1997-07-10 | 1999-02-02 | Kanzaki Kokyukoki Mfg Co Ltd | Angular acceleration control valve and engagement controller for hydraulic clutch |
| WO2000066920A1 (en) * | 1999-04-29 | 2000-11-09 | Perry Equipment Corporation | Method and apparatus for regulating gas flow |
| JP2001056027A (en) * | 1999-08-13 | 2001-02-27 | Toshiba Mach Co Ltd | Static pressure gas bearing |
| KR20070015088A (en) * | 2005-07-28 | 2007-02-01 | 가부시키가이샤 덴소 | Temperature-type expansion valve |
| CN101000071A (en) * | 2007-01-08 | 2007-07-18 | 哈尔滨工业大学 | Self-regulating type hydrodynamic gas elastic foil bearing |
| TW201040406A (en) * | 2009-05-13 | 2010-11-16 | Ind Tech Res Inst | Self-compensating hydrostatic planar bearing device and the method thereof |
| JP2012112519A (en) * | 2010-11-04 | 2012-06-14 | Jtekt Corp | Static fluid pressure bearing unit |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN105202028A (en) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | Pressure-feed air bearing provided with elastic damping air chambers |
| CN110513395A (en) * | 2019-08-27 | 2019-11-29 | 武汉科技大学 | Slit throttling formula active gas suspension device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106640971B (en) * | 2017-03-09 | 2019-06-28 | 中国工程物理研究院机械制造工艺研究所 | A kind of pressurized air thrust bearing |
-
2021
- 2021-03-04 CN CN202110237637.2A patent/CN113090659B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0122474A2 (en) * | 1983-04-13 | 1984-10-24 | Schwäbische Hüttenwerke Gesellschaft mit beschränkter Haftung | Vertically adjustable bearing for the transfer and raising or lowering of heavy loads |
| JPH06337014A (en) * | 1993-05-28 | 1994-12-06 | Nippon Seiko Kk | Hydrostatic gas bearing |
| JPH1130246A (en) * | 1997-07-10 | 1999-02-02 | Kanzaki Kokyukoki Mfg Co Ltd | Angular acceleration control valve and engagement controller for hydraulic clutch |
| WO2000066920A1 (en) * | 1999-04-29 | 2000-11-09 | Perry Equipment Corporation | Method and apparatus for regulating gas flow |
| JP2001056027A (en) * | 1999-08-13 | 2001-02-27 | Toshiba Mach Co Ltd | Static pressure gas bearing |
| KR20070015088A (en) * | 2005-07-28 | 2007-02-01 | 가부시키가이샤 덴소 | Temperature-type expansion valve |
| CN101000071A (en) * | 2007-01-08 | 2007-07-18 | 哈尔滨工业大学 | Self-regulating type hydrodynamic gas elastic foil bearing |
| TW201040406A (en) * | 2009-05-13 | 2010-11-16 | Ind Tech Res Inst | Self-compensating hydrostatic planar bearing device and the method thereof |
| JP2012112519A (en) * | 2010-11-04 | 2012-06-14 | Jtekt Corp | Static fluid pressure bearing unit |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN105202028A (en) * | 2015-10-16 | 2015-12-30 | 西安工业大学 | Pressure-feed air bearing provided with elastic damping air chambers |
| CN110513395A (en) * | 2019-08-27 | 2019-11-29 | 武汉科技大学 | Slit throttling formula active gas suspension device |
Non-Patent Citations (3)
| Title |
|---|
| 流量调节器研制中的主要问题及结构改进;陈维宇等;《火箭推进》;20091215(第06期);全文 * |
| 激波影响下的气体轴承动力学特性的研究;范酬;《中国优秀硕士学位论文全文数据库 (工程科技Ⅱ辑)》;20190215;全文 * |
| 考虑表面因素的气体动压与挤压悬浮特性研究;《中国博士学位论文全文数据库 (工程科技Ⅱ辑)》;《中国博士学位论文全文数据库 (工程科技Ⅱ辑)》;20190115;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113090659A (en) | 2021-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Cho et al. | Numerical simulation of natural convection in concentric and eccentric horizontal cylindrical annuli | |
| US10884013B2 (en) | Monitoring device with modular assembly | |
| US3934947A (en) | Fluid bearing system | |
| CN113090659B (en) | Bionic active static pressure gas bearing | |
| CN102022470B (en) | Fluid pressure shock absorber | |
| US3998502A (en) | Fluid bearing system | |
| US4467984A (en) | Angular rate sensing apparatus and methods | |
| Dal et al. | Performance characteristics of an aerostatic journal bearing with partially blocked orifices | |
| CN108223581B (en) | Throttle hole aperture adjusting device for aerostatic spindle | |
| JPS6273025A (en) | Method for controlling indoor pressure | |
| JP2006510856A (en) | Gas bearing device | |
| CN113090660B (en) | Flow direction adjustable gas passive bearing | |
| CN105179478A (en) | Porous air-suspending supporting system applied to full physical simulation | |
| US8662754B1 (en) | Damped air bearing | |
| Rowe et al. | Paper 1: Diaphragm Valves for Controlling Opposed Pad Hydrostatic Bearings | |
| CN110645271B (en) | Damping vibration absorption aerostatic bearing | |
| US4445377A (en) | Pressure-to-electric output system for an angular rate sensor or the like | |
| US20200232505A1 (en) | Passive magnetic bearing and rotating machineries integrating said bearing, including energy production turbines | |
| US3961536A (en) | Fluidic accelerometer | |
| JPH0510330A (en) | Static pressure bearing device | |
| Rong et al. | Numerical and experimental study on the static performance of externally pressurized thrust bearings lubricated with refrigerant gases | |
| Gamal et al. | High-pressure pocket damper seals: leakage rates and cavity pressures | |
| CN110026572A (en) | A kind of stepless variable damping device of gas-static main shaft air film | |
| Yadav et al. | Transient response of two lobe aerodynamic journal bearing | |
| Ma et al. | Linear analysis of the heave dynamics of a bag and finger air cushion vehicle skirt |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |