CN113063999B - Method and system for diagnosing heater in semiconductor process equipment - Google Patents
Method and system for diagnosing heater in semiconductor process equipment Download PDFInfo
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- CN113063999B CN113063999B CN202110265278.1A CN202110265278A CN113063999B CN 113063999 B CN113063999 B CN 113063999B CN 202110265278 A CN202110265278 A CN 202110265278A CN 113063999 B CN113063999 B CN 113063999B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention provides a diagnosis method of a heater in semiconductor process equipment, which comprises the following steps: acquiring a first current value in the heater, and acquiring a second current value in a diagnosis circuit, wherein the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater; and when the difference value between the first current value and the second current value exceeds a preset difference value threshold value, judging that the heater fails. The diagnosis method and the semiconductor process equipment provided by the invention can monitor the total resistance of the heater in real time, so that faults can be found in time when the resistance at any place in the heater changes, the problem of abnormal temperature of a reaction source caused by the fact that the faults of the heater are not found in time is solved, and the yield of finished products is improved. The invention also provides semiconductor process equipment.
Description
Technical Field
The present invention relates to the field of semiconductor processes, and in particular, to a method for diagnosing a heater in semiconductor processing equipment and a system employing the same.
Background
An Atomic Layer Deposition (ALD) process is a self-limiting process realized by entering a chamber in steps through a reaction source and a precursor, wherein the reaction source is heated to be self-evaporated into gas which enters the chamber, so as to prevent condensation and particles generated in the process of entering the chamber from occurring in the reaction source, the process effect is influenced, a pipeline through which the reaction source passes also needs to be heated, and the heating of the reaction source and the reaction source pipeline is critical to the process effect.
The existing reaction source and pipeline heating scheme is generally realized by adopting a heating belt wrapped on a pipeline, and in order to ensure that the heating belt works normally, a part of the heating belt is provided with corresponding temperature detectors, when the temperature detectors detect that the heating belt is abnormal, the process is stopped in time and fault investigation is performed, so that the temperature of the reaction source and the temperature of the reaction source gas deviate, and the process quality of the semiconductor process is influenced. However, the existing heating belt detection scheme often cannot sense the abnormal condition of the heating belt in time, and easily causes the temperature imbalance of a reaction source to influence the consistency of a semiconductor process.
Therefore, how to provide a solution capable of efficiently detecting the state of the heating belt is a technical problem to be solved in the art.
Disclosure of Invention
The invention aims to provide a diagnosis method and a system for a heater in semiconductor process equipment, wherein the diagnosis method can discover the failure of the heater in time and improve the yield of finished products.
To achieve the above object, as one aspect of the present invention, there is provided a diagnostic method of a heater in a semiconductor process apparatus, the diagnostic method comprising:
acquiring a first current value in the heater and a second current value in a diagnosis circuit, wherein the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
and when the difference value between the first current value and the second current value exceeds a preset difference value threshold, judging that the heater fails.
Optionally, the heater includes a plurality of heating strips connected in series with each other, the resistance on the diagnostic circuit is an adjustable resistance, and the diagnostic method includes:
after judging that the heater fails, controlling the adjustable resistor to be connected with different numbers of heating belts in parallel successively; the current value passing through the adjustable resistor is a third current value, and the current value passing through each heating belt connected in parallel with the adjustable resistor is a fourth current value;
and screening the heating belt with faults based on the resistance value after the adjustable resistance is adjusted, the third current value and the fourth current value.
Optionally, the determining the fault heating band based on the resistance value adjusted by the adjustable resistor and the third current value and the fourth current value includes:
adjusting the resistance value of the adjustable resistor until the third current value and the fourth current value are equal;
and if the magnitude relation between the resistance value of the adjustable resistor after adjustment and the sum of the resistance values of the rated resistors of the heating belts connected in parallel with the adjustable resistor is changed, judging that the heating belt increased or decreased by the current detection is failed compared with the heating belt increased or decreased by the previous detection.
Optionally, said controlling said adjustable resistance in series with a different number of said heating zones comprises:
connecting at least one heating belt with the adjustable resistor in parallel, and increasing the number of the heating belts connected with the adjustable resistor in parallel one by one;
each time a heating belt is added, the resistance value of the adjustable resistor is adjusted to enable the third current value to be consistent with the fourth current value;
and when the resistance value of the adjustable resistor after adjustment is inconsistent with the sum of rated resistance values of the heating belts connected in parallel, judging that the newly added heating belt in the heating belts connected in parallel fails.
Optionally, the determining the fault heating band based on the resistance value adjusted by the adjustable resistor and the third current value and the fourth current value includes:
adjusting the resistance value of the adjustable resistor until the sum of the resistance values of all rated resistors of the heating belt connected in parallel with the resistance value of the adjustable resistor is equal to the sum of the resistance values of all rated resistors of the heating belt;
and if the magnitude relation between the third current value and the fourth current value is changed, judging that the heating belt increased or decreased by the current detection relative to the previous detection fails.
Optionally, said adjusting the resistance value of the adjustable resistor to be equal to the sum of the resistance values of the rated resistances of the heating tapes to which it is connected in parallel, includes:
controlling a rotating motor to adjust the resistance value of the adjustable resistor; and multiplying the revolution number of the rotating motor by a preset conversion coefficient to obtain the resistance value adjustment quantity of the adjustable resistor, wherein the preset conversion coefficient is the resistance value changed by one rotation of the rotating motor.
Optionally, the semiconductor process device includes a detection module, where the detection module is configured to detect the third current value and the fourth current value, and calculate a difference value between the third current value and the fourth current value;
the diagnostic method further comprises: and obtaining a difference value of the third current value and the fourth current value through the detection module.
As a second aspect of the present invention, there is provided a system employing the diagnostic method described above, comprising: the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
the controller is used for acquiring a first current value in the heater and acquiring a second current value in the diagnosis circuit;
comparing the first current value with the second current value, and judging that the heater fails when the difference value between the first current value and the second current value exceeds a preset difference value threshold.
Optionally, the heater comprises a plurality of heating belts connected in series, and the resistance on the diagnosis circuit is an adjustable resistance;
the controller is used for controlling the adjustable resistor to be connected with different numbers of heating belts in parallel successively after judging that the heater fails; the current value passing through the adjustable resistor is a third current value, and the current value passing through each heating belt connected in parallel with the adjustable resistor is a fourth current value; and screening the heating belt with faults based on the resistance value after the adjustable resistance is adjusted, the third current value and the fourth current value.
Optionally, the heater includes N heating strips connected in series in turn, a first end of the adjustable resistor is electrically connected with a first end of the first heating strip far away from the other heating strips, and a second end of the adjustable resistor is selectively communicated with one ends of the N heating strips far away from the first end of the first heating strip through N connecting lines respectively;
the controller is used for controlling the first connecting wire to the Nth connecting wire to be sequentially and independently conducted after judging that the heater breaks down, adjusting the resistance value of the adjustable resistor to be equal to the sum of the resistance values of the rated resistances of the heating strips connected with the adjustable resistor in parallel, and judging that the heating strip which is newly added breaks down when the difference value between the third current value and the fourth current value exceeds a preset difference value threshold value.
Optionally, the system further comprises a detection module for detecting the third current value and the fourth current value and calculating a difference value between the third current value and the fourth current value;
the controller is used for obtaining the difference value of the third current value and the fourth current value through the detection module.
The diagnosis method and the diagnosis system provided by the invention can monitor the total resistance of the heater in real time, so that faults can be found in time when the resistance of any place (such as any heating belt) in the heater changes, the problem of abnormal temperature of a reaction source caused by the fact that the faults of the heater are not found in time is solved, and the yield of finished products is improved.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate the invention and together with the description serve to explain, without limitation, the invention. In the drawings:
FIG. 1 is a schematic view of a portion of a system according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a diagnostic method provided by an embodiment of the present invention;
FIG. 3 is a flow chart of a diagnostic method according to another embodiment of the present invention;
FIG. 4 is a schematic flow chart of step S4 in an embodiment of the present invention;
FIG. 5 is a flowchart of step S4 in another embodiment of the present invention;
FIG. 6 is a flowchart of step S4 in another embodiment of the present invention;
fig. 7 is a flowchart of step S4 in another embodiment of the present invention.
Detailed Description
The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
In the prior art, a temperature detector (such as a dual Thermocouple (TC)) is usually arranged in one temperature zone and is connected with a heating power supply circuit, and the TC is mounted on one heating zone of the corresponding temperature zone.
However, when abnormality occurs in the heating belt without TC in the temperature zone, the abnormal heating condition cannot be found in time because the heating belt with TC is normal, and finally the semiconductor process continues to run to affect the yield, and after the problem occurs in the heating belt, it is difficult to confirm the specific position where abnormality occurs, and the maintenance period of the equipment is too long.
To solve the above-mentioned problems, as an aspect of the present invention, there is provided a method for diagnosing a heater in a semiconductor process apparatus, as shown in fig. 2, the method comprising:
s1, acquiring a first current value in a heater (a serial structure of a plurality of heating belts shown in FIG. 1), and acquiring a second current value in a diagnosis circuit, wherein the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
s2, when the difference value between the first current value and the second current value exceeds a preset difference value threshold value, judging that the heater fails.
The structure of the heater according to the embodiment of the present invention is not particularly limited, and for example, alternatively, as shown in fig. 1, the heater may include a plurality of heating zones (heating zone 1, heating zone 2, heating zone 3 and … … heating zone N) connected in series with each other, and the current flows into the heater from one power supply end (e.g., a first power supply end) and flows out from another power supply end (e.g., a second power supply end) after flowing through the plurality of heating zones in sequence.
In the diagnosis method provided by the embodiment of the invention, the current flowing in the heater and the current flowing on the diagnosis circuit are respectively obtained, the diagnosis circuit is connected with the heater in parallel, and the resistance on the path of the diagnosis circuit is equal to the rated resistance of the heater, so that under the condition that the total resistance of the heater is normal, the current flowing in the diagnosis circuit is equal to the current flowing in the heater, when the two current values are different, the resistance of the heater can be considered to be changed, namely, the heater is judged to be faulty.
In addition, the diagnosis method provided by the embodiment of the invention can be automatically realized by the semiconductor equipment provided with the diagnosis circuit, and compared with the scheme that an operator detects the heating belt manually and sequentially in the prior art, the diagnosis method greatly improves the efficiency of detecting faults.
It should be noted that the difference exceeding the preset difference threshold means that the absolute value of the difference is higher than the preset difference threshold, and the preset difference threshold should be zero in an ideal case, that is, the heater can be considered normal only when the first current value is equal to the second current value, and the difference exceeds the preset difference threshold (zero) when the first current value is higher than the second current value (that is, the difference is greater than zero) or when the first current value is lower than the second current value (that is, the difference is less than zero). In practical use, the preset difference threshold may be determined according to the measurement error of the detection module, and as long as the absolute value of the difference is in the range from zero to the preset difference threshold (i.e. the difference is in the error range), the first current value and the second current value may be considered to be approximately equal, and the heater is normal.
The embodiment of the present invention is not particularly limited as to how to obtain the first current value and the second current value, for example, as an alternative implementation manner of the present invention, as shown in fig. 1, the semiconductor process apparatus may include a detection module, where the detection module is configured to detect a current at a first end of the first heating belt to obtain the first current value, and detect a first end of the adjustable resistor R to obtain the second current value. In the prior art, after the thermocouple finds that the temperature of the heater is abnormal, an operator usually checks each heating belt in the heater one by one, so that a great deal of operation time is consumed, and the labor cost is increased.
In order to solve the above technical problem and improve the efficiency of fault detection, preferably, as shown in fig. 1, the resistor on the diagnosis circuit is an adjustable resistor R, as shown in fig. 3, and the diagnosis method further includes:
s3, after judging that the heater fails, controlling the adjustable resistor R to be connected with different numbers of heating belts in parallel successively; the current value passing through the adjustable resistor R is a third current value, and the current value passing through each heating belt connected in parallel with the adjustable resistor is a fourth current value;
and S4, screening the heating belt with faults based on the resistance value adjusted by the adjustable resistor, the third current value and the fourth current value.
In the embodiment of the invention, the semiconductor process equipment can automatically connect the adjustable resistor R in the diagnosis circuit and different numbers of heating strips in parallel to form a parallel circuit, and in the parallel circuit, the resistance value of the adjustable resistor R, the total resistance value of the heating strips connected with the adjustable resistor R in parallel, and the third current value and the fourth current value meet the characteristics of the parallel circuit. For example, the product of the current value and the resistance value of each branch is equal, that is, the product of the resistance value and the third current value of the adjustable resistor R is equal to the product of the total resistance value and the fourth current value of the heating belt in the parallel branch; for another example, when the resistance values of the branches are the same, the current value flowing through each branch is also the same, that is, when the resistance value of the adjustable resistor R is the same as the total resistance value of the heating belt in the parallel branch, the third current value is also the same as the fourth current value; for another example, when the current value flowing through each branch is the same, the resistance value of each branch is also the same, that is, when the third current value is the same as the fourth current value, the resistance value of the adjustable resistor R is also the same as the total resistance value of the heating belt in the parallel branch. According to the embodiment of the invention, based on the resistance value adjusted by the adjustable resistor R, and the third current value and the fourth current value, whether the two branches meet the characteristics of the parallel circuit is verified, so that whether the parallel heating belts are in a normal state or not can be judged (namely, the resistance value is a rated resistance value), and further, the rapid investigation of a plurality of heating belts is realized, and the fault investigation efficiency is improved.
Optionally, the detection module is further configured to detect a third current value and a fourth current value, and calculate a difference value between the third current value and the fourth current value; the diagnostic method further comprises: and obtaining a difference value of the third current value and the fourth current value through a detection module.
The embodiment of the invention judges whether the heating strips are normal or not according to the characteristics of the parallel circuit, for example, optionally, the product of the third current value and the fourth current value and the product of the fourth current value and the total rated resistance value (sum of rated resistance values of all the heating strips) of the heating strips in the parallel branch can be detected in real time and calculated respectively, and when the values of the two products are equal, the total resistance value of the heating strips in the parallel branch is proved to be equal to the sum of the rated resistance values of all the heating strips, namely, the heating strips in the parallel branch are normal, otherwise, the situation that the resistance values of the heating strips in the parallel branch are different from the rated resistance values thereof is proved to be abnormal.
In order to simplify the calculation step and improve the judging efficiency of judging whether the heating belt is normal, preferably, the resistance value of the adjustable resistor R may be controlled in real time while increasing or decreasing the number of heating belts in the parallel branches, so that the current values in the two parallel branches are equal or the resistance values on the two parallel branches are controlled to be equal, and whether the other electrical values are identical is compared, for example, as shown in fig. 4, the step of judging the fault heating belt based on the adjusted resistance value of the adjustable resistor R, the third current value and the fourth current value may include:
s410, adjusting the resistance value of the adjustable resistor until the third current value and the fourth current value are equal;
and S420, if the magnitude relation between the resistance value of the adjustable resistor R after adjustment and the sum of the resistance values of the rated resistances of the heating strips connected in parallel with the adjustable resistor R is changed, judging that the heating strips increased or decreased in the current detection are failed compared with the heating strips increased or decreased in the previous detection, continuously increasing or decreasing the number of the heating strips connected in parallel with the adjustable resistor R (namely, increasing or decreasing the number of the heating strips on a parallel branch) and repeating the steps.
In the embodiment of the invention, the resistance of the adjustable resistor R is adjusted in real time while the number of the heating strips on the parallel branch is increased or decreased, so that the third current value and the fourth current value keep the same relation, and therefore the sum of the resistance of the adjustable resistor R and the actual resistance of the heating strips on the parallel branch is kept equal, after the heating strips on the parallel branch are increased or decreased each time, the resistance of the adjustable resistor R is compared with the sum of the rated resistance of all the parallel heating strips, and if the relation between the resistance of the adjustable resistor R and the sum of the rated resistance is changed (for example, the relation is changed from equal to unequal or from unequal to equal), the actual resistance of the increased or decreased heating strip is proved to be different from the rated resistance of the heating strips.
The embodiment of the invention does not specifically limit how to control the adjustable resistor R to be serially connected with different numbers of heating strips in parallel, for example, alternatively, as shown in fig. 5, at least one heating strip may be connected with the adjustable resistor R in parallel first, then the number of heating strips connected with the adjustable resistor R in parallel is increased one by one, after each time of adding the heating strips on the parallel branch, the adjusted resistance value of the adjustable resistor R, the sum of rated resistance values of the heating strips on the parallel branch, and whether the third current value and the fourth current value meet the characteristics of the parallel circuit are verified, and when the characteristics of the parallel circuit are not met, it can be determined that the actual resistance value of the heating strip added last time on the parallel branch is not equal to the rated resistance value of the heating strip added last time, that is, that the heating strip added last time fails.
Specifically, to the case of keeping the third current value equal to the fourth current value and comparing the sum of the rated resistance values of the heating strips with the adjustable resistor R, the step S3 of controlling the adjustable resistor R to be serially connected with different numbers of heating strips in parallel includes:
at least one heating belt is connected with the adjustable resistor R in parallel, and the number of the heating belts connected with the adjustable resistor R in parallel is increased one by one;
correspondingly, as shown in fig. 5, the fault determining step S4 of the heating belt specifically includes:
each time a heating band is added, the resistance value of the adjustable resistor R is regulated, so that the current (third current value) in the adjustable resistor R is consistent with the current (fourth current value) in the heating band connected in parallel with the adjustable resistor R (namely, the difference value of the current and the current does not exceed a preset difference value threshold value);
and when the resistance value of the adjustable resistor R is inconsistent with the sum of the rated resistance values of the heating belts connected in parallel, judging that the newly added heating belts in the heating belts connected in parallel fail (otherwise, continuously increasing the number of the heating belts connected in parallel).
Or alternatively, all the heating strips are connected in parallel with the adjustable resistor R, then the number of the heating strips connected in parallel with the adjustable resistor R is subtracted one by one, and after subtracting the heating strips on the parallel branch each time, whether the resistance value adjusted by the adjustable resistor R, the sum of the rated resistance values of the heating strips on the parallel branch and the third current value and the fourth current value meet the characteristics of the parallel circuit or not is verified, when the characteristics of the parallel circuit are met, it can be determined that the heating strip subtracted last time on the parallel branch is the cause of the heater failure, namely, the actual resistance value of the heating strip subtracted last time is unequal to the rated resistance value of the heating strip, and the failure occurs.
Specifically, to the case of keeping the third current value equal to the fourth current value and comparing the sum of the rated resistance values of the heating strips with the adjustable resistor R, the step S3 of controlling the adjustable resistor R to be serially connected with different numbers of heating strips in parallel includes:
connecting a plurality of heating strips (all the heating strips can be connected in parallel with the adjustable resistor R, and reducing the number of the heating strips connected in parallel with the adjustable resistor R one by one;
correspondingly, as shown in fig. 6, the fault determining step S4 of the heating belt specifically includes:
the resistance value of the adjustable resistor R is regulated when one heating belt is newly reduced, so that the current in the adjustable resistor R is consistent with the current in the heating belt connected in parallel with the adjustable resistor R;
when the resistance value of the adjustable resistor R is consistent with the sum of rated resistance values of the heating bands connected in parallel, judging that one heating band which is subtracted recently in the heating bands connected in parallel fails (otherwise, continuously reducing the number of the heating bands connected in parallel).
As another preferred embodiment of the simplified calculation step and improved judgment efficiency provided by the present invention, as shown in fig. 7, the step S4 of judging the fault heating zone based on the resistance value, the third current value and the fourth current value after the adjustment of the adjustable resistor R may further include:
s41, adjusting the resistance value of the adjustable resistor R until the resistance value of the adjustable resistor R is equal to the sum of rated resistance values of all heating bands connected in parallel;
s42, if the magnitude relation between the third current value and the fourth current value is changed after the adjustable resistor R is adjusted, for example, the magnitude relation between the third current value and the fourth current value is changed from equal (i.e. the difference value does not exceed the preset difference threshold value) to unequal (i.e. the difference value exceeds the preset difference threshold value), or the difference value is changed from unequal to equal, then it is determined that the heating belt increased or decreased by the current detection fails compared with the heating belt increased or decreased by the previous detection, if the magnitude relation between the third current value and the fourth current value is not changed, then the number of the heating belt parallel to the adjustable resistor R is continuously increased or decreased, and the steps are repeated.
The determination logic for determining whether the magnitude relation between the third current value and the fourth current value is changed in S42 is also related to increasing the number of parallel heating strips one by one or decreasing the number of parallel heating strips one by one in step S3, specifically:
when the number of heating strips connected in parallel with the adjustable resistor R is increased one by one in the step S3, the step S42 specifically includes: if the difference between the third current value and the fourth current value exceeds the preset difference threshold (i.e. is not equal) after the adjustable resistor R is adjusted, determining that the heating belt increased by the current detection is faulty compared with the heating belt increased by the previous detection, if the difference between the third current value and the fourth current value still does not exceed the preset difference threshold, continuously increasing the number of the heating belts connected with the adjustable resistor R in parallel, and repeating the steps.
In step S3, when the number of heating strips connected in parallel to the adjustable resistor R is reduced one by one, step S42 specifically includes: if the difference between the third current value and the fourth current value does not exceed (i.e. is equal to) the preset difference threshold after the adjustment of the adjustable resistor R, it is determined that the heating belt reduced by the current detection is faulty relative to the heating belt reduced by the previous detection, and if the difference between the third current value and the fourth current value still exceeds the preset difference threshold, the number of heating belts connected in parallel to the adjustable resistor R is continuously reduced and the steps are repeated.
The embodiment of the present invention does not specifically limit how to adjust the resistance value of the adjustable resistor R in the semiconductor processing apparatus, for example, optionally, as shown in fig. 1, the semiconductor processing apparatus further includes a rotating electrical machine M, and adjusting the resistance value of the adjustable resistor R to be equal to the sum of the resistance values of the rated resistances of the heating tapes connected in parallel therewith includes:
the rotating motor M is controlled to adjust the resistance value of the adjustable resistor R.
In order to improve the efficiency of comparing the sum of the resistance value of the adjustable resistor R and the rated resistance value of the heating belt in the parallel circuit, preferably, when the sum of the resistance value of the adjustable resistor R and the resistance value of the rated resistance is equal, the resistance value adjustment amount of the adjustable resistor R and the rated resistance value of the newly added (reduced) heating belt can be directly compared; when the resistance value of the adjustable resistor R is adjusted to be equal to the sum of the resistance values of the rated resistances of the heating tapes connected in parallel with the adjustable resistor R, the resistance value adjustment amount of the adjustable resistor R may also be determined directly according to the rated resistance value of the newly added (reduced) heating tape, and specifically, the diagnostic method may further include:
multiplying the revolution n of the rotating motor by a preset conversion coefficient X to obtain the resistance value regulating quantity R of the adjustable resistor R X Wherein, the preset transformation coefficient is the resistance value changed by one turn of the rotating motor.
As a second aspect of the present invention, there is also provided a system employing the diagnostic method provided by the embodiment of the present invention, the system including: the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
the controller is used for acquiring a first current value in the heater and acquiring a second current value in the diagnosis circuit; comparing the first current value with the second current value, and judging that the heater fails when the difference value between the first current value and the second current value exceeds a preset difference value threshold.
The structure of the heater according to the embodiment of the present invention is not particularly limited, and for example, alternatively, as shown in fig. 1, the heater may include a plurality of heating zones (heating zone 1, heating zone 2, heating zone 3 … …, heating zone N) connected in series with each other.
In order to improve the efficiency of fault detection, preferably, as shown in fig. 1, the resistor on the diagnosis circuit is an adjustable resistor R, and the controller is used for controlling the adjustable resistor to be serially connected with different numbers of heating belts in parallel after judging that the heater fails; the current value through the adjustable resistor is a third current value, and the current value through each heating belt connected in parallel with the adjustable resistor is a fourth current value; and screening the heating belt with faults based on the resistance value after the adjustment of the adjustable resistor, and the third current value and the fourth current value.
The embodiment of the invention does not limit how to increase the number of heating strips connected in parallel with the adjustable resistor R one by one, for example, optionally, as shown in fig. 1, the heater includes N heating strips connected in series in sequence, a first end of the adjustable resistor R is electrically connected with a first end of a first heating strip (heating strip 1) far away from the rest of the heating strips (it should be noted that, approaching and separating here refers to approaching and separating relationships between electronic elements in a series circuit), a second end of the adjustable resistor R is selectively communicated with one end of the N heating strips far away from the first end of the first heating strip through N connecting lines respectively, after determining that the heater fails, the controller is used for controlling the first connecting line to the N connecting line to be conducted separately in sequence, and adjusting the resistance value of the adjustable resistor R to be equal to the sum of the resistance values of rated resistances of the heating strips connected in parallel therewith, and if the difference between the third current value and the fourth current value is detected to exceed a preset difference threshold value, then determining that the next new heating strip fails.
Optionally, as shown in fig. 1, the system further includes a detection module for detecting the third current value and the fourth current value, and calculating a difference between the third current value and the fourth current value; the controller is used for obtaining the difference value of the third current value and the fourth current value through the detection module.
Or in some embodiments of the present invention, the controller may be further configured to control the first connection line to the nth connection line to be sequentially and individually turned on after determining that the heater fails, adjust the resistance value of the adjustable resistor R to be equal to the third current value and the fourth current value, and compare the sum of the resistance values of the adjustable resistor R and the rated resistance of the heating band connected in parallel therewith, and determine that the heating band newly added fails if the sum of the resistance values of the adjustable resistor R and the rated resistance of the heating band connected in parallel therewith is not equal.
The embodiment of the invention does not specifically limit how to realize selective conduction of the plurality of connection lines, for example, optionally, as shown in fig. 1, one switch (switch K1, switch K2, switch K3 … … switch KN) may be respectively disposed on the N connection lines, and after determining that the heater fails, the semiconductor process device may control the switches on the N connection lines to be sequentially closed (only one switch is closed at a time).
The number of heating strips in the heater is not particularly limited in the embodiment of the invention, for example, the number N of heating strips is equal to or greater than 4 in general.
As shown in fig. 1, where the number of zones n=4, for the convenience of understanding of those skilled in the art, the present invention further provides a specific embodiment for performing heater diagnosis under the condition of n=4:
as shown in fig. 1, the heater is composed of a heating belt 1, a heating belt 2, a heating belt 3 and a heating belt 4, wherein the heating belt 1, the heating belt 2, the heating belt 3 and the heating belt 4 respectively correspond to a resistance value R 1 ＝100Ω，R 2 ＝120Ω，R 3 ＝95Ω，R 4 =150Ω. The resistance of the motor changes by 5 omega (i.e. the preset transformation coefficient x=5Ω) for 1 turn. The detection circuit includes four connecting wires altogether, is provided with four switches on it respectively: switch K1, switch K2, switch K3, switch K4.
Rated resistance of heater:
R T ＝R 1 +R 2 +R 3 +R 4 ＝100+120+85+150＝455Ω
the preset resistance value of the variable resistor R is the rated resistance value 455 omega of the heater, the current detection device detects that a difference value I=0.5A exists between the first current value and the second current value in the operation of the heating belt, the semiconductor process equipment judges that the heater fails, and an automatic detection flow is started.
Taking a detection method for keeping the current values of the two branches equal and comparing the resistance values after increasing and decreasing the heating band as an example:
first turn off the K4 switchClosing the K1 switch (i.e. R only 1 Access the parallel branch) and adjusts the variable resistor R such that the current difference I remains zero.
When the current detecting device detects the current difference value i=0a, the resistance value of the variable resistor R is 100deg.OMEGA, and the rated resistor R of the heating belt 1 1 Equal, the heating belt 1 is normal.
Open K1, close K2 (i.e. R 1 、R 2 Connected into parallel branch), the resistance value of the variable resistor R is regulated to make the current difference I be zero.
When the current detecting device detects the current difference i=0a, the number of turns of the motor in the forward direction is adjusted to 34 turns, namely, the adjustment quantity rx=34×5=170Ω. However, if the heating belt 2 is normal, the adjustment amount of the variable resistor R should be 120++5=24 rotations of the motor, i.e. the adjustment amount should be equal to the resistance value of the newly added heating belt 2 in the parallel branch, rx=24++120Ω=r 2 . It follows that the newly added heating band 2 in the actual parallel branch has a specific resistance to the rated resistance R 2 The heating belt 2 is abnormal with an increase of 50Ω.
Taking a detection method for keeping the resistance values of the two branches equal and comparing the current values after increasing and decreasing the heating band as an example:
first the K4 switch is opened, the K1 switch is closed (i.e. R only 1 Connected into parallel branch) and adjusting the variable resistor R to make the resistance value of the variable resistor R be 100 omega (namely, the resistance R is equal to the rated resistance R of the heating belt 1) 1 Equal);
when the current detecting device detects the current difference value I=0A, the actual resistance value of the heating belt 1 and the rated resistance R thereof can be proved 1 Equal, the heating belt 1 is normal.
Open K1, close K2 (i.e. R 1 、R 2 Access to parallel branch), adjust the resistance value of the variable resistor R to r=r 1 +R 2 =220Ω (i.e. the resistance value of the variable resistor R is equal to the rated resistance R of the heating belt 1 1 Rated resistance R with heating belt 2 2 Sum of;
at this time, when the current detecting device detects the current difference i+.0a, it is explained that the sum of the actual resistance value of the heating belt 1 and the actual resistance value of the heating belt 2 is not equal to the sum of the rated resistances of both, and the heating belt 1 is determined to be normal in the last detection period, so that it can be determined that the heating belt 2 is abnormal.
In the system provided by the embodiment of the invention, the controller respectively acquires the current flowing in the heater and the current flowing on the diagnosis circuit, the diagnosis circuit is connected with the heater in parallel, and the resistance on the path of the diagnosis circuit is equal to the rated resistance of the heater, so that under the condition that the total resistance of the heater is normal, the diagnosis circuit is equal to the current flowing in the heater, when the two current values are different, the resistance of the heater can be considered to be changed, namely, the heater is judged to be faulty.
In addition, the diagnosis method provided by the embodiment of the invention can be automatically realized by the semiconductor equipment provided with the diagnosis circuit, and compared with the scheme that an operator detects the heating belt manually and sequentially in the prior art, the diagnosis method greatly improves the efficiency of detecting faults.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (9)
1. A method of diagnosing a heater in a semiconductor processing apparatus, the heater comprising a plurality of heating zones connected in series with each other, the resistance on the diagnostic circuit being an adjustable resistance, the method comprising:
acquiring a first current value in the heater and a second current value in a diagnosis circuit, wherein the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
when the difference value between the first current value and the second current value exceeds a preset difference value threshold value, judging that the heater fails;
after judging that the heater fails, controlling the adjustable resistor to be connected with different numbers of heating belts in parallel successively; the current value passing through the adjustable resistor is a third current value, and the current value passing through each heating belt connected in parallel with the adjustable resistor is a fourth current value;
and screening the heating belt with faults based on the resistance value after the adjustable resistance is adjusted, the third current value and the fourth current value.
2. The diagnostic method of claim 1, wherein the determining a faulty heating zone based on the resistance value adjusted by the adjustable resistor and the third and fourth current values comprises:
adjusting the resistance value of the adjustable resistor until the third current value and the fourth current value are equal;
and if the magnitude relation between the resistance value of the adjustable resistor after adjustment and the sum of the resistance values of the rated resistors of the heating belts connected in parallel with the adjustable resistor is changed, judging that the heating belt increased or decreased by the current detection is failed compared with the heating belt increased or decreased by the previous detection.
3. The diagnostic method of claim 2, wherein said controlling the adjustable resistance in series with a different number of said heating zones comprises:
connecting at least one heating belt with the adjustable resistor in parallel, and increasing the number of the heating belts connected with the adjustable resistor in parallel one by one;
each time a heating belt is added, the resistance value of the adjustable resistor is adjusted to enable the third current value to be consistent with the fourth current value;
and when the resistance value of the adjustable resistor after adjustment is inconsistent with the sum of rated resistance values of the heating belts connected in parallel, judging that the newly added heating belt in the heating belts connected in parallel fails.
4. The diagnostic method of claim 1, wherein the determining a faulty heating zone based on the resistance value adjusted by the adjustable resistor and the third and fourth current values comprises:
adjusting the resistance value of the adjustable resistor until the sum of the resistance values of all rated resistors of the heating belt connected in parallel with the resistance value of the adjustable resistor is equal to the sum of the resistance values of all rated resistors of the heating belt;
and if the magnitude relation between the third current value and the fourth current value is changed, judging that the heating belt increased or decreased by the current detection relative to the previous detection fails.
5. The diagnostic method of claim 4, wherein said adjusting the resistance value of the adjustable resistor to be equal to the sum of the resistance values of the rated resistances of the heating zones to which it is connected in parallel comprises:
controlling a rotating motor to adjust the resistance value of the adjustable resistor; and multiplying the revolution number of the rotating motor by a preset conversion coefficient to obtain the resistance value adjustment quantity of the adjustable resistor, wherein the preset conversion coefficient is the resistance value changed by one rotation of the rotating motor.
6. The diagnostic method of any one of claims 1 to 5, wherein the semiconductor process equipment comprises a detection module for detecting the third current value and the fourth current value and calculating a difference between the third current value and the fourth current value;
the diagnostic method further comprises: and obtaining a difference value of the third current value and the fourth current value through the detection module.
7. A system employing the diagnostic method of any one of claims 1 to 6, comprising: the diagnosis circuit is connected with the heater in parallel, and the resistance on the diagnosis circuit is equal to the rated resistance of the heater;
the controller is used for acquiring a first current value in the heater and acquiring a second current value in the diagnosis circuit;
comparing the first current value with the second current value, and judging that the heater fails when the difference value between the first current value and the second current value exceeds a preset difference value threshold;
the heater comprises a plurality of heating belts which are mutually connected in series, and the resistance on the diagnosis circuit is an adjustable resistance;
the controller is used for controlling the adjustable resistor to be connected with different numbers of heating belts in parallel successively after judging that the heater fails; the current value passing through the adjustable resistor is a third current value, and the current value passing through each heating belt connected in parallel with the adjustable resistor is a fourth current value; and screening the heating belt with faults based on the resistance value after the adjustable resistance is adjusted, the third current value and the fourth current value.
8. The system of claim 7, wherein the heater comprises N heating strips connected in series in sequence, a first end of the adjustable resistor is electrically connected with a first end of a first heating strip away from the other heating strips, and a second end of the adjustable resistor is selectively communicated with one end of the N heating strips away from the first end of the first heating strip through N connecting lines respectively;
the controller is used for controlling the first connecting wire to the Nth connecting wire to be sequentially and independently conducted after judging that the heater breaks down, adjusting the resistance value of the adjustable resistor to be equal to the sum of the resistance values of the rated resistances of the heating strips connected with the adjustable resistor in parallel, and judging that the heating strip which is newly added breaks down when the difference value between the third current value and the fourth current value exceeds a preset difference value threshold value.
9. The system of claim 7, further comprising a detection module for detecting the third current value and the fourth current value and calculating a difference between the third current value and the fourth current value;
the controller is used for obtaining the difference value of the third current value and the fourth current value through the detection module.
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