CN113063989A - Multi-frequency-point dielectric property high-speed testing system and method for sheet microwave dielectric material - Google Patents
Multi-frequency-point dielectric property high-speed testing system and method for sheet microwave dielectric material Download PDFInfo
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Abstract
The invention discloses a multi-frequency point dielectric property high-speed test system and a method of a sheet microwave dielectric material, wherein the test system comprises a network analyzer, a centimeter wave resonator and a millimeter wave resonator, a first signal output end of the network analyzer is connected with a first antenna through a first coaxial cable, the first antenna is connected with the centimeter wave resonator, a second signal output end of the network analyzer is connected with a second antenna through a second coaxial cable, and the second antenna is connected with the millimeter wave resonator; the dielectric performance test of centimeter wave frequency band and millimeter wave frequency band under the 5G application scene frequency band can be effectively realized through two kinds of high order mode resonant cavities, the dielectric performance automatic test of slice microwave dielectric material can be effectively realized through utilizing the system, and the dielectric performance test of five frequency points is realized through two kinds of high order mode resonant cavities of design.
Description
Technical Field
The invention belongs to the technical field of material dielectric property testing, and particularly relates to a system and a method for testing the multi-frequency-point dielectric property of a microwave dielectric material at a high speed in a 5G application scene.
Background
The microwave dielectric material is one of the most popular research subjects in the current microelectronic industry, is the best choice for precisely reducing the size of the current semiconductor device, provides more possibilities for realizing a new device with special performance, is widely applied to many fields of microwave technology, is commonly used for manufacturing hard or semi-hard sheet materials like ceramic such as PCB boards, mobile phone back shells and the like, and has good application prospect and development and utilization value under the era background of 5G technology commercial and 'everything interconnection'.
The commercial 5G network mainly adopts two frequency bands of FR1 frequency band (centimeter wave) and FR2 frequency band (millimeter wave), and five frequency points of 1500MHz/2450MHz/5000MHz/27GHz/39 GHz. After the manufacturing process of the microwave dielectric material is completed, basic dielectric performance parameters such as dielectric constant and dielectric loss of the microwave dielectric material under five frequency points need to be rapidly and respectively measured, so that unnecessary loss caused by unqualified materials flowing into a subsequent process on a production line is avoided, and secondary processing of a sample is reduced as much as possible to reduce the testing cost.
Common microwave dielectric property test schemes comprise a transmission waveguide reflection test method, a quasi-optical resonant cavity test method, a separation medium resonant cavity test method and the like, and all have the defects of complicated detection method, difficulty in operation, low calculation speed and the like, and cannot meet the precision requirement of the dielectric property test of common flaky microwave dielectric materials and the test requirement under the production environment:
transmission waveguide reflection test method: the sample needs secondary processing, the testing precision is low, the testing speed is slow, and the testing process is complicated;
quasi-optical cavity testing method: the test equipment needs to be accurately calibrated for many times, the test speed is extremely slow, and the test flow is complicated;
separation medium resonant cavity test (SPDR) method: the test frequency band is narrow, different frequency band tests need corresponding frequency band test cavities, the switching operation process is complicated, and the test is not suitable for the millimeter wave frequency band.
Therefore, the research of the rapid dielectric property testing system for the 5G application scene sheet microwave dielectric material has extremely high commercial prospect and scientific research value, and a testing system meeting the requirements of testing speed and testing precision is lacked in China at present.
Disclosure of Invention
The invention aims to overcome the defects of a dielectric property test scheme of a sheet microwave dielectric material in the existing 5G application scene, provides a method for quickly measuring resonant frequencies at different frequency points by using a multi-frequency point high-order mode scheme, and realizes quick and accurate acquisition of dielectric property test results of the sheet microwave dielectric material at multiple frequency points.
In order to achieve the aim, the multi-frequency point dielectric property high-speed test system of the sheet microwave dielectric material comprises a network analyzer, a centimeter wave resonator and a millimeter wave resonator, wherein a first signal output end of the network analyzer is connected with a first antenna through a first coaxial cable, the first antenna is connected with the centimeter wave resonator, a second signal output end of the network analyzer is connected with a second antenna through a second coaxial cable, and the second antenna is connected with the millimeter wave resonator;
the network analyzer is used for exciting the centimeter resonator or the millimeter resonator to obtain a resonance curve and acquiring the resonance frequency and the quality factor of the centimeter wave resonator and the millimeter wave resonator; the centimeter wave resonator is used for generating a centimeter wave resonance curve through a centimeter wave frequency band microwave signal sent by the network analyzer; and the millimeter resonator is used for generating a millimeter wave resonance curve through the millimeter wave frequency band resonance signal sent by the network analyzer.
Furthermore, the centimeter resonator comprises a first outer conductor, a first inner cavity is formed in the first outer conductor, a first inner conductor coaxial with the first outer conductor is arranged in the first inner cavity, a first opening communicated with the first inner cavity is formed in the top of the first outer conductor, two first mounting holes communicated with the first inner cavity are formed in the lower portion of the first outer conductor, and the first mounting holes are used for inserting the first antenna.
Further, the first inner conductor comprises a cylindrical part and a circular truncated part positioned above the cylindrical part, the diameter of the inner wall of the first outer conductor is recorded as D2, the diameter of the cylindrical part of the first inner conductor is recorded as D3, and D2: D3 is as follows: 1) the distance from the center of the first mounting hole to the lower end face of the first outer conductor is D4, the height of a circular table part of the first inner conductor is D5, the height of a cylindrical part of the first inner conductor is D6, and D4: D5: D6 are (1.8-2): (11-14): 4-5).
Furthermore, a first signal coupling ring is installed outside the first installation hole and used for adjusting the depth of the first antenna inserted into the first installation hole, the first antenna is connected with one end of a first coaxial cable, and the other end of the first coaxial cable is connected with a network analyzer.
Furthermore, the millimeter resonator comprises a second outer conductor, a second inner cavity is formed in the second outer conductor, a second opening is formed in the top end of the second outer conductor, two second mounting holes communicated with the second inner cavity are formed in the lower portion of the second outer conductor, one end of a second antenna is inserted into the second mounting holes, the other end of the second antenna is connected with one end of a second coaxial cable, and the other end of the second coaxial cable is connected with a network analyzer.
Furthermore, the diameter of the second outer conductor is marked as D9, the diameter of the inner cavity of the second outer conductor is marked as D10, and the ratio of D9 to D10 is 1.2-1.6; the height of the cavity above the central axis of the second mounting hole is recorded as D11, the height from the central axis of the second mounting hole to the lower end face of the second outer conductor is recorded as D12, and the ratio of D11 to D12 is 5.7-6.1.
Further, the device also comprises a conveying device for driving the sheet-shaped microwave dielectric material to horizontally move.
A multi-frequency point dielectric property high-speed test method of a sheet microwave dielectric material based on the system comprises the following steps:
the centimeter wave frequency point test comprises the following steps:
measuring centimeter wave resonator in TEM when no sample is placed by network analyzer002、TEM003And TEM006Cavity resonant frequency and quality factor in the mode;
placing the sample at the opening of the centimeter-wave resonator, and measuring the sample at TEM with a network analyzer002、TEM003、TEM006Resonant frequency and quality factor in the mode;
according to TEM002、TEM003And TEM006Calculating the dielectric constant and dielectric loss of the sample material according to the resonant frequency and quality factor of the cavity in the mode and the resonant frequency and quality factor when the sample is placed;
the millimeter wave frequency point test comprises the following steps:
when a network analyzer is used for measuring that a sample is not placed, the millimeter wave resonator is at TE013And TE015Cavity resonant frequency and quality factor in the mode;
placing the sample at the opening of the millimeter wave resonator, and respectively measuring the sample at TE013And TE015Resonant frequency and quality factor in the mode;
according to TE013And TE015The resonant frequency and quality factor of the cavity in the mode, and the resonant frequency and quality factor when the sample is placed calculate the dielectric constant and dielectric loss of the sample material.
Further, when measuring the resonant frequency and the quality factor, placing a plurality of samples on a conveying device, and inversely placing the centimeter wave resonator and the millimeter wave resonator right above the conveying device to enable the samples to sequentially pass right below the centimeter wave resonator and the millimeter wave resonator; moving down the centimeter-wave resonator when the sample is positioned right below the centimeter-wave resonator, contacting the first opening of the centimeter-wave resonator with the sample, and respectively measuring the sample at TEM002、TEM003、TEM006Resonant frequency and quality factor in the mode; when the sample is positioned under the millimeter wave resonator, the millimeter wave resonator is moved downwards to make the second opening of the millimeter wave resonator contact with the sample, and the sample is respectively measured at TE013And TE015The resonant frequency and the quality factor at the mode.
Compared with the prior art, the invention has at least the following beneficial technical effects:
according to the system, the dielectric property test of a centimeter wave frequency band and a millimeter wave frequency band under a 5G application scene frequency band can be effectively realized through the two high-order mode resonant cavities, the automatic dielectric property test of a sheet microwave dielectric material can be effectively realized through the system, the dielectric property test of five frequency points is realized through the two cavities through the designed high-order mode resonant cavities, three frequency points can be tested through the centimeter wave resonator cavity, the dielectric property test of two frequency points can be tested through the millimeter wave resonator cavity, and the time for switching the resonator and the test method in the test is reduced.
Furthermore, the sample to be tested can be tightly attached to the centimeter wave resonator cavity or the millimeter wave resonator cavity opening, so that the complexity of taking and placing the sample is reduced. In practical production application, the product can be measured without keeping the existing size and shape, the test process of the whole system can be automatically completed under the assistance of a control computer by using the conveying device, the manual test time is reduced, and the method is suitable for the factory assembly line operation condition.
According to the method, when the sample is placed in the opening of the centimeter wave resonator, the dielectric property test under three frequency points is sequentially carried out, when the sample is placed in the opening of the millimeter wave resonator, the dielectric property test under two frequency points is sequentially carried out, the measurement under five frequency points is carried out, and only the sample needs to be moved sequentially, so that the time for switching the cavity and the test method in the test is greatly reduced.
Furthermore, install centimetre wave syntonizer and millimeter wave syntonizer in the assembly line top, put the sample on the conveyer of assembly line in proper order, can carry out the line production, realize automatic measurement, improve measurement of efficiency.
Drawings
FIG. 1 is a diagram of a construction of a centimeter-wave resonator, (a) is a cross-sectional view of the centimeter-wave resonator, (b) is a partial enlarged view of the centimeter-wave resonator, and (c) is a left side view of the centimeter-wave resonator;
FIG. 2 is a diagram of a millimeter resonator cavity structure, (a) is a schematic diagram of a millimeter resonator, and (b) is a left side view of (a);
FIG. 3 is a schematic view of the test system as a whole;
FIG. 4 is a diagram of a centimeter-wave resonator cavity state resonant frequency profile;
FIG. 5 is a diagram of a millimeter wave resonator cavity state resonant frequency profile;
FIG. 6 is a control computer program interface and test results.
In the drawings: 1. the first outer conductor, 2, the first resonant cavity, 3, the first inner conductor, 4, the first opening, 5, the first signal coupling ring, 6, the second outer conductor, 7, the second resonant cavity, 8, the second opening, 9, the second signal coupling ring; 10. centimeter wave resonator, 11 millimeter resonator, 12 network analyzer, 13 host computer, 14, conveyer belt, 15, sample, 16, serial port connecting wire, 17, first coaxial cable, 18, second coaxial cable, 19, first antenna, 20, first mounting hole, 21, second mounting hole, 22, second antenna.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
Referring to fig. 3, a high-speed test system for high-order modes of dielectric properties of a microwave medium suitable for a multi-frequency requirement comprises an upper computer 13, a network analyzer 12, a centimeter wave resonator 10 and a millimeter wave resonator 11.
The upper computer 13 is a control computer, is connected with the network analyzer 12 through a serial port communication protocol by a serial port connecting line 16, and can set working parameters of the network analyzer 12, such as initial scanning frequency, cut-to-scanning frequency, scanning point number and other data, and read the working state of the network analyzer 12;
the control computer provides control and calculation programs, and comprises a control module and a calculation module. The control module sets working parameters of the network analyzer to the network analyzer, obtains test data measured by the network analyzer from the resonator and transmits the test data to the calculation module. The core of the algorithm of the calculation module is that the numerical relation of 'sample thickness-dielectric constant-resonant frequency' and 'thickness-dielectric constant-quality factor' is obtained by simulating a cavity and a resonant mode, the correction is completed by combining the actual measurement results of standard samples such as quartz, polytetrafluoroethylene, sapphire, corundum and ceramic, after the resonant frequency and the quality factor of the resonant cavity under the cavity and the loaded sample are obtained, the calculation result-dielectric constant and dielectric loss are returned through data interpolation and fitting.
The network analyzer 12 is respectively connected with the centimeter wave resonator 10 and the millimeter wave resonator 11 through coaxial cables; the microwave signal sent by the network analyzer 12 forms a plurality of resonance peaks in the centimeter-wave resonator 10 and the millimeter-wave resonator 11 through the coaxial cable, and can collect the internal working states of the centimeter-wave resonator 10 and the millimeter-wave resonator 11, such as resonance frequency and signal insertion loss data, and feed back the data to the upper computer 13. And the upper computer 13 is used for obtaining the resonant frequency and the quality factor and obtaining the dielectric property of the material by controlling the resonant cavity and the network analyzer 12.
And a network analyzer 12 for obtaining a resonance curve by exciting the cm resonator or the mm resonator by a resonance cavity method.
And a centimeter wave resonator 10 for generating a corresponding resonance curve by a centimeter wave frequency band microwave signal.
And the millimeter resonator 11 is used for generating a corresponding resonance curve through the millimeter wave frequency band frequency resonance signal.
The coupling ring is rotated to drive the antenna to move back and forth, the phase and insertion loss of microwave signals are changed by adjusting the position of the transmitting end of the antenna in the resonant cavity, and then the resonant cavity is controlled to adjust a resonant curve.
Referring to fig. 1, a centimeter-wave resonator 10 includes a first outer conductor 1, a first inner conductor, and two first coupling loops 5. The first outer conductor 1 is a hollow cylinder, and the top end of the cylinder is provided with a first opening 4; the upper end face of the first inner conductor 3 is flush with the upper end face of the first outer conductor 1, the first inner conductor 3 comprises a solid cylinder and a solid circular truncated cone on the cylinder, the first inner conductor 3 is fixed inside the first outer conductor 1 and is coaxially arranged with the first outer conductor 1, the center of a first opening 4 of the opening end is positioned on the axial lines of the first inner conductor 3 and the first outer conductor 1, the end face of the first opening 4 is perpendicular to the axial lines of the first inner conductor 3 and the first outer conductor, a first cavity is formed between the first inner conductor 3 and the first outer conductor 1 and is communicated with the outside through the first opening 4 to form an open first resonant cavity 2, and a material 15 to be measured is placed at the first opening 4; two first mounting holes 20 communicated with the resonant cavity are formed in the lower portion of the first outer conductor 1, and central axes of the two first mounting holes 20 are collinear. A first signal coupling ring 5 is arranged outside a first mounting hole 20 at the lower part of the first outer conductor 1, a first antenna 19 is arranged in the first signal coupling ring 5, the first antenna 19 is connected with one end of a first coaxial cable 17, and the other end of the first coaxial cable 17 is connected with the network analyzer 12. The signal transmitted by the network analyzer 12 is brought to resonance inside the first cavity 2 by means of a first antenna 19 connected to the coupling loop. The depth of insertion of the first antenna 19 into the first mounting hole 20 is adjusted when the first signal coupling ring 5 is rotated. The diameter of the first outer conductor 1 is recorded as D1, the diameter of the cylindrical part of the resonant cavity is recorded as D2, the diameter of the cylindrical part of the first inner conductor 3 is recorded as D3, and D2: D3 is (3-4): 1; the distance from the center of the first signal coupling loop 5 to the lower end face of the first outer conductor 1 is recorded as D4, the height of the circular truncated cone part of the first inner conductor 3 is recorded as D5, the height of the cylindrical part of the first inner conductor 3 is recorded as D6, and D4: D5: D6 are (1.8-2): 11-14): 4-5; d7 and D8 are the diameter of the top opening of the first outer conductor 1 and the diameter of the top of the first inner conductor 3, respectively, D7: d8 is (4.1-4.5): 1.
the cavity structure within the above proportional size range can realize a TEM formed inside the first resonant cavity 2 of the cm-wave resonator002/TEM003/TEM006The resonant frequencies of the mode resonance peaks are respectively in the ranges of 1.4-1.6 GHz, 2.3-2.7 GHz and 4.6-5.3 GHz, and the test requirement of a centimeter wave frequency band of 1500Mhz/2450Mhz/5000Mhz is met.
Referring to fig. 2, the millimeter resonator 11 includes the second outer conductor 6 and two second signal coupling loops 9. The second outer conductor 6 is a hollow cylinder, the hollow part is also in the shape of a coaxial cylinder, the second opening 8 is arranged at the top of the second outer conductor 6, the hollow part is communicated with the outside through the second opening 8 to form an open second resonant cavity 7, and the second opening 8 is used for placing a material to be tested; two symmetrical second signal coupling rings 9 are arranged at the bottom of the outer surface of the second outer conductor 6, and a signal sent by the network analyzer 12 forms resonance inside the cavity through a coaxial cable connected to the second coupling rings 9.
Two second mounting holes 21 communicated with the resonant cavity are formed in the lower portion of the second outer conductor 6, and central axes of the two second mounting holes 21 are collinear. A second signal coupling ring 9 is arranged outside a second mounting hole 21 at the lower part of the second outer conductor 6, a second antenna 22 is arranged in the second signal coupling ring 9, the second antenna 22 is connected with one end of a second coaxial cable 18, and the other end of the second coaxial cable 18 is connected with the network analyzer 12. The signal transmitted by the network analyzer 12 is brought to resonance inside the resonant cavity of the millimetre resonator by means of a second antenna 22 connected to the coupling loop. When the second signal coupling ring 9 is rotated, the depth of the second antenna 22 inserted into the second mounting hole 21 is adjusted to adjust the insertion loss of the resonant signal.
The diameter of the second outer conductor 6 is recorded as D9, the diameter of the cylindrical hollow part of the second outer conductor 6 is recorded as D10, and the ratio of D9 to D10 is 1.2-1.6; the height of the cavity above the center of the second coupling ring is marked as D11, the height from the center of the second coupling ring 9 to the lower end face of the second outer conductor 6 is marked as D12, and the ratio of D11 to D12 is 5.7-6.1; d13 and D14 are the outer diameter and the inner bore diameter of the second signal coupling ring 9, respectively, and the ratio of the outer diameter to the inner bore diameter is about (2.3-2.5): 1.
the cavity structure within the proportional size range can realize the TE formed in the millimeter resonator cavity013/TE015The resonant frequency of the mode resonance peak is within the range of 26.8-27.3 GHz and 38.6-39.5 GHz, and the test requirement of the sample at 27G/39GHz in the millimeter wave frequency band is met.
The materials of the first outer conductor 1, the first inner conductor 3 and the second outer conductor 6 are all copper.
A microwave dielectric property test method of a multi-frequency point electrical property test system for microwave dielectric materials under a 5G application scene based on a centimeter wave resonator comprises the following steps:
s1: under the control of the control computer, when the sample is not placed, the centimeter-wave resonator is in 2/3/6 th mode, i.e. TEM, as measured by the network analyzer 12002/TEM003/TEM006The resonant frequency and quality factor of the cavity in the mode are shown in fig. 4;
s2: under the control of the control computer, the samples were measured in the 2/3/6 th mode, i.e. TEM002/TEM003/TEM006The resonant frequency and the quality factor in the mode are selected through the control calculation program interface shown in fig. 6;
s3: and combining the control calculation program with the test data, and calculating the dielectric properties of the material, such as dielectric constant, dielectric loss and the like, through interpolation fitting of the resonance curved surface.
In the resonance method of microwave test, for the same equipment and different samples tested in the same frequency band, the difference value of the cavity resonance frequency and the load resonance frequency and the dielectric constant and the thickness of the material form a certain functional relationship; similarly, the interpolation of the cavity quality factor and the load quality factor has a certain functional relationship with the dielectric loss and the thickness of the material, and the functional model can be established by testing standard samples with different thicknesses.
In the S3 method of the test method of the system, interpolation fitting calculation can be performed according to the function model of the collected material in the specific frequency band, and the dielectric property of the material to be tested can be obtained continuously and iteratively.
A millimeter resonator-based microwave dielectric performance testing method of a multi-frequency-point electrical performance testing system for microwave dielectric materials in a 5G application scene comprises the following steps:
s1: under the control of control computer, when the network analyzer measures that no sample is placed, the millimeter wave resonator is in 13/15 th mode, namely TE013/TE015The cavity resonant frequency and quality factor in the mode are shown in fig. 5;
s2: under the control of the control computer, the samples were measured in the 13/15 th mode, TE013/TE015Resonant frequency and quality factor in the mode;
s3: and combining the control calculation program with the test data, and calculating the dielectric properties of the material, such as dielectric constant, dielectric loss and the like, through interpolation fitting of the resonance curved surface.
The calculation principle is the same as the calculation method of the centimeter wave resonator.
Example 1
In one or more embodiments, an operation flow of a high-speed test system for multi-frequency point dielectric properties of a sheet-like microwave dielectric material in a 5G application-oriented scene is disclosed, which specifically includes the following steps:
firstly, a sheet sample 15 to be tested is placed on a transmission belt 14 of a test production line and moves along with the transmission belt 14;
step two, inverting the centimeter-wave resonator 10, stopping the conveyor belt 14 after the sample 15 is below the centimeter-wave resonator, and driving the centimeter-wave resonator 10 to move downwards under the drive of the first motor until the opening end of the resonant cavity is tightly attached to the sample 15, wherein the sample 15 is within the outer diameter coverage range of the first opening 4;
step three, controlling the calculation to set the network analyzer 12 to the resonant mode TEM002Loading corresponding resonance signals to the centimeter wave resonators;
step four, the network analyzer 12 reads the resonant frequency and the quality factor of the microwave signal in the centimeter wave resonator 10 and feeds the resonant frequency and the quality factor back to the control computer, and the control computer calculates the TEM of the sample 15 in the resonant mode002The dielectric constant and dielectric loss are lower, namely the dielectric constant and dielectric loss under the frequency point of 1500 MHz;
step five, controlling and calculating to set the network analyzer 12 to be a resonance mode TEM003Loading corresponding resonance signals to the centimeter wave resonators; the network analyzer 12 reads the resonant frequency and quality factor of the microwave signal in the centimeter wave resonator 10 and feeds the resonant frequency and quality factor back to the control computer, and the control computer calculates the TEM of the sample 15 in the resonant mode003The lower dielectric constant and dielectric loss, namely the dielectric constant and dielectric loss at the frequency point of 2450 MHz;
step six, controlling and calculating to set the network analyzer 12 to be a resonance mode TEM006Loading corresponding resonance signals to the centimeter wave resonators; the network analyzer 12 reads the resonant frequency and quality factor of the microwave signal in the centimeter wave resonator 10 and feeds the resonant frequency and quality factor back to the control computer, and the control computer calculates the TEM of the sample 15 in the resonant mode006The dielectric constant and dielectric loss are lower, namely the dielectric constant and dielectric loss under the frequency point of 5000 MHz;
step seven, inverting the millimeter wave resonator 11, moving the centimeter wave resonator 0 upwards along with the first motor, driving the conveyor belt 14 to continue to drive the sample A to move, stopping the movement of the conveyor belt 14 after the sample A moves below the millimeter wave resonator 11, and moving the millimeter wave resonator 11 downwards under the drive of the second motor until the open end of the millimeter wave resonator 11 is tightly attached to the sample, wherein the sample 15 is within the outer diameter coverage range of the second opening 8;
step eight, the network analyzer 12 is set to be in a resonant mode TE by the control of an upper computer013Loading a corresponding resonance signal to the millimeter wave resonator 11;
step nine, the control computer reads the internal TE of the millimeter wave resonator 11 from the network analyzer 12013Feeding back the resonant frequency and quality factor of the microwave signal in the mode to the control computer, and calculating TE of the sample in different resonant modes by the control computer013The dielectric constant and dielectric loss are lower, namely the dielectric constant and dielectric loss at the frequency point of 27 GHz;
step ten, the upper computer is used for controlling to set the network analyzer 12 to be in the resonant mode TE in sequence015Loading a corresponding resonance signal to the millimeter wave resonator 11;
step eleven, the control computer reads the internal TE of the millimeter wave resonator 11 from the network analyzer 12015Feeding the resonant frequency and quality factor of the microwave signal back to the control computer in the mode, and calculating the sample in TE by the control computer015Dielectric constant and dielectric loss under the mode, namely dielectric constant and dielectric loss under the frequency point of 39 GHz;
and step twelve, the millimeter wave resonator moves upwards along with the motor, the conveyor belt continues to move, and the test system tests the next sample.
Example 2
Operating process and test result of using centimeter wave resonator to test one kind of sheet microwave dielectric material, and using TEM002The method for testing the alumina material with the purity of 99% in the mode is taken as an example and specifically comprises the following steps:
s1: connecting the centimeter-wave resonator 10 with a network analyzer 12 and a control computer 13, and rotating the first signal coupling ring 5 to enable the coaxial cable to be inserted into the length of the resonant cavity until the network analyzer 12 displays that the current insertion loss of the resonant signal is-40 dB;
s2: operating control computer, reading TEM002The cavity resonant frequency and quality factor of the centimeter-wave resonator 10 in the mode;
s3: an alumina sample is placed at the first opening 4 of the resonant cavity, the control computer is operated, and the network analyzer 12 reads the TEM002The load resonant frequency and the quality factor under the mode are fed back to the control computer;
s4: and the control computer calculates the dielectric property of the material to be measured according to the data fed back by the network analyzer, and reads the calculation result.
The test results were as follows: the cavity resonant frequency is 1.9205GHz, the load resonant frequency is 1.743GHz, the cavity quality factor is 1256, and the load quality factor is 943. The dielectric constant and dielectric loss of the alumina material are respectively 10.3 and 3.2 multiplied by 10 measured by a quasi-optical resonant cavity method-4The test results by the SPDR test method at 1.5GHz were 9.7 and 3.7X 10-4The test results of the test system are 10.1 and 3.6 multiplied by 10-4The dielectric property of the alumina material is about 9.8 to 10.2 and 3.4 multiplied by 10 proved by inspection-4～3.7×10-4. By contrast, the test result of the system on the alumina material is in a standard range, the dielectric constant and the dielectric loss precision are better than those of a quasi-optical resonant cavity method and an SPDR method, and the test result is close to credibility.
Through a plurality of test experiments, the single frequency point test time of the multi-frequency point dielectric property high-speed test system is about 10 seconds, and the test time of all frequency points is about 1 minute.
In conclusion, the multi-frequency point dielectric property high-speed test system accurately measures the dielectric property of the microwave dielectric material in a 5G commercial application scene through the two high-order mode multi-frequency point coaxial open type resonant cavities, reduces the test operation threshold and saves the test time. Compared with the conventional coaxial resonance testing method, the method is suitable for testing the scenes such as the production line.
Although the foregoing description describes embodiments of the present invention, it is not intended to limit the scope of the present invention, and those skilled in the art will appreciate that various modifications and variations can be made without departing from the spirit and scope of the present invention.
Claims (9)
1. The multi-frequency-point dielectric property high-speed test system of the sheet microwave dielectric material is characterized by comprising a network analyzer (12), a centimeter wave resonator (10) and a millimeter wave resonator (11), wherein a first signal output end of the network analyzer (12) is connected with a first antenna (19) through a first coaxial cable (17), the first antenna (19) is connected with the centimeter wave resonator (10), a second signal output end of the network analyzer (12) is connected with a second antenna (21) through a second coaxial cable (18), and the second antenna (21) is connected with the millimeter wave resonator (11);
the network analyzer (12) is used for exciting the centimeter resonator (10) or the millimeter resonator (11) to obtain a resonance curve and acquiring the resonance frequency and the quality factor of the centimeter wave resonator (10) and the millimeter wave resonator (11); the centimeter wave resonator (10) is used for generating a centimeter wave resonance curve through a centimeter wave frequency band microwave signal sent by a network analyzer (12); and the millimeter resonator (11) is used for generating a millimeter wave resonance curve through the millimeter wave frequency band resonance signal sent by the network analyzer (12).
2. The system for testing the dielectric properties of multiple frequency points of a microwave dielectric material in sheet form according to claim 1, wherein the cm resonator (10) comprises a first outer conductor (1), the first outer conductor (1) has a first inner cavity therein, the first inner cavity is provided with a first inner conductor (3) coaxial with the first outer conductor (1), the top of the first outer conductor (1) has a first opening (4) communicated with the first inner cavity, the lower part of the first outer conductor (1) is provided with two first mounting holes (20) communicated with the first inner cavity, and the first mounting holes (20) are used for inserting a first antenna (19).
3. The system for testing the dielectric properties of multiple frequency points of a sheet-like microwave dielectric material at high speed as claimed in claim 2, wherein the first inner conductor (3) comprises a cylindrical part and a circular truncated part located above the cylindrical part, the diameter of the inner wall of the first outer conductor (1) is represented as D2, the diameter of the cylindrical part of the first inner conductor (3) is represented as D3, and D2: D3 is (3-4): 1) the distance from the center of the first mounting hole (20) to the lower end face of the first outer conductor (1) is D4, the height of a circular table of the first inner conductor (3) is D5, the height of a cylindrical part of the first inner conductor (3) is D6, and D4: D5: D6 are (1.8-2): (11-14): 4-5).
4. The system for high-speed testing of the multi-frequency-point dielectric properties of the microwave dielectric material in the form of a sheet as claimed in claim 2, wherein a first signal coupling ring (5) is installed outside the first installation hole (20), the first signal coupling ring (5) is used for adjusting the depth of the first antenna (19) inserted into the first installation hole (20), the first antenna (19) is connected with one end of a first coaxial cable (17), and the other end of the first coaxial cable (17) is connected with the network analyzer (12).
5. The system for testing the multi-frequency-point dielectric property of the microwave dielectric material in the form of a sheet according to claim 1, wherein the millimeter resonator (11) comprises a second outer conductor (6), the second outer conductor (6) has a second inner cavity therein, a second opening (8) is formed at the top end of the second outer conductor (6), two second mounting holes (21) communicated with the second inner cavity are formed at the lower part of the second outer conductor (6), one end of a second antenna (22) is inserted into the second mounting hole (21), the other end of the second antenna is connected with one end of a second coaxial cable (18), and the other end of the second coaxial cable (18) is connected with the network analyzer (12).
6. The system for testing the multi-frequency-point dielectric properties of the microwave dielectric material in the form of a sheet according to claim 5, wherein the diameter of the second outer conductor (6) is D9, the diameter of the inner cavity of the second outer conductor (6) is D10, and the ratio of D9: D10 is 1.2-1.6; the height of the cavity above the central axis of the second mounting hole (21) is recorded as D11, the height from the central axis of the second mounting hole (21) to the lower end face of the second outer conductor (6) is recorded as D12, and the ratio of D11 to D12 is 5.7-6.1.
7. The system for high-speed testing of the multi-frequency dielectric properties of the sheet-like microwave dielectric material as claimed in claim 1, further comprising a conveyor for moving the sheet-like microwave dielectric material horizontally.
8. A method for high-speed testing of multi-frequency-point dielectric properties of a sheet-like microwave dielectric material based on the system of claim 1, comprising:
the centimeter wave frequency point test comprises the following steps:
measuring the centimeter wave resonator (10) in TEM with the network analyzer (12) when the sample is not placed002、TEM003And TEM006Cavity resonant frequency and quality factor in the mode;
placing the sample (15) at the opening of the centimeter-wave resonator (10), and measuring the sample at TEM with a network analyzer (12)002、TEM003、TEM006Resonant frequency and quality factor in the mode;
according to TEM002、TEM003And TEM006Calculating the dielectric constant and dielectric loss of the sample material according to the resonant frequency and quality factor of the cavity in the mode and the resonant frequency and quality factor when the sample is placed;
the millimeter wave frequency point test comprises the following steps:
when the millimeter wave resonator is measured by a network analyzer (12) without a sample, the millimeter wave resonator is at TE013And TE015Cavity resonant frequency and quality factor in the mode;
placing the sample (15) at the opening of the millimeter wave resonator (11), and respectively measuring the TE of the sample (15)013And TE015Resonant frequency and quality factor in the mode;
according to TE013And TE015The resonant frequency and quality factor of the cavity in the mode, and the resonant frequency and quality factor when the sample is placed calculate the dielectric constant and dielectric loss of the sample material.
9. Sheet-like microwave dielectric material for a system according to claim 8The method for testing the dielectric property of the multi-frequency point at a high speed is characterized in that when the resonant frequency and the quality factor are measured, a plurality of samples (15) are placed on a conveying device, a centimeter wave resonator (10) and a millimeter wave resonator (11) are inversely placed right above the conveying device, and the samples (15) sequentially pass right below the centimeter wave resonator (10) and the millimeter wave resonator (11); moving down the centimeter-wave resonator (10) while the sample (15) is positioned right under the centimeter-wave resonator (10) so that the first opening (4) of the centimeter-wave resonator (10) and the sample (15) are in contact, and respectively measuring the sample in TEM002、TEM003、TEM006Resonant frequency and quality factor in the mode; when the sample (15) is positioned right below the millimeter wave resonator (11), the millimeter wave resonator (11) is moved downwards, the second opening (8) of the millimeter wave resonator (11) is contacted with the sample (15), and the samples are respectively measured at TE013And TE015The resonant frequency and the quality factor at the mode.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113484615A (en) * | 2021-07-29 | 2021-10-08 | 华南理工大学 | Material dielectric constant broadband test structure and test method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6255831B1 (en) * | 1995-01-04 | 2001-07-03 | Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. | Millimeter wave measurement process |
| JP2001281284A (en) * | 2000-03-30 | 2001-10-10 | Makoto Hirano | Nondestructive measuring instrument for complex dielectric constant |
| CN104407232A (en) * | 2014-11-26 | 2015-03-11 | 电子科技大学 | System and method for testing microwave complex permittivity of dielectric material |
| CN109521079A (en) * | 2018-11-20 | 2019-03-26 | 中电科仪器仪表有限公司 | A kind of multifrequency point material testing system and method |
| CN212410706U (en) * | 2020-07-28 | 2021-01-26 | 大连达利凯普科技有限公司 | Resonant cavity applied to 5G element |
-
2021
- 2021-03-22 CN CN202110304113.0A patent/CN113063989B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6255831B1 (en) * | 1995-01-04 | 2001-07-03 | Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. | Millimeter wave measurement process |
| JP2001281284A (en) * | 2000-03-30 | 2001-10-10 | Makoto Hirano | Nondestructive measuring instrument for complex dielectric constant |
| CN104407232A (en) * | 2014-11-26 | 2015-03-11 | 电子科技大学 | System and method for testing microwave complex permittivity of dielectric material |
| CN109521079A (en) * | 2018-11-20 | 2019-03-26 | 中电科仪器仪表有限公司 | A kind of multifrequency point material testing system and method |
| CN212410706U (en) * | 2020-07-28 | 2021-01-26 | 大连达利凯普科技有限公司 | Resonant cavity applied to 5G element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113484615A (en) * | 2021-07-29 | 2021-10-08 | 华南理工大学 | Material dielectric constant broadband test structure and test method thereof |
| CN113484615B (en) * | 2021-07-29 | 2022-05-24 | 华南理工大学 | Material dielectric constant broadband test structure and test method thereof |
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