CN113063974B - Semiconductor test probe is with having probe sleeve that flange stopped position - Google Patents
Semiconductor test probe is with having probe sleeve that flange stopped position Download PDFInfo
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- CN113063974B CN113063974B CN202110283944.4A CN202110283944A CN113063974B CN 113063974 B CN113063974 B CN 113063974B CN 202110283944 A CN202110283944 A CN 202110283944A CN 113063974 B CN113063974 B CN 113063974B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- General Physics & Mathematics (AREA)
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- Measuring Leads Or Probes (AREA)
Abstract
The utility model discloses a semiconductor test probe is with having flange to end probe sleeve of position belongs to semiconductor test probe field, a semiconductor test probe is with having flange to end probe sleeve of position, including first sleeve, second sleeve, first thimble and first flange, through adopting two-stage sleeve structure, it is that the adjustment space of probe is bigger, conveniently satisfies the use under the different work condition, and all set the slider that can move about with the conflict piece of the upper end of two springs and make its conflict power size that can adjust probe position and test point according to the operating mode.
Description
Technical Field
The utility model belongs to semiconductor test probe field, concretely relates to semiconductor test probe is with having probe sleeve that flange stopped position.
Background
The probe card is an element commonly used for detecting circuits in a semiconductor process, and a plurality of probes are arranged in the probe card, and the arrangement positions of the probes correspond to the circuit configuration of a circuit board to be detected of the probe card. The probe card is usually disposed on a testing machine, and the circuit board to be tested is held by a tool and pressed on the probe. Therefore, each probe is conducted to the circuit on the circuit board to be tested, and whether the circuit on the circuit board to be tested normally operates is detected by the probe.
The conventional probe structure generally includes a sleeve, in which two electrodes and a spring connected between the two electrodes are disposed. One of the electrodes is fixed on the detection machine and electrically connected with the detection machine, and the other electrode is movably positioned in the sleeve and used for guiding and connecting a welding spot on a to-be-detected circuit board to be detected. When the circuit board to be tested is pressed against the probe, the spring is compressed to apply force to the movable electrode, so that the electrode is pressed and contacted with the circuit board to be tested to be conducted. Or only one movable electrode is arranged, and the electrode and the detection machine are directly connected by a spring.
The probe is a tiny component, the structure is complex, and the parts are not easy to manufacture and assemble. The existing probe uses a spring as a conductive connection element, so errors in the process often cause poor contact of the probe and can not conduct a circuit board to be tested and a detection machine, and the requirement of the contact force of each test point on the probe is inconsistent, and the probe sleeve with the flange stop position for the semiconductor test probe, which can quickly adjust the contact force between the probe and the circuit board, is provided.
BRIEF SUMMARY OF THE PRESENT DISCLOSURE
To the deficiency of the prior art, the present disclosure aims to provide a probe sleeve with a flange stop for a semiconductor test probe, which solves the problem that the interference force between the probe and the circuit board test point is too large or too small in the prior art, which results in the damage to the product or the impression of the test result.
The purpose of the disclosure can be realized by the following technical scheme:
a probe sleeve with a flange stop position for a semiconductor test probe comprises a first sleeve, a second sleeve, a first thimble and a first flange, wherein the first flange is arranged on the first sleeve, a first mounting hole is formed in the first sleeve, the second sleeve is movably arranged in the first mounting hole, a first stop step is arranged on the first mounting hole, a first stop boss is arranged on the second sleeve and positioned above the first stop step, a first sliding block is movably arranged in the first mounting hole, a first spring is arranged between the first sliding block and the first stop boss, a first guide boss is arranged on the first sliding block, a first guide groove is formed in the first mounting hole, the first guide boss is movably arranged in the first guide groove, and a first threaded hole is formed in the first sliding block;
a second mounting hole is formed in the second sleeve, the first thimble is movably mounted in the second mounting hole, a second stop step is arranged in the second mounting hole, a second stop boss is arranged on the first thimble and located above the second stop step, a second sliding block is movably mounted in the second mounting hole, a second spring is arranged between the second sliding block and the second stop boss, a second guide boss is arranged on the second sliding block, a second guide groove is formed in the second mounting hole, the second guide boss is movably mounted in the second guide groove, and a second threaded hole is formed in the second sliding block;
a first adjusting module is arranged above the first mounting hole and comprises a first adjusting base, a first gear and a first lead screw gear, a first gear mounting groove is formed in the first adjusting base, a first through hole is formed in the first gear mounting groove, a plurality of first adjusting gear mounting grooves are uniformly formed in the side surface of the first gear mounting groove, a first rotating shaft mounting hole is formed in the first adjusting gear mounting groove, a first rotating fixing groove is formed in the upper end and the lower end of the first gear mounting groove, the first gear is movably mounted in the first gear mounting groove, first mounting bosses are arranged at the two ends of the first gear and movably mounted in the first rotating fixing groove, a first rotating shaft is movably mounted in the first rotating shaft mounting hole, a first adjusting gear and a first speed change gear are mounted on the first rotating shaft, the first adjusting gear is mounted in the first adjusting gear mounting groove, the first speed change gear is positioned on the outer end face of the first adjusting base, the first adjusting gear is meshed with the first gear, the first adjusting base is provided with a first screw rod gear movably mounted on the outer end face of the first speed change gear, the first screw rod gear is provided with a first T-shaped annular table, the first adjusting base is provided with a first T-shaped annular groove, the T-shaped annular table is movably mounted in the first T-shaped annular groove, the first speed change gear is meshed with the first screw rod gear, the end face of the first screw rod gear is provided with a first screw rod, and the first screw rod penetrates through a first threaded hole;
first adjusting rods are arranged in the first sleeve and the second sleeve and are positioned in the first mounting hole and the second mounting hole, the first adjusting rods sequentially consist of a first working section, a transition section and a second working section from top to bottom, a second screw rod is arranged on the second working section, and the second screw rod penetrates through a second threaded hole;
the first adjusting rod is provided with a third mounting hole, a second adjusting rod is movably mounted in the third mounting hole, a first open slot distributed in the circumferential direction is formed in the first working section, a first inclined plane is arranged on the first open slot, a first mounting groove distributed in the circumferential direction is formed in the second adjusting rod, a first mounting shaft is arranged on the first mounting groove, a first locking rod is movably mounted on the first mounting shaft, the upper end of the first locking rod is located in the first open slot, a first transmission hole is uniformly formed in the inner wall of the first gear, and the position of the first open slot corresponds to the position of the first gear.
Furthermore, a second adjusting module is arranged above the second mounting hole, the structure of the second adjusting module is consistent with that of the first adjusting module, a second screw rod is arranged on the second adjusting module, the second screw rod passes through a second threaded hole,
a second opening groove is formed in the second working section and distributed circumferentially, a second inclined plane is arranged on the second opening groove, a second mounting groove is formed in the second adjusting rod and distributed circumferentially, a second mounting shaft is arranged on the second mounting groove, a second locking rod is movably mounted on the second mounting shaft, and the upper end of the second locking rod is located in the second opening groove;
the semiconductor test probe is characterized in that a return spring is arranged between the second adjusting rod and the bottom surface of the third mounting hole.
Furthermore, the third mounting hole is an annular hole, a fourth mounting hole is formed in the first adjusting rod and is located on the first working section, the fourth mounting hole penetrates from the first working section to the second working section, a third adjusting rod is mounted in the fourth mounting hole, a second adjusting module is arranged above the second mounting hole, the structure of the second adjusting module is consistent with that of the first adjusting module, a second lead screw is arranged on the second adjusting module, and the second lead screw penetrates through a second threaded hole;
the second working section is provided with a second open slot distributed circumferentially, the second open slot is provided with a second inclined plane, the third adjusting rod is provided with a second mounting groove distributed circumferentially, the second mounting groove is provided with a second mounting shaft, the second mounting shaft is movably provided with a second locking rod, and the upper end of the second locking rod is positioned in the second open slot.
Further, a flange mounting hole is formed in the side face of the first flange.
Furthermore, a return spring is arranged between the third adjusting rod and the bottom surface of the fourth mounting hole, and a return spring is arranged between the second adjusting rod and the bottom surface of the third mounting hole.
Further, the gear transmission ratio in the first and second adjusting modules is the same as the elastic coefficient of the first and second springs.
The beneficial effect of this disclosure:
1. the two-stage sleeve structure is adopted, so that the adjusting space of the probe is larger, and the use under different working conditions is conveniently met;
2. the size of the interference force between the probe position and the test point can be adjusted according to the working condition.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present disclosure, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a schematic overall structure diagram of an embodiment of the present disclosure;
FIG. 2 is an anatomical diagram of an embodiment of the present disclosure;
FIG. 3 is an internal schematic view of an embodiment of the present disclosure;
FIG. 4 is a schematic diagram of the interior of a first tuning module according to an embodiment of the disclosure;
FIG. 5 is an internal schematic view of a first adjustment mount according to an embodiment of the disclosure;
FIG. 6 is a schematic view of a first gear of an embodiment of the present disclosure;
FIG. 7 is a schematic view of a first lead screw gear of an embodiment of the present disclosure;
FIG. 8 is a schematic view of a third adjustment lever portion of an embodiment of the present disclosure.
Fig. 9 is an enlarged schematic view of a second open slot portion of an embodiment of the disclosure.
Fig. 10 is an enlarged schematic view of a first open slot portion of an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are only a part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
As shown in fig. 1-9, a probe sleeve with flange stop for semiconductor test probe comprises a first sleeve 1, a second sleeve 2, a first thimble 3 and a first flange 4, the first flange 4 is mounted on the first sleeve 1, a first mounting hole 101 is formed in the first sleeve 1, the second sleeve 2 is movably mounted in the first mounting hole 101, a first stop step 102 is arranged on the first mounting hole 101, a first stop boss 204 is arranged on the second sleeve 2, the first stop boss 204 is positioned above the first stop step 102, a first slider 10 is movably mounted in the first mounting hole 101, a first spring 8 is arranged between the first slider 10 and the first stop boss 204, a first guide boss 1001 is arranged on the first slider 10, a first guide groove 103 is formed in the first mounting hole 101, the first guide boss 1001 is movably mounted in the first guide groove 103, and a first threaded hole 1002 is formed in the first slider 10;
a second mounting hole 201 is formed in the second sleeve 2, the first thimble 3 is movably mounted in the second mounting hole 201, a second stop step 202 is arranged in the second mounting hole 201, a second stop boss 301 is arranged on the first thimble 3, the second stop boss 301 is positioned above the second stop step 202, a second slider 11 is movably mounted in the second mounting hole 201, a second spring 9 is arranged between the second slider 11 and the second stop boss 301, a second guide boss 1101 is arranged on the second slider 11, a second guide groove 2011 is arranged on the second mounting hole 201, the second guide boss 1101 is movably mounted in the second guide groove 2011, and a second threaded hole 1202 is arranged on the second slider 11;
a first adjusting module 13 is arranged above the first mounting hole 101, the first adjusting module 13 includes a first adjusting base 131, a first gear 132 and a first lead screw gear 136, the first adjusting base 131 is provided with a first gear mounting groove 1311, the first gear mounting groove 1311 is provided with a first through hole 1314, the side surface of the first gear mounting groove 1311 is uniformly provided with a plurality of first adjusting gear mounting grooves 1312, the first adjusting gear mounting groove 1312 is provided with a first rotating shaft mounting hole 1313, the upper and lower ends of the first gear mounting groove 1311 are provided with first rotating fixing grooves 1315, the first gear mounting groove 1311 is movably mounted with the first gear 132, the two ends of the first gear 132 are provided with first mounting bosses 1321, the first mounting bosses 1321 are movably mounted in the first rotating shaft 1315, the first rotating shaft mounting hole 1313 is movably mounted with a first rotating shaft 134, the first rotating shaft 134 is mounted with a first adjusting gear 133 and a first change gear 135, a first adjusting gear 133 is mounted in a first adjusting gear mounting groove 1312, a first speed change gear 135 is located on the outer end face of the first adjusting base 131, the first adjusting gear 133 is meshed with the first gear 132, a first screw rod gear 136 is movably mounted on the outer end face of the first adjusting base 131 provided with the first speed change gear 135, a first T-shaped ring table 1361 is arranged on the first screw rod gear 136, a first T-shaped ring groove 1316 is arranged on the first adjusting base 131, a T-shaped ring table 1361 is movably mounted in the first T-shaped ring groove 1316, the first speed change gear 135 is meshed with the first screw rod gear 136, a first screw rod 7 is arranged on the end face of the first screw rod gear 136, and the first screw rod 7 passes through a first screw hole 1002;
a first adjusting rod 6 is arranged in the first sleeve 1 and the second sleeve 2, the first adjusting rod 6 is positioned in the first mounting hole 101 and the second mounting hole 102, the first adjusting rod 6 sequentially consists of a first working section 61, a transition section 62 and a second working section 63 from top to bottom, a second lead screw 12 is arranged on the second working section 63, and the second lead screw 12 passes through a second threaded hole 1202;
the first adjusting rod 6 is provided with a third mounting hole 601, a second adjusting rod 14 is movably mounted in the third mounting hole 601, a first opening groove 611 distributed circumferentially is formed in the first working section 61, a first inclined plane 612 is formed in the first opening groove 611, a first mounting groove 141 distributed circumferentially is formed in the second adjusting rod 14, a first mounting shaft 142 is arranged on the first mounting groove 141, a first locking rod 143 is movably mounted on the first mounting shaft 142, the upper end of the first locking rod 143 is located in the first opening groove 611, first transmission holes 1322 are uniformly formed in the inner wall of the first gear 132, the position of the first opening groove 611 corresponds to the position of the first gear 132, by such design, the second adjusting rod 14 can be pushed inwards, the second adjusting rod 14 and the first adjusting rod 6 move relatively, the first adjusting rod 6 drives the first locking rod 143 to move, the front end of the first locking rod 143 is in contact with the first inclined plane 612 and then rotates under force, the contact abutting head arranged at the front end of the first lock rod 143 abuts against the first transmission hole 1322 to achieve transmission connection between the second adjusting rod 14 and the first adjusting module 13, the first transmission hole 1322 is provided with an arc guide angle 1323, the second adjusting rod 14 is rotated to drive the first gear 132 to rotate, the first gear 132 drives the first lead screw gear 136 to rotate through the first adjusting gear 133 and the first speed changing gear 135, the adjustment of the first slider 10 and the second slider 11 is completed to adjust the positions of the first spring 8 and the second spring 9, and the second adjusting rod 14 can also be directly rotated without being pushed to complete independent adjustment of the second slider 11.
In some disclosures, a second adjusting module 17 is disposed above the second mounting hole 201, the second adjusting module 17 is identical to the first adjusting module 13 in structure, a second lead screw 12 is disposed on the second adjusting module 17, the second lead screw 12 passes through the second threaded hole 1202,
the second working section 63 is provided with a second opening groove 631 distributed circumferentially, a second inclined plane 632 is arranged on the second opening groove 631, a second mounting groove 144 distributed circumferentially begins to be formed on the second adjusting rod 14, a second mounting shaft 145 is arranged on the second mounting groove 144, a second lock rod 146 is movably mounted on the second mounting shaft 145, and the upper end of the second lock rod 146 is located in the second opening groove 631;
through the design, on one hand, the first adjusting rod 6 can complete the adjustment of the positions of the first spring 8 and the second spring 9 at one time, and on the other hand, the first bolt 15 can complete the axial movement of the second adjusting rod 14 by matching the first bolt 15 with the first nut 16, so that the power connection of the second adjusting rod 14 with the first adjusting module 13 and the second adjusting module 17 is realized.
In some disclosures, the third mounting hole 601 is an annular hole, a fourth mounting hole 60 is formed in the first adjusting rod 6, the third mounting hole 601 is located on the first working section 61, the fourth mounting hole 60 penetrates from the first working section 61 to the second working section 63, a third adjusting rod 600 is mounted in the fourth mounting hole 60, a second adjusting module 17 is arranged above the second mounting hole 201, the structure of the second adjusting module 17 is consistent with that of the first adjusting module 13, a second lead screw 12 is arranged on the second adjusting module 17, and the second lead screw 12 penetrates through a second threaded hole 1202;
the second working section 63 is provided with a second opening groove 631 distributed circumferentially, the second opening groove 631 is provided with a second inclined surface 632, the third adjusting rod 600 is provided with a second mounting groove 144 distributed circumferentially, the second mounting groove 144 is provided with a second mounting shaft 145, the second mounting shaft 145 is movably mounted with a second lock rod 146, the front end of the second lock rod 146 is located in the second opening groove 631, and by such design, the third adjusting rod 600 and the second adjusting rod 14 can be respectively pushed to complete transmission connection of the first adjusting module 13 and the second adjusting module, so that the positions of the first spring 8 and the second spring 9 can be adjusted by rotating the third adjusting rod 600 and the second adjusting rod 14.
In some disclosures, the first flange 4 is provided with a flange mounting hole 401 on a side surface, and by such a design, the probe can be quickly mounted and fixed through the flange mounting hole 401.
In some disclosures, a return spring 19 is disposed between the third adjusting rod 600 and the bottom surface of the fourth mounting hole 60, and by such a design, the third adjusting rod 600 can be quickly and automatically returned, and the adjustment precision of the spring position can be ensured.
In some disclosures, a return spring 18 is arranged between the second adjusting rod 14 and the bottom surface of the third mounting hole 601, and by means of the design, quick automatic return of the second adjusting rod 14 can be guaranteed, and adjustment accuracy of the spring position can be guaranteed.
In some disclosures, the gear ratio in the first adjusting module 13 and the second adjusting module 17 is matched with the elastic coefficients of the first spring 8 and the second spring 9, and by the design, the first spring 8 and the second spring 9 can be quickly adjusted without influencing the contact force of the probe and the test point.
Principle of operation
Through adopting two-stage sleeve structure, it is that the adjustment space of probe is bigger, conveniently satisfies the use under the different work condition to all set the slider that can move about with the touch multitouch of the upper end of two springs and make its conflict power size that can adjust probe position and test point according to the operating mode.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the disclosure. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing illustrates and describes the general principles, principal features, and advantages of the present disclosure. It will be understood by those skilled in the art that the present disclosure is not limited to the embodiments described above, which are presented solely for purposes of illustrating the principles of the disclosure, and that various changes and modifications may be made to the disclosure without departing from the spirit and scope of the disclosure, which is intended to be covered by the claims.
Claims (7)
1. A probe sleeve with a flange stop position for a semiconductor test probe comprises a first sleeve (1), a second sleeve (2), a first thimble (3) and a first flange (4), and is characterized in that the first flange (4) is mounted on the first sleeve (1), a first mounting hole (101) is formed in the first sleeve (1), the second sleeve (2) is movably mounted in the first mounting hole (101), a first stop step (102) is arranged on the first mounting hole (101), a first stop boss (204) is arranged on the second sleeve (2), the first stop boss (204) is positioned above the first stop step (102), a first sliding block (10) is movably mounted in the first mounting hole (101), a first spring (8) is arranged between the first sliding block (10) and the first stop boss (204), a first guide boss (1001) is arranged on the first sliding block (10), a first guide groove (103) is formed in the first mounting hole (101), a first guide boss (1001) is movably mounted in the first guide groove (103), and a first threaded hole (1002) is formed in the first sliding block (10);
a second mounting hole (201) is formed in the second sleeve (2), the first thimble (3) is movably mounted in the second mounting hole (201), a second stop step (202) is arranged in the second mounting hole (201), a second stop boss (301) is arranged on the first thimble (3), the second stop boss (301) is positioned above the second stop step (202), a second slider (11) is movably mounted in the second mounting hole (201), a second spring (9) is arranged between the second slider (11) and the second stop boss (301), a second guide boss (1101) is arranged on the second slider (11), a second guide groove (2011) is formed in the second mounting hole (201), the second guide boss (1101) is movably mounted in the second guide groove (2011), and a second threaded hole (1202) is formed in the second slider (11);
a first adjusting module (13) is arranged above the first mounting hole (101), the first adjusting module (13) comprises a first adjusting base (131), a first gear (132) and a first screw rod gear (136), a first gear mounting groove (1311) is formed in the first adjusting base (131), a first through hole (1314) is formed in the first gear mounting groove (1311), a plurality of first adjusting gear mounting grooves (1312) are uniformly formed in the side surface of the first gear mounting groove (1311), a first rotating shaft mounting hole (1313) is formed in the first adjusting gear mounting groove (1312), first rotating fixing grooves (1315) are formed in the upper end and the lower end of the first gear mounting groove (1311), the first gear (132) is movably mounted in the first gear mounting groove (1311), first mounting bosses (1321) are arranged at two ends of the first gear (132), and the first mounting bosses (1321) are movably mounted in the first rotating fixing grooves (1315), a first rotating shaft (134) is movably installed in the first rotating shaft installation hole (1313), a first adjusting gear (133) and a first speed change gear (135) are installed on the first rotating shaft (134), the first adjusting gear (133) is installed in the first adjusting gear installation groove (1312), the first speed change gear (135) is located on the outer end face of the first adjusting base (131), the first adjusting gear (133) is meshed with the first gear (132), a first lead screw gear (136) is movably installed on the outer end face, provided with the first speed change gear (135), of the first adjusting base (131), a first T-shaped annular table (1361) is arranged on the first lead screw gear (136), a first T-shaped annular groove (1316) is arranged on the first adjusting base (131), a T-shaped annular table (1361) is movably installed in the first T-shaped annular groove (1316), and the first speed change gear (135) is meshed with the first lead screw gear (136), a first screw rod (7) is arranged on the end face of the first screw rod gear (136), and the first screw rod (7) penetrates through the first threaded hole (1002);
a first adjusting rod (6) is arranged in the first sleeve (1) and the second sleeve (2), the first adjusting rod (6) is located in the first mounting hole (101), the first adjusting rod (6) is sequentially composed of a first working section (61), a transition section (62) and a second working section (63) from top to bottom, a second screw rod (12) is arranged on the second working section (63), and the second screw rod (12) penetrates through the second threaded hole (1202);
the first adjusting rod (6) is provided with a third mounting hole (601), a second adjusting rod (14) is movably mounted in the third mounting hole (601), a first open slot (611) which is circumferentially distributed is formed in the first working section (61), a first inclined plane (612) is arranged on the first open slot (611), a first mounting slot (141) which is circumferentially distributed starts to be formed in the second adjusting rod (14), a first mounting shaft (142) is arranged on the first mounting slot (141), a first locking rod (143) is movably mounted on the first mounting shaft (142), the upper end of the first locking rod (143) is located in the first open slot (611), first transmission holes (1322) are uniformly formed in the inner wall of the first gear (132), the position of the first open slot (611) corresponds to the position of the first gear (132), and when the first locking rod (143) moves forwards, the first locking rod (143) is rotated under the action of the first inclined plane (612), the end surface of the first lock rod (143) starts to abut against the inner wall of the first gear (132).
2. The probe sleeve with the flange stop for the semiconductor test probe according to claim 1, wherein a second adjusting module (17) is arranged above the second mounting hole (201), the structure of the second adjusting module (17) is consistent with that of the first adjusting module (13), a second lead screw (12) is arranged on the second adjusting module (17), and the second lead screw (12) passes through the second threaded hole (1202);
the second working section (63) is provided with second opening grooves (631) which are circumferentially distributed, the second opening grooves (631) are provided with second inclined planes (632), second mounting grooves (144) which are circumferentially distributed are formed in the second adjusting rod (14), the second mounting grooves (144) are provided with second mounting shafts (145), second locking rods (146) are movably mounted on the second mounting shafts (145), and the upper ends of the second locking rods (146) are located in the second opening grooves (631);
the adjustable clamp is characterized in that a first nut (16) is arranged on the first adjusting rod (6), a first bolt (15) is arranged on the second adjusting rod (14), the first bolt (15) penetrates through the first nut (16), and a return spring (18) is arranged between the second adjusting rod (14) and the bottom surface of the third mounting hole (601).
3. The probe sleeve with the flange stop for the semiconductor test probe as recited in claim 1, wherein the third mounting hole (601) is an annular hole, the first adjusting rod (6) is provided with a fourth mounting hole (60), the third mounting hole (601) is located on the first working section (61), the fourth mounting hole (60) penetrates from the first working section (61) to the second working section (63), the third adjusting rod (600) is mounted in the fourth mounting hole (60), the second adjusting module (17) is arranged above the second mounting hole (201), the second adjusting module (17) has a structure consistent with that of the first adjusting module (13), the second lead screw (12) is arranged on the second adjusting module (17), and the second lead screw (12) penetrates through the second threaded hole (1202);
the second working section (63) is provided with a second opening groove (631) which is circumferentially distributed, a second inclined surface (632) is arranged on the second opening groove (631), a second mounting groove (144) which is circumferentially distributed is formed in the third adjusting rod (600), a second mounting shaft (145) is arranged on the second mounting groove (144), a second locking rod (146) is movably mounted on the second mounting shaft (145), and the upper end of the second locking rod (146) is located in the second opening groove (631).
4. A probe sleeve with flange stop for semiconductor test probe according to claim 2 or 3, characterized in that the first flange (4) is provided with flange mounting holes (401) on its side.
5. The probe sleeve with flange stop for semiconductor test probe according to claim 3, wherein a return spring (19) is provided between the third adjusting rod (600) and the bottom surface of the fourth mounting hole (60).
6. The probe sleeve with the flange stop for the semiconductor test probe as claimed in claim 3, wherein a return spring (18) is provided between the second adjusting rod (14) and the bottom surface of the third mounting hole (601).
7. The probe sleeve with flange stop for semiconductor test probe according to claim 5, wherein the gear ratio in the first and second adjusting modules (13, 17) is the same as the spring constant of the first and second springs (8, 9).
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CN202110283944.4A CN113063974B (en) | 2021-03-17 | 2021-03-17 | Semiconductor test probe is with having probe sleeve that flange stopped position |
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CN202110283944.4A CN113063974B (en) | 2021-03-17 | 2021-03-17 | Semiconductor test probe is with having probe sleeve that flange stopped position |
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CN113063974B true CN113063974B (en) | 2021-10-08 |
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CN114200178A (en) * | 2021-11-11 | 2022-03-18 | 渭南高新区木王科技有限公司 | Overload load takes double linkage probe of excessive pressure buffering |
CN117310234B (en) * | 2023-11-30 | 2024-03-01 | 浙江金连接科技股份有限公司 | Palladium alloy probe sleeve for semiconductor chip test and manufacturing method thereof |
CN117607700A (en) * | 2023-12-05 | 2024-02-27 | 温州小为电气有限公司 | Safety performance testing device for lithium battery |
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TWI426275B (en) * | 2011-08-26 | 2014-02-11 | Pegatron Corp | Probe device |
CN203178322U (en) * | 2013-02-21 | 2013-09-04 | 政云科技有限公司 | Semiconductor test probe |
DE102014108041B4 (en) * | 2014-06-06 | 2016-06-02 | Wago Verwaltungsgesellschaft Mbh | probe |
CN105510650A (en) * | 2015-11-30 | 2016-04-20 | 广东长盈精密技术有限公司 | Probe and testing device comprising same |
CN109030886B (en) * | 2018-08-10 | 2024-04-12 | 浙江金连接科技股份有限公司 | Beryllium bronze bottom column head for precision test probe |
CN111796318B (en) * | 2020-07-01 | 2022-07-12 | 合肥兆科机电科技有限公司 | Two-dimensional adjustable remote control telescopic probe structure system |
CN112305395B (en) * | 2020-11-06 | 2021-05-28 | 法特迪精密科技(苏州)有限公司 | Probe structure and installation method, closed circuit method and anti-interference method thereof |
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