CN113050382A - Image quality compensation device and method and optical imaging system - Google Patents
Image quality compensation device and method and optical imaging system Download PDFInfo
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- CN113050382A CN113050382A CN201911382724.6A CN201911382724A CN113050382A CN 113050382 A CN113050382 A CN 113050382A CN 201911382724 A CN201911382724 A CN 201911382724A CN 113050382 A CN113050382 A CN 113050382A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
- G03F7/706—Aberration measurement
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Abstract
The invention provides an image quality compensation device, an image quality compensation method and an optical imaging system, wherein the image quality compensation device comprises an image quality detection mechanism, a processor, at least one compensation lens and at least one angle control mechanism, wherein the image quality detection mechanism is connected with the processor, and the compensation lens is connected with the angle control mechanism; the image quality detection mechanism is used for detecting image quality data of the optical imaging system and transmitting the image quality data to the processor; the processor is used for calculating the angle adjustment quantity of the compensation lens according to the acquired image quality data; the angle control mechanism is used for rotating the compensation lens by a corresponding angle according to the angle adjustment amount so as to change the surface type of the compensation lens and further realize the image quality compensation. The invention has simple structure and low assembly difficulty, can ensure that the compensation lens rotates by 360 degrees to perform image quality compensation, is easy to adjust, effectively improves the stability and reliability of the image quality compensation and ensures the imaging quality.
Description
Technical Field
The invention relates to the technical field of semiconductor integrated circuit manufacturing, in particular to an image quality compensation device and method and an optical imaging system.
Background
Currently, in the field of semiconductor packaging technology, semiconductor manufacturing and package integration technology is rapidly developed, and a lithographic projection objective lens for manufacturing an integrated circuit chip is generally required to have higher resolution and image side Numerical Aperture (NA) to meet the preparation of a high-integration chip. The demand for the index of the image quality of the projection optical system is also increasing, and the optical imaging system for projection exposure needs to have good image quality compensation capability so as to meet the image quality requirement of the exposure area during chip preparation. In addition, the lithography imaging technology is continuously improved, the characteristic size (CD) of the chip is continuously reduced, and the requirement for aberration generated in the optical system is more severe. Therefore, the improvement of the image quality of the optical imaging system is a key factor for preparing a chip with good comprehensive performance.
Among the aberrations of projection lithography objectives, the asymmetric aberration is one of the most difficult aberrations to compensate for. In the design and assembly process of the objective lens, asymmetric aberration can be generated due to factors such as material uniformity of the optical lens, face shape machining tolerance, lens tilt eccentricity during assembly, selection of a rectangular field of view and the like. The projection objective has large asymmetric aberration caused by thermal deformation and thermal distortion in an exposure state, and is difficult to compensate, thereby seriously affecting the image quality and the exposure yield of the photoetching projection objective.
In the prior art, during the exposure process of a photoetching projection objective, the following image quality compensation modes are mainly adopted:
(1) the compensation thermal effect of the movable lens is selected, but the compensation capability of the movable lens for the asymmetric aberration is poor, the compensation item is limited, and the capability of compensating all aberrations cannot be met.
(2) Different surface type compensation heat effects are generated by rotating the angle of the thermal compensation group and the angle of the flat plate combination, but the processing and detection difficulty of the special lens surface type of the thermal compensation group is high, and the cost is high.
(3) The thermal resistance mechanism is added at the edge of the lens, so that the high heat conductivity is realized at the high heat position, the low heat conductivity is realized at the low heat position, the symmetrical heat distribution is realized on the surface of the lens, the symmetrical thermal deformation and the thermal refraction change are realized, the symmetrical aberration distribution is caused, and the control difficulty is high due to the large control temperature difference.
(4) The lens is provided with a lead, and the surface shape of the lens is changed by heating a resistance wire to achieve the purpose of aberration compensation. In order to not influence the image quality, the diameter of the resistance wire needs to be less than 1 micron, however, how to integrate the lead into the lens does not influence the difficulty of incident light passing; and also with greater difficulty in the controller and driver.
(5) A thin film piezoelectric unit is arranged on the reflector, and the surface type of the lens is changed in a force application mode. However, the aberration is corrected by changing the surface shape of the thin film piezoelectric unit, and a large number of cooling devices, temperature control devices, and temperature detection devices are required, which results in a complicated structure of the entire apparatus.
(6) The lens is driven to deform by external force generated by the active deformation mechanism, the surface type of the lens is changed, and heat effect compensation is realized. However, this method is limited in terms of compensatability, and has a limited electrostatic/flexible driving range and poor stability, which severely limits the compensatability range of the overlay type.
For example, US patent publication No. US20080239503, which is a method of controlling deformation of the surface of an optical unit by applying stress to the surface of the optical unit in a manner of combining hydraulic pressure and a motor, so as to achieve the effect of correcting and compensating for image quality. But the hydraulic mode of the device is difficult to realize, has high requirement on the sealing property of the device, otherwise easily pollutes optical elements, has complex integral structure and large assembly difficulty, and is not easy to adjust.
Disclosure of Invention
The invention aims to provide an image quality compensation device, an image quality compensation method and an optical imaging system, which can solve one or more of the problems of complex device structure, high cost, small compensation range, poor stability and the like in the conventional image quality compensation mode.
In order to solve the above technical problems, the present invention provides an image quality compensation apparatus for performing image quality compensation and correction on an optical imaging system, comprising an image quality detection mechanism, a processor, at least one compensation lens, and at least one angle control mechanism, wherein the image quality detection mechanism is connected to the processor, and the compensation lens is connected to the angle control mechanism;
the image quality detection mechanism is used for detecting image quality data of the optical imaging system and transmitting the image quality data to the processor;
the processor is used for calculating the angle adjustment quantity of the compensation lens according to the acquired image quality data;
the angle control mechanism is used for rotating the compensation lens by a corresponding angle according to the angle adjustment amount so as to change the surface type of the compensation lens and further realize the image quality compensation.
Optionally, the compensation mirror is a mirror or a lens.
Optionally, the image quality compensation device includes at least two compensation lenses, and each compensation lens is connected to one of the angle control mechanisms.
Optionally, the angle control mechanism is provided with a fine adjustment mechanism and a coarse adjustment mechanism.
Optionally, the compensation device further includes at least one angle sensor, each angle sensor is connected to the processor, and the angle sensor is configured to measure a rotation angle of the compensation lens.
In order to solve the above technical problem, the present invention further provides an image quality compensation method, including:
step A, detecting the image quality of an optical imaging system to acquire image quality data;
b, according to the acquired image quality data, calculating to obtain a constant term of each zernike coefficient distributed along with the field of view in the full field of view;
step C, converting the constant term of each zernike coefficient in the obtained full field of view into the angle adjustment quantity of a compensation lens in the optical imaging system;
d, rotating the compensation lens by a corresponding angle according to the angle adjustment amount to change the surface type of the compensation lens; and
and E, repeating the steps A to D until the constant term of each zernike coefficient distributed along with the field of view under the full field of view approaches to 0.
Optionally, step a specifically includes: detecting the image quality of an optical imaging system to obtain numerical values of zernike coefficients 1 to 37 items corresponding to a plurality of points on an image surface;
the step B specifically comprises the following steps: and performing two-dimensional polynomial fitting according to the distribution value of the zernike coefficients, and calculating to obtain a constant term of each zernike coefficient distributed along with the field of view under the full field of view.
Optionally, step C includes:
dividing the constant term of each zernike coefficient by the test wavelength and obtaining the required adjustment quantity of each zernike term by negation;
multiplying each zernike term demand adjustment quantity by a zernike coefficient corresponding to the compensation lens under the relative view field, and multiplying the sum by the test wavelength to obtain the surface type adjustment quantity of the compensation lens under the relative view field; and
and obtaining the angle adjustment quantity of the compensation lens according to the corresponding relation between the rotation angle and the surface type adjustment quantity.
In order to solve the above technical problem, the present invention further provides an optical imaging system, which includes a first projection objective lens group, the image quality compensation device and a second projection objective lens group sequentially disposed along an optical path.
Optionally, the first projection objective lens group includes a plurality of first lenses, and the object light sequentially passes through each of the first lenses to irradiate on the compensation lens.
Optionally, the second projection objective group includes a plurality of second lenses, and the second lenses are reflected or transmitted by the compensation lenses to sequentially pass through the second lenses to reach an image space position.
Optionally, an aperture stop is disposed between the first projection objective lens group and the compensation lens.
Compared with the prior art, the image quality compensation device, the image quality compensation method and the optical imaging system provided by the invention have the following advantages:
(1) the image quality compensation device provided by the invention comprises an image quality detection mechanism, a processor, a compensation lens and an angle control mechanism, wherein the image quality detection mechanism is connected with the processor, the angle control mechanism is connected with the compensation lens, image quality data of an optical imaging system can be detected through the image quality detection mechanism and transmitted to the processor, the processor can calculate the angle adjustment quantity of the compensation lens according to the acquired image quality data, and the angle control mechanism can rotate the compensation lens by a corresponding angle according to the angle adjustment quantity so as to change the surface type of the compensation lens, thereby realizing image quality compensation. The image quality compensation device provided by the invention has the advantages of simple structure and low assembly difficulty, so that the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens can rotate 360 degrees through the angle control mechanism to perform image quality compensation, and is easy to adjust, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of a product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens, effectively realize the compensation of the asymmetric aberration, improve the precision of the image quality compensation and ensure the imaging quality.
(2) According to the image quality compensation method provided by the invention, the constant term of each zernike coefficient distributed along with the field of view in the full field of view is obtained by calculation according to the acquired image quality data of the optical imaging system, then the constant term of each zernike coefficient in the full field of view is converted into the angle adjustment quantity of the compensation lens, the compensation lens is rotated by a corresponding angle according to the angle adjustment quantity to change the surface type of the compensation lens, and the steps are repeated until the constant term of each zernike coefficient distributed along with the field of view in the full field of view tends to 0. Therefore, the image quality compensation method provided by the invention realizes image quality compensation by adjusting the angle of the compensation lens, and the compensation lens can rotate by 360 degrees and is easy to adjust, so that the surface type change of the compensation lens can be accurately controlled, the compensation precision of the image quality is effectively improved, and the adjustment range is wide.
(3) The optical imaging system provided by the invention comprises the image quality compensation device, so that the optical imaging system has all the advantages of the image quality compensation device, namely the optical imaging system provided by the invention has a simple structure and low assembly difficulty, and thus, the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens can rotate 360 degrees through the angle control mechanism to perform image quality compensation, and is easy to adjust, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of a product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens, effectively realize the compensation of the asymmetric aberration, improve the precision of image quality compensation, ensure the imaging quality and meet the exposure requirement of a client on the photoetching machine.
Drawings
FIG. 1 is a block diagram of an optical imaging system according to an embodiment of the present invention;
FIG. 2 is a block diagram of an optical imaging system in another embodiment of the present invention;
FIG. 3 is a schematic optical path diagram of an image quality compensation apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic optical path diagram of an image quality compensation apparatus according to another embodiment of the present invention;
FIG. 5 is a schematic structural diagram of an angle control mechanism according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of asymmetric higher order distortion before compensation;
FIG. 7 is a schematic illustration of a compensated asymmetric higher order distortion;
FIG. 8 is a three-dimensional schematic view of the Z5 face before compensation;
FIG. 9 is a three-dimensional schematic view of a compensated Z5 profile;
FIG. 10 is a three-dimensional schematic of the Z6 face before compensation;
FIG. 11 is a three-dimensional schematic of the compensated Z6 profile.
Wherein the reference numbers are as follows:
a first projection objective lens group-100; a first lens-110; image quality detection means-210; a processor-220; -a compensation lens-230; angle control mechanism-240; a base-241; a dial-242; a lens barrel-243; fine adjustment screw-244; a second projection objective lens group-300; a second lens-310; a third lens-410; a mirror-231; a first compensation lens-232; a second compensation lens-233; aperture stop-500.
Detailed Description
The image quality compensation device, method and optical imaging system according to the present invention will be described in further detail with reference to fig. 1 to 11 and the following detailed description. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are all used in a non-precise scale for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention. To make the objects, features and advantages of the present invention comprehensible, reference is made to the accompanying drawings. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the implementation conditions of the present invention, so that the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The core idea of the invention is to provide an image quality compensation device, method and optical imaging system, so as to solve one or more of the problems of complex device structure, high cost, small compensation range, poor stability and the like existing in the existing image quality compensation mode.
To achieve the above idea, the present invention provides an optical imaging system, please refer to fig. 1 and fig. 2, wherein fig. 1 schematically shows a block diagram of an optical imaging system according to an embodiment of the present invention, and fig. 2 schematically shows a block diagram of an optical imaging system according to another embodiment of the present invention. As shown in fig. 1 and 2, the optical imaging system includes a first projection objective lens group 100, an image quality compensation device, and a second projection objective lens group 300, which are sequentially disposed along an optical path.
Preferably, please refer to fig. 3 and fig. 4, wherein fig. 3 schematically illustrates an optical path schematic diagram of an image quality compensation apparatus according to an embodiment of the present invention, and fig. 4 schematically illustrates an optical path schematic diagram of an image quality compensation apparatus according to another embodiment of the present invention. As shown in fig. 3 and 4, the first projection objective lens group 100 includes a plurality of first lenses 110, and the object light sequentially passes through each of the first lenses 110 to irradiate on the compensation lens.
Preferably, as shown in fig. 3 and 4, the second projection objective lens group 300 includes a plurality of second lenses 310, and the second lenses 310 are sequentially reflected or transmitted by the compensation lens to reach an image position.
It should be noted that in some embodiments, the optical imaging system may further include other projection objective lens groups besides the first projection objective lens group 100 and the second projection objective lens group 300, which is not limited in this respect, and the other projection objective lens groups also include several lenses. In this embodiment, the optical imaging system is a lithographic projection objective.
The aberration compensation device comprises an image quality detection mechanism 210, a processor 220, at least one compensation lens 230 and at least one angle control mechanism 240, wherein the image quality detection mechanism 210 is connected with the processor 220, each compensation lens 230 is connected with one angle control mechanism 240, and the image quality detection mechanism 210 and the compensation lens 230 are sequentially arranged in the optical imaging system along an optical path. In other embodiments, two or more compensation lenses 230 may be connected to an angle control mechanism 240, that is, the rotation angles of the compensation lenses 230 may be controlled by the same angle control mechanism 240.
The image quality detection mechanism 210 is configured to detect image quality data of an optical imaging system and transmit the image quality data to the processor 220, the processor 220 is configured to calculate an angle adjustment amount of the compensation lens 230 according to the obtained image quality data, and the angle control mechanism 240 is configured to rotate the compensation lens 230 by a corresponding angle according to the angle adjustment amount, so as to change a surface type of the compensation lens 230, and further implement image quality compensation. The image quality detection mechanism 210 is preferably a wavefront sensor, the image quality detection mechanism 210 can detect the entire image quality of an optical imaging system, such as a lithographic projection objective, so as to obtain image quality data, and transmit the image quality data to the processor 220, the processor 220 calculates an angle adjustment amount of the compensation lens 230 according to the obtained image quality data, and the angle control mechanism 240 rotates the compensation lens 230 by a corresponding angle according to the angle adjustment amount, so as to change the surface type of the compensation lens 230, thereby realizing image quality compensation. It should be noted that the processor 220 may be an MCU, a PLC, or a single chip microcomputer, and since the MCU, the PLC, or the single chip microcomputer are all in the prior art, the detailed structure and the working principle of the processor 220 are not described in detail herein.
Preferably, an aperture stop 500 is disposed between the first projection objective lens group 100 and the compensation lens 230. Thus, by providing an aperture stop 500 between the first projection objective 100 and the compensation mirror 230, the compensation of the asymmetric aberrations can be better achieved by the compensation means.
Preferably, the angle control mechanism 240 rotates the compensation lens 230 by a corresponding angle through a screw rotation, a handle rotation or a screw rotation to change the surface shape of the compensation lens 230. Therefore, after the processor 220 calculates the angle adjustment amount of the compensation lens 230, the compensation lens 230 can be rotated by a corresponding angle through a screw rotation, a handle rotation or a screw rotation.
Preferably, the angle control mechanism 240 is provided with a fine adjustment mechanism and a coarse adjustment mechanism. Therefore, the compensation lens 230 can be adjusted by a large angle by the coarse adjustment mechanism, and the compensation lens 230 can be finely adjusted by a small angle by the fine adjustment mechanism, so that the rotation angle of the compensation lens 230 can be accurately controlled by the cooperation of the fine adjustment mechanism and the coarse adjustment mechanism, the surface shape change amount of the compensation lens 230 can be accurately controlled, and the image quality compensation can be better realized. More preferably, the fine adjustment mechanism may be a fine adjustment knob and the coarse adjustment mechanism may be a coarse adjustment knob, whereby such an arrangement may be more convenient to operate. Referring to fig. 5, which schematically shows a structural schematic view of an angle control mechanism 240 according to an embodiment of the present invention, as shown in fig. 5, the angle control mechanism 240 includes a base 241, a scale 242 fixed on the base 241, and a lens barrel 243 capable of rotating relative to the scale 242, and the compensation lens 230 is installed in the lens barrel 243. Therefore, by manually rotating the lens barrel 243, the compensation lens 230 can be driven to rotate, and the coarse adjustment of the rotation angle of the compensation lens 230 can be realized. The angle control mechanism 240 further includes a fine adjustment screw 244, and the lens barrel 243 can be driven to rotate by rotating the fine adjustment screw 244 by a small angle, so as to fine adjust the rotation angle of the compensation lens 230. By providing the angle control mechanism 240 with the dial 242, the angle can be displayed, which facilitates the operator to observe the rotation angle of the compensation lens 230.
Preferably, the compensation device further comprises at least one angle sensor (not shown), each of which is connected to the processor 220, and is used for measuring the rotation angle of the compensation lens 230. Therefore, the angle sensor can measure the rotation angle of the compensation lens 230 in real time to monitor the rotation angle of the compensation lens 230 in real time, so as to further accurately control the rotation angle of the compensation lens 230, and further accurately control the surface shape change amount of the compensation lens 230, thereby better achieving the purpose of image quality compensation.
Preferably, the compensation lens 230 may be a mirror or a lens.
As shown in fig. 1 and 3, in an embodiment, the image quality compensation device includes a compensation lens 230, and the compensation lens 230 is a mirror. As shown in fig. 3, the image quality compensation device includes a reflecting mirror 231, and the reflecting mirror 231 and the optical axis are disposed obliquely to each other. As shown in fig. 3, the light beam at the object side position (light beam passing through the object) passes through the first lens 110, then is projected onto the reflecting mirror 231 through the aperture stop 500, and the reflected light passes through the plurality of second lenses 310 in sequence and then reaches the image side position. Thus, aberrations caused by thermal deformation and hot edging of lenses in the lithographic projection objective in the exposure state and aberrations caused by adjustment errors of the lithographic projection objective (especially a previous lithography machine) can be compensated by adjusting the rotation angle of the mirror 231, i.e. changing the profile of the mirror 231.
Preferably, as shown in fig. 2, in another embodiment, the image quality compensation device includes at least two compensation lenses 230, and each of the compensation lenses 230 is a lens. As shown in fig. 4, the image quality compensation device includes a first compensation lens 232 and a second compensation lens 233, the first compensation lens 232 and the second compensation lens 233 are both disposed perpendicular to the optical axis, and a third lens 410 is disposed between the first compensation lens 232 and the second compensation lens 233. As shown in fig. 4, the light beam at the object side position (light beam passing through the object) passes through the first lens 110, then passes through the aperture stop 500, and is irradiated onto the first compensation lens 232, and the transmitted light passes through the third lens 410, the second compensation lens 233, and the plurality of second lenses 310 in this order and reaches the image side position. Thus, aberrations caused by thermal deformation and hot edging of lenses in the lithographic projection objective in the exposure state and aberrations caused by setup errors of the lithographic projection objective (in particular, a previous lithography machine) can be compensated by adjusting the rotation angle of the first compensation lens 232 and/or the second compensation lens 233, i.e., changing the surface shape of the first compensation lens 232 and/or the second compensation lens 233. It should be noted that the number of the compensation lenses and the positions of the compensation lenses in the optical path may be set according to specific situations, and the present invention is not limited to this. Thus, by providing a plurality of compensation lenses, compensation of a plurality of sets of aberrations can be achieved.
In conclusion, the image quality compensation device provided by the invention has the advantages of simple structure and low assembly difficulty, so that the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens 230360 degrees can be rotated by the angle control mechanism 240 to perform image quality compensation, and the adjustment is easy, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of the product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens 230, effectively realize the compensation of the asymmetric aberration, improve the precision of the image quality compensation and ensure the imaging quality.
The optical imaging system provided by the invention comprises the image quality compensation device, so that the optical imaging system has all the advantages of the image quality compensation device, namely the optical imaging system provided by the invention has a simple structure and low assembly difficulty, and thus, the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens 230 can rotate 360 degrees through the angle control mechanism 240 to perform image quality compensation, and the adjustment is easy, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of the product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens 230, effectively realize the compensation of the asymmetric aberration, improve the precision of the image quality compensation, ensure the imaging quality and meet the exposure requirement of a customer on the photoetching machine.
In order to realize the above idea, the present invention further provides an image quality compensation method, including the following steps:
and A, detecting the image quality of the optical imaging system to acquire image quality data.
In particular, the entire image quality of an optical imaging system (e.g. a lithographic projection objective) may be examined by a wavefront sensor to obtain image quality data.
Preferably, the step a specifically comprises: the image quality of the optical imaging system is detected to obtain the numerical values of the zernike coefficients 1 to 37 corresponding to a plurality of points on the image surface. It should be noted that, although the present embodiment represents the image quality data by using a zernike (zernike) polynomial of 37 terms, as can be understood by those skilled in the art, in other embodiments, the image quality data may also be represented by a zernike (zernike) polynomial of less than 37 terms or a zernike (zernike) polynomial of more than 37 terms, in the practical application process, a certain number of zernike (zernike) polynomials may be selected as required to represent the image quality data, and the number of terms of the zernike (zernike) polynomial is not limited by the present invention.
Since the image quality data of the optical imaging system can be expressed by zernike (zernike) polynomials, the process of image quality detection measures the values of zernike coefficients 1 to 37 corresponding to multiple points on the image surface, wherein the corresponding relationship between the zernike coefficients and the relative field of view is as follows:
z1＝1；
z2＝x；
z3＝y；
z4＝-1+2(x2+y2)；
z5＝x2-y2；
z6＝2xy；
z7＝-2x+3x(x2+y2)；
z8＝-2y+3y(x2+y2)；
z9＝1-6(x2+y2)+6(x2+y2)2；
z10＝x3-3xy2；
z11＝3x2y-y3；
z12＝-3x2+3y2+4x2(x2+y2)-4y2(x2+y2)；
z13＝-6xy+8xy(x2+y2)；
z14＝3x-12x(x2+y2)+10x(x2+y2)2；
z15＝3y-12y(x2+y2)+10y(x2+y2)2；
z16＝-1+12(x2+y2)-30(x2+y2)2+20(x2+y2)3；
z17＝x4-6x2y2+y4；
z18＝4x3y-4xy3；
z19＝-4x3+12xy2+5x3(x2+y2)2-15xy2(x2+y2)；
z20＝-12x2y+4y3+15x2y(x2+y2)-5y3(x2+y2)；
z21＝6x2-6y2-20x2(x2+y2)+20y2(x2+y2)+15x2(x2+y2)2-15y2(x2+y2)2；
z22＝12xy-40xy(x2+y2)+30xy(x2+y2)2；
z23＝-4x+30x(x2+y2)-60x(x2+y2)2+35x(x2+y2)3；
z24＝-4y+30y(x2+y2)-60y(x2+y2)2+35y(x2+y2)3；
z25＝1-20(x2+y2)+90(x2+y2)2-140(x2+y2)3+70(x2+y2)4；
z26＝x5-10x3y2+5xy4；
z27＝5x4y-10x2y3+y5；
z28＝-5x4+30x2y2-5y4+6x4(x2+y2)-36x2y2(x2+y2)2+6y4(x2+y2)；
z29＝-20x3y+20xy3+24x3y(x2+y2)-24xy3(x2+y2)；
z30＝10x3-30xy2-30x3(x2+y2)+90xy2(x2+y2)+21x3(x2+y2)2-63xy2(x2+y2)2；
z31＝30x2y-10y3-90x2y(x2+y2)+30y3(x2+y2)+63x2y(x2+y2)2-21y3(x2+y2)2；
z32＝-10x2+10y2+60x2(x2+y2)-60y2(x2+y2)-105x2(x2+y2)2+105y2(x2+y2)2+5
6x2(x2+y2)3-56y2(x2+y2)3；
z33＝-20xy+120xy(x2+y2)-210xy(x2+y2)2+112xy(x2+y2)3；
z34＝5x-60x(x2+y2)+210x(x2+y2)2-280x(x2+y2)3+126x(x2+y2)4；
z35＝5y-60y(x2+y2)+210y(x2+y2)2-280y(x2+y2)3+126y(x2+y2)4；
z36＝-1+30(x2+y2)-210(x2+y2)2+560(x2+y2)3-630(x2+y2)4+252(x2+y2)5；
z37＝x6-15x4y2+15x2y4-y6。
wherein x and y represent the position coordinates of the compensation lens 230 in terms of the relative field-of-view coordinates.
And B, calculating to obtain a constant term of each zernike coefficient distributed along with the field of view in the full field of view according to the acquired image quality data.
Preferably, the step B specifically comprises: and performing two-dimensional polynomial fitting according to the distribution value of the zernike coefficients, and calculating to obtain a constant term of each zernike coefficient distributed along with the field of view under the full field of view.
Specifically, constant terms of z5, z6 and z12 in the zernike coefficients mainly represent asymmetric aberrations, and constant terms of z7, z8, z9, z16 and z25 mainly represent aberrations caused by processing and debugging.
And step C, converting the obtained constant term of each zernike coefficient under the full field of view into the angle adjustment amount of the compensation lens 230 in the optical imaging system.
Preferably, the step C includes:
dividing the constant term of each zernike coefficient by the test wavelength and obtaining the required adjustment quantity of each zernike term by negation;
multiplying each zernike term requirement adjustment quantity by a zernike coefficient corresponding to the compensation lens 230 under the relative field of view, and multiplying the result by the test wavelength to obtain a surface type adjustment quantity of the compensation lens 230 under the relative field of view; and
the angle adjustment amount of the compensation lens 230 is obtained according to the corresponding relationship between the rotation angle and the surface type adjustment amount. The term "rotation angle" as used herein refers to an angle at which the compensation lens rotates in a plane perpendicular to the geometric central axis of the compensation lens with the geometric central axis of the compensation lens itself as the center of rotation.
For a specific compensation lens, the corresponding relationship between the rotation angle and the face shape adjustment amount can be obtained through simulation calculation, so that the angle adjustment amount of the compensation lens can be obtained according to the obtained corresponding relationship between the rotation angle and the face shape adjustment amount.
Specifically, in the present embodiment, the test wavelength may be 365 nm. It should be noted that in other embodiments, the test wavelength may also be other values, and the invention is not limited thereto. Therefore, the constant term of each zernike coefficient is divided by 365nm, the obtained numerical value is inverted to obtain the required adjustment quantity of each zernike term, each required adjustment quantity of the zernike terms is multiplied by the zernike coefficient corresponding to the compensation lens 230 under the relative field of view, the surface shape adjustment quantity of the compensation lens 230 under the relative field of view can be obtained by multiplying the obtained product by the test wavelength after summation, and finally the angle adjustment quantity of the compensation lens 230 can be obtained according to the corresponding relation between the rotation angle and the surface shape adjustment quantity.
And D, rotating the compensation lens 230 by a corresponding angle according to the angle adjustment amount to change the surface type of the compensation lens 230.
Therefore, according to the angle adjustment amount, the compensation lens 230 is driven to rotate by a corresponding angle by using an angle control mechanism 240, so that the surface type of the compensation lens 230 is changed.
Taking a certain compensation lens as an example, the corresponding relationship between the rotation angle and the compensated aberration is shown in the following table 1:
TABLE 1 correspondence between rotation angle and aberration
| Angle of rotation (°) | Z5-00(nm) | Z6-00(nm) |
| 40 | -3.94 | -0.84 |
| 80 | -3.81 | -4.87 |
| 120 | 0.19 | -5.43 |
| 160 | 1.43 | -1.59 |
| 200 | -2.12 | 0.3 |
| 240 | -4.61 | -2.88 |
| 280 | -1.91 | -5.87 |
| 320 | 1.51 | -3.74 |
As shown in Table 1, when the compensation lens rotates 40 °, the compensated z5 constant term is-3.94 nm, and the compensated z6 constant term is-0.84 nm; when the compensation lens rotates by 80 degrees, the compensated z5 constant term is-3.81 nm, and the compensated z6 constant term is-4.87 nm; when the compensation lens rotates by 120 degrees, the compensated z5 constant term is 0.19nm, and the compensated z6 constant term is-5.43 nm; when the compensation lens rotates by 160 degrees, the compensated z5 constant term is 1.43nm, and the compensated z6 constant term is-1.59 nm; when the compensation lens rotates by 160 degrees, the compensated z5 constant term is 1.43nm, and the compensated z6 constant term is-1.59 nm; when the compensation lens rotates by 200 degrees, the compensated z5 constant term is-2.12 nm, and the compensated z6 constant term is 0.3 nm; when the compensation lens rotates 240 degrees, the compensated z5 constant term is-4.61 nm, and the compensated z6 constant term is-2.88 nm; when the compensation lens rotates 240 degrees, the compensated z5 constant term is-4.61 nm, and the compensated z6 constant term is-2.88 nm; when the compensation lens rotates by 280 degrees, the compensated z5 constant term is-1.91 nm, and the compensated z6 constant term is-5.87 nm; when the compensation lens rotates 320 degrees, the compensated z5 constant term is-1.51 nm, and the compensated z6 constant term is-3.74 nm. As can be seen from table 1, the compensation effect on the aberration of the z5 term is better when the compensation lens is rotated by 120 °, and the compensation effect on the aberration of the z6 term is better when the compensation lens is rotated by 200 °.
Preferably, in the process of driving the compensation lens 230 to rotate by using the angle control mechanism 240, an angle sensor may be used to collect the rotation angle of the compensation lens 230, so that the rotation angle of the compensation lens 230 can be precisely controlled, and further the change of the surface type of the compensation lens 230 can be precisely controlled.
And E, repeating the steps A to D until the constant term of each zernike coefficient distributed along with the field of view under the full field of view approaches to 0.
Therefore, the image quality compensation method provided by the invention can realize the compensation of the image quality by adjusting the angle of the compensation lens 230, and the compensation lens 230 can rotate for 360 degrees and is easy to adjust, so that the change of the surface shape of the compensation lens 230 can be accurately controlled, the compensation precision of the image quality is effectively improved, and the compensation range can be expanded into constant terms of all aberrations by the image quality compensation method provided by the invention, and the adjustment range is wide and the compensation range is large.
Taking an example of the compensation of the higher-order distortion, the distortion before the compensation is 102.25nm, and the distortion after the compensation is 51.15nm by rotating the mirror 231 clockwise by 120 °. Referring to fig. 6 and fig. 7, fig. 6 schematically shows an asymmetric high-order distortion before compensation by using the image quality compensation method provided by the present invention, and fig. 7 schematically shows an asymmetric high-order distortion after compensation by using the image quality compensation method provided by the present invention. As can be seen from fig. 6 and 7, the asymmetric high-order distortion can be effectively reduced by compensating the image quality by using the image quality compensation method provided by the present invention.
Further, taking the compensated asymmetric aberrations z5 and z6 as an example, the constant term of z5 before compensation is-8.2 nm, and the constant term of z6 is 8.6nm, the first compensation lens 230 in the optical path schematic diagram of the image quality compensation device shown in fig. 4 is rotated clockwise by 240 °, the second compensation lens 230 is rotated clockwise by 45 °, the constant term of z5 after compensation is-0.41 nm, and the constant term of z6 is-0.66 nm. Referring to fig. 8 to 11, fig. 8 is a three-dimensional schematic diagram of a Z5 surface shape before compensation by the image quality compensation method of the present invention; FIG. 9 is a schematic three-dimensional diagram of the Z5 surface shape compensated by the image quality compensation method provided by the present invention; FIG. 10 is a schematic three-dimensional diagram of the Z6 surface shape before compensation by the image quality compensation method provided by the present invention; fig. 11 schematically shows a three-dimensional schematic diagram of a Z6 surface shape compensated by the image quality compensation method provided by the invention. As can be seen from fig. 8 to 11, by using the image quality compensation method provided by the present invention, the aberrations of the z5 term and the z6 term can be effectively compensated.
In summary, compared with the prior art, the image quality compensation device, method and optical imaging system provided by the invention have the following advantages:
(1) the image quality compensation device provided by the invention comprises an image quality detection mechanism, a processor, a compensation lens and an angle control mechanism, wherein the image quality detection mechanism is connected with the processor, the angle control mechanism is connected with the compensation lens, image quality data of an optical imaging system can be detected through the image quality detection mechanism and transmitted to the processor, the processor can calculate the angle adjustment quantity of the compensation lens according to the acquired image quality data, and the angle control mechanism can rotate the compensation lens by a corresponding angle according to the angle adjustment quantity so as to change the surface type of the compensation lens, thereby realizing image quality compensation. The image quality compensation device provided by the invention has the advantages of simple structure and low assembly difficulty, so that the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens can rotate 360 degrees through the angle control mechanism to perform image quality compensation, and is easy to adjust, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of a product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens, effectively realize the compensation of the asymmetric aberration, improve the precision of the image quality compensation and ensure the imaging quality.
(2) According to the image quality compensation method provided by the invention, the constant term of each zernike coefficient distributed along with the field of view in the full field of view is obtained by calculation according to the acquired image quality data of the optical imaging system, then the constant term of each zernike frequency in the full field of view is converted into the angle adjustment quantity of the compensation lens, the compensation lens is rotated by a corresponding angle according to the angle adjustment quantity to change the surface type of the compensation lens, and the steps are repeated until the constant term of each zernike coefficient distributed along with the field of view in the full field of view tends to 0. Therefore, the image quality compensation method provided by the invention realizes image quality compensation by adjusting the angle of the compensation lens, and the compensation lens can rotate by 360 degrees and is easy to adjust, so that the surface type change of the compensation lens can be accurately controlled, the compensation precision of the image quality is effectively improved, and the adjustment range is wide.
(3) The optical imaging system provided by the invention comprises the image quality compensation device, so that the optical imaging system has all the advantages of the image quality compensation device, namely the optical imaging system provided by the invention has a simple structure and low assembly difficulty, and thus, the installation efficiency can be effectively improved, the production cost can be reduced, the economic applicability of products can be improved, and the production efficiency can be improved. In addition, the compensation lens can rotate 360 degrees through the angle control mechanism to perform image quality compensation, and is easy to adjust, so that the stability and reliability of the image quality compensation can be effectively improved, and the competitiveness of a product is improved. Meanwhile, the invention can also accurately control the surface type change of the compensation lens, effectively realize the compensation of the asymmetric aberration, improve the precision of image quality compensation, ensure the imaging quality and meet the exposure requirement of a client on the photoetching machine.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims. It will be apparent to those skilled in the art that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (12)
1. An image quality compensation device is used for compensating and correcting the image quality of an optical imaging system and is characterized by comprising an image quality detection mechanism, a processor, at least one compensation lens and at least one angle control mechanism, wherein the image quality detection mechanism is connected with the processor, and the compensation lens is connected with the angle control mechanism;
the image quality detection mechanism is used for detecting image quality data of the optical imaging system and transmitting the image quality data to the processor;
the processor is used for calculating the angle adjustment quantity of the compensation lens according to the acquired image quality data;
the angle control mechanism is used for rotating the compensation lens by a corresponding angle according to the angle adjustment amount so as to change the surface type of the compensation lens and further realize the image quality compensation.
2. The image quality compensation device of claim 1, wherein the compensation optics are mirrors or lenses.
3. The image quality compensation device of claim 2, wherein the image quality compensation device comprises at least two compensation lenses, each compensation lens being connected to one of the angle control mechanisms.
4. The image quality compensation apparatus according to any one of claims 1 to 3, wherein the angle control mechanism is provided with a fine adjustment mechanism and a coarse adjustment mechanism.
5. The image quality compensation device of any one of claims 1 to 3, further comprising at least one angle sensor, each of said angle sensors being connected to said processor, said angle sensor being configured to measure the rotation angle of said compensation lens.
6. An image quality compensation method, comprising:
step A, detecting the image quality of an optical imaging system to acquire image quality data;
b, according to the acquired image quality data, calculating to obtain a constant term of each zernike coefficient distributed along with the field of view in the full field of view;
step C, converting the constant term of each zernike coefficient in the obtained full field of view into the angle adjustment quantity of a compensation lens in the optical imaging system;
d, rotating the compensation lens by a corresponding angle according to the angle adjustment amount to change the surface type of the compensation lens; and
and E, repeating the steps A to D until the constant term of each zernike coefficient distributed along with the field of view under the full field of view approaches to 0.
7. The image quality compensation method according to claim 6, wherein the step A specifically comprises: detecting the image quality of an optical imaging system to obtain numerical values of zernike coefficients 1 to 37 items corresponding to a plurality of points on an image surface;
the step B specifically comprises the following steps: and performing two-dimensional polynomial fitting according to the distribution value of the zernike coefficients, and calculating to obtain a constant term of each zernike coefficient distributed along with the field of view under the full field of view.
8. The image quality compensation method according to claim 6, wherein the step C comprises:
dividing the constant term of each zernike coefficient by the test wavelength and obtaining the required adjustment quantity of each zernike term by negation;
multiplying each zernike term demand adjustment quantity by a zernike coefficient corresponding to the compensation lens under the relative view field, and multiplying the sum by the test wavelength to obtain the surface type adjustment quantity of the compensation lens under the relative view field; and
and obtaining the angle adjustment quantity of the compensation lens according to the corresponding relation between the rotation angle and the surface type adjustment quantity.
9. An optical imaging system comprising a first projection objective lens group, an image quality compensation device according to any one of claims 1 to 5 and a second projection objective lens group arranged in sequence along an optical path.
10. The optical imaging system of claim 9, wherein the first projection objective lens group comprises a plurality of first lenses, and the object light sequentially passes through each first lens to irradiate the compensation lens.
11. The optical imaging system of claim 9, wherein the second projection objective group comprises a plurality of second lenses, and the second lenses are sequentially reflected or transmitted by the compensation lens to reach an image position.
12. The optical imaging system of claim 9, wherein an aperture stop is disposed between the first projection objective lens group and the compensation lens.
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| CN109426095A (en) * | 2017-08-31 | 2019-03-05 | 上海微电子装备（集团）股份有限公司 | A kind of image quality compensation device and method |
| CN109856923A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | A kind of image quality compensation device and method and a kind of optical system |
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| US20060118703A1 (en) * | 2004-09-21 | 2006-06-08 | Carl Zeiss Smt Ag | Method and apparatus for setting optical imaging properties by means of radiation treatment |
| CN109426095A (en) * | 2017-08-31 | 2019-03-05 | 上海微电子装备（集团）股份有限公司 | A kind of image quality compensation device and method |
| CN109856923A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | A kind of image quality compensation device and method and a kind of optical system |
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