CN113048913B - Optical axis parallelism adjusting method between digital projection systems - Google Patents
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- CN113048913B CN113048913B CN202110271716.5A CN202110271716A CN113048913B CN 113048913 B CN113048913 B CN 113048913B CN 202110271716 A CN202110271716 A CN 202110271716A CN 113048913 B CN113048913 B CN 113048913B
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- 238000005259 measurement Methods 0.000 abstract description 6
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a method for adjusting the parallelism of optical axes among digital projection systems, which has the core thought that the optical axes of the digital projection systems are respectively adjusted to be parallel to the moving axis of a precision displacement table, so as to indirectly realize the adjustment of the parallelism of the optical axes; the specific measure is that by means of devices such as a precise displacement table and a two-dimensional graduated scale, the parallelism of an optical axis and a moving axis of the precise displacement table is adjusted by combining the divergence and linear propagation characteristics of projection light of a digital projection system. The method is beneficial to improving the adjustment precision of the optical axis parallelism among digital projection systems, and lays a foundation for smooth implementation of some optical measurements.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a method for adjusting optical axis parallelism between digital projection systems.
Background
With the increasing demands of the fields of industry, agriculture and the like on the three-dimensional size and the three-dimensional characteristics of the production objects, the practical application of the fringe projection profilometry is increasingly wide. One of the core components of the fringe projection profile measuring system is a digital projection system. In some optical measurements and daily demonstrations, multiple sets of digital projection systems are required, and the projection axes between them are required to be parallel.
Currently, the adjustment of the optical axis parallelism of a digital projection system is mainly realized by visual inspection or auxiliary positioning devices, a more precise adjustment method is lacked, and a higher parallelism level is difficult to achieve.
Disclosure of Invention
In order to overcome the defects of the existing optical axis parallelism adjusting means of the digital projection system and realize the accurate adjustment of the optical axis parallelism among the digital projection systems, the invention provides an optical axis parallelism adjusting method among the digital projection systems, which can be accurately quantized.
In order to achieve the above object, the method for adjusting the parallelism of the optical axes between digital projection systems according to the present invention comprises the following steps:
step 1: placing a two-dimensional graduated scale with transverse and longitudinal size resolution capability on a stage of a precision displacement table;
step 2: the digital projection system is placed at a reasonable position relative to the precise displacement table, and the position of the digital projection system is adjusted to enable the included angle between the optical axis of the digital projection system and the moving axis of the precise displacement table to be within 45 degrees;
step 3: the method comprises the steps of encoding a characteristic pattern capable of identifying an optical center of a digital projection system, and projecting the characteristic pattern onto a two-dimensional graduated scale by the digital projection system;
step 4: moving an objective table of the precision displacement table by a set distance, and recording the distance between a digital projection system and a two-dimensional graduated scale before and after movement and the reading of a characteristic pattern on the two-dimensional graduated scale at the projection center of the two-dimensional graduated scale;
step 5: calculating the adjustment quantity required by the digital projection system according to the reading measured in the step 4, thereby realizing the pose adjustment of the digital projection system;
step 6: and (5) repeating the steps 2-5 to finish the adjustment of the parallelism of the optical axis of the residual digital projection system.
In step 1, the normal direction of the measuring surface of the two-dimensional graduated scale is parallel to the moving axis of the precision displacement table, and the X-axis direction of the measuring surface of the two-dimensional graduated scale is parallel to the carrying surface of the objective table.
Further, in step 2, the reasonable position means that the moving range of the stage of the precision displacement stage is located in the effective field of view of the digital projection system.
Further, in step 3, the feature pattern is a cross scribe line.
Further, in step 4, the reading of the feature pattern on the two-dimensional scale includes the center coordinates (x Near-to-near ,y Near-to-near ) And (x) Far distance ,y Far distance ) Wherein x is Near-to-near For the central abscissa, y, of the characteristic pattern before stage movement Near-to-near Is the central ordinate, x of the characteristic pattern before the stage moves Far distance Is the central abscissa, y of the characteristic pattern after the stage moves Far distance Is the ordinate of the center of the characteristic pattern after the stage moves.
Further, in step 4, the distances between the digital projection system and the two-dimensional scale before and after the stage of the precision displacement stage moves are respectivelyIs l Near-to-near 、l Far distance The pose adjustment amount in the step 5 is calculated by the following formula:
wherein: Δx represents the distance by which the center point of the feature pattern of the digital projection system is adjusted in the X-axis direction of the two-dimensional scale, and Δy represents the distance by which the center point of the feature pattern of the digital projection system is adjusted in the Y-axis direction of the two-dimensional scale.
Compared with the prior art, the invention has at least the following beneficial technical effects:
the invention can obviously improve the adjustment precision of the optical axis parallelism; the visual of the optical axis of the digital projection system is realized through designing the characteristic pattern, the optical axis adjustment reference is obtained through introducing the moving axis of the precise displacement table, the accurate measurement of the optical axis space transverse coordinate is realized through the two-dimensional graduated scale, the accurate calculation of the optical axis adjustment quantity is realized through observing the position change of the optical axis on the two-dimensional graduated scale before and after the displacement table moves, and finally the adjustment precision of the optical axis parallelism among the digital projection systems is improved.
In step 1, the normal direction of the measuring surface of the two-dimensional graduated scale is parallel to the moving axis of the precision displacement table, and the X-axis direction is parallel to the objective table, so that the optical axis adjustment efficiency of the digital projection system is improved.
Furthermore, the characteristic pattern is a cross reticle, and compared with other patterns, the cross reticle has better identification, is convenient for reading, and improves the adjustment speed.
Drawings
FIG. 1 is a two-dimensional scale of an embodiment;
FIG. 2 is a schematic diagram of a parallelism adjustment system of a digital projection system according to an embodiment;
FIG. 3 is a schematic cross-score line;
FIG. 4 is a schematic diagram showing the position of a feature pattern on a two-dimensional scale before the movement of a precision displacement stage according to an embodiment;
FIG. 5 is a schematic diagram showing the position of the feature pattern on the two-dimensional scale after the movement of the precision displacement stage according to the embodiment.
In the accompanying drawings: 1. the device comprises a two-dimensional graduated scale, a precise displacement table, a stage, an original point of the two-dimensional graduated scale, a cross dividing line, a digital projection system and a digital projection system, wherein the two-dimensional graduated scale comprises the following components of the two-dimensional graduated scale, the precise displacement table, the stage, the origin of the two-dimensional graduated scale, the cross dividing line and the digital projection system.
Detailed Description
In order to make the purpose and technical scheme of the invention clearer and easier to understand. The present invention will now be described in further detail with reference to the drawings and examples, which are given for the purpose of illustration only and are not intended to limit the invention thereto.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
A method for adjusting optical axis parallelism between digital projection systems includes the following steps:
step 1: a two-dimensional scale 1 having a resolution of the transverse and longitudinal dimensions is manufactured, as shown in fig. 1, and the origin of coordinates 4 of the two-dimensional scale 1 is located at the midpoint of the surface to be measured of the two-dimensional scale 1, and is placed on a stage 3 of a precision displacement stage 2, as shown in fig. 2. The manufactured two-dimensional graduated scale 1 only needs to be capable of moving synchronously with the objective table, but the normal direction of the measuring surface of the two-dimensional graduated scale is parallel to the moving axis of the precision displacement table as much as possible, and the X-axis direction of the two-dimensional graduated scale is parallel to the object carrying surface of the objective table 3 as much as possible, so that the optical axis adjustment efficiency of the digital projection system is improved.
Step 2: the digital projection system 6 is placed in a reasonable position relative to the precision displacement stage 2 and its position is adjusted so that its optical axis remains substantially parallel to the axis of movement of the precision displacement stage 2. Because it is impossible to be perfectly parallel in practice, the angle between the optical axis of the digital projection system and the displacement table movement axis must be made smaller than 45 ° by visual inspection and manual adjustment, the smaller the angle is, the better. Reasonable position means: the range of motion of the stage 3 of the precision displacement stage 2 is positioned within the effective field of view of the digital projection system.
Step 3: the coding can mark the characteristic pattern of the optical center of the digital projection system, and the characteristic pattern is projected onto the two-dimensional graduated scale by the digital projection system; the specific form of the feature pattern is not strictly limited, but the cross reticle has better recognition than other patterns, in this embodiment, the feature pattern is a cross reticle 5, and as shown in fig. 3, the geometric center of the cross reticle should coincide with the optical center of the digital projection system, and the cross reticle includes a transverse line and a vertical line that intersect perpendicularly.
Step 4: the distance required for the movement of the stage 3 is controlled and the distance of the digital projection system 6 from the two-dimensional scale 1 before and after the movement of the stage 3 and the reading of the centre of the projected feature pattern on the two-dimensional scale 1 are recorded. The distance between the digital projection system and the two-dimensional graduated scale before and after the precise displacement table moves can be respectively set as l Near-to-near 、l Far distance The method comprises the steps of carrying out a first treatment on the surface of the The reading of the characteristic pattern on the two-dimensional scale 1 includes an X-axis coordinate and a Y-axis coordinate, and the center coordinates of the characteristic pattern before and after the displacement stage is moved can be set as (X) Near-to-near ,y Near-to-near )、(x Far distance ,y Far distance ) As shown in fig. 4 and 5.
Step 5: and (4) calculating the adjustment quantity required by the digital projection system 6 according to the reading measured in the step (4) so as to realize the pose adjustment of the digital projection system 6. The specific adjustment amount is as follows:
in the formula, deltax and Deltay respectively represent the distances for adjusting the central point of the characteristic pattern of the digital projection system in the X-axis and Y-axis directions of the two-dimensional graduated scale.
Step 6: and (5) repeating the steps 2-5 to finish the adjustment of the parallelism of the optical axis of the residual digital projection system.
The invention has the core thought that the optical axes of different digital projection systems are respectively adjusted to be parallel to the moving axis of the precision displacement table, so that the adjustment of the parallelism of the optical axes is indirectly realized; the specific measure is that by means of devices such as a precise displacement table and a two-dimensional graduated scale, the parallelism of an optical axis and a moving axis of the precise displacement table is adjusted by combining the linear propagation and inverse pinhole imaging characteristics of light projected by a digital projection system. The method is beneficial to improving the adjustment precision of the optical axis parallelism among digital projection systems, and lays a foundation for smooth implementation of some optical measurements.
The invention can realize the rapid and high-precision adjustment of the optical axis parallelism between digital projection systems and meet the device adjustment requirements of some optical measurement systems.
The above is only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited by this, and any modification made on the basis of the technical scheme according to the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (3)
1. The method for adjusting the parallelism of the optical axes between the digital projection systems is characterized by comprising the following steps:
step 1: a stage (3) for placing a two-dimensional scale (1) having a lateral and longitudinal dimension resolving power on a precision displacement stage (2);
step 2: the digital projection system is placed at a reasonable position relative to the precision displacement table (2), and the position of the digital projection system is adjusted to enable the included angle between the optical axis of the digital projection system and the moving axis of the precision displacement table (2) to be within 45 degrees;
step 3: encoding a characteristic pattern capable of identifying the optical center of the digital projection system, and projecting the characteristic pattern onto a two-dimensional graduated scale (1) by the digital projection system;
step 4: moving the objective table (3) of the precision displacement table (2) by a set distance, and recording the distance between the digital projection system before and after the movement and the two-dimensional graduated scale (1) and the reading of the characteristic pattern on the two-dimensional graduated scale (1) at the projection center of the two-dimensional graduated scale (1);
step 5: calculating the adjustment quantity required by the digital projection system (6) according to the reading measured in the step 4, thereby realizing the pose adjustment of the digital projection system;
step 6: repeating the steps 2-5 to finish the adjustment of the parallelism of the optical axis of the residual digital projection system;
in the step 2, the reasonable position means that the moving range of the objective table (3) of the precise displacement table (2) is positioned in the effective view field of the digital projection system;
in the step 4, the distances between the digital projection system and the two-dimensional graduated scale before and after the stage (3) of the precision displacement platform moves are respectively、/>The pose adjustment amount in the step 5 is calculated by the following formula:
，
wherein:representing a map of digital projection system characteristicsRuler with center point in two dimensionsXThe distance to be adjusted in the axial direction,indicating that the central point of the characteristic pattern of the digital projection system is arranged on a two-dimensional graduated scaleYDistance adjusted in axial direction, +.>Distance between digital projection system and two-dimensional graduated scale after moving precision displacement table>Distance between the digital projection system and the two-dimensional graduated scale before moving the precision displacement table>For the central abscissa of the characteristic pattern before the stage (3) is moved, +.>For the central ordinate of the characteristic pattern before the stage moves, < > and>is the central abscissa of the characteristic pattern after the stage moves, < > and the like>Is the ordinate of the center of the characteristic pattern after the stage moves.
2. The method for adjusting the parallelism of optical axes between digital projection systems according to claim 1, wherein in said step 1, the normal direction of the measuring surface of the two-dimensional scale (1) is parallel to the moving axis of the precision displacement table (2), and the measuring surface of the two-dimensional scale (1)XThe axial direction is parallel to the bearing surface of the objective table (3).
3. The method according to claim 1, wherein in the step 3, the feature pattern is a cross scribe line (5).
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