CN113031393A - Nano-imprinting equipment suitable for irregular mold and imprinting method thereof - Google Patents
Nano-imprinting equipment suitable for irregular mold and imprinting method thereof Download PDFInfo
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- CN113031393A CN113031393A CN202110319438.6A CN202110319438A CN113031393A CN 113031393 A CN113031393 A CN 113031393A CN 202110319438 A CN202110319438 A CN 202110319438A CN 113031393 A CN113031393 A CN 113031393A
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- bearing plate
- pet
- imprinting
- heating
- plate
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
Abstract
The invention provides nanoimprint equipment suitable for irregular molds, which comprises: the shell with the cavity, be provided with conveyor in the cavity, conveyor has annular conveyer belt, be connected with telescopic bearing plate on the conveyer belt, be used for fixed PET, the light zone has on the bearing plate, it is provided with the ultraviolet lamp to correspond with the light zone in bearing plate below, in the cavity, conveyor's the outside is provided with respectively spouts mucilage binding, heating device, impression device and discharge apparatus, impression device has liftable be used for fixed substrate's platform dish and hot plate, when the conveyer belt rotates, portable bearing plate makes the bearing plate respectively with spout the mucilage binding, heating device, impression device or discharge apparatus are relative. The invention can realize the imprinting of irregular molds, avoid the overflow phenomenon and the blockage problem of vacuum holes and realize the automation of the imprinting process.
Description
Technical Field
The invention belongs to the technical field of nanoimprint lithography, and particularly relates to nanoimprint lithography equipment suitable for irregular molds.
Background
The nanoimprint technology is a technology for transferring a micro-nano structure on a template to a material to be processed by assistance of photoresist. Nanoimprinting is generally performed in three steps: firstly, processing a template, namely processing a required structure on a silicon or other substrate as the template by generally using means such as electron beam etching and the like; secondly, transferring the pattern, namely coating photoresist on the surface of a material to be processed by processing the template, pressing the template on the surface of the material, and transferring the pattern to the photoresist in a pressurizing mode; and processing the third substrate, namely etching the redundant photoresist by using etching liquid to expose the surface of the material to be processed, then processing by using a chemical etching method, and removing all the photoresist after the processing is finished to finally obtain the high-precision processed material.
At present, in order to improve the structural precision in the pattern transfer process, various nano-suppression devices are available in the market, and most of the nano-imprint devices are designed according to regular circles or squares, so that the problems of uneven thickness of a spin coating film, vacuum leakage or blockage of vacuum holes due to glue overflow in the imprinting process and the like can be caused if the devices are used for imprinting an irregular mold.
Disclosure of Invention
Aiming at the technical problems, the invention provides the nano-imprinting equipment suitable for the irregular mould and the imprinting method thereof, which can realize imprinting of the irregular mould, avoid the problems of glue overflow and blockage of vacuum holes and realize automation of an imprinting process.
In order to achieve the purpose, the invention adopts the technical scheme that: a nanoimprinting apparatus suitable for irregular molds, comprising: the PET film laminating machine comprises a shell with a cavity, wherein a conveying device is arranged in the cavity and provided with an annular conveying belt, a telescopic bearing plate is connected onto the conveying belt, a buckle is arranged on the bearing plate and used for fixing PET, a light transmission area is arranged on the bearing plate, an ultraviolet lamp is arranged below the bearing plate and corresponds to the light transmission area, a glue spraying device, a heating device, an imprinting device and a discharging device are respectively arranged on the outer side of the conveying device in the cavity, the imprinting device is provided with a lifting platform disc and a heating plate, a clamping groove is formed in the platform disc and used for fixing a substrate, when the conveying belt rotates, the bearing plate can be moved to enable the bearing plate to be respectively opposite to the glue spraying device, the heating device, the imprinting device or the discharging device so as to spray photoresist on the PET through the glue spraying device, and volatilize the smell of PET photoetching glue through, and enabling the PET to be in contact with the substrate on the table tray through the imprinting device for imprinting and curing, and discharging the imprinted PET through the discharging device.
In some embodiments of the present invention, the conveying device includes a rotating shaft disposed in a rectangular shape, a roller connected to the rotating shaft, and a motor driving the roller to rotate, and the conveying belt surrounds the roller and contacts with the roller.
In some embodiments of the present invention, the glue spraying device includes an X-axis sliding rod, a Y-axis sliding rod connected to the X-axis sliding rod, and a glue nozzle connected to the Y-axis sliding rod, and the glue nozzle is connected to the glue bottle through a glue tube.
In some embodiments of the invention, the heating device is an electrical heating plate disposed on an inner side wall of the housing.
In some embodiments of the invention, the stamping device comprises a lifting rod arranged at the bottom of the shell, the table plate is connected with the lifting rod, and the heating plate is positioned inside the table plate.
In some embodiments of the invention, an automatic opening and closing door is arranged on the shell, the discharging device can be turned for 180 degrees to correspond to the automatic opening and closing door, and an inductor is arranged on the automatic opening and closing door, so that when the inductor induces that the discharging device corresponds to the automatic opening and closing door, the automatic opening and closing door is opened, and the imprinted PET is taken out.
In some embodiments of the invention, the discharging device comprises two rotatable mechanical arms, and the clamping ends of the two mechanical arms are respectively connected with a positioning screw and a limiting plate, so that the distance between the clamping ends of the mechanical arms is controlled by adjusting the positioning screw to clamp the PET according to the thickness of the PET.
In some embodiments of the present invention, the apparatus further comprises a controller, wherein the controller is electrically connected to the conveying device, the glue spraying device, the heating device, the imprinting device, the discharging device, the retractable pressure bearing plate, the ultraviolet lamp and the heating plate.
An imprinting method comprising the steps of:
s1, fixing PET and substrate
Fixing PET on the surface of the pressure bearing plate, and fixing a substrate on the table surface of the table disc;
s2 spray coating photoresist
The conveying belt drives the bearing plate to move, so that the bearing plate corresponds to the glue spraying device, and photoresist with a certain thickness is sprayed on the PET through the glue spraying device according to a set specific range;
s3, impression solidification
The conveyer belt drives the bearing plate to move, so that the bearing plate is parallel to a table disc on the impressing device, the middle of the bearing plate extends downwards to enable the PET to be in contact with the substrate, the table disc moves upwards, meanwhile, the middle of the bearing plate moves upwards synchronously to enable the substrate to be completely attached to the PET, and the ultraviolet lamp or the heating plate is turned on to enable the photoresist to be cured;
s4, separating and discharging
After the imprinting is finished, the table plate moves downwards to enable the PET to be completely separated from the substrate, the separation back-stage plate resets, the conveying belt drives the bearing plate to move and corresponds to the discharging device, and the discharging device discharges the imprinted PET to finish the imprinting.
In some embodiments of the present invention, the step S3 is further provided with steps S30, S30 for odor elimination: the conveyer belt drives the bearing plate to move, so that the bearing plate is parallel to the heating device, and the heating device starts heating to volatilize the solvent in the photoresist on the PET.
Compared with the prior art, the invention has the advantages and positive effects that:
PET adopts the buckle to fix on bearing plate, the substrate is fixed on the stage disk through the neck, there is no absorption participation of the vacuum system, reduce the cost, has avoided the problem of the photoresist blocks the vacuum hole and the problem of the irregular mould impression is difficult; the thickness of the photoresist can be controlled by spraying the photoresist through the photoresist spraying device; the whole imprinting process is carried out in the cavity, and the whole process is automatically controlled, so that the pollution problem in the imprinting process is avoided; the middle of the bearing plate extends downwards to enable the PET to be in contact with the substrate, the table plate moves upwards, meanwhile, the middle of the bearing plate moves upwards synchronously, the substrate is completely attached to the PET, the pressure printing defect such as bubbles can be effectively avoided, and the qualified rate of the pressure printing is guaranteed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the hairspray;
FIG. 2 is a schematic diagram of the baking and deodorizing structure of the present invention;
FIG. 3 is a schematic view of the embossed structure of the present invention;
fig. 4 is a schematic structural diagram of the discharging material of the invention.
In the above figures: 1. a housing; 11. a cavity; 12. automatically opening and closing the door; 13. an electromagnet; 14. an inductor; 2. a conveying device; 21. a conveyor belt; 22. a rotating shaft; 23. a roller; 3. a pressure bearing plate; 31. a travel bar; 32. an ultraviolet lamp; 33. buckling; 4. a glue spraying device; 41. an X-axis slide bar; 42. a Y-axis slide bar; 43. a glue nozzle; 5. a heating device; 6. an imprint device; 61. a table plate; 62. heating plates; 63. a card slot; 64. a lifting rod; 7. a discharge device; 71. a robot arm; 72. a set screw; 73. a limiting plate; 8. a substrate; 9. PET.
Detailed Description
The invention is described in detail below by way of exemplary embodiments. It should be understood, however, that elements, structures and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A nanoimprinting apparatus suitable for use with irregular molds, see fig. 1-4, comprising: the device comprises a shell 1 with a cavity 11, a conveying device 2 is arranged in the cavity 11, the conveying device 2 is provided with an annular conveying belt 21, a flexible bearing plate 3 is connected onto the conveying belt 21, a telescopic moving rod 31 is connected to the central position of the inner side of the bearing plate 3, the moving rod 31 can stretch and retract to drive the center of the bearing plate 3 to protrude outwards or fall back to complete stretching, a buckle 33 is arranged on the bearing plate 3 and used for fixing PET9, a light transmission area is arranged on the bearing plate 31, an ultraviolet lamp 32 is arranged below the bearing plate 31 and corresponding to the light transmission area, a glue spraying device 4, a heating device 5, an imprinting device 6 and a discharging device 7 are respectively arranged on the outer side of the conveying device 2 in the cavity 11, the imprinting device 6 is provided with a liftable table disc 61 and a heating plate 62, a clamping groove 63 is arranged on the table disc 61 and used for fixing a substrate 8, when the conveying belt 21 rotates, The heating device 5, the imprinting device 6 or the discharging device 7 are opposite to each other so as to spray photoresist on the PET9 through the photoresist spraying device 4, the odor of the photoresist on the PET9 is volatilized through the heating device 5, the PET9 is contacted with the substrate 8 on the table plate 61 through the imprinting device 6 to be imprinted and solidified, and the imprinted PET9 is discharged through the discharging device 7.
Further, the conveying device 2 comprises a rotating shaft 22 arranged in a rectangular shape, a roller 23 connected with the rotating shaft 22 and a motor driving the roller 23 to rotate, and the conveying belt 21 surrounds the roller 23 and is in contact with the roller 23.
Furthermore, the glue spraying device 4 comprises an X-axis slide bar 41, a Y-axis slide bar 42 connected with the X-axis slide bar 41 and a glue nozzle 43 connected with the Y-axis slide bar 42, the glue nozzle 43 is connected with a glue bottle through a glue tube, the X-axis slide bar 41 and the Y-axis slide bar 42 can adopt a spiral transmission mechanism or an electric cylinder and the like, the glue nozzle is driven to move through the transverse movement of the X-axis slide bar 41 and the longitudinal movement of the Y-axis slide bar 42, and the spraying area and the spraying thickness are effectively guaranteed.
Further, the heating device 4 is an electric heating plate disposed on the inner side wall of the housing 1.
Further, the imprinting device 6 includes a lifting rod 64 disposed at the bottom of the housing 1, the platen 61 is connected to the lifting rod 64, and the heating plate 62 is located inside the platen 61.
In this embodiment, an automatic opening and closing door 12 is arranged on the housing 1, the automatic opening and closing door 12 is controlled to open and close through an electromagnet 13, the discharging device 7 can be turned over for 180 degrees and corresponds to the automatic opening and closing door 12, and an inductor 14 is arranged on the automatic opening and closing door 12, so that when the inductor 14 induces that the discharging device 7 corresponds to the automatic opening and closing door 12, the automatic opening and closing door 12 is opened, and the imprinted PET9 is taken out.
Further, the discharging device 7 comprises two rotatable mechanical arms 71, and a positioning screw 72 and a limiting plate 73 are respectively connected to the clamping ends of the two mechanical arms 71, so that according to the thickness of the PET9, the distance between the clamping ends of the mechanical arms 71 is controlled by adjusting the positioning screw 72 to clamp the PET9, and the rotation angle of the mechanical arms 71 is controlled by the limiting plate 73.
In this embodiment, the apparatus further comprises a controller, and the controller is electrically connected to the conveying device 2, the glue spraying device 4, the heating device 5, the imprinting device 6, the discharging device 7, the retractable pressure-bearing plate 31, the ultraviolet lamp 32, and the heating plate 62.
An imprinting method comprising the steps of:
s1, fixed PET9 and substrate 8
Fixing the PET9 on the plate surface of the pressure bearing plate 31, and fixing the substrate 8 on the table surface of the table disc 61;
s2 spray coating photoresist
The conveying belt 21 drives the bearing plate 31 to move, so that the bearing plate 31 corresponds to the glue spraying device 4, and photoresist with a certain thickness is sprayed on the PET9 through the glue spraying device 4 according to a set specific range;
s3, impression solidification
The conveyer belt 21 drives the bearing plate 31 to move, so that the bearing plate 31 is parallel to the table disc 61 on the imprinting device 6, the middle of the bearing plate 31 extends downwards to enable the PET9 to be in contact with the substrate 8, the lifting rod 64 drives the table disc 61 to move upwards, meanwhile, the middle of the bearing plate 31 moves upwards synchronously, the substrate 8 is enabled to be completely attached to the PET9, and the ultraviolet lamp 32 or the heating plate 62 is turned on to enable the photoresist to be cured;
s4, separating and discharging
After the imprinting is finished, the lifting rod 64 drives the table disc 61 to move downwards to enable the PET9 to be completely separated from the substrate 8, the table disc 61 is reset after separation, the conveying belt drives the bearing plate 31 to move and corresponds to the discharging device 7, according to the thickness of the PET9, the distance between the clamping ends of the mechanical arm 71 is controlled by adjusting the positioning screw 72 to clamp the PET9, the bearing plate 31 is separated from the PET9, the mechanical arm 71 rotates 180 degrees, the sensor 14 senses that the mechanical arm 71 corresponds to the automatic opening and closing door 12, the automatic opening and closing door 12 is opened, the imprinted PET9 is taken out, and the imprinting is finished.
In some occasions where odor elimination is not needed, step S3 is further provided with steps S30, S30: the conveyer belt 21 drives the bearing plate 31 to move, so that the bearing plate 31 is parallel to the electric heating plate, and the electric heating plate heats the bearing plate to volatilize the solvent in the photoresist on the PET 9.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. A nanoimprint apparatus adapted for use with irregular molds, comprising: the PET film laminating machine comprises a shell with a cavity, wherein a conveying device is arranged in the cavity, the conveying device is provided with an annular conveying belt, a telescopic bearing plate is connected onto the conveying belt and used for fixing PET, a light transmission area is arranged on the bearing plate, an ultraviolet lamp is correspondingly arranged below the bearing plate and in the light transmission area, a glue spraying device, a heating device, an imprinting device and a discharging device are respectively arranged on the outer side of the conveying device in the cavity, the imprinting device is provided with a liftable bench disc used for fixing a substrate and a heating plate, when the conveying belt rotates, the bearing plate can be moved to enable the bearing plate to be respectively opposite to the glue spraying device, the heating device, the imprinting device or the discharging device so as to spray photoresist on the PET through the glue spraying device, the heating device volatilizes the smell of the PET photoresist on the imprinting, and the PET is contacted with the substrate on the bench disc through the heating device, the imprinted PET is discharged by a discharging device.
2. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: conveyor is including being the pivot that the rectangle set up, the running roller be connected with the pivot and drive running roller pivoted motor, the conveyer belt encircles the running roller, and with the running roller contacts.
3. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the glue spraying device comprises an X-axis sliding rod, a Y-axis sliding rod connected with the X-axis sliding rod and a glue nozzle connected with the Y-axis sliding rod, and the glue nozzle is connected with a glue bottle through a glue tube.
4. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the heating device is an electric heating plate arranged on the inner side wall of the shell.
5. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the stamping device comprises a lifting rod arranged at the bottom of the shell, the table plate is connected with the lifting rod, and the heating plate is positioned inside the table plate.
6. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the automatic PET embossing machine is characterized in that an automatic opening and closing door is arranged on the shell, the unloading device can be turned over for 180 degrees and corresponds to the automatic opening and closing door, and an inductor is arranged on the automatic opening and closing door, so that when the inductor induces that the unloading device corresponds to the automatic opening and closing door, the automatic opening and closing door is opened, and embossed PET is taken out.
7. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the discharging device comprises two rotatable mechanical arms, and positioning screws and limiting plates are connected to clamping ends of the two mechanical arms respectively to adjust the distance between the clamping ends of the mechanical arms to clamp the PET according to the thickness of the PET.
8. The nanoimprint apparatus of claim 1 that is adapted for use with irregular molds, characterized in that: the device comprises a conveying device, a glue spraying device, a heating device, an embossing device, a discharging device, a telescopic pressure bearing plate, an ultraviolet lamp and a heating plate.
9. An imprinting method using the nanoimprinting apparatus defined in any one of claims 1 to 8, characterized in that: the method comprises the following steps:
s1, fixing PET and substrate
Fixing PET on the surface of the pressure bearing plate, and fixing a substrate on the table surface of the table disc;
s2 spray coating photoresist
The conveying belt drives the bearing plate to move, so that the bearing plate corresponds to the glue spraying device, and photoresist with a certain thickness is sprayed on the PET through the glue spraying device according to a set specific range;
s3, impression solidification
The conveyer belt drives the bearing plate to move, so that the bearing plate is parallel to a table disc on the impressing device, the middle of the bearing plate extends downwards to enable the PET to be in contact with the substrate, the table disc moves upwards, meanwhile, the middle of the bearing plate moves upwards synchronously to enable the substrate to be completely attached to the PET, and the ultraviolet lamp or the heating plate is turned on to enable the photoresist to be cured;
s4, separating and discharging
After the imprinting is finished, the table plate moves downwards to enable the PET to be completely separated from the substrate, the separation back-stage plate resets, the conveying belt drives the bearing plate to move and corresponds to the discharging device, and the discharging device discharges the imprinted PET to finish the imprinting.
10. The imprint method according to claim 9, wherein: the step S3 is further provided with steps S30 and S30 for odor removal: the conveyer belt drives the bearing plate to move, so that the bearing plate is parallel to the heating device, and the heating device starts heating to volatilize the solvent in the photoresist on the PET.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110319438.6A CN113031393A (en) | 2021-03-25 | 2021-03-25 | Nano-imprinting equipment suitable for irregular mold and imprinting method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110319438.6A CN113031393A (en) | 2021-03-25 | 2021-03-25 | Nano-imprinting equipment suitable for irregular mold and imprinting method thereof |
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| CN113031393A true CN113031393A (en) | 2021-06-25 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011129927A (en) * | 2010-12-16 | 2011-06-30 | Dainippon Printing Co Ltd | Nanoimprint mold conveyance device and transfer method |
| US20190329575A1 (en) * | 2016-07-14 | 2019-10-31 | Morphotonics Holding B.V. | Apparatus for imprinting discrete substrates with a flexible stamp |
| CN210803966U (en) * | 2019-12-31 | 2020-06-19 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment |
| CN210954602U (en) * | 2020-01-10 | 2020-07-07 | 青岛天仁微纳科技有限责任公司 | Conveying roll type nano-imprinting equipment |
-
2021
- 2021-03-25 CN CN202110319438.6A patent/CN113031393A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011129927A (en) * | 2010-12-16 | 2011-06-30 | Dainippon Printing Co Ltd | Nanoimprint mold conveyance device and transfer method |
| US20190329575A1 (en) * | 2016-07-14 | 2019-10-31 | Morphotonics Holding B.V. | Apparatus for imprinting discrete substrates with a flexible stamp |
| CN210803966U (en) * | 2019-12-31 | 2020-06-19 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment |
| CN210954602U (en) * | 2020-01-10 | 2020-07-07 | 青岛天仁微纳科技有限责任公司 | Conveying roll type nano-imprinting equipment |
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