CN113031143A - Color filter, display screen and manufacturing method of color filter - Google Patents
Color filter, display screen and manufacturing method of color filter Download PDFInfo
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- CN113031143A CN113031143A CN202110425007.8A CN202110425007A CN113031143A CN 113031143 A CN113031143 A CN 113031143A CN 202110425007 A CN202110425007 A CN 202110425007A CN 113031143 A CN113031143 A CN 113031143A
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- 238000005530 etching Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
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- 239000004973 liquid crystal related substance Substances 0.000 claims description 7
- 238000006552 photochemical reaction Methods 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 5
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- 229920005989 resin Polymers 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
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- 230000000007 visual effect Effects 0.000 abstract description 3
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
Abstract
The application provides a color filter, a display screen and a manufacturing method of the color filter, wherein the color filter comprises a substrate, a shading matrix and a plurality of color resistance units. The shading matrix comprises a plurality of shading blocks, the shading blocks are arranged on the substrate at intervals to form a matrix, and each shading block forms an acute angle between at least one side edge close to the substrate area and the surface of the substrate. Each color resistance unit is filled between two adjacent shading blocks. In the use state, along the light emitting direction, two adjacent light shielding blocks are equivalent to form an outward-expanding horn mouth shape, and when light penetrates through the color resistance units between the two adjacent light shielding blocks, the light is allowed to diffuse and penetrate towards two sides in a larger angle, so that a larger display visual angle can be obtained, the brightness attenuation is reduced, and the chromatic aberration is reduced.
Description
Technical Field
The application belongs to the technical field of display screens, and particularly relates to a color filter, a display screen and a manufacturing method of the color filter.
Background
A TFT (Thin Film Transistor) display screen uses a backlight as a light source, and when light penetrates from a TFT layer to a color filter, the light is emitted due to a BM (Black Matrix) region formed by ink between two adjacent single-point pixels on the color filterWhen a line passes through a single-point pixel, part of the light at the edge is blocked by a BM (also called a shading area), as shown in FIG. 1, the maximum light view angle allowed to pass through by a single pixel pointThe size is small, and especially large-angle transmission light rays are limited, so that brightness attenuation and chromatic aberration increase are further caused, and large-viewing-angle experience of the display screen is influenced.
Disclosure of Invention
An object of the embodiments of the present application is to provide a color filter, a display panel, and a method for manufacturing the color filter, so as to solve the technical problems in the prior art that when a large-angle transmission light passes through the color filter, part of the light is blocked by a BM region, resulting in increased brightness attenuation, increased chromatic aberration, and a smaller viewing angle.
In order to achieve the purpose, the technical scheme adopted by the application is as follows: a color filter is provided, which includes a substrate, a light-shielding matrix and a plurality of color resistance units. The shading matrix comprises a plurality of shading blocks, the shading blocks are arranged on the substrate at intervals to form a matrix, and each shading block forms an acute angle between at least one side edge close to the substrate area and the surface of the substrate. Each color resistance unit is filled between two adjacent shading blocks.
Alternatively, the light blocking block has one of a trapezoid, an arch, a rounded rectangle, and a polygon in a cross section formed along a section perpendicular to the substrate.
Optionally, the light-shielding matrix is a photoresist resin plating.
According to another aspect of the present application, the present application further provides a display panel having the color filter of any one of the above.
Optionally, the display screen is a liquid crystal display screen or an OLED display screen.
According to another aspect of the present application, there is further provided a method of manufacturing a color filter, the method comprising:
coating: plating a shading film on the substrate;
a primary etching step: placing a first photomask above the shading film, irradiating the first photomask with ultraviolet light to generate photochemical reaction, and etching off the part of the shading film irradiated by the ultraviolet light by using a developing solution so as to form a plurality of rectangular shading blocks on the substrate, wherein the shading blocks are arranged at intervals and form a matrix;
and (3) secondary etching step: placing a second photomask above the shading film, adjusting the irradiation direction of ultraviolet light to enable the shading blocks of the ultraviolet light irradiation rectangle to be close to the peripheral side edge of the substrate area, and then etching the part of the shading film irradiated by the ultraviolet light by using a developing solution to enable each shading block to form an acute angle between the side edge close to the substrate area and the surface of the substrate;
baking: baking and curing the formed shading block;
and (3) color resistance filling: and a color resistance unit is filled between every two adjacent shading blocks.
Optionally, the exposure aperture of the second reticle is 10 μm to 30 μm smaller than the exposure aperture of the first reticle.
Optionally, in the second etching step, a cross section of the light blocking block formed on a cross section perpendicular to the substrate is one of a trapezoid, an arch, a rounded rectangle, and a polygon.
Alternatively, in the secondary etching step, the ultraviolet light irradiation direction is adjusted in four different directions in order to irradiate different positions around the light-shielding block, respectively, and then the ultraviolet light irradiated portion of the light-shielding film is etched away with the developer, so that the light-shielding block has a trapezoidal cross section formed along a cross section perpendicular to the substrate.
Optionally, in the color resistance filling step, the color resistance units are filled at a color resistance filling speed which is slow first and then fast.
The application provides a color filter and display screen's beneficial effect lies in: compared with the prior art, the shading blocks of the color filter form acute angles between the side edges close to the substrate area and the substrate surface, so that in the use state, along the light emitting direction, two adjacent shading blocks equivalently form an outward-expanding horn mouth shape, the angle of the light which is allowed to diffuse and penetrate towards two sides is larger when the light penetrates through the color resistance units between the two adjacent shading blocks, a larger display visual angle can be obtained, the brightness attenuation is also reduced, and the color difference is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
FIG. 1 is a diagram of a conventional color filter structure and a display screen light path;
fig. 2 is a structural diagram of a color filter and a schematic diagram of an optical path of a display screen according to an embodiment of the present disclosure;
fig. 3A-3D are cross-sectional views of several other different shapes of light-shielding blocks of the color filter provided in the present application;
FIGS. 4A-4H are schematic diagrams illustrating a method for fabricating a color filter according to an embodiment of the present disclosure;
fig. 5 is a color resistance deposition rate diagram in the color resistance filling step of the color filter manufacturing method according to the embodiment of the present application.
Wherein, in the figures, the respective reference numerals:
1-a color filter; 10-a substrate; 20-a light-shielding matrix; 21-a light-shielding block; 211-lateral; 30-a color resistance unit; 2-TFT layer; 3-a liquid crystal layer; 200-a light-shielding film; 300-a first mask; 400-second mask.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 2, a color filter 1 according to an embodiment of the present disclosure will now be described. The color filter 1 includes a substrate 10, a light-shielding matrix 20, and a plurality of color resistance units 30.
The light-shielding matrix 20 includes a plurality of light-shielding blocks 21, and the light-shielding blocks 21 are arranged on the substrate 10 at intervals to form a matrix. Each light shielding block 21 forms an acute angle θ between at least one side 211 near the area of the substrate 10 and the surface of the substrate 10. Each color resist unit 30 is filled between two adjacent light shielding blocks 21, that is, the color resist units 30 are also arranged at intervals and form a matrix. The light-shielding matrix 20 and the color resist units 30 are arranged together on the substrate 10, thereby constituting the color filter 1.
As shown in FIG. 2, in the using state, light enters from the color resistance units 30 and exits from the substrate 10, and the light can penetrate through each color resistance unit 30 but can not penetrate through each color resistance unit 30Each light-shielding block 21 of the light-shielding matrix 20, i.e. the light-shielding block 21, will block light. Because the light shielding blocks 21 form an acute angle θ between the side 211 of the area close to the substrate 10 and the surface of the substrate 10 (a right angle is correspondingly formed between the side of the conventional rectangular light shielding block and the substrate), two adjacent light shielding blocks 21 are equivalent to form an outward flared bell mouth shape along the light emitting direction; compared with the conventional straight channel opening formed between two rectangular light shielding blocks, the light rays have the angle of allowing the light rays to diffuse and penetrate to two sides when penetrating through the color resistance unit 30 between two adjacent light shielding blocks 21 of the present applicationLarger, i.e. the display viewing angle of the color filter 1 of the present applicationDisplay visual angle larger than that of the traditional color filterMoreover, since the light shielded by the light shielding block 21 is reduced, the light transmitted through the color resistance unit 30 is increased, which can also reduce the luminance attenuation and reduce the color difference.
In summary, the color filter 1 provided by the present application has a larger viewing angle of the display, reduces luminance attenuation, and reduces chromatic aberration compared with the prior art.
In another embodiment of the present application, a cross section of the light blocking block 21 formed along a section perpendicular to the substrate 10 is one of a trapezoid, an arch, a rounded rectangle, and a polygon. In general, the light-shielding block 21 may have a shape without an outward-widening corner in the region near the substrate 10 to increase the viewing angle.
For example, when viewed from the direction shown in fig. 2, the cross section of the light shielding block 21 formed on the cross section perpendicular to the substrate 10 is trapezoidal, that is, the light shielding block 21 has a quadrangular frustum shape when viewed from the three-dimensional space, and the top area is small, thereby allowing the light to be diffused outward at a larger angle and forming a larger display viewing angle
As shown in fig. 3A to 3D, the present application also lists sectional shapes of other light-shielding blocks 21 formed along a section perpendicular to the substrate 10. Specifically, in fig. 3A, the cross section of the light-shielding block 21 formed on the cross section perpendicular to the substrate 10 is a polygon, wherein an included angle formed by one side 211 of the light-shielding block 21 and the surface of the substrate 10 is an acute angle, and an included angle formed by the other side of the light-shielding block 21 and the surface of the substrate 10 is a right angle. Thus, the angle between two adjacent light shielding blocks 21 for allowing light to pass through is still larger than that of the conventional technology.
In fig. 3B, the light shielding block 21 has an arch shape in a cross section formed along a section perpendicular to the substrate 10, and a side of the light shielding block 21 adjacent to the substrate 10 is formed into an arc-shaped curved surface, so that an included angle formed between a tangent line of the light shielding block 21 at any point on the arc-shaped curved surface in a region adjacent to the substrate 10 and the surface of the substrate 10 is also an acute angle. When light passes through between two adjacent light shielding blocks 21, the angle of light transmission is allowed to be larger than that of the conventional art.
In fig. 3C, the cross section of the light-shielding blocks 21 formed on the cross section perpendicular to the substrate 10 is hexagonal, the included angle formed between the side of the light-shielding block 21 in the region close to the substrate 10 and the surface of the substrate 10 is also acute, and the angle between two adjacent light-shielding blocks 21 for allowing light to pass through is larger than that of the conventional technology.
In fig. 3D, the cross section of the light-shielding block 21 formed on the cross section perpendicular to the substrate 10 is a rounded rectangle, which is equivalent to a pattern obtained by rounding the corners around the light-shielding area 21 of a conventional rectangle. The light shielding blocks 21 form an arc-shaped curved surface on a side close to the substrate 10, and an included angle formed between a tangent line of any point on the arc-shaped curved surface and the surface of the substrate 10 is also an acute angle, so that an angle of light passing through between two adjacent light shielding blocks 21 is larger than that of the conventional art.
In another embodiment of the present application, the light-shielding matrix 20 is a photoresist resin coating formed on the substrate 10, for example, a black resin may be used to shield light.
According to another aspect of the present application, the present application further provides a display panel having the color filter 1 described above.
Optionally, the display screen is a liquid crystal display screen or an OLED (Organic Light-emitting diode) display screen, and the color filter can be used for both types of display screens, so as to increase the viewing angle, improve the brightness of the large viewing angle, and reduce the color cast.
As shown in fig. 2, taking a TFT-LCD (Thin film transistor liquid crystal display) as an example, the liquid crystal display includes two glass substrates, and a TFT layer 2, a liquid crystal layer 3 and the color filter 1 sequentially stacked between the two glass substrates. When light serving as a backlight source passes through the TFT layer 2 to the color filter 1, the light is only allowed to pass through the color resistance units 30 arranged at intervals, and the light blocking blocks 21 arranged at intervals block the light. When light passes through two adjacent light shielding blocks 21, because the angle formed between at least one side 211 of the light shielding block 21 near the substrate 10 region and the surface of the substrate 10 is an acute angle, an outward-expanding bell mouth shape is formed between the two light shielding blocks 21, and the maximum angle that the light is allowed to penetrate along the light projection directionAngle of view greater than that of the prior artIs larger, thereby forming a larger display viewing angleIn addition, the brightness attenuation of the light penetrating through the color filter 1 can be reduced, and the chromatic aberration can be reduced.
According to another aspect of the present application, there is further provided a method for manufacturing a color filter, as shown in fig. 4A-4H, the method for manufacturing a color filter includes a plating step, a primary etching step, a secondary etching step, a baking step, and a color resist filling step.
Coating: as shown in fig. 4A to 4B, a light-shielding film 200 of a light-blocking resin is first plated on a substrate 10, and the light-shielding film 200 is used for forming a light-shielding matrix in a subsequent process.
A primary etching step: as shown in fig. 4C-4D, a first photomask (also called a mask) 300 is placed above the light-shielding film 200, and ultraviolet light is vertically irradiated onto the first photomask 300 from top to bottom, so that the light-shielding film 200 generates a photochemical reaction under the action of the ultraviolet light; the first mask 300 has a plurality of spaced exposure holes at positions allowing ultraviolet light to pass through and irradiate onto the light shielding film 200, thereby generating a photochemical reaction; the position without the exposure hole does not allow ultraviolet light to penetrate through, and photochemical reaction does not occur; then, the ultraviolet-irradiated portion of the light-shielding film 200 is etched away by using a developing solution, so that the portion which is not irradiated and where the photochemical reaction occurs remains on the substrate 10, thereby forming a plurality of rectangular light-shielding blocks 21 on the substrate, the light-shielding blocks 21 being arranged at intervals and forming a matrix.
A second etching step; as shown in fig. 4E-4G, the second photomask 400 is placed above the light-shielding film 200, the exposure hole of the second photomask 400 is smaller than the exposure hole of the first photomask 300, and the irradiation direction of the ultraviolet light is adjusted so that the ultraviolet light irradiates the rectangular light-shielding block 21 near the peripheral side of the substrate 10 area, so that the ultraviolet light can only irradiate the small-range area of the light-shielding block 21 near the substrate 10; then, the ultraviolet-irradiated portion of the light-shielding film 200, i.e., the peripheral side portion of the light-shielding block 21 near the substrate 10 region, is etched away by using a developing solution, so that each light-shielding block forms an acute angle between the side near the substrate region and the substrate surface.
Baking: baking and curing the formed light shielding block 21.
And (3) color resistance filling: as shown in fig. 4H, the color resistance unit 30 is filled between every two adjacent light-shielding blocks 21, so as to complete the fabrication of the color filter 1.
In another embodiment of the present application, the exposure aperture of the second mask 400 is 10 μm to 30 μm smaller than the exposure aperture of the first mask 300 (i.e., about 30% of the size of a single pixel), i.e., the exposure aperture of the first mask 300 is equal to the size of a single pixel, and the exposure aperture of the second mask 400 is reduced by about 30% of the size of a single pixel.
In another embodiment of the present application, as shown in fig. 2 and 3A to 3D, the light blocking block 21 has one of a trapezoid, an arch, a rounded rectangle, and a polygon in a cross section formed along a section perpendicular to the substrate 10.
In another embodiment of the present application, in the secondary etching step, the ultraviolet irradiation direction is sequentially adjusted to four different directions to respectively irradiate different positions on the periphery of the light-shielding block 21, and then the ultraviolet-irradiated portion of the light-shielding film 200 is etched away with the developer, so that the cross section of the light-shielding block 21 formed along the cross section perpendicular to the substrate 10 is trapezoidal. Specifically, the second etching step is divided into four sub-process segments, and the irradiation direction of the ultraviolet light is adjusted within the range of 0 ° to 30 ° to the left within the first 1/4 process time, so that the ultraviolet light gradually irradiates the right side of the rectangular light-shielding block 21; adjusting the ultraviolet light to the right within the range of 0 to-30 degrees in the second 1/4 process time so that the ultraviolet light irradiates the left side of the rectangular light-shielding block 21; similarly, in the third segment 1/4 process time, the ultraviolet light is adjusted forward within the range of 0 ° to 30 ° so that the ultraviolet light irradiates the front side of the rectangular light-shielding block 21; in the fourth stage 1/4, the ultraviolet light is adjusted backward within the range of 0 ° to 30 ° so that the ultraviolet light irradiates the rear side of the rectangular light-shielding block 21, and the exposure is completed by the rotation angle of the ultraviolet light around. Then, the ultraviolet light-irradiated portion is etched away by using a developing solution, the remaining portion of each light-shielding block 21 is formed in a trapezoidal shape as shown in fig. 2, and all the light-shielding blocks 21 are distributed on the substrate 10 at intervals to form a matrix.
Further, in another embodiment of the present application, since the light shielding blocks 21 have a trapezoidal shape in cross section as shown in fig. 2, the color resistance units 30 filled between the adjacent light shielding blocks 21 also have a trapezoidal shape in cross section formed along a cross section perpendicular to the substrate 10, and the light shielding blocks 21 and the adjacent color resistance units 30 are inverted from each other in the direction of the trapezoidal shape formed in cross section. The area of the side of the color resist unit 30 in contact with the substrate 10 is large, and the area of the other side of the color resist unit 30 away from the substrate 10 is small. In the color resistance filling step, the color resistance units 30 are filled at a slow-first-then-fast color resistance filling speed, so that the thickness increase rule of the color resistance units conforms to the color resistance deposition rate diagram shown in fig. 5, and the color resistance units at the corners of the light-shielding block 21 with the trapezoidal cross section are uniformly deposited. As shown in fig. 5, as the deposition time of the color resist unit 30 is prolonged, the deposition thickness of the color resist unit 30 increases faster, and the two are in a quadratic function relationship.
The utility model provides a color filter 1 and display screen that has color filter 1 replace traditional rectangle shading block through adopting shading block 21 such as special cross sectional shape such as trapezoidal, polygon, fillet rectangle, arch, reduces sheltering from and the luminance decay of transmitted light under the wide-angle, improves the transmissivity of display screen, has especially promoted wide-angle brightness, reduces the colour cast, has optimized the wide-angle experience of display screen.
The present invention is not intended to be limited to the particular embodiments shown and described, but is to be accorded the widest scope consistent with the principles and novel features herein disclosed.
Claims (10)
1. A color filter, comprising:
a substrate;
the shading matrix comprises a plurality of shading blocks, the shading blocks are arranged on the substrate at intervals to form a matrix, and each shading block forms an acute angle between at least one side edge close to the substrate area and the surface of the substrate;
and each color resistance unit is filled between two adjacent shading blocks.
2. The color filter according to claim 1, wherein the light blocking section has one of a trapezoid shape, an arch shape, a rounded rectangle shape, and a polygonal shape in a cross section taken along a plane perpendicular to the substrate.
3. The color filter according to claim 1 or 2, wherein the light-shielding matrix is a photoresist resin plating.
4. A display panel having the color filter according to any one of claims 1 to 3.
5. The display screen of claim 4, wherein the display screen is a liquid crystal display screen or an OLED display screen.
6. A method for manufacturing a color filter, comprising:
coating: plating a shading film on the substrate;
a primary etching step: placing a first photomask above a shading film, irradiating the first photomask with ultraviolet light to generate a photochemical reaction, and etching off the part, irradiated by the ultraviolet light, of the shading film by using a developing solution so as to form a plurality of rectangular shading blocks on a substrate, wherein the shading blocks are arranged at intervals and form a matrix;
and (3) secondary etching step: placing a second photomask above a shading film, adjusting the irradiation direction of ultraviolet light to enable the shading blocks of the ultraviolet light irradiation rectangle to be close to the peripheral side edge of the substrate area, and then etching off the part of the shading film irradiated by the ultraviolet light by using a developing solution to enable each shading block to form an acute angle between the side edge close to the substrate area and the surface of the substrate;
baking: baking and curing the formed shading block;
and (3) color resistance filling: and filling a color resistance unit between every two adjacent shading blocks.
7. The method of claim 6, wherein an exposure aperture of the second mask is smaller than an exposure aperture of the first mask by 10 μm to 30 μm.
8. The method of claim 6, wherein the light blocking section has a cross-section of one of trapezoid, arch, rectangle with rounded corners and polygon shape along a cross-section perpendicular to the substrate in the second etching step.
9. The method of manufacturing a color filter according to claim 6, wherein in the secondary etching step, the ultraviolet irradiation direction is sequentially adjusted in four different directions to irradiate different positions around the light-shielding block, and then the ultraviolet-irradiated portion of the light-shielding film is etched away with a developer, so that the light-shielding block has a trapezoidal cross section along a cross section perpendicular to the substrate.
10. The method according to claim 9, wherein in the color resist filling step, the color resist cells are filled at a slow-first-then-fast color resist filling speed.
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CN1731285A (en) * | 2004-08-07 | 2006-02-08 | 鸿富锦精密工业(深圳)有限公司 | Manufacturing method of color filters and exposure device |
TW200807039A (en) * | 2006-07-20 | 2008-02-01 | Allied Material Technology Corp | A color filter and a photomask used to manufacture it |
CN105445996A (en) * | 2015-12-29 | 2016-03-30 | 昆山龙腾光电有限公司 | Making method for color filter substrate and color filter substrate |
CN106842825A (en) * | 2017-03-21 | 2017-06-13 | 京东方科技集团股份有限公司 | Master mold and its manufacture method |
CN110707235A (en) * | 2019-09-19 | 2020-01-17 | 武汉华星光电半导体显示技术有限公司 | Display panel, display device and preparation method of display panel |
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