CN113029015A - Method and device for measuring diameter of micro optical fiber based on white light interferometry - Google Patents
Method and device for measuring diameter of micro optical fiber based on white light interferometry Download PDFInfo
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- CN113029015A CN113029015A CN202110254034.3A CN202110254034A CN113029015A CN 113029015 A CN113029015 A CN 113029015A CN 202110254034 A CN202110254034 A CN 202110254034A CN 113029015 A CN113029015 A CN 113029015A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000005305 interferometry Methods 0.000 title claims abstract description 16
- 238000012545 processing Methods 0.000 claims abstract description 23
- 238000006073 displacement reaction Methods 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 230000008569 process Effects 0.000 claims abstract description 14
- 238000003384 imaging method Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000026676 system process Effects 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 2
- 229920001410 Microfiber Polymers 0.000 claims 1
- 239000003658 microfiber Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 8
- 230000008859 change Effects 0.000 abstract description 3
- 230000002411 adverse Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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Abstract
The invention discloses a method for measuring the diameter of a micro optical fiber based on a white light interferometry, which comprises the following steps: building a horizontal white light interference light path; clamping the micro optical fiber on a clamp and fixing the micro optical fiber on a three-dimensional objective table; moving the three-dimensional objective table to enable the imaging position of the white light interference light path to be in front of the micro optical fiber; heating the clamped micro optical fiber to be detected; setting displacement parameters of a servo displacement system, starting the displacement system, and performing timed and fixed-distance vertical scanning on the micro-optical fiber to be detected by using white light; the reflected light after scanning is incident to the CCD; and processing and analyzing the obtained image, and calculating the diameter of the micro optical fiber in the heating and stretching process. The diameter of the micro optical fiber is measured by building a horizontal white light interference light path, and the diameter change of the micro optical fiber in the heating and stretching process is accurately calculated; the detection process has no contact and damage, does not have adverse effect on the heating and stretching process of the micro optical fiber, and has high overall stability.
Description
Technical Field
The invention relates to the field of fiber micromachining detection, in particular to a method and a device for measuring the diameter of a micro optical fiber based on a white light interferometry.
Background
With the development of micro-nano optics, optical fiber devices with standard sizes cannot meet the requirements of users, and more micro optical fibers appear in the sight of people. The micro optical fiber is an optical fiber with the diameter of several microns and hundreds of nanometers, and can enhance the interaction between the optical field of the micro optical fiber and the external environment and increase the sensitivity and the response time of a device; the micro optical fiber device with smaller volume is more convenient to package, is suitable for the industrial development requirement of modern micro-nano optics, and has wide application in the fields of waveguide, near-field optics, quantum and atomic optics, nonlinear optics, plasmon and the like.
In the process of processing the diameter of the micro-optical fiber by using the standard single-mode fiber heating and drawing method, although the processing result of the micro-optical fiber can be controlled by controlling the relative position of the heating source, the heating intensity, the scanning distance and the like, the processing time of the micro-optical fiber is too long, the controlled heating condition is still easily influenced by the environment, the heating and drawing result has larger error, and the problem of accurately measuring the diameter of the micro-optical fiber is urgently needed to be solved.
The existing measurement means of the diameter of the micro optical fiber mainly comprise an optical upright biological microscope measurement method and a step meter measurement method, wherein the optical upright biological microscope measurement is limited by the limit of optical imaging, the measurement precision of the submicron level is not high, the interference of the environment is easy to happen, and the measurement result error is increased; the step meter measurement needs to prepare a plane substrate as a step in advance before detection, and the sample to be detected is subjected to secondary processing, so that the sample can be damaged.
Disclosure of Invention
The purpose of the invention is as follows: aiming at the problems, the invention aims to provide a method for measuring the diameter of a micro optical fiber based on a white light interference method, which is used for measuring the slow change process of the outer diameter of the micro optical fiber in the heating and stretching process, and has high precision and simple operation; the invention also aims to provide a micro-optical fiber diameter measuring device based on the white light interferometry.
The technical scheme is as follows: the invention relates to a method for measuring the diameter of a micro optical fiber based on a white light interferometry, which comprises the following steps:
(1) building a horizontal white light interference light path, and sequentially building lenses on a movable optical platform;
(2) wiping the micro optical fiber to be detected, clamping the micro optical fiber on a clamp and then fixing the micro optical fiber on a three-dimensional objective table, wherein the three-dimensional objective table is fixed in an imaging area of a white light interference light path;
(3) moving a coarse position displacement table of the three-dimensional object stage to enable the white light interference light path to image the micro optical fiber to be detected; moving the fine position shifting table to align the center of the field of view of the white light interference light path with the center of the waist region of the micro optical fiber to be measured, and positioning the imaging position at the front side of the micro optical fiber;
(4) heating the clamped micro optical fiber to be detected, and slowly stretching the three-dimensional object stages on the two sides to the two sides of the micro optical fiber;
(5) setting displacement parameters of a servo displacement system, starting the displacement system, controlling the platform to displace, and performing timed and fixed-distance vertical scanning on the micro optical fiber to be detected by using white light;
(6) the scanned reflected light enters the CCD, and the image is obtained and stored;
(7) and processing and analyzing the acquired multiple images, and calculating the diameter of the micro optical fiber in the heating and stretching process.
Further, the white light interference light path in the step (1) includes a white light source, a collimating lens group and a spectroscope which are sequentially arranged along the light transmission direction, the transmitted light passing through the spectroscope passes through a Mirau interference objective lens and then irradiates on the micro optical fiber to be measured, and the reflected light passes through the Mirau interference objective lens again and then is incident on the CCD after being reflected by the spectroscope.
Further, the collimating lens group comprises a first convex lens, a second convex lens, an iris diaphragm and a third convex lens which are sequentially arranged along the white light transmission direction.
Further, the servo displacement system comprises a servo driving device and a servo driving motor.
The invention relates to a micro-optical fiber diameter measuring device based on a white light interferometry, which comprises a white light interference light path and an image processing system, wherein the white light interference light path comprises a white light source, a collimating lens group and a spectroscope which are sequentially arranged along a light transmission direction, transmitted light passing through the spectroscope passes through a Mirau interference objective lens and then irradiates on a micro-optical fiber to be measured, and reflected light passes through the Mirau interference objective lens again and then is reflected by the spectroscope and then is incident on a CCD; and the image processing system processes the image acquired by the CCD to obtain the diameter of the micro optical fiber.
Further, the collimating lens group comprises a first convex lens, a second convex lens, an iris diaphragm and a third convex lens which are sequentially arranged along the white light transmission direction.
Further, the white light interference light path is arranged on the movable optical platform, and under the control of the displacement system, the movable optical platform reciprocates along the length direction of the micro optical fiber to drive the white light to perform vertical scanning on the micro optical fiber to be measured at regular time and fixed distance.
Further, the image processing system comprises an acquisition card and a PC master control system.
Has the advantages that: compared with the prior art, the invention has the following remarkable advantages:
1. the diameter of the micro optical fiber is measured by building a horizontal white light interference light path, the diameter change of the micro optical fiber in the heating and stretching process is accurately calculated, and effective monitoring is provided for the processing quality;
2. the detection range is large, the measurement precision is high, the transverse resolution is usually determined by the numerical aperture of the interference objective lens and the resolution of the CCD camera, usually in micron or submicron order, the longitudinal resolution is mainly determined by the scanning precision of the servo displacement system and a data processing algorithm, usually in nanometer order;
3. the detection process is free of contact and damage, adverse effects on the heating and stretching process of the micro optical fiber are avoided, meanwhile, the white light interference system is independent of the processing system, the detection is not affected by external factors, and the overall stability is high;
4. the white light interference body system is modularized, the preparation process is mature, and the manufacturing cost is low.
Drawings
FIG. 1 is a diagram of a measuring device according to the present invention;
FIG. 2 is a schematic diagram of a system software design framework.
Detailed Description
The method for measuring the diameter of the micro optical fiber based on the white light interferometry comprises the following steps:
(1) and (3) constructing a horizontal white light interference light path, and sequentially constructing lenses on the movable optical platform.
The white light interference light path comprises a white light source 1, a collimating lens group and a spectroscope 6 which are sequentially arranged along the light transmission direction, the transmitted light passing through the spectroscope 6 passes through a Mirau interference objective lens and then irradiates on the micro optical fiber to be measured, and the reflected light passes through the Mirau interference objective lens again and then is reflected by the spectroscope 6 and then enters the CCD 11.
The collimating lens group comprises a first convex lens 2, a second convex lens 3, an iris diaphragm 4 and a third convex lens 5 which are sequentially arranged along the white light transmission direction.
(2) Wiping the micro optical fiber to be measured, clamping the micro optical fiber on a clamp, and then fixing the micro optical fiber on a three-dimensional objective table 12, wherein the three-dimensional objective table 12 is fixed in an imaging area of a white light interference light path.
(3) Moving the coarse displacement stage of the three-dimensional object stage 12 to enable the white light interference light path to image the micro optical fiber to be detected; and moving the fine position shifting table to align the center of the field of view of the white light interference light path with the center of the waist region of the micro optical fiber to be measured, and to position the image on the front side of the micro optical fiber.
(4) And heating the clamped micro optical fiber to be detected, and slowly stretching the three-dimensional object stages 12 at the two sides to the two sides of the micro optical fiber.
(5) Setting displacement parameters of a servo displacement system, starting the displacement system 13, controlling the platform to displace, and performing timed and fixed-distance vertical scanning on the micro optical fiber to be detected by using white light;
(6) the reflected light after scanning enters the CCD11, and image acquisition and storage are performed;
(7) and processing and analyzing the acquired multiple images, and calculating the diameter of the micro optical fiber in the heating and stretching process.
As shown in fig. 1, the micro optical fiber diameter measuring device based on the white light interferometry according to the embodiment includes a white light interference light path and an image processing system, the white light interference light path includes a white light source 1, a first convex lens 2, a second convex lens 3, an iris 4, a third convex lens 5, and a spectroscope 6, which are sequentially arranged along a light transmission direction, transmitted light passing through the spectroscope 6 passes through a Mirau interference objective lens and then irradiates on a micro optical fiber to be measured, reflected light passes through the Mirau interference objective lens again, and then reflected by the spectroscope 6 and then enters a CCD 11; the image processing system processes the image collected by the CCD11 to obtain the diameter of the micro optical fiber. The image processing system comprises an acquisition card and a PC main control system. The Mirau interference objective lens comprises a lens frame 7, a lens 8, a reference plane 9 and a half-transmitting and half-reflecting spectroscope 10 which are sequentially arranged.
The white light interference light path is arranged on the movable optical platform, and under the control of the displacement system, the movable optical platform reciprocates along the length direction of the micro optical fiber to drive the white light to perform vertical scanning on the micro optical fiber to be measured at regular time and fixed distance.
Fig. 2 is a schematic diagram of a system software design framework, and the work flow of the system software design framework mainly comprises three major parts, namely workbench control, scanning and image acquisition, data processing and result display. In the control of the workbench, a visual window is obtained on a computer through the connection of the CCD11, and then all instruments and equipment are well positioned through the control of the displacement table, and the preparation work of the subsequent detection is well done. In the scanning and image acquisition, the vertical scanning of the diameter of the micro optical fiber is completed mainly by setting the parameter setting and calibration of the servo displacement table, and the acquisition and recording of the image are performed in the process. In data processing and result display, the diameter of the micro-optical fiber being processed is finally obtained mainly by processing the obtained image, and the final detection is completed.
Claims (7)
1. A micro-optical fiber diameter measuring method based on a white light interferometry is characterized by comprising the following steps:
(1) building a horizontal white light interference light path, and sequentially building lenses on a movable optical platform;
(2) wiping the micro optical fiber to be detected, clamping the micro optical fiber on a clamp, and then fixing the micro optical fiber on a three-dimensional objective table (12), wherein the three-dimensional objective table (12) is fixed in an imaging area of a white light interference light path;
(3) moving a coarse position displacement table of the three-dimensional object stage (12) to enable the white light interference light path to image the micro optical fiber to be detected; moving the fine position shifting table to align the center of the field of view of the white light interference light path with the center of the waist region of the micro optical fiber to be measured, and positioning the imaging position at the front side of the micro optical fiber;
(4) heating the clamped micro optical fiber to be tested, and slowly stretching the three-dimensional object stages (12) at two sides to two sides of the micro optical fiber;
(5) setting displacement parameters of a servo displacement system, starting the displacement system (13), controlling the platform to displace, and performing timed and fixed-distance vertical scanning on the micro optical fiber to be detected by using white light;
(6) the reflected light after scanning enters a CCD (11) and is subjected to image acquisition and storage;
(7) and processing and analyzing the acquired multiple images, and calculating the diameter of the micro optical fiber in the heating and stretching process.
2. The method for measuring the diameter of the micro optical fiber by the white light interferometry according to claim 1, wherein the white light interference light path in the step (1) comprises a white light source (1), a collimating lens group and a spectroscope (6) which are sequentially arranged along the light transmission direction, the transmitted light passing through the spectroscope (6) passes through a Mirau interference objective lens and then irradiates on the micro optical fiber to be measured, and the reflected light passes through the Mirau interference objective lens again and then is reflected by the spectroscope (6) and then enters the CCD (11).
3. The method for measuring the diameter of the micro optical fiber by the white light interferometry according to claim 2, wherein the collimating lens group comprises a first convex lens (2), a second convex lens (3), an iris diaphragm (4) and a third convex lens (5) which are arranged in sequence along the white light transmission direction.
4. The device for measuring the diameter of the micro optical fiber based on the white light interferometry is characterized by comprising a white light interference light path and an image processing system, wherein the white light interference light path comprises a white light source (1), a collimating lens group and a spectroscope (6) which are sequentially arranged along the light transmission direction, the transmitted light passing through the spectroscope (6) passes through a Mirau interference objective lens and then irradiates on the micro optical fiber to be measured, and the reflected light passes through the Mirau interference objective lens again and then is reflected by the spectroscope (6) and then enters a CCD (11); the image processing system processes the image collected by the CCD (11) to obtain the diameter of the micro optical fiber.
5. The white light interferometry micro-fiber diameter measuring device according to claim 4, wherein the collimating lens group comprises a first convex lens (2), a second convex lens (3), an iris diaphragm (4) and a third convex lens (5) which are sequentially arranged along a white light transmission direction.
6. The device for measuring the diameter of the micro optical fiber by the white light interferometry according to claim 5, wherein the white light interferometry optical path is arranged on a movable optical platform, and under the control of a displacement system (13), the movable optical platform reciprocates along the length direction of the micro optical fiber to drive the white light to vertically scan the micro optical fiber to be measured at a fixed time and a fixed distance.
7. The apparatus according to claim 4, wherein the image processing system comprises an acquisition card and a PC host system.
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| CN202110254034.3A CN113029015A (en) | 2021-03-09 | 2021-03-09 | Method and device for measuring diameter of micro optical fiber based on white light interferometry |
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| CN202110254034.3A CN113029015A (en) | 2021-03-09 | 2021-03-09 | Method and device for measuring diameter of micro optical fiber based on white light interferometry |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157625A (en) * | 2015-05-29 | 2015-12-16 | 北京航空航天大学 | Fiber end face microscopic interferometry system based on zoom imaging lens |
| CN107601848A (en) * | 2017-09-29 | 2018-01-19 | 中国海洋大学 | The micro-nano fiber preparation method for exciting multiple-mode interfence based on multistep intermittent stretching |
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2021
- 2021-03-09 CN CN202110254034.3A patent/CN113029015A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157625A (en) * | 2015-05-29 | 2015-12-16 | 北京航空航天大学 | Fiber end face microscopic interferometry system based on zoom imaging lens |
| CN107601848A (en) * | 2017-09-29 | 2018-01-19 | 中国海洋大学 | The micro-nano fiber preparation method for exciting multiple-mode interfence based on multistep intermittent stretching |
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