CN113029009A - 一种双视角视觉位移测量系统及方法 - Google Patents
一种双视角视觉位移测量系统及方法 Download PDFInfo
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113665633A (zh) * | 2021-09-16 | 2021-11-19 | 中国铁道科学研究院集团有限公司 | 钢轨纵向位移监测装置及钢轨纵向位移的监测方法 |
CN113870285A (zh) * | 2021-09-29 | 2021-12-31 | 深圳大学 | 一种集成北斗和视觉的基础设施结构形变测量方法及系统 |
CN115031657A (zh) * | 2021-11-10 | 2022-09-09 | 苏州天准科技股份有限公司 | 一种3d激光位移传感器 |
CN115139074A (zh) * | 2022-07-07 | 2022-10-04 | 华南理工大学 | 一种手机锂电池柔性极耳-塑壳的机械臂装配系统及方法 |
CN116147506A (zh) * | 2023-04-23 | 2023-05-23 | 钛玛科(北京)工业科技有限公司 | 一种双ccd相机测宽方法及系统 |
CN116878387A (zh) * | 2023-09-06 | 2023-10-13 | 北京华卓精科科技股份有限公司 | 上下对准视觉装置的标定方法、标定系统及装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101196681A (zh) * | 2006-12-05 | 2008-06-11 | Hoya株式会社 | 光掩膜的检查装置和方法、制造方法和图案转录方法 |
CN102288105A (zh) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | 一种光纤点衍射干涉仪的结构及其检测方法 |
JP2012149984A (ja) * | 2011-01-19 | 2012-08-09 | Nikon Corp | 変位検出装置、露光装置、及びデバイス製造方法 |
CN102812497A (zh) * | 2011-03-03 | 2012-12-05 | 松下电器产业株式会社 | 能够提供随后体验影像的影像提供装置、影像提供方法、影像提供程序 |
CN104678714A (zh) * | 2013-11-29 | 2015-06-03 | 佳能株式会社 | 定位装置、光刻装置和物品制造方法 |
CN105980574A (zh) * | 2013-08-02 | 2016-09-28 | 豪夫迈·罗氏有限公司 | 使用专门捕获探针(heatseq)的序列捕获方法 |
US20200061769A1 (en) * | 2017-11-07 | 2020-02-27 | Dalian University Of Technology | Monocular vision six-dimensional measurement method for high-dynamic large-range arbitrary contouring error of cnc machine tool |
-
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- 2021-04-30 CN CN202110480744.8A patent/CN113029009B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101196681A (zh) * | 2006-12-05 | 2008-06-11 | Hoya株式会社 | 光掩膜的检查装置和方法、制造方法和图案转录方法 |
JP2012149984A (ja) * | 2011-01-19 | 2012-08-09 | Nikon Corp | 変位検出装置、露光装置、及びデバイス製造方法 |
CN102812497A (zh) * | 2011-03-03 | 2012-12-05 | 松下电器产业株式会社 | 能够提供随后体验影像的影像提供装置、影像提供方法、影像提供程序 |
CN102288105A (zh) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | 一种光纤点衍射干涉仪的结构及其检测方法 |
CN105980574A (zh) * | 2013-08-02 | 2016-09-28 | 豪夫迈·罗氏有限公司 | 使用专门捕获探针(heatseq)的序列捕获方法 |
CN104678714A (zh) * | 2013-11-29 | 2015-06-03 | 佳能株式会社 | 定位装置、光刻装置和物品制造方法 |
US20200061769A1 (en) * | 2017-11-07 | 2020-02-27 | Dalian University Of Technology | Monocular vision six-dimensional measurement method for high-dynamic large-range arbitrary contouring error of cnc machine tool |
Non-Patent Citations (1)
Title |
---|
夏豪杰: "《基于伪随机编码的绝对式平面位移测量方法研究》", 《仪器仪表学报》 * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113665633A (zh) * | 2021-09-16 | 2021-11-19 | 中国铁道科学研究院集团有限公司 | 钢轨纵向位移监测装置及钢轨纵向位移的监测方法 |
CN113665633B (zh) * | 2021-09-16 | 2023-08-04 | 中国铁道科学研究院集团有限公司 | 钢轨纵向位移监测装置及钢轨纵向位移的监测方法 |
CN113870285A (zh) * | 2021-09-29 | 2021-12-31 | 深圳大学 | 一种集成北斗和视觉的基础设施结构形变测量方法及系统 |
CN113870285B (zh) * | 2021-09-29 | 2022-05-20 | 深圳大学 | 一种集成北斗和视觉的基础设施结构形变测量方法及系统 |
CN115031657A (zh) * | 2021-11-10 | 2022-09-09 | 苏州天准科技股份有限公司 | 一种3d激光位移传感器 |
CN115139074A (zh) * | 2022-07-07 | 2022-10-04 | 华南理工大学 | 一种手机锂电池柔性极耳-塑壳的机械臂装配系统及方法 |
CN115139074B (zh) * | 2022-07-07 | 2023-11-03 | 华南理工大学 | 一种手机锂电池柔性极耳-塑壳的机械臂装配系统及方法 |
CN116147506A (zh) * | 2023-04-23 | 2023-05-23 | 钛玛科(北京)工业科技有限公司 | 一种双ccd相机测宽方法及系统 |
CN116878387A (zh) * | 2023-09-06 | 2023-10-13 | 北京华卓精科科技股份有限公司 | 上下对准视觉装置的标定方法、标定系统及装置 |
CN116878387B (zh) * | 2023-09-06 | 2023-11-24 | 北京华卓精科科技股份有限公司 | 上下对准视觉装置的标定方法、标定系统及装置 |
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