CN112995863A - Plane bending sounding type loudspeaker, MEMS micro-loudspeaker and manufacturing method - Google Patents
Plane bending sounding type loudspeaker, MEMS micro-loudspeaker and manufacturing method Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 46
- 238000005452 bending Methods 0.000 title claims abstract description 22
- 244000126211 Hericium coralloides Species 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 48
- 235000014676 Phragmites communis Nutrition 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 28
- 239000010408 film Substances 0.000 claims description 25
- 238000007738 vacuum evaporation Methods 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 230000004044 response Effects 0.000 abstract description 3
- 238000005096 rolling process Methods 0.000 abstract description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 4
- 235000017491 Bambusa tulda Nutrition 0.000 description 4
- 241001330002 Bambuseae Species 0.000 description 4
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 4
- 239000011425 bamboo Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000005520 electrodynamics Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
The invention discloses a plane bending sound-producing type loudspeaker, an MEMS micro-loudspeaker and a manufacturing method. The plane bending sounding type loudspeaker comprises a vibrating body, wherein the vibrating body comprises an upper electrode, a lower electrode and a piezoelectric body combination between the two electrodes, the electrodes comprise a flexible vibrating piece and two comb-shaped electrodes formed on the surface of the flexible vibrating piece, the comb-shaped electrodes are provided with a plurality of mutually parallel comb teeth, and the piezoelectric body combination comprises a plurality of piezoelectric bodies which are arranged in parallel; the upper surface and the lower surface of each piezoelectric body are respectively and electrically connected with each comb tooth of the comb-shaped electrode on the surfaces of the upper electrode and the lower electrode; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibrating body is driven to vibrate and produce sound. The loudspeaker has the advantages of low power consumption, no front chamber effect, wide frequency response and the like, has the advantages of flexibility, bending and rolling into a shaft shape, and is suitable for an ultra-miniature loudspeaker.
Description
Technical Field
The invention relates to the technical field of speakers, in particular to a plane bending sounding type speaker, an MEMS micro-speaker and a manufacturing method.
Background
The conventional loudspeakers are mostly moving-coil electrodynamic loudspeakers, which are produced by driving a vibrating basin to vibrate under the action of an ampere force of a current-carrying coil in a magnetic field, but some loudspeakers cannot meet the requirements, such as: for Micro-miniature speakers including MEMS (Micro-Electro-Mechanical systems) Micro-speakers, it is difficult to place a magnet in a small space, so that it is not suitable for Micro-speakers, and various improvements such as electrostatic driving, electret driving, piezoelectric driving, and ferroelectric driving are available, but there are no products that are superior in many aspects. And: the conventional moving-coil type electrodynamic loudspeaker is inflexible, and cannot be bent and rotated into a shaft shape, namely, the conventional moving-coil type electrodynamic loudspeaker cannot be unfolded or rolled into a shaft shape.
Disclosure of Invention
The invention aims to: a piezoelectric-driven plane bending sound-generating type speaker and a manufacturing method thereof, and an MEMS micro-speaker and a manufacturing method thereof are provided.
In a first aspect of the present invention, there is provided a flat bending sound type speaker, including a vibrating body; the vibrating body comprises an upper electrode, a lower electrode and a piezoelectric body combination arranged between the upper electrode and the lower electrode, the electrodes comprise a flexible vibrating piece and two opposite comb-shaped electrodes formed on the surface of the flexible vibrating piece, each comb-shaped electrode is provided with a plurality of mutually parallel comb teeth, and the piezoelectric body combination comprises a plurality of piezoelectric bodies which are arranged in parallel; the upper surface and the lower surface of each piezoelectric body are respectively and electrically connected with each comb tooth of the comb-shaped electrode on the surfaces of the upper electrode and the lower electrode; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibrating body is driven to vibrate and produce sound.
The two electrodes are divided into an upper electrode and a lower electrode, the upper electrode comprises a first flexible vibrating reed, the lower surface of the first flexible vibrating reed is provided with a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned on the left side and the right side and are opposite to each other, the lower electrode comprises a second flexible vibrating reed, and the upper surface of the second flexible vibrating reed is provided with a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned on the left side and the right side and are opposite to each other; the piezoelectric body combination comprises a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies, and the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one; the upper surface and the lower surface of the first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of the second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input end, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input end; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
The vibrating body can be curled along the length direction, and the comb teeth of each comb-shaped electrode and each piezoelectric body are arranged along the length direction of the vibrating body and are perpendicular to the length direction of the vibrating body; further, the comb teeth of each comb-shaped electrode are equal in length, or the length of the comb teeth of each comb-shaped electrode gradually decreases or gradually increases along the length direction of the vibrating body.
Further, the flexible vibrating reed is made of a thin sheet or a thin film material, the comb-shaped electrode is formed on the surface of the flexible vibrating reed in a vacuum evaporation or sputtering mode, the piezoelectric body is made of an inflexible thin sheet piezoelectric material or a flexible thin film piezoelectric material, and the piezoelectric body and the comb-shaped electrode on the flexible vibrating reed are fixed through bonding of a conductive adhesive.
In a second aspect of the present invention, there is provided a MEMS micro-speaker, comprising a vibrating body; the vibrating body includes upper and lower electrodes and a piezoelectric material layer; the lower electrode comprises a silicon film and two opposite comb-shaped electrodes formed on the surface of the silicon film, and the comb-shaped electrodes are provided with a plurality of mutually parallel comb teeth; the piezoelectric material layer comprises a plurality of piezoelectric bodies which are arranged in parallel and respectively formed on two comb-shaped electrodes; the upper electrode comprises two opposite comb-shaped electrodes formed on the piezoelectric material layer; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibration body is driven to vibrate and produce sound.
The two comb-shaped electrodes of the lower electrode are a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite, and the two comb-shaped electrodes of the upper electrode are a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite; the piezoelectric material layer comprises a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies, the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one, wherein the upper surface and the lower surface of each first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of each second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input end, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input end; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
Furthermore, the comb-shaped electrode of the lower electrode is formed on the surface of the silicon film in a vacuum evaporation or sputtering mode, the piezoelectric body is formed on the comb-shaped electrode of the lower electrode in a sputtering or coating mode by using a piezoelectric material, and the comb-shaped electrode of the upper electrode is formed on the piezoelectric material layer in a vacuum evaporation or sputtering mode.
The third aspect of the present invention provides a method for manufacturing a planar bending sound-emitting speaker, comprising the steps of: manufacturing an upper electrode: taking a flexible vibrating reed, and manufacturing two groups of comb-shaped electrodes on the lower surface of the flexible vibrating reed, wherein the two groups of comb-shaped electrodes comprise an upper left comb-shaped electrode and an upper right comb-shaped electrode which are respectively positioned on the left side and the right side of the flexible vibrating reed and are opposite to each other, so as to obtain an upper electrode; manufacturing a lower electrode: preparing another flexible vibrating piece, and manufacturing two groups of comb-shaped electrodes on the upper surface of the flexible vibrating piece, wherein the two groups of comb-shaped electrodes comprise a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side of the flexible vibrating piece and are opposite to each other, so as to obtain a lower electrode; arranging a piezoelectric body: a plurality of first piezoelectric bodies are arranged on the left upper comb-shaped electrode on the lower surface of the upper electrode, and a plurality of second piezoelectric bodies are arranged on the left lower comb-shaped electrode on the upper surface of the lower electrode; forming a vibrating body: the upper electrode with the first piezoelectric bodies and the lower electrode with the second piezoelectric bodies are relatively fixed, so that the lower surfaces of the first piezoelectric bodies are connected with the right lower comb-shaped electrode on the upper surface of the lower electrode, and the upper surfaces of the second piezoelectric bodies are connected with the right upper comb-shaped electrode on the lower surface of the upper electrode; electrically connecting the upper left comb electrode and the lower left comb electrode to a first input terminal, and electrically connecting the upper right comb electrode and the lower right comb electrode to a second input terminal; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
Further, the flexible vibrating reed is made of a thin sheet or a thin film material, the comb-shaped electrode is formed on the surface of the flexible vibrating reed in a vacuum evaporation or sputtering mode, the piezoelectric body is made of an inflexible thin sheet piezoelectric material or a flexible thin film piezoelectric material, and the piezoelectric body and the comb-shaped electrode on the flexible vibrating reed are fixed through bonding of a conductive adhesive.
The fourth aspect of the present invention provides a method for manufacturing an MEMS micro-speaker, comprising the steps of: manufacturing a lower electrode: manufacturing a silicon film, manufacturing two comb-shaped electrodes on the surface of the silicon film by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side of the flexible vibrating reed and are opposite to each other, and obtaining a lower electrode; setting a piezoelectric material layer: arranging piezoelectric material layers on a left lower comb-shaped electrode and a right lower comb-shaped electrode of a lower electrode in a sputtering or coating mode to form a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies respectively, wherein the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one; manufacturing an upper electrode: manufacturing two comb-shaped electrodes on the surface of the piezoelectric material layer by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite to each other, and obtaining an upper electrode; the upper surface and the lower surface of the first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of the second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input terminal, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input terminal.
According to the technical scheme, the embodiment of the invention has the following advantages:
the invention relates to a loudspeaker, wherein a vibrating body is formed by combining an upper electrode, a lower electrode and a middle piezoelectric body, and the whole vibrating body is driven by the piezoelectric body to bend and deform to push an air medium to move so as to realize sound production. The loudspeaker has the advantages of low power consumption, flexibility, no front chamber effect, wide frequency response and the like, can be made into a flexible, bendable and foldable form in a rolling mode, and can be used for manufacturing ultra-miniature loudspeakers, such as MEMS micro-loudspeakers.
Drawings
In order to more clearly illustrate the technical solution of the embodiment of the present invention, the following briefly introduces the embodiment and the drawings used in the description of the prior art.
Fig. 1 is a schematic structural view of a speaker provided in an embodiment of the present invention;
fig. 2 is a sectional structural view of a speaker provided in an embodiment of the present invention;
FIG. 3 is a diagram of a comb-shaped electrode on the upper electrode surface of a speaker according to an embodiment of the present invention;
FIG. 4 is a distribution diagram of comb-shaped electrodes on the surface of the lower electrode of the speaker according to the embodiment of the present invention;
FIG. 5 is a diagram showing the relative relationship between comb-shaped electrodes on the upper and lower electrodes of a speaker according to an embodiment of the present invention;
fig. 6 is a schematic view showing bending deformation of the vibrating body of the speaker according to the embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first," "second," "third," and the like in the description and in the claims, and in the above-described drawings, are used for distinguishing between different objects and not for describing a particular order. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
The following will explain details by way of specific examples.
Referring to fig. 1 to 4, an embodiment of the present invention provides a piezoelectric-driven flat bending sound-generating speaker (hereinafter referred to as a speaker).
The main structure of the loudspeaker comprises a vibrating body, wherein the vibrating body comprises an upper electrode, a lower electrode and a piezoelectric body combination arranged between the two electrodes. Each electrode includes a flexible vibrating piece (sheet or film) and two opposing comb-shaped electrodes formed on a surface of the flexible vibrating piece, each comb-shaped electrode having a plurality of comb teeth (or stripes) parallel to each other. The piezoelectric body combination comprises a plurality of sheet-shaped (film-shaped) piezoelectric bodies which are arranged in parallel. The upper and lower surfaces of each piezoelectric body are respectively and electrically connected with each comb tooth of the comb-shaped electrode on the surfaces of the upper and lower electrodes. When audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibrating body is driven to vibrate and produce sound.
The term "different polarity" means that the voltage polarities are opposite, and for example, when the voltage polarity of one piezoelectric body is positive on the upper surface and negative on the lower surface, the voltage polarity of the adjacent piezoelectric body is negative on the upper surface and positive on the lower surface. The polarity difference of any two adjacent piezoelectric bodies can be ensured by setting the connection relationship between each comb-shaped electrode and each piezoelectric body.
In one embodiment, the two electrodes are divided into an upper electrode 10 and a lower electrode 20.
The upper electrode 10 includes a first flexible vibration sheet 11, and a left upper comb-shaped electrode a is disposed on a lower surface of the first flexible vibration sheet 11 and opposite to the first flexible vibration sheet on left and right sides thereofOn the upper part12 and an upper right comb electrode B On the upper part13, the distribution of which is shown in fig. 3; the lower electrode 20 includes a second flexible vibration sheet 21, and a left lower comb-shaped electrode a is disposed on an upper surface of the second flexible vibration sheet 21 and opposite to the left and right sides of the second flexible vibration sheet Lower part22 and a lower right comb electrode B Lower part23, the distribution of which is shown in fig. 4.
The piezoelectric body combination 30 includes a plurality of first piezoelectric bodies 31 and a plurality of second piezoelectric bodies 32, and the first piezoelectric bodies 31 and the second piezoelectric bodies 32 are arranged at intervals one by one; wherein, the upper and lower surfaces of the first piezoelectric body 31 are respectively connected with the upper left comb-shaped electrode aOn the upper part12 and the lower right comb electrode B Lower part13, and the upper and lower surfaces of the second piezoelectric body 32 are electrically connected to the upper right comb-shaped electrode B On the upper part22 and the left lower comb electrode electrical connection A Lower part23 are electrically connected.
The upper left comb electrode AOn the upper partAnd the left lower comb electrode ALower partElectrically connected to the first input end A and the upper right comb-shaped electrode BOn the upper partAnd the right lower comb electrode BLower partIs electrically connected to the second input terminal B. The first input terminal a and the second input terminal B are used as positive and negative input terminals for receiving externally applied audio driving voltages, and the polarities of the voltages of a and B are opposite, so that it is ensured that the polarities of any two adjacent piezoelectric bodies are different, or the polarities of the first piezoelectric body and the second piezoelectric body are different. If ordered, the odd numbered piezoelectrics are all of the same polarity, and the even numbered piezoelectrics are of different polarity. Simultaneously, the correspondence between the upper electrode and the lower electrode is satisfiedRelationship, i.e. AOn the upper partAnd BLower partRelative (i.e. A)On the upper partAnd BLower partRespectively connected with two ends of the same piezoelectric body), BOn the upper partAnd ALower partRelative (i.e. B)On the upper partAnd ALower partRespectively connected to both ends of the same piezoelectric body), as shown in fig. 5.
The technical principle of the loudspeaker is as follows: in each comb-shaped electrode, AOn the upper partAnd ALower partAre connected to form a terminal A, a terminal BOn the upper partAnd BLower partThe phase connection constitutes a terminal B, and when an external audio drive voltage is input through a terminal A, B, a voltage is applied across each piezoelectric body. When a voltage is applied in the axial direction of the piezoelectric body (i.e., in the direction perpendicular to the plane of the flexible vibrating reed), the piezoelectric body is deformed in the axial direction, the magnitude of the deformation is determined by the piezoelectric coefficient d33 of the piezoelectric body, and when the applied voltage is an alternating signal voltage, the deformation change is changed in accordance with the alternating signal voltage. Thus, when an ac audio voltage is applied, each piezoelectric body bends the vibrating body, as shown in fig. 6. The air outside the 'vibrating body' is moved along with the 'vibrating body', and is driven to produce sound.
In the speaker of the present invention, the electrode is a flexible vibrating piece (i.e., a flexible sheet or film) having a comb-shaped electrode formed on the surface thereof, and the piezoelectric body is a plurality of dispersed sheet-like (or film-like) piezoelectric bodies, so that the vibrating body is flexible. In general, the vibrating body may be formed in a long bar shape (or a rectangular shape), and the comb teeth of each comb-shaped electrode and each piezoelectric body are arranged along the length direction of the vibrating body and perpendicular to the length direction of the vibrating body, so that the vibrating body can be curled (bent) along the length direction thereof. When the vibrating body is used, the vibrating body can be stretched, and two ends along the length direction are fixed, so that the vibrating body can work to produce sound; when not in use, the vibrating body can be rolled into a shaft shape for storage. Wherein, for convenient use, the two ends of the vibrating body along the length direction can be respectively provided with a fixed shaft or a frame edge. Therefore, the loudspeaker of the invention is a novel loudspeaker which is flexible, bendable and capable of being rolled into a shaft shape.
In the speaker of the present invention, the comb teeth of the comb electrodes may be equal in length, or the comb teeth of the comb electrodes may be different in length, and may be gradually decreased or gradually increased along the length direction of the vibrating body, for example.
The loudspeaker of the present invention may be in the form of a conventional planar loudspeaker. The flexible vibrating reed can be made of thin sheets or thin film materials, the comb-shaped electrode can be formed on the surface of the flexible vibrating reed by vacuum evaporation or sputtering, the piezoelectric body and the comb-shaped electrode on the flexible vibrating reed can be fixed through conductive adhesive, and the whole electrode and the piezoelectric body can be integrally adhered through a thermosetting or adhesive method, so that a vibrating body which is a main body part of the loudspeaker is formed.
In some embodiments, the piezoelectric body may be made of a non-flexible sheet-like piezoelectric material (i.e., a piezoelectric sheet), and a plurality of piezoelectric sheets are independent of each other, so that the vibrating body is made to have a rollable structure like a "bamboo slip" type or a "bamboo curtain" type.
In some embodiments, a flexible film-like piezoelectric material (i.e., a piezoelectric film) may be used as the piezoelectric body, and the vibrating body thus obtained has a flexible and rollable structure. The individual piezoelectric bodies may be independent of each other, or may be a single-piece thin film, that is, all the first piezoelectric bodies may have a single-piece thin film structure, and all the second piezoelectric bodies may have a single-piece thin film structure. The flexibility and rollability of the novel speaker thus manufactured, which is flexible, bendable, and rollable in a shaft shape, are more excellent.
The basic structure of the speaker according to the embodiment of the present invention is explained above.
The embodiment of the invention also provides a manufacturing method of the loudspeaker, which mainly comprises the following steps:
s1, manufacturing an upper electrode and a lower electrode: two rectangular flexible sheets (films) with the same shape are taken as a first flexible vibrating reed and a second flexible vibrating reed respectively, comb-shaped electrodes are manufactured on the surfaces of the two rectangular flexible sheets respectively, and an upper electrode and a lower electrode are formed. The comb-shaped electrodes on the upper electrode and the lower electrode are provided with parallel comb teeth (or parallel wide stripes) which are at equal intervals and are parallel to the short side of the rectangle.
Two groups of comb electrodes are manufactured on the lower surface of the first flexible vibrating reed and comprise upper left comb electrodes A which are respectively positioned on the left side and the right side of the first flexible vibrating reed and are opposite to each otherOn the upper partAnd an upper right comb electrode BOn the upper part(ii) a Two groups of comb-shaped electrodes are manufactured on the upper surface of the second flexible vibrating reed, and the two groups of comb-shaped electrodes comprise a left lower comb-shaped electrode A which is respectively positioned at the left side and the right side of the second flexible vibrating reed and is opposite to the left lower comb-shaped electrode ALower partAnd a lower right comb electrode BLower part。
S2, providing a piezoelectric body: left upper comb electrode A on the lower surface of the upper electrodeOn the upper partA plurality of first piezoelectrics are arranged on the upper surface of the lower electrode, and a left lower comb-shaped electrode A is arranged on the upper surface of the lower electrodeLower partAnd a plurality of second piezoelectrics are arranged on the piezoelectric ceramic.
Lower surface of the upper electrode, upper left comb electrode AOn the upper partEach comb tooth (stripe) and the upper right comb electrode B ofOn the upper partThe comb teeth (stripes) are arranged at intervals one by one and respectively form odd-numbered stripes and even-numbered stripes; similarly, on the upper surface of the lower electrode, a left lower comb electrode ALower partEach comb tooth (stripe) and the right lower comb electrode BLower partThe comb teeth (stripes) are arranged at intervals and respectively are even-numbered stripes and odd-numbered stripes.
The step may specifically be: odd-order stripes A of comb-shaped electrode on upper electrodeOn the upper partA piezoelectric thin sheet (thin film), namely a first piezoelectric body, is adhered to the upper left comb-shaped electrode by conductive adhesive; and, even-numbered stripes A of comb-shaped electrode on the lower electrodeLower partA piezoelectric sheet (film), i.e., a second piezoelectric body, is attached to the upper surface (left lower comb electrode) by a conductive adhesive.
S3, manufacturing a vibrating body: the vibrating body is produced by joining upper and lower electrodes, which sandwich a sheet-like (thin-film) piezoelectric body, accurately in face-to-face contact with each other, and integrally connecting the upper and lower electrodes and the piezoelectric body.
The upper and lower electrodes with comb electrodes may be brought into contact with and closely contact with the upper and lower surfaces of the piezoelectric body by a method such as thermal curing or conductive adhesive bonding, and the upper and lower electrodes and the piezoelectric body may be integrally connected.
Specifically, an upper electrode with a first piezoelectric body and a lower electrode with a second piezoelectric body are relatively fixed, so that the lower surfaces of a plurality of first piezoelectric bodies and a right lower comb-shaped electrode B of the upper surface of the lower electrode are fixedLower partA right upper comb-shaped electrode B connected with the upper surfaces of the plurality of second piezoelectric bodies and the lower surface of the upper electrodeOn the upper partConnecting; then, the upper left comb electrode AOn the upper partAnd a left lower comb electrode ALower partConnected to the first input terminal A, and the upper right comb electrode BOn the upper partAnd a lower right comb electrode BLower partIs electrically connected to the second input terminal B.
As above, the speaker of the embodiment of the present invention was manufactured.
When handle AOn the upper partAnd ALower part，BOn the upper partAnd BLower partThe terminals A and B are connected to each other, and when an external audio drive voltage is input through the terminal A, B, a voltage is applied across each piezoelectric body. When a voltage is applied in the axial direction of the piezoelectric body (i.e., in the direction perpendicular to the plane of the flexible vibrating reed), the piezoelectric body is deformed in the axial direction, the magnitude of the deformation is determined by the piezoelectric coefficient d33 of the piezoelectric body, and when the applied voltage is an alternating signal voltage, the deformation change is changed in accordance with the alternating signal voltage. Thus, when an ac audio voltage is applied, each piezoelectric body bends the vibrating body, as shown in fig. 6. The air outside the 'vibrating body' is moved along with the 'vibrating body', and is driven to produce sound. Furthermore, fixed frame edges (or fixed shafts) which can be fixed can be arranged at two short edges of the vibrating body, the vibrating body can be unfolded and fixed to make the vibrating body generate sound when in use, and the vibrating body can be rolled into a shaft shape to be stored when not in use.
In some embodiments, the comb teeth of each comb electrode of the loudspeaker may be of equal length.
In other embodiments, the lengths of the comb teeth of each comb-shaped electrode of the speaker may be different, for example, may gradually decrease or gradually increase along the length direction of the vibrating body. That is, the length of each comb tooth of the comb-shaped electrodes on the upper and lower electrodes changes from parallel wide stripes parallel to the short sides of the rectangle at equal intervals to parallel wide stripes with gradually changing lengths which are changed from short (long) to long (short).
In some embodiments, a fixed shaft (or frame) can be fixed to each of the two short sides of the rectangular flexible vibrator, and the vibrator can be rolled up and stored when not in use. When the vibrating body is used, the vibrating body needs to be spread out flatly and fixed at two ends to make the vibrating body generate sound, and the vibrating body is preferably fixed after being tensioned.
In some embodiments, the flexible vibration plate may be a thin sheet or a thin film, the comb-shaped electrode may be formed by vacuum evaporation or sputtering of an electrode material on a surface of the flexible vibration plate, and the piezoelectric body and the comb-shaped electrode on the flexible vibration plate may be fixed by bonding with a conductive adhesive.
In some embodiments, the piezoelectric body may be made of a non-flexible sheet-like piezoelectric material (i.e., a piezoelectric sheet), and a plurality of piezoelectric sheets are independent of each other, so that the vibrating body is made to have a rollable structure like a "bamboo slip" type or a "bamboo curtain" type.
In some embodiments, a flexible film-like piezoelectric material (piezoelectric film) may be used as the piezoelectric body, and the vibrating body thus obtained has a flexible and rollable structure. The individual piezoelectric bodies may be independent of each other, or may be a single-piece thin film, that is, all the first piezoelectric bodies may have a single-piece thin film structure, and all the second piezoelectric bodies may have a single-piece thin film structure. The flexibility and rollability of the novel speaker thus manufactured, which is flexible, bendable, and rollable in a shaft shape, are more excellent.
The method of manufacturing the speaker according to the embodiment of the present invention is explained above.
It should be noted that the speaker of the present invention may be an ultra-miniature speaker such as an MEMS micro-speaker. In this form, the flexible vibrating reed may be a silicon film, the comb-like electrode may be formed by vacuum evaporation or sputtering of an electrode material on a surface of the silicon film, and the piezoelectric body may be formed by sputtering or coating of a piezoelectric material on the comb-like electrode.
In one embodiment, the present invention provides a MEMS micro-speaker, comprising a vibrating body; the vibrating body includes upper and lower electrodes and a piezoelectric material layer; the lower electrode comprises a silicon film and two opposite comb-shaped electrodes formed on the surface of the silicon film, and the comb-shaped electrodes are provided with a plurality of mutually parallel comb teeth; the piezoelectric material layer comprises a plurality of piezoelectric bodies which are arranged in parallel and respectively formed on two comb-shaped electrodes; the upper electrode comprises two opposite comb-shaped electrodes formed on the piezoelectric material layer; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibration body is driven to vibrate and produce sound.
Furthermore, the two comb-shaped electrodes of the lower electrode are a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite to each other, and the two comb-shaped electrodes of the upper electrode are a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite to each other; the piezoelectric material layer comprises a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies, the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one, wherein the upper surface and the lower surface of each first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of each second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input end, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input end; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
Furthermore, the comb-shaped electrode of the lower electrode is formed on the surface of the silicon film in a vacuum evaporation or sputtering mode, the piezoelectric body is formed on the comb-shaped electrode of the lower electrode in a sputtering or coating mode by using a piezoelectric material, and the comb-shaped electrode of the upper electrode is formed on the piezoelectric material layer in a vacuum evaporation or sputtering mode.
The structure of the MEMS micro-speaker according to the present invention is explained above. The structure of the loudspeaker is similar to that of the plane bending sound-producing loudspeaker, and the loudspeaker is mainly distinguished by two points, namely, the loudspeaker is much smaller in size, and only has one silicon film, and the plane bending sound-producing loudspeaker is provided with two layers of flexible vibrating pieces.
The manufacturing method of the MEMS micro-speaker is similar to that of a plane bending sound production type speaker, and the manufacturing method mainly comprises the following steps: firstly, forming a comb-shaped electrode on a vibrating membrane (such as a silicon membrane) through a vacuum evaporation or sputtering process to prepare a lower electrode; then, the piezoelectric material is sputtered or coated, and then a comb-shaped electrode is formed by a vacuum evaporation or sputtering process, so that the upper electrode is manufactured.
In a specific embodiment, the present invention provides a method for manufacturing a MEMS micro-speaker, comprising the steps of:
manufacturing a lower electrode: manufacturing a silicon film, manufacturing two comb-shaped electrodes on the surface of the silicon film by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side of the flexible vibrating reed and are opposite to each other, and obtaining a lower electrode;
setting a piezoelectric material layer: arranging piezoelectric material layers on a left lower comb-shaped electrode and a right lower comb-shaped electrode of a lower electrode in a sputtering or coating mode to form a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies respectively, wherein the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one;
manufacturing an upper electrode: manufacturing two comb-shaped electrodes on the surface of the piezoelectric material layer by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite to each other, and obtaining an upper electrode; the upper surface and the lower surface of the first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of the second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input terminal, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input terminal.
Similar to the aforementioned flat bending sound type speaker, it is necessary to satisfy the correspondence between the upper and lower electrodes, i.e., aOn the upper partAnd BLower partRelative (i.e. A)On the upper partAnd BLower partRespectively connected with two ends of the same piezoelectric body), BOn the upper partAnd ALower partRelative (i.e. B)On the upper partAnd ALower partRespectively connected to both ends of the same piezoelectric body). A. theOn the upper partAnd ALower part，BOn the upper partAnd BLower partAre respectively connected to form A and B ends. When an external audio driving voltage is input through the A, B terminal, a voltage is applied to both sides of the piezoelectric body. When a voltage is applied in the direction of the surface axis of the piezoelectric material layer (i.e., in the direction perpendicular to the plane of the silicon film), the piezoelectric material is deformed in the axial direction, and the magnitude of the deformation is determined by the piezoelectric coefficient d33 of the piezoelectric material. Thus, when an ac audio voltage is applied, each piezoelectric body bends the vibrating body, as shown in fig. 6. The air outside the 'vibrating body' is moved along with the 'vibrating body', and is driven to produce sound.
The technical solutions adopted by the planar bending acoustic speaker, the MEMS micro-speaker and the manufacturing method according to the embodiments of the present invention are described in detail above. The key of the technical scheme of the invention comprises the following steps:
first, the speaker of the present invention is a piezoelectric-driven, plane bending sound-generating type speaker (MEMS micro speaker). When an external audio driving voltage is input, a voltage is applied across the piezoelectric body. When a voltage is applied in the direction of the axis of the piezoelectric body (i.e., in the direction perpendicular to the plane of the flexible vibrating reed), the piezoelectric body is deformed in the axial direction, and the magnitude of the deformation is determined by the piezoelectric coefficient d33 of the piezoelectric body. Thus, when an ac audio voltage is applied, the piezoelectric body bends the vibrating body. Therefore, when the alternating voltage of the audio frequency is applied, each piezoelectric body can make the vibration body bend and deform, and further air outside the vibration body moves along with the vibration body, so that the vibration body is driven to generate sound.
In addition, the loudspeaker of the present invention is a novel loudspeaker which is flexible, bendable and capable of being rolled into a shaft shape by adopting a flexible structure. The comb teeth of the comb-shaped electrodes on the upper electrode and the lower electrode can be of equal length or unequal lengths, for example, the comb teeth gradually increase or gradually decrease along the length direction of the vibrator.
Next, the speaker of the present invention may be a speaker in which a piezoelectric combination provided between upper and lower electrodes is a plurality of piezoelectric bodies that are separated (independent from each other) or an integrated piezoelectric body in a full-sheet (thin-film) shape.
Secondly, the structure of the loudspeaker of the invention is suitable for ultra-miniature loudspeaker (including MEMS micro-loudspeaker), and is not limited to the conventional plane loudspeaker.
Finally, the invention has the following beneficial effects:
the invention relates to a loudspeaker, wherein a vibrating body is formed by combining an upper electrode, a lower electrode and a middle piezoelectric body, and the whole vibrating body is driven by the piezoelectric body to bend and deform to push an air medium to move so as to realize sound production. The loudspeaker has the advantages of low power consumption, flexibility, no front chamber effect, wide frequency response and the like, can be made into a flexible, bendable and foldable form in a rolling mode, and can be used for manufacturing ultra-miniature loudspeakers, such as MEMS micro-loudspeakers.
The technical solution of the present invention is explained in detail by the specific embodiments above. In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to the related descriptions of other embodiments.
It should be understood that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; the technical solutions described in the above embodiments can be modified or part of the technical features can be equivalently replaced by those skilled in the art; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the spirit and the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A flat bending sound-producing type speaker is characterized by comprising a vibrating body; the vibrating body comprises an upper electrode, a lower electrode and a piezoelectric body combination arranged between the upper electrode and the lower electrode, the electrodes comprise a flexible vibrating piece and two opposite comb-shaped electrodes formed on the surface of the flexible vibrating piece, each comb-shaped electrode is provided with a plurality of mutually parallel comb teeth, and the piezoelectric body combination comprises a plurality of piezoelectric bodies which are arranged in parallel; the upper surface and the lower surface of each piezoelectric body are respectively and electrically connected with each comb tooth of the comb-shaped electrode on the surfaces of the upper electrode and the lower electrode; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibrating body is driven to vibrate and produce sound.
2. The planar bending sound-emitting speaker according to claim 1,
the two electrodes are divided into an upper electrode and a lower electrode, the upper electrode comprises a first flexible vibrating reed, the lower surface of the first flexible vibrating reed is provided with a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned on the left side and the right side and are opposite, the lower electrode comprises a second flexible vibrating reed, and the upper surface of the second flexible vibrating reed is provided with a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned on the left side and the right side and are opposite;
the piezoelectric body combination comprises a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies, and the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one; the upper surface and the lower surface of the first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of the second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode;
the upper left comb electrode and the lower left comb electrode are electrically connected to a first input end, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input end; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
3. The planar bending sound-emitting speaker according to claim 1,
the vibrating body can be curled along the length direction, and the comb teeth of each comb-shaped electrode and each piezoelectric body are arranged along the length direction of the vibrating body and are perpendicular to the length direction of the vibrating body;
the comb teeth of each comb electrode are equal in length, or the length of the comb teeth of each comb electrode gradually decreases or gradually increases along the length direction of the vibrating body.
4. The planar bending sound-emitting speaker according to claim 1,
the flexible vibrating reed is made of thin sheets or thin film materials, the comb-shaped electrode is formed on the surface of the flexible vibrating reed in a vacuum evaporation or sputtering mode, the piezoelectric body is made of non-flexible thin sheet piezoelectric materials or flexible thin film piezoelectric materials, and the piezoelectric body and the comb-shaped electrode on the flexible vibrating reed are fixed through bonding of conductive adhesive.
5. A MEMS micro-speaker is characterized by comprising a vibrating body;
the vibrating body includes upper and lower electrodes and a piezoelectric material layer; the lower electrode comprises a silicon film and two opposite comb-shaped electrodes formed on the surface of the silicon film, and the comb-shaped electrodes are provided with a plurality of mutually parallel comb teeth; the piezoelectric material layer comprises a plurality of piezoelectric bodies which are arranged in parallel and respectively formed on two comb-shaped electrodes; the upper electrode comprises two opposite comb-shaped electrodes formed on the piezoelectric material layer; when audio driving voltage is applied through each comb-shaped electrode, the polarities of any two adjacent piezoelectric bodies are different, each piezoelectric body generates deformation, and the deformation directions of the adjacent piezoelectric bodies are opposite, so that the vibration body is driven to vibrate and produce sound.
6. The MEMS microspeaker of claim 5,
the two comb-shaped electrodes of the lower electrode are a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite, and the two comb-shaped electrodes of the upper electrode are a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite;
the piezoelectric material layer comprises a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies, the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one, wherein the upper surface and the lower surface of each first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of each second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input end, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input end; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions.
7. The MEMS microspeaker of claim 5,
the comb-shaped electrode of the lower electrode is formed on the surface of the silicon film in a vacuum evaporation or sputtering mode, the piezoelectric body is formed on the comb-shaped electrode of the lower electrode in a sputtering or coating mode, and the comb-shaped electrode of the upper electrode is formed on the piezoelectric material layer in a vacuum evaporation or sputtering mode.
8. A method for manufacturing a plane bending sound-producing loudspeaker is characterized by comprising the following steps:
manufacturing an upper electrode: taking a flexible vibrating reed, and manufacturing two groups of comb-shaped electrodes on the lower surface of the flexible vibrating reed, wherein the two groups of comb-shaped electrodes comprise an upper left comb-shaped electrode and an upper right comb-shaped electrode which are respectively positioned on the left side and the right side of the flexible vibrating reed and are opposite to each other, so as to obtain an upper electrode;
manufacturing a lower electrode: preparing another flexible vibrating piece, and manufacturing two groups of comb-shaped electrodes on the upper surface of the flexible vibrating piece, wherein the two groups of comb-shaped electrodes comprise a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side of the flexible vibrating piece and are opposite to each other, so as to obtain a lower electrode;
arranging a piezoelectric body: a plurality of first piezoelectric bodies are arranged on the left upper comb-shaped electrode on the lower surface of the upper electrode, and a plurality of second piezoelectric bodies are arranged on the left lower comb-shaped electrode on the upper surface of the lower electrode;
forming a vibrating body: the upper electrode with the first piezoelectric bodies and the lower electrode with the second piezoelectric bodies are relatively fixed, so that the lower surfaces of the first piezoelectric bodies are connected with the right lower comb-shaped electrode on the upper surface of the lower electrode, and the upper surfaces of the second piezoelectric bodies are connected with the right upper comb-shaped electrode on the lower surface of the upper electrode; electrically connecting the upper left comb electrode and the lower left comb electrode to a first input terminal, and electrically connecting the upper right comb electrode and the lower right comb electrode to a second input terminal; when the first input end and the second input end are applied with audio driving voltage, the first piezoelectric body and the second piezoelectric body generate deformation in opposite directions, and the vibration body is driven to vibrate and generate sound.
9. The method of claim 8,
the flexible vibrating reed is made of thin sheets or thin film materials, the comb-shaped electrode is formed on the surface of the flexible vibrating reed in a vacuum evaporation or sputtering mode, the piezoelectric body is made of non-flexible thin sheet piezoelectric materials or flexible thin film piezoelectric materials, and the piezoelectric body and the comb-shaped electrode on the flexible vibrating reed are fixed through bonding of conductive adhesive.
10. A manufacturing method of an MEMS micro-speaker is characterized by comprising the following steps:
manufacturing a lower electrode: manufacturing a silicon film, manufacturing two comb-shaped electrodes on the surface of the silicon film by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left lower comb-shaped electrode and a right lower comb-shaped electrode which are respectively positioned at the left side and the right side of the flexible vibrating reed and are opposite to each other, and obtaining a lower electrode;
setting a piezoelectric material layer: arranging piezoelectric material layers on a left lower comb-shaped electrode and a right lower comb-shaped electrode of a lower electrode in a sputtering or coating mode to form a plurality of first piezoelectric bodies and a plurality of second piezoelectric bodies respectively, wherein the first piezoelectric bodies and the second piezoelectric bodies are arranged at intervals one by one;
manufacturing an upper electrode: manufacturing two comb-shaped electrodes on the surface of the piezoelectric material layer by a vacuum evaporation or sputtering process, wherein the two comb-shaped electrodes comprise a left upper comb-shaped electrode and a right upper comb-shaped electrode which are respectively positioned at the left side and the right side and are opposite to each other, and obtaining an upper electrode; the upper surface and the lower surface of the first piezoelectric body are respectively and electrically connected with the upper left comb-shaped electrode and the lower right comb-shaped electrode, and the upper surface and the lower surface of the second piezoelectric body are respectively and electrically connected with the upper right comb-shaped electrode and the lower left comb-shaped electrode; the upper left comb electrode and the lower left comb electrode are electrically connected to a first input terminal, and the upper right comb electrode and the lower right comb electrode are electrically connected to a second input terminal.
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