CN112994589A - Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof - Google Patents

Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof Download PDF

Info

Publication number
CN112994589A
CN112994589A CN202110155540.7A CN202110155540A CN112994589A CN 112994589 A CN112994589 A CN 112994589A CN 202110155540 A CN202110155540 A CN 202110155540A CN 112994589 A CN112994589 A CN 112994589A
Authority
CN
China
Prior art keywords
metamaterial
heat radiator
photovoltaic cell
power generation
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110155540.7A
Other languages
Chinese (zh)
Other versions
CN112994589B (en
Inventor
赵长颖
王博翔
张文斌
黄天成
刘梦琦
陈杰
刘旭晶
金圣皓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiaotong University
Original Assignee
Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN202110155540.7A priority Critical patent/CN112994589B/en
Publication of CN112994589A publication Critical patent/CN112994589A/en
Application granted granted Critical
Publication of CN112994589B publication Critical patent/CN112994589B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S10/00PV power plants; Combinations of PV energy systems with other systems for the generation of electric power
    • H02S10/30Thermophotovoltaic systems
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S40/00Components or accessories in combination with PV modules, not provided for in groups H02S10/00 - H02S30/00
    • H02S40/40Thermal components
    • H02S40/42Cooling means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B10/00Integration of renewable energy sources in buildings
    • Y02B10/10Photovoltaic [PV]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

The invention provides a thermophotovoltaic power generation system based on a metamaterial heat radiator and a preparation method thereof, wherein the preparation method comprises the steps of adopting the metamaterial heat radiator as a high-temperature radiator, selecting silicon dioxide as a substrate of an emitter, processing tungsten with the thickness of 100 nanometers on the upper surface of the substrate as an absorption layer, processing silicon dioxide with the thickness of 400 nanometers on the absorption layer as an intermediate layer, and processing silicon nanometer cylindrical micro-nano structures which are periodically arranged on the upper surface of the intermediate layer; adopting a gallium antimonide photovoltaic cell as a receiver photovoltaic cell, selecting the surface of an n-type GaSb wafer doped with Te to carry out zinc diffusion to form a pn junction to form a p-type GaSb layer doped with zinc, plating a negative electrode on the back of the wafer, and plating a positive electrode on the front end of the wafer; based on the metamaterial heat radiator, a novel thermophotovoltaic power generation system is built to obtain the thermophotovoltaic power generation device based on the metamaterial heat radiator. The invention solves the problems of battery temperature rise and low thermoelectric conversion efficiency caused by mismatching of the emission spectrum of a heat radiator of a thermal photovoltaic power generation system and the forbidden band of a photovoltaic battery.

Description

Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof
Technical Field
The invention relates to the technical field of thermophotovoltaic power generation, in particular to a thermophotovoltaic power generation system based on a metamaterial heat radiator and a preparation method thereof.
Background
The thermophotovoltaic power generation system has important application value in various fields, particularly in the fields of detection satellites, waste heat utilization and the like, and the electricity generation system provided by the thermoelectric conversion technology is used by the Apollo No. 17 airship in the United states lunar planning to successfully transmit data to the earth from the surface of the moon. As early as the sixties of the nineteenth century, humans began a large-scale plan for conquering space. A major leap has been made in these short decades from the lunar project in 1969 to the Mars exploration in 2001, in which thermophotovoltaic power generation technology is indispensable. The conversion from heat energy to electric energy is realized by utilizing a thermophotovoltaic power generation technology, and continuous electric energy which is more than twenty years can be provided by adopting an isotope heat source, which is incomparable with any other energy technology. The thermal photovoltaic system based on the metamaterial heat radiator can realize higher-efficiency energy conversion because the thermal photovoltaic system can directly convert heat energy into thermal radiation photons matched with a photovoltaic cell forbidden band, the heat radiator is composed of a metamaterial micro-nano structure, is compatible with a CMOS (complementary metal oxide semiconductor) process, is a solid component, is high in energy density, safe and reliable in operation and has wide application.
In view of the above-mentioned related art, the inventor considers that there is a problem of mismatch of energy spectrums of a thermal radiator and a photovoltaic cell of a thermophotovoltaic power generation system, and therefore, a technical solution is needed to improve the above technical problem.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a thermophotovoltaic power generation method and system based on a metamaterial heat radiator.
The invention provides a thermophotovoltaic power generation system based on a metamaterial heat radiator, which comprises
A metamaterial heat radiator as an emitter of the system;
a photovoltaic cell as a receiver of a system;
the transmitter transmits the spectrum, the receiver receives the spectrum transmitted by the transmitter, and the photovoltaic cell realizes the output of electric energy through a photoelectric effect.
Preferably, a high-temperature heat source is conducted to the metamaterial heat radiator.
Preferably, the bottom of the photovoltaic cell is provided with a heat dissipation fin.
The invention also provides a preparation method of the thermophotovoltaic power generation system based on the metamaterial heat radiator, which comprises the following steps:
step 1: adopting a metamaterial heat radiator as a high-temperature radiator, and selecting silicon dioxide SiO2As the substrate of the emitter, firstly, tungsten W with the thickness of 100 nanometers is processed on the upper surface of the substrate to be used as an absorption layer, and then silicon dioxide SiO with the thickness of 400 nanometers is processed on the absorption layer2As an intermediate layer, finally processing silicon Si nano cylindrical micro-nano structures which are periodically arranged on the upper surface of the intermediate layer; the metamaterial is arranged into a one-dimensional multilayer film structure or a two-dimensional cavity structure;
step 2: adopting a gallium antimonide photovoltaic cell as a receiver photovoltaic cell, selecting the surface of an n-type GaSb wafer doped with Te to carry out zinc diffusion to form a pn junction, diffusing to form a p-type GaSb layer doped with zinc, removing the pn junction on the back of the wafer by a chemical corrosion technology, plating a negative electrode on the back of the wafer, and plating a positive electrode on the front end of the wafer;
and step 3: arranging a heat dissipation fin at the bottom of the photovoltaic cell;
and 4, step 4: and acquiring the thermophotovoltaic power generation device based on the metamaterial heat radiator.
Preferably, the step 1 comprises the steps of:
step 1.1: selecting flat silicon dioxide glass as a substrate of the metamaterial heat radiator, wherein the thickness of the substrate material is not less than 1 mm;
step 1.2: processing a nano tungsten layer on a substrate as an absorption layer of the emitter by magnetron sputtering, and selecting the processing thickness to be 100 nanometers;
step 1.3: processing silicon dioxide with the thickness of 400 nanometers on the surface of the tungsten layer by a plasma enhanced chemical vapor deposition method to serve as an intermediate layer; similarly, an amorphous silicon layer with the thickness of 50 nanometers is processed on the surface of the silicon dioxide by the method;
step 1.4: and etching the amorphous silicon layer by using an electron beam lithography technology and a reactive ion beam etching method, wherein each super-surface structure unit comprises two silicon nano-columns with different sizes.
Preferably, the step 2 comprises the steps of:
step 2.1: cleaning a GaSb wafer, degreasing by utilizing dimethylbenzene, rinsing by using acetone and methanol, soaking in a hydrochloric acid solution to remove surface oxides, cleaning by using methanol, and finally drying by using high-purity nitrogen;
step 2.2: performing zinc diffusion on the surface of the n-type GaSb wafer to form a pn junction and form a zinc-doped p-type GaSb layer;
step 2.3: after the GaSb wafer is diffused, pn junctions on the periphery and the back of the wafer are removed;
step 2.4: after diffusion, GaSb is doped with proper zinc, a photoetching mask plate with a corresponding electrode shape is firstly processed, and silver is plated on the positive electrode and the negative electrode of the wafer by using a vacuum evaporation method after glue spreading, photoetching and developing.
Preferably, the step 3 comprises the steps of:
step 3.1: the metamaterial heat radiator in the step 1 is used as an emitter of a thermophotovoltaic system to realize selective emission of a spectrum;
step 3.2: adopting the gallium antimonide photovoltaic cell in the step 2 as a receiver photovoltaic cell of a thermal photovoltaic system;
step 3.3: and the bottom of the photovoltaic cell adopts a high-performance radiating fin to radiate the photovoltaic cell.
Preferably, the step 4 comprises the steps of:
step 4.1: different high-temperature heat sources are adopted to conduct heat to the metamaterial heat radiator by utilizing heat-conducting or radiating media;
step 4.2: the metamaterial heat radiator selectively emits heat energy to the surface of the photovoltaic cell through spectrum, and the photovoltaic cell realizes the output of electric energy through a photoelectric effect.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention solves the problem of low thermoelectric conversion efficiency caused by low matching degree of the heat radiator and the photovoltaic cell forbidden band of the existing thermophotovoltaic power generation system. For the specific implementation cases: the emission spectrum is adjusted by adopting a metamaterial heat radiator, and the perfect energy spectrum matching degree is realized by utilizing the emission spectrum adjusting and controlling capability of the metamaterial micro-nano structure;
2. the invention solves the problem of temperature rise of the photovoltaic cell caused by low matching degree of a heat radiator and a photovoltaic cell forbidden band of the existing thermal photovoltaic power generation system. For the specific implementation cases: the metamaterial heat radiator is adopted to realize the regulation and control of the spectrum, so that low-energy photons are not absorbed by the photovoltaic cell, and the stable working temperature of the photovoltaic cell is maintained;
3. the invention solves the problem that the heat radiator of the existing thermal photovoltaic system is difficult to flexibly adjust the emission spectrum. For the specific implementation cases: aiming at photovoltaic cells with different forbidden bands, high-efficiency energy spectrum matching can be achieved through a heat radiator with a reasonably designed metamaterial micro-nano structure, and high thermoelectric conversion efficiency of a thermophotovoltaic power generation system is achieved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a top view of an overall metamaterial heat radiator structure according to the present invention;
FIG. 2 is a schematic structural diagram of a metamaterial heat radiator unit according to the present invention;
FIG. 3 is a schematic view of a gallium antimonide photovoltaic cell structure employed in the present invention;
FIG. 4 is a schematic structural diagram of a thermophotovoltaic power generation system based on a metamaterial heat radiator according to the present invention
FIG. 5 is a graph showing the emissivity spectrum of a metamaterial heat radiator and the external quantum efficiency spectrum of a GaSb cell according to the present invention;
fig. 6 is a graph showing the thermoelectric conversion efficiency of the thermophotovoltaic power generation system according to the present invention.
Wherein: 1. the metamaterial thermally radiates the overall structural plan view of the structure; 2. the metamaterial thermally radiates its structural units; 201. a main silicon column; 202. an auxiliary silicon column; 203. a silicon dioxide intermediate layer; 204. a tungsten absorber layer; 301. a gallium antimonide wafer; 302. a positive electrode of a photovoltaic cell; 303. a negative electrode of a photovoltaic cell; 401. a heat source; 402. a metamaterial heat radiator; 403. a photovoltaic cell; 404. a heat dissipating fin; 405. and (4) heat sink at the cold end.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The invention provides a thermophotovoltaic power generation method based on a metamaterial heat radiator, which comprises the following steps: step 1: adopting a metamaterial heat radiator as a high-temperature radiator, and selecting silicon dioxide SiO2As a substrate of the emitter, firstly, processing tungsten W with the thickness of 100 nanometers on the upper surface of the substrate to be used as an absorption layer, then processing silicon dioxide with the thickness of 400 nanometers on the absorption layer to be used as an intermediate layer, and finally processing silicon Si nanometer cylindrical micro-nano structures which are periodically arranged on the upper surface of the intermediate layer; the metamaterial can also be other structures such as a one-dimensional multilayer film structure, a two-dimensional cavity structure and the like; step 2: the gallium antimonide photovoltaic cell is used as a receiver photovoltaic cell, the cell has high external quantum efficiency, and the forbidden bandwidth is 0.72 eV. And (3) selecting the surface of the n-type GaSb wafer doped with Te to perform zinc diffusion to form a pn junction, and diffusing to form a p-type GaSb layer doped with zinc. Wafer backRemoving pn junction of the surface by chemical corrosion technology, plating a negative electrode on the back of the wafer, and plating a positive electrode on the front end of the wafer; and step 3: a novel thermophotovoltaic power generation system is built based on a metamaterial heat radiator, and the problem that the matching degree of an emission spectrum and a photovoltaic cell forbidden band is low is solved; and 4, step 4: and acquiring the thermophotovoltaic power generation device based on the metamaterial heat radiator.
The step 1 comprises the following steps: step 1.1: selecting flat silicon dioxide glass as a substrate of the metamaterial heat radiator, wherein the thickness of the substrate material is not less than 1 mm in order to ensure that the metamaterial heat radiator has stable mechanical performance; step 1.2: processing a nano tungsten layer on a substrate by magnetron sputtering to serve as an absorption layer of the emitter, and selecting the processing thickness to be 100 nanometers to ensure that the processing thickness is larger than the skin depth of a thermal radiation emission waveband; step 1.3: processing silicon dioxide with the thickness of 400 nanometers on the surface of the tungsten layer by a plasma enhanced chemical vapor deposition method to serve as an intermediate layer; similarly, an amorphous silicon layer with the thickness of 50 nanometers is processed on the surface of the silicon dioxide by the method; step 1.4: and etching the amorphous silicon layer by using an electron beam lithography technology and a reactive ion beam etching method to realize a silicon nano-pillar micro-nano structure with the cycle size of 830 nanometers, wherein each super-surface structure unit comprises two silicon nano-pillars with different sizes.
The step 2 comprises the following steps: step 2.1: cleaning a GaSb wafer, degreasing by utilizing dimethylbenzene, rinsing by using acetone and methanol, soaking in a hydrochloric acid solution to remove surface oxides, cleaning by using methanol, and finally drying by using high-purity nitrogen; step 2.2: performing zinc diffusion on the surface of the n-type GaSb wafer to form a pn junction so as to form a zinc-doped p-type GaSb layer by diffusion; step 2.3: after the GaSb wafer is diffused, pn junctions at the periphery and the back of the wafer need to be removed to prevent the generation of photogenerated voltage or short circuit opposite to that of the front junction. The back junction and the peripheral diffusion layer can be effectively removed by using hydrofluoric acid chemical corrosion; step 2.4: after diffusion, GaSb is doped with proper zinc, a photoetching mask plate with a corresponding electrode shape is firstly processed, and silver is plated on the positive electrode and the negative electrode of the wafer by using a vacuum evaporation method after glue spreading, photoetching and developing.
The step 3 comprises the following steps: step 3.1: the metamaterial heat radiator in the step 1 is used as an emitter of a thermophotovoltaic system to realize selective emission of a spectrum; step 3.2: adopting the gallium antimonide photovoltaic cell in the step 2 as a receiver photovoltaic cell of a thermal photovoltaic system; step 3.3: and the bottom of the photovoltaic cell adopts a high-performance radiating fin to radiate the photovoltaic cell.
Step 4 comprises the following steps: step 4.1: the transmission efficiency of the waveguide device is sensitive to the polarization direction of heat radiation, and the waveguide device has higher transmission efficiency for the heat radiation of which the polarization direction is parallel to the periodic direction of the structural unit in the waveguide device; step 4.2: the polarization characteristic of the transferred thermal radiation is judged, and an angle between a proper device and a thermal radiation source is selected, so that the transmission efficiency of thermal radiation energy is maximized.
The invention also provides a thermophotovoltaic power generation system based on the metamaterial heat radiator, which comprises: module M1: adopting a metamaterial heat radiator as a high-temperature radiator, and selecting silicon dioxide SiO2As a substrate of the emitter, firstly, processing tungsten W with the thickness of 100 nanometers on the upper surface of the substrate to be used as an absorption layer, then processing silicon dioxide with the thickness of 400 nanometers on the absorption layer to be used as an intermediate layer, and finally processing silicon Si nanometer cylindrical micro-nano structures which are periodically arranged on the upper surface of the intermediate layer; the metamaterial can also be other structures such as a one-dimensional multilayer film structure, a two-dimensional cavity structure and the like; module M2: constructing a structural unit of the sub-wavelength thermal radiation waveguide device; the structural unit is in a shape of a nano columnar structure with an open structure; the geometrical parameters included therein are: the radius r, the height h, the opening width g, the opening direction and the period dimension a of the structural unit of the disc-shaped structure adopt a gallium antimonide photovoltaic cell as a receiver photovoltaic cell, the cell has high external quantum efficiency, and the forbidden band width is 0.72 eV. And (3) selecting the surface of the n-type GaSb wafer doped with Te to perform zinc diffusion to form a pn junction, and diffusing to form a p-type GaSb layer doped with zinc. Removing the pn junction on the back of the wafer by a chemical corrosion technology, plating a negative electrode on the back of the wafer, and plating a positive electrode on the front end of the wafer; module M3: a novel thermophotovoltaic power generation system is built based on a metamaterial heat radiator, and the problem that the matching degree of an emission spectrum and a photovoltaic cell forbidden band is low is solved; module M4: obtaining metamaterial-based heat radiatorsA thermo-photovoltaic power generation device.
The module M1 includes: module M1.1: selecting flat silica glass as a substrate of the metamaterial heat radiator, wherein in order to ensure that the metamaterial heat radiator has stable mechanical properties, the thickness of the substrate material is not less than 1 mm, and the step M1.2: processing a nano tungsten layer on a substrate by magnetron sputtering to serve as an absorption layer of the emitter, and selecting the processing thickness to be 100 nanometers to ensure that the processing thickness is larger than the skin depth of a thermal radiation emission waveband; step M1.3: processing silicon dioxide with the thickness of 400 nanometers on the surface of the tungsten layer by a plasma enhanced chemical vapor deposition method to serve as an intermediate layer; similarly, an amorphous silicon layer with the thickness of 50 nanometers is processed on the surface of the silicon dioxide by the method; step M1.4: and etching the amorphous silicon layer by using an electron beam lithography technology and a reactive ion beam etching method to realize a silicon nano-pillar micro-nano structure with the cycle size of 830 nanometers, wherein each super-surface structure unit comprises two silicon nano-pillars with different sizes.
The module M2 includes: module M2.1: cleaning a GaSb wafer, degreasing by utilizing dimethylbenzene, rinsing by using acetone and methanol, soaking in a hydrochloric acid solution to remove surface oxides, cleaning by using methanol, and finally drying by using high-purity nitrogen; step M2.2: performing zinc diffusion on the surface of the n-type GaSb wafer to form a pn junction so as to form a zinc-doped p-type GaSb layer by diffusion; step M2.3: after the GaSb wafer is diffused, pn junctions at the periphery and the back of the wafer need to be removed to prevent the generation of photogenerated voltage or short circuit opposite to that of the front junction. The back junction and the peripheral diffusion layer can be effectively removed by using hydrofluoric acid chemical corrosion; step M2.4: after diffusion, GaSb is doped with proper zinc, a photoetching mask plate with a corresponding electrode shape is firstly processed, and silver is plated on the positive electrode and the negative electrode of the wafer by using a vacuum evaporation method after glue spreading, photoetching and developing.
The module M3 includes: module M3.1: the metamaterial heat radiator of the module M1 is used as an emitter of a thermophotovoltaic system to realize selective emission of a spectrum; module M3.2: the gallium antimonide photovoltaic cell of module M2 is used as a receiver photovoltaic cell of a thermal photovoltaic system; module M3.3: and the bottom of the photovoltaic cell adopts a high-performance radiating fin to radiate the photovoltaic cell.
The module M4 includes: module M4.1: different high-temperature heat sources are adopted to conduct heat to the metamaterial heat radiator by utilizing heat-conducting or radiating media; module M4.2: the metamaterial heat radiator selectively emits heat energy to the surface of the photovoltaic cell through spectrum, and the photovoltaic cell realizes the output of electric energy through a photoelectric effect, so that the thermal photovoltaic power generation system based on the metamaterial heat radiator is obtained.
Specifically, in one embodiment, fig. 1 is a top view of the whole metamaterial heat radiator structure of the present invention,
fig. 1 is a top view of the overall structure of the metamaterial heat radiator structure of the present invention, the top layer of the device is periodically arranged by a plurality of silicon nano-pillar unit structures in a square lattice, and the lower layer of the device is a flat silicon dioxide layer and a tungsten layer. The tungsten layer thickness is greater than the skin depth of the operating band, and in this particular embodiment is 100 nanometers.
Fig. 2 is a schematic structural diagram of a unit of a metamaterial heat radiator structure of the present invention, in which the ratio of the radius of the main silicon pillar to the radius of the auxiliary silicon pillar is 3.5, the center of the main cylinder coincides with the center of the lattice, and the center of the auxiliary cylinder is located at the lattice position of the square lattice. The period size is 830 nm in this particular embodiment.
Fig. 3 is a schematic structural diagram of a gallium antimonide photovoltaic cell adopted by the present invention, in which 301 is a gallium antimonide wafer, 302 is an anode of the photovoltaic cell, 303 is a cathode of the photovoltaic cell, the forbidden band energy of the photovoltaic cell is 0.72eV, the band gap wavelength is 1.708 microns, and the external quantum efficiency is high. The preparation step 2 comprises: step 2.1: cleaning a GaSb wafer, degreasing by utilizing dimethylbenzene, rinsing by using acetone and methanol, soaking in a hydrochloric acid solution to remove surface oxides, cleaning by using methanol, and finally drying by using high-purity nitrogen; step 2.2: performing zinc diffusion on the surface of the n-type GaSb wafer to form a pn junction so as to form a zinc-doped p-type GaSb layer by diffusion; step 2.3: after the GaSb wafer is diffused, pn junctions at the periphery and the back of the wafer need to be removed to prevent the generation of photogenerated voltage or short circuit opposite to that of the front junction. The back junction and the peripheral diffusion layer can be effectively removed by using hydrofluoric acid chemical corrosion; step 2.4: after diffusion, GaSb is doped with proper zinc, a photoetching mask plate with a corresponding electrode shape is firstly processed, and silver is plated on the positive electrode and the negative electrode of the wafer by using a vacuum evaporation method after glue spreading, photoetching and developing.
FIG. 4 is a schematic structural diagram of a thermophotovoltaic power generation system based on a metamaterial heat radiator according to the present invention. In the schematic diagram 401 is a heat source, in the system, the heat source may be an isotope heat source, a heat source of concentrated light, etc., so as to realize effective conversion and utilization of various heat energies. The material 402 is a metamaterial heat radiator, different structural sizes can be adjusted according to forbidden band widths of different photovoltaic cells, matching of the emission spectrum of the radiator and the forbidden bands of the photovoltaic cells is achieved, energy loss is reduced, and thermoelectric conversion efficiency of the thermophotovoltaic power generation system is improved. And 403, a photovoltaic cell which outputs current through a photoelectric effect. And 404 are heat dissipation fins which are mainly used for dissipating heat of the back of the photovoltaic cell and ensuring that the temperature of the photovoltaic cell can keep high-efficiency working temperature. 405 is a thermal photovoltaic power generation system heat sink, mainly used for receiving heat dissipation of fins. The system can effectively improve the thermoelectric conversion efficiency of the thermophotovoltaic power generation system by adopting the metamaterial heat radiator.
Fig. 5 is a graph showing the emissivity spectrum of the metamaterial heat radiator and the external quantum efficiency spectrum of the GaSb battery, from which it can be found that the gallium antimonide photovoltaic battery has higher external quantum efficiency, and the thermal emission spectrum of the metamaterial heat radiator can be effectively matched with the external quantum efficiency, so that the thermal photovoltaic power generation system has higher hotspot conversion efficiency.
Fig. 6 is a graph showing the thermoelectric conversion efficiency of the thermophotovoltaic power generation system according to the present invention. It can be found that with the increase of temperature, the thermoelectric conversion efficiency of the thermophotovoltaic power generation system is improved, and 40% conversion efficiency under the medium-high temperature environment can be realized.
The thermophotovoltaic power generation system based on the metamaterial heat radiator has the advantages of high energy spectrum matching degree and high thermoelectric conversion efficiency. The metamaterial heat radiator can realize high-efficiency emission spectrum matched with forbidden band widths of different photovoltaic cells by adjusting different structural sizes, and realize high-efficiency thermoelectric conversion.
The invention solves the problem of low thermoelectric conversion efficiency caused by low matching degree of the heat radiator and the photovoltaic cell forbidden band of the existing thermophotovoltaic power generation system. For the specific implementation cases: the emission spectrum is adjusted by adopting a metamaterial heat radiator, and the perfect energy spectrum matching degree is realized by utilizing the emission spectrum adjusting and controlling capability of the metamaterial micro-nano structure; the invention solves the problem of temperature rise of the photovoltaic cell caused by low matching degree of a heat radiator and a photovoltaic cell forbidden band of the existing thermal photovoltaic power generation system. For the specific implementation cases: the metamaterial heat radiator is adopted to realize the regulation and control of the spectrum, so that low-energy photons are not absorbed by the photovoltaic cell, and the stable working temperature of the photovoltaic cell is maintained; the invention solves the problem that the heat radiator of the existing thermal photovoltaic system is difficult to flexibly adjust the emission spectrum. For the specific implementation cases: aiming at photovoltaic cells with different forbidden bands, high-efficiency energy spectrum matching can be achieved through a heat radiator with a reasonably designed metamaterial micro-nano structure, and high thermoelectric conversion efficiency of a thermophotovoltaic power generation system is achieved.
Those skilled in the art will appreciate that, in addition to implementing the system and its various devices, modules, units provided by the present invention as pure computer readable program code, the system and its various devices, modules, units provided by the present invention can be fully implemented by logically programming method steps in the form of logic gates, switches, application specific integrated circuits, programmable logic controllers, embedded microcontrollers and the like. Therefore, the system and various devices, modules and units thereof provided by the invention can be regarded as a hardware component, and the devices, modules and units included in the system for realizing various functions can also be regarded as structures in the hardware component; means, modules, units for performing the various functions may also be regarded as structures within both software modules and hardware components for performing the method.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.

Claims (8)

1. A thermophotovoltaic power generation system based on a metamaterial heat radiator is characterized by comprising
A metamaterial heat radiator as an emitter of the system;
a photovoltaic cell as a receiver of a system;
the transmitter transmits the spectrum, the receiver receives the spectrum transmitted by the transmitter, and the photovoltaic cell realizes the output of electric energy through a photoelectric effect.
2. The system according to claim 1, wherein a high temperature heat source is conducted to the metamaterial heat radiator.
3. The system according to claim 1, wherein the photovoltaic cell is provided with heat dissipation fins at the bottom.
4. A preparation method of a thermophotovoltaic power generation system based on a metamaterial heat radiator is characterized by comprising the following steps:
step 1: adopting a metamaterial heat radiator as a high-temperature radiator, and selecting silicon dioxide SiO2As the substrate of the emitter, firstly, tungsten W with the thickness of 100 nanometers is processed on the upper surface of the substrate to be used as an absorption layer, and then silicon dioxide SiO with the thickness of 400 nanometers is processed on the absorption layer2As an intermediate layer, finally processing silicon Si nano cylindrical micro-nano structures which are periodically arranged on the upper surface of the intermediate layer; the metamaterial is arranged into a one-dimensional multilayer film structure or a two-dimensional cavity structure;
step 2: adopting a gallium antimonide photovoltaic cell as a receiver photovoltaic cell, selecting the surface of an n-type GaSb wafer doped with Te to carry out zinc diffusion to form a pn junction, diffusing to form a p-type GaSb layer doped with zinc, removing the pn junction on the back of the wafer by a chemical corrosion technology, plating a negative electrode on the back of the wafer, and plating a positive electrode on the front end of the wafer;
and step 3: arranging a heat dissipation fin at the bottom of the photovoltaic cell;
and 4, step 4: and acquiring the thermophotovoltaic power generation device based on the metamaterial heat radiator.
5. The method for preparing the thermophotovoltaic power generation system based on the metamaterial heat radiator in the claim 4, wherein the step 1 comprises the following steps:
step 1.1: selecting flat silicon dioxide glass as a substrate of the metamaterial heat radiator, wherein the thickness of the substrate material is not less than 1 mm;
step 1.2: processing a nano tungsten layer on a substrate as an absorption layer of the emitter by magnetron sputtering, and selecting the processing thickness to be 100 nanometers;
step 1.3: processing silicon dioxide with the thickness of 400 nanometers on the surface of the tungsten layer by a plasma enhanced chemical vapor deposition method to serve as an intermediate layer; similarly, an amorphous silicon layer with the thickness of 50 nanometers is processed on the surface of the silicon dioxide by the method;
step 1.4: and etching the amorphous silicon layer by using an electron beam lithography technology and a reactive ion beam etching method, wherein each super-surface structure unit comprises two silicon nano-columns with different sizes.
6. The method for preparing the thermophotovoltaic power generation system based on the metamaterial heat radiator in the claim 4, wherein the step 2 comprises the following steps:
step 2.1: cleaning a GaSb wafer, degreasing by utilizing dimethylbenzene, rinsing by using acetone and methanol, soaking in a hydrochloric acid solution to remove surface oxides, cleaning by using methanol, and finally drying by using high-purity nitrogen;
step 2.2: performing zinc diffusion on the surface of the n-type GaSb wafer to form a pn junction and form a zinc-doped p-type GaSb layer;
step 2.3: after the GaSb wafer is diffused, pn junctions on the periphery and the back of the wafer are removed;
step 2.4: after diffusion, GaSb is doped with proper zinc, a photoetching mask plate with a corresponding electrode shape is firstly processed, and silver is plated on the positive electrode and the negative electrode of the wafer by using a vacuum evaporation method after glue spreading, photoetching and developing.
7. The method for preparing the thermophotovoltaic power generation system based on the metamaterial heat radiator in the claim 4, wherein the step 3 comprises the following steps:
step 3.1: the metamaterial heat radiator in the step 1 is used as an emitter of a thermophotovoltaic system to realize selective emission of a spectrum;
step 3.2: adopting the gallium antimonide photovoltaic cell in the step 2 as a receiver photovoltaic cell of a thermal photovoltaic system;
step 3.3: and the bottom of the photovoltaic cell adopts a high-performance radiating fin to radiate the photovoltaic cell.
8. The method for preparing the thermophotovoltaic power generation system based on the metamaterial heat radiator in the claim 4, wherein the step 4 comprises the following steps:
step 4.1: different high-temperature heat sources are adopted to conduct heat to the metamaterial heat radiator by utilizing heat-conducting or radiating media;
step 4.2: the metamaterial heat radiator selectively emits heat energy to the surface of the photovoltaic cell through spectrum, and the photovoltaic cell realizes the output of electric energy through a photoelectric effect.
CN202110155540.7A 2021-02-04 2021-02-04 Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof Active CN112994589B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110155540.7A CN112994589B (en) 2021-02-04 2021-02-04 Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110155540.7A CN112994589B (en) 2021-02-04 2021-02-04 Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof

Publications (2)

Publication Number Publication Date
CN112994589A true CN112994589A (en) 2021-06-18
CN112994589B CN112994589B (en) 2022-03-18

Family

ID=76347021

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110155540.7A Active CN112994589B (en) 2021-02-04 2021-02-04 Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof

Country Status (1)

Country Link
CN (1) CN112994589B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114189198A (en) * 2021-12-01 2022-03-15 上海交通大学 Super-surface-selective radiator applied to thermophotovoltaic system and preparation method thereof
CN114497262A (en) * 2022-03-02 2022-05-13 爱思菲尔光学科技(苏州)有限公司 Narrow-band selective super-surface radiator and manufacturing method thereof
CN117240187A (en) * 2023-11-15 2023-12-15 浙江省白马湖实验室有限公司 Near-field thermophotovoltaic device with two-dimensional photonic crystal radiator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150288318A1 (en) * 2013-09-11 2015-10-08 Prf Refractory plasmonic metamaterial absorber and emitter for energy harvesting
CN105790680A (en) * 2016-03-10 2016-07-20 苏州大学 Thermal photovoltaic power generation device
CN107276524A (en) * 2017-05-17 2017-10-20 湖北工业大学 Meta Materials selective radiator based on cross structure
CN107482994A (en) * 2017-08-22 2017-12-15 郑义 A kind of selective thermal transmitter for thermal photovoltaic system
CN108365795A (en) * 2018-04-10 2018-08-03 浙江大学 A kind of cascade thermal photovoltaic system of difference forbidden band photovoltaic cell and its heat energy recovering method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150288318A1 (en) * 2013-09-11 2015-10-08 Prf Refractory plasmonic metamaterial absorber and emitter for energy harvesting
CN105790680A (en) * 2016-03-10 2016-07-20 苏州大学 Thermal photovoltaic power generation device
CN107276524A (en) * 2017-05-17 2017-10-20 湖北工业大学 Meta Materials selective radiator based on cross structure
CN107482994A (en) * 2017-08-22 2017-12-15 郑义 A kind of selective thermal transmitter for thermal photovoltaic system
CN108365795A (en) * 2018-04-10 2018-08-03 浙江大学 A kind of cascade thermal photovoltaic system of difference forbidden band photovoltaic cell and its heat energy recovering method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
徐其琛: "散热条件下超材料近场热光伏系统的稳态和瞬态性能研究", 《万方数据知识服务平台》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114189198A (en) * 2021-12-01 2022-03-15 上海交通大学 Super-surface-selective radiator applied to thermophotovoltaic system and preparation method thereof
CN114189198B (en) * 2021-12-01 2024-04-12 上海交通大学 Super-surface selective radiator applied to thermophotovoltaic system and preparation method thereof
CN114497262A (en) * 2022-03-02 2022-05-13 爱思菲尔光学科技(苏州)有限公司 Narrow-band selective super-surface radiator and manufacturing method thereof
CN114497262B (en) * 2022-03-02 2024-04-02 爱思菲尔光学科技(苏州)有限公司 Narrow band selective subsurface radiator and method of making same
CN117240187A (en) * 2023-11-15 2023-12-15 浙江省白马湖实验室有限公司 Near-field thermophotovoltaic device with two-dimensional photonic crystal radiator
CN117240187B (en) * 2023-11-15 2024-02-02 浙江省白马湖实验室有限公司 Near-field thermophotovoltaic device with two-dimensional photonic crystal radiator

Also Published As

Publication number Publication date
CN112994589B (en) 2022-03-18

Similar Documents

Publication Publication Date Title
CN112994589B (en) Thermal photovoltaic power generation system based on metamaterial heat radiator and preparation method thereof
CA2598490C (en) Three dimensional multi-junction photovoltaic device
Segev et al. High performance isothermal photo-thermionic solar converters
US8334450B2 (en) Seebeck solar cell
US20190036473A1 (en) High efficiency photovoltaic cells with suppressed radiative emission due to chemical nonequilibrium of photoelectrons
Sharma et al. Solar cells: from materials to device technology
Solanki et al. Advanced solar cell concepts
WO2018192199A1 (en) Multi-junction laminated laser photovoltaic cell and manufacturing method thereof
Arbuzov et al. New photoelectric system on the basis of cascade homogeneous photoconverters and solar radiation concentrators
Green et al. Hot carrier solar cells: Challenges and recent progress
EP2137765A2 (en) An active solar cell and method of manufacture
Liao et al. Improved design of a thermophotovoltaic device
Ye et al. Multistage interband cascade photovoltaic devices with a bandgap of 0.23 eV operating above room temperature
Van Roosmalen Molecular-based concepts in PV towards full spectrum utilization
US20160099368A1 (en) Nanostructured units formed inside a silicon material and the manufacturing process to perform them therein
US10020408B2 (en) System of architecture and related built-in nanomembranes for the emitter of a light-to-electricity all-silicon converter for the giant photoconversion and the method of its manufacture
Saidov Photothermoelectric cell for thermophotovoltaic systems and solar power plants with concentrators
KR101772432B1 (en) SOLAR CELL USING MULTIBAND Si-Ge THIN FILM SILICON CRYSTAL AND EFFICIENCY IMPROVEMENT METHOD THEREOF
KR101111198B1 (en) Solar cell module using metal gas ionization and thermoelectric element
Sari-Ali et al. Effect of shading on the performance on solar photovoltaic
Aziz Simulation, fabrication and characterization of multilyer coated solar cells
Nakamura et al. Performance improvement of front junction n-type PERT solar cell by wafer thinning
Zhang et al. Designing a Concentrated High-Efficiency Thermionic Solar Cell Enabled by Graphene Collector
Sater Vertical multi‐junction cells for thermophotovoltaic conversion
De Sarkara et al. 78 Modelling and optimization of Si/GaP quantum dot solar cells using Silvaco TCAD

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant