CN112987323B - High-energy solid pulse laser polarization beam combining device - Google Patents
High-energy solid pulse laser polarization beam combining device Download PDFInfo
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- CN112987323B CN112987323B CN201911285625.6A CN201911285625A CN112987323B CN 112987323 B CN112987323 B CN 112987323B CN 201911285625 A CN201911285625 A CN 201911285625A CN 112987323 B CN112987323 B CN 112987323B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
Abstract
The invention provides a high-energy solid pulse laser polarization beam combining device, which comprises: at least two beam combining sub-modules which are arranged in parallel and have the same structure, wherein the polarization types of the laser output by the adjacent beam combining sub-modules are different; the second polarization beam splitting cube is used for combining the lasers with different polarization states output by the adjacent beam combining sub-modules; the second turntable is used for adjusting the polarization state of the lasers with different polarization types in the combined laser to obtain high-power combined laser output; and the laser time sequence adjusting module is used for adjusting and controlling the rotating speed of the solid Q-switched pulse laser and the rotating speed of the first rotating disc and the rotating speed of the second rotating disc, so that the laser output by each solid Q-switched pulse laser is separately and alternately output in a time domain. The invention adopts a polarization beam combination mode to combine a plurality of groups of Q-switched pulse solid laser devices in a time domain and outputs pulse laser with high peak power and high average power.
Description
Technical Field
The invention relates to the technical field of laser modulation, in particular to a high-energy solid pulse laser polarization beam combining device.
Background
The high-power laser has wide application in metal smelting, material processing, biomedicine, photoelectric field and the like. Laser systems with high average power and high beam quality are applicable in the field of material processing, such as laser cutting, laser marking, laser welding, etc.
At present, a high-power laser output system mainly comprises a solid laser, a fiber laser, an oxygen-iodine chemical laser, an HF/DF chemical laser, a semiconductor-pumped alkali metal laser and the like, and the output laser power can be further improved by means of laser beam combination. The oxygen-iodine chemical laser, the HF/DF chemical laser and the semiconductor pumping alkali metal laser have good scaling and amplification performance, and high-power laser output can be realized without beam combination; the high-power pulse of the optical fiber laser is difficult, and the output power of the optical fiber laser is generally improved by adopting a spectral synthesis method. The solid laser can easily obtain large-energy laser output by a Q-switching means and is suitable for high-peak power pulse output. For thermal management reasons, it is very difficult to solve the adverse effects of thermal effects for constructing solid state lasers with high repetition rates and high peak power. Therefore, in order to obtain a laser output with a higher average power, a means of combining a plurality of laser beams in time series may be adopted.
Disclosure of Invention
According to the technical problem that the high-power pulse of the optical fiber laser is difficult, the high-energy solid pulse laser polarization beam combining device is provided. The invention sets the time delay of the solid Q-switched pulse laser to ensure that laser beams output by a plurality of lasers are not superposed and output in a staggered way in a time domain, and then adjusts and changes the polarization characteristic of the beams to output the combined beams by utilizing the polarization beam splitting cube.
The technical means adopted by the invention are as follows:
a high-energy solid pulse laser polarization beam combining device comprises: the beam combining sub-modules comprise two beam combining laser generating modules which generate different laser polarization states, a first polarization beam splitting cube which combines the lasers output by the beam combining laser generating modules, and a first turntable which adjusts the polarization states of the lasers with different polarization types in the combined lasers, wherein the beam combining laser generating modules comprise solid Q-switched pulse lasers and polarization state modulation structures which are sequentially arranged on a light path; the second polarization beam splitting cube is used for combining the lasers with different polarization states output by the adjacent beam combining sub-modules; the second turntable is used for adjusting the polarization state of the lasers with different polarization types in the combined laser to obtain high-power combined laser output; and the laser time sequence adjusting module is used for adjusting and controlling the rotating speed of the solid Q-switched pulse laser and the rotating speed of the first rotating disc and the rotating speed of the second rotating disc, so that the laser output by each solid Q-switched pulse laser is separately and alternately output in a time domain.
Furthermore, a blank window and a half-wave plate window are arranged on the turntable at intervals.
Further, the initial phase of the first rotating disc and the initial phase of the second rotating disc are the same, and the rotating speeds of the first rotating disc and the second rotating disc are the same.
Further, the generation laser timing sequence adjusting module comprises a signal light output laser, a photomultiplier and a time delay device; continuous indicating light emitted by the signal light output laser is emitted to the photomultiplier through the first turntable or the second turntable, the photomultiplier converts received light signals into electric signals and feeds the electric signals back to the time delayer, and therefore the rotating speeds of the solid Q-switched pulse laser and the first turntable and the second turntable are regulated and controlled.
Further, the signal light output laser is a helium-neon laser, a diode laser or any laser capable of continuously emitting light.
Further, the polarization state modulation structure is a half wave plate or a faraday magneto-optical modulator.
Compared with the prior art, the invention has the following advantages:
the polarization state of the output laser of the Q-switched pulse solid laser is changed through the half-wave plate, so that the polarization state of the output laser of the Q-switched pulse solid laser is respectively output with P polarization and S polarization, then the two laser beams are combined at the polarization beam splitting cube, the laser beams are ensured not to be overlapped in a time domain, and the combined laser beams pass through a special turntable. The rotating speed of a motor connected with the turntable is adjusted, so that a beam of P-polarized laser is incident into a half-wave plate on the turntable when passing through the turntable, and the incident light is converted into S-polarization from P-polarization; meanwhile, when another beam of S-polarized laser is incident to the turntable, the polarization state is not changed through a blank window in the turntable. Therefore, the polarization of the combined laser beam passing through the turntable is S polarization, the combined output of two laser beams with high peak power in a time domain is realized, and the average power of the two laser beams is improved.
The beam combination laser beam output by the invention can realize beam combination on the time domain of a plurality of Q-switched pulse lasers according to the thought, and the upper limit of the number of lasers which can be combined is 1/the duty ratio of the pulse lasers in principle.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a polarization beam combining laser device according to the present invention.
FIG. 2 is a schematic view of the turntable structure of the present invention.
FIG. 3 is a diagram illustrating the timing and polarization of a combined laser beam according to the present invention.
FIG. 4 is a schematic diagram of the timing synchronization of the turntable and the solid Q-switched pulse laser according to the present invention.
In the figure: 1. a Q-switched pulse solid-state laser; 2. a half wave plate; 3. a first reflector; 4. a first polarization beam splitting cube; 5. a first turntable; 6. a second reflector; 7. a second polarization beam splitting cube; 8. a second turntable; 9. a signal light output laser; 10. a photomultiplier tube; 11. a time delayer.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-4, the present invention provides a high-energy solid-state pulsed laser polarization beam combiner, which includes: the beam combining sub-modules comprise two beam combining laser generating modules which generate different laser polarization states, a first polarization beam splitting cube which combines the lasers output by the beam combining laser generating modules, and a first turntable which adjusts the polarization states of the lasers with different polarization types in the combined lasers, wherein the beam combining laser generating modules comprise solid Q-switched pulse lasers and polarization state modulation structures which are sequentially arranged on a light path; the second polarization beam splitting cube is used for combining the lasers with different polarization states output by the adjacent beam combining sub-modules; the second turntable is used for adjusting the polarization state of the lasers with different polarization types in the combined laser to obtain high-power combined laser output; and the laser time sequence adjusting module is used for adjusting and controlling the rotating speed of the solid Q-switched pulse laser and the rotating speed of the first rotating disc and the rotating speed of the second rotating disc, so that the laser output by each solid Q-switched pulse laser is separately and alternately output in a time domain. Furthermore, a blank window and a half-wave plate window are arranged on the turntable at intervals. Further, the initial phase of the first rotating disc and the initial phase of the second rotating disc are the same, and the rotating speeds of the first rotating disc and the second rotating disc are the same. Further, the generation laser timing sequence adjusting module comprises a signal light output laser, a photomultiplier and a time delay device; continuous indicating light emitted by the signal light output laser is emitted to the photomultiplier through the first turntable or the second turntable, the photomultiplier converts received light signals into electric signals and feeds the electric signals back to the time delayer, and therefore the rotating speeds of the solid Q-switched pulse laser and the first turntable and the second turntable are regulated and controlled. The signal light output laser is a helium-neon laser, a diode laser or any laser capable of continuously emitting light. Further, the polarization state modulation structure is a half wave plate or a faraday magneto-optical modulator.
The technical solution of the present invention is further explained by a specific application example.
In this embodiment, the high-energy solid pulse laser polarization beam combining device includes two beam combining sub-modules, and each beam combining sub-module includes two beam combining laser generating modules, so as to implement beam combining of 4 laser paths.
And a half wave plate, a reflector and a polarization beam splitting cube are sequentially placed in the first beam combining laser generating module in the first beam combining sub-module by taking the output laser path of the first solid Q-switched pulse laser as a reference, and a half wave plate and a polarization beam splitting cube are sequentially placed in the second beam combining laser generating module by taking the output laser path of the first solid Q-switched pulse laser as a reference. Meanwhile, laser output by the solid Q-switched pulse laser of the first beam combining laser generation module and light output by the Q-switched pulse laser of the second beam combining laser generation module are combined into one beam at the first polarization light splitting cube, the combined beam passes through a window on the first turntable, and a reflector is arranged at the output of a light path. The above components are combined to form a first beam combining sub-module, and combined beams of the first beam combining laser generating module and the second beam combining laser generating module are output.
The time delay device is used for regulating and controlling the Q switches on the solid Q-switched pulse lasers of the first beam combination laser generating module and the second beam combination laser generating module, so that the time delay of the two lasers for outputting pulse lasers is realized, and the two beams of lasers are separately and alternately output in a time domain. Simultaneously, the rotating speed of a motor connected to the first turntable is adjusted, so that a laser beam output by the first beam-combining laser generation module pulse laser passes through the first turntable, and a shot window is a blank window; and when the laser beam output by the second beam combination laser generation module pulse laser passes through the first turntable, the incident window is a half wave plate window, and the angle of the half wave plate is adjusted, so that the laser beam output by the pulse laser is converted from P polarization to S polarization. And then, the combined light beam passes through the reflecting mirror, outputs S-polarized combined laser and then enters the polarization beam splitting cube. The above is the light path forming part of the first beam combining sub-module.
Similarly, in the first beam combination laser generation module in the second beam combination sub-module, the half wave plate, the reflector and the polarization beam splitting cube are sequentially placed by taking the output laser path of the first solid Q-switched pulse laser as a reference, and in the second beam combination laser generation module, the half wave plate and the polarization beam splitting cube are sequentially placed by taking the output laser path of the first solid Q-switched pulse laser as a reference. Meanwhile, laser output by the solid Q-switched pulse laser of the first beam combining laser generation module and light output by the Q-switched pulse laser of the second beam combining laser generation module are combined into one beam at the first polarization light splitting cube, the combined beam passes through a window on the first turntable, and a reflector is arranged at the output of a light path. The above components are combined to form a second beam combining sub-module, and combined laser of the first beam combining laser generating module and the second beam combining laser generating module is output.
The second beam combining sub-module is similar to the first beam combining sub-module, and the angle of the half wave plate is adjusted when the output laser of the solid Q-switched pulse laser of the first beam combining laser generating module passes through the half wave plate, so that the output laser is S polarized light. The light beam is reflected by the third reflector and then enters the polarization beam splitting cube, and then enters the window of the first rotating disc after being reflected by the polarization beam splitting cube. When the output laser of the solid Q-switched pulse laser of the second beam combination laser generation module passes through the half wave plate, the angle of the half wave plate is adjusted, so that the output laser is P polarized light. The light beam passes through the polarization beam splitting cube and then enters a window on the turntable. The time delay device 20 regulates and controls the Q switch on the solid Q-switched pulse laser, thereby realizing the time delay of the output pulse laser of the two laser devices for filling space. Meanwhile, the rotating speed of a motor connected to the turntable is adjusted, so that a laser beam output by the second beam-combining laser generation module pulse laser passes through the first turntable, and an incident window is a blank window; when the laser beam output by the first beam combination laser generation module pulse laser passes through the first turntable, the incident window is a half wave plate window, and the angle of the half wave plate is adjusted, so that the laser beam output by the first beam combination laser generation module pulse laser is converted from S polarization to P polarization. The polarization state of the laser output by the second beam combining sub-module is P polarization, and the laser is incident on the second polarization beam splitting cube and is combined with the laser output by the first beam combining sub-module.
The S-polarized combined beam laser output by the first combined beam sub-module is incident to the polarization beam splitting cube and then reflected to a window on the turntable; the P-polarized beam combination laser output by the second beam combination sub-module is transmitted into a window on the rotating disc after being incident into the polarization beam splitting cube. Four lasers are adjusted by time delays: the four groups of lasers are respectively separated and output in a staggered mode in the time domain. And adjusting the rotating speed of a motor connected to the second turntable to enable the incident window to be a blank window when the combined beam laser output by the first beam combining sub-module passes through the second turntable, so that the S polarization is kept. And when the combined beam laser output by the second combined beam sub-module passes through the second turntable, the incident window is a half wave plate window, and the angle of the half wave plate is adjusted to convert the P polarization into the S polarization. The laser beams combined by the four solid-state pulse lasers can be output.
The timing adjustment of the first turntable, the second turntable and each solid-state Q-switched pulse laser is shown in fig. four. Firstly, the rotating speed and the initial position of the motors connected with the first rotating disc and the second rotating disc are regulated to be the same, so that the rotating discs synchronously rotate. And then placing a signal indicating light laser for continuously emitting light at one of the turntables (such as the second turntable), so that the signal light output by the signal indicating light laser is incident on the turntables, and when the turntables operate, the signal light can be emitted into the photomultiplier through a window on the turntables, and at the moment, the photomultiplier can convert the received optical signal into an electric signal and feed back the electric signal to the connected time delay unit. Therefore, the Q switch on each solid-state Q-switched pulse laser can be respectively controlled by adjusting the time delay devices, so that the time sequence requirement is realized. The polarization time sequence beam combination method can realize beam combination of any plurality of solid Q-switched pulse lasers within the theoretical upper limit, and the upper limit of the number of combined lasers can be 1/duty ratio of pulse lasers in principle.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (5)
1. A high-energy solid pulse laser polarization beam combining device is characterized by comprising:
the beam combining sub-modules comprise two beam combining laser generating modules which generate different laser polarization states, a first polarization beam splitting cube which combines the lasers output by the beam combining laser generating modules, and a first turntable which adjusts the polarization states of the lasers with different polarization types in the combined lasers, wherein the beam combining laser generating modules comprise solid Q-switched pulse lasers and polarization state modulation structures which are sequentially arranged on a light path;
the second polarization beam splitting cube is used for combining the lasers with different polarization states output by the adjacent beam combining sub-modules;
the second turntable is used for adjusting the polarization state of the lasers with different polarization types in the combined laser to obtain high-power combined laser output;
the generation laser time sequence adjusting module is used for adjusting and controlling the rotating speed of the solid Q-switched pulse laser and the rotating speed of the first rotating disc and the rotating speed of the second rotating disc, so that the laser output by each solid Q-switched pulse laser is separately and alternately output in a time domain;
blank windows and half-wave plate windows are arranged on the first rotating disc and the second rotating disc at intervals.
2. The high-energy solid-state pulsed laser polarization beam combiner according to claim 1, wherein the initial phases of the first and second rotating discs are the same and the rotating speeds are the same.
3. The high-energy solid pulse laser polarization beam combining device according to claim 1 or 2, wherein the generation laser timing adjusting module comprises a signal light output laser, a photomultiplier and a time delay; continuous indicating light emitted by the signal light output laser is emitted to the photomultiplier through the first turntable or the second turntable, the photomultiplier converts received light signals into electric signals and feeds the electric signals back to the time delayer, and therefore the rotating speeds of the solid Q-switched pulse laser and the first turntable and the second turntable are regulated and controlled.
4. The high energy solid state pulsed laser polarization beam combining device of claim 3, wherein the signal light output laser is a helium-neon laser, a diode laser.
5. The high-energy solid pulsed laser polarization beam combining device according to claim 1, wherein the polarization state modulation structure is a half wave plate or a faraday magneto-optical modulator.
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| WO2003067334A2 (en) * | 2002-02-08 | 2003-08-14 | Carl Zeiss Smt Ag | Polarisation-optimised illumination system |
| JP2006253571A (en) * | 2005-03-14 | 2006-09-21 | Ishikawajima Harima Heavy Ind Co Ltd | Laser emission apparatus and method therefor, and laser anneal apparatus and method therefor |
| CN104347368A (en) * | 2013-07-26 | 2015-02-11 | 上海微电子装备有限公司 | Laser annealing device for multiple lasers and method thereof |
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| KR101735213B1 (en) * | 2015-12-23 | 2017-05-12 | 한국기초과학지원연구원 | Apparatus for laser beam combining |
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| CN103545718B (en) * | 2013-10-29 | 2016-06-22 | 西安炬光科技有限公司 | For the high-power semiconductor laser light-source system laser machined |
| KR101700392B1 (en) * | 2015-05-26 | 2017-02-14 | 삼성디스플레이 주식회사 | Laser annealing apparatus and method for manufacturing display apparatus using the same |
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| WO2003067334A2 (en) * | 2002-02-08 | 2003-08-14 | Carl Zeiss Smt Ag | Polarisation-optimised illumination system |
| JP2006253571A (en) * | 2005-03-14 | 2006-09-21 | Ishikawajima Harima Heavy Ind Co Ltd | Laser emission apparatus and method therefor, and laser anneal apparatus and method therefor |
| CN104347368A (en) * | 2013-07-26 | 2015-02-11 | 上海微电子装备有限公司 | Laser annealing device for multiple lasers and method thereof |
| CN104503098A (en) * | 2014-11-26 | 2015-04-08 | 大族激光科技产业集团股份有限公司 | Laser beam combination system |
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