CN112985630A - Non-magnetic high-uniformity temperature control structure based on non-contact constant-curvature arc-shaped collet - Google Patents

Non-magnetic high-uniformity temperature control structure based on non-contact constant-curvature arc-shaped collet Download PDF

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CN112985630A
CN112985630A CN202110171983.5A CN202110171983A CN112985630A CN 112985630 A CN112985630 A CN 112985630A CN 202110171983 A CN202110171983 A CN 202110171983A CN 112985630 A CN112985630 A CN 112985630A
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air chamber
oven
magnetic
temperature
contact
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CN112985630B (en
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雷旭升
张帅
邵琦
蔡泽
全伟
刘刚
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Beihang University
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Beihang University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor

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Abstract

A non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc collet is used for an air chamber temperature control system of an atomic spin inertia measurement system and comprises an atomic air chamber, a high-uniformity non-magnetic oven and a distributed non-magnetic heating film; the atomic gas chamber consists of a gas chamber ball and a gas chamber handle, and the working state of atoms is maintained by pumping light, so that the polarization control and measurement of atomic gas in the gas chamber are realized; the high-uniformity nonmagnetic oven consists of an oven fixing piece and an oven air chamber seat; the distributed non-magnetic heating film is composed of an integrated substrate, a positioning reference hole, a non-magnetic heating wire and an independent pad, high-density S-shaped antiparallel wiring is carried out in a mode that the positive layer and the negative layer are overlapped with the non-magnetic heating wire, the heating wire is divided into an upper part and a lower part, and accurate suppression of a magnetic field generated by driving current is realized while high uniform heating of the non-contact constant-curvature arc-shaped collet is guaranteed. The non-magnetic high-uniformity temperature control structure effectively inhibits the gradient of the air chamber caused by air convection heat dissipation of the pumping light hole of the air chamber, improves the inhibition precision of the residual magnetic field in the electric heating system, and realizes high-precision measurement and control of the temperature gradient in the air chamber not greater than 0.5K.

Description

Non-magnetic high-uniformity temperature control structure based on non-contact constant-curvature arc-shaped collet
Technical Field
The invention relates to a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet, which can be used in the technical field of inertial measurement of an atomic spin gyro.
Background
The inertial measurement system based on atomic spin is an inertial measurement device which is internationally recognized at present and has the largest development potential and the highest precision, a sensitive element of the inertial measurement system based on atomic spin is an atomic gas chamber filled with some specific gases, and the temperature of the gas chamber directly influences the density of atoms in the gas chamber, so that the integral sensitivity of the system is critically influenced. Therefore, controlling the stability and uniformity of the temperature of the chamber is critical.
The mainstream of the temperature control system for the atomic gas chamber is electric heating, and although the control is convenient to realize, the following defects exist: only line contact exists between the oven and the upper part of the air chamber, heating mainly depends on heat conduction of an oven air chamber seat, heating efficiency and integral uniformity are poor, air convection and heat dissipation at a pumping light hole are not specifically inhibited, and the gradient of a temperature field of the air chamber is larger; the temperature control point of the air chamber is single, the temperature control point is positioned on the handle of the air chamber and is far away from the ball of the air chamber, the temperature stability of only one point can be ensured, and the temperature of the main components of the air chamber cannot be reflected; the resistance leads are disordered and generate an irregular magnetic field.
Disclosure of Invention
The invention provides a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet, which can not only inhibit the air convection heat dissipation of a pumping unthreaded hole in a targeted manner, but also effectively overcome the problems of a residual magnetic field and single temperature control point in the conventional electric heating system, and realize high-precision measurement and control of the temperature gradient in an air chamber not greater than 0.5K.
The technical scheme of the invention is as follows:
a no magnetism high degree of consistency temperature control structure based on no contact constant curvature arc collet, its characterized in that comprises atom air chamber, high degree of consistency no magnetism oven and distributed no magnetism heating film triplex, distributes by interior to exterior, wherein:
the atomic gas chamber is divided into a gas chamber ball and a gas chamber handle, and the gas chamber ball is filled with working atomic gas K-Rb-21Ne and quenching gas N2Maintaining atoms in the gas cell sphere by pumping lightThe polarization state is detected by detecting light to realize the detection of angular velocity signals of atoms in the air chamber, and the air chamber handle is used for assisting in fixing and increasing the heat conduction area;
the high-uniformity nonmagnetic oven consists of an oven fixing part and an oven air chamber seat, wherein the two parts are milled and processed by boron nitride ceramics, are vertically nested together through direct insertion type clearance fit, and wrap an air chamber at the geometric center of the oven by utilizing a non-contact type constant-curvature arc-shaped collet, so that the temperature gradient of the air chamber is accurately measured;
the distributed non-magnetic heating film consists of six parts, namely an integrated substrate, a positioning reference hole, an upper non-magnetic heating wire, a lower non-magnetic heating wire and an independent pad, wherein the integrated substrate is made of a flexible high-temperature-resistant material polyimide film, the positioning reference hole in the middle of the substrate provides an installation positioning reference to realize position self-alignment, the upper non-magnetic heating wire is positioned on the upper part of the heating film to inhibit the influence of convection heat dissipation and enable the upper part of the air chamber to reach a set temperature, the lower non-magnetic heating wire is positioned on the lower part of the heating film to enable the lower part of the air chamber to reach a target temperature through heat conduction, so that the accurate control of the temperature in the air chamber is realized, the pads of the two non-magnetic heating wires are led out from the lower end of the heating film;
the invention relates to a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet, an oven fixing piece comprises an axial fixing threaded hole, a pumping unthreaded hole, a cylindrical orthogonal through hole, a constant-curvature arc-shaped concave claw, 2 non-contact precise temperature measuring grooves (upper), a convection monitoring temperature measuring groove, a symmetric demagnetization wiring groove, a direct insertion matching hole and a symmetric threaded hole, wherein the axial fixing threaded hole realizes the fixed connection of the oven fixing piece and an inertia measuring system base by using a non-magnetic screw, the pumping unthreaded hole is axially communicated to realize the passing of pumping light, the cylindrical orthogonal through holes are radially and uniformly distributed to realize the passing of detecting light, the constant-curvature arc-shaped concave claw, the non-contact precise temperature measuring grooves (upper), the convection monitoring temperature measuring groove and the symmetric demagnetization wiring groove form the upper half part of the non-contact constant-curvature arc-shaped collet to realize the precise thermal control and measurement of the temperature, the direct-insertion matching hole is positioned at the lower part of the oven fixing piece, so that the quick direct-insertion fastening matching between the oven air chamber seat and the oven fixing piece is realized; the symmetrical threaded holes are positioned on the lower surface of the oven air chamber seat to realize the fixed connection with the oven air chamber seat;
the invention relates to a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet, an oven air chamber seat is composed of 7 parts including 4 constant-curvature arc-shaped collets, 2 non-contact accurate temperature measuring grooves (lower part), 4 detection light holes, 1 air chamber handle positioning observation hole, 2 axial symmetric demagnetizing wiring holes, wiring grooves and 2 concave screw positioning auxiliary holes, wherein the constant-curvature arc-shaped collets, the non-contact accurate temperature measuring grooves (lower part), the detection light holes, the air chamber handle positioning observation holes and the demagnetizing wiring holes form the lower half part of the non-contact constant-curvature arc-shaped collet to realize accurate thermal control and measurement of air chamber temperature, the wiring grooves are symmetrically distributed on the outer side surface of the lower part of the oven air chamber seat to realize aligned matching with the symmetric demagnetizing wiring grooves, the concave screw positioning auxiliary holes are arranged on the lower surface of the oven air chamber seat to be matched with the wiring fastening screw holes, the connection between the oven fixing piece and the oven air chamber seat is realized, the assembly gaps of all parts are filled by high-heat-conducting glue in the whole assembly process, the contact area with the air chamber is increased to improve the uniformity, and the accurate targeted heat transfer is realized to improve the heat conduction efficiency;
the invention relates to a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet, which comprises constant-curvature arc-shaped concave claws, a non-contact accurate temperature measuring groove (upper), a convection monitoring temperature measuring groove, a symmetrical degaussing wiring groove, constant-curvature arc-shaped claws, a non-contact accurate temperature measuring groove (lower), a detection light hole, an air chamber handle positioning observation hole and a degaussing wiring hole, wherein the constant-curvature arc-shaped concave claws are positioned in the middle of an oven fixing piece to realize high contact rate and high wrapping area of the oven fixing piece and the upper half part of an air chamber ball, 4 constant-curvature arc-shaped claws are positioned on the upper surface of the oven air chamber to realize complete wrapping of the air chamber, and the non-contact high-uniformity temperature control structure has the advantages of high heat conduction rate and good uniformity, 2 non-contact accurate temperature measuring grooves (upper) are positioned inside the arc-shaped concave claws to install high-precision 1000 PT thermistor for accurate temperature measurement and, two non-contact accurate temperature measuring grooves (lower) are positioned inside two opposite arc claws with equal curvature to realize accurate temperature measurement on the lower half part of the air chamber ball, four temperature measuring grooves form axial staggered and radial uniform distribution without influencing each other, an independent high-accuracy PT1000 thermistor in the temperature measuring grooves is used as a temperature sensor to realize accurate measurement on a temperature field of the air chamber ball, a pair of high-accuracy PT1000 thermistors in corresponding positions is used as temperature feedback to realize closed-loop control of temperature, the other group is used as a backup detection temperature field, a convection monitoring temperature measuring groove is positioned on the inner wall of a pumping unthreaded hole, 2 independent high-accuracy PT1000 thermistors are placed to target and monitor the temperature of the upper half part of the air chamber to realize accurate measurement on a temperature field of an oven, a symmetrical degaussing wiring groove is positioned on the outer side of the non-contact accurate temperature measuring grooves (upper), and the axial symmetrical distribution ensures that temperature measuring currents are mutually offset on the basis of not, the elimination of a magnetic field is realized, 4 detection light holes are positioned in the middle of the arc-shaped claw with equal curvature, the communication of two beams of orthogonal detection light is realized, an axially communicated air chamber handle positioning observation hole is positioned in the central axis direction of an oven air chamber seat, an air chamber handle is installed and heat conducting glue is coated, the accurate thermal control is realized, and the parallel wiring and the symmetrical demagnetization of a high-precision PT1000 thermistor lead wire are realized through an axially symmetrical demagnetization wiring hole;
according to the non-magnetic high-uniformity temperature control structure based on the non-contact equal-curvature arc-shaped collet, the upper and lower non-magnetic heating wires are made of nichrome, high-density S-shaped antiparallel wiring is conducted in a positive and negative double-layer overlapping non-magnetic mode, the wiring is designed to be distributed in a left-right staggered mode, the two non-magnetic heating wires are not electrically connected, and the positive and negative currents are in a reverse phase mode during excitation, so that the accurate suppression of a magnetic field generated by driving current is realized while high-uniformity heating is guaranteed, the current flow directions of the upper and lower non-magnetic heating wires are the same in the operation process, and the residual magnetic field brought by the heating current to an.
Compared with the prior art, the invention has the advantages that:
1. the non-magnetic high-uniformity temperature control structure based on the non-contact type constant-curvature arc-shaped collet realizes precise measurement and control of the gradient of the air chamber through the innovative non-contact type constant-curvature arc-shaped collet, realizes large-area precise thermal control through a distributed non-magnetic heating film, and efficiently solves the problem of the temperature gradient of the air chamber caused by convection heat dissipation of a pumping optical hole;
2. the constant-curvature arc-shaped collet realizes the accurate measurement of the temperature field of the air chamber ball through the non-contact accurate temperature measuring groove in the constant-curvature arc-shaped concave claw on the basis of ensuring the pumping effect, and solves the problem of asymmetrical heating of the upper part and the lower part of the air chamber through the constant-curvature arc-shaped concave claw on the oven fixing piece;
3. the distributed non-magnetic heating film realizes accurate suppression of a residual magnetic field of a driving current through reverse-phase control of front and back currents on the basis of ensuring accurate thermal control through the layout of front and back double-layer non-magnetic heating wires of S-shaped parallel wiring, and provides a non-magnetic environment to the maximum extent.
Drawings
FIG. 1 is a cross-sectional view of 1/2 illustrating a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet;
FIG. 2 is a schematic structural view of a non-magnetic high-uniformity temperature control structure of an oven fixture based on a non-contact iso-curvature arc collet;
FIG. 3 is a schematic structural view of an oven air chamber base of a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc collet;
FIG. 4 is a schematic structural view of a distributed non-magnetic heating film based on a non-contact constant-curvature arc-shaped collet and having a non-magnetic high-uniformity temperature control structure;
each of the labels in the figure is:
1-air chamber, 11-air chamber ball, 12-air chamber handle, 2-high uniformity non-magnetic oven, 21-oven fixture, 211-axial fixture threaded hole, 212-pumping light hole, 213-cylindrical orthogonal through hole, 214-constant curvature arc-shaped concave claw, 215-non-contact precise temperature measuring groove (upper), 216-convection monitoring temperature measuring groove, 217-symmetrical degaussing wiring groove, 218-straight-insertion matching hole, 219-symmetrical threaded hole, 22-oven air chamber seat, 221-constant curvature arc-shaped claw, 222-non-contact precise temperature measuring groove (lower), 223-detection light hole, 224-air chamber handle positioning observation hole, 225-axial symmetrical degaussing wiring hole, 226-wiring groove, 227-concave screw positioning auxiliary hole, 23-constant curvature arc-shaped collet, 3-distributed non-magnetic heating film, 31-integrated substrate, 32-positioning reference hole, 33-upper non-magnetic heating wire, 34-lower non-magnetic heating wire, 35-upper bonding pad, 36-lower bonding pad
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described in more detail below with reference to specific examples and comparative examples:
a non-magnetic high-uniformity temperature control structure based on a non-contact constant-curvature arc-shaped collet comprises an atomic gas chamber 1, a high-uniformity non-magnetic oven 2 and a distributed non-magnetic heating film 3, and the non-magnetic high-uniformity temperature control structure is distributed from inside to outside; the accurate measurement and control of the temperature field of the multiple redundant air chambers are realized by the innovative non-contact constant-curvature arc-shaped collet 23 in cooperation with the distributed non-magnetic heating film 3;
the atomic gas chamber 1 is divided into a gas chamber ball 11 and a gas chamber handle 12, the diameter of the gas chamber ball 11 is 10mm, and the ball is filled with working atomic gas K-Rb-21Ne and 50Torr of N as a quenching gas2The pumping light realizes the polarization detection of atoms in the air chamber through a pumping light hole 212 positioned at the top of the air chamber ball, and the detection light realizes the detection of the angular velocity signals of the atoms in the air chamber through two pairs of mirrored detection light holes 213 and 223 positioned in the middle of the oven; the air chamber handle 12 is used for assisting in fixing and increasing the heat conducting area;
the high-uniformity nonmagnetic oven 2 consists of an oven fixing part 21 and an oven air chamber seat 22, wherein the two parts are milled and processed by boron nitride ceramics, are vertically nested together through straight-insertion clearance fit, and an air chamber 1 is coated at the geometric center of the oven 2 by utilizing an innovative non-contact type constant-curvature arc-shaped collet 23;
the oven fixing piece 21 consists of 9 parts including an axial fixing threaded hole 211, a pumping light hole 212, a cylindrical orthogonal through hole 213, an arc-shaped concave claw with equal curvature 214, 2 non-contact precise temperature measuring grooves (upper) 215, a convection monitoring temperature measuring groove 216, a symmetrical degaussing wiring groove 217, a direct-insert matching hole 218 and a symmetrical threaded hole 219; the axial fixing threaded holes 211 are radially and uniformly distributed on the upper surface of the oven fixing piece 21, and the oven fixing piece 21 is fixedly connected with the inertia measurement system base by using non-magnetic screws; the pumping light hole 212 is positioned in the upper half part of the oven fixing piece, is axially communicated, and has the radius of four fifths (8mm) of the radius of the air chamber ball, so that pumping light can pass through; the cylindrical orthogonal through holes 213 are positioned in the middle of the oven fixing part 21 and are uniformly distributed in the radial direction, and the radius is the effective light spot radius (5mm) of detection light, so that the passing of the detection light is realized; the constant-curvature arc-shaped concave claw 214 is positioned in the middle of the oven fixing piece 21, the curvature radius is designed to be the radius (5mm) of the air chamber ball, and the curvature center is positioned in the central axis, so that the high contact rate and the high wrapping area of the oven fixing piece 21 and the upper half part of the air chamber ball 11 are realized; the non-contact accurate temperature measuring groove (upper) 215 is positioned inside the arc-shaped concave claw 214, is symmetrically distributed, and is used for arranging a high-precision PT1000 thermistor for accurate temperature measurement and realizing uniform contact between the arc-shaped claw and the air chamber; the convection monitoring temperature measuring groove 216 is positioned on the inner wall of the pumping unthreaded hole and in the middle of the upper half section of the oven fixing piece 21, and is used for monitoring the temperature of the upper half section of the air chamber in a targeted manner aiming at the influence of air convection at the pumping unthreaded hole; the symmetrical degaussing wiring groove 217 is positioned at the outer side of the non-contact type accurate temperature measuring groove (upper) 215, and on the basis of not influencing heat transfer, the axial symmetrical distribution ensures that temperature measuring currents are mutually offset, so that the elimination of a magnetic field is realized; the straight-insertion matching hole 218 is positioned at the lower part of the oven fixing piece 21 and is used for placing the oven air chamber seat 22, so that the quick straight-insertion fastening matching between the oven air chamber seat 22 and the oven fixing piece 21 is realized; the symmetrical threaded holes 219 are located on the lower surface of the oven air chamber seat 22 to realize the fixed connection with the oven air chamber seat;
the oven air chamber seat 22 consists of 7 parts including 4 arc claws 221 with equal curvature, 2 non-contact precise temperature measuring grooves (lower) 222, 4 detection light holes 223, 1 air chamber handle positioning observation hole 224, 2 axial symmetrical degaussing wiring holes 225, wiring grooves 226 and 2 concave screw positioning auxiliary holes 227; the 4 arc claws 221 with equal curvature are positioned on the upper surface of the oven air chamber seat 22 and are uniformly distributed in the radial direction, the curvature radius is 5mm, and the curvature center is positioned at the center of the upper surface of the oven air chamber seat 22, so that the air chamber is completely wrapped, and the oven air chamber wrapping device has the advantages of high heat conduction rate and good uniformity; the non-contact accurate temperature measuring groove 222 is positioned inside the two opposite arc claws 221 with equal curvature, so that accurate temperature measurement of the lower half part of the air chamber ball 11 is realized; the 4 detection light holes 223 are positioned in the middle of each arc claw with equal curvature, have a radius of 5mm and are semi-cylindrical, and form coaxial line matching with the cylindrical orthogonal through hole 213 to realize the communication of two beams of orthogonal detection light; the axially through air chamber handle positioning observation hole 224 is positioned in the central axis direction of the oven air chamber seat 22, and the air chamber handle is installed and coated with heat conducting glue to realize accurate thermal control; the axial symmetric demagnetizing wire holes 225 are positioned below the two non-contact precise temperature measuring grooves (lower) 222 and are 5.5mm away from the central axis, so that parallel wiring and symmetric demagnetizing of high-precision PT1000 thermistor lead wires are realized; the wiring grooves 226 are positioned on the outer side surface of the lower part of the oven air chamber seat, are symmetrically distributed, and are aligned and matched with the symmetrical demagnetization wiring grooves 215 after being assembled to realize wiring; the concave screw positioning auxiliary hole 227 is positioned on the lower surface of the oven air chamber seat and is matched with the positioning fastening threaded hole 219 to realize the connection of the oven fixing piece 21 and the oven air chamber seat 22; in the whole assembly process, high-heat-conductivity glue is adopted to fill assembly gaps of all parts, the contact area with the air chamber is increased to improve the uniformity, and accurate targeted heat transfer is realized to improve the heat conduction efficiency;
the distributed non-magnetic heating film 3 consists of 6 parts including an integrated substrate 31, a positioning datum hole 32, an upper non-magnetic heating wire 33, a lower non-magnetic heating wire 34 and independent pads 35 and 36; the integrated substrate 31 is made of a flexible high-temperature-resistant material polyimide film, and a positioning datum hole 32 in the middle of the substrate provides an installation positioning datum to realize position self-alignment; the upper non-magnetic heating wire 33 is positioned at the upper part of the heating film to inhibit the influence of convection heat dissipation and enable the upper part of the air chamber to reach a set temperature; the lower non-magnetic heating wire 34 is positioned at the lower part of the heating film, so that the lower part of the air chamber reaches the target temperature through heat conduction, and the accurate control of the temperature in the air chamber is realized; the non-magnetic heating wires 33 and 34 are made of nichrome, the wires are distributed in a left-right staggered mode, and the wires are not electrically connected; the welding pads 35 and 36 of the non-magnetic heating wires are led out from the lower end of the heating film to realize integration, so that the trouble of leading out a driving wire from the upper end can be avoided, and the welding is convenient;
according to Faraday' S law of electromagnetic induction, the distributed non-magnetic heating film 3 adopts a mode of superposing double layers of front and back non-magnetic heating wires to perform high-density S-shaped antiparallel wiring, and adopts a mode of inverting currents on the front and back surfaces during excitation, the line width and the line spacing of the non-magnetic heating wires are calculated by Mathcad simulation software, the line width, the thickness and the line spacing of each layer of the heating wires are 0.2mm, 0.01mm and 0.2mm respectively, and the precise inhibition of a magnetic field generated by driving current is realized while high uniform heating is ensured; the upper and lower parts have the same structure without magnetic heating wires 33 and 34, are equidistant (4mm) from the center of the positioning reference hole 32, have the same current flow direction, and eliminate the residual magnetic field brought by the heating current of the two parts to the air chamber ball 11.
It should be noted that the above-described embodiments may enable those skilled in the art to more fully understand the present invention, but do not limit the present invention in any way. Therefore, although the present invention has been described in detail with reference to the drawings and examples, it will be understood by those skilled in the art that the present invention may be modified and equivalents may be substituted. In conclusion, all technical solutions and modifications thereof without departing from the spirit and scope of the present invention should be covered by the protection scope of the present patent.
Those skilled in the art will appreciate that the invention may be practiced without these specific details.

Claims (5)

1. The utility model provides a no magnetism high degree of consistency temperature control structure based on no contact isopycnic curvature arc collet which characterized in that comprises atom air chamber, high degree of consistency no magnetism oven and distributed no magnetism heating film triplex, distributes from inside to outside, wherein:
the atomic gas chamber is divided into a gas chamber ball and a gas chamber handle, and the gas chamber ball is filled with working atomic gas K-Rb-21Ne and quenching gas N2The polarization state of atoms in the air chamber ball is maintained by pumping light, the detection of angular velocity signals is realized by detecting light, and the air chamber handle is used for assisting in fixing and increasing the heat conduction area;
the high-uniformity nonmagnetic oven consists of an oven fixing part and an oven air chamber seat, wherein the two parts are milled and processed by boron nitride ceramics, are vertically nested together through direct insertion type clearance fit, and wrap an air chamber at the geometric center of the oven by utilizing a non-contact type constant-curvature arc-shaped collet, so that the accurate measurement and control of the temperature gradient of the air chamber are realized;
the distributed non-magnetic heating film consists of six parts, namely an integrated substrate, a positioning reference hole, an upper non-magnetic heating wire, a lower non-magnetic heating wire and an independent pad, wherein the integrated substrate is made of a flexible high-temperature-resistant material polyimide film, the positioning reference hole in the middle of the substrate provides an installation positioning reference to realize position self-alignment, the upper non-magnetic heating wire is positioned on the upper part of the heating film to inhibit the influence of convection heat dissipation, so that the upper part of the air chamber reaches a set temperature, the lower non-magnetic heating wire is positioned on the lower part of the heating film, the lower part of the air chamber reaches a target temperature through heat conduction, the accurate control of the temperature in the air chamber is realized, the two pads of the non-magnetic heating wires are led out from the lower end of the heating film to realize integration.
2. The non-magnetic high-uniformity temperature control structure based on the non-contact constant-curvature arc-shaped collet according to claim 1, wherein the oven fixture is composed of 9 parts including an axial fixing threaded hole, a pumping light hole, a cylindrical orthogonal through hole, a constant-curvature arc-shaped concave claw, 2 non-contact precise temperature measuring grooves (on), a convection monitoring temperature measuring groove, a symmetric demagnetization wiring groove, a direct insertion matching hole and a symmetric threaded hole, the axial fixing threaded hole utilizes a non-magnetic screw to realize the fixed connection of the oven fixture and the inertial measurement system base, the pumping light hole is axially through to realize the passing of pumping light, the cylindrical orthogonal through hole is radially and uniformly distributed to realize the passing of detection light, the constant-curvature arc-shaped concave claw, the non-contact precise temperature measuring groove (on), the convection monitoring temperature measuring groove and the symmetric demagnetization wiring groove form the upper half part of the non-contact constant-curvature arc-shaped collet, the temperature of the air chamber is accurately controlled and measured, the direct-insertion matching hole is positioned at the lower part of the oven fixing piece, and the quick direct-insertion fastening matching between the oven air chamber seat and the oven fixing piece is realized; the symmetrical threaded holes are located on the lower surface of the oven air chamber seat and fixedly connected with the oven air chamber seat.
3. The non-magnetic high-uniformity temperature control structure based on the non-contact constant-curvature arc-shaped collet according to claim 1, characterized in that the oven air chamber seat is composed of 7 parts of 4 constant-curvature arc-shaped collets, 2 non-contact precise temperature measuring grooves (lower part), 4 detection light holes, 1 air chamber handle positioning observation hole, 2 axially symmetric demagnetizing wiring holes, wiring grooves and 2 concave screw positioning auxiliary holes, the constant-curvature arc-shaped collets, the non-contact precise temperature measuring grooves (lower part), the detection light holes, the air chamber handle positioning observation holes and the demagnetizing wiring holes form the lower half part of the non-contact constant-curvature arc-shaped collet to realize precise thermal control and measurement of the air chamber temperature, the wiring grooves are symmetrically distributed on the outer side surface of the lower part of the oven air chamber seat to realize alignment and matching with the symmetric demagnetizing wiring grooves, the concave screw positioning auxiliary wiring holes are located on the lower surface of the oven air chamber seat, and the high-heat-conducting glue is adopted in the whole assembly process to fill the assembly clearance of each part, the contact area between the high-heat-conducting glue and the air chamber is increased to improve the uniformity, and the accurate targeted heat transfer is realized and the heat conduction efficiency is improved.
4. The non-magnetic high-uniformity temperature control structure based on the non-contact constant-curvature arc-shaped collet according to claim 1, characterized in that the constant-curvature arc-shaped collet is composed of 9 parts of a constant-curvature arc-shaped concave claw, a non-contact precise temperature measuring groove (upper), a convection monitoring temperature measuring groove, a symmetrical degaussing wiring groove, a constant-curvature arc-shaped claw, a non-contact precise temperature measuring groove (lower), a detection light hole, an air chamber handle positioning observation hole and a degaussing wiring hole, the constant-curvature arc-shaped concave claw is positioned in the middle of the oven fixing part to realize high contact rate and high wrapping area of the oven fixing part and the upper half part of the air chamber ball, 4 constant-curvature arc-shaped claws are positioned on the upper surface of the oven air chamber seat to realize complete wrapping of the air chamber, and has the advantages of high heat conduction rate and good uniformity, 2 non-contact precise temperature measuring grooves (upper) are positioned in the arc-shaped concave claw to place a high-precision PT1000 thermistor, the uniform contact between the arc claw and the air chamber is realized, 2 non-contact accurate temperature measuring grooves (lower part) are positioned inside the opposite 2 arc claws with equal curvature, the accurate temperature measurement of the lower half part of the air chamber ball is realized, four temperature measuring grooves form axial staggered and radial uniform distribution and are not influenced mutually, an independent high-precision PT1000 thermistor in the temperature measuring groove is used as a temperature sensor to realize the accurate measurement of the temperature field of the air chamber ball, a pair of high-precision PT1000 thermistors in corresponding positions is used as temperature feedback to realize the closed-loop control of the temperature, the other group is used as a backup detection temperature field, a convection monitoring temperature measuring groove is positioned on the inner wall of a pumping unthreaded hole, 2 independent high-precision PT1000 thermistors are placed to monitor the temperature of the upper half part of the air chamber in a targeted manner to realize the accurate measurement of the temperature field of the oven, a symmetrical degaussing wiring groove is positioned outside the non-contact accurate temperature measuring grooves (upper part, the axial symmetry distributes and guarantees that temperature measurement electric current offsets each other, realizes the elimination in magnetic field, and 4 detection unthreaded holes are located the centre of constant curvature arc claw, realize two bundles of quadrature detection light and link up, and the air chamber handle location observation hole that the axial is link up is located oven air chamber seat axis direction, and installation air chamber handle is glued with scribbling the heat conduction, realizes accurate thermal control, and the parallel of high accuracy PT1000 thermistor lead wire is walked line and the symmetry demagnetization is realized to axial symmetry formula demagnetization walking hole.
5. The non-magnetic high-uniformity temperature control structure based on the non-contact constant-curvature arc collet is characterized in that the upper and lower non-magnetic heating wires are made of nichrome, high-density S-shaped antiparallel wiring is performed in a mode of superposing front and back double layers of the non-magnetic heating wires, the wiring is designed to be distributed in a left-right staggered mode, the upper and lower non-magnetic heating wires are not electrically connected, and currents on the front and back surfaces are in opposite phases during excitation, so that the magnetic field generated by driving current is accurately inhibited while high uniform heating is ensured, the currents of the upper and lower non-magnetic heating wires are in the same flow direction during operation, and residual magnetic fields caused by heating current to an air chamber ball are eliminated.
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