CN112981542B - Cooling system of crystal growth furnace - Google Patents
Cooling system of crystal growth furnace Download PDFInfo
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- CN112981542B CN112981542B CN202110212579.8A CN202110212579A CN112981542B CN 112981542 B CN112981542 B CN 112981542B CN 202110212579 A CN202110212579 A CN 202110212579A CN 112981542 B CN112981542 B CN 112981542B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Abstract
The application discloses a cooling system of a crystal growth furnace, which comprises a cooling medium channel, a filtering device, a storage device and a control unit, wherein one end of the cooling medium channel penetrates into a crystal growth furnace body; the storage device is provided with a standby filtering unit; the crystal growth furnace also comprises a controlled replacement device and a monitoring unit, the monitoring unit monitors the flow of the cooling medium flowing into the furnace body of the crystal growth furnace and provides monitoring information for the control unit, the controlled replacement device is controlled by the control unit, and when the flow of the overflowing channel is smaller than a set value, the controlled replacement device replaces the filtering unit on the overflowing channel with the standby filtering unit. The cooling system of long brilliant stove that this application discloses has advantages such as real-time supervision, automatic troubleshooting, ensure long brilliant stove safety and stability work.
Description
Technical Field
The application belongs to the technical field of long brilliant industry, especially relates to a cooling system of long brilliant stove.
Background
As is well known, silicon carbide is one of the important third-generation semiconductor materials, and has the characteristics of large forbidden bandwidth, high saturated electron mobility, high breakdown strength, high thermal conductivity and the like, so that the silicon carbide is widely applied to the fields of power electronics, radio frequency devices, photoelectronic devices and the like.
In the production of silicon carbide, the environment within the crystal growth furnace must be accurately monitored and controlled in order to obtain a product of a certain quality. The control of temperature has important influence to the long brilliant process of long brilliant stove, so long brilliant stove needs set up cooling system, and though its coolant passes through purification treatment, the coolant passageway of the cooling system that the brilliant stove of growing set up can inevitably get into particulate impurity, causes the jam, and then leads to the coolant flow to take place unusually, produces very big influence to the growth of carborundum crystal, and in serious cases, can even cause the incident.
In addition, the crystal growth furnaces in a factory are more, a small number of workers are difficult to implement global monitoring, and if a water cooling system of the crystal growth furnace fails, the crystal growth furnace cannot be processed in time, so that the production of silicon carbide is seriously influenced; if the crystal growth furnace can be used for monitoring a cooling system of the crystal growth furnace in the crystal growth process in the whole process, automatically eliminating faults and the like, the crystal growth furnace has important significance. Therefore, the applicant proposes a cooling system of the crystal growth furnace, which can carry out whole-process monitoring and automatic troubleshooting on the crystal growth furnace.
The above description is included in the technical recognition scope of the inventors, and does not necessarily constitute the prior art.
Disclosure of Invention
The invention provides a cooling system of a crystal growing furnace, which aims to solve at least one technical problem in the technical problems.
The technical scheme adopted by the invention is as follows:
a cooling system of a crystal growth furnace comprises a cooling medium channel, a filtering device, a storage device and a control unit, wherein one end of the cooling medium channel penetrates through a crystal growth furnace body, the filtering device is communicated with the cooling medium channel arranged on the outer side of the crystal growth furnace body, the filtering device comprises a flow passage, the filtering unit is arranged on the flow passage, and cooling medium flows through the filtering unit and then provides cooling medium for the interior of the crystal growth furnace body; the storage device is arranged on one side of the filtering device, and a standby filtering unit is arranged on the storage device; the cooling system of the crystal growth furnace further comprises a controlled replacement device and a monitoring unit, the monitoring unit monitors the flow of the cooling medium flowing into the furnace body of the crystal growth furnace and provides monitoring information for the control unit, the controlled replacement device is controlled by the control unit, and when the flow of the overflowing channel is smaller than a set value, the controlled replacement device replaces the filtering unit on the overflowing channel with the standby filtering unit.
Preferably, the filtering device further comprises a spare overflowing channel, a filtering unit is arranged on the spare overflowing channel, stop switches are arranged on the overflowing channel and the spare overflowing channel, and when the overflowing channel is in a flowing state, the spare overflowing channel is in a stop state;
when the flow of the overflowing channel is smaller than a set value, the overflowing channel is in a cut-off state, and cooling medium flows through the standby overflowing channel to provide cooling medium for the crystal growth furnace body.
Preferably, a first cut-off switch is arranged on the upstream of the fluid of the overflowing channel, a second cut-off switch is arranged on the downstream of the overflowing channel, and the opening and closing of the first cut-off switch and/or the second cut-off switch are controlled by the control unit.
Preferably, the monitoring unit comprises a flow sensor, the flow sensor is in signal connection with the control unit, and the flow sensor is arranged on the flow passage upstream and/or downstream of the filtering unit to provide flow monitoring information for the control unit;
when the flow of the overcurrent channel is smaller than a set value, the control unit controls the first stop switch and/or the second stop switch to enable the overcurrent conduction to be in a stop state.
Preferably, the controlled replacement device comprises a driving mechanism, a transmission mechanism and an actuating mechanism for replacing the filter unit, the transmission mechanism is arranged at one side of the filter device and the storage device in a neighboring manner, the driving mechanism is in transmission arrangement with the transmission mechanism, and the actuating mechanism is connected with the transmission mechanism; the driving mechanism and the actuating mechanism are controlled by the control unit;
and when the flow of the overflowing channel is smaller than a set value, the driving mechanism and the executing mechanism replace the filtering unit arranged on the overflowing channel with the standby filtering unit according to the instruction of the control unit.
Preferably, the transmission mechanism comprises a lead screw and a slide block matched with the lead screw, the actuating mechanism is fixedly arranged on the slide block, the driving mechanism is a driving motor, and the lead screw is driven by the driving motor and rotates to adjust the actuating position of the actuating mechanism;
the executing mechanism can take out the filtering units on the overflowing channel according to the instructions sent by the control unit, grab the standby filtering units from the storage device and place the standby filtering units on the overflowing channel.
Preferably, the cooling system of the crystal growth furnace further comprises an early warning unit, the early warning unit is controlled by the control unit, and when the flow of the cooling medium of the overflowing channel is reduced and is continuously set for a long time, the early warning unit sends an emergency early warning signal;
when the early warning unit sends out an emergency early warning signal, the overflowing channel is in a cut-off state, the standby overflowing channel is in a connected state, and cooling media flow through the standby overflowing channel to provide cooling media for the interior of the crystal growth furnace body.
Preferably, when the early warning unit does not send out an early warning signal within a set time, the controlled replacement device is controlled by the control unit to periodically replace the filtering unit arranged on the overflow channel.
Preferably, the early warning unit further comprises a safety early warning state, and when the flow of the overflow channel is smaller than the set safety early warning flow, the early warning unit sends out a safety early warning signal and stops the crystal growth process in the crystal growth furnace.
Preferably, the early warning unit further comprises a common early warning state, when the flow of the overflowing channel fluctuates by +/-3L/min of the set overflowing flow, the early warning unit sends out a common early warning signal, and at the moment, the working state of the crystal growing furnace is monitored manually, but manual intervention is not performed.
The cooling system of a crystal growth furnace provided by the application can bring the following beneficial effects:
1. the cooling system of the crystal growth furnace comprises a storage device for storing the standby filter unit and a controlled replacement device, wherein the controlled replacement device is controlled by a control unit, and when the flow on the overflowing channel is smaller than a set value, the controlled replacement device can automatically replace the filter unit on the overflowing channel by the standby filter unit so as to quickly and automatically solve the problem that the cooling system cannot cool the crystal growth furnace according to the set requirement due to blockage of the filter unit; therefore, the fault caused by the blockage of the filtering unit can be automatically and timely eliminated to ensure that the cooling system can effectively and reliably cool the crystal growth furnace, and the influence of the cooling system on the crystal growth process of the crystal growth furnace is greatly avoided to ensure the crystal growth quality.
2. This application is through making filter equipment includes reserve passageway that overflows, works as the flow that overflows the passageway does not reach standard, accessible reserve passageway that overflows provides coolant to long brilliant stove, when guaranteeing the normal cooling requirement of long brilliant stove, avoids filter unit to break down the back because the maintenance is untimely, causes the influence scheduling problem to long brilliant production.
3. According to the crystal growth furnace early warning device, due to the arrangement of the early warning unit, when the flow of the cooling medium of the overflowing channel is reduced and is continuously set for a long time, the early warning unit sends out an emergency early warning signal to remind a worker to manually monitor the crystal growth furnace, and meanwhile, the controlled replacement device is controlled by the control unit to execute the replacement process of the filtering unit, so that automatic fault removal is realized; under the prompt of the early warning unit, the crystal growth furnace can be effectively and manually monitored, and the occurrence of an unexpected situation is avoided; in addition, this application is through making the early warning unit still has the safety precaution state, makes the workman can in time make emergency treatment, avoids the emergence of incident.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a schematic structural diagram of a crystal growth furnace provided in an embodiment of the present application;
fig. 2 is a schematic view of a flow path composition of a cooling system of a crystal growth furnace according to an embodiment of the present application.
Wherein, 1 the cooling medium channel is provided with a cooling medium channel,
2 filtration means, 21 flow-through channel, 22 backup flow-through channel, 23 filtration unit,
3, storing the device in a storage device,
4, a furnace body of the crystal growth furnace,
5, a spare filtering unit is arranged on the filter,
6 controlled displacement device, 61 transmission mechanism, 611 lead screw, 612 slide block, 62 actuating mechanism,
71 a first cut-off switch, 72 a second cut-off switch.
Detailed Description
In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.
In the description of the present application, it is to be understood that the terms "central," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, references to the description of the terms "an aspect," "some aspects," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the aspect or example is included in at least one aspect or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same solution or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more aspects or examples.
In the present application, the number is included in a certain number or more, and two or more, for example.
For convenience of description, the terms "front", "rear", "left", "right", "upper" and "lower" are used in the following description to describe the orientation of the crystal growth furnace relative to the user.
The crystal growth furnace shown in fig. 1 comprises a crystal growth furnace body 4, a cooling medium channel 1, a filtering device 2, a storage device 3 and a control unit, wherein one end of the cooling medium channel 1 penetrates into the crystal growth furnace body 4, the filtering device 2 is communicated with the cooling medium channel 1 arranged on the outer side of the crystal growth furnace body 4, the filtering device 2 comprises a flow passage 21, a filtering unit 23 is arranged on the flow passage 21, and cooling medium flows through the filtering unit 23 and then provides cooling medium for the interior of the crystal growth furnace body 4; the storage device 3 is arranged at one side of the filtering device 2, and a standby filtering unit 5 is arranged on the storage device 3; the cooling system of the crystal growth furnace further comprises a controlled replacement device 6 and a monitoring unit, the monitoring unit monitors the flow of the cooling medium flowing into the crystal growth furnace body 4 and provides monitoring information for the control unit, the controlled replacement device 6 is controlled by the control unit, and when the flow of the overflowing channel 21 is smaller than a set value, the controlled replacement device 6 replaces the filtering unit 23 on the overflowing channel 21 with the spare filtering unit 5. The cooling medium in the cooling medium channel 1 is not particularly limited, and may be any cooling medium that can satisfy the cooling requirement, and in particular, the cooling medium is preferably made of cooling water. In addition, the part of the cooling medium channel 1 extending into the crystal growth furnace body 4 can be set as one or more branches, as shown in fig. 2, the part of the cooling medium channel 1 extending into the crystal growth furnace body 4 can be selectively provided with a plurality of cooling branches according to actual requirements and penetrates out of the crystal growth furnace body 4. In specific implementation, the cooling medium channel 1 can further form a circulation loop selectively, so that the cooling medium can perform circulation cooling on the crystal growth furnace. In practical implementation, the set value of the flow rate of the flow passage 21 is not particularly limited, and can be selectively set and matched according to the cooling capacity required by the crystal growth furnace. The cooling system of the crystal growth furnace comprises a storage device 3 for storing a standby filtering unit 5 and a controlled replacement device 6, wherein the controlled replacement device 6 is controlled by a control unit, and when the flow on the overflowing channel 21 is smaller than a set value, the controlled replacement device 6 can automatically replace the filtering unit 23 on the overflowing channel 21 by the standby filtering unit 5 so as to solve the problem that the cooling system cannot cool the crystal growth furnace according to the set requirement due to the blockage of the filtering unit 23; meanwhile, the fault caused by the blockage of the filtering unit 23 can be automatically and timely eliminated to ensure that the cooling system can effectively and reliably cool the crystal growing furnace, so that the influence of the cooling system on the crystal growing process of the crystal growing furnace is greatly avoided, and the crystal growing quality and the production safety are ensured.
As a preferred embodiment of the present application, the filtering apparatus 2 further selectively further includes a spare flow-through channel 22, a filtering unit 23 is disposed on the spare flow-through channel 22, both the flow-through channel 21 and the spare flow-through channel 22 are provided with a cut-off switch, and when the flow-through channel 21 is in a flow state, the spare flow-through channel 21 is in a cut-off state; in specific operation, when the flow rate of the flow passage 21 is smaller than a set value, the flow passage 21 is in a cut-off state, and a cooling medium flows through the standby flow passage 22 to provide the cooling medium for the crystal growth furnace body 4. In specific implementation, as shown in fig. 2, a first cut-off switch 71 may be further selectively disposed upstream of the flow passage 21, a second cut-off switch 72 may be disposed downstream of the flow passage 21, and the opening and closing of the first cut-off switch 71 and the second cut-off switch 72 may be controlled by the control unit. As a switchable embodiment, the present application may also selectively allow the opening and closing of one of the first off switch 71 and the second off switch 72 to be controlled by the control unit. The first cut-off switch 71 and the second cut-off switch 72 can be selectively set as cut-off valves, and further preferably as controlled cut-off valves. In addition, this application can also use in the maintenance process of the cooling system of crystal growth stove through setting up the stop valve. This application is through making filter equipment 2 includes reserve passageway 22 that overflows, works as the flow that overflows passageway 21 does not reach standard, accessible reserve passageway 22 that overflows provides coolant to long brilliant stove, avoids 23 trouble backs of filter unit to cause the influence to long brilliant production because troubleshooting is not timely. In practical implementation, the filtering device 2 may optionally include at least one spare flow-through channel 22, which may be provided with two, three, four or five spare flow-through channels 22, and a filtering unit 23 is provided on each spare flow-through channel 22.
As a preferred example in this embodiment, the monitoring unit further selectively includes a flow sensor, the flow sensor is in signal connection with the control unit, and the flow sensor is disposed on the flow passage 21 and downstream of the filtering unit 23 to provide flow monitoring information to the control unit; in specific implementation, the flow sensor can be selectively arranged on the flow passage 21 and on the upstream of the fluid of the filtering unit 23, or selectively arranged on the flow passage 21 and on the downstream of the fluid of the filtering unit 23; in a specific operation process, when the flow rate of the overcurrent channel 21 is smaller than a set value, the first cut-off switch 71 and/or the second cut-off switch 72 are controlled by the control unit, so that the overcurrent conduction is in a cut-off state.
As a preferred embodiment of the present application, all the aforementioned embodiments, examples, alternative embodiments and alternative examples of the present application can further selectively enable the controlled replacement device 6 to comprise a driving mechanism, a transmission mechanism 61 and an actuating mechanism 62 for replacing the filter unit 23, wherein the transmission mechanism 61 is arranged adjacent to one side of the filter device 2 and the storage device 3, the driving mechanism is arranged in a transmission way with the transmission mechanism 61, and the actuating mechanism 62 is connected with the transmission mechanism 61; the drive mechanism and the actuator 62 are both controlled by the control unit; when the flow rate of the overflowing channel 21 is smaller than a set value, the driving mechanism and the executing mechanism 62 replace the filtering unit 23 arranged on the overflowing channel 21 with the standby filtering unit 5 according to the instruction of the control unit. And then the fault of the overcurrent channel 21 is automatically eliminated.
As a preferred embodiment under the implementation, the transmission mechanism 61 may further selectively include a lead screw 611 and a slider 612 adapted to the lead screw 611, the actuator is fixed on the slider 612, the driving mechanism is a driving motor, and the lead screw 611 is driven by the driving motor and rotates to adjust the actuating position of the actuator; the actuator can take out the filter unit 23 on the overflow channel 21 according to the command given by the control unit, and pick up the spare filter unit 5 from the storage device 3 and place it on the overflow channel 21. The drive motor is preferably provided as a servomotor. In addition, in implementation, the actuator may be further selectively configured as a controlled robotic arm.
As a preferable example under the foregoing embodiment, example, changeable embodiment, and changeable example, the crystal growth furnace further optionally includes an early warning unit, which is controlled by the control unit, and when the flow rate of the cooling medium in the overflow channel 21 is reduced for a set time period (the time period is not particularly limited in specific implementation, and the time period is optionally set to 1 minute to 5 minutes, but preferably set to 3 minutes), the early warning unit issues an emergency early warning signal; during specific work, when the early warning unit sends out an emergency early warning signal, the overflowing channel 21 is in a cut-off state, the standby overflowing channel 22 is in a connected state, and a cooling medium flows through the standby overflowing channel 22 to provide the cooling medium for the interior of the crystal growth furnace body 4; in order to ensure that the crystal growth furnace can work more safely, the early warning unit can further selectively comprise a safety early warning state, when the flow rate of the overflow channel 21 is smaller than a set safety early warning flow rate (the flow rate is not specifically limited, and is selectively set according to the actual needs of the crystal growth furnace, for example, the safety early warning flow rate can be set to be 7 liters/minute), the early warning unit sends out a safety early warning signal, and the crystal growth process in the crystal growth furnace is stopped, so that safety accidents are avoided; in order to achieve a better monitoring effect, the early warning unit can further selectively comprise a common early warning state, when the flow of the overflowing channel 21 fluctuates by +/-3L/min of the set overflowing flow, the early warning unit sends out a common early warning signal, and at the moment, the working state of the crystal growth furnace is monitored manually, but manual intervention is not performed.
In order to ensure that the cooling system of the crystal growth furnace is in a safe and reliable working state for a long time, when the early warning unit does not send out an early warning signal within a set time, the controlled replacement device 6 is controlled by the control unit to regularly replace the filtering unit 23 arranged on the overflowing channel 21.
It should be noted that the drawings in the present application are only schematic, and any technical solutions meeting the requirements of the text of the present application belong to the protection scope of the present application.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (10)
1. A cooling system of a crystal growth furnace is characterized in that,
the cooling device comprises a flow passage, a filtering unit is arranged on the flow passage, and cooling media flow through the filtering unit and then provide cooling media for the interior of the crystal growth furnace body; the storage device is arranged on one side of the filtering device, and a standby filtering unit is arranged on the storage device;
the crystal growth furnace also comprises a controlled replacement device and a monitoring unit, wherein the monitoring unit monitors the flow of a cooling medium flowing into the furnace body of the crystal growth furnace and provides monitoring information for the control unit, the controlled replacement device is controlled by the control unit, and when the flow of the overflowing channel is smaller than a set value, the controlled replacement device replaces the filtering unit on the overflowing channel by the spare filtering unit.
2. The cooling system of the crystal growth furnace of claim 1,
the filtering device also comprises a standby overflowing channel, wherein a filtering unit is arranged on the standby overflowing channel, stop switches are arranged on the overflowing channel and the standby overflowing channel, and when the overflowing channel is in a flowing state, the standby overflowing channel is in a stop state;
when the flow of the overflowing channel is smaller than a set value, the overflowing channel is in a cut-off state, and cooling medium flows through the standby overflowing channel to provide cooling medium for the crystal growth furnace body.
3. The cooling system of the crystal growth furnace of claim 2,
the fluid upstream of the overflowing channel is provided with a first stop switch, the downstream of the overflowing channel is provided with a second stop switch, and the opening and closing of the first stop switch and/or the second stop switch are controlled by the control unit.
4. The cooling system of the crystal growth furnace of claim 3,
the monitoring unit comprises a flow sensor, the flow sensor is in signal connection with the control unit, and the flow sensor is arranged on the fluid upstream and/or the fluid downstream of the filtering unit on the overflowing channel so as to provide flow monitoring information for the control unit;
when the flow of the overcurrent channel is smaller than a set value, the control unit controls the first stop switch and/or the second stop switch to enable the overcurrent conduction to be in a stop state.
5. The cooling system of the crystal growth furnace of any one of claims 1 to 4,
the controlled replacement device comprises a driving mechanism, a transmission mechanism and an execution mechanism for replacing the filter unit, the transmission mechanism is arranged at one side of the filter device and one side of the storage device in a neighboring mode, the driving mechanism is in transmission arrangement with the transmission mechanism, and the execution mechanism is connected with the transmission mechanism; the driving mechanism and the actuating mechanism are controlled by the control unit;
and when the flow of the overflowing channel is smaller than a set value, the driving mechanism and the executing mechanism replace the filtering unit arranged on the overflowing channel with the standby filtering unit according to the instruction of the control unit.
6. The cooling system of the crystal growth furnace of claim 5,
the transmission mechanism comprises a lead screw and a sliding block matched with the lead screw, the actuating mechanism is fixedly arranged on the sliding block, the actuating mechanism is a driving motor, and the lead screw is driven by the driving motor and rotates to adjust the actuating position of the actuating mechanism;
the executing mechanism can take out the filtering units on the overflowing channel according to the instructions sent by the control unit, grab the standby filtering units from the storage device and place the standby filtering units on the overflowing channel.
7. The cooling system of the crystal growth furnace of any one of claims 2 to 4 and 6,
the cooling system of the crystal growth furnace further comprises an early warning unit, the early warning unit is controlled by the control unit, and when the flow of the cooling medium of the overflowing channel is reduced and is continuously set for a long time, the early warning unit sends out an emergency early warning signal;
when the early warning unit sends out an emergency early warning signal, the overflowing channel is in a cut-off state, the standby overflowing channel is in a connected state, and cooling media flow through the standby overflowing channel to provide cooling media for the interior of the crystal growth furnace body.
8. The cooling system of the crystal growth furnace of claim 7,
when the early warning unit does not send out an early warning signal within a set time, the controlled replacement device is controlled by the control unit to regularly replace the filtering unit arranged on the overflowing channel.
9. The cooling system of the crystal growth furnace of claim 7,
the early warning unit further comprises a safety early warning state, and when the flow of the overflowing channel is smaller than the set safety early warning flow, the early warning unit sends out a safety early warning signal and stops the crystal growing process in the crystal growing furnace.
10. The cooling system of the crystal growth furnace of claim 8 or 9,
the early warning unit also comprises a common early warning state, when the flow of the overflowing channel fluctuates by +/-3L/min of the set overflowing flow, the early warning unit sends out a common early warning signal, and at the moment, the working state of the crystal growing furnace is monitored manually, but manual intervention is not performed.
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| CN209682876U (en) * | 2019-01-11 | 2019-11-26 | 浦林成山（山东）轮胎有限公司 | A kind of double compound extruded line cooling devices |
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| CN112981542A (en) | 2021-06-18 |
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