CN112957933B

CN112957933B - Gas quantitative and proportional dilution device based on capillary tube structure

Info

Publication number: CN112957933B
Application number: CN202110201576.4A
Authority: CN
Inventors: 唐蓉; 孙珏; 薛殿友
Original assignee: Wuxi Evergrand Electronic Scientific Technology Co ltd
Current assignee: Wuxi Evergrand Electronic Scientific Technology Co ltd
Priority date: 2021-02-23
Filing date: 2021-02-23
Publication date: 2022-02-22
Anticipated expiration: 2041-02-23
Also published as: CN112957933A

Abstract

The invention discloses a gas quantitative and proportional dilution device based on a capillary structure, which comprises a first gas pipe, a second gas pipe, a gas outlet pipe, a flow dividing and diluting component, a return pipe and a recovery pump, wherein the first gas pipe and the second gas pipe are respectively connected with a container where two paths of gases to be mixed are located, the first gas pipe and the second gas pipe are converged and introduced into the flow dividing and diluting component, the flow dividing and diluting component is also connected with the gas outlet pipe and the return pipe, the mixed gases are proportionally and shunted by the flow dividing and diluting component and then are respectively discharged to the gas outlet pipe and the return pipe, and a concentration meter is arranged on the gas outlet pipe. The shunt dilution component comprises a shell, an air inlet cavity, an air outlet cavity and a shunt pipe, wherein the shell is provided with the closed air inlet cavity and the closed air outlet cavity, the middle position of the shell is taken as a shell pass, the shunt pipe penetrates through the shell pass, two ends of the shunt pipe are respectively connected with the air inlet cavity and the air outlet cavity, the air inlet cavity is connected with a first air pipe and a second air pipe, the air outlet cavity is connected with the air outlet pipe, and a return pipe is connected with the side wall of the shell pass of the shell; the shunt tube comprises a cotton tube layer, and the cotton tube layer is soaked in a non-polar solvent.

Description

Gas quantitative and proportional dilution device based on capillary tube structure

Technical Field

The invention relates to the technical field of electronic gas treatment, in particular to a gas quantitative and proportional diluting device based on a capillary structure.

Background

The electronic gas is special gas used in semiconductor industry, and is grain and blood in electronic industry. Common electronic gases include WF6, DCS, BCl3, C5F8, ClF3, etc., special gases often need to be diluted when being output, and common diluent gases include nitrogen, argon, etc.

The traditional dilution is started from changing the flow ratio, which involves the adjustment of the valve opening on the flow path, so that the sensitivity of the mixture ratio is always a difficult problem, the slight adjustment of the valve opening also has a great influence on the flowing characteristics of the gas flowing at the position, and therefore, the error of the flow is difficult to further reduce, thereby causing the problem that the dilution ratio cannot be further improved;

moreover, almost all dilution increases the amount of diluent gas, so that the concentration of the functional gas is reduced, the use of diluent gas is wasted greatly, and a set of special gas cylinders is often provided with more diluent gas than the theoretical proportion value, so that the use waste and the increase of the gas cylinder occupation are caused due to the allowance consideration during adjustment.

Disclosure of Invention

The invention aims to provide a gas quantitative and proportional dilution device based on a capillary structure, so as to solve the problems in the background technology.

In order to solve the technical problems, the invention provides the following technical scheme:

the utility model provides a gaseous ration is diluting device surely than based on capillary structure, diluting device includes first trachea, the second trachea, the outlet duct, the reposition of redundant personnel dilutes the subassembly, the back flow, the recovery pump, first trachea and second trachea connect the two way gaseous place container of waiting to mix respectively, also be exactly the first gas cylinder at function gas place and the second gas cylinder at diluent gas place, it is here follow-up, with CLF3 (chlorine trifluoride) commonly used as the electron gas representative, with N2 (nitrogen gas) as with diluting with the gas representative, two way gas take respectively from the gas cylinder and gather, send to reposition of redundant personnel and dilute the subassembly, first trachea and second trachea confluence are let in reposition of redundant personnel and dilute in the subassembly, reposition of redundant personnel dilutes subassembly and connects outlet duct and back flow, reposition of redundant personnel dilutes the subassembly and arranges respectively to outlet duct and back flow after the reposition of redundant personnel divides the ratio reposition of redundant personnel and dilutes the subassembly, set up the concentration meter on the outlet duct. Chlorine trifluoride and nitrogen are roughly mixed in a first gas pipe and a second gas pipe by adjusting the valve opening degree, the concentration of chlorine trifluoride in a gas part leading to a gas outlet pipe is reduced in a split-flow diluting component, the other part of gas leading to a return pipe is all chlorine trifluoride, the chlorine trifluoride higher than expected is extracted in a mode of extracting chlorine trifluoride to be recycled in a backflow mode, the reduction of the concentration of the chlorine trifluoride of the prepared gas is realized, the dilution purpose is realized by starting from the aspect of reducing the self amount of the component instead of increasing the amount of nitrogen for dilution, so that the advantages of avoiding the position of the error of the valve opening degree for adjusting the flow rate of a pipeline, improving the accuracy of the gas concentration, detecting whether the discharged gas meets the requirement, and commonly arranging hand valves for manual control and automatic control on the first gas pipe, the second gas pipe and the gas outlet pipe, The solenoid valve all disposes, avoids gaseous palirrhea check valve in the single tube also every pipeline to dispose.

Furthermore, the shunting dilution component comprises a shell, an air inlet cavity, an air outlet cavity and a shunting pipe, wherein the shell is provided with the closed air inlet cavity and the closed air outlet cavity, the middle position of the shell is used as a shell pass, the shunting pipe penetrates through the shell pass, two ends of the shunting pipe are respectively connected with the air inlet cavity and the air outlet cavity, the air inlet cavity is connected with a first air pipe and a second air pipe, the air outlet cavity is connected with an air outlet pipe, and a return pipe is connected with the side wall of the shell pass of the shell;

the shunt tube comprises a cotton tube layer, and the cotton tube layer is soaked in a non-polar solvent.

The whole shunting dilution assembly is similar to a shell-and-tube heat exchanger, but the shunting pipe allows gas to pass conditionally, when one-to-one of chlorine trifluoride and nitrogen enters the shunting pipe, the solubility of chlorine trifluoride in a nonpolar solvent is far greater than that of nitrogen, common nonpolar solvents include benzene, carbon tetrachloride, cyclohexane, kerosene and the like, after chlorine trifluoride is dissolved from the inner wall of the cotton pipe layer and enters the solvent, the chlorine trifluoride in the shell-and-tube side is pumped out by a recovery pump outside the outer wall of the cotton pipe layer, the low partial pressure state of the chlorine trifluoride in the shell-and-tube side is maintained, the chlorine trifluoride can be continuously melted into the inner wall of the shunting pipe and separated out from the outer wall, so that the chlorine trifluoride is allowed to conditionally penetrate the shunting pipe, the nitrogen does not perform the process, the pressure of a recovery pump is controlled, the penetration area of all shunting pipes is controlled, and the extraction rate of the chlorine trifluoride in the initial mixed gas can be adjusted, the specific degree of dilution of the gas discharged to the gas outlet pipe is definitely determined, in the process, the opening degree of the valve is not adjusted, in addition, a plurality of shunt pipes are arranged, the penetration area is very convenient to control, namely, the sensitivity of proportion adjustment is high, the recovery pump conveys pure chlorine trifluoride back to the first gas cylinder again, and therefore, the whole process has no gas loss. The shunt tubes are in a slender tube shape, a plurality of shunt tubes are distributed in a capillary tube mode, the specific surface area of the shunt tubes is large, the effect of extracting chlorine trifluoride of the shunt tubes at the position can be prevented by shielding the outer wall surfaces of the shunt tubes, therefore, when the concentration ratio of the whole exhaust gas of the device is controlled by changing the area of the shunt tubes for shunting parts, the sensitivity is extremely high, and the adjustment range is large.

Further, the nonpolar solvent soaked by the cotton tube layer is carbon tetrachloride or cyclohexane. The boiling points of the two are relatively high, and the gasification of the components of the two are not easy to be distinguished.

Furthermore, the shunting dilution assembly further comprises a liquid tank and an end piece, wherein the liquid tank is arranged below the shell, the liquid tank is filled with carbon tetrachloride or cyclohexane, one end of the end piece is positioned in the air inlet cavity or the air outlet cavity and is contacted with the end part of the cotton pipe layer, the bottom of the end piece is immersed in the liquid tank, and the end piece is the same as the cotton pipe layer. The end piece is used as a water absorption medium of the cotton tube layer, the solvent in the liquid tank is upwards sucked and lifted due to the water absorption of cotton wool, but the liquid on the cotton tube layer cannot drop due to the fact that the initial position of a water source is at a low position, and the solvent is prevented from entering the shunt tube and the bottom of the shell side of the shell.

Furthermore, the shunt pipe also comprises a silk screen retaining sleeve, the silk screen retaining sleeve is a concentric interlayer pipe, the cotton pipe layer is arranged in an interlayer of the silk screen retaining sleeve, and the silk screen retaining sleeve is used for retaining the pipe shape of the cotton pipe layer.

Furthermore, the shunting dilution component also comprises a baffle plate which is arranged in the air inlet cavity and used for baffling the gas entering the air inlet cavity to the end part of the shunting pipe. The baffled mixed gas enters the shunt pipe at a high reliable uniform degree, and then the subsequent shunting stripping dilution process is carried out.

Furthermore, a concentration meter is also arranged on the first air pipe. And the concentration meter is arranged on the first gas pipe and is used for detecting the concentration of the chlorine trifluoride just outflowing from the first gas cylinder, and the concentration is represented as the highest concentration which can be output by the device.

Furthermore, a bypass outlet is arranged on the return pipe in a branch pipe mode. The bypass outlet port is used for outputting high-purity chlorine trifluoride, even if the nitrogen at the second gas pipe is closed at the gas outlet pipe of the diluting device in the using process, the gas outlet pipe always carries a little nitrogen, and the purging process not only takes time but also takes high-purity chlorine trifluoride in the first gas cylinder unless the whole set of pipeline is purged by the high-purity chlorine trifluoride in the first gas cylinder for a long time, but also can ensure that the concentration of the chlorine trifluoride is close to that of the chlorine trifluoride in the first gas cylinder at the return pipe, the gas at the position is used for outputting, and the shunting diluting component is not required to be purged at all.

Compared with the prior art, the invention has the following beneficial effects: the invention uses the tubular cotton layer, soaks the solvent in the cotton layer, conditionally allows the chlorine trifluoride in the mixed gas to pass through and prevents the nitrogen from passing through, and finishes the purpose of reducing the content of the target gas in the form of extracting the target gas.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic overall flow diagram of the present invention;

FIG. 2 is a schematic diagram of the split dilution unit of the present invention;

FIG. 3 is view A of FIG. 2;

FIG. 4 is a schematic flow diagram of the split dilution assembly of the present invention;

FIG. 5 is a front view of an end piece of the present invention;

in the figure: 11-a first gas cylinder, 12-a second gas cylinder, 21-a first gas pipe, 22-a second gas pipe, 23-a gas outlet pipe, 3-a shunt dilution component, 31-a shell, 32-a gas inlet cavity, 33-a gas outlet cavity, 34-a shunt pipe, 341-a cotton pipe layer, 342-a silk screen retaining sleeve, 35-a liquid tank, 36-a baffle plate, 37-an end plate, 41-a return pipe, 411-a bypass outlet interface, 42-a recovery pump, 91-an electromagnetic valve, 92-a hand valve, 93-a concentration meter and 94-a check valve.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 to 5, the present invention provides a technical scheme:

the utility model provides a gaseous ration is diluting device surely than based on capillary structure, diluting device includes first trachea 21, second trachea 22, outlet duct 23, reposition of redundant personnel dilutes subassembly 3, back flow 41, recycle pump 42, first trachea 21 and second trachea 22 are connected respectively and are treated the two way gaseous place container that mixes, also be first gas cylinder 11 and second gas cylinder 12 in fig. 1, two way gas is taken and is gathered respectively from the gas cylinder, send to reposition of redundant personnel and dilute subassembly 3, first trachea 21 and second trachea 22 confluence let in reposition of redundant personnel and dilute in the subassembly 3, reposition of redundant personnel and dilute subassembly 3 still connects outlet duct 23 and back flow 41, reposition of redundant personnel dilutes the subassembly 3 and arranges respectively to outlet duct 23 and back flow 41 after with the gas mixture is surely than the reposition of redundant personnel, set up concentration meter 93 on the outlet duct 23. As shown in FIG. 1, chlorine trifluoride and nitrogen gas are roughly mixed by adjusting the opening of the valve in the first gas pipe 21 and the second gas pipe 22, and in the divided flow dilution unit 3, the concentration of chlorine trifluoride in the gas portion leading to the gas outlet pipe 23 is reduced, and the other portion of the gas leading to the return pipe 41 is entirely chlorine trifluoride, and the chlorine trifluoride higher than expected is extracted in the form of extracting chlorine trifluoride to be returned and recovered, thereby reducing the concentration of chlorine trifluoride in the produced gas, and the dilution is performed by starting from the aspect of reducing the amount of the components themselves, rather than increasing the amount of nitrogen gas for dilution, so that the advantages of avoiding the position of the error of the opening of the valve for adjusting the flow rate of the pipeline, improving the accuracy of the gas concentration, using a concentration meter 93 for detecting whether the discharged gas meets the demand, and hand valves 92, for manual control and automatic control, commonly provided on the first gas pipe 21, the second gas pipe 22, and the gas outlet pipe 23, and used for detecting whether the discharged gas meets the demand or not, The solenoid valves 91 are all configured, and the check valves 94 that prevent gas from flowing backward in a single pipe are also configured for each line.

The flow dividing and diluting component 3 comprises a shell 31, an air inlet cavity 32, an air outlet cavity 33 and a flow dividing pipe 34, wherein the shell 31 is provided with the closed air inlet cavity 32 and the closed air outlet cavity 33, the middle position of the shell 31 is taken as a shell pass, the flow dividing pipe 34 penetrates through the shell pass, two ends of the flow dividing pipe are respectively connected with the air inlet cavity 32 and the air outlet cavity 33, the air inlet cavity 32 is connected with the first air pipe 21 and the second air pipe 22, the air outlet cavity 33 is connected with the air outlet pipe 23, and the return pipe 41 is connected with the side wall of the shell pass of the shell 31;

shunt 34 includes a cotton tube layer 341, and cotton tube layer 341 is soaked with a non-polar solvent.

As shown in fig. 2 and 3, the whole split-flow dilution unit 3 is similar to the shell-and-tube heat exchanger, however, the split-flow pipe 34 allows the gas to pass through conditionally, when one-to-one of chlorine trifluoride and nitrogen gas enters the split-flow pipe 34, the solubility of chlorine trifluoride in nonpolar solvent is much higher than that of nitrogen gas, common nonpolar solvents are benzene, carbon tetrachloride, cyclohexane, kerosene, etc., chlorine trifluoride dissolves from the inner wall of the cotton pipe layer 341 into the solvent, and then outside the outer wall of the cotton pipe layer 341, as long as chlorine trifluoride in the shell side of the shell 31 is pumped away by the recovery pump 42, and the low partial pressure state of chlorine trifluoride in the shell side is maintained, the chlorine trifluoride can be continuously dissolved from the inner wall and separated out from the outer wall of the split-flow pipe 34, thereby allowing the "conditional penetration" of chlorine trifluoride through the split-flow pipe, while the nitrogen gas does not go through the process, the recovery pump 42 controls the suction pressure and controls the combined penetration area of all the split-flow pipes 34, the extraction rate of chlorine trifluoride in the initial mixed gas can be adjusted, the specific degree of gas dilution discharged to the gas outlet pipe 23 is definitely achieved, in the process, the opening degree of a valve is not adjusted, the number of flow dividing pipes is large, the penetrating area is convenient to control, namely, the sensitivity of proportion adjustment is high, the recovery pump 42 conveys pure chlorine trifluoride back to the first gas cylinder 11, and therefore the whole process is free of any gas loss. The shunt tubes 34 are in a shape of a long and thin tube, a plurality of shunt tubes are distributed in a capillary form, the specific surface area of the shunt tubes is large, the effect of pumping chlorine trifluoride of the shunt tubes at the position can be prevented by shielding the outer wall surfaces of the shunt tubes, so when the concentration ratio of the exhaust gas of the whole device is controlled by changing the area of the shunt tubes 34 for shunting parts, the sensitivity is extremely high, and the adjustment range is large.

The nonpolar solvent impregnated into the cotton layer 341 is carbon tetrachloride or cyclohexane. The boiling points of the two are relatively high, and the gasification of the components of the two are not easy to be distinguished.

The shunting dilution component 3 further comprises a liquid tank 35 and an end piece 37, the liquid tank 35 is arranged below the shell 31, the liquid tank 35 contains carbon tetrachloride or cyclohexane, one end of the end piece 37 is positioned in the air inlet cavity 32 or the air outlet cavity 33 and is contacted with the end part of the cotton pipe layer 341, the bottom of the end piece 37 is immersed in the liquid tank 35, and the end piece 37 and the cotton pipe layer 341 are made of the same material. The end piece 37 acts as a water absorbing medium for the cotton wool layer 341, and the solvent in the liquid tank 35 is sucked upwards due to the water absorption of the cotton wool, but the liquid on the cotton wool layer 341 does not drip because the starting position of the water source is at a low position, and the solvent is prevented from entering the shunt pipe 34 and the bottom of the shell side of the shell 31.

The shunt tube 34 further comprises a wire mesh holding sleeve 342, the wire mesh holding sleeve 342 being a concentric sandwich tube, the cotton tube layer 341 being disposed within the sandwich of the wire mesh holding sleeve 342, the wire mesh holding sleeve 342 serving to hold the tubular shape of the cotton tube layer 341.

The split dilution unit 3 further includes a baffle 36, the baffle 36 being disposed within the inlet chamber 32, the baffle 36 deflecting gas entering the inlet chamber 32 toward the end of the split tube 34. The deflected mixed gas enters the shunt tube 34 with a high degree of reliability and uniformity, and then the subsequent shunt stripping and diluting processes are carried out.

The first gas pipe 21 is also provided with a concentration meter 93. The concentration meter 93 provided in the first gas pipe 21 detects the concentration of chlorine trifluoride just flowing out of the first gas cylinder 11 as the highest concentration that can be output from the apparatus.

The return pipe 41 is provided with a bypass outlet 411 in the form of a branch pipe. The bypass outlet 411 is used for outputting high-purity chlorine trifluoride, and even if the nitrogen gas at the outlet pipe 23 of the dilution device is closed in the using process, the outlet pipe 23 always carries some nitrogen gas more or less, and the high-purity chlorine trifluoride in the first gas cylinder 11 is consumed not only in time but also in the whole set of pipelines unless the high-purity chlorine trifluoride in the first gas cylinder 11 is used for purging for a long time, and the gas at the return pipe 41 can be ensured to be near to the concentration of the chlorine trifluoride in the first gas cylinder 11, and the gas at the position is used for outputting, so that the shunting dilution component 3 is not required to be purged at all.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a gaseous ration scaling diluting device based on capillary structure which characterized in that: the diluting device comprises a first air pipe (21), a second air pipe (22), an air outlet pipe (23), a shunting diluting component (3), a return pipe (41) and a recovery pump (42), wherein the first air pipe (21) and the second air pipe (22) are respectively connected with a container where two paths of gases to be mixed are located, the first air pipe (21) and the second air pipe (22) are converged and introduced into the shunting diluting component (3), the shunting diluting component (3) is also connected with the air outlet pipe (23) and the return pipe (41), the shunting diluting component (3) divides the mixed gas in a fixed ratio and then respectively discharges the mixed gas to the air outlet pipe (23) and the return pipe (41), and a concentration meter (93) is arranged on the air outlet pipe (23);

the flow dividing and diluting component (3) comprises a shell (31), an air inlet cavity (32), an air outlet cavity (33) and a flow dividing pipe (34), wherein the shell (31) is provided with the closed air inlet cavity (32) and the closed air outlet cavity (33), the middle position of the shell (31) serves as a shell pass, the flow dividing pipe (34) penetrates through the shell pass, two ends of the flow dividing pipe are respectively connected with the air inlet cavity (32) and the air outlet cavity (33), the air inlet cavity (32) is connected with a first air pipe (21) and a second air pipe (22), the air outlet cavity (33) is connected with an air outlet pipe (23), and the return pipe (41) is connected with the side wall of the shell (31);

the shunt tube (34) comprises a cotton tube layer (341), and the cotton tube layer (341) is soaked in a non-polar solvent.

2. The gas quantitative definite proportion diluting device based on capillary structure of claim 1, characterized in that: the nonpolar solvent soaked by the cotton tube layer (341) is carbon tetrachloride or cyclohexane.

3. The gas quantitative definite proportion diluting device based on capillary structure of claim 2, characterized in that: reposition of redundant personnel dilutes subassembly (3) and still includes cistern (35) and end piece (37), cistern (35) set up in shell (31) below, and cistern (35) contains carbon tetrachloride or cyclohexane, end piece (37) one end is located air inlet chamber (32) or goes out air cavity (33) and in the contact of cotton layer (341) tip, and end piece (37) bottom is soaked in cistern (35) in, and end piece (37) are the same with cotton layer (341) material.

4. The gas quantitative definite proportion diluting device based on capillary structure of claim 1, characterized in that: the shunt tube (34) further comprises a silk screen retaining sleeve (342), the silk screen retaining sleeve (342) is a concentric interlayer tube, the cotton tube layer (341) is arranged in the interlayer of the silk screen retaining sleeve (342), and the silk screen retaining sleeve (342) is used for retaining the tubular shape of the cotton tube layer (341).

5. The gas quantitative definite proportion diluting device based on capillary structure of claim 1, characterized in that: the flow dividing and diluting assembly (3) further comprises a baffle plate (36), the baffle plate (36) is arranged in the air inlet cavity (32), and the baffle plate (36) deflects the air entering the air inlet cavity (32) to the end part of the flow dividing pipe (34).

6. The gas quantitative definite proportion diluting device based on capillary structure of claim 1, characterized in that: the first air pipe (21) is also provided with a concentration meter (93).

7. The gas quantitative definite proportion diluting device based on capillary structure of claim 6, characterized in that: a bypass outlet (411) is arranged on the return pipe (41) in a branch pipe mode.