CN112957869B - Volatile matter processing system used in crystal growth process - Google Patents
Volatile matter processing system used in crystal growth process Download PDFInfo
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- CN112957869B CN112957869B CN202110253802.3A CN202110253802A CN112957869B CN 112957869 B CN112957869 B CN 112957869B CN 202110253802 A CN202110253802 A CN 202110253802A CN 112957869 B CN112957869 B CN 112957869B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D9/00—Crystallisation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D9/00—Crystallisation
- B01D9/0063—Control or regulation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D9/00—Crystallisation
- B01D2009/0086—Processes or apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
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- Crystallography & Structural Chemistry (AREA)
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a volatile matter processing system used in the crystal growth process, comprising: the device comprises a blower, a volatile matter catcher, a filter and a control system, wherein the blower and the volatile matter catcher are respectively communicated with the top of a hearth of the crystal growth furnace and the bottom of the hearth; a condensation adsorption device is arranged in the volatile matter catcher; the gas in the crystal growth furnace hearth is condensed and adsorbed by the volatile matter catcher in sequence, filtered by the filter and sent into the crystal growth furnace hearth again by the blower. This volatile matter processing system, exert pressure to the gas in the furnace from crystal growth stove furnace top through the blower device, gaseous bottom through the furnace gets into volatile matter trapper, and volatile matter in the gas is adsorbed by condensation adsorption equipment, and the filter filters tiny particle in with gas, and gaseous at last blows in the furnace once more through the blower device, forms gaseous circulation in this system, only adopts existing gas in the system, does not use inert gas just can guarantee the quality and the success rate of crystal growth.
Description
Technical Field
The invention relates to the technical field of crystal growth, in particular to a volatile matter treatment system used in the crystal growth process.
Background
The crystal growth period is longer (about 2 weeks), and volatile matters in a crystal growth furnace chamber are increased along with the increase of time in the crystal growth process. In the process of crystal growth, impurities volatilized from a temperature field and raw materials fall into a crucible again, so that the quality of crystals is directly reduced, scattering particles in the crystals are increased if the quality is light, and the crystals are directly scrapped if the quality is heavy.
In order to remove the volatile matters in the crystal growth process, some manufacturers use inert flowing gas to carry away the volatile matters in the crystal growth process, in the inert gas (such as argon), the price of nitrogen is relatively low, but many materials can react with the nitrogen to generate nitrides, so that in the crystal growth process, high-purity inert gas is generally selected, the cost of the inert flowing gas is high, the crystal growth period is long, and the mode of removing the volatile matters in the hearth wastes a large amount of inert gas and increases the crystal growth cost.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a volatile matter treatment system in a crystal growth process, which can solve the crystal production defect caused by the enrichment of volatile matters in a hearth in a relatively economic mode.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a volatile processing system for use in a crystal growth process, comprising: the device comprises a blowing device, a volatile matter catcher and a filter, wherein the blowing device and the volatile matter catcher are respectively communicated with the top of a hearth of the crystal growth furnace and the bottom of the hearth; a condensation adsorption device is arranged in the volatile matter catcher; and gas in the crystal growth furnace hearth sequentially passes through the volatile matter catcher for condensation and adsorption, is filtered by the filter and is sent into the crystal growth furnace hearth again by the air blowing device.
Further, the volatile matter processing system further comprises: an air cooling device mounted between the volatile trap and the filter; the gas discharged from the volatile substance trap enters the filter after being cooled by the air cooling device.
Further, the air-cooling device includes: the device comprises a radiator and a first thermocouple which are arranged on a gas pipeline, an air cooling fan corresponding to the radiator, an air cooling speed regulator and a first temperature control instrument; the first temperature controller is used for controlling the air-cooling speed regulator to change the rotating speed of the air-cooling fan according to the temperature signal of the gas measured by the first thermocouple.
Further, the volatile processing system further comprises: the gas temperature controller is arranged between the blast device and the top of the hearth of the crystal growth furnace; and the gas blown by the blowing device enters the hearth of the crystal growth furnace after being heated by the gas temperature controller.
Further, the gas temperature controller comprises: the heating belt, the second thermocouple and the second temperature controller are arranged on the gas pipeline; and the second temperature control instrument controls the output power of the heating belt according to the temperature signal of the gas measured by the second thermocouple.
Further, a valve is arranged at the bottom of the volatile catcher.
Further, the condensation adsorption device arranged in the volatile catcher comprises a stainless steel pipe cooled by a water cooling mode.
Further, the filter is a paper filter.
Further, the air blowing device includes: blast governors, blast fans and flow meters; the air blowing speed regulator is used for controlling the air blowing speed regulator to change the rotating speed of the air blowing fan according to the gas flow measured by the flow meter.
The invention relates to a volatile matter treatment system used in the crystal growth process, which applies pressure to gas in a hearth from the top of the hearth of a crystal growth furnace through a blowing device, the gas enters a volatile matter catcher through the bottom of the hearth, volatile matters in the gas are adsorbed by a condensation adsorption device, then the gas passes through a filter, fine particles in the gas are filtered by the filter, and finally the gas is blown into the hearth again through the blowing device, so that gas circulation is formed in the system, and the quality and the success rate of crystal growth can be ensured only by adopting the gas existing in the system without using inert gas.
Drawings
FIG. 1 is a schematic diagram of a volatile processing system for use in a crystal growth process according to an exemplary embodiment of the present invention;
in the figure:
1-volatile trap; 2-air cooling device; 3, a filter; 4-a blower device; 5-gas temperature controller; 6-crystal growing furnace.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is described clearly and completely below with reference to the drawings in the examples of the present invention, and it is obvious that the described examples are only a part of examples of the present invention, and not all examples. All other embodiments obtained by a person skilled in the art based on examples in the present invention shall fall within the scope of protection of the present invention without making creative efforts.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used merely to distinguish similar items and are not to be construed as requiring a particular order or sequence, but rather are to be construed to provide interchangeable usage where appropriate.
As shown in FIG. 1 by way of example, there is provided a volatile processing system for use in a crystal growth process, comprising: a blower 4 and a volatile matter catcher 1 which are respectively communicated with the top of a hearth of the crystal growth furnace 6 and the bottom of the hearth, and a filter 3 which is connected between the blower 4 and the volatile matter catcher 1; a condensation adsorption device is arranged in the volatile substance catcher 1; the gas in the hearth of the crystal growth furnace 6 is condensed and adsorbed by the volatile substance catcher 1 in sequence, filtered by the filter 3 and sent into the hearth of the crystal growth furnace 6 again by the blower 4.
The volatile matter treatment system for the crystal growth process in the example is used, pressure is applied to gas in a hearth from the top of the hearth of a crystal growth furnace through a blowing device 4, the gas enters a volatile matter catcher 1 through the bottom of the hearth, volatile matters in the gas are adsorbed by a condensation adsorption device, then the gas passes through a filter 3, fine particles in the gas are filtered by the filter 3, finally the gas is blown into the hearth again through the blowing device 4, gas circulation is formed in the system, only gas existing in the system is adopted, and the quality and success rate of crystal growth can be guaranteed without using inert gas.
The traditional crystal growth method needs to continuously introduce inert gas in the whole crystal growth period, and because the crystal growth period is long, a large amount of inert gas is wasted, so that the cost of high-quality crystal growth is high. The volatile matter processing system of this example has improved the crystal success rate effectively, has not only avoided gaseous volatile matter to the adverse effect of crystal growth, still can not cause inert gas's waste, has saved the cost of crystal growth.
Referring to fig. 1, a heat-insulating layer is further arranged in the crystal preparation space in the middle of the hearth to ensure stable temperature in the crystal growth process and further ensure the crystal growth quality.
Referring to fig. 1, in the volatile substance treating system of this example, the condensation adsorption device provided in the volatile substance trap 1 comprises a stainless steel pipe cooled by water cooling. Wherein, the stainless steel pipe is the coil pipe of snakelike bending, and volatile substance granule in the gas is because the reduction of temperature, and its speed of motion slows down and when it meets the stainless steel pipe of cold comparison and will condense and fix on stainless steel pipe to reach the purpose of adsorbing volatile substance in the gas, the water inlet of stainless steel pipe lets in 15 ℃ of cooling water in this example.
Referring to fig. 1, the bottom of the volatile trap 1 is valved. Larger volatile particles will fall directly to the bottom of the volatile trap 1 due to gravity and can be cleaned by periodically opening a valve. A baffle may also be provided at the upper part of the valve to protect the valve while accumulating volatile particles, facilitating the cleaning of the volatile particles when cleaning the volatile trap 1. A temperature sensing alarm can be arranged above the valve to monitor the temperature in the volatile substance catcher 1, so that a user can be reminded in time, and the situation that the temperature is too high or too low to influence the operation of other follow-up devices in the volatile substance treatment system is prevented.
The present example volatile processing system further includes: an air-cooling device 2 installed between the volatile substance trap 1 and the filter 3; the gas discharged from the volatile trap 1 is cooled by the air-cooling device 2 and then enters the filter 3.
Filter 3 in this example is a paper filter.
The air cooling device 2 has the functions of: the temperature of the gas entering the paper filter is reduced, and the filter paper in the paper filter is prevented from being damaged.
The air-cooling device 2 includes: the device comprises a radiator, a first thermocouple, an air cooling fan, an air cooling speed regulator and a first temperature control instrument, wherein the radiator and the first thermocouple are arranged on a gas pipeline; the first temperature controller is used for controlling the air-cooling speed regulator to change the rotating speed of the air-cooling fan according to the temperature signal of the gas measured by the first thermocouple. Specifically, the air-cooling speed regulator in this example may be a PWM speed regulator, and the first temperature controller controls the output of the PWM speed regulator according to the temperature signal so as to change the rotation speed of the air-cooling fan. The change of the rotation speed of the air cooling fan controls the speed of heat dissipation of the radiator, so that the temperature of the air output from the air cooling device 2 can be controlled. After the air cooling device is adjusted, the temperature of the gas output by the gas pipeline of the air cooling device 2 is maintained at (38 +/-5) DEG C, namely the first thermocouple, the first temperature controller and the air cooling speed regulator realize the constant temperature speed regulation of the air cooling fan.
After the volatile treatment system has been in operation for a period of time, the filter 3 can be cleaned or replaced depending on the actual conditions in which the filter 3 is used.
In this example, the air blowing device 4 includes: blast governors, blast fans and flow meters; the air blowing speed regulator is used for controlling the air blowing speed regulator according to the gas flow measured by the flow meter to change the rotating speed of the air blowing fan.
The main functions of the blowing device 4 are: circulating gas in the whole volatile matter treatment system; and secondly, the flow velocity of the gas flowing into the hearth of the crystal growth furnace 6 is stable, and the influence on the crystal growth quality caused by temperature fluctuation in the crystal growth process is prevented.
The gas flow is fed back through the flowmeter, and the rotating speed of the fan is adjusted by the blowing speed regulator, so that the gas flow flowing out of the blowing device 4 is maintained at 3-5L/min.
Referring to fig. 1, the volatile processing system further comprises: a gas temperature controller 5 arranged between the blast device 4 and the top of the hearth of the crystal growth furnace 6; the gas blown by the blowing device 4 enters the hearth of the crystal growth furnace 6 after being heated by the gas temperature controller.
The main functions of the gas temperature controller 5 are: the gas entering the hearth of the crystal growth furnace 6 is high-temperature gas.
The gas temperature controller 5 includes: the heating belt, the second thermocouple and the second temperature controller are arranged on the gas pipeline; and the second temperature controller controls the output power of the heating belt according to the temperature signal of the gas measured by the second thermocouple.
In the example, because the temperature near the furnace wall is about 120 ℃, in order to ensure that the gas entering the hearth does not influence the growth environment of the crystal, the output power of the heating belt is controlled by the second temperature controller through the feedback of the second thermocouple, so that the temperature of the gas entering the hearth of the crystal growth furnace 6 is 120 ℃, and the growth quality of the crystal is further ensured.
It should be noted that, referring to fig. 1, the electrical instruments or electrical components in the volatile substance catcher 1, the air cooling device 2, the air blowing device 4 and the gas temperature controller 5 in the volatile substance processing system can be individually connected to a power supply, or can be connected to the power supply in a unified manner, in this example, the electrical instruments or electrical components (including those not shown in the figure) in the volatile substance catcher 1, the air cooling device 2 and the air blowing device 4 can be electrically connected to the power supply through the power supply connected to one end of the second temperature controller of the gas temperature controller 5 (220V ac power supply); the direction of the arrows in the figure is the gas flow direction.
Finally, it is to be understood that the above embodiments are merely exemplary embodiments employed to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention, and these changes and modifications are to be considered as within the scope of the invention.
Claims (5)
1. A volatile material handling system for use in a crystal growth process, comprising: the device comprises a blowing device and a volatile matter catcher which are respectively communicated with the top of a hearth of a crystal growth furnace and the bottom of the hearth, a filter connected between the blowing device and the volatile matter catcher, an air cooling device arranged between the volatile matter catcher and the filter, and a gas temperature controller arranged between the blowing device and the top of the hearth of the crystal growth furnace; a condensation adsorption device is arranged in the volatile substance catcher and used for adsorbing volatile substance particles; gas in the crystal growth furnace hearth sequentially passes through the volatile substance catcher for condensation and adsorption, is filtered by the filter and is sent into the crystal growth furnace hearth again by the air blowing device;
the gas discharged by the volatile catcher enters the filter after being cooled by the air cooling device;
the gas blown by the blowing device enters the hearth of the crystal growth furnace after being heated by the gas temperature controller;
a valve is arranged at the bottom of the volatile matter catcher; a baffle and a temperature sensing alarm are arranged above the valve, and the temperature sensing alarm is used for monitoring the temperature in the volatile matter catcher;
the air blowing device includes: an air blast speed regulator, an air blast fan and a flowmeter; the air blowing speed regulator is used for controlling the air blowing speed regulator to change the rotating speed of the air blowing fan according to the gas flow measured by the flow meter.
2. The volatile material processing system of claim 1, wherein the air-cooling device comprises: the device comprises a radiator and a first thermocouple which are arranged on a gas pipeline, an air cooling fan corresponding to the radiator, an air cooling speed regulator and a first temperature control instrument; the first temperature controller is used for controlling the air-cooling speed regulator to change the rotating speed of the air-cooling fan according to the temperature signal of the gas measured by the first thermocouple.
3. The volatile processing system of claim 1, wherein the gas temperature controller comprises: the heating belt, the second thermocouple and the second temperature controller are arranged on the gas pipeline; and the second temperature control instrument controls the output power of the heating belt according to the temperature signal of the gas measured by the second thermocouple.
4. The volatile processing system of claim 1, wherein the condensation adsorption device disposed within the volatile trap comprises a stainless steel tube cooled by water cooling.
5. The volatile processing system of claim 1, wherein the filter is a paper filter.
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| CN202110253802.3A CN112957869B (en) | 2021-03-09 | 2021-03-09 | Volatile matter processing system used in crystal growth process |
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| CN112957869B true CN112957869B (en) | 2022-07-22 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5135047A (en) * | 1989-10-05 | 1992-08-04 | Flavio Dobran | Furnace for high quality and superconducting bulk crystal growths |
| CN101148777B (en) * | 2007-07-19 | 2011-03-23 | 任丙彦 | Method and device for growing gallium-mixing silicon monocrystal by czochralski method |
| CN201529414U (en) * | 2009-10-27 | 2010-07-21 | 中国石油化工股份有限公司 | Low-temperature condensing-filter catching recycling equipment for volatility organic steam |
| CN207498510U (en) * | 2017-11-16 | 2018-06-15 | 四川高铭科技有限公司 | A kind of low energy consumption graphite crucible single crystal growing furnace |
| CN110155968B (en) * | 2018-02-13 | 2023-09-26 | 隆基绿能科技股份有限公司 | Inert gas recycling device and inert gas recycling method |
| CN210974924U (en) * | 2020-04-01 | 2020-07-10 | 曲靖阳光能源硅材料有限公司 | Novel single crystal furnace |
| CN111871145A (en) * | 2020-08-17 | 2020-11-03 | 交通运输部天津水运工程科学研究所 | Recovery unit is administered in volatile organic compounds environmental protection |
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