CN112946802A - Polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating - Google Patents
Polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B2005/1804—Transmission gratings
Abstract
The invention discloses a polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating, which comprises a grating dielectric layer and a substrate from top to bottom to form a grating structure; the two-dimensional grating structure at the top is a rectangular column or a cylindrical structure. The first layer of the grating medium layer is made of SiO2The second layer of the grating dielectric layer is made of HfO2、Ti2O5Or Si3N4The substrate material and the first layer material of the grating medium layer are also SiO2. When the central wavelength of the polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating is 780 nanometers, and the incident angle is zero, the-1-order diffraction efficiency of two polarizations is higher than 24.694%, the total transmission efficiency is 99.45%, the zero-order efficiency is only 0.6%, and the efficiency polarization-independent loss of two polarization states is 0.0014dB, so that the high-efficiency diffraction of polarization-independent incidence is realized, and meanwhile, the manufacturing tolerance is large, and the manufacturing is easy.
Description
Technical Field
The invention relates to the technical field of optical gratings, in particular to a polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating.
Background
With the continuous development of precision displacement measurement technology, precision machining and metering devices continuously break through from the micrometer scale of 1900 years to the nanometer scale, and the sub-nanometer scale even reaches the picometer scale. In recent years, the study of displacement measurement methods with high accuracy, high resolution, and long-term measurement has become an important research subject, and has become a crucial role in the fields of probe microscopy, optical metrology, semiconductor industry, and the like. Grating interferometers, also known as grating rulers, use gratings as measurement references, and compared with laser interferometer displacement measurement using wavelengths as references, the grating interferometers are not sensitive to environmental factors and are widely applied to industry, and the grating rulers are more convenient for multi-dimensional displacement measurement. The precise displacement measurement of the grating ruler based on the two-dimensional grating is developed in recent years and applied to multi-dimensional measurement, thereby simplifying the analysis and the realization of the system and being beneficial to improving the measurement precision of the system. The high-efficiency polarization-independent grating is not only beneficial to improving the signal-to-noise ratio of signals, but also beneficial to improving the signal contrast, so that the measurement resolution and the noise suppression capability of the system are improved, and the high-efficiency polarization-independent grating has a certain promotion effect on the overall development of the grating displacement measurement technology.
Multi-layer dielectric gratings offer more optimized parameters than single-layer dielectric gratings, increasing the possibilities for achieving polarization independent high efficiency. At present, the design of the full-medium transmission grating which can realize the polarization independence and the high efficiency still belongs to a difficult problem, and the research has great research prospect and practical significance.
For a high-density grating with-1 order high diffraction efficiency under normal incidence, the high-density grating cannot be explained by a simple scalar grating diffraction equation, and the result must be accurately calculated by a computer-coded program by adopting a vector form Maxwell equation and combining boundary conditions. Li et al have given the algorithm of the two-dimensional rigorous coupled wave theory [ see prior art 1: li, L. (1997). JOSA A,14(10), 2758-2767; prior art 2: li, L. (2003) J.Opt.A: Pure appl.Opt.5, 345-355) can solve the problem of diffraction calculation of the two-dimensional high-density dielectric grating.
Disclosure of Invention
The present invention is directed to solving the above-mentioned deficiencies of the prior art by providing a high efficiency transmission double layer dielectric grating for 780 nm wavelength TE and TM polarizations normal incidence of four-1 orders ((± 1,0) and (0, ± 1)). When TE or TM polarized light is vertically incident, the grating can make incident light energy be mainly distributed on-1-order transmitted light, the maximum efficiency of the-1-order transmitted light is more than 24.5%, and the grating has the property of polarization-independence high efficiency and has important practical significance in a high-precision measurement system.
The purpose of the invention can be achieved by adopting the following technical scheme:
a polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating is provided with ridges and grooves which are arranged at intervals in a two-dimensional periodic manner, and is characterized in that the two-dimensional grating forms a grating structure for a grating medium layer and a substrate from top to bottom; the grating medium layer is formed by two medium layers which form a ridge part with a rectangular column shape or a cylindrical shape, wherein the default of the groove refers to the position structure in the grating structure except the ridge part.
Furthermore, the first layer of dielectric material SiO of the grating dielectric layer2The second dielectric layer of the grating dielectric layer is made of HfO2、Ti2O5Or Si3N4Any one of the above.
Further, the material SiO of the substrate2。
Furthermore, the working waveband of the two-dimensional grating takes 780 nanometers as the central wavelength.
Furthermore, when the grating dielectric layer structure is rectangular column, the second layer of the grating dielectric layer is made of HfO2And when the refractive index is 2.093, the grating period is 700-770 nm, the preferred value is 730 nm, the duty ratio is 0.42-0.56, the preferred value is 0.5, and the depth h of the first layer of the grating medium layer110-390 nm, preferably 110 nm, and the depth h of the second layer of the grating dielectric layer2Is 350-420 nm, and the optimal value is 400 nm.
Furthermore, when the grating medium layer structure is rectangular column, the second layer of the grating medium layer is Ta2O5And when the refractive index is 2.114, the grating period is 700-770 nm, the preferred value is 730 nm, the duty ratio is 0.41-0.56, the preferred value is 0.5, and the depth h of the first layer of the grating medium layer110-300 nm, preferably 100 nm, and a depth h of a second layer of the grating dielectric layer2Is 360-420 nm, and the optimal value is 400 nm.
Further, whenThe grating medium layer structure is rectangular column, the second layer of the grating medium layer is made of Si3N4And when the refractive index is 2.025, the grating period is 720-780 nm, the preferred value is 730 nm, the duty ratio is 0.41-0.59, the preferred value is 0.5, and the depth h of the first layer of the grating dielectric layer110-130 nm, preferably 40 nm, and a depth h of the second layer of the grating dielectric layer2Is 400-450 nm, and the optimal value is 430 nm.
Furthermore, when the grating dielectric layer structure is cylindrical, the second layer of the grating dielectric layer is made of HfO2And when the refractive index is 2.093, the grating period is 720-790 nm, the preferred value is 750 nm, the duty ratio is 0.40-0.57, the preferred value is 0.50, and the depth h of the first layer of the grating medium layer110-200 nm, preferably 90 nm, and a depth h of a second layer of the grating dielectric layer2390-440 nm, the preferred value is 420 nm.
Further, when the grating medium layer structure is cylindrical, the second layer of the grating medium layer is made of Ta2O5And when the refractive index is 2.114, the grating period is 720-790 nm, the preferred value is 750 nm, the duty ratio is 0.40-0.57, the preferred value is 0.50, and the depth h of the first layer of the grating medium layer110-200 nm, preferably 80 nm, and a depth h of a second layer of the grating dielectric layer2390-440 nm, the preferred value is 420 nm.
Furthermore, when the grating medium layer structure is cylindrical, the second layer of the grating medium layer is made of Si3N4And when the refractive index is 2.025, the grating period is 710-770 nm, the preferred value is 750 nm, the duty ratio is 0.41-0.59, the preferred value is 0.54, and the depth h of the first layer of the dielectric layer110-140 nm, preferably 70 nm, and a depth h of the second layer of the grating dielectric layer2Is 410-450 nm, and the preferred value is 430 nm.
Compared with the prior art, the invention has the following advantages and effects:
(1) the invention relates to a polarization-independent high-diffraction-efficiency all-dielectric rectangular columnar two-dimensional grating, wherein the material of a second layer of a grating dielectric layer is HfO2When is atWhen TE or TM polarized light is vertically incident and the wavelength is in the range of 752-818 nanometers, the efficiencies of the four negative first-order diffraction orders are all higher than 20 percent; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-7 to +7 degrees, and the efficiencies of four negative first-order diffraction orders are all higher than 20 percent; at a center wavelength of 780 nm, when the incident angle is 0 °, the diffraction efficiencies of the four negative first-order diffraction orders are all higher than 24.52%, the total transmission efficiency is 99.6%, the zero-order efficiency is only 1.1%, and the efficiency polarization independent loss between the two polarization states is 0.031 dB.
(2) The invention relates to a polarization-independent high-diffraction-efficiency all-dielectric rectangular columnar two-dimensional grating, wherein the material of a second layer of a grating dielectric layer is Ti2O5When TE or TM polarized light is vertically incident and the wavelength is in the range of 754-; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-7 to +7 degrees, and the efficiencies of four negative first-order diffraction orders are all higher than 20 percent; at a center wavelength of 780 nm, at an incident angle of 0 °, the diffraction efficiencies of the four negative first-order diffraction orders are all higher than 24.694%, the total transmission efficiency is 99.45%, the zero-order efficiency is only 0.6%, and the efficiency polarization-independent losses of the two polarization states are 0.0014 dB.
(3) The invention relates to a polarization-independent high-diffraction-efficiency all-dielectric rectangular columnar two-dimensional grating, wherein the second layer of a grating dielectric layer is made of Si3N4When TE or TM polarized light is vertically incident and the wavelength is in the range of 754-; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-3 to +3 degrees, and the efficiency of four negative first-order diffraction orders is higher than 20 percent; at a center wavelength of 780 nm, when the incident angle is 0 degrees, the diffraction efficiencies of four negative first-order diffraction orders are all higher than 24.13 percent, the total transmission efficiency is 98.81 percent, the zero-order efficiency is only 1.9 percent, and the efficiency polarization independent losses of two polarization states are 0.026 dB.
(4) The invention relates to a polarization-independent high-diffraction-efficiency full-dielectric cylindrical two-dimensional grating, wherein the material of a second layer of a grating dielectric layer is HfO2When the TE or TM polarized light is vertically incident, the wavelength is in the range of 764-818 nanometers, four negative first-orderThe diffraction order efficiencies are all higher than 20%; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-2 to +2 degrees, and the efficiency of four negative first-order diffraction orders is higher than 20 percent; at a center wavelength of 780 nm, at an incident angle of 0 °, the diffraction efficiencies of the four negative first order diffraction orders are all higher than 24.2%, the total transmission efficiency is 99.81%, the zero order efficiency is only 2.6%, and the efficiency polarization independent loss between the two polarization states is 0.028 dB.
(5) The invention relates to a polarization-independent high-diffraction-efficiency full-dielectric cylindrical two-dimensional grating, wherein the material of a second layer of a grating dielectric layer is Ti2O5When TE or TM polarized light is vertically incident, and the wavelength is in the range of 764-820 nanometers, the efficiencies of the four negative first-order diffraction orders are all higher than 20 percent; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-2 to +2 degrees, and the efficiency of four negative first-order diffraction orders is higher than 20 percent; at a center wavelength of 780 nm, at an incident angle of 0 °, the diffraction efficiencies of the four negative first-order diffraction orders are all higher than 24.38%, the total transmission efficiency is 99.71%, the zero-order efficiency is only 2.0%, and the efficiency polarization independent losses of the two polarization states are 0.0014 dB.
(6) The invention relates to a polarization-independent high-diffraction-efficiency full-dielectric cylindrical two-dimensional grating, wherein the material of a second layer of a grating dielectric layer is Si3N4When TE or TM polarized light is vertically incident and the wavelength is in the range of 764-828 nm, the efficiencies of the four negative first-order diffraction orders are all higher than 20%; when TE or TM polarized light is incident at 780 nm wavelength, the incident angle is-2 to +2 degrees, and the efficiency of four negative first-order diffraction orders is higher than 20 percent; at a central wavelength of 780 nm, when the incident angle is 0 degrees, the diffraction efficiencies of four negative first-order diffraction orders are all higher than 24.23 percent, the total transmission efficiency is 99.5 percent, the zero-order efficiency is only 2.4 percent, and the efficiency polarization-independent losses of two polarization states are 0.0084 dB.
(7) The invention not only realizes the vertical incidence negative first-order high-efficiency diffraction, but also has simple structure, small depth-to-width ratio and large manufacturing tolerance, can be produced in large batch and has important application prospect in the grating ruler ultra-precise displacement measurement system.
Drawings
FIG. 1 is a schematic diagram of a polarization independent high diffraction efficiency all-dielectric rectangular cylindrical transmission two-dimensional grating structure in the present invention;
FIG. 2 is a schematic diagram of a polarization independent high diffraction efficiency all-dielectric cylindrical transmission two-dimensional grating structure in the present invention;
FIG. 3 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of the all-dielectric rectangular cylindrical transmissive two-dimensional grating in example 1 of the present invention;
FIG. 4 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of the all-dielectric rectangular cylindrical transmissive two-dimensional grating in example 2 of the present invention;
FIG. 5 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of an all-dielectric rectangular cylindrical transmissive two-dimensional grating in example 3 of the present invention;
FIG. 6 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of an all-dielectric cylindrical transmissive two-dimensional grating in example 4 of the present invention;
FIG. 7 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of an all-dielectric cylindrical transmissive two-dimensional grating in example 5 of the present invention;
FIG. 8 is a graph showing the relationship between the incident wavelength and the diffraction efficiency of an all-dielectric cylindrical transmissive two-dimensional grating in example 6 of the present invention;
in the figure: 1-grating dielectric layer first layer, 2-grating dielectric layer second layer, 3-substrate, h1-depth of first layer of grating dielectric layer, h2-grating medium layer second layer depth, Λ -grating period, b-grating ridge width.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring first to FIGS. 1 and 2, FIGS. 1 and 2 show polarization independent high efficiency holographic medium of 780 nm wavelength TE and TM polarizations for normal incidenceThe geometry of the mass transmission grating. b represents the width of the grating ridge and Λ represents the grating period (duty cycle f ═ b/Λ). h is1And h2Respectively representing the first layer of two full dielectric layers (SiO)2) And a second layer (HfO)2，Ta2O5Or Si3N4) Is measured. Regions 1,2,3 are all homogeneous media. When the incident light is vertically incident to the grating area, four negative first-order diffraction orders of the incident light meet a two-dimensional grating equation:
n0sinθm,ncosφm,n＝sinθcosφ+mλ/Λx
n0sinθm,ncosφm,n＝sinθcosφ+nλ/Λy
where phi, theta are the azimuth and polar angles of the incident light, phim,n,θm,nThe corresponding azimuth and polar angles on the (m, n) order for the diffracted light. n is0Refractive index of the exit region, ΛxAnd ΛyWhich respectively represent the period in the x-direction and the y-direction, and lambda is the wavelength of the incident light. In particular, when the incident light is normally incident, i.e., θ is 0 ° and simultaneously Φ is 0 °, the grating period is equal in the x-direction and the y-direction, and the diffraction angles of the four negative first orders ((± 1,0) and (0, ± 1)) are expressed as
Example 1:
a polarization-independent high-diffraction-efficiency all-dielectric rectangular columnar transmission two-dimensional grating structure is shown in figure 1. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The second layer 2 of the grating dielectric layer is made of HfO2. The grating period is 730 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 110 nanometers, and the thickness of the second layer 2 of the grating medium layer is 400 nanometers. As shown in FIG. 3, when the incident light is vertically incident, the negative first-order efficiencies of the TE and TM polarization states of the grating are both higher than 20% in the range of 752-818 nm incident light.
Example 2:
the polarization-independent high diffraction efficiency all-dielectric rectangular cylindrical transmission two-dimensional grating structure is shown in fig. 2. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The material of the second layer 2 of the grating medium layer is Ta2O5. The grating period is 730 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 100 nanometers, and the thickness of the second layer 2 of the grating medium layer is 400 nanometers. As shown in FIG. 4, when the incident light is vertically incident, the negative first-order efficiencies of both the TE and TM polarization states of the grating are higher than 20% in the range of 754-822 nm incident light.
Example 3:
the polarization-independent high diffraction efficiency all-dielectric rectangular cylindrical transmission two-dimensional grating structure is shown in fig. 3. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The material of the second layer 2 of the grating medium layer is Si3N4. The grating period is 730 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 40 nanometers, and the thickness of the second layer 2 of the grating medium layer is 430 nanometers. As shown in FIG. 5, when the incident light is vertically incident, the negative first-order efficiencies of both the TE and TM polarization states of the grating are higher than 20% in the range of 754-814 nm incident light.
Example 4:
a polarization independent high diffraction efficiency all dielectric cylindrical transmissive two-dimensional grating structure as shown in figure 4. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The second layer 2 of the grating dielectric layer is made of HfO2. The grating period is 750 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 90 nanometers, and the thickness of the second layer 2 of the grating medium layer is 420 nanometers. As shown in FIG. 6, when the incident light is vertically incident, the incident light is at 764-818 nmWithin this range, the negative first order efficiency of both grating TE and TM polarization states is higher than 20%.
Example 5:
a polarization independent high diffraction efficiency all dielectric cylindrical transmissive two-dimensional grating structure as shown in figure 5. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The material of the second layer 2 of the grating medium layer is Ta2O5. The grating period is 750 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 80 nanometers, and the thickness of the second layer 2 of the grating medium layer is 420 nanometers. As shown in FIG. 7, when the incident light is vertically incident, the negative first order efficiency of both the TE and TM polarization states of the grating is higher than 20% in the range of 764-820 nm incident light.
Example 6:
a polarization independent high diffraction efficiency all dielectric cylindrical transmissive two-dimensional grating structure as shown in figure 6. The grating structure is formed by a grating medium layer first layer 1, a grating medium layer second layer 2 and a substrate 3 which are of a top-layer two-dimensional structure. The first layer 1 of the grating dielectric layer and the substrate material are SiO2The material of the second layer 2 of the grating medium layer is Si3N4. The grating period is 750 nanometers, the duty ratio of the top two-dimensional medium grating layer is 0.5, the thickness of the first layer 1 of the grating medium layer is 70 nanometers, and the thickness of the second layer 2 of the grating medium layer is 430 nanometers. As shown in FIG. 8, when the incident light is vertically incident, the negative first order efficiency of both the TE and TM polarization states of the grating is higher than 20% in the range of 764-828 nm incident light.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (10)
1. A polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating is provided with ridges and grooves which are arranged at intervals in a two-dimensional periodic manner, and is characterized in that the two-dimensional grating forms a grating structure for a grating medium layer and a substrate from top to bottom; the grating medium layer is formed by two medium layers which form a ridge part with a rectangular column shape or a cylindrical shape.
2. The polarization-independent high diffraction efficiency all-dielectric transmission two-dimensional grating of claim 1, wherein the first dielectric material of the grating dielectric layer is SiO2The second dielectric layer of the grating dielectric layer is made of HfO2、Ti2O5Or Si3N4Any one of the above.
3. The polarization-independent high diffraction efficiency all-dielectric transmission two-dimensional grating of claim 1, wherein the substrate is made of SiO2。
4. The polarization-independent high diffraction efficiency all-dielectric transmission two-dimensional grating of claim 1, wherein the operating band of the two-dimensional grating is centered at 780 nm.
5. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating dielectric layer structure is rectangular column-shaped, the second layer of the grating dielectric layer is made of HfO2And when the refractive index is 2.093, the grating period is 700-770 nm, the duty ratio is 0.42-0.56, and the depth h of the first layer of the grating medium layer110-390 nm, and the depth h of the second layer of the grating dielectric layer2Is 350-420 nm.
6. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating medium layer structure is rectangular column, the second layer of the grating medium layer is Ta2O5And when the refractive index is 2.114, the grating period is 700-770 nm, the duty ratio is 0.41-0.56, and the depth of the first layer of the grating dielectric layerh110-300 nm, and the depth h of the second layer of the grating dielectric layer2Is 360-420 nm.
7. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating dielectric layer has a rectangular column shape, the second layer of the grating dielectric layer is made of Si3N4When the refractive index is 2.025, the grating period is 720-780 nanometers, the duty ratio is 0.41-0.59, and the depth h of the first layer of the grating dielectric layer110-130 nm, and the depth h of the second layer of the grating medium layer2400 and 450 nm.
8. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating dielectric layer structure is cylindrical, the second layer of the grating dielectric layer is made of HfO2And when the refractive index is 2.093, the grating period is 720-790 nm, the duty ratio is 0.40-0.57, and the depth h of the first layer of the dielectric layer110-200 nm, and the depth h of the second layer of the grating dielectric layer2390-440 nm.
9. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating medium layer structure is cylindrical, the second layer of the grating medium layer is Ta2O5And when the refractive index is 2.114, the grating period is 720-790 nm, the duty ratio is 0.40-0.57, and the depth h of the first layer of the grating medium layer110-200 nm, and the depth h of the second layer of the grating dielectric layer2390-440 nm.
10. The polarization-independent high-diffraction-efficiency all-dielectric transmission two-dimensional grating as claimed in claim 1, wherein when the grating dielectric layer structure is cylindrical, the second layer of the grating dielectric layer is made of Si3N4And when the refractive index is 2.025, the grating period is 710-770 nm, the duty ratio is 0.41-0.59, and the first layer of the dielectric layer is deepDegree h110-140 nm, and the depth h of the second layer of the grating dielectric layer2Is 410 and 450 nanometers.
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| CN109143436A (en) * | 2018-09-10 | 2019-01-04 | 中国科学院上海光学精密机械研究所 | It is a kind of to polarize unrelated metal medium two-dimensional grating |
| CN110146949A (en) * | 2019-05-29 | 2019-08-20 | 西北工业大学深圳研究院 | A kind of narrow-band spectrum filter structure and preparation method thereof |
| CN110716255A (en) * | 2019-10-11 | 2020-01-21 | 中国科学院上海光学精密机械研究所 | Three-layer all-dielectric rectangular grating for realizing-2-level broadband high efficiency |
| CN110989061A (en) * | 2019-11-08 | 2020-04-10 | 中国科学院福建物质结构研究所 | All-dielectric polarization-independent total internal reflection grating and manufacturing method thereof |
| CN111769425A (en) * | 2020-06-23 | 2020-10-13 | 中国科学院上海光学精密机械研究所 | All-dielectric reflective spectrum beam-combining grating for 1064 nanometer waveband |
| CN112034545A (en) * | 2020-09-29 | 2020-12-04 | 暨南大学 | Two-dimensional hole array grating and grating ruler displacement measurement system |
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