CN112946342A - Voltage measurement system and method based on electro-optic polymer and micro-ring resonator - Google Patents
Voltage measurement system and method based on electro-optic polymer and micro-ring resonator Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
Abstract
The invention discloses a voltage measuring system based on an electro-optic polymer and a micro-ring resonator, which comprises: the silicon single crystal silicon core layer comprises a coupled straight waveguide and an annular waveguide, and two ends of the straight waveguide are respectively used for inputting light and outputting light; and the electro-optic polymer film covers the annular waveguide, wherein when the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage, the effective refractive index of the annular waveguide is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide is shifted, and the measurement of the measured voltage is realized. The invention also discloses a measuring method of the voltage measuring system based on the electro-optic polymer and the micro-ring resonator. The invention utilizes the electro-optic property of the electro-optic polymer and the resonance characteristic of the micro-ring resonator to realize the real-time perception measurement of the voltage based on the electro-optic effect.
Description
Technical Field
The invention relates to the technical field of optical sensing, in particular to a voltage measuring system and a voltage measuring method based on an electro-optic polymer and a micro-ring resonator.
Background
In the related technology, the voltage of the internal electrical equipment and key nodes of the transformer substation and the converter station is generally sensed in real time through a voltage transformer, but the function is single, the upper limit of the frequency band generally does not exceed kHz, and the real-time measurement of signals such as faults, harmonic waves, overvoltage, inrush current and the like cannot be realized. Meanwhile, the problems of high cost, large volume, difficulty in installation on a power transmission and distribution line with limited space and the like exist.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a voltage measurement system and a voltage measurement method based on an electro-optic polymer and a micro-ring resonator, which can implement real-time sensing measurement of voltage based on an electro-optic effect by using the electro-optic property of the electro-optic polymer and the resonance characteristics of the micro-ring resonator.
The invention provides a voltage measuring system based on an electro-optic polymer and a micro-ring resonator, which comprises:
the silicon single crystal silicon core layer comprises a coupled straight waveguide and an annular waveguide, and two ends of the straight waveguide are respectively used for inputting light and outputting light; and
and the electro-optic polymer film covers the annular waveguide, wherein when the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage, the effective refractive index of the annular waveguide is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide is shifted, and the measurement of the measured voltage is realized.
As a further improvement of the invention, the material of the electro-optic polymer film is made of polymethyl methacrylate and an electro-optic polymer solution of dispersed orange 3 acrylamide, polymethyl methacrylate and dispersed red 1 methyl methacrylate or polymethyl methacrylate and dispersed yellow 7 methacrylate, wherein the electro-optic polymer solution is spin-coated on the annular waveguide.
As a further improvement of the invention, the thickness of the electro-optic polymer film is 300-800 nm.
As a further improvement of the present invention, fundamental mode polarized light is used as input light of the straight waveguide and vertically coupled into the straight waveguide through a tapered optical fiber, and the fundamental mode polarized light is obtained by performing polarization control on output light of an input light source through a polarization controller, wherein the input light source is connected with the polarization controller through a single mode optical fiber;
the output light of the straight waveguide is connected to a photoelectric detector and an oscilloscope through a tapered optical fiber for detection.
As a further improvement of the invention, the system is placed in the middle of a flat plate electrode, the upper surface of the flat plate electrode is connected to a high voltage source, and the lower surface of the flat plate electrode is grounded;
and applying a measured voltage to the flat plate electrode through the high-voltage source, wherein the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage.
As a further improvement of the invention, when the input light of the straight waveguide propagates in the annular waveguide, the input light permeates to the silica lower cladding layer and the electro-optic polymer film based on the evanescent field, when the effective refractive index of the electro-optic polymer film is changed, the effective refractive index in the annular waveguide is correspondingly changed, the resonance wavelength of the output light of the straight waveguide is shifted,
wherein the change amount of the effective refractive index of the electro-optic polymer film is as follows:
the change amount of the effective refractive index of the annular waveguide is as follows:
Δneff＝kΔnEO
the drift amount of the resonance wavelength of the output light of the straight waveguide is as follows:
wherein U is the measured voltage applied to the plate electrode, d is the distance between the plate electrodes, and r is33Is the electro-optic coefficient, n, of the electro-optic polymer filmEOIs the effective refractive index, Δ n, of the electro-optic polymer filmEOIs the change in the effective refractive index of the electro-optic polymer film, neffIs the effective refractive index of the annular waveguide, Δ neffAnd k is the coupling coefficient of the evanescent field, lambda is the resonance wavelength, and delta lambda is the drift amount of the resonance wavelength.
The invention also provides a measuring method of a voltage measuring system based on the electro-optic polymer and the micro-ring resonator, which comprises the following steps:
inputting fundamental mode polarized light into a straight waveguide, wherein the fundamental mode polarized light propagates in an annular waveguide and generates resonance in the annular waveguide;
applying a measured voltage to modulate the effective refractive index of the electro-optic polymer film;
when the effective refractive index of the electro-optic polymer film is changed, the effective refractive index of the annular waveguide is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide is shifted;
and determining the magnitude of the measured voltage according to the drift amount of the detected resonant wavelength.
As a further improvement of the invention, the input light source is connected with the polarization controller through a single-mode optical fiber,
the inputting of the fundamental mode polarized light into the straight waveguide, the fundamental mode polarized light propagating in the annular waveguide and generating resonance in the annular waveguide, includes:
controlling the output light of the input light source by the polarization controller to obtain the fundamental mode polarized light;
vertically coupling the fundamental mode polarized light into the straight waveguide through a tapered optical fiber, wherein the fundamental mode polarized light propagates in the annular waveguide and generates resonance in the annular waveguide;
and the output light of the straight waveguide is connected to a photoelectric detector and an oscilloscope through a tapered optical fiber so as to detect the output light of the straight waveguide.
As a further improvement of the invention, the system is placed in the middle of a flat electrode, the upper surface of the flat electrode is connected to a high voltage source, the lower surface of the flat electrode is grounded,
the applying a measured voltage to modulate the effective refractive index of the electro-optic polymer film comprises:
the high-voltage source is used for applying the measured voltage to the flat electrode, the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage, and the modulation of the effective refractive index of the electro-optic polymer film is realized;
wherein the change amount of the effective refractive index of the electro-optic polymer film is as follows:
wherein U is the measured voltage applied to the plate electrode, d is the distance between the plate electrodes, and r is33Is the electro-optic coefficient, n, of the electro-optic polymer filmEOIs the effective refractive index, Δ n, of the electro-optic polymer filmEOIs the change in the effective refractive index of the electro-optic polymer film.
As a further improvement of the present invention, when the effective refractive index of the electro-optic polymer film changes, the effective refractive index of the annular waveguide changes correspondingly, so that the resonant wavelength of the output light of the straight waveguide shifts, including:
when the fundamental mode polarized light propagates in the annular waveguide, the fundamental mode polarized light permeates into the silicon dioxide lower cladding and the electro-optic polymer film based on an evanescent field;
an effective refractive index phase in the annular waveguide when the effective refractive index of the electro-optic polymer film is changedIt should be changed, wherein the change amount of the effective refractive index of the annular waveguide is: Δ neff＝kΔnEOIn the formula, neffIs the effective refractive index of the annular waveguide, Δ neffK is the coupling coefficient of evanescent field, and is the change amount of the effective refractive index of the annular waveguide;
when the effective refractive index in the annular waveguide changes, the resonant wavelength of the output light of the straight waveguide shifts, wherein the shift amount of the resonant wavelength of the output light of the straight waveguide is as follows:
in the formula, λ is a resonance wavelength, and Δ λ is a drift amount of the resonance wavelength.
The invention has the beneficial effects that:
the structure of the micro-ring resonator based On SOI (Silicon-On-Insulator) is compatible with the traditional CMOS (complementary metal oxide semiconductor) process and easy for large-scale batch production, and simultaneously, the volume of the traditional voltage transformer is greatly reduced, a chip type sensor is realized, and the micro-ring resonator is beneficial to integration and miniaturization and convenient for distributed surface mount type installation and measurement;
by adopting a non-contact optical voltage measuring method, the direct electrical connection with a measured circuit is avoided, the insulation strength is high, the influence on the circuit is small, the electromagnetic interference can be prevented, and the potential safety hazard is reduced;
the measuring system has the advantages of simple structure, high sensitivity, miniaturization and integration, and the sensitivity of the system can be changed by optimizing the key size of the waveguide and the electro-optic performance of the electro-optic polymer, so that the system is flexibly applicable to various scenes and realizes real-time accurate measurement of the measured voltage.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic structural diagram of a voltage measurement system based on an electro-optic polymer and a micro-ring resonator according to an exemplary embodiment of the present invention;
FIG. 2 is a cross-sectional structural view of an electro-optic polymer film and a microring resonator according to an exemplary embodiment of the present invention;
FIG. 3 is a schematic diagram of an experimental apparatus for voltage testing using the voltage measurement system of FIG. 1 according to an exemplary embodiment of the present invention;
fig. 4 is a schematic flow chart of a measurement method of a voltage measurement system based on an electro-optic polymer and a micro-ring resonator according to an exemplary embodiment of the present invention.
In the figure, the position of the upper end of the main shaft,
1. a straight waveguide; 2. an annular waveguide; 3. an electro-optic polymer film; 4. a silica lower cladding; 5. a silicon substrate layer; 6. a monocrystalline silicon core layer; 7. a tunable laser source; 8. a polarization controller; 9. a plate electrode; 10. a photodetector; 11. an oscilloscope; 12. a high voltage source; 13. a voltage measurement system.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, in the description of the present invention, the terms used are for illustrative purposes only and are not intended to limit the scope of the present invention. The terms "comprises" and/or "comprising" are used to specify the presence of stated elements, steps, operations, and/or components, but do not preclude the presence or addition of one or more other elements, steps, operations, and/or components. The terms "first," "second," and the like may be used to describe various elements, not necessarily order, and not necessarily limit the elements. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified. These terms are only used to distinguish one element from another. These and/or other aspects will become apparent to those of ordinary skill in the art in view of the following drawings, and the description of the embodiments of the present invention will be more readily understood by those of ordinary skill in the art. The drawings are only for purposes of illustrating the described embodiments of the invention. One skilled in the art will readily recognize from the following description that alternative embodiments of the structures and methods illustrated in the present application may be employed without departing from the principles described in the present application.
The voltage measurement system based on the electro-optic polymer and the micro-ring resonator according to the embodiment of the invention is shown in fig. 1-2, and comprises:
the silicon single crystal core-layer waveguide comprises a silicon substrate layer 5, a silicon dioxide lower cladding layer 4 and a single crystal silicon core layer 6 which are stacked from bottom to top, wherein the single crystal silicon core layer 6 comprises a coupled straight waveguide 1 and an annular waveguide 2, and two ends of the straight waveguide 1 are respectively used for inputting light and outputting light; and
and the electro-optic polymer film 3 covers the annular waveguide 2, wherein when the effective refractive index of the electro-optic polymer film 3 is changed under the action of the measured voltage, the effective refractive index of the annular waveguide 2 is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide 1 is shifted, and the measurement of the measured voltage is realized.
Voltage is an important sensing quantity in a power grid, and the prior art generally realizes measurement through a voltage transformer. The sensor has single function, the upper limit of a frequency band generally does not exceed kHz, and the real-time measurement of signals such as faults, harmonic waves, overvoltage, inrush current and the like cannot be realized. Meanwhile, the problems of high cost, large volume, difficulty in installation on a power transmission and distribution line with limited space and the like exist. The system of the invention forms a chip type voltage sensor based on the electro-optic polymer and the micro-ring resonator, and utilizes the electro-optic property of the electro-optic polymer and the resonance characteristic of the micro-ring resonator, thereby reducing the volume of the traditional voltage sensor and facilitating the distribution surface mount type installation and measurement. Based on the electro-optic effect, the magnitude of the voltage to be measured is obtained by measuring the optical property change (resonance wavelength change) of the dielectric material under the action of the applied voltage, so that the real-time sensing measurement of the voltage is realized, the safe, reliable and efficient operation of a power grid under complex networks and conditions is realized, and the method can be applied to the application scene with a wide frequency band measurement range.
It will be appreciated that the coupled straight waveguide 1 and annular waveguide 2 constitute a microring resonator. The Silicon substrate layer 5, the Silicon dioxide lower cladding layer 4 and the monocrystalline Silicon core layer 6 are made of Silicon-On-Insulator (SOI) materials. The voltage transformer is compatible with the traditional CMOS process, is easy for large-scale batch production, greatly reduces the volume of the traditional voltage transformer, realizes a chip type sensor, and is beneficial to integration and miniaturization.
Wherein the thickness of the silicon dioxide lower cladding layer 4 is 2-3 μm, the thickness of the silicon substrate layer 5 is 400-700 nm, and the thickness of the monocrystalline silicon core layer 6 is 150-280 nm. The straight waveguide 1 and the annular waveguide 2 are obtained in the monocrystalline silicon core layer 6 through substrate cleaning, glue homogenizing, electron beam lithography, IPC deep silicon etching and photoresist removing treatment, and it can be understood that the straight waveguide 1 and the annular waveguide 2 are silicon waveguides. The heights of the straight waveguide 1 and the annular waveguide 2 are both 150 nm-280 nm, the widths of the straight waveguide 1 and the annular waveguide 2 are both 400 nm-600 nm, the radius of the annular waveguide 2 is 5 μm-120 μm, and the coupling distance between the straight waveguide 1 and the annular waveguide 2 is 100 nm-300 nm.
For example, the thickness of a monocrystalline silicon core layer is 220nm, the thickness of a silicon substrate is 500 μm, the thickness of a silicon dioxide lower cladding layer is 2 μm, the widths of the straight waveguide 1 and the annular waveguide 2 are both 400nm, the etching heights of the straight waveguide 1 and the annular waveguide 2 are both 220nm, the radius of the annular waveguide 2 is 30 μm, and the coupling distance between the straight waveguide 1 and the annular waveguide is 200 nm. The above parameters are exemplary examples, and the specific values of the parameters are not limited in the present invention.
In an alternative embodiment, the electro-optic polymer film 3 is made of polymethyl methacrylate and an electro-optic polymer solution of dispersed orange 3 acrylamide, polymethyl methacrylate and dispersed red 1 methyl methacrylate or polymethyl methacrylate and dispersed yellow 7 methacrylate, wherein the electro-optic polymer solution is spin-coated on the annular waveguide 2.
In an alternative embodiment, the thickness of the electro-optic polymer film 3 is 300 to 800 nm.
The electro-optic polymer film prepared by the method has the advantages of larger nonlinear optical effect, ultrafast response speed, low dielectric constant, high laser damage threshold, low price, excellent processability and integratability, easy adjustment of molecular structure and the like, can obtain higher electro-optic coefficient, improves the electro-optic performance, has good thermal stability and compatibility, and obtains an electro-optic device with high sensitivity. The electro-optic polymer film 3 is made of an electro-optic polymer solution prepared from a composite material, such as an electro-optic polymer solution of polymethyl methacrylate and dispersed orange 3 acrylamide, an electro-optic polymer solution of polymethyl methacrylate and dispersed red 1 methyl methacrylate, or an electro-optic polymer solution of polymethyl methacrylate and dispersed yellow 7 methacrylate. In the preparation, an electro-optic polymer solution is spin-coated on the annular waveguide 2 by a spin coater, wherein the spin speed of the spin coater is set to 6000r/min, for example, and the spin time is set to 40s, for example, to obtain an electro-optic polymer film of 700nm, for example, which is subjected to corona polarization treatment (wherein the polarization voltage is 10kV, for example, and the polarization current is 40 μ a, for example) after baking in an oven for 12 hours, for example, and finally subjected to vitrification treatment using a glass transition temperature of 100 ℃. The above parameters in the preparation process are exemplary examples, and the parameters in the preparation process can be adaptively adjusted according to the thickness of the electro-optic polymer film to be prepared.
An optional implementation manner is that when the system according to the present invention performs voltage measurement, as shown in fig. 3, fundamental mode polarized light is used as input light of the straight waveguide 1 and vertically coupled into the straight waveguide 1 through a tapered optical fiber, and the fundamental mode polarized light is obtained by performing polarization control on output light of an input light source 7 through a polarization controller 8, where the input light source 7 is connected to the polarization controller 8 through a single-mode optical fiber, and the output light of the straight waveguide 1 is connected to a photodetector 10 and an oscilloscope 11 through a tapered optical fiber for detection. The input light source 7 is, for example, a tunable laser (for example, a New Focus TLB-6728-P) with a wavelength range of 1520nm to 1570 nm. It can be understood that the invention adopts the polarization state light of the fundamental mode for coupling, and can realize lower loss and lower dispersion. The invention adopts the tapered optical fiber to input light, and the light is input from the big end of the tapered optical fiber, thereby improving the damage threshold of the input end, collimating the incident light beam and improving the light beam quality.
In an alternative embodiment, when the system of the present invention performs voltage measurement, as shown in fig. 3, the system (i.e. the voltage measurement system 13) is placed in the middle of the flat electrode 9, the upper surface of the flat electrode 9 is connected to the high voltage source 12, the lower surface of the flat electrode 9 is grounded, the voltage to be measured is applied to the flat electrode 9 through the high voltage source 12, and the effective refractive index of the electro-optic polymer film 3 is changed by the voltage to be measured. It will be appreciated that the plate electrode 9 comprises an upper plate and a lower plate disposed in parallel, the upper plate being connected to the high voltage source 12 and the lower plate being connected to ground. After the high voltage source 12 applies the measured voltage, a uniform electric field is generated between the two electrode plates, the effective refractive index of the electro-optic polymer film 3 is changed under the action of the uniform electric field, and the voltage between the two electrode plates is the measured voltage U.
The system adopts a non-contact optical voltage measuring method, has no direct electrical connection with a measured circuit, has high insulating strength, has little influence on the measured circuit, can resist electromagnetic interference and simultaneously reduces potential safety hazards.
In an alternative embodiment, when the effective refractive index of the electro-optic polymer film 3 changes, the effective refractive index in the annular waveguide 2 changes, the resonant wavelength of the output light of the straight waveguide 1 shifts,
wherein the change amount of the effective refractive index of the electro-optic polymer film 3 is as follows:
the change amount of the effective refractive index of the annular waveguide 2 is:
Δneff＝kΔnEO
the drift amount of the resonance wavelength of the output light of the straight waveguide 1 is:
wherein U is the measured voltage applied to the plate electrode 9, d is the distance between the plate electrodes 9, and r33Is the electro-optic coefficient, n, of the electro-optic polymer film 3EOIs the effective refractive index, Δ n, of the electro-optic polymer film 3EOFor the change in the effective refractive index of the electro-optic polymer film 3, neffIs the effective refractive index, Δ n, of the annular waveguide 2effK is the coupling coefficient of evanescent field, λ is the resonance wavelength, and Δ λ is the drift amount of the resonance wavelength.
It is understood that light traveling in the waveguide is not confined to the waveguide but instead permeates through the silica lower cladding and the electro-optic polymer film based on the evanescent field, and when the effective refractive index of the electro-optic polymer film changes, the effective refractive index of the annular waveguide changes accordingly. When light enters the annular waveguide to be transmitted, if the optical path difference generated by transmitting a circle around the micro-ring is integral multiple of the wavelength of the transmitted light, the transmitted light can be resonated and enhanced, the wavelength value of the resonant point is the resonant wavelength, and when the effective refractive index in the annular waveguide is changed, the resonant wavelength of the output light of the straight waveguide will drift. And determining the magnitude of the measured voltage according to the drift amount of the measured resonance wavelength.
The system has the characteristics of simple structure, high sensitivity, miniaturization and integration, and the sensitivity of the system can be changed by optimizing the key size of the waveguide and the electro-optic performance of the electro-optic polymer film, so that the system is flexibly suitable for various scenes and realizes real-time accurate measurement of the measured voltage.
The measurement method of the voltage measurement system based on the electro-optic polymer and the micro-ring resonator is described in the embodiments of the present invention, wherein the system is as described in the foregoing embodiments, and details are not repeated here. As shown in fig. 4, the method includes:
inputting fundamental mode polarized light into a straight waveguide 1, wherein the fundamental mode polarized light propagates in an annular waveguide 2 and generates resonance in the annular waveguide 2;
applying a measured voltage to modulate the effective refractive index of the electro-optic polymer film 3;
when the effective refractive index of the electro-optic polymer film 3 changes, the effective refractive index of the annular waveguide 2 correspondingly changes, so that the resonance wavelength of the output light of the straight waveguide 1 shifts;
and determining the magnitude of the measured voltage according to the drift amount of the detected resonant wavelength.
In an alternative embodiment, the input light source 7 is connected to the polarization controller 8 via a single mode optical fiber,
the inputting of the fundamental mode polarized light into the straight waveguide 1, the fundamental mode polarized light propagating in the annular waveguide 2 and generating resonance in the annular waveguide 2, includes:
controlling the output light of the input light source 7 by the polarization controller 8 to obtain the fundamental mode polarized light;
vertically coupling the fundamental mode polarized light into the straight waveguide 1 through a tapered optical fiber, wherein the fundamental mode polarized light propagates in the annular waveguide 2 and generates resonance in the annular waveguide 2;
the output light of the straight waveguide 1 is connected to a photodetector 10 and an oscilloscope 11 through a tapered optical fiber so as to detect the output light of the straight waveguide 11.
In an alternative embodiment, the system (i.e. the voltage measurement system 13) is placed in the middle of the plate electrode 9, the upper surface of the plate electrode 9 is connected to the high voltage source 12, the lower surface of the plate electrode 9 is grounded,
the applying of the measured voltage to modulate the effective refractive index of the electro-optic polymer film 3 comprises:
the high voltage source 12 applies a measured voltage to the flat plate electrode 9, the effective refractive index of the electro-optic polymer film 3 is changed under the action of the measured voltage, and the modulation of the effective refractive index of the electro-optic polymer film 3 is realized;
wherein the change amount of the effective refractive index of the electro-optic polymer film 3 is as follows:
wherein U is the measured voltage applied to the plate electrode 9, d is the distance between the plate electrodes 9, and r33Is the electro-optic coefficient, n, of the electro-optic polymer film 3EOIs the effective refractive index, Δ n, of the electro-optic polymer film 3EOIs the change in the effective refractive index of the electro-optic polymer film 3.
In an alternative embodiment, when the effective refractive index of the electro-optic polymer film 3 changes, the effective refractive index of the annular waveguide 2 changes correspondingly, so that the resonant wavelength of the output light of the straight waveguide 1 shifts, including:
when the fundamental mode polarized light propagates in the annular waveguide 2, the fundamental mode polarized light permeates into the silica lower cladding layer 4 and the electro-optic polymer film 3 based on an evanescent field;
when the effective refractive index of the electro-optic polymer film 3 changes, the effective refractive index in the annular waveguide 2 changes correspondingly, wherein the change amount of the effective refractive index of the annular waveguide 2 is as follows: Δ neff＝kΔnEOIn the formula, neffIs the effective refractive index, Δ n, of the annular waveguide 2effK is the change amount of the effective refractive index of the annular waveguide 2 and is the evanescent field coupling coefficient;
when the effective refractive index in the annular waveguide 2 changes, the resonant wavelength of the output light of the straight waveguide 1 shifts, wherein the shift amount of the resonant wavelength of the output light of the straight waveguide 1 is as follows:
in the formula, λ is a resonance wavelength, and Δ λ is a drift amount of the resonance wavelength.
In the description provided herein, numerous specific details are set forth. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
Furthermore, those of ordinary skill in the art will appreciate that while some embodiments described herein include some features included in other embodiments, rather than other features, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.
It will be understood by those skilled in the art that while the present invention has been described with reference to exemplary embodiments, various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (10)
1. A voltage measurement system based on an electro-optic polymer and a microring resonator, the system comprising:
the silicon single crystal silicon core layer comprises a coupled straight waveguide and an annular waveguide, and two ends of the straight waveguide are respectively used for inputting light and outputting light; and
and the electro-optic polymer film covers the annular waveguide, wherein when the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage, the effective refractive index of the annular waveguide is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide is shifted, and the measurement of the measured voltage is realized.
2. The system of claim 1, wherein the electro-optic polymer film is made of a material selected from the group consisting of polymethyl methacrylate and a solution of an electro-optic polymer of dispersed orange 3 acrylamide, polymethyl methacrylate and dispersed red 1 methyl methacrylate or polymethyl methacrylate and dispersed yellow 7 methacrylate, and wherein the solution of the electro-optic polymer is spin coated on the annular waveguide.
3. The system of claim 1, wherein the electro-optic polymer film has a thickness of 300 to 800 nm.
4. The system according to claim 1, wherein, a fundamental mode polarized light is used as an input light for the straight waveguide and is vertically coupled into the straight waveguide through a tapered optical fiber, the fundamental mode polarized light is obtained by performing polarization control on an output light of an input light source through a polarization controller, wherein the input light source is connected with the polarization controller through a single mode optical fiber;
the output light of the straight waveguide is connected to a photoelectric detector and an oscilloscope through a tapered optical fiber for detection.
5. The system of claim 1, wherein the system is placed in the middle of a plate electrode, the upper surface of which is connected to a high voltage source, and the lower surface of which is grounded;
and applying a measured voltage to the flat plate electrode through the high-voltage source, wherein the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage.
6. The system of claim 5, wherein the input light to the straight waveguide propagates in the annular waveguide based on penetration of an evanescent field into the silica lower cladding layer and the electro-optic polymer film, and when an effective refractive index of the electro-optic polymer film changes, the effective refractive index in the annular waveguide changes accordingly, and a resonant wavelength of the output light from the straight waveguide shifts,
wherein the change amount of the effective refractive index of the electro-optic polymer film is as follows:
the change amount of the effective refractive index of the annular waveguide is as follows:
Δneff＝kΔnEO
the drift amount of the resonance wavelength of the output light of the straight waveguide is as follows:
wherein U is the measured voltage applied to the plate electrode, d is the distance between the plate electrodes, and r is33Is the electro-optic coefficient, n, of the electro-optic polymer filmEOIs the effective refractive index, Δ n, of the electro-optic polymer filmEOIs the change in the effective refractive index of the electro-optic polymer film, neffIs the effective refractive index of the annular waveguide, Δ neffAnd k is the coupling coefficient of the evanescent field, lambda is the resonance wavelength, and delta lambda is the drift amount of the resonance wavelength.
7. A measurement method based on an electro-optic polymer and a voltage measurement system of a micro-ring resonator according to any one of claims 1 to 6, wherein the method comprises:
inputting fundamental mode polarized light into a straight waveguide, wherein the fundamental mode polarized light propagates in an annular waveguide and generates resonance in the annular waveguide;
applying a measured voltage to modulate the effective refractive index of the electro-optic polymer film;
when the effective refractive index of the electro-optic polymer film is changed, the effective refractive index of the annular waveguide is correspondingly changed, so that the resonance wavelength of the output light of the straight waveguide is shifted;
and determining the magnitude of the measured voltage according to the drift amount of the detected resonant wavelength.
8. The method of claim 7, wherein the input light source is connected to the polarization controller by a single mode fiber,
the inputting of the fundamental mode polarized light into the straight waveguide, the fundamental mode polarized light propagating in the annular waveguide and generating resonance in the annular waveguide, includes:
controlling the output light of the input light source by the polarization controller to obtain the fundamental mode polarized light;
vertically coupling the fundamental mode polarized light into the straight waveguide through a tapered optical fiber, wherein the fundamental mode polarized light propagates in the annular waveguide and generates resonance in the annular waveguide;
and the output light of the straight waveguide is connected to a photoelectric detector and an oscilloscope through a tapered optical fiber so as to detect the output light of the straight waveguide.
9. The method of claim 7, wherein the system is placed in the middle of a plate electrode, the upper surface of the plate electrode is connected to a high voltage source, the lower surface of the plate electrode is grounded,
the applying a measured voltage to modulate the effective refractive index of the electro-optic polymer film comprises:
the high-voltage source is used for applying the measured voltage to the flat electrode, the effective refractive index of the electro-optic polymer film is changed under the action of the measured voltage, and the modulation of the effective refractive index of the electro-optic polymer film is realized;
wherein the change amount of the effective refractive index of the electro-optic polymer film is as follows:
wherein U is the measured voltage applied to the plate electrode, d is the distance between the plate electrodes, and r is33Is the electro-optic coefficient, n, of the electro-optic polymer filmEOIs the effective refractive index, Δ n, of the electro-optic polymer filmEOIs the change in the effective refractive index of the electro-optic polymer film.
10. The method of claim 9, wherein shifting the resonant wavelength of the output light of the straight waveguide as the effective refractive index of the electro-optic polymer film changes in response to a change in the effective refractive index of the annular waveguide comprises:
when the fundamental mode polarized light propagates in the annular waveguide, the fundamental mode polarized light permeates into the silicon dioxide lower cladding and the electro-optic polymer film based on an evanescent field;
when the effective refractive index of the electro-optic polymer film changes, the effective refractive index in the annular waveguide changes correspondingly, wherein the change amount of the effective refractive index of the annular waveguide is as follows: Δ neff＝kΔnEOIn the formula, neffIs the effective refractive index of the annular waveguide, Δ neffIs the change of the effective refractive index of the annular waveguide, kIs the evanescent field coupling coefficient;
when the effective refractive index in the annular waveguide changes, the resonant wavelength of the output light of the straight waveguide shifts, wherein the shift amount of the resonant wavelength of the output light of the straight waveguide is as follows:
in the formula, λ is a resonance wavelength, and Δ λ is a drift amount of the resonance wavelength.
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