CN112945907B - Sensing array integrating optical cross waveguide and biochemical detection system - Google Patents
Sensing array integrating optical cross waveguide and biochemical detection system Download PDFInfo
- Publication number
- CN112945907B CN112945907B CN202110126293.8A CN202110126293A CN112945907B CN 112945907 B CN112945907 B CN 112945907B CN 202110126293 A CN202110126293 A CN 202110126293A CN 112945907 B CN112945907 B CN 112945907B
- Authority
- CN
- China
- Prior art keywords
- optical
- waveguide
- optical cross
- cross waveguide
- sensing array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N2021/436—Sensing resonant reflection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present disclosure provides a sensing array and biochemical detection system of integrated optical cross waveguide, comprising: a substrate; the optical cross waveguide is arranged along the length direction of the surface of the substrate, two sides of the optical cross waveguide are provided with side walls, and the side walls and the optical cross waveguide form a plurality of grooves; the sensing array comprises a plurality of resonant sensors which are respectively arranged in the grooves on the same side of the optical cross waveguide, and the resonant sensors are coupled with the optical cross waveguide side; the cover plate is provided with a plurality of micro-fluid channels, is arranged on the optical cross waveguide and is bonded with the optical cross waveguide, and the micro-fluid channels are in one-to-one correspondence with the plurality of resonant sensors. The optical cross waveguide with low insertion loss is integrated, and the problem of crosstalk between the resonant sensor or the integrated device is solved on the premise of not sacrificing the transmission efficiency and the structural size of the waveguide.
Description
Technical Field
The disclosure relates to the technical field of optical sensing, in particular to a sensing array integrating optical cross waveguides and a biochemical detection system.
Background
Biochemical sensors are used for measuring specific chemical or biological substances, and research on biochemical sensors has been very important because of their great significance in environmental monitoring, disease monitoring, and drug development. In the fields of medical and industrial control, it is generally necessary to monitor parameters of a plurality of environmental variables simultaneously, such as concentration of methane gas, pressure, temperature and humidity information of the environment, etc. are all of vital importance in mining engineering; in clinical medicine, simultaneous detection of multiple biomolecules is required.
In order to simultaneously and real-time detect the same substances with different concentrations in a single integrated chip or detect different substances or parameters, a sensing detection model based on a resonance multi-point multi-path array is researched step by step on the basis of improving the performance of a single biochemical sensor, so that the detection efficiency and the device integration level are improved, and the size of the chip is further reduced. However, in the actual sensor device preparation and testing process, it is found that the existing multipoint multi-path array resonant sensor model has some problems in the actual biochemical sensing application, for example, the micro-fluid channel and the sensing unit caused by etching the channel cannot be perfectly bonded and isolated from the outside, which can cause that the independent sensing unit still has the leakage of the object to be detected in the actual application, and cause the crosstalk problem between the sensing unit or other integrated devices.
Disclosure of Invention
It is an object of the present disclosure to provide a sensing array that integrates optical crossover waveguides.
Embodiments of a first aspect of the present disclosure provide a sensing array of integrated optical crossover waveguides, comprising:
a substrate;
the optical cross waveguide is arranged along the length direction of the surface of the substrate, two sides of the optical cross waveguide are provided with side walls, and the side walls and the optical cross waveguide form a plurality of grooves;
the sensing array comprises a plurality of resonant sensors, wherein the resonant sensors are respectively positioned in the grooves on the same side of the optical cross waveguide, and are coupled with the optical cross waveguide side;
the cover plate is provided with a plurality of micro-fluid channels, is arranged on the optical cross waveguide and is bonded with the optical cross waveguide, and the micro-fluid channels are in one-to-one correspondence with the plurality of resonant sensors.
According to some embodiments of the present disclosure, the optical cross waveguide includes a first optical waveguide disposed in a horizontal direction and a plurality of second optical waveguides disposed in a vertical direction, the first optical waveguide and the plurality of second optical waveguides forming a plurality of cross cores;
the plurality of resonant sensors are respectively arranged in the grooves on the same side of the first optical waveguide, and are coupled with the side of the first optical waveguide.
In some embodiments according to the present disclosure, the sensing array of integrated optical crossover waveguides further comprises:
and the detection unit is arranged at the output end of the first optical waveguide and is used for detecting the output optical signal.
According to some embodiments of the disclosure, the resonant sensor is an air-mode one-dimensional nano-beam microcavity sensor with graded lattice constants.
According to some embodiments of the disclosure, the cover plate is a PDMS microfluidic plate and the PDMS microfluidic channels are multiplexed.
In accordance with some embodiments of the present disclosure, the substrate includes a silicon base layer and a silicon dioxide layer deposited on the silicon base layer.
In some embodiments according to the present disclosure, the optical cross waveguide is made of silicon or silicon nitride.
Embodiments of a second aspect of the present disclosure provide a biochemical detection system comprising a sensing array of integrated optical crossover waveguides as described in the first aspect.
Compared with the prior art, the utility model has the advantages that:
the sensing array of the integrated optical cross waveguide integrates the single-mode optical cross waveguide with low insertion loss, the optical cross waveguide and the micro-fluid channel can be perfectly bonded, the problem of leakage of substances to be detected is solved, physical isolation of a single resonant sensor in the sensing array is realized, and compared with a traditional array sensor, the sensing array has the advantages that the problem of crosstalk between the resonant sensor or an integrated device is solved on the premise that the transmission efficiency and the structural size of the waveguide are not sacrificed.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the disclosure. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 illustrates a perspective view of a conventional array sensor;
FIG. 2 illustrates a top view of the conventional array sensor of FIG. 1;
FIG. 3 shows a perspective view of the integration of the array sensor of FIG. 1 with PDMS microfluidic channels;
FIG. 4 shows a cross-sectional view along line AB of FIG. 3;
FIG. 5 illustrates a perspective view of a sensing array of integrated optical crossover waveguides provided by the present disclosure;
FIG. 6 shows a top view of the array sensor of FIG. 5;
FIG. 7 shows a schematic perspective view of the integration of the array sensor of FIG. 5 with PDMS microfluidic channels;
fig. 8 shows a cross-sectional view along the CD line in fig. 7.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
Various structural schematic diagrams according to embodiments of the present disclosure are shown in the drawings. The figures are not drawn to scale, wherein certain details are exaggerated for clarity of presentation and may have been omitted. The shapes of the various regions, layers and relative sizes, positional relationships between them shown in the drawings are merely exemplary, may in practice deviate due to manufacturing tolerances or technical limitations, and one skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions as actually required.
In the context of the present disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present therebetween. In addition, if one layer/element is located "on" another layer/element in one orientation, that layer/element may be located "under" the other layer/element when the orientation is turned.
FIG. 1 illustrates a perspective view of a conventional array sensor; FIG. 2 illustrates a top view of the conventional array sensor of FIG. 1; FIG. 3 shows a perspective view of the integration of the array sensor of FIG. 1 with PDMS microfluidic channels; fig. 4 shows a cross-section along line AB in fig. 3.
As shown in fig. 1 to 4, the conventional array sensor includes a substrate 10, an optical waveguide 20, resonant sensors 31 to 34, sidewalls 41 and 42, a sensing unit 50, and a PDMS microfluidic channel. Existing serial array resonant sensors have many problems in practical biochemical sensing applications.
The standard CMOS process line is currently most commonly used for positive photoresist PMMA, and thus after the optical waveguide 20 and the resonant sensors 31 to 34 are etched in the silicon layer on the substrate, etched trenches of a certain width, such as 2 microns, are formed on both sides of the optical waveguide 20. As shown in fig. 4, the PDMS microfluidic channel may not be perfectly bonded to the fabricated structure shown in fig. 1, and there may be a gap as shown in fig. 4, so that in practical applications, the independent resonant sensor still has leakage of the object to be measured (such as the leakage shown in fig. 3), which causes crosstalk problems between the resonant sensor and other integrated devices.
In order to solve the above-mentioned problems in the prior art, embodiments of the present disclosure provide a sensing array and a biochemical detection system integrated with an optical cross waveguide, which are described below with reference to the accompanying drawings.
FIG. 5 illustrates a perspective view of a sensing array of integrated optical crossover waveguides provided by the present disclosure; FIG. 6 shows a top view of the array sensor of FIG. 5; FIG. 7 shows a schematic perspective view of the integration of the array sensor of FIG. 5 with PDMS microfluidic channels; fig. 8 shows a cross-sectional view along the CD line in fig. 7.
To clearly illustrate the present application, the PDMS microfluidic channel is not integrated in fig. 5, and the PDMS microfluidic channel is integrated in fig. 7, as shown in fig. 5 to 7, the present disclosure provides a sensing array of integrated optical cross waveguides, including: a substrate 100, an optical cross waveguide 200, a sensing array (310, 320, 330, 340), and a cover plate 600 having a plurality of microfluidic channels.
Wherein the substrate 100 may include a silicon base layer 110 and a silicon dioxide layer 120 deposited on the silicon base layer 110. The silicon base layer 110 may be made of silicon or silicon nitride.
The optical cross waveguide 200 is disposed along the length direction (light incident direction) of the surface of the substrate 100. Specifically, the optical cross waveguide 200 includes a first optical waveguide 210 and a plurality of second optical waveguides 220, the first optical waveguide 210 being disposed in a horizontal direction, the plurality of second optical waveguides 220 being disposed in a vertical direction, the first optical waveguide 210 and each of the second optical waveguides 220 perpendicularly crossing to form a cross core, and as shown in fig. 5 and 6, the first optical waveguide 210 and the plurality of second optical waveguides 220 form a plurality of cascaded cross cores. The application preferably integrates low insertion loss single-mode optical crossover waveguides.
In some embodiments according to the present disclosure, the optical cross waveguide 200 may be made of silicon or silicon nitride, but may be made of other materials, which is not limited by the present application.
Sidewalls 410 and 420 are formed on both sides of the optical cross waveguide 200, and the sidewalls may be made of silicon, as shown in fig. 5, and the sidewalls 410 and 420 and the optical cross waveguide 200 form a plurality of grooves that are physically isolated from each other; the recess is subsequently used for providing a resonant sensor, which is a kind of resonant cavity. According to some embodiments of the disclosure, the resonant sensor is an air-mode one-dimensional nano-beam microcavity sensor with gradually changed lattice constants, so that sensitivity is improved, and the coupling mode with the optical cross waveguide can adopt arc-shaped point coupling, so that coupling efficiency is improved.
Specifically, the sensing array includes a plurality of resonant sensors, such as 310, 320, 330, 340 shown in fig. 5, respectively disposed in grooves on the same side of the optical cross waveguide, and coupled to the optical cross waveguide side; specifically, as shown in fig. 6, a plurality of resonant sensors (310, 320, 330, 340) are respectively located in grooves on the same side of the first optical waveguide 210, and the plurality of resonant sensors are coupled to the first optical waveguide 210 side.
It will be appreciated that when the edges of the resonant sensor are spatially close to one another with other devices (e.g., straight waveguides) until the separation of the two is on the same order of magnitude as the wavelength (e.g., micron order) or less (e.g., nanometer order), the optical fields in both interact, which we call coupling.
In some embodiments according to the present disclosure, as shown in fig. 5, the sensing array of integrated optical crossover waveguides further includes: the detecting unit 500 is disposed at the output end of the first optical waveguide 210, and is configured to detect the output optical signal.
The cover plate 600 has a plurality of micro-fluidic channels, which are disposed on the optical cross waveguide 200 and bonded to the optical cross waveguide 200, specifically, the plurality of micro-fluidic channels are disposed in one-to-one correspondence with the plurality of resonant sensors, and the micro-fluidic channels are used for introducing an object to be measured or a solution to be measured. Specifically, as shown in fig. 8, the optical cross waveguide is integrated in the application, so that the side wall of the microfluidic channel can be perfectly bonded with 410, 220 and 420, and a gap as shown in fig. 4 can not be generated, thereby truly realizing the physical isolation between the resonant sensors.
The optical signal generated by the signal source is led into the first optical waveguide 210, and is transmitted and coupled to the resonant sensor through the first optical waveguide 210, and the reflected signal of the resonant sensor is led into the detection unit 600, so that when the concentration of the solution in the microfluidic channel changes, that is, when the refractive index in the sensing region changes, the resonant frequency of the resonant cavity also shifts, and the corresponding concentration of the solution is obtained by measuring and analyzing the shift change of the peak value of the resonant wavelength in the reflection spectrum.
The optical signal may be a TM mode and TE mode beam. The mode is an electromagnetic field distribution which can be supported by a waveguide with a specific shape, and is mathematically a guided mode solution of maxwell's equations of the structure, and corresponds to a characteristic value, namely an effective refractive index. The effective refractive index is an important parameter in a waveguide and is related to the structure, material properties (refractive index), operating wavelength, and mode order of the waveguide. Once these parametric properties of the waveguide are determined, the effective refractive index of a certain mode of the waveguide will also be determined.
According to some embodiments of the present disclosure, the cover plate 600 may be a PDMS microfluidic plate integrated with PDMS microfluidic channels that are multiplexed, and the sensing array of the integrated optical cross-waveguide of the present application may be used for multiplexed biochemical sensing detection.
PDMS, also known as polydimethylsiloxane, is an organic high molecular polymer (a structure containing carbon and silicon) that is widely used in the fabrication and prototype fabrication of microfluidic chips. To fabricate microfluidic devices, PDMS is poured into microstructured molds after mixing (liquid) with a crosslinker and heated to obtain an elastic replica of the mold (PDMS crosslinks).
The sensing array thought of the integrated optical cross waveguide is applicable to any waveguide type sensor model prepared based on positive photoresist, and the device material can be silicon, silicon nitride polymer and the like.
Compared with the prior art, the utility model has the advantages that:
the sensing array of the integrated optical cross waveguide integrates the single-mode optical cross waveguide with low insertion loss, the optical cross waveguide and the micro-fluid channel can be perfectly bonded, physical isolation of a single resonant sensor in the sensing array is realized, and compared with a traditional array sensor, the sensing array of the integrated optical cross waveguide solves the problem of crosstalk between the resonant sensor or an integrated device caused by leakage of a substance to be detected on the premise of not sacrificing waveguide transmission efficiency and structural size.
The present disclosure also provides a biochemical detection system comprising the sensing array of integrated optical crossover waveguides of the above embodiments.
As shown in fig. 5 to 7, the present disclosure provides a sensing array of integrated optical cross waveguides, including: a substrate 100, an optical cross waveguide 200, a sensing array (310, 320, 330, 340), and a cover plate 600 having a plurality of microfluidic channels.
Wherein the substrate 100 may include a silicon base layer 110 and a silicon dioxide layer 120 deposited on the silicon base layer 110. The silicon base layer 110 may be made of silicon or silicon nitride.
The optical cross waveguide 200 is disposed along the length of the surface of the substrate 100. Specifically, the optical cross waveguide 200 includes a first optical waveguide 210 and a plurality of second optical waveguides 220, the first optical waveguide 210 being disposed in a horizontal direction, the plurality of second optical waveguides 220 being disposed in a vertical direction, the first optical waveguide 210 and each of the second optical waveguides 220 perpendicularly crossing to form a cross core, and as shown in fig. 5 and 6, the first optical waveguide 210 and the plurality of second optical waveguides 220 form a plurality of cross cores. The application preferably integrates low insertion loss single-mode optical crossover waveguides.
In some embodiments according to the present disclosure, the optical cross waveguide 200 may be made of silicon nitride, but may be made of other materials, which is not limited in the present application.
Sidewalls 410 and 420 are formed on both sides of the optical cross waveguide 200, and the sidewalls may be made of silicon, as shown in fig. 5, and the sidewalls 410 and 420 and the optical cross waveguide 200 form a plurality of grooves that are physically isolated from each other; the recess is subsequently used for providing a resonant sensor, which is a kind of resonant cavity. In some embodiments according to the present disclosure, the resonant sensor is a one-dimensional nano-beam microcavity sensor.
Specifically, the sensing array includes a plurality of resonant sensors, such as 310, 320, 330, 340 shown in fig. 5, respectively disposed in grooves on the same side of the optical cross waveguide, and coupled to the optical cross waveguide side; specifically, as shown in fig. 6, a plurality of resonant sensors (310, 320, 330, 340) are respectively disposed in grooves on the same side of the first optical waveguide 210, and the plurality of resonant sensors are coupled to the first optical waveguide 210 side.
In some embodiments according to the present disclosure, as shown in fig. 5, the sensing array of integrated optical crossover waveguides further includes: the detecting unit 500 is disposed at the output end of the first optical waveguide 210, and is configured to detect the output optical signal.
The cover plate 600 has a plurality of micro-fluidic channels, which are disposed on the optical cross waveguide 200 and bonded to the optical cross waveguide 200, specifically, the plurality of micro-fluidic channels are disposed in one-to-one correspondence with the plurality of resonant sensors, and the micro-fluidic channels are used for introducing an object to be measured or a solution to be measured. Specifically, as shown in fig. 8, the optical cross waveguide is integrated in the application, so that the side wall of the microfluidic channel can be perfectly bonded with 410, 220 and 420, and a gap as shown in fig. 4 can not be generated, thereby truly realizing the physical isolation between the resonant sensors.
The optical signal generated by the signal source is led into the first optical waveguide 210, and is transmitted and coupled to the resonant sensor through the first optical waveguide 210, and the reflected signal of the resonant sensor is led into the detection unit 600, so that when the concentration of the solution in the microfluidic channel changes, that is, when the refractive index in the sensing region changes, the resonant frequency of the resonant cavity also shifts, and the corresponding concentration of the solution is obtained by measuring and analyzing the shift change of the peak value of the resonant wavelength in the reflection spectrum.
According to some embodiments of the present disclosure, the cover plate 600 may be a PDMS microfluidic plate, integrated with PDMS microfluidic channels, and the sensing array of the integrated optical cross waveguide of the present application may be used for multiplexed biochemical sensing detection.
Compared with the prior art, the utility model has the advantages that:
the biochemical detection system provided by the disclosure, wherein the sensing array of the integrated optical cross waveguide integrates the single-mode optical cross waveguide with low insertion loss, the optical cross waveguide and the micro-fluid channel can be perfectly bonded, physical isolation of a single resonant sensor in the sensing array is realized, and compared with the traditional array sensor, the problem of crosstalk between the resonant sensor or an integrated device is solved on the premise of not sacrificing waveguide transmission efficiency and structural size.
In the above description, technical details of patterning, etching, and the like of each layer are not described in detail. Those skilled in the art will appreciate that layers, regions, etc. of the desired shape may be formed by a variety of techniques. In addition, to form the same structure, those skilled in the art can also devise methods that are not exactly the same as those described above. In addition, although the embodiments are described above separately, this does not mean that the measures in the embodiments cannot be used advantageously in combination.
The embodiments of the present disclosure are described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the disclosure is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be made by those skilled in the art without departing from the scope of the disclosure, and such alternatives and modifications are intended to fall within the scope of the disclosure.
Claims (4)
1. A sensing array of integrated optical crossover waveguides, comprising:
a substrate;
the optical cross waveguide is arranged along the length direction of the surface of the substrate, two sides of the optical cross waveguide are provided with side walls, and the side walls and the optical cross waveguide form a plurality of grooves;
the sensing array comprises a plurality of resonant sensors which are respectively arranged in the grooves on the same side of the optical cross waveguide, and the resonant sensors are coupled with the optical cross waveguide side;
the cover plate is provided with a plurality of micro-fluid channels which are arranged on the optical cross waveguide and are bonded with the optical cross waveguide, and the micro-fluid channels are in one-to-one correspondence with the plurality of resonance sensors;
the optical cross waveguide comprises a first optical waveguide and a plurality of second optical waveguides, wherein the first optical waveguide is arranged along the horizontal direction, the plurality of second optical waveguides are arranged along the vertical direction, and the first optical waveguide and the plurality of second optical waveguides form a plurality of cross cores; the optical cross waveguide adopts a single-mode optical cross waveguide;
the plurality of resonant sensors are respectively positioned in the grooves on the same side of the first optical waveguide, and are coupled with the side of the first optical waveguide;
the sensing array of integrated optical crossover waveguides further comprises:
the detection unit is arranged at the output end of the first optical waveguide and is used for detecting the output optical signal;
the resonant sensor is an air mode one-dimensional nano beam microcavity sensor with gradually changed lattice constants, and the coupling mode of the resonant sensor and the optical cross waveguide adopts arc-shaped point coupling;
the cover plate is a PDMS microfluidic plate, and PDMS microfluidic channels are multiplexed.
2. The integrated optical crossover waveguide sensing array of claim 1, wherein the substrate comprises a silicon base layer and a silicon dioxide layer deposited on the silicon base layer.
3. The integrated optical cross waveguide sensor array of claim 1 wherein the optical cross waveguide is fabricated from silicon or silicon nitride.
4. A biochemical detection system comprising a sensing array of integrated optical crossover waveguides according to any one of claims 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110126293.8A CN112945907B (en) | 2021-01-29 | 2021-01-29 | Sensing array integrating optical cross waveguide and biochemical detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110126293.8A CN112945907B (en) | 2021-01-29 | 2021-01-29 | Sensing array integrating optical cross waveguide and biochemical detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112945907A CN112945907A (en) | 2021-06-11 |
| CN112945907B true CN112945907B (en) | 2023-09-19 |
Family
ID=76239723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110126293.8A Active CN112945907B (en) | 2021-01-29 | 2021-01-29 | Sensing array integrating optical cross waveguide and biochemical detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112945907B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198860B1 (en) * | 1998-09-22 | 2001-03-06 | Massachusetts Institute Of Technology | Optical waveguide crossings |
| CN101248379A (en) * | 2004-03-24 | 2008-08-20 | 斯欧普迪克尔股份有限公司 | Optical crossover in thin silicon |
| CN104048942A (en) * | 2014-05-13 | 2014-09-17 | 北京邮电大学 | Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius |
| CN106644158A (en) * | 2016-11-25 | 2017-05-10 | 厦门大学 | Dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor |
| CN109709641A (en) * | 2019-01-24 | 2019-05-03 | 华南师范大学 | A kind of multimode intersection construction and its design method based on periodic dielectric waveguide |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9164026B2 (en) * | 2009-08-03 | 2015-10-20 | Omega Optics, Inc. | Packaged chip for multiplexing photonic crystal microcavity coupled waveguide and photonic crystal slot waveguide devices for chip-integrated label-free detection and absorption spectroscopy with high throughput, sensitivity, specificity, and wide dynamic range |
| US8293177B2 (en) * | 2009-08-03 | 2012-10-23 | Swapnajit Chakravarty | Photonic crystal microarray device for label-free multiple analyte sensing, biosensing and diagnostic assay chips |
-
2021
- 2021-01-29 CN CN202110126293.8A patent/CN112945907B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198860B1 (en) * | 1998-09-22 | 2001-03-06 | Massachusetts Institute Of Technology | Optical waveguide crossings |
| CN101248379A (en) * | 2004-03-24 | 2008-08-20 | 斯欧普迪克尔股份有限公司 | Optical crossover in thin silicon |
| CN104048942A (en) * | 2014-05-13 | 2014-09-17 | 北京邮电大学 | Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius |
| CN106644158A (en) * | 2016-11-25 | 2017-05-10 | 厦门大学 | Dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor |
| CN109709641A (en) * | 2019-01-24 | 2019-05-03 | 华南师范大学 | A kind of multimode intersection construction and its design method based on periodic dielectric waveguide |
Non-Patent Citations (2)
| Title |
|---|
| "基于光子晶体高性能微腔设计的双参量传感模型结构分析与特征研究";孙富君;《中国优秀博士学位论文全文数据库 基础科学辑》;20210115;正文第1-60页 * |
| 基于绝缘硅的微环谐振可调谐滤波器;李帅等;《光子学报》;20110815(第08期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112945907A (en) | 2021-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7968836B2 (en) | Photonic crystal sensors with integrated fluid containment structure, sample handling devices incorporating same, and uses thereof for biomolecular interaction analysis | |
| US7531786B2 (en) | Photonic crystal sensors with integrated fluid containment structure | |
| US7529438B2 (en) | Producing fluidic waveguides | |
| US7522811B2 (en) | Producing sandwich waveguides | |
| US7391936B2 (en) | Microfluidic sensors and methods for making the same | |
| CN102565000B (en) | Multimode interference biological chemical sensor based on silicon slot waveguides | |
| EP1942341A1 (en) | A device and a system for analysis of a fluid sample | |
| Dhote et al. | Silicon photonics sensors for biophotonic applications—a review | |
| CN102062729A (en) | Integrated structure of micro-ring cavity structure-based two-channel sensors and microfluidic channels and manufacture method of integrated structure | |
| Barillaro et al. | Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals | |
| CN103575698A (en) | Optical biochemical sensing chip of micro-ring resonant cavity embedded FP (Fabry-Pero) cavity | |
| Malic et al. | Integrated miniaturized optical detection platform for fluorescence and absorption spectroscopy | |
| Azmayesh-Fard et al. | PDMS biochips with integrated waveguides | |
| CN112945907B (en) | Sensing array integrating optical cross waveguide and biochemical detection system | |
| CN108872110B (en) | High-refractive-index-sensitivity optical fiber micro-flow sensor and preparation method thereof | |
| CN105973841B (en) | The index sensor of two-dimensional columns array photonic crystal and single mode optical fiber integrated morphology | |
| CN104165841B (en) | The unmarked optical sensor of fiber end face and microfluid integrated morphology | |
| Okubo et al. | Silicon nitride directional coupler interferometer for surface sensing | |
| Gaber et al. | Volume refractometry of liquids using stable optofluidic Fabry–Pérot resonator with curved surfaces | |
| CN203259471U (en) | Integration structure of optical fiber with unmarked optical sensing element at end face and microfluidcs | |
| Scullion et al. | Slotted photonic crystals for biosensing applications | |
| Windhorn et al. | Polymer BioMEMs with integrated optical and fluidic functionality | |
| Choi et al. | Label-free optofluidic biosensing in microplate, microfluidic, and spot-based affinity capture assays | |
| CN103149176B (en) | Multichannel refractive index sensor with integration of chirp two-dimensional photonic crystal waveguide and micro-flow channel | |
| CN117554290A (en) | High-sensitivity micro-ring sensing chip and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |