CN112945889A - Concentration detection device for trace hydrogen peroxide in vacuum environment - Google Patents

Concentration detection device for trace hydrogen peroxide in vacuum environment Download PDF

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Publication number
CN112945889A
CN112945889A CN202110348098.XA CN202110348098A CN112945889A CN 112945889 A CN112945889 A CN 112945889A CN 202110348098 A CN202110348098 A CN 202110348098A CN 112945889 A CN112945889 A CN 112945889A
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hydrogen peroxide
module
detection light
concentration detection
optical path
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刘维成
周华
张亚会
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Baoji Baofeng Sensor Technology Co ltd
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light

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Abstract

The detection device comprises a hydrogen peroxide concentration detection light emitting module, a hydrogen peroxide concentration detection light receiving module, an optical path adjusting module, a core control processing module and the like, is used for carrying out real-time detection on the concentration of the trace hydrogen peroxide in the vacuum environment by taking the principle of spectrophotometry as a bedding, is convenient to install, has a simple structure and is not influenced by temperature and air pressure; by adopting the optical path adjusting module, the hydrogen peroxide with trace concentration as low as 0.4mg/L can be detected, so that the detection of the concentration of the hydrogen peroxide is more accurate, and the sterilization effect in the vacuum sterilizer cabinet reaches the optimal state; hydrogen peroxide concentration detects light emission module and hydrogen peroxide concentration and detects light receiving module and all adopt the vacuum heat insulation sealing member to carry out thermal-insulated sealing connection, avoids the check out test set to be heated the influence to measuring hydrogen peroxide trace concentration precision that causes, promotes the reliability of light emission and receipt.

Description

Concentration detection device for trace hydrogen peroxide in vacuum environment
Technical Field
The invention belongs to the technical field of biological indicator detection, and particularly relates to a concentration detection device for trace hydrogen peroxide in a vacuum environment.
Background
At present, biological indicator resistance instrument equipment at home and abroad does not have a structural device capable of directly detecting the concentration of hydrogen peroxide in a cavity under a vacuum working state, generally, detection or bacteria culture is carried out in a test paper mode, and the detection method can only be qualitative and cannot carry out quantitative real-time detection, so that detection failure or unsatisfactory effect is caused.
The method is characterized in that a biological indicator resistance instrument requires detection of trace concentration of hydrogen peroxide, the environmental pressure is 40-60 Pa, the temperature is 50 +/-0.5 ℃, and after a hydrogen peroxide solution is injected, real-time monitoring of a concentration value within 360s is required. How effectively hydrogen peroxide is actively and easily decomposed in a short time? In order to solve the above problems, the invention application with application number 202010572031.X discloses a device for detecting hydrogen peroxide concentration in a sterilizer under a high vacuum working state, which comprises a vacuum cabinet, a hydrogen peroxide concentration detection light emitting unit, an initial hydrogen peroxide concentration detection light receiving unit, a hydrogen peroxide storage container, a filling pump, a flow meter, an electromagnetic valve and a control system. Although this patent adopts the ultraviolet spectrum to reach the hydrogen peroxide concentration of real-time detection vacuum cabinet body, this patent can only detect higher range concentration like 2.3 the hydrogen peroxide of dividing L0.4 within range owing to receive the restriction of structure, to the hydrogen peroxide of micro-concentration low to 0.4mg/L, can't realize real-time detection at all, still can cause the inaccuracy of hydrogen peroxide concentration under the vacuum environment and influence the detection effect, cause to detect that work repeatability is big. Therefore, improvements are needed.
Disclosure of Invention
The technical problems solved by the invention are as follows: the invention provides a device for detecting the concentration of trace hydrogen peroxide in a vacuum environment, which adopts a detection device consisting of a hydrogen peroxide concentration detection light-emitting module, a hydrogen peroxide concentration detection light-receiving module, an optical path adjusting module, a core control processing module and the like, takes the principle of spectrophotometry as a bedding to detect the concentration of the trace hydrogen peroxide in the vacuum environment, is convenient to install, has a simple structure, is not influenced by temperature and air pressure, can monitor cavities with different sizes in real time, can detect the hydrogen peroxide with the trace concentration as low as 0.4mg/L, is more accurate in detecting the concentration of the hydrogen peroxide, and enables the physical state monitoring of an object to be detected in the vacuum environment to reach the optimal state.
The technical scheme adopted by the invention is as follows: the concentration detection device of trace hydrogen peroxide in a vacuum environment comprises a vacuum cabinet body, a hydrogen peroxide concentration detection light emitting module, a hydrogen peroxide concentration detection light receiving module and a core control processing module, wherein hydrogen peroxide is injected into the vacuum cabinet body, the hydrogen peroxide concentration detection light emitting module is fixed on one side wall of the vacuum cabinet body through a transmitting end vacuum heat insulation sealing piece, the transmitting end, extending into the vacuum cabinet body, of the hydrogen peroxide concentration detection light emitting module is connected with an optical path adjusting module for adjusting the optical path range, a light source driving circuit module is arranged in the hydrogen peroxide concentration detection light emitting module, and the light source driving circuit module is connected with the core control processing module;
the hydrogen peroxide concentration detection light receiving module is fixed on the other side wall of the vacuum cabinet body through a receiving end vacuum heat insulation sealing piece, the receiving head extends into the vacuum cabinet body, a conditioning and amplifying circuit module is arranged in the hydrogen peroxide concentration detection light receiving module, and the conditioning and amplifying circuit module is connected with the core control processing module; the hydrogen peroxide concentration detection light receiving module and the hydrogen peroxide concentration detection light emitting module are coaxially opposite to each other on two sides of the vacuum cabinet body;
the hydrogen peroxide concentration detection light emitting module is used for emitting detection light to the interior of the vacuum cabinet body, the hydrogen peroxide concentration detection light receiving module is used for receiving the detection light emitted by the hydrogen peroxide concentration detection light emitting module, the optical path between the hydrogen peroxide concentration detection light emitting module and the hydrogen peroxide concentration detection light receiving module is adjusted by the optical path adjusting module to be between 10 and 15cm and ensure that hydrogen peroxide with the trace concentration as low as 0.4mg/L in the vacuum cabinet body can be detected, and the core control processing module processes and analyzes the detection light signal from the hydrogen peroxide concentration detection light receiving module and then displays the detection light signal.
In order to further limit the technical scheme, the optical path adjusting module comprises a plurality of optical path adjusting branch pipes, and the optical path adjusting branch pipes are selected to be connected in sequence to form the optical path adjusting pipe capable of ensuring that the optical path is between 10 and 15 cm.
Preferably, the optical path adjusting module comprises an 8cm optical path adjusting branch pipe, a 4cm optical path adjusting branch pipe, a 2cm optical path adjusting branch pipe and a 1cm optical path adjusting branch pipe, and two or more optical path adjusting branch pipes are selected to be connected to form the optical path adjusting pipe capable of ensuring that the optical path is between 10 and 15 cm.
Preferably, two adjacent optical path adjusting branch pipes are connected together through a thread screwing structure or a tight sleeving structure.
The technical scheme is further limited, and the transmitting end vacuum heat insulation sealing piece and the receiving end vacuum heat insulation sealing piece are both specially made of polytetrafluoroethylene materials.
In a further limitation of the above technical solution, the hydrogen peroxide concentration detection light emitting module is an ultraviolet light emitting device, the hydrogen peroxide concentration detection light receiving module is an ultraviolet light receiving device, and the wavelength of the ultraviolet light emitted by the hydrogen peroxide concentration detection light emitting module is 240nm and the bandwidth is 50 nm.
In a further limited manner, the hydrogen peroxide concentration detection light emitting module comprises an emitting end main body, an emitting end mounting joint and an ultraviolet light emitting assembly; the hydrogen peroxide concentration detection light receiving module comprises a receiving end main body and a receiving end mounting connector.
In a further limitation of the above technical solution, the core control processing module is connected to a display module.
Compared with the prior art, the invention has the advantages that:
1. the scheme is to meet the detection of the hydrogen peroxide trace concentration, adopts a detection device consisting of a hydrogen peroxide concentration detection light emitting module, a hydrogen peroxide concentration detection light receiving module, an optical path adjusting module, a core control processing module and the like, takes the spectrophotometry principle as a bedding, detects the trace hydrogen peroxide concentration in a vacuum environment, is convenient to install, has a simple structure, is not influenced by temperature and air pressure, and can monitor cavities with different sizes in real time;
2. when the hydrogen peroxide concentration detection light emitting module and the hydrogen peroxide concentration detection light receiving module are installed on the vacuum cabinet body, the vacuum heat insulation sealing piece is adopted to connect the heat insulation and sealing, the heat insulation transmission is realized, and meanwhile, the light shielding protection is realized, so that the influence on the precision of measuring the trace concentration of the hydrogen peroxide caused by heating is avoided, and the reliability of the light emitting part and the light receiving part is improved;
3. in the scheme, the requirement of concentration on the injection amount of the hydrogen peroxide is high, and the relationship between the vacuum cavity and the injection amount can be effectively combined through the arrangement of the optical path adjusting module, so that the timeliness of trace amount is improved; secondly, through characteristic analysis of hydrogen peroxide, signals obtained by the hydrogen peroxide concentration detection light receiving module, particularly weak signals with low concentration, are conditioned and amplified by the conditioning and amplifying circuit module, and the conditioned signals are subjected to data processing by the core control processing module to obtain effective hydrogen peroxide concentration detection, so that the hydrogen peroxide with trace concentration as low as 0.4mg/L in the vacuum sterilizer cabinet can be detected, the hydrogen peroxide concentration detection is more accurate, and the physical state monitoring of the detected object in the vacuum environment reaches the optimal state.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a functional block diagram of the present invention;
FIG. 3 is a schematic structural diagram of an optical path adjusting module according to the present invention;
FIG. 4 is a circuit diagram of a light source driving circuit module according to the present invention;
fig. 5 is a circuit diagram of the conditioning amplifying circuit module of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation. The use of the phrase "comprising one of the elements" does not exclude the presence of other like elements in the process, method, article, or apparatus that comprises the element.
Referring to fig. 1-5, embodiments of the present invention are described in detail.
Example 1:
the concentration detection device of trace hydrogen peroxide in a vacuum environment, as shown in fig. 1 and 2, includes a vacuum cabinet 1 into which hydrogen peroxide is injected, a hydrogen peroxide concentration detection light emitting module 2, a hydrogen peroxide concentration detection light receiving module 4, and a core control processing module 7.
The hydrogen peroxide concentration detection light emitting module 2 is fixed on one side wall of the vacuum cabinet body 1 through the emitting end vacuum heat insulation sealing piece 3, and is required to be reliably connected with the vacuum cabinet body 1, is heat-insulated and sealed, and cannot leak gas. The light emitting module 2 for detecting hydrogen peroxide concentration is connected with an optical path adjusting module 6 for adjusting the optical path range on the emitting end extending into the vacuum cabinet body 1, a light source driving circuit module 9 is arranged in the light emitting module 2 for detecting hydrogen peroxide concentration, and the light source driving circuit module 9 is connected with a core control processing module 7.
The hydrogen peroxide concentration detection light receiving module 4 is fixed on the other side wall of the vacuum cabinet 1 through the receiving end vacuum heat insulation sealing piece 5, and the receiving head extends into the vacuum cabinet 1, so that the connection between the hydrogen peroxide concentration detection light receiving module and the vacuum cabinet 1 is reliable, heat insulation and sealing are realized, and air leakage cannot occur. The hydrogen peroxide concentration detection light receiving module 4 is provided with a conditioning amplifying circuit module 10, and the conditioning amplifying circuit module 10 is connected with the core control processing module 7. The hydrogen peroxide concentration detection light receiving module 4 and the hydrogen peroxide concentration detection light emitting module 2 are coaxially opposite on two sides of the vacuum cabinet body 1, so that a light emitting port and a light receiving port are ensured to be on the same straight line, and alignment of light emitting and receiving is ensured.
The hydrogen peroxide concentration detection light emitting module 2 is used for emitting detection light to the inside of the vacuum cabinet 1, the hydrogen peroxide concentration detection light receiving module 4 is used for receiving the detection light emitted by the hydrogen peroxide concentration detection light emitting module 2, the optical path between the hydrogen peroxide concentration detection light emitting module 2 and the hydrogen peroxide concentration detection light receiving module 4 is adjusted by the optical path adjusting module 6 to be between 10 and 15cm, and the hydrogen peroxide with the trace concentration as low as 0.4mg/L in the vacuum cabinet 1 can be detected; the optical signal received by the hydrogen peroxide concentration detection light receiving module 4 is processed and amplified by the conditioning and amplifying circuit module 10 and then transmitted to the core control processing module 7, and the core control processing module 7 performs calculation, processing, analysis and comparison on the detection light signal from the hydrogen peroxide concentration detection light receiving module 4 through software, and then outputs a standard signal, and displays the standard signal through the display module 8.
The corresponding software program in the core control processing module 7 is as follows:
Figure BDA0003001451660000071
the utility model discloses a satisfy hydrogen peroxide microconcentration's detection, adopted and detected light emission module 2 by hydrogen peroxide concentration, hydrogen peroxide concentration detects the detection device that light receiving module 4, optical path adjusting module 6 and core control processing module 7 etc. are constituteed, use the spectrophotometry principle as the foreshadowing, carry out the detection of micro hydrogen peroxide concentration under the vacuum environment, its simple to operate, moreover, the steam generator is simple in structure, do not receive the influence of temperature and atmospheric pressure, simultaneously to the equal real-time supervision of not unidimensional cavity.
Example 2:
the present embodiment is an implementation manner of the optical path adjusting module 6: the optical path adjusting module 6 comprises a plurality of optical path adjusting branch pipes, and two or more optical path adjusting branch pipes which are selected to be required are connected in sequence to form an optical path adjusting pipe which can ensure that the optical path is between 10 cm and 15 cm.
Example 3:
the present embodiment is another embodiment of the optical path adjusting module 6: as shown in fig. 3, the optical path adjusting module 6 includes an optical path adjusting branch tube 6-1 of 8cm, an optical path adjusting branch tube 6-2 of 4cm, an optical path adjusting branch tube 6-3 of 2cm, and an optical path adjusting branch tube 6-4 of 1cm, and two or more optical path adjusting branch tubes are selected to be connected to form an optical path adjusting tube capable of ensuring that the optical path is between 10 cm and 15 cm.
Preferably, as shown in fig. 3, two adjacent optical path adjusting branch pipes are connected together through a threaded or tight fit structure.
Because the concentration of the vacuum sterilizer cabinet has higher requirement on the injection amount of the hydrogen peroxide, the relationship between the vacuum cavity and the injection amount can be effectively combined through the arrangement of the optical path adjusting module 6, and the timeliness of trace amount is improved; secondly, through characteristic analysis of hydrogen peroxide, signals obtained by the hydrogen peroxide concentration detection light receiving module 4, particularly weak signals with low concentration, are conditioned and amplified by the conditioning and amplifying circuit module 10, as shown in fig. 5, data processing is carried out on the conditioned signals by the core control processing module 7, effective hydrogen peroxide concentration detection is obtained, and hydrogen peroxide with trace concentration as low as 0.4mg/L in the vacuum cabinet body can be detected, so that the hydrogen peroxide concentration detection is more accurate, and the sterilization effect in the vacuum sterilizer cabinet reaches the optimal state.
Example 4:
the transmitting end vacuum heat insulation sealing piece 3 and the receiving end vacuum heat insulation sealing piece 5 are both made of polytetrafluoroethylene in a special mode.
When the hydrogen peroxide concentration detection light emitting module and the hydrogen peroxide concentration detection light receiving module are installed on the vacuum cabinet body, the vacuum heat insulation sealing piece is adopted to connect the heat insulation and sealing, the heat insulation transmission is insulated, and meanwhile, the light shielding protection is realized, so that the influence on the precision of measuring the trace concentration of the hydrogen peroxide caused by heating is avoided, and the reliability of the light emitting part and the light receiving part is improved.
Example 5:
the hydrogen peroxide concentration detection light emitting module 2 is an ultraviolet light emitting device, and the hydrogen peroxide concentration detection light receiving module 4 is an ultraviolet light receiving device. The wavelength of the ultraviolet light emitted by the hydrogen oxide concentration detection light emitting module 2 is 240nm, and the bandwidth is 50 nm.
Example 6:
the hydrogen peroxide concentration detection light emitting module 2 comprises an emitting end main body, an emitting end mounting joint, an emitting end sealing ring, an ultraviolet light emitting assembly, an ultraviolet light tube fixing screw and an emitting end connecting wire.
The hydrogen peroxide concentration detection light receiving module 4 comprises a receiving end main body, a receiving end mounting joint, a receiving end sealing ring and a receiving end connecting wire.
The hydrogen peroxide concentration detection light emitting module 2 and the hydrogen peroxide concentration detection light receiving module 4 both adopt an ultraviolet light emitting and receiving device used in the prior art, and the specific structure of the device is not explained in detail in the application.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. Concentration detection device of trace hydrogen peroxide under vacuum environment, including the inside vacuum cabinet body (1) that has hydrogen peroxide of pouring into, hydrogen peroxide concentration detection optical transmission module (2), hydrogen peroxide concentration detection optical reception module (4) and core control processing module (7), its characterized in that: the hydrogen peroxide concentration detection light emitting module (2) is fixed on one side wall of the vacuum cabinet body (1) through a transmitting end vacuum heat insulation sealing piece (3), the transmitting end of the hydrogen peroxide concentration detection light emitting module (2) extending into the vacuum cabinet body (1) is connected with an optical path adjusting module (6) for adjusting the optical path range, a light source driving circuit module (9) is arranged in the hydrogen peroxide concentration detection light emitting module (2), and the light source driving circuit module (9) is connected with the core control processing module (7);
the hydrogen peroxide concentration detection light receiving module (4) is fixed on the other side wall of the vacuum cabinet body (1) through a receiving end vacuum heat insulation sealing piece (5), a receiving head extends into the vacuum cabinet body (1), a conditioning and amplifying circuit module (10) is arranged in the hydrogen peroxide concentration detection light receiving module (4), and the conditioning and amplifying circuit module (10) is connected with the core control processing module (7); the hydrogen peroxide concentration detection light receiving module (4) and the hydrogen peroxide concentration detection light emitting module (2) are coaxially opposite to each other on two sides of the vacuum cabinet body (1);
the hydrogen peroxide concentration detection light emitting module (2) is used for emitting detection light to the inside of the vacuum cabinet body (1), the hydrogen peroxide concentration detection light receiving module (4) is used for receiving the detection light emitted by the hydrogen peroxide concentration detection light emitting module (2), the light path between the hydrogen peroxide concentration detection light emitting module (2) and the hydrogen peroxide concentration detection light receiving module (4) is adjusted by the light path adjusting module (6) and then is between 10 and 15cm, the hydrogen peroxide with the trace concentration as low as 0.4mg/L in the vacuum cabinet body (1) can be detected, and the core control processing module (7) processes and analyzes the detection light signal from the hydrogen peroxide concentration detection light receiving module (4) and displays the detection light signal.
2. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 1, wherein: the optical path adjusting module (6) comprises a plurality of optical path adjusting branch pipes, and the optical path adjusting branch pipes which are selected to be needed are sequentially connected to form an optical path adjusting pipe which can ensure that the optical path is between 10 cm and 15 cm.
3. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 2, wherein: the optical path adjusting module (6) comprises an 8cm optical path adjusting branch pipe (6-1), a 4cm optical path adjusting branch pipe (6-2), a 2cm optical path adjusting branch pipe (6-3) and a 1cm optical path adjusting branch pipe (6-4), and two or more optical path adjusting branch pipes are selected to be connected to form an optical path adjusting pipe capable of ensuring that the optical path is between 10 cm and 15 cm.
4. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 2 or 3, wherein: two adjacent optical path adjusting branch pipes are connected together through a threaded screwing structure or a tight fit structure.
5. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 1, wherein: the transmitting end vacuum heat insulation sealing piece (3) and the receiving end vacuum heat insulation sealing piece (5) are both made of polytetrafluoroethylene materials in a special mode.
6. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 1, wherein: the hydrogen peroxide concentration detection light-emitting module (2) is an ultraviolet light-emitting device, the hydrogen peroxide concentration detection light-receiving module (4) is an ultraviolet light-receiving device, and the wavelength of ultraviolet light emitted by the hydrogen peroxide concentration detection light-emitting module (2) is 240nm and the bandwidth is 50 nm.
7. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 6, wherein: the hydrogen peroxide concentration detection light emitting module (2) comprises an emitting end main body, an emitting end mounting joint and an ultraviolet light emitting assembly; the hydrogen peroxide concentration detection light receiving module (4) comprises a receiving end main body and a receiving end mounting joint.
8. The apparatus for detecting the concentration of trace hydrogen peroxide in a vacuum environment according to claim 1, wherein: and the core control processing module (7) is connected with a display module (8).
CN202110348098.XA 2021-03-31 2021-03-31 Concentration detection device for trace hydrogen peroxide in vacuum environment Pending CN112945889A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205593914U (en) * 2016-05-03 2016-09-21 青岛海纳光电环保有限公司 Portable gaseous pollutants concentration detection device
CN111579518A (en) * 2020-06-22 2020-08-25 淄博康元医疗器械有限公司 Device for detecting hydrogen peroxide concentration in sterilizer under high vacuum working state
CN214472751U (en) * 2021-03-31 2021-10-22 宝鸡市宝峰传感技术有限公司 Concentration detection device for trace hydrogen peroxide in vacuum environment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205593914U (en) * 2016-05-03 2016-09-21 青岛海纳光电环保有限公司 Portable gaseous pollutants concentration detection device
CN111579518A (en) * 2020-06-22 2020-08-25 淄博康元医疗器械有限公司 Device for detecting hydrogen peroxide concentration in sterilizer under high vacuum working state
CN214472751U (en) * 2021-03-31 2021-10-22 宝鸡市宝峰传感技术有限公司 Concentration detection device for trace hydrogen peroxide in vacuum environment

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