CN112945108A - Electro-optical modulation sideband-based precise displacement measurement method and device - Google Patents
Electro-optical modulation sideband-based precise displacement measurement method and device Download PDFInfo
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- CN112945108A CN112945108A CN202110105425.9A CN202110105425A CN112945108A CN 112945108 A CN112945108 A CN 112945108A CN 202110105425 A CN202110105425 A CN 202110105425A CN 112945108 A CN112945108 A CN 112945108A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
Abstract
The invention belongs to the technical field of precise displacement measurement, and provides a precise displacement measurement method and device based on an electro-optic modulation sideband1And a second free spectral range Deltav corresponding to the second cavity length2(ii) a According to a first free spectral range Deltav1And a second free spectral range Deltav2And calculating to obtain the displacement delta L of the interferometer. According to the invention, the sideband frequency of the electro-optical modulator is locked to resonate with the free spectral range of the interferometer, so that the displacement measurement of the interferometer is converted into the measurement of the microwave resonance frequency, and the accuracy of the displacement measurement is improved.
Description
Technical Field
The invention relates to the technical field of precision displacement measurement, in particular to a precision displacement measurement method and device based on an electro-optic modulation sideband.
Background
Precision displacement measurement plays an important role in the fields of precision manufacturing, advanced sensing, metering and the like. The commonly used precision displacement measurement method is mainly based on a laser interferometer method, and the precision measurement of the displacement is realized through counting and subdividing interferometer fringes. In the traditional method, a Fabry-Perot (Fabry-Perot resonant cavity) interferometer is simultaneously locked by two beams of laser, so that the complexity is high and the measurement accuracy is low.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides a precise displacement measurement method and device based on an electro-optic modulation sideband.
Specifically, the method is mainly realized by the following technical scheme:
a precise displacement measurement method based on an electro-optic modulation sideband comprises the following steps:
obtaining a first free spectral range delta v corresponding to a first cavity length of an interferometer by adjusting sideband frequency of an electro-optic modulator and resonance of the interferometer1And a second free spectral range Deltav corresponding to the second cavity length2；
According to a first free spectral range Deltav1And a second free spectral range Deltav2And calculating to obtain the displacement delta L of the interferometer.
Preferably, the first free spectral range Δ ν is used as a basis1And a second free spectral range Deltav2Calculating to obtain the displacement delta L of the interferometer, which specifically comprises the following steps:
the displacement Δ L of the interferometer is calculated by:
wherein, Delta nu1Is a first free spectral range, Δ ν2And c is the vacuum light velocity constant, and n is the refractive index.
Preferably, adjusting the sideband frequency of the electro-optic modulator to resonate with the interferometer specifically comprises:
the electro-optical modulator comprises a first electro-optical modulator and a second electro-optical modulator, and laser beams output by the laser emitter sequentially pass through the first electro-optical modulator and the second electro-optical modulator to generate a frequency omega1Has a first sideband of and a frequency of ω2A second sideband of (a);
photoelectric receiver is based onThe received laser beam including the first sideband and the second sideband generates a microwave signal including a frequency ω1Of a first microwave signal and a frequency of omega2The second microwave signal of (a);
the frequency division processing unit separates the first microwave signal from the second microwave signal, inputs the first microwave signal to the laser frequency locker and inputs the second microwave signal to the electro-optical sideband locker;
the laser frequency locker compares the phase difference of the third microwave signal with the phase difference of the first microwave signal to generate an error signal for locking the laser and the interferometer, and feeds the error signal back to the laser transmitter;
the electro-optical sideband locker adjusts the frequency omega of the fourth microwave signal through the output voltage signal2Resonating with an interferometer;
the frequency counter records the frequency omega of the fourth microwave signal when resonating with the interferometer2So as to obtain free spectral ranges corresponding to different cavity lengths of the interferometer according to the recorded frequency;
the third microwave signal is input to the first electro-optical modulator by the microwave signal generator and has a frequency of omega1For driving the first electro-optical modulator to generate a microwave signal of frequency omega1The fourth microwave signal is input to the second electro-optical modulator by the voltage-controlled oscillator and has a frequency of omega2For driving a second electro-optical modulator to generate a microwave signal of frequency omega2The second sideband of (a).
Preferably, a first free spectral range Δ ν corresponding to a first cavity length of the interferometer is obtained1And a second free spectral range Deltav corresponding to the second cavity length2The method specifically comprises the following steps:
moving the plane mirror of the interferometer to a first position, wherein the cavity length of the interferometer is the first cavity length, and adjusting the frequency omega of the fourth microwave signal by the electro-optical sideband locker through the output voltage signal2Resonant with the interferometer, at a frequency ω2Is recorded as omega21Then a first free spectral range Deltav corresponding to a first cavity length of the interferometer1＝ω21；
Moving the plane mirror of the interferometer to a second position, wherein the cavity length of the interferometer is the second cavity length, and adjusting the frequency omega of the fourth microwave signal by the electro-optical sideband locker through the output voltage signal2Resonant with the interferometer, at a frequency ω2Is recorded as omega22Then a second free spectral range Deltav corresponding to a second cavity length of the interferometer2＝ω22。
A precise displacement measuring device based on an electro-optic modulation sideband comprises a laser transmitter, a first electro-optic modulator, a second electro-optic modulator, a polarization beam splitter prism, a quarter-wave plate, a coupling lens and an interferometer which are sequentially arranged, wherein the interferometer comprises a concave reflector and a movable plane reflector;
the first electro-optical modulator is further connected with a microwave signal generator, the microwave signal generator is connected with a laser frequency locker, the laser frequency locker is respectively connected with the laser transmitter and the frequency division processing unit, the frequency division processing unit is respectively connected with a photoelectric receiver and an electro-optical sideband locker, the electro-optical sideband locker is respectively connected with a frequency counter and a voltage-controlled oscillator, the voltage-controlled oscillator is connected with the second electro-optical modulator, and the photoelectric receiver is connected with the polarization splitting prism.
Compared with the prior art, the invention has the following beneficial effects:
1. the sideband frequency of the electro-optical modulator is locked to resonate with the free spectral range of the interferometer, so that the displacement measurement of the interferometer is converted into the measurement of the microwave resonance frequency, and the accuracy of the displacement measurement is improved;
2. the electro-optic modulation sideband frequency is locked with the free spectral range of the interferometer by utilizing the characteristics of high response and easiness in control of a voltage-controlled oscillator, and the displacement of the interferometer is measured in real time;
3. the method solves the problems of high complexity and low measurement precision of the traditional method by simultaneously locking the interferometer through two beams of laser.
Drawings
1. FIG. 1 is a schematic structural diagram of a precise displacement measuring device based on an electro-optic modulation sideband provided by the invention;
reference numerals:
the device comprises a single-frequency narrow-linewidth laser-1, a first electro-optical modulator-2, a second electro-optical modulator-3, a polarization beam splitter prism-4, a quarter wave plate-5, a coupling lens-6, a concave mirror-7 of a Fabry-Perot interferometer, a plane mirror-8 of the Fabry-Perot interferometer, a voltage-controlled oscillator-9, a microwave signal generator-10, a laser frequency locker-11, a frequency division processing unit-12, an electro-optical sideband locker-13, a frequency counter-14 and an electro-optical receiver-15.
Detailed Description
In order to make the core idea of the present invention more clearly understood, the following detailed description will be made with reference to the accompanying drawings.
The embodiment of the invention provides a precise displacement measuring device based on an electro-optic modulation sideband, which specifically comprises a single-frequency narrow linewidth laser 1, a first electro-optic modulator 2, a second electro-optic modulator 3, a polarization beam splitter prism 4, a quarter wave plate 5, a coupling lens 6, a concave reflector 7 of a Fabry-Perot interferometer and a plane reflector 8 of the Fabry-Perot interferometer, which are sequentially arranged as shown in figure 1, wherein the plane reflector 8 can move left and right.
The first electro-optical modulator 2 is further connected with a microwave signal generator 10, the microwave signal generator 10 is connected with a laser frequency locker 11, the laser frequency locker 11 is respectively connected with the single-frequency narrow linewidth laser 1 and the frequency division processing unit 12, the frequency division processing unit 12 is respectively connected with a photoelectric receiver 15 and an electro-optical sideband locker 13, the electro-optical sideband locker 13 is respectively connected with a frequency counter 14 and a voltage-controlled oscillator 9, the voltage-controlled oscillator 9 is connected with the second electro-optical modulator 3, and the photoelectric receiver 15 is connected with the polarization beam splitter prism 4.
The following describes a precise displacement measurement method based on an electro-optic modulation sideband with reference to fig. 1, which includes:
first, the plane mirror 8 of the Fabry-Perot interferometer is moved to a first position, in which case the cavity length of the Fabry-Perot interferometer isIs expressed as a first cavity length L1And a first free spectral range corresponding to the first cavity length of the interferometer is recorded as delta v1。
Laser beams emitted by a single-frequency narrow linewidth laser 1 sequentially pass through a first electro-optical modulator 2 and a second electro-optical modulator 3 to respectively generate frequencies omega1Has a first sideband of and a frequency of ω2The second sideband of (a).
Laser beams including a first sideband and a second sideband sequentially pass through a polarization beam splitter 4, a quarter-wave plate 5 and a coupling lens 6 and then enter a Fabry-Perot interferometer, the laser beams entering the Fabry-Perot interferometer are arranged to include a first laser beam and a second laser beam, a concave reflector 7 in the Fabry-Perot interferometer reflects one part of the first laser beams, namely the first laser beams, to the coupling lens 6, sequentially passes through the quarter-wave plate 5 and the polarization beam splitter 4 and then enters a photoelectric receiver 15, and the other part of the second laser beams, namely the second laser beams, enters a plane reflector 8 of the Fabry-Perot interferometer through the concave reflector 7 of the Fabry-Perot interferometer.
The photoreceiver 15 generates a microwave signal from a received laser beam comprising a first sideband and a second sideband, said microwave signal comprising a frequency ω1Of a first microwave signal and a frequency of omega2Of the second microwave signal.
The frequency separation processing unit 12 separates the first microwave signal and the second microwave signal, and inputs the first microwave signal to the laser frequency locker 11 and the second microwave signal to the electro-optical sideband locker 13.
The laser frequency locker 11 compares the phase difference between the third microwave signal and the first microwave signal to generate an error signal for locking the laser and the Fabry-Perot interferometer, and feeds back the error signal to the single-frequency narrow linewidth laser 1, wherein the third microwave signal is input to the first electro-optic modulator 2 by the microwave signal generator 10 and has a frequency of omega1For driving the first electro-optical modulator 2 to generate a microwave signal of frequency omega1The first sideband of (a).
The electro-optical sideband locker 13 adjusts the frequency omega of the fourth microwave signal by means of the output voltage signal2Resonating with a Fabry-Perot interferometer, the frequency ω of the fourth microwave signal at that time2Is recorded as omega21Thus, the Fabry-Perot interferometer has a first cavity length L1Corresponding first free spectral range Deltav1Comprises the following steps: Δ ν1＝ω21The fourth microwave signal has a frequency ω which is input to the second electro-optical modulator 3 by the voltage-controlled oscillator 92For driving the second electro-optical modulator 3 to generate a microwave signal of frequency omega2The second sideband of (a).
Recording the frequency omega of the fourth microwave signal at resonance with the interferometer by means of a frequency counter2I.e. omega21。
Then, the plane mirror 8 of the Fabry-Perot interferometer is moved to a second position, and the cavity length of the Fabry-Perot interferometer is recorded as a second cavity length L2And a second free spectral range corresponding to the second cavity length of the interferometer is recorded as delta v2。
Similarly, the electro-optical sideband locker 13 adjusts the frequency ω of the fourth microwave signal by the output voltage signal2Resonating with a Fabry-Perot interferometer, the frequency ω of the fourth microwave signal at that time2Is recorded as omega22Hence, the second cavity length L of the Fabry-Perot interferometer2Corresponding second free spectral range Deltav2Comprises the following steps: Δ ν2＝ω22。
Re-recording the frequency omega of the fourth microwave signal at resonance with the interferometer by means of a frequency counter2I.e. omega22。
Thus, from the above, the displacement Δ L of the Fabry-Perot interferometer is:
ΔL＝L2-L1 (1)
and the free spectral range Δ ν of the Fabry-Perot interferometer is calculated according to the following equation (2):
wherein c is the vacuum light velocity constant, n is the refractive index, and L is the cavity length of the Fabry-Perot interferometer.
Therefore, from equations (1) and (2), the displacement Δ L of the Fabry-Perot interferometer can be expressed as:
in summary, it can be known from the formula (3) that only the first free spectral range Δ ν corresponding to the first cavity length of the Fabry-Perot interferometer needs to be measured1A second free spectral range Deltav corresponding to a second cavity length of the Fabry-Perot interferometer2The displacement measurement of the Fabry-Perot interferometer can be realized.
And the above-mentioned catalyst has delta v1＝ω21And Δ ν2＝ω22Therefore, the invention converts the displacement measurement of the interferometer into the measurement of the microwave resonance frequency by locking the sideband frequency of the electro-optical modulator and the free spectral range of the interferometer to resonate, is favorable for improving the accuracy of the displacement measurement, and simultaneously utilizes the characteristics that the electro-optical modulation sideband frequency has high response and is easy to control by a voltage-controlled oscillator to realize the locking of the electro-optical modulation sideband frequency and the free spectral range of the interferometer and measure the displacement of the interferometer in real time, thereby solving the problems of high complexity and low measurement precision caused by the fact that the interferometer is simultaneously locked by two beams of laser in the traditional method.
The foregoing detailed description of the embodiments of the present invention has been presented for the purpose of illustrating the principles and implementations of the present invention, and the description of the embodiments is only provided to assist understanding of the core concepts of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (5)
1. A precise displacement measurement method based on an electro-optic modulation sideband is characterized by comprising the following steps:
obtaining a first free spectral range delta v corresponding to a first cavity length of an interferometer by adjusting sideband frequency of an electro-optic modulator and resonance of the interferometer1And a second free spectral range Deltav corresponding to the second cavity length2；
According to a first free spectral range Deltav1And a second free spectral range Deltav2And calculating to obtain the displacement delta L of the interferometer.
2. The method of claim 1, wherein the method comprises measuring the first free spectral range Δ ν based on the electro-optic modulation sidebands1And a second free spectral range Deltav2Calculating to obtain the displacement delta L of the interferometer, which specifically comprises the following steps:
the displacement Δ L of the interferometer is calculated by:
wherein, Delta nu1Is a first free spectral range, Δ ν2And c is the vacuum light velocity constant, and n is the refractive index.
3. The method for precision displacement measurement based on the electro-optic modulation sideband as claimed in claim 2, wherein the adjusting the sideband frequency of the electro-optic modulator and the resonance of the interferometer specifically comprises:
the electro-optical modulator comprises a first electro-optical modulator and a second electro-optical modulator, and laser beams output by the laser emitter sequentially pass through the first electro-optical modulator and the second electro-optical modulator to generate a frequency omega1Has a first sideband of and a frequency of ω2A second sideband of (a);
the opto-electronic receiver generates a microwave signal from a received laser beam comprising a first sideband and a second sideband, the microwave signal comprising a frequency of ω1Of a first microwave signal and a frequency of omega2The second microwave signal of (a);
the frequency division processing unit separates the first microwave signal from the second microwave signal, inputs the first microwave signal to the laser frequency locker and inputs the second microwave signal to the electro-optical sideband locker;
the laser frequency locker compares the phase difference of the third microwave signal with the phase difference of the first microwave signal to generate an error signal for locking the laser and the interferometer, and feeds the error signal back to the laser transmitter;
the electro-optical sideband locker adjusts the frequency omega of the fourth microwave signal through the output voltage signal2Resonating with an interferometer;
the frequency counter records the frequency omega of the fourth microwave signal when resonating with the interferometer2So as to obtain free spectral ranges corresponding to different cavity lengths of the interferometer according to the recorded frequency;
the third microwave signal is input to the first electro-optical modulator by the microwave signal generator and has a frequency of omega1For driving the first electro-optical modulator to generate a microwave signal of frequency omega1The fourth microwave signal is input to the second electro-optical modulator by the voltage-controlled oscillator and has a frequency of omega2For driving a second electro-optical modulator to generate a microwave signal of frequency omega2The second sideband of (a).
4. The method of claim 3, wherein obtaining the first free spectral range Δ ν corresponding to the first cavity length of the interferometer is performed by a method of precision displacement measurement based on electro-optic modulation sidebands1And a second free spectral range Deltav corresponding to the second cavity length2The method specifically comprises the following steps:
moving the plane mirror of the interferometer to a first position, wherein the cavity length of the interferometer is the first cavity length, and adjusting the frequency omega of the fourth microwave signal by the electro-optical sideband locker through the output voltage signal2Resonant with the interferometer, at a frequency ω2Is recorded as omega21Then a first free spectral range Deltav corresponding to a first cavity length of the interferometer1＝ω21；
Moving the plane mirror of the interferometer to a second position, wherein the cavity length of the interferometer is the second cavity length, and adjusting the frequency omega of the fourth microwave signal by the electro-optical sideband locker through the output voltage signal2Resonant with the interferometer, at a frequency ω2Is recorded as omega22Then, thenA second free spectral range delta v corresponding to the second cavity length of the interferometer2＝ω22。
5. A precise displacement measuring device based on an electro-optic modulation sideband is characterized by comprising a laser transmitter, a first electro-optic modulator, a second electro-optic modulator, a polarization beam splitter prism, a quarter-wave plate, a coupling lens and an interferometer which are sequentially arranged, wherein the interferometer comprises a concave reflector and a movable plane reflector;
the first electro-optical modulator is further connected with a microwave signal generator, the microwave signal generator is connected with a laser frequency locker, the laser frequency locker is respectively connected with the laser transmitter and the frequency division processing unit, the frequency division processing unit is respectively connected with a photoelectric receiver and an electro-optical sideband locker, the electro-optical sideband locker is respectively connected with a frequency counter and a voltage-controlled oscillator, the voltage-controlled oscillator is connected with the second electro-optical modulator, and the photoelectric receiver is connected with the polarization splitting prism.
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