CN112925165B - Demolding method and demolding device - Google Patents
Demolding method and demolding device Download PDFInfo
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- CN112925165B CN112925165B CN202110141665.4A CN202110141665A CN112925165B CN 112925165 B CN112925165 B CN 112925165B CN 202110141665 A CN202110141665 A CN 202110141665A CN 112925165 B CN112925165 B CN 112925165B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a demolding method and a demolding device, wherein the demolding method comprises the following steps: the method comprises the steps that an imprinting template after imprinting is integrally and fixedly arranged on an installation table; acquiring a preferential demolding direction of separation of the imprinting template and the imprinting matrix, and driving the mounting table to rotate by a preset angle relative to the demolding piece to enable the preferential demolding direction to be matched with the moving direction of the demolding piece; driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table; and driving a demolding piece to extend between the imprinting template and the imprinting substrate and driving the demolding piece to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferential demolding direction. The demolding method and the demolding device can reduce the tearing probability of the imprinted image in the demolding process and improve the yield of products.
Description
Technical Field
The invention relates to the technical field of demolding, in particular to a demolding method and a demolding device.
Background
The nanoimprint technology is considered as one of the most promising micro-nano manufacturing technologies, can break through the limit of optical exposure diffraction effect, processes the nano structure, is most likely to become the main technology of micro-nano photonics and electronics industry in the future, can be applied to low-cost and large-scale production of micro-nano structure functional devices, has unique technical advantages especially in the preparation of optical devices, and is also the most widely applied field at present.
The basic process of the nano-imprinting technology comprises three stages of pattern imprinting, pattern transfer and imprinting template demolding, and according to the pattern transfer mode, the method mainly comprises a hot imprinting mode and an ultraviolet imprinting mode, and no matter what imprinting mode is adopted, the imprinting technology is to completely faithfully copy micro-nano patterns on the imprinting template onto a substrate material.
However, the conventional demolding method easily causes tearing of the device pattern, so that the yield of the product is greatly reduced.
Disclosure of Invention
The invention aims to provide a demolding method and a demolding device, which are used for solving the problem that the traditional demolding mode is easy to cause tearing of a device graph, so that the yield of products is greatly reduced. The demolding method and the demolding device can reduce the tearing probability of the imprinted image in the demolding process and improve the yield of products.
The specific technical scheme is as follows:
in one aspect, the present application relates to a demolding method comprising:
the method comprises the steps that an imprinting template after imprinting is integrally and fixedly arranged on an installation table; acquiring a preferential demolding direction of separation of the imprinting template and the imprinting matrix, and driving the mounting table to rotate by a preset angle relative to a demolding piece to enable the preferential demolding direction to be matched with the moving direction of the demolding piece;
driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table;
and driving a demolding piece to extend between the imprinting template and the imprinting substrate and driving the demolding piece to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferential demolding direction.
When the demolding method is used, the imprinting template and the imprinting matrix after imprinting are integrally and fixedly arranged on the mounting table, then the optimal demolding direction for separating the imprinting template from the imprinting matrix is obtained, the optimal demolding direction can reduce the tearing probability of an imprinted image in the demolding process, then the mounting table is driven to rotate for a preset angle relative to the demolding piece to enable the optimal demolding direction to be matched with the moving direction of the demolding piece, then the imprinting template is driven to tilt relative to the imprinting matrix, finally the demolding piece is driven to extend between the imprinting template and the imprinting matrix and is driven to move relative to the mounting table so as to separate the imprinting template from the imprinting matrix along the optimal demolding direction, demolding is finished, the pattern cannot be damaged or the damage rate is low, and the yield of products is improved.
The technical scheme is further described as follows:
in one embodiment, before driving the mounting table to rotate relative to the stripper member, the method further comprises the steps of: a mark is provided on the imprint template.
In one embodiment, the preset angle is calculated by:
and acquiring the position information of the mark on the imprinting template, and calculating the preset angle according to the position information and the optimal demolding direction.
In one embodiment, the step of driving the stripper member to extend between the imprint template and the imprint substrate and to move relative to the mounting stage to separate the imprint template and the imprint substrate in the preferred stripping direction comprises:
the stripping module is driven to move so that the part of the imprinting template, which is tilted relative to the imprinting substrate, extends into the clamping opening of the stripping module, and the stripping piece is driven to extend between the imprinting template and the imprinting substrate and is driven to move relative to the mounting table along the preferential stripping direction so as to separate the imprinting template from the imprinting substrate.
In another aspect, the present application is directed to a demolding device comprising:
the mounting base and the mounting table are rotatably arranged on the mounting base, and the mounting table is used for mounting the imprinting base and the imprinting template;
the acquisition module is used for acquiring the preferential demolding direction of the separation of the imprinting template and the imprinting substrate;
the demoulding mechanism is connected to the mounting seat and comprises a demoulding piece and a driving piece, and the driving piece is used for driving the demoulding piece to extend between the imprinting template and the imprinting matrix and driving the demoulding piece to move so as to separate the imprinting template from the imprinting matrix along the preferential demoulding direction;
the rotating mechanism is connected to the mounting seat and is used for driving the mounting table to rotate by a preset angle so that the preferential demolding direction is matched with the moving direction of the demolding piece;
the jacking piece is connected to the mounting seat and used for driving the imprinting template to tilt relative to the imprinting base; a kind of electronic device with high-pressure air-conditioning system
And the controller is in communication connection with the acquisition module, the rotating mechanism, the jacking piece and the driving piece.
The technical scheme is further described as follows:
in one embodiment, the demolding mechanism further comprises a receiving member coupled to the demolding member for receiving the imprint template separate from the imprint substrate.
In one embodiment, the demolding piece is provided with a clamping opening, and the driving piece drives the demolding piece to move relative to the mounting table so that the imprinting mold plate stretches into the clamping opening and drives the demolding piece to move so that the imprinting mold plate is separated from the imprinting substrate.
In one embodiment, the demolding piece comprises an installation body, a first clamping body and a second clamping body, wherein the first clamping body and the second clamping body are connected with the installation body at intervals, a clamping opening is formed between the first clamping body and the second clamping body, and the installation body is in transmission fit with the driving piece.
In one embodiment, the first clamping body and/or the second clamping body are rotatably connected to the mounting body.
In one embodiment, the acquiring module includes a catcher and an image processing unit, the catcher is in communication connection with the image processing unit, the catcher is used for capturing position information of the mark on the imprinting template, the image processing unit is used for calculating the preset angle to enable the optimal demolding direction to be matched with the moving direction of the demolding piece, the image processing unit is in communication connection with the controller, and the controller controls the rotating mechanism to drive the mounting table to rotate according to the preset angle information calculated by the image processing unit.
When the demolding device is used, the imprinting template after imprinting and the imprinting matrix are integrally and fixedly arranged on the mounting table, and then the preferential demolding direction for separating the imprinting template from the imprinting matrix is obtained through the obtaining module, and the preferential demolding direction can reduce the tearing probability of the imprinted image in the demolding process. Then driving the mounting table to rotate by a preset angle through the rotating mechanism so that the optimal demolding direction is matched with the moving direction of the demolding piece; because the controller is in communication connection with the acquisition module and the driving piece, when the mount table rotates by a preset angle, the controller controls the jacking piece to drive the imprinting template to tilt relative to the imprinting matrix, and then the controller controls the driving piece to drive the demolding piece to extend into between the imprinting template and the imprinting matrix and drive the demolding piece to move relative to the mount table so that the imprinting template and the imprinting matrix are separated along the preferential demolding direction, demolding is finished, patterns cannot be damaged or the damage rate is low, and the yield of products is improved.
Compared with the prior art, the invention has the beneficial effects that:
1. the demolding method and the demolding device can realize that the patterns are not damaged or the damage rate is low during demolding, and help to improve the yield of products.
2. The demolding method and the demolding device can realize automatic demolding and improve efficiency.
3. According to the demolding method and the demolding device, the speed of the driving piece can be controlled according to different materials and different conditions, so that the demolding speed is controlled, the demolding speed is controllable, and in addition, the demolding angle can be further adjusted by adjusting the relative position between the clamping bodies, so that the demolding force can be adjusted, and the demolding force and the demolding angle are controllable.
4. The demolding method and the demolding device can ensure the demolding consistency among different batches of products.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings used in the embodiments, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Moreover, the figures are not drawn to a 1:1 scale, and the relative sizes of various elements are merely exemplary in the figures, and are not necessarily drawn to true scale.
FIG. 1 is a schematic view of a demolding device according to an embodiment;
FIG. 2 is a schematic view of a demolding device according to another embodiment;
FIG. 3 is a schematic view of a demolding device according to another embodiment;
FIG. 4 is a schematic view of a demolding mechanism according to an embodiment;
FIG. 5 is a flow chart of a demolding method in an embodiment.
Reference numerals illustrate:
10. a demolding device; 100. a mounting base; 110. a mounting hole; 200. a mounting table; 300. an acquisition module; 310. a catcher; 320. an adjustment assembly; 322. a first adjustment member; 324. a second adjusting member; 326. a support; 400. a demoulding mechanism; 410. a driving member; 420. stripping the module; 422. a mounting body; 4222. an installation space; 424. a first clamping body; 426. a second clamping body; 428. a clamping opening; 500. a rotation mechanism; 600. a jack-up member; 700. a storage member; 800. imprinting the template; 900. imprinting the substrate.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
Referring to fig. 1 to 3, a demolding device 10 in an embodiment includes a mounting base 100 and a mounting table 200, the mounting table 200 is rotatably disposed on the mounting base 100, and an imprint substrate 900 and an imprint template 800 after imprinting are mounted on the mounting table 200. Alternatively, the mounting stage 200 may be a vacuum chuck by which the imprint substrate 900 and the imprint template 800 after imprinting is fixed. The demolding device 10 may be suitable for use in the field of nanoimprinting.
Further, referring to fig. 1 to 3, the demolding device 10 further includes an acquisition module 300 and a rotation mechanism 500, where the acquisition module 300 is configured to acquire a preferred demolding direction for separating the imprint template 800 from the imprint substrate 900, where the preferred demolding direction should be a direction in which the pattern imprinted on the imprint substrate 900 is not torn or has a low probability of tearing when the imprint template 800 and the imprint substrate 900 are separated. And preferably the stripping direction is changed according to the change of the pattern, the change of the material of the imprint substrate 900, and the change of the material of the imprint template 800. The rotation mechanism 500 is used to drive the mounting table 200 to rotate relative to the stripper unit 420 by a predetermined angle such that the preferred stripping direction matches the direction of movement of the stripper unit 420. Matching the direction of movement of the stripping module 420 with the preferred stripping direction means that: the direction in which the stripper member 420 forces the imprint template 800 and the imprint substrate 900 apart is the preferred stripping direction as the stripper member 420 moves relative to the mounting stage 200.
Alternatively, in one embodiment, the rotation mechanism 500 may be a rotary motor.
The demolding device 10 further comprises a jacking member 600, a controller and a demolding mechanism 400, wherein the demolding mechanism 400 comprises a demolding module 420 and a driving member 410, the controller is in communication connection with the acquisition module 300, the rotating mechanism 500, the jacking member 600 and the driving member 410, the controller receives information of a preferred demolding direction acquired by the acquisition module 300 and a preset angle required to be rotated by the mounting table 200, the rotating mechanism 500 is controlled to drive the mounting table 200 to rotate, the controller is controlled to drive the jacking member 600 to lift the imprinting mold plate 800 relative to the imprinting substrate 900, and then the driving member 410 is controlled to drive the demolding module 420 to extend between the imprinting mold plate 800 and the imprinting substrate 900 and drive the demolding module 420 to move so as to separate the imprinting mold plate 800 and the imprinting substrate 900 along the preferred demolding direction.
Alternatively, referring to fig. 3, in one embodiment, the jack 600 may be a jack cylinder, and the jack cylinder is disposed on the mounting base 100.
Referring to fig. 1 to 3, when the demolding device 10 is in use, the imprinted imprint template 800 and the imprinted substrate 900 are integrally and fixedly arranged on the mounting table 200, and then a preferred demolding direction for separating the imprint template 800 and the imprinted substrate 900 is obtained through the obtaining module 300, and the preferred demolding direction is set to reduce the probability of tearing the imprinted image in the demolding process. Then the mounting table 200 is driven to rotate by a preset angle through the rotating mechanism 500 so that the optimal demolding direction is matched with the moving direction of the demolding piece 420; because the controller is in communication connection with the acquisition module 300 and the driving member 410, when the mounting table 200 rotates by a preset angle, the controller controls the jacking member 600 to drive the imprint template 800 to tilt relative to the imprint substrate 900, and then the controller controls the driving member 410 to drive the stripping member 420 to extend between the imprint template 800 and the imprint substrate 900 and drive the stripping member 420 to move relative to the mounting table 200 so as to separate the imprint template 800 and the imprint substrate 900 along a preferred stripping direction, thereby completing stripping, preventing the pattern from being damaged or damaged with low damage rate, and improving the yield of products. Further, when the demolding device 10 is used, the speed of the driving member 410 is controlled according to different materials and different conditions, so that the demolding speed is controlled, the probability of pattern damage is reduced, and the yield of products is improved.
When the imprint template 800 is separated from the imprint substrate 900, in order to collect the imprint template 800, the demolding mechanism 400 further includes a receiving member 700, where the receiving member 700 is connected to the demolding member 420 for receiving the imprint template 800 separated from the imprint substrate 900. Alternatively, the receiving member 700 may be a receiving tray, and the middle of the receiving tray may be hollowed out, so as to facilitate the subsequent removal of the imprint template 800.
When calculating the preset angle of the rotation of the mounting table 200, a mark needs to be set on the imprint template 800, and the mark may be a cross mark, but not limited to a cross mark, a circle or other graphic mark, or a pattern or a part of a pattern on the imprint template 800 may be directly selected as a mark.
Referring to fig. 1 to 3, the acquisition module 300 includes a catcher 310 and an image processing unit, the catcher 310 is communicatively connected to the image processing unit, the catcher 310 is used for capturing position information of marks on the imprint template 800, and the image processing unit is used for calculating a preset angle that the mounting table 200 needs to rotate when the preferred demolding direction matches with the moving direction of the demolding member 420. The position information of the mark is the position information of the mark on the imprint template 800 relative to the pattern area.
In order to adjust the capturing angle and range of the capturing device 310, in one embodiment, referring to fig. 1 to 3, the capturing module 300 further includes an adjusting assembly 320, the adjusting assembly 320 includes a supporting member 326, a first adjusting member 322 and a second adjusting member 324, the supporting member 326 is fixedly disposed on the mounting base 100, the first adjusting member 322 is connected to the supporting member 326, one end of the second adjusting member 324 is connected to the first adjusting member 322, and the other end of the second adjusting member 324 is connected to the capturing device 310. The first adjusting member 322 and the second adjusting member 324 are disposed at an angle. The angle between the first adjustment member 322 and the second adjustment member 324 is set as desired. Referring to fig. 3, in the present embodiment, the first adjusting member 322 and the second adjusting member 324 are perpendicular or nearly perpendicular.
Further, in one embodiment, the first adjusting member 322 is movable along the height direction (refer to the arrow L1 direction in fig. 2) of the supporting member 326 relative to the supporting member 326, so that the height of the catcher 310 can be adjusted, and the catching range of the catcher 310 can be adjusted.
In another embodiment, the second adjusting member 324 is movable along the length direction (refer to the arrow L2 direction in fig. 2) of the first adjusting member 322 relative to the first adjusting member 322 to adjust the position of the catcher 310 relative to the imprint template 800. In this manner, the position captured by the catcher 310 can be adjusted.
In another embodiment, the first adjusting member 322 can move along the height direction (refer to the arrow L1 direction in fig. 2) of the supporting member 326 relative to the supporting member 326, and the second adjusting member 324 can move along the length direction (refer to the arrow L2 direction in fig. 2) of the first adjusting member 322 relative to the first adjusting member 322, so that the catcher 310 is at a proper catching viewing angle through adjustment in both directions.
Referring to fig. 3, the demolding mechanism 400 is disposed on the mounting base 100, the driving member 410 may be a linear module or a driving cylinder, and the direction in which the driving member 410 drives the demolding unit 420 to move integrally is fixed. Therefore, when the predetermined angle is calculated by the image processing unit after the mark is captured by the capturing unit 310, the mounting table 200 is only required to be driven to rotate by the predetermined angle, and at this time, the demolding member 420 can be moved to make the direction in which the demolding member 420 drives the imprint template 800 and the imprint substrate 900 to separate be the preferred demolding direction.
Referring to fig. 3, in one embodiment, the mounting base 100 is provided with a mounting hole 110, one end of the mounting table 200 is used for mounting the imprint substrate 900 and the imprint template 800, and the other end of the mounting table 200 is rotatably inserted into the mounting hole 110 and connected to the rotating mechanism 500, and the driving member 410 and the jacking member 600 are both connected to the mounting base 100.
Specifically, referring to fig. 4, in order to facilitate the demolding member 420 entering between the imprint template 800 and the imprint substrate 900, in one embodiment, the demolding member 420 is provided with a clamping opening 428, and the driving member 410 drives the demolding member 420 to move relative to the mounting table 200 to enable the imprint template 800 to extend into the clamping opening 428, at this time, the demolding member 420 is continuously driven to move, and in the process of continuously moving, the demolding member 420 enters between the imprint template 800 and the imprint substrate 900 to enable the imprint template to be separated from the imprint substrate 900.
Referring to fig. 4, as an alternative structure of one of the demolding units 420, in one embodiment, the demolding unit 420 includes a mounting body 422, a first clamping body 424 and a second clamping body 426, the first clamping body 424 and the second clamping body 426 are connected to the mounting body 422 at intervals, and a clamping opening 428 is formed between the first clamping body 424 and the second clamping body 426, and the mounting body 422 is in driving fit with the driving unit 410.
In order to prevent the mold release member 420 from interfering with the mounting table 200 when moving, referring to fig. 4, in one embodiment, the mounting body 422 is formed with a mounting space 4222, and the width of the mounting space 4222 is greater than the maximum width of the mounting table 200, the imprint template 800, or the imprint substrate 900. The first clamping body 424 and the second clamping body 426 are disposed in the installation space 4222, and when the first clamping body 424 and the second clamping body 426 move, the imprint template 800, the imprint substrate 900 and the mounting table 200 pass through the installation space 4222 smoothly when the imprint template 800 enters the clamping opening 428.
To reduce friction during demolding of the demolding unit 420, in one embodiment, the first clamping body 424 is rotatably connected to the mounting body 422 or the second clamping body 426 is rotatably connected to the mounting body 422 or the first clamping body 424 is rotatably connected to the mounting body 422 and the second clamping body 426 is rotatably connected to the mounting body 422.
Further, to adjust the draft angle, in one embodiment, the mounting position between the first and second clamping bodies 424, 426 is adjustable. Specifically, the inner wall of the mounting space 4222 is provided with a plurality of assembly holes, and the first clamping body 424 and the second clamping body 426 can be selectively assembled and mounted with the assembly holes, so that the relative position between the first clamping body 424 and the second clamping body 426 can be adjusted, and the demolding angle can be adjusted, and thus the demolding force can be adjusted, and the demolding force and the demolding angle can be controlled.
Referring to fig. 4, alternatively, the first clamping body 424 and the second clamping body 426 are both clamping bars, which have a long bar shape.
The controller in any of the foregoing embodiments may be a single-chip microcomputer or a micro-control unit.
The catcher 310 in any of the foregoing embodiments may be a CCD camera or a CMOS camera.
In addition, an embodiment also relates to a demolding method, which can be applied to the demolding device 10 in any of the above embodiments.
Referring to fig. 4, the demolding method includes:
s100: the imprint template 800 and the imprint matrix 900 after imprinting are integrally fixed on the mounting table 200;
specifically, the mount 200 may be the mount 200 in any of the foregoing embodiments. The mounting table 200 may be a vacuum chuck, and when the imprint template 800 and the imprint substrate 900 are integrally placed on the mounting table 200, the mounting table 200 is vacuumized at this time, so that the imprint template 800 and the imprint substrate 900 are integrally fixed on the mounting table 200.
S200: the preferred demolding direction of the separation of the imprint template 800 and the imprint substrate 900 is obtained, and the mounting table 200 is driven to rotate relative to the demolding member 420 by a predetermined angle so that the preferred demolding direction matches with the moving direction of the demolding member 420.
The preferred demolding direction should be such that the pattern imprinted on the imprinting substrate 900 will not be torn or the probability of tearing will be low when the imprinting stamp 800 and the imprinting substrate 900 are separated in this direction. The demolding direction preferably changes according to the change in pattern, the change in material of the imprint substrate 900, and the change in material of the imprint template 800.
Specifically, the mounting table 200 may be driven to rotate relative to the demolding unit 420 by the rotation mechanism 500 in any of the foregoing embodiments, and the matching of the moving direction of the demolding unit 420 with the preferred demolding direction means that: the direction in which the stripper member 420 forces the imprint template 800 and the imprint substrate 900 apart is the preferred stripping direction as the stripper member 420 moves relative to the mounting stage 200.
Among them, the preferred demolding direction may be obtained from a plurality of experiments or experience and stored in the acquisition module 300, and recalled in performing the demolding procedure.
S300: the imprint template 800 is driven to tilt relative to the imprint substrate 900, and the imprint substrate 900 is disposed between the imprint template 800 and the mounting stage 200.
Specifically, the imprint template 800 may be tilted with respect to the imprint substrate 900 by the jack 600, such as a jack cylinder, in the foregoing embodiment, and at this time, the imprint template 800 or the imprint substrate 900 may more easily enter the clamping port 428.
S400: the stripping module 420 is driven to extend between the imprint template 800 and the imprint substrate 900 and the stripping module 420 is driven to move relative to the mounting stage 200 to separate the imprint template 800 and the imprint substrate 900 in a preferred stripping direction.
Specifically, the driving member 410 in any of the foregoing embodiments may drive the demolding member 420 to move the mounting table 200, and the imprint template 800 first enters the clamping opening 428 of the demolding member 420 in the foregoing embodiments, and then drives the demolding member 420 to move, so that the demolding member 420 extends between the imprint template 800 and the imprint substrate 900, and then continuously drives the imprint template 800 and the imprint substrate 900 to separate along the foregoing preferred demolding direction.
When the demolding method is used, the imprinted imprint template 800 and the imprinted substrate 900 are integrally and fixedly arranged on the mounting table 200, then the optimal demolding direction for separating the imprint template 800 from the imprinted substrate 900 is obtained, the optimal demolding direction can reduce the probability of tearing of an imprinted image in the demolding process, then the mounting table 200 is driven to rotate relative to the demolding module 420 by a preset angle to enable the optimal demolding direction to be matched with the moving direction of the demolding piece 420, then the imprint template 800 is driven to tilt relative to the imprinted substrate 900, finally the demolding module 420 is driven to extend between the imprint template 800 and the imprinted substrate 900 and is driven to move relative to the mounting table 200 so as to separate the imprint template 800 from the imprinted substrate 900 along the optimal demolding direction, further demolding is completed, the pattern is not damaged or has low damage rate, and the yield of products is improved.
In one embodiment, before driving the mounting table 200 to rotate relative to the stripping module 420, the method further comprises the steps of: a mark is provided on the imprint template 800.
Specifically, the mark may be a cross mark, but not limited to a cross mark, but may be a circle or other graphic mark, or a pattern on the imprint template 800 may be selected directly, or a certain portion of the pattern may be used as the mark.
The calculation mode of the preset angle is as follows:
position information of marks on the imprint template 800 is acquired, and a preset angle is calculated according to the position information and a preferred demolding direction.
Specifically, the position information of the mark on the imprint template 800 may be captured according to the catcher 310 in the foregoing embodiment, and the image processing unit calculates a preset angle that the mount 200 needs to rotate when matching the preferred demolding direction with the moving direction of the demolding member 420, based on the position information of the mark. The position information of the mark is the position information of the mark on the imprint template 800 relative to the pattern area.
In one embodiment, step S400 includes:
the stripping module 420 is driven to move such that a portion of the imprint template 800 tilted with respect to the imprint substrate 900 protrudes into the clamping opening 428 of the stripping module 420, the stripping module 420 is driven to protrude between the imprint template 800 and the imprint substrate 900, and the stripping module 420 is driven to move in a preferred stripping direction with respect to the mounting stage 200 to separate the imprint template 800 from the imprint substrate 900.
Specifically, the driving member 410 in the foregoing embodiment drives the stripping module 420 to move, and at this time, the portion of the imprint template 800 tilted with respect to the imprint substrate 900 extends into the clamping opening 428 of the stripping module 420; the imprint template 800 and the imprint substrate 900 are separated during the continuous actuation of the stripping member 420.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. A method of demolding, comprising:
the method comprises the steps that an imprinting template after imprinting is integrally and fixedly arranged on an installation table; acquiring a preferential demolding direction of separation of the imprinting template and the imprinting matrix, and driving the mounting table to rotate by a preset angle relative to a demolding piece to enable the preferential demolding direction to be matched with the moving direction of the demolding piece;
driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table;
and driving a demolding piece to extend between the imprinting template and the imprinting substrate and driving the demolding piece to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferential demolding direction.
2. The method of stripping of claim 1, further comprising the step of, prior to driving the mounting table in rotation relative to the stripper member: a mark is provided on the imprint template.
3. The demolding method according to claim 2, wherein the preset angle is calculated by:
and acquiring the position information of the mark on the imprinting template, and calculating the preset angle according to the position information and the optimal demolding direction.
4. A method of demolding as claimed in claim 3, wherein the step of driving a demolding member extending between the imprint template and the imprint substrate and driving the demolding member relative to the mounting stage to separate the imprint template and the imprint substrate in the preferred demolding direction comprises:
the stripping module is driven to move so that the part of the imprinting template, which is tilted relative to the imprinting substrate, extends into the clamping opening of the stripping module, and the stripping piece is driven to extend between the imprinting template and the imprinting substrate and is driven to move relative to the mounting table along the preferential stripping direction so as to separate the imprinting template from the imprinting substrate.
5. A mold release apparatus, comprising:
the mounting base and the mounting table are rotatably arranged on the mounting base, and the mounting table is used for mounting the imprinting base and the imprinting template;
the acquisition module is used for acquiring the preferential demolding direction of the separation of the imprinting template and the imprinting substrate;
the demoulding mechanism is connected to the mounting seat and comprises a demoulding piece and a driving piece, and the driving piece is used for driving the demoulding piece to extend between the imprinting template and the imprinting matrix and driving the demoulding piece to move so as to separate the imprinting template from the imprinting matrix along the preferential demoulding direction;
the rotating mechanism is connected to the mounting seat and is used for driving the mounting table to rotate by a preset angle so that the preferential demolding direction is matched with the moving direction of the demolding piece;
the jacking piece is connected to the mounting seat and used for driving the imprinting template to tilt relative to the imprinting base; a kind of electronic device with high-pressure air-conditioning system
And the controller is in communication connection with the acquisition module, the rotating mechanism, the jacking piece and the driving piece.
6. The demolding device of claim 5, wherein the demolding mechanism further comprises a receiving member coupled to the demolding member for accessing the imprint template separate from the imprint substrate.
7. The stripper apparatus of claim 5, wherein the stripper member is provided with a clamping opening, and wherein the drive member moves the stripper member relative to the mounting table to extend the imprint template into the clamping opening and to move the stripper member to separate the imprint template from the imprint substrate.
8. The stripper apparatus of claim 7, wherein the stripper member comprises a mounting body, a first clamping body and a second clamping body, the first clamping body and the second clamping body being spaced apart from each other and connected to the mounting body, and the first clamping body and the second clamping body defining the clamping opening therebetween, the mounting body being in driving engagement with the driver member.
9. Demolding device according to claim 8, characterized in that the first clamping body and/or the second clamping body are rotatably connected to the mounting body.
10. The demolding device according to any one of claims 5 to 9, wherein the acquisition module comprises a catcher and an image processing unit, the catcher is in communication connection with the image processing unit, the catcher is used for capturing position information marked on the imprinting template, the image processing unit is used for calculating the preset angle to enable the optimal demolding direction to be matched with the moving direction of the demolding piece, the image processing unit is in communication connection with the controller, and the controller controls the rotating mechanism to drive the mounting table to rotate according to the preset angle information calculated by the image processing unit.
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| JP2010269580A (en) * | 2009-05-25 | 2010-12-02 | Canon Inc | Imprint apparatus and manufacturing method for article |
| JP2014004825A (en) * | 2012-05-31 | 2014-01-16 | Fujikura Ltd | Pattern forming method and mold release device |
| CN105159029A (en) * | 2015-10-10 | 2015-12-16 | 兰红波 | Large-area micro-nano imaging method and device |
| CN107000308A (en) * | 2014-12-22 | 2017-08-01 | 奥贝达克特公司 | Install and stripper apparatus |
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2021
- 2021-02-02 CN CN202110141665.4A patent/CN112925165B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010269580A (en) * | 2009-05-25 | 2010-12-02 | Canon Inc | Imprint apparatus and manufacturing method for article |
| JP2014004825A (en) * | 2012-05-31 | 2014-01-16 | Fujikura Ltd | Pattern forming method and mold release device |
| CN107000308A (en) * | 2014-12-22 | 2017-08-01 | 奥贝达克特公司 | Install and stripper apparatus |
| CN105159029A (en) * | 2015-10-10 | 2015-12-16 | 兰红波 | Large-area micro-nano imaging method and device |
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