CN112925165A - Mold release method and mold release device - Google Patents
Mold release method and mold release device Download PDFInfo
- Publication number
- CN112925165A CN112925165A CN202110141665.4A CN202110141665A CN112925165A CN 112925165 A CN112925165 A CN 112925165A CN 202110141665 A CN202110141665 A CN 202110141665A CN 112925165 A CN112925165 A CN 112925165A
- Authority
- CN
- China
- Prior art keywords
- demolding
- imprinting
- template
- substrate
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention discloses a demoulding method and a demoulding device, wherein the demoulding method comprises the following steps: integrally and fixedly arranging the imprinted template and the imprinted substrate on an installation platform; acquiring the preferred demolding direction for separating the imprinting template and the imprinting substrate, and driving the mounting table to rotate relative to the demolding part by a preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding part; driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table; and driving a demolding part to extend between the imprinting template and the imprinting substrate and drive the demolding part to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferred demolding direction. When the demolding method and the demolding device are used, the probability that the stamped image is torn in the demolding process can be reduced, and the yield of products is improved.
Description
Technical Field
The invention relates to the technical field of demolding, in particular to a demolding method and a demolding device.
Background
The nano-imprinting technology is considered to be one of the most promising micro-nano manufacturing technologies, can break through the limitation of optical exposure diffraction effect, processes the nano structure, is most likely to become the main technology of the future micro-nano photonics and electronics industries, can be applied to low-cost and large-scale production of micro-nano structure functional devices, particularly has unique technical advantages in the preparation of optical devices, and is also the most widely applied field at present.
The basic process of the nano-imprinting technology comprises three stages of pattern imprinting, pattern transferring and imprinting template demoulding, wherein two modes of hot imprinting and ultraviolet imprinting are mainly adopted according to a pattern transferring mode, and no matter which imprinting mode is adopted, the imprinting technology is used for faithfully copying the micro-nano patterns on the imprinting template onto a substrate material.
However, the conventional demolding method is prone to tearing of the device pattern, so that the yield of the product is greatly reduced.
Disclosure of Invention
The invention aims to provide a demoulding method and a demoulding device, which solve the problem that the traditional demoulding method is easy to cause the tearing of a device graph, so that the yield of products is greatly reduced. When the demolding method and the demolding device are used, the probability that the stamped image is torn in the demolding process can be reduced, and the yield of products is improved.
The specific technical scheme is as follows:
in one aspect, the present application relates to a method of demolding comprising:
integrally and fixedly arranging the imprinted template and the imprinted substrate on an installation platform; acquiring the preferred demolding direction for separating the imprinting template and the imprinting substrate, and driving the mounting table to rotate relative to the demolding part by a preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding part;
driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table;
and driving a demolding part to extend between the imprinting template and the imprinting substrate and drive the demolding part to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferred demolding direction.
When the demolding method is used, the imprinting template and the imprinting matrix which are imprinted are integrally and fixedly arranged on the mounting table, then the optimal demolding direction for separating the imprinting template and the imprinting matrix is obtained, this preferred release direction arrangement may be such that the probability of tearing of the imprinted image during release is reduced, and then driving the mounting table to rotate by a preset angle relative to the demolding part to enable the optimal demolding direction to be matched with the moving direction of the demolding part, then driving the imprinting template to tilt relative to the imprinting substrate, finally driving the demolding part to extend between the imprinting template and the imprinting substrate and driving the demolding part to move relative to the mounting table to enable the imprinting template and the imprinting substrate to be separated along the optimal demolding direction, so that demolding is completed, the pattern cannot be damaged or the damage rate is low, and the yield of products is improved.
The technical solution is further explained below:
in one embodiment, before driving the mounting table to rotate relative to the stripper, the method further comprises the steps of: marks are provided on the imprint template.
In one embodiment, the preset angle is calculated by:
and acquiring the position information of the mark on the imprinting template, and calculating to obtain the preset angle according to the position information and the optimal demolding direction.
In one embodiment, the step of driving a release member to extend between the imprint template and the imprint substrate and to move the release member relative to the mounting stage to separate the imprint template and the imprint substrate in the preferred demolding direction comprises:
and driving a demoulding part to move to enable the part, tilted relative to the imprinting substrate, of the imprinting template to extend into a clamping opening of the demoulding part, and driving a demoulding part to extend between the imprinting template and the imprinting substrate and driving the demoulding part to move relative to the mounting table along the optimal demoulding direction so as to separate the imprinting template from the imprinting substrate.
In another aspect, the present application is directed to a demolding device, comprising:
the mounting table is rotatably arranged on the mounting base and is used for mounting an imprinting substrate and an imprinting template;
the acquisition module is used for acquiring the optimal demolding direction for separating the imprinting template from the imprinting substrate;
the demolding mechanism is connected to the mounting seat and comprises a demolding part and a driving part, and the driving part is used for driving the demolding part to stretch into a position between the imprinting template and the imprinting substrate and driving the demolding part to move so as to separate the imprinting template from the imprinting substrate along the optimal demolding direction;
the rotating mechanism is connected to the mounting seat and used for driving the mounting table to rotate by a preset angle so that the optimal demolding direction is matched with the moving direction of the demolding part;
the jacking piece is connected to the mounting seat and used for driving the imprinting template to tilt relative to the imprinting substrate; and
a controller in communicative connection with the acquisition module, the rotation mechanism, the jacking member, and the driving member.
The technical solution is further explained below:
in one embodiment, the demolding mechanism further comprises a receiving member connected to the demolding member for receiving the imprint template separated from the imprint substrate.
In one embodiment, the demolding part is provided with a clamping opening, and the driving part drives the demolding part to move relative to the mounting table to enable the imprinting template to extend into the clamping opening and drives the demolding part to move to enable the imprinting template to be separated from the imprinting substrate.
In one embodiment, the demolding part comprises a mounting body, a first clamping body and a second clamping body, the first clamping body and the second clamping body are connected to the mounting body at intervals, the clamping opening is formed between the first clamping body and the second clamping body, and the mounting body is in transmission fit with the driving part.
In one embodiment, the first clamping body and/or the second clamping body is/are rotatably connected with the mounting body.
In one embodiment, the acquiring module comprises a catcher and an image processing unit, the catcher is in communication connection with the image processing unit, the catcher is used for capturing position information of marks on the imprinting template, the image processing unit is used for calculating the preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding part, the image processing unit is in communication connection with the controller, and the controller controls the rotating mechanism to drive the mounting table to rotate according to the preset angle information calculated by the image processing unit.
When the demolding device is used, the imprinting template and the imprinting base body after imprinting are integrally and fixedly arranged on the mounting table, and then the optimal demolding direction for separating the imprinting template and the imprinting base body is obtained through the obtaining module, and the probability of tearing of the imprinted image in the demolding process can be reduced due to the arrangement of the optimal demolding direction. Then the mounting table is driven to rotate by a preset angle through the rotating mechanism so that the preferred demolding direction is matched with the moving direction of the demolding part; because the controller with obtain the module with driving piece communication connection, when the mount table rotatory preset angle, the controller control jack-up piece drive the imprint template is relative the perk of impression base member, controller control later the driving piece drive the stripping member stretch into imprint template with between the imprint base member and drive the relative mount table of stripping part removes so that imprint template with the imprint base member is followed preferred drawing of patterns direction separation, and then accomplishes the drawing of patterns, and the pattern can not damage or the spoilage is low, promotes the yield of product.
Compared with the prior art, the invention has the beneficial effects that:
1. the demolding method and the demolding device can realize that the pattern is not damaged or the damage rate is low during demolding, and help to improve the yield of products.
2. The demoulding method and the demoulding device can realize automatic demoulding and improve the efficiency.
3. The demoulding method and the demoulding device can control the speed of the driving piece according to different materials and different condition requirements, further control the demoulding speed, enable the demoulding speed to be controllable, and further adjust the demoulding angle by adjusting the relative position between the clamping bodies, thus being capable of adjusting the demoulding force and enabling the demoulding force and the demoulding angle to be controllable.
4. The demoulding method and the demoulding device can ensure the demoulding consistency among different batches of products.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention, are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without inventive labor.
Furthermore, the drawings are not to scale of 1:1, and the relative dimensions of the various elements in the drawings are drawn only by way of example and not necessarily to true scale.
FIG. 1 is a schematic structural view of a demolding device according to an embodiment;
FIG. 2 is a schematic structural view of a demolding device according to another embodiment;
FIG. 3 is a schematic structural view of a demolding device according to another embodiment;
fig. 4 is a schematic structural view of a demolding mechanism according to an embodiment;
FIG. 5 is a flow chart of a method of demolding in one embodiment.
Description of reference numerals:
10. a demolding device; 100. a mounting seat; 110. mounting holes; 200. an installation table; 300. an acquisition module; 310. a catcher; 320. an adjustment assembly; 322. a first adjustment member; 324. a second adjustment member; 326. a support member; 400. a demolding mechanism; 410. a drive member; 420. demoulding parts; 422. an installation body; 4222. an installation space; 424. a first clamping body; 426. a second clamping body; 428. a clamping port; 500. a rotation mechanism; 600. a jack-up member; 700. a receiving member; 800. imprinting a template; 900. the substrate is imprinted.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Referring to fig. 1 to 3, an exemplary demolding device 10 includes a mounting base 100 and a mounting table 200, the mounting table 200 is rotatably disposed on the mounting base 100, and an imprinted substrate 900 and an imprinted template 800 are mounted on the mounting table 200. Alternatively, the mounting stage 200 may be a vacuum chuck, and the imprint substrate 900 and the imprint template 800 after imprinting are fixed by the vacuum chuck. The demolding device 10 can be applied to the field of nanoimprinting.
Further, referring to fig. 1 to 3, the demolding device 10 further includes an obtaining module 300 and a rotating mechanism 500, where the obtaining module 300 is configured to obtain a preferred demolding direction for separating the imprint template 800 and the imprint substrate 900, where the preferred demolding direction is a direction along which the pattern imprinted on the imprint substrate 900 is not torn or has a low probability of being torn when the imprint template 800 and the imprint substrate 900 are separated. The release direction preferably varies depending on the pattern, the material of the imprint substrate 900, and the material of the imprint template 800. The rotating mechanism 500 is used to drive the mounting table 200 to rotate a preset angle relative to the stripper member 420 so that the preferred stripping direction matches the moving direction of the stripper member 420. The matching of the moving direction of the stripper 420 with the preferred stripping direction means: the direction in which the stripper member 420 urges the imprint template 800 and the imprint substrate 900 apart as the stripper member 420 moves relative to the mounting station 200 is the preferred stripping direction.
Alternatively, in one of the embodiments, the rotation mechanism 500 may be a rotation motor.
The demolding device 10 further comprises a jacking piece 600, a controller and a demolding mechanism 400, wherein the demolding mechanism 400 comprises a demolding piece 420 and a driving piece 410, the controller is in communication connection with the acquisition module 300, the rotating mechanism 500, the jacking piece 600 and the driving piece 410, the controller receives information of a preferred demolding direction acquired by the acquisition module 300 and a preset angle required to rotate by the mounting table 200, the controller controls the rotating mechanism 500 to drive the mounting table 200 to rotate, the controller controls the jacking piece 600 to drive the imprinting template 800 to tilt relative to the imprinting substrate 900, and then the driving piece 410 is controlled to drive the demolding piece 420 to extend into a position between the imprinting template 800 and the imprinting substrate 900 and drive the demolding piece 420 to move so that the imprinting template 800 and the imprinting substrate 900 can be separated along the preferred demolding direction.
Alternatively, referring to fig. 3, in one embodiment, the jacking member 600 may be a jacking cylinder disposed on the mounting base 100.
Referring to fig. 1 to 3, when the demolding device 10 is used, the imprinted imprint template 800 and the imprint substrate 900 are integrally fixed on the mounting table 200, and then a preferred demolding direction for separating the imprint template 800 and the imprint substrate 900 is obtained by the obtaining module 300, and the preferred demolding direction is set so as to reduce the probability of tearing of the imprinted image in the demolding process. Then, the mounting table 200 is driven to rotate by a preset angle through the rotating mechanism 500, so that the preferred demolding direction is matched with the moving direction of the demolding piece 420; due to the fact that the controller is in communication connection with the acquisition module 300 and the driving part 410, when the mounting table 200 rotates for a preset angle, the controller controls the jacking part 600 to drive the imprinting template 800 to tilt relative to the imprinting substrate 900, then the controller controls the driving part 410 to drive the demolding part 420 to extend between the imprinting template 800 and the imprinting substrate 900 and drive the demolding part 420 to move relative to the mounting table 200, so that the imprinting template 800 and the imprinting substrate 900 are separated along the preferred demolding direction, demolding is completed, the pattern cannot be damaged or the damage rate is low, and the yield of products is improved. Further, when the demolding device 10 is used, the speed of the driving member 410 is controlled according to different requirements of different materials and different conditions, so that the demolding speed is controlled, the probability of pattern damage is reduced, and the yield of products is improved.
In order to collect the imprint template 800 when the imprint template 800 is separated from the imprint substrate 900, the demolding mechanism 400 further includes a receiving member 700, and the receiving member 700 is connected to the demolding member 420 for receiving the imprint template 800 separated from the imprint substrate 900. Alternatively, the receiving member 700 may be a receiving tray, and the middle of the receiving tray may be hollowed out, so as to facilitate the subsequent taking out of the imprint template 800.
When calculating the preset angle of the mounting table 200, a mark needs to be set on the imprint template 800, where the mark may be a cross mark, but is not limited to a cross mark, and may also be a circle or other graphic mark, and may also be a pattern or a certain part of the pattern on the imprint template 800 directly selected as a mark.
Referring to fig. 1 to 3, the obtaining module 300 includes a catcher 310 and an image processing unit, the catcher 310 is connected to the image processing unit in communication, the catcher 310 is used for catching position information of marks on the imprint template 800, and the image processing unit is used for calculating a preset angle that the mounting table 200 needs to rotate when the preferred demolding direction matches with the moving direction of the demolding member 420. The position information of the mark is the position information of the mark on the imprint template 800 with respect to the pattern region.
In order to adjust the capturing angle and range of the catcher 310, in one embodiment, referring to fig. 1 to 3, the obtaining module 300 further includes an adjusting assembly 320, the adjusting assembly 320 includes a supporting member 326, a first adjusting member 322 and a second adjusting member 324, the supporting member 326 is fixedly disposed on the mounting base 100, the first adjusting member 322 is connected to the supporting member 326, one end of the second adjusting member 324 is connected to the first adjusting member 322, and the other end of the second adjusting member 324 is connected to the catcher 310. The first adjustment member 322 and the second adjustment member 324 are disposed at an angle. The angle between the first and second adjustment members 322, 324 is set as desired. Referring to fig. 3, in the present embodiment, the first adjusting member 322 and the second adjusting member 324 are perpendicular or nearly perpendicular.
Further, in one embodiment, the first adjustment element 322 is movable relative to the support 326 in a height direction (see the direction of arrow L1 in fig. 2) of the support 326, so as to adjust the height of the catcher 310 and thus the catching range of the catcher 310.
In another embodiment, the second adjustment member 324 is movable relative to the first adjustment member 322 along a length of the first adjustment member 322 (see direction of arrow L2 in FIG. 2) to adjust a position of the catcher 310 relative to the imprint template 800. In this manner, the location captured by the catcher 310 may be adjusted.
In another embodiment, the first adjusting member 322 can move along the height direction of the supporting member 326 (see the direction of arrow L1 in fig. 2) relative to the supporting member 326, and the second adjusting member 324 can move along the length direction of the first adjusting member 322 (see the direction of arrow L2 in fig. 2) relative to the first adjusting member 322, so that the catcher 310 can be adjusted in two directions to be at a proper catching view angle.
Referring to fig. 3, the demolding mechanism 400 is disposed on the mounting base 100, the driving member 410 may be a linear module or a driving cylinder, and the direction in which the driving member 410 drives the demolding member 420 to integrally move is fixed. Therefore, when the preset angle is calculated by the image processing unit after the mark is captured by the capture device 310, the mounting table 200 only needs to be driven to rotate by the preset angle, and the direction in which the demolding part 420 drives the imprint template 800 and the imprint substrate 900 to separate is the preferred demolding direction when the demolding part 420 moves.
Referring to fig. 3, in one embodiment, the mounting base 100 is provided with a mounting hole 110, one end of the mounting table 200 is used for mounting the imprinting substrate 900 and the imprinting template 800, the other end of the mounting table 200 is rotatably inserted into the mounting hole 110 and connected with the rotating mechanism 500, and the driving member 410 and the jacking member 600 are both connected to the mounting base 100.
Specifically, referring to fig. 4, in order to facilitate the release member 420 to enter between the imprint template 800 and the imprint substrate 900, in one embodiment, the release member 420 is provided with a clamping opening 428, and the driving member 410 drives the release member 420 to move relative to the mounting table 200 to enable the imprint template 800 to extend into the clamping opening 428, and at this time, the release member 420 is driven to move continuously, and the release member 420 enters between the imprint template 800 and the imprint substrate 900 to enable the imprint template to be separated from the imprint substrate 900 during continuous movement.
Referring to fig. 4, as an alternative structure of one of the demolding members 420, in one embodiment, the demolding member 420 includes a mounting body 422, a first clamping body 424 and a second clamping body 426, the first clamping body 424 and the second clamping body 426 are connected to the mounting body 422 at intervals, a clamping opening 428 is formed between the first clamping body 424 and the second clamping body 426, and the mounting body 422 is in driving fit with the driving member 410.
In order to prevent the mold release member 420 from interfering with the mounting table 200 during the movement, referring to fig. 4, in one embodiment, the mounting body 422 is formed with a mounting space 4222, and the width of the mounting space 4222 is greater than the maximum width of the mounting table 200, the imprint template 800, or the imprint substrate 900. The first clamping body 424 and the second clamping body 426 are disposed in the mounting space 4222, and when the first clamping body 424 and the second clamping body 426 move and the imprint template 800 enters the clamping opening 428, the imprint template 800, the imprint substrate 900 and the mounting stage 200 smoothly pass through the mounting space 4222.
In order to reduce the friction force of the demolding member 420 during demolding, in one embodiment, the first clamping body 424 is rotatably connected with the mounting body 422, the second clamping body 426 is rotatably connected with the mounting body 422, or the first clamping body 424 is rotatably connected with the mounting body 422 and the second clamping body 426 is rotatably connected with the mounting body 422.
Further, in order to adjust the demolding angle, in one embodiment, the installation position between the first clamping body 424 and the second clamping body 426 is adjustable. Specifically, the inner wall of installation space 4222 is equipped with a plurality of pilot holes, and first holding body 424 and second holding body 426 alternative and pilot hole assemble the installation to the relative position between first holding body 424 and the second holding body 426 of adjustment, and then the adjustment drawing of patterns angle, so can adjust drawing of patterns dynamics, make drawing of patterns dynamics and drawing of patterns angle all controllable.
Referring to fig. 4, optionally, the first clamping body 424 and the second clamping body 426 are both clamping rods, and are in the shape of long rods.
The controller in any of the foregoing embodiments may be a single chip microcomputer or a micro control unit.
The capture device 310 in any of the above embodiments may be a CCD camera or a CMOS camera.
Further, an embodiment relates to a mold release method that can be applied to the mold release device 10 in any of the above embodiments.
Referring to fig. 4, the demolding method includes:
s100: integrally and fixedly arranging the imprinted imprint template 800 and the imprinted substrate 900 on the mounting table 200;
specifically, the mounting table 200 may be the mounting table 200 in any of the embodiments described above. The mounting stage 200 may be a vacuum chuck, and when the imprint template 800 and the imprint substrate 900 are integrally placed on the mounting stage 200, the mounting stage 200 is vacuumized, and the imprint template 800 and the imprint substrate 900 are integrally fixed on the mounting stage 200.
S200: acquiring a preferred demolding direction for separating the imprinting template 800 and the imprinting substrate 900, and driving the mounting table 200 to rotate relative to the demolding member 420 by a preset angle to make the preferred demolding direction match with the moving direction of the demolding member 420.
The preferred release direction should be such that the pattern imprinted on the imprint substrate 900 is not torn or has a low probability of tearing when the imprint template 800 and the imprint substrate 900 are separated in this direction. The release direction preferably varies depending on the pattern, the material of the imprint substrate 900, and the material of the imprint template 800.
Specifically, the mounting table 200 can be driven to rotate relative to the demolding member 420 by the rotating mechanism 500 in any of the foregoing embodiments, and the moving direction of the demolding member 420 is matched with the preferred demolding direction by: the direction in which the stripper member 420 urges the imprint template 800 and the imprint substrate 900 apart as the stripper member 420 moves relative to the mounting station 200 is the preferred stripping direction.
The preferred demolding direction may be obtained from a plurality of tests or experiences and stored in the obtaining module 300, and then retrieved during the demolding procedure.
S300: the imprint template 800 is driven to tilt relative to the imprint substrate 900, and the imprint substrate 900 is disposed between the imprint template 800 and the mount 200.
In particular, the imprint template 800 can be tilted with respect to the imprint substrate 900 by the lifting member 600, such as a lifting cylinder, in the previous embodiment, and the imprint template 800 or the imprint substrate 900 can more easily enter the clamping opening 428.
S400: the stripper member 420 is driven to extend between the imprint template 800 and the imprint substrate 900 and to move the stripper member 420 relative to the mounting stage 200 to separate the imprint template 800 and the imprint substrate 900 in a preferred demolding direction.
Specifically, the mounting table 200 of the demolding member 420 in any of the foregoing embodiments may be driven to move by the driving member 410, the imprint template 800 first enters the clamping opening 428 of the demolding member 420 in the foregoing embodiments, and then the demolding member 420 is driven to move, so that the demolding member 420 extends between the imprint template 800 and the imprint substrate 900, and then the imprint template 800 and the imprint substrate 900 are continuously driven to separate in the foregoing preferred demolding direction.
When the demolding method is used, the imprinted imprint template 800 and the imprinted substrate 900 are integrally and fixedly arranged on the mounting table 200, then a preferred demolding direction for separating the imprint template 800 and the imprint substrate 900 is obtained, the preferred demolding direction is set so that the probability of tearing of an imprinted image in the demolding process is reduced, then the mounting table 200 is driven to rotate relative to the demolding piece 420 by a preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding piece 420, then the imprint template 800 is driven to tilt relative to the imprint substrate 900, finally the demolding piece 420 is driven to extend into the space between the imprint template 800 and the imprint substrate 900 and is driven to move relative to the mounting table 200 so that the imprint template 800 and the imprint substrate 900 are separated along the preferred demolding direction, demolding is completed, the pattern cannot be damaged or the damage rate is low, and the yield of products is improved.
In one embodiment, before driving the mounting table 200 to rotate relative to the demolding member 420, the method further comprises the following steps: marks are provided on the imprint template 800.
Specifically, the mark may be a cross mark, but is not limited to a cross mark, and may also be a circle or other graphic mark, and may also be a pattern directly selected from the imprint template 800, or a part of the pattern may be used as a mark.
The preset angle is calculated in the following mode:
position information of marks on the imprint template 800 is acquired, and a preset angle is calculated according to the position information and the preferred demolding direction.
Specifically, it is possible to capture the position information of the mark on the imprint template 800 according to the catcher 310 in the foregoing embodiment, and the image processing unit calculates the preset angle by which the mount 200 needs to be rotated when the preferred mold release direction is matched with the moving direction of the mold release 420 according to the position information of the mark. The position information of the mark is the position information of the mark on the imprint template 800 with respect to the pattern region.
In one embodiment, step S400 includes:
the stripper member 420 is driven to move so that the portion of the imprint template 800 tilted with respect to the imprint substrate 900 extends into the clamping opening 428 of the stripper member 420, the stripper member 420 is driven to extend between the imprint template 800 and the imprint substrate 900 and the stripper member 420 is driven to move in a preferred demolding direction with respect to the mounting table 200 to separate the imprint template 800 and the imprint substrate 900.
Specifically, the release member 420 is driven to move by the driving member 410 in the previous embodiment, and at this time, the portion of the imprint template 800 tilted with respect to the imprint substrate 900 extends into the clamping opening 428 of the release member 420; during the process of continuously driving the release member 420 to move, the imprint template 800 and the imprint substrate 900 are separated.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A method of demolding, comprising:
integrally and fixedly arranging the imprinted template and the imprinted substrate on an installation platform; acquiring the preferred demolding direction for separating the imprinting template and the imprinting substrate, and driving the mounting table to rotate relative to the demolding part by a preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding part;
driving the imprinting template to tilt relative to the imprinting substrate, wherein the imprinting substrate is arranged between the imprinting template and the mounting table;
and driving a demolding part to extend between the imprinting template and the imprinting substrate and drive the demolding part to move relative to the mounting table so as to separate the imprinting template and the imprinting substrate along the preferred demolding direction.
2. The method of claim 1, further comprising, prior to driving the mount to rotate relative to the stripper, the steps of: marks are provided on the imprint template.
3. The demolding method as claimed in claim 2, wherein the preset angle is calculated by:
and acquiring the position information of the mark on the imprinting template, and calculating to obtain the preset angle according to the position information and the optimal demolding direction.
4. The method of demolding, as claimed in claim 3, wherein the step of driving a demolding member to extend between the imprint template and the imprint substrate and to move the demolding member relative to the mounting stage to separate the imprint template and the imprint substrate along the preferred demolding direction comprises:
and driving a demoulding part to move to enable the part, tilted relative to the imprinting substrate, of the imprinting template to extend into a clamping opening of the demoulding part, and driving a demoulding part to extend between the imprinting template and the imprinting substrate and driving the demoulding part to move relative to the mounting table along the optimal demoulding direction so as to separate the imprinting template from the imprinting substrate.
5. A demolding device, characterized by comprising:
the mounting table is rotatably arranged on the mounting base and is used for mounting an imprinting substrate and an imprinting template;
the acquisition module is used for acquiring the optimal demolding direction for separating the imprinting template from the imprinting substrate;
the demolding mechanism is connected to the mounting seat and comprises a demolding part and a driving part, and the driving part is used for driving the demolding part to stretch into a position between the imprinting template and the imprinting substrate and driving the demolding part to move so as to separate the imprinting template from the imprinting substrate along the optimal demolding direction;
the rotating mechanism is connected to the mounting seat and used for driving the mounting table to rotate by a preset angle so that the optimal demolding direction is matched with the moving direction of the demolding part;
the jacking piece is connected to the mounting seat and used for driving the imprinting template to tilt relative to the imprinting substrate; and
a controller in communicative connection with the acquisition module, the rotation mechanism, the jacking member, and the driving member.
6. The demolding apparatus as claimed in claim 5, wherein the demolding mechanism further comprises a receiving member connected to the demolding member for receiving the imprint template separated from the imprint substrate.
7. The demolding device as claimed in claim 5, wherein the demolding member is provided with a clamping opening, and the driving member drives the demolding member to move relative to the mounting table to enable the imprint template to extend into the clamping opening and drives the demolding member to move to enable the imprint template to be separated from the imprint substrate.
8. The demolding apparatus as claimed in claim 7, wherein the demolding member comprises a mounting body, a first clamping body and a second clamping body, the first clamping body and the second clamping body are connected to the mounting body at intervals, the clamping opening is formed between the first clamping body and the second clamping body, and the mounting body is in transmission fit with the driving member.
9. The demolding device as claimed in claim 8, wherein the first clamping body and/or the second clamping body is/are rotatably connected with the mounting body.
10. The demolding device as claimed in any one of claims 5 to 9, wherein the obtaining module comprises a catcher and an image processing unit, the catcher is in communication connection with the image processing unit, the catcher is used for capturing position information of the mark on the imprint template, the image processing unit is used for calculating the preset angle to enable the preferred demolding direction to be matched with the moving direction of the demolding part, the image processing unit is in communication connection with the controller, and the controller controls the rotating mechanism to drive the mounting table to rotate according to the preset angle information calculated by the image processing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110141665.4A CN112925165B (en) | 2021-02-02 | 2021-02-02 | Demolding method and demolding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110141665.4A CN112925165B (en) | 2021-02-02 | 2021-02-02 | Demolding method and demolding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112925165A true CN112925165A (en) | 2021-06-08 |
| CN112925165B CN112925165B (en) | 2023-05-26 |
Family
ID=76169402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110141665.4A Active CN112925165B (en) | 2021-02-02 | 2021-02-02 | Demolding method and demolding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112925165B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010269580A (en) * | 2009-05-25 | 2010-12-02 | Canon Inc | Imprint apparatus and manufacturing method for article |
| JP2014004825A (en) * | 2012-05-31 | 2014-01-16 | Fujikura Ltd | Pattern forming method and mold release device |
| CN105159029A (en) * | 2015-10-10 | 2015-12-16 | 兰红波 | Large-area micro-nano imaging method and device |
| CN107000308A (en) * | 2014-12-22 | 2017-08-01 | 奥贝达克特公司 | Install and stripper apparatus |
-
2021
- 2021-02-02 CN CN202110141665.4A patent/CN112925165B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010269580A (en) * | 2009-05-25 | 2010-12-02 | Canon Inc | Imprint apparatus and manufacturing method for article |
| JP2014004825A (en) * | 2012-05-31 | 2014-01-16 | Fujikura Ltd | Pattern forming method and mold release device |
| CN107000308A (en) * | 2014-12-22 | 2017-08-01 | 奥贝达克特公司 | Install and stripper apparatus |
| CN105159029A (en) * | 2015-10-10 | 2015-12-16 | 兰红波 | Large-area micro-nano imaging method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112925165B (en) | 2023-05-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101003455B1 (en) | Apparatus for blanking printed circuit board | |
| JP4297621B2 (en) | Punching device and workpiece processing method | |
| RU2005129651A (en) | METHOD FOR PRODUCING INTERFEROMETRIC MODULATORS USING SELECTIVE REMOVAL OF MATERIAL | |
| CN112925165A (en) | Mold release method and mold release device | |
| CN214252872U (en) | Demolding device and imprinting system | |
| KR20080046479A (en) | Apparatus and method for imprint | |
| CN102481709B (en) | Apparatus for producing wafer lens, die, and process for producing wafer lens | |
| CN110035648B (en) | Automatic single-shaft double-mounting head mounting machine | |
| CN210236390U (en) | Automatic material taking mechanism | |
| US20080289772A1 (en) | Method and Apparatus For Mounting a Tire | |
| EP2346073B1 (en) | Prealigner | |
| CN216761172U (en) | Printing stock positioner and screen printing machine that screen printing machine was used | |
| CN113518285B (en) | Customized earphone assembling equipment and assembling method | |
| KR20220074713A (en) | Apparatus for demolding and method for demolding wafer by using the same | |
| CN109342845B (en) | Automatic aligning device and equipment | |
| CN211222425U (en) | Sheet stripping mechanism | |
| CN2820510Y (en) | Structure of bottle blower | |
| CN219302868U (en) | Stamping device convenient for inclination adjustment of die | |
| US20180029353A1 (en) | Transfer apparatus and transfer method | |
| CN211366825U (en) | Charging tray lifting mechanism | |
| CN215867497U (en) | Automatic demoulding device for nanoimprint | |
| CN218397814U (en) | Clamping device | |
| CN115657420A (en) | Automatic imprinting equipment for micro-lens array | |
| CN111556706B (en) | Superspeed mounting head and chip mounter | |
| CN214981392U (en) | Automobile-used rubber macromolecular material cut device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Shi Ruicheng Inventor before: Shi Ruicheng Inventor before: Wu Chengwen Inventor before: Li Xiaojun |
|
| CB03 | Change of inventor or designer information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |