CN112922952A - Quartz vacuum adsorption device with pressure relief function - Google Patents
Quartz vacuum adsorption device with pressure relief function Download PDFInfo
- Publication number
- CN112922952A CN112922952A CN202110088218.7A CN202110088218A CN112922952A CN 112922952 A CN112922952 A CN 112922952A CN 202110088218 A CN202110088218 A CN 202110088218A CN 112922952 A CN112922952 A CN 112922952A
- Authority
- CN
- China
- Prior art keywords
- pipe
- air
- air blowing
- pressure relief
- control switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 26
- 238000007664 blowing Methods 0.000 claims abstract description 77
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 7
- 230000029058 respiratory gaseous exchange Effects 0.000 claims 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/065—Arrangements for producing propulsion of gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
Abstract
The invention discloses a quartz vacuum adsorption device with a pressure relief function, which comprises a vacuum chuck, an air inlet pipe, an air blowing pipe, a three-way joint, a four-way joint and a plurality of connecting pipes, wherein the vacuum chuck is provided with an air hole, the vacuum chuck is provided with an annular groove, the air hole is positioned in the annular groove, the position of the outer wall of the vacuum chuck, which corresponds to the air hole, is provided with a joint communicated with the air hole, the air inlet pipe is provided with a vacuum generator and an air suction control switch, the air inlet pipe and the air blowing pipe are both connected with an air pump, the air blowing pipe is provided with an air blowing pressure relief control switch, four connecting ports of the four-way joint are respectively detachably connected with the connecting pipes, three connecting pipes are respectively detachably connected with the corresponding joints, and the. The quartz pressure relief device has the advantages of convenience in taking quartz products by effectively relieving pressure through air blowing, convenience in disassembly, assembly, maintenance and replacement, convenience in vacuum adsorption and air blowing pressure relief control and the like.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of vacuum adsorption devices, and particularly relates to a quartz vacuum adsorption device with a pressure relief function.
[ background of the invention ]
The vacuum adsorption device is a common article adsorption and fixing device and generally comprises a vacuum pumping device, a connecting pipe and a vacuum chuck. The existing vacuum adsorption device has the problems that the whole device is inconvenient to disassemble, assemble and replace, and the article is difficult to take due to the fact that a vacuum state is maintained between a vacuum sucker and the article when the article is taken.
[ summary of the invention ]
The invention aims to solve the problems in the prior art, and provides a quartz vacuum adsorption device with a pressure relief function, which can effectively relieve pressure through air blowing, is convenient for taking quartz products, is convenient to disassemble, assemble, maintain and replace, and is convenient and fast to control vacuum adsorption and air blowing pressure relief.
In order to realize the purpose, the invention provides a quartz vacuum adsorption device with a pressure relief function, which comprises a vacuum sucker, an air inlet pipe, an air blowing pipe, a three-way joint, a four-way joint and a plurality of connecting pipes, wherein the vacuum sucker is provided with an air hole, the vacuum chuck is provided with an annular groove, the air hole is positioned in the annular groove, the position of the outer wall of the vacuum chuck, which corresponds to the air hole, is provided with a joint communicated with the air hole, the air inlet pipe is provided with a vacuum generator and an air suction control switch, the air inlet pipe and the air blowing pipe are both connected with an air pump, the air blowing pipe is provided with an air blowing pressure relief control switch, four connecting ports of the four-way joint can be detachably connected with connecting pipes, and three connecting pipes are respectively detachably connected with corresponding joints, and the three-way joint is respectively detachably connected with the air inlet pipe, the air blowing pipe and one of the connecting pipes.
Preferably, the connecting pipe and the tee joint, the connecting pipe and the four-way joint, the air inlet pipe and the tee joint and the air blowing pipe and the tee joint are connected in a plugging mode, the connecting ends of the connecting pipe, the air inlet pipe and the air blowing pipe are in a step shape and are connected in a plugging mode, and therefore workers can conveniently plug and dismount.
Preferably, the connection port surface of the connector, the three-way connector and the four-way connector and the connection end surface of the connection pipe, the air inlet pipe and the air blowing pipe are provided with annular notches, the longitudinal sections of the annular notches are semicircular, an annular cavity is formed after the connection between the connection pipe and the three-way connector, between the connection pipe and the four-way connector, between the air inlet pipe and the three-way connector and between the air blowing pipe and the three-way connector, an annular sealing ring is installed in the annular cavity in a matched mode, the arrangement of the annular sealing ring improves the connection sealing performance of the whole pipeline.
Preferably, the connecting pipe and the three-way joint, the connecting pipe and the four-way joint, the air inlet pipe and the three-way joint, and the air blowing pipe and the three-way joint are connected in a threaded connection mode, and through threaded connection, the manual screwing and dismounting of workers are facilitated.
Preferably, the air inlet pipe and the air blowing pipe are both provided with a pressure regulating valve with a meter, the pressure regulating valve with the meter in the air inlet pipe is positioned between the vacuum generator and the air pump, the pressure regulating valve with the meter in the air blowing pipe is positioned between the air blowing pressure relief control switch and the air pump, the pressure value in the pipe can be read visually through the pressure regulating valve with the meter, and then workers can adjust the pressure values in the air inlet pipe and the air blowing pipe effectively according to requirements, so that the pressure values in the air inlet pipe and the air blowing pipe are kept stable basically, and the adsorption stability of.
Preferably, the working air pressure of the air inlet pipe and the air blowing pipe is controlled to be 0.05-0.1 Bar, so that the quartz product is effectively adsorbed or blown up in vacuum.
Preferably, the longitudinal section of the annular groove is in an isosceles trapezoid shape, and the two sides of the top port of the annular groove are provided with fillets which are processed to avoid damaging quartz products.
Preferably, the number of the air holes is 3, and the three air holes form an included angle of 120 degrees with each other, so that the vacuum chuck can uniformly adsorb the quartz product, and the adsorption stability and the surface flatness of the adsorbed quartz product of the quartz product are ensured.
Preferably, the air suction control switch and the air blowing pressure relief control switch are both manual switches or electric switches, and the air circulation condition in the air inlet pipe or the air blowing pipe can be controlled manually or electrically.
Preferably, the air suction control switch and the air blowing pressure relief control switch are both electric switches, the air suction control switch, the air blowing pressure relief control switch and the vacuum generator are all connected with the PLC control device, and the opening and closing conditions of the air suction control switch and the air blowing pressure relief control switch can be automatically controlled through the PLC.
The invention has the beneficial effects that: according to the invention, the air inlet pipe with the air suction control switch and the air blowing pipe with the air blowing pressure relief control switch are arranged, so that the air inlet pipe and the air blowing pipe can be independently controlled, the air inlet pipe can be used for vacuum adsorption of a quartz product by a vacuum chuck, and the air blowing pipe can be used for blowing air to relieve adsorption pressure between the vacuum chuck and the quartz product, so that a user can conveniently take the quartz product; the connecting pipe and the joint, the four-way joint and the three-way joint as well as the air inlet pipe, the air blowing pipe and the three-way joint can be detachably connected, so that the whole pipeline can be conveniently disassembled, maintained and replaced, and the length of the pipe body can be replaced according to requirements.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a schematic structural diagram of one embodiment of the present invention;
FIG. 2 is a top view of one embodiment of the present invention;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2 in accordance with one embodiment of the present invention;
FIG. 4 is an enlarged view of portion B of FIG. 3 in accordance with one embodiment of the present invention;
FIG. 5 is a schematic view of the connection end of the connection tube according to an embodiment of the present invention.
In the figure: 1-air inlet pipe, 2-air blowing pipe, 3-vacuum sucker, 4-pressure regulating valve with meter, 5-connecting pipe, 6-three-way joint, 7-annular sealing ring, 8-annular notch, 11-vacuum generator, 12-air suction control switch, 21-air blowing pressure relief control switch, 31-annular groove, 32-air hole, 33-joint and 51-four-way joint.
[ detailed description ] embodiments
Embodiment 1 referring to fig. 1 to 5, this embodiment provides a quartz vacuum adsorption apparatus with pressure relief function, which includes a vacuum chuck 3, an air inlet pipe 1, an air blowing pipe 2, a three-way joint 6, a four-way joint 51 and a plurality of connecting pipes 5, the vacuum chuck 3 is provided with three air holes 32, an included angle of 120 ° is formed between every two three air holes 32, the vacuum chuck 3 is provided with an annular groove 31, the air holes 32 are located in the annular groove 31, a joint 33 communicated with the air holes 32 is provided at a position on an outer wall of the vacuum chuck 3 corresponding to the air holes 32, the joint 33 is hollow, the air inlet pipe 1 is provided with a vacuum generator 11 and an air suction control switch 12, the air inlet pipe 1 and the air blowing pipe 2 are both connected with an air pump, the air blowing pipe 2 is provided with an air blowing pressure relief control switch 21, four connecting ports of the four-way joint 51 can, the three-way joint 6 is detachably connected with the air inlet pipe 1, the air blowing pipe 2 and one of the connecting pipes 5, the air hole 32 is vertically communicated with the joint 33, the notch of the annular groove 31 is flush with the vacuum chuck 3, and the joint 33 is integrally connected with the vacuum chuck 3.
Furthermore, the connecting pipe 5 and the three-way joint 6, the connecting pipe 5 and the joint 33, the connecting pipe 5 and the four-way joint 51, the air inlet pipe 1 and the three-way joint 6, and the air blowing pipe 2 and the three-way joint 6 are connected in an inserting manner, the connecting ends of the connecting pipe 5, the air inlet pipe 1 and the air blowing pipe 2 are in a step shape, and the connecting end of the connecting pipe 5, the air inlet pipe 1 and the air blowing pipe 2 is one end which can be connected with the three-way joint 6, the joint 33 or the four-way joint 51.
Further, the joint 33, the three-way joint 6, the connection port surface and the connecting pipe 5 of the four-way joint 51, the connection end surface of the air inlet pipe 1 and the air blowing pipe 2 is provided with an annular notch 8, the longitudinal section of the annular notch 8 is semicircular, between the connecting pipe 5 and the three-way joint 6, between the connecting pipe 5 and the joint 33, between the connecting pipe 5 and the four-way joint 51, between the air inlet pipe 1 and the three-way joint 6, an annular cavity is formed after the connection between the air blowing pipe 2 and the three-way joint 6, the longitudinal section of the annular cavity is circular, and an annular sealing ring 7 is installed in.
Furthermore, the air inlet pipe 1 and the air blowing pipe 2 are both provided with a pressure regulating valve 4 with a meter, the pressure regulating valve 4 with a meter on the air inlet pipe 1 is positioned between the vacuum generator 11 and the air pump, and the pressure regulating valve 4 with a meter on the air blowing pipe 2 is positioned between the air blowing pressure relief control switch 21 and the air pump.
Furthermore, the working air pressure of the air inlet pipe 1 and the air blowing pipe 2 is controlled to be 0.05-0.1 Bar.
Further, the longitudinal section of the annular groove 31 is in an isosceles trapezoid shape, and two sides of the top port of the annular groove 31 are provided with rounded corners.
Further, the air suction control switch 12 and the air blowing pressure relief control switch 21 are both manual switches.
In embodiment 2, the structure is the same as that of embodiment 1 except that the connection pipe 5 and the three-way joint 6, the connection pipe 5 and the joint 33, the connection pipe 5 and the four-way joint 51, the air inlet pipe 1 and the three-way joint 6, and the air blowing pipe 2 and the three-way joint 6 are connected in a threaded connection manner.
The working process of the invention is as follows:
in the working process of the quartz vacuum adsorption device with the pressure relief function, the surface of a quartz product is contacted with a vacuum chuck 3, when the quartz product needs to be adsorbed in vacuum, an air suction control switch 12 is opened, an air blowing pressure relief control switch 21 is closed, at the moment, an air pump supplies air to an air inlet pipe 1, under the action of a vacuum generator 11, negative pressure is generated among the air inlet pipe 1, a connecting pipe 5, a connecting head 33, an air hole 32 and an annular groove 31, so that the vacuum chuck 3 can firmly adsorb the surface of the quartz product, when the quartz product needs to be taken, the air suction control switch 12 is closed, the air blowing pressure relief control switch 21 is opened, at the moment, the air pump supplies air to an air blowing pipe 2, air flow in the air blowing pipe 2 is blown upwards to the surface of the quartz product after passing through the connecting pipe 5, the connecting head 33, the air hole 32 and the annular groove 31, so that the quartz product can be effectively blown to be taken, and the vacuum, when the length of the connecting pipe 5 needs to be changed, the connecting pipe 5 can be detached from the three-way joint 6, the four-way joint 51 and the joint 33, the pressure value in the air inlet pipe 1 and the air blowing pipe 2 can be adjusted by the pressure adjusting valve 4 with the meter, so that the working air pressure in the pipe can be controlled to be 0.05-0.1 Bar, and the quartz product is guaranteed to be adsorbed or blown up in vacuum.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (10)
1. The utility model provides a quartz vacuum adsorption device with pressure release function, includes vacuum chuck, intake pipe, is equipped with gas pocket, its characterized in that on the vacuum chuck: still include gas blow pipe, a plurality of connecting pipe, three way connection and four way connection, be equipped with the annular groove on the vacuum chuck, the gas pocket is located the annular groove, vacuum chuck outer wall corresponds gas pocket position department and is equipped with the joint that is linked together with the gas pocket, be equipped with vacuum generator and the control switch of breathing in the intake pipe, intake pipe and gas blow pipe all link to each other with the air pump, are equipped with the pressure release control switch of blowing on the gas blow pipe, four connection port of four way connection all can be dismantled and are connected with the connecting pipe, and wherein three connecting pipes can be dismantled with corresponding joint respectively and be connected, three way connection respectively with intake pipe, gas blow pipe and one of them the.
2. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the connecting pipe and the three-way joint, the connecting pipe and the four-way joint, the air inlet pipe and the three-way joint and the air blowing pipe and the three-way joint are connected in a plugging mode, and the connecting ends of the connecting pipe, the air inlet pipe and the air blowing pipe are in a step shape.
3. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the annular sealing ring is characterized in that annular notches are formed in the surfaces of connecting ports of the connector, the three-way connector and the four-way connector and the surfaces of connecting ends of the connecting pipe, the air inlet pipe and the air blowing pipe, the longitudinal sections of the annular notches are semicircular, an annular cavity is formed after the connecting pipes and the three-way connector, the connecting pipes and the four-way connector, the air inlet pipe and the three-way connector and the air blowing pipe and the three-way connector are connected, and annular sealing rings are installed in the.
4. The quartz vacuum chuck device with pressure release function according to claim 1 or 3, wherein: the connecting pipe and the three-way joint, the connecting pipe and the four-way joint, the air inlet pipe and the three-way joint and the air blowing pipe and the three-way joint are connected in a threaded connection mode.
5. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the air inlet pipe and the air blowing pipe are both provided with a pressure regulating valve with a meter, the pressure regulating valve with the meter on the air inlet pipe is positioned between the vacuum generator and the air pump, and the pressure regulating valve with the meter on the air blowing pipe is positioned between the air blowing pressure relief control switch and the air pump.
6. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: and the working air pressure of the air inlet pipe and the air blowing pipe is controlled to be 0.05-0.1 Bar.
7. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the longitudinal section of the annular groove is in an isosceles trapezoid shape, and two sides of the top port of the annular groove are provided with fillets.
8. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the number of the air holes is 3, and the three air holes form an included angle of 120 degrees with each other.
9. The quartz vacuum adsorption device with pressure relief function according to claim 1, characterized in that: the air suction control switch and the air blowing pressure relief control switch are both manual switches or electric switches.
10. The quartz vacuum chuck device with pressure release function according to claim 9, wherein: the air suction control switch and the air blowing pressure relief control switch are both electric switches, and the air suction control switch, the air blowing pressure relief control switch and the vacuum generator are all connected with the PLC control device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110088218.7A CN112922952B (en) | 2021-01-22 | 2021-01-22 | Quartz vacuum adsorption device with pressure relief function |
| PCT/CN2021/076903 WO2022156019A1 (en) | 2021-01-22 | 2021-02-19 | Quartz vacuum suction device having pressure relief function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110088218.7A CN112922952B (en) | 2021-01-22 | 2021-01-22 | Quartz vacuum adsorption device with pressure relief function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112922952A true CN112922952A (en) | 2021-06-08 |
| CN112922952B CN112922952B (en) | 2021-12-14 |
Family
ID=76164815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110088218.7A Active CN112922952B (en) | 2021-01-22 | 2021-01-22 | Quartz vacuum adsorption device with pressure relief function |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112922952B (en) |
| WO (1) | WO2022156019A1 (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3517958A (en) * | 1968-06-17 | 1970-06-30 | Ibm | Vacuum pick-up with air shield |
| US6033478A (en) * | 1996-11-05 | 2000-03-07 | Applied Materials, Inc. | Wafer support with improved temperature control |
| TW435297U (en) * | 1999-04-23 | 2001-05-16 | Lin Jin Huang | Vacuum device for absorbing type workbench |
| CN1313633A (en) * | 2000-03-13 | 2001-09-19 | 株式会社尼康 | Substrate protecting device and exposoure device therewith |
| CN102570736A (en) * | 2012-02-13 | 2012-07-11 | 上海克来机电自动化工程有限公司 | Vacuum adsorption device |
| CN202717695U (en) * | 2012-07-03 | 2013-02-06 | 杭州大和热磁电子有限公司 | Jig for processing quartz ring product |
| CN207643161U (en) * | 2017-11-09 | 2018-07-24 | 西安丁子电子信息科技有限公司 | A kind of sucking support machine structure pipe network system of robot |
| CN209963040U (en) * | 2019-07-22 | 2020-01-17 | 成都汉芯国科集成技术有限公司 | Sucking disc device for wafer cutting |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5005933B2 (en) * | 2006-03-14 | 2012-08-22 | 株式会社岡本工作機械製作所 | Adsorption pad for substrate transfer device and substrate transfer method |
| CN208482742U (en) * | 2018-04-14 | 2019-02-12 | 山东科芯电子有限公司 | A kind of multi-functional photoetching vacuum chuck |
| CN109741766A (en) * | 2019-03-12 | 2019-05-10 | 中铁信安(北京)信息安全技术有限公司 | CD automatic identification grabbing device and method for CD burning printing device |
| CN212208044U (en) * | 2020-07-30 | 2020-12-22 | 浙江西盈科技股份有限公司 | Line controller negative pressure adsorption type test tool |
-
2021
- 2021-01-22 CN CN202110088218.7A patent/CN112922952B/en active Active
- 2021-02-19 WO PCT/CN2021/076903 patent/WO2022156019A1/en active Application Filing
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3517958A (en) * | 1968-06-17 | 1970-06-30 | Ibm | Vacuum pick-up with air shield |
| US6033478A (en) * | 1996-11-05 | 2000-03-07 | Applied Materials, Inc. | Wafer support with improved temperature control |
| TW435297U (en) * | 1999-04-23 | 2001-05-16 | Lin Jin Huang | Vacuum device for absorbing type workbench |
| CN1313633A (en) * | 2000-03-13 | 2001-09-19 | 株式会社尼康 | Substrate protecting device and exposoure device therewith |
| CN102570736A (en) * | 2012-02-13 | 2012-07-11 | 上海克来机电自动化工程有限公司 | Vacuum adsorption device |
| CN202717695U (en) * | 2012-07-03 | 2013-02-06 | 杭州大和热磁电子有限公司 | Jig for processing quartz ring product |
| CN207643161U (en) * | 2017-11-09 | 2018-07-24 | 西安丁子电子信息科技有限公司 | A kind of sucking support machine structure pipe network system of robot |
| CN209963040U (en) * | 2019-07-22 | 2020-01-17 | 成都汉芯国科集成技术有限公司 | Sucking disc device for wafer cutting |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022156019A1 (en) | 2022-07-28 |
| CN112922952B (en) | 2021-12-14 |
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