CN112904483A - Optical waveguide directional coupler and forming method thereof, optical network and control method thereof - Google Patents
Optical waveguide directional coupler and forming method thereof, optical network and control method thereof Download PDFInfo
- Publication number
- CN112904483A CN112904483A CN202110063846.XA CN202110063846A CN112904483A CN 112904483 A CN112904483 A CN 112904483A CN 202110063846 A CN202110063846 A CN 202110063846A CN 112904483 A CN112904483 A CN 112904483A
- Authority
- CN
- China
- Prior art keywords
- optical
- waveguide
- directional coupler
- optical waveguide
- waveguide directional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
An optical waveguide directional coupler and a forming method thereof, an optical network and a control method thereof, wherein the forming method comprises the following steps: providing a first silicon oxide layer; forming a first waveguide and a second waveguide which are arranged in parallel on the surface of the first silicon oxide layer; forming a second silica layer overlying the first waveguide and the second waveguide; a trench is formed between the first waveguide and the second waveguide, the trench penetrating through the second silicon dioxide layer. The invention can reduce the dependence on power consumption and solve the problem of large-scale optical network power consumption.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to an optical waveguide directional coupler and a forming method thereof, an optical network and a control method thereof.
Background
Integrated optics has been widely used in the Field of optical communications, and various emerging technologies such as 5G, Field Programmable Gate Array (FPGA), quantum communication, Artificial Intelligence (AI), laser radar, etc. have been developed in recent years, which has led to the development of integrated optical chips in large scale and high integration. Photonic chip devices have approached the thousands scale and are moving toward the tens of thousands of optical device integration. With the continuous increase of chip scale, the number of the needed thermo-optical phase shifters also increases exponentially, the power consumption of a single high-performance thermo-phase shifter at present is tens of milliwatts, and the power consumption of a temperature control system required by the thermo-optical phase shifter is added, so that the whole power consumption of a system on a future thousand-level or ten thousand-level photonic integrated chip or the whole power consumption of the system breaks through hundreds of watts or even kilowatt-level, and the system requirements cannot be met. Meanwhile, the volume of the required temperature control system is usually hundreds of times of that of the optical chip, so that the integration level of the system on the photonic integrated chip is greatly reduced. It can be said that the power consumption and integration level of the current system on a photonic integrated chip have become bottleneck problems restricting the development of the photonic integration technology to the ultra-large scale integration, and an integrated optical network is urgently needed to reduce the dependence on the power consumption and solve the power consumption problem of the large-scale photonic chip.
Disclosure of Invention
The invention aims to provide an optical waveguide directional coupler and a forming method thereof, an optical network and a control method thereof, which can reduce the dependence on power consumption and solve the problem of large-scale optical network power consumption.
To solve the above technical problem, an embodiment of the present invention provides a method for forming an optical waveguide directional coupler, including: providing a first silicon oxide layer; forming a first waveguide and a second waveguide which are arranged in parallel on the surface of the first silicon oxide layer; forming a second silica layer overlying the first waveguide and the second waveguide; a trench is formed between the first waveguide and the second waveguide, the trench penetrating through the second silicon dioxide layer.
Optionally, the bottom surface of the trench is lower than the top surface of the first oxide layer.
Optionally, the first waveguide includes a first light input end and a first light output end, and the second waveguide includes a second light input end and a second light output end; the forming method further includes: and filling a polymer in the groove and carrying out curing treatment, so that at least one part of the light input from the first light input end is coupled to the second light output end for outputting, and at least one part of the light input from the second light input end is coupled to the first light output end for outputting.
Optionally, the polymer is a photoresist with light transmittance greater than a preset light transmittance threshold.
Optionally, the curing treatment process is selected from: ultraviolet curing treatment, laser curing treatment, electron beam curing treatment and thermal curing treatment.
To solve the above technical problem, an embodiment of the present invention provides an optical waveguide directional coupler, including: a first silicon oxide layer; the first waveguide and the second waveguide are arranged in parallel and are positioned on the surface of the first silicon oxide layer; a second silica layer covering the first waveguide and the second waveguide; a trench between the first waveguide and the second waveguide, the trench penetrating the second silicon dioxide layer.
Optionally, the first waveguide includes a first light input end and a first light output end, and the second waveguide includes a second light input end and a second light output end; the optical waveguide directional coupler further comprises: a cured polymer within the trench such that at least a portion of light input from the first light input is coupled to the second light output and at least a portion of light input from the second light input is coupled to the first light output.
To solve the foregoing technical problem, an embodiment of the present invention provides an optical network, including: a plurality of the optical waveguide directional couplers, each having a respective first waveguide and a respective second waveguide; wherein, the adjacent optical waveguide directional couplers are connected through the respective first waveguides or second waveguides.
To solve the foregoing technical problem, an embodiment of the present invention provides a method for controlling an optical network, including: determining an optical waveguide directional coupler which needs to be changed from straight-through output to coupled output, and recording the optical waveguide directional coupler as a first optical waveguide directional coupler; and filling a polymer in the groove of the first optical waveguide directional coupler and carrying out curing treatment, so that at least one part of light input from the first light input end of each optical waveguide directional coupler is coupled to the second light output end of the optical waveguide directional coupler and at least one part of light input from the second light input end of each optical waveguide directional coupler is coupled to the first light output end of the optical waveguide directional coupler.
Optionally, the method for controlling an optical network further includes: determining an optical waveguide directional coupler which needs to be changed from coupled output to through output, and marking the optical waveguide directional coupler as a second optical waveguide directional coupler; removing the polymer in the second optical waveguide directional couplers so that light input from the first optical input of each optical waveguide directional coupler passes through to the first optical output of that optical waveguide directional coupler and light input from the second optical input of each optical waveguide directional coupler passes through to the second optical output of that optical waveguide directional coupler.
Compared with the prior art, the technical scheme of the embodiment of the invention has the following beneficial effects:
in the embodiment of the invention, the groove penetrating through the second silicon dioxide layer is formed between the first waveguide and the second waveguide, so that a user can fill or remove materials in the groove according to specific requirements to realize coupling output or through output of light, write in or erase of a specific optical network is realized, power consumption can be kept permanently without consuming, dependence on power consumption is reduced, and the problem of power consumption of a large-scale optical network is solved.
Further, the bottom surface of the groove is lower than the top surface of the first oxide layer, so that the bottom surface of the filling material is lower than the bottoms of the side walls of the first waveguide and the second waveguide, and the top surface of the filling material is higher than the bottoms of the side walls of the first waveguide and the second waveguide, which is beneficial to increasing the influence on the coupling effect between the waveguides.
Further, a polymer is filled in the trench and is cured, so that at least a part of the light input from the first light input end is coupled to the second light output end for output, and at least a part of the light input from the second light input end is coupled to the first light output end for output, and the coupled-out of the optical waveguide directional coupler can be realized through the added polymer material.
Furthermore, the polymer is set to be photoresist with light transmittance greater than a preset light transmittance threshold, so that better coupling efficiency can be realized, and the requirement can be met.
Further, by arranging the optical network to include the plurality of optical waveguide directional couplers, each optical waveguide directional coupler is provided with the respective first waveguide and the respective second waveguide, and the adjacent optical waveguide directional couplers are connected through the respective first waveguides or the respective second waveguides, compared with the prior art that an optical control device and/or an electrical control device need to be arranged, by adopting the scheme of the embodiment of the invention, the control of the through and coupling states can be realized by controlling the injection of the polymer, so that the writing or erasing of the specific optical network can be realized, the power consumption can be not consumed but permanently maintained, the dependence on the power consumption is favorably reduced, and the problem of the power consumption of the large-scale optical network is solved.
Drawings
FIG. 1 is a flow chart of a method of forming an optical waveguide directional coupler in an embodiment of the present invention;
FIG. 2 is a top view of an optical waveguide directional coupler in a through state in accordance with an embodiment of the present invention;
fig. 3 to 4 are schematic cross-sectional structural diagrams of devices corresponding to steps in a method for forming an optical waveguide directional coupler according to an embodiment of the present invention;
FIG. 5 is a top view of an optical waveguide directional coupler in a coupled state in accordance with an embodiment of the present invention;
fig. 6 is a schematic diagram of an optical network according to an embodiment of the present invention.
Detailed Description
As described above, in the current optical network, the dependence on power consumption is high, and the problem of large-scale optical network power consumption is serious.
The inventor of the invention has found through research that the scale of the photonic chip device is close to thousands of levels, and is moving towards the integration of thousands of levels of optical devices. With the continuous increase of chip scale, the number of the needed thermo-optical phase shifters also increases exponentially, the power consumption of a single high-performance thermo-phase shifter at present is tens of milliwatts, and the power consumption of a temperature control system required by the thermo-optical phase shifter is added, so that the whole power consumption of a system on a future thousand-level or ten thousand-level photonic integrated chip or the whole power consumption of the system breaks through hundreds of watts or even kilowatt-level, and the system requirements cannot be met. Meanwhile, the volume of the required temperature control system is usually hundreds of times of that of the optical chip, so that the integration level of the system on the photonic integrated chip is greatly reduced. It can be said that the power consumption and integration level of the current system on a photonic integrated chip have become bottleneck problems restricting the development of the photonic integration technology to the ultra-large scale integration, and an integrated optical network is urgently needed to reduce the dependence on the power consumption and solve the power consumption problem of the large-scale photonic chip. There is a need to develop an optical waveguide directional coupler that can be turned on or off without depending on power consumption, so as to solve the problem of power consumption of a large-scale optical network.
In the embodiment of the invention, the groove penetrating through the second silicon dioxide layer is formed between the first waveguide and the second waveguide, so that a user can fill or remove materials in the groove according to specific requirements to realize coupling output or through output of light, write in or erase of a specific optical network is realized, power consumption can be kept permanently without consuming, dependence on power consumption is reduced, and the problem of power consumption of a large-scale optical network is solved.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1, fig. 1 is a flowchart of a method for forming an optical waveguide directional coupler according to an embodiment of the present invention.
The optical waveguide directional coupler can be used for realizing equal-ratio or unequal-ratio branching of an optical field in an integrated optical chip.
The method for forming the optical waveguide directional coupler may include steps S11 to S14:
step S11: providing a first silicon oxide layer;
step S12: forming a first waveguide and a second waveguide which are arranged in parallel on the surface of the first silicon oxide layer;
step S13: forming a second silica layer overlying the first waveguide and the second waveguide;
step S14: a trench is formed between the first waveguide and the second waveguide, the trench penetrating through the second silicon dioxide layer.
The above steps will be described with reference to fig. 2 to 5.
With reference to fig. 2 and fig. 3, fig. 2 is a top view of an optical waveguide directional coupler in a through state according to an embodiment of the present invention, and fig. 3 to fig. 4 are schematic cross-sectional structures of devices corresponding to steps in a method for forming an optical waveguide directional coupler according to an embodiment of the present invention.
Specifically, a first silicon oxide layer 100 is provided, a first waveguide 110 and a second waveguide 111 are formed in parallel on a surface of the first silicon oxide layer 100, a second silicon oxide layer 120 is formed, the second silicon oxide layer 120 covers the first waveguide 110 and the second waveguide 111, a trench 101 is formed between the first waveguide 110 and the second waveguide 111, and the trench 101 penetrates the second silicon oxide layer 120.
The first silicon oxide layer 100 may be used as a cladding of an optical waveguide directional coupler, and the material of the first silicon oxide layer 100 may be SiO2And may be other suitable materials.
Further, the first silicon oxide layer 100 may directly serve as a lowermost cladding layer, and may also be provided as a cladding layer located on a surface of a semiconductor substrate, which is not limited in this embodiment.
The first waveguide 110 and the second waveguide 111 are juxtaposed on the surface of the first silicon oxide layer 100, and a space is provided between the first waveguide 110 and the second waveguide 111.
Wherein the second silica layer 120 may be used as a cladding of the optical waveguide directional coupler, and the material of the second silica layer 120 may be SiO2And may be other suitable materials.
Further, the trench 101 is filled with a polymer to realize optical coupling between the first waveguide 110 and the second waveguide 111.
Further, the bottom surface of the trench 101 may be lower than the top surface of the first oxide layer 100.
In the embodiment of the present invention, by setting the bottom surface of the trench 101 to be lower than the top surface of the first oxide layer 100, the bottom surface of the filling material can be lower than the bottoms of the sidewalls of the first waveguide and the second waveguide, and the top surface of the filling material is higher than the bottoms of the sidewalls of the first waveguide and the second waveguide, which is beneficial to increasing the influence on the coupling effect between the waveguides.
Specifically, the influence of the filling material on the waveguide is generated from the side wall direction, and compared with the case that the filling material is only located obliquely above the waveguide, the filling material is arranged to be higher at the top part of the waveguide and lower at the bottom part, so that the influence of the filling material is more improved.
In the embodiment of the present invention, the trench 101 penetrating through the second silica layer 120 is formed between the first waveguide 110 and the second waveguide 111, so that a user can perform material filling or material removal operation on the trench 101 according to specific requirements to implement optical coupling output or through output, thereby implementing writing or erasing of a specific optical network, and can permanently maintain without consuming power consumption, which is helpful for reducing dependence on power consumption and solving the problem of power consumption of a large-scale optical network.
With reference to fig. 4 and fig. 5, fig. 3 to fig. 4 are schematic cross-sectional structures of devices corresponding to steps in a method for forming an optical waveguide directional coupler according to an embodiment of the present invention, and fig. 5 is a top view of an optical waveguide directional coupler according to an embodiment of the present invention in a coupled state.
Specifically, the first waveguide 110 includes a first light input 1101 and a first light output 1102, and the second waveguide 111 includes a second light input 1111 and a second light output 1112; the trench 101 (see fig. 3) is filled with a polymer 130 and cured such that at least a portion of the light input from the first light input 1101 is coupled to the second light output 1112 and at least a portion of the light input from the second light input 1102 is coupled to the first light output 1111 for output.
In the embodiment of the present invention, the trench 101 is filled with the polymer 130 and is cured, so that at least a part of the light input from the first light input end 1101 is coupled to the second light output end 1112, and at least a part of the light input from the second light input end 1102 is coupled to the first light output end 1111 for output, and the coupling-out of the optical waveguide directional coupler can be realized by the added polymer material.
Further, the polymer 130 may be a photoresist having a light transmittance greater than a preset light transmittance threshold.
Further, the photoresist can be polymerized SU8 photoresist.
In the embodiment of the invention, the polymer is a photoresist with light transmittance greater than a preset light transmittance threshold, for example, a polymerized SU8 photoresist or other appropriate photoresists of the same type are adopted, so that better coupling efficiency can be realized, and the requirement can be favorably met.
It should be noted that the preset light transmittance threshold should not be too large, otherwise the light transmittance of the selected polymer is too high, which is not favorable for the coupling performance; the preset light transmittance threshold should not be too large, otherwise the light transmittance of the selected polymer is too low, which is not favorable for transmission of optical signals.
In a specific implementation manner of the embodiment of the present invention, the transmittance of the polymerized SU8 photoresist or other suitable photoresists of the same type may be used as the center of the preset transmittance threshold, and then a suitable range is determined on the basis of the transmittance, so as to obtain the selected value range of the preset transmittance threshold.
Further, the curing treatment process is selected from: ultraviolet curing treatment, laser curing treatment, electron beam curing treatment and thermal curing treatment.
Specifically, the ultraviolet curing may be achieved by using ultraviolet light (UV), using the photosensitivity of a photoinitiator (photosensitizer), forming excited ecological molecules by photo-initiation under the irradiation of the UV light, decomposing the molecules into radicals or ions, and performing chemical reactions such as polymerization, grafting, crosslinking and the like on unsaturated organic substances. In one specific application, during the forming operation, the focused ultraviolet light can be adopted to scan point to line on the liquid surface point by point according to computer instructions, the scanned part is solidified by liquid or molten material, and the part which is not scanned is still liquid or molten material.
The laser curing process may also be referred to as photo-curing molding or a photosensitive liquid phase curing method. In one specific application, during the forming operation, the focused laser beam can be used to scan the liquid surface point to line according to the computer instruction, point by point from line to surface, the scanned part is solidified by the liquid or molten material, and the part which is not scanned is still the liquid or molten material.
Electron beam curing is also a physical way to achieve electron beam attachment to each object by means of an electronized approach.
In thermal curing, this can be done by adding a curing (crosslinking) agent. Such as by condensation, ring closure, addition, or catalysis, to cause the thermosetting material to undergo a curing process.
In the embodiment of the present invention, the polymer may be cured by selecting an appropriate curing method.
In a specific application of the embodiment of the present invention, after the groove 101 is filled with the polymer material 130 and then uv-cured, the coupling efficiency is close to 100%, that is, almost all the light input from the first light input end 1101 is coupled to the second light output end 1112 and output, or almost all the light input from the second light input end 1111 is coupled to the first light output end 1102 and output.
In an embodiment of the present invention, an optical waveguide directional coupler is further disclosed, and referring to fig. 5, the optical waveguide directional coupler may include: a first silicon oxide layer 100; a first waveguide 110 and a second waveguide 111 arranged in parallel and located on the surface of the first silicon oxide layer 100; a second silica layer, the second silica layer 120 covering the first waveguide 110 and the second waveguide 111; and a trench 101 (refer to fig. 3) between the first waveguide 110 and the second waveguide 111, the trench 101 penetrating the second silicon oxide layer 120.
Further, the first waveguide 110 comprises a first light input end 1101 and a first light output end 1102, and the second waveguide 111 comprises a second light input end 1111 and a second light output end 1112; the optical waveguide directional coupler further comprises: the cured polymer 130 is located within the trench 101 such that at least a portion of the light input from the first light input 1101 is coupled to the second light output 1112 and at least a portion of the light input from the second light input 1102 is coupled to the first light output 1111 for output.
For the principle, specific implementation and beneficial effects of the optical waveguide directional coupler, please refer to the related description about the forming method of the optical waveguide directional coupler described above, and details are not repeated here.
Referring to fig. 6, fig. 6 is a schematic diagram of an optical network according to an embodiment of the present invention.
Specifically, the optical network may include: a plurality of optical waveguide directional couplers, each having a respective first waveguide and second waveguide; wherein, the adjacent optical waveguide directional couplers are connected through the respective first waveguides or second waveguides.
Wherein the oval shape as shown by the dotted line can be regarded as a single optical waveguide directional coupler.
As shown in fig. 6, the plurality of optical waveguide directional couplers may be formed into a mesh structure by the first waveguide or the second waveguide, for example, a quadrilateral mesh structure is formed.
Specifically, the first waveguide of the optical waveguide directional coupler 1 may be connected to the first waveguide (or the second waveguide) of the optical waveguide directional coupler 2, and the second waveguide of the optical waveguide directional coupler 1 may be connected to the first waveguide (or the second waveguide) of the optical waveguide directional coupler 3.
In the embodiment of the invention, by arranging the optical network to comprise the plurality of optical waveguide directional couplers, each optical waveguide directional coupler is provided with the respective first waveguide and the respective second waveguide, and the adjacent optical waveguide directional couplers are connected through the respective first waveguide or the respective second waveguide, compared with the prior art that an optical control device and/or an electrical control device need to be arranged, by adopting the scheme of the embodiment of the invention, the control of the through and coupling states can be realized by controlling the injection of the polymer, so that the writing or erasing of the specific optical network can be realized, the power consumption can be not consumed but permanently maintained, the dependence on the power consumption is favorably reduced, and the problem of the power consumption of the large-scale optical network is solved.
In the embodiment of the present invention, a method for controlling an optical network is also disclosed, which includes: determining an optical waveguide directional coupler which needs to be changed from straight-through output to coupled output, and recording the optical waveguide directional coupler as a first optical waveguide directional coupler; and filling a polymer in the groove of the first optical waveguide directional coupler and carrying out curing treatment, so that at least one part of light input from the first light input end of each optical waveguide directional coupler is coupled to the second light output end of the optical waveguide directional coupler and at least one part of light input from the second light input end of each optical waveguide directional coupler is coupled to the first light output end of the optical waveguide directional coupler.
In the embodiment of the invention, the coupling state can be controlled by controlling the injection of the polymer, so that the writing of a specific optical network is realized, the writing can be permanently maintained without consuming power consumption, the dependence on the power consumption is reduced, and the problem of the power consumption of a large-scale optical network is solved.
Further, the method for controlling the optical network further includes: determining an optical waveguide directional coupler which needs to be changed from coupled output to through output, and marking the optical waveguide directional coupler as a second optical waveguide directional coupler; removing the polymer in the second optical waveguide directional couplers so that light input from the first optical input of each optical waveguide directional coupler passes through to the first optical output of that optical waveguide directional coupler and light input from the second optical input of each optical waveguide directional coupler passes through to the second optical output of that optical waveguide directional coupler.
In the embodiment of the invention, the control of the straight-through state can be realized by controlling the removal of the polymer, so that the erasing of a specific optical network is realized, the power consumption can be permanently maintained without consuming, the dependence on the power consumption is favorably reduced, and the problem of the power consumption of a large-scale optical network is solved.
Further, the optical waveguide directional coupler can be a write-once optical waveguide directional coupler, so that the influence on the quality of the optical waveguide directional coupler caused by multiple filling and polymer removal is avoided.
It can be understood that, by using the optical waveguide directional coupler and the optical network in the embodiments of the present invention, other devices can be externally connected or internally connected, thereby realizing function diversification.
Specifically, the input and output ends of the optical fiber can be connected with a laser, a Photodiode (PD), a grating, a modulator, a micro-ring, and the like, so as to control the direction of an optical path and realize complex functions.
It is noted that the above-mentioned control method of the optical network may be implemented by a computer program.
An embodiment of the present invention further provides a storage medium, on which a computer program is stored, where the computer program is executed by a processor to perform the steps of the control method. The storage medium may be a computer-readable storage medium, and may include, for example, a non-volatile (non-volatile) or non-transitory (non-transitory) memory, and may further include an optical disc, a mechanical hard disk, a solid state hard disk, and the like.
The embodiment of the invention also provides a terminal, which comprises a memory and a processor, wherein the memory is stored with a computer program capable of running on the processor, and the processor executes the steps of the control method when running the computer program. The terminal includes, but is not limited to, a mobile phone, a computer, a tablet computer and other terminal devices.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (10)
1. A method of forming an optical waveguide directional coupler, comprising:
providing a first silicon oxide layer;
forming a first waveguide and a second waveguide which are arranged in parallel on the surface of the first silicon oxide layer;
forming a second silica layer overlying the first waveguide and the second waveguide;
a trench is formed between the first waveguide and the second waveguide, the trench penetrating through the second silicon dioxide layer.
2. The method of claim 1, wherein a bottom surface of the trench is lower than a top surface of the first oxide layer.
3. The method of forming an optical waveguide directional coupler according to claim 1, wherein the first waveguide includes a first optical input and a first optical output, and the second waveguide includes a second optical input and a second optical output;
the forming method further includes:
and filling a polymer in the groove and carrying out curing treatment, so that at least one part of the light input from the first light input end is coupled to the second light output end for outputting, and at least one part of the light input from the second light input end is coupled to the first light output end for outputting.
4. The method of claim 3, wherein the polymer is a photoresist having a light transmittance greater than a predetermined light transmittance threshold.
5. The method of claim 3, wherein the curing process is selected from the group consisting of:
ultraviolet curing treatment, laser curing treatment, electron beam curing treatment and thermal curing treatment.
6. An optical waveguide directional coupler, comprising:
a first silicon oxide layer;
the first waveguide and the second waveguide are arranged in parallel and are positioned on the surface of the first silicon oxide layer;
a second silica layer covering the first waveguide and the second waveguide;
a trench between the first waveguide and the second waveguide, the trench penetrating the second silicon dioxide layer.
7. The optical waveguide directional coupler of claim 6, wherein the first waveguide comprises a first optical input and a first optical output, and the second waveguide comprises a second optical input and a second optical output;
the optical waveguide directional coupler further comprises:
a cured polymer within the trench such that at least a portion of light input from the first light input is coupled to the second light output and at least a portion of light input from the second light input is coupled to the first light output.
8. An optical network, comprising:
a plurality of optical waveguide directional couplers according to claim 6, each having a respective first waveguide and second waveguide;
wherein, the adjacent optical waveguide directional couplers are connected through the respective first waveguides or second waveguides.
9. A method for controlling an optical network according to claim 8, comprising:
determining an optical waveguide directional coupler which needs to be changed from straight-through output to coupled output, and recording the optical waveguide directional coupler as a first optical waveguide directional coupler;
and filling a polymer in the groove of the first optical waveguide directional coupler and carrying out curing treatment, so that at least one part of light input from the first light input end of each optical waveguide directional coupler is coupled to the second light output end of the optical waveguide directional coupler and at least one part of light input from the second light input end of each optical waveguide directional coupler is coupled to the first light output end of the optical waveguide directional coupler.
10. The method of claim 9, further comprising:
determining an optical waveguide directional coupler which needs to be changed from coupled output to through output, and marking the optical waveguide directional coupler as a second optical waveguide directional coupler;
removing the polymer in the second optical waveguide directional couplers so that light input from the first optical input of each optical waveguide directional coupler passes through to the first optical output of that optical waveguide directional coupler and light input from the second optical input of each optical waveguide directional coupler passes through to the second optical output of that optical waveguide directional coupler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110063846.XA CN112904483B (en) | 2021-01-18 | 2021-01-18 | Optical waveguide directional coupler and forming method thereof, optical network and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110063846.XA CN112904483B (en) | 2021-01-18 | 2021-01-18 | Optical waveguide directional coupler and forming method thereof, optical network and control method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112904483A true CN112904483A (en) | 2021-06-04 |
| CN112904483B CN112904483B (en) | 2022-11-04 |
Family
ID=76115532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110063846.XA Active CN112904483B (en) | 2021-01-18 | 2021-01-18 | Optical waveguide directional coupler and forming method thereof, optical network and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112904483B (en) |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05346516A (en) * | 1992-06-16 | 1993-12-27 | Fujitsu Ltd | Manufacture of optical directional coupler |
| JPH10186153A (en) * | 1996-12-24 | 1998-07-14 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide type directional coupler and its manufacture |
| JPH10206911A (en) * | 1997-01-17 | 1998-08-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical monitor circuit and it production |
| US20040013357A1 (en) * | 2002-07-22 | 2004-01-22 | Intel Corporation | Optical coupler apparatus and methods having reduced geometry sensitivity |
| JP2004354960A (en) * | 2002-09-05 | 2004-12-16 | Fibest Ltd | Optical switch, directional coupler type modulator with non-crossed electrode, and optical communication system |
| JP2005106867A (en) * | 2003-09-26 | 2005-04-21 | Kddi Corp | Directional coupler and add/drop multiplexer |
| US20050259923A1 (en) * | 2003-05-20 | 2005-11-24 | Sriram Sriram S | Optical coupler |
| JP2006171173A (en) * | 2004-12-14 | 2006-06-29 | Omron Corp | Optical module and its manufacturing method |
| CN1878035A (en) * | 2006-06-05 | 2006-12-13 | 四川飞阳科技有限公司 | Hybrid integrated silicon-based photosignal processing chip |
| CN101027582A (en) * | 2004-06-16 | 2007-08-29 | 日立化成工业株式会社 | Optical waveguide structure, optical-waveguide-type optical module and optical fiber array |
| CN104078739A (en) * | 2014-07-29 | 2014-10-01 | 电子科技大学 | Graphene-based directional coupler |
| CN104570404A (en) * | 2014-12-22 | 2015-04-29 | 中国电子科技集团公司第三十八研究所 | Optical wave beam forming network chip based on thermal optical modulation and preparing method thereof |
| US20160327742A1 (en) * | 2015-05-05 | 2016-11-10 | Huawei Technologies Co., Ltd. | Optical coupling scheme |
| CN106468809A (en) * | 2015-08-19 | 2017-03-01 | 乾坤科技股份有限公司 | Photoelectricity module and its manufacture method |
| CN109407215A (en) * | 2018-11-15 | 2019-03-01 | 杭州芯耘光电科技有限公司 | A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber |
| CN111175898A (en) * | 2020-01-30 | 2020-05-19 | 吉林大学 | Silicon dioxide-polymer three-dimensional MZI waveguide thermo-optical switch and preparation method thereof |
| CN111290191A (en) * | 2020-02-19 | 2020-06-16 | 联合微电子中心有限责任公司 | Directional coupler and optical switch based on silicon nitride platform |
| US20200241202A1 (en) * | 2019-01-28 | 2020-07-30 | Cisco Technology, Inc. | Silicon photonics platform with integrated oxide trench edge coupler structure |
-
2021
- 2021-01-18 CN CN202110063846.XA patent/CN112904483B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05346516A (en) * | 1992-06-16 | 1993-12-27 | Fujitsu Ltd | Manufacture of optical directional coupler |
| JPH10186153A (en) * | 1996-12-24 | 1998-07-14 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide type directional coupler and its manufacture |
| JPH10206911A (en) * | 1997-01-17 | 1998-08-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical monitor circuit and it production |
| US20040013357A1 (en) * | 2002-07-22 | 2004-01-22 | Intel Corporation | Optical coupler apparatus and methods having reduced geometry sensitivity |
| JP2004354960A (en) * | 2002-09-05 | 2004-12-16 | Fibest Ltd | Optical switch, directional coupler type modulator with non-crossed electrode, and optical communication system |
| US20050259923A1 (en) * | 2003-05-20 | 2005-11-24 | Sriram Sriram S | Optical coupler |
| JP2005106867A (en) * | 2003-09-26 | 2005-04-21 | Kddi Corp | Directional coupler and add/drop multiplexer |
| CN101027582A (en) * | 2004-06-16 | 2007-08-29 | 日立化成工业株式会社 | Optical waveguide structure, optical-waveguide-type optical module and optical fiber array |
| JP2006171173A (en) * | 2004-12-14 | 2006-06-29 | Omron Corp | Optical module and its manufacturing method |
| CN1878035A (en) * | 2006-06-05 | 2006-12-13 | 四川飞阳科技有限公司 | Hybrid integrated silicon-based photosignal processing chip |
| CN104078739A (en) * | 2014-07-29 | 2014-10-01 | 电子科技大学 | Graphene-based directional coupler |
| CN104570404A (en) * | 2014-12-22 | 2015-04-29 | 中国电子科技集团公司第三十八研究所 | Optical wave beam forming network chip based on thermal optical modulation and preparing method thereof |
| US20160327742A1 (en) * | 2015-05-05 | 2016-11-10 | Huawei Technologies Co., Ltd. | Optical coupling scheme |
| CN106468809A (en) * | 2015-08-19 | 2017-03-01 | 乾坤科技股份有限公司 | Photoelectricity module and its manufacture method |
| CN109407215A (en) * | 2018-11-15 | 2019-03-01 | 杭州芯耘光电科技有限公司 | A kind of coupling process of silicon based opto-electronics chip and single mode optical fiber |
| US20200241202A1 (en) * | 2019-01-28 | 2020-07-30 | Cisco Technology, Inc. | Silicon photonics platform with integrated oxide trench edge coupler structure |
| CN111175898A (en) * | 2020-01-30 | 2020-05-19 | 吉林大学 | Silicon dioxide-polymer three-dimensional MZI waveguide thermo-optical switch and preparation method thereof |
| CN111290191A (en) * | 2020-02-19 | 2020-06-16 | 联合微电子中心有限责任公司 | Directional coupler and optical switch based on silicon nitride platform |
Non-Patent Citations (3)
| Title |
|---|
| MORTEZA REZAEE等: "Groove Gap waveguide filter based on horizontally polarized resonators for v-band applications", 《IEEE TRANSACTION ON MICROWAVE THEORY AND TECHNOLOGY》 * |
| YONGRONG SHI等: "Half-Air-filled ball-grid-array-based substrate-integrated groove-gap waveguide and its transition to microship at w-band", 《IEEE TRANSACTION ON MICROWAVE THEORY AND TECHNOLOGY》 * |
| 曹伟: "波导管孔隙耦合", 《南京邮电学院学报》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112904483B (en) | 2022-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Mehdizadeh et al. | Proposal for 4‐to‐2 optical encoder based on photonic crystals | |
| Kuramochi et al. | Large-scale integration of wavelength-addressable all-optical memories on a photonic crystal chip | |
| US6913871B2 (en) | Fabricating sub-resolution structures in planar lightwave devices | |
| US6972894B2 (en) | Optical wavelength converter | |
| US20030053785A1 (en) | Photon transistors | |
| Xavier et al. | Compact photonic crystal integrated circuit for all‐optical logic operation | |
| EP2275863A2 (en) | Optical device and circuit using phase modulation and related methods | |
| JPH10319257A (en) | Low-loss optically active element and its production | |
| US6037105A (en) | Optical waveguide device fabricating method | |
| JP6233300B2 (en) | Optical phase modulation element, element setting method, optical functional circuit, and optical matrix circuit | |
| CN114510213A (en) | Optical nonlinear and amplifying device for optical neural network | |
| Yoshimura et al. | Self-organized lightwave network based on waveguide films for three-dimensional optical wiring within boxes | |
| CN112904483B (en) | Optical waveguide directional coupler and forming method thereof, optical network and control method thereof | |
| Dorkenoo et al. | Control of the Refractive Index in Photopolymerizable Materials<? format?> for (2+ 1) D Solitary Wave Guide Formation | |
| Grabulosa et al. | Additive 3D photonic integration that is CMOS compatible | |
| US20210088728A1 (en) | 3d printed fiber optic connector end face and method of manufacture | |
| GB2322713A (en) | Method for fabricating low-loss optically active device | |
| Saadi et al. | All‐optical half adder based on non‐linear triangular lattice photonic crystals with improved contrast ratio | |
| CA2385600A1 (en) | Photon transistors | |
| CN117872533A (en) | Reconfigurable all-optical nonlinear activation function on silicon integrated platform | |
| CN114089473B (en) | On-chip microcavity photon integrated chip structure and preparation method thereof | |
| WO2020261441A1 (en) | Semiconductor optical modulator and method for manufacturing same | |
| EP1182472B1 (en) | Optical element and method of fabrication thereof | |
| Schoenfeld et al. | Enhanced performance of polymer waveguides by replication and UV patterning in ORMOCER | |
| Smit et al. | Current status and prospects of photonic IC technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |