CN112903154A - Extrinsic optical fiber Fabry-Perot interference pressure sensor - Google Patents
Extrinsic optical fiber Fabry-Perot interference pressure sensor Download PDFInfo
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- CN112903154A CN112903154A CN202110358327.6A CN202110358327A CN112903154A CN 112903154 A CN112903154 A CN 112903154A CN 202110358327 A CN202110358327 A CN 202110358327A CN 112903154 A CN112903154 A CN 112903154A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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Abstract
The invention relates to the technical field of optical fiber sensing, in particular to an extrinsic optical fiber Fabry-Perot interference pressure sensor, which comprises a stress cylinder, a shell, a support ring and an insert core with an optical fiber; one end face of the stress cylinder is connected with the shell through threads, the end face penetrates into the shell and is fixedly connected with the support ring, a cavity is reserved between the end face and the support ring, and the FC/UPC ceramic ferrule is fixed at a central hole of the support ring; the optical fiber inside the inserting core is vertical to the end face of the stress cylinder, and the end face of the stress cylinder, the optical fiber inside the inserting core and a gap between the end face of the stress cylinder and the optical fiber inside the inserting core form a Fabry-Perot cavity of the extrinsic Fabry-Perot interference pressure sensor. The extrinsic optical fiber Fabry-Perot interference pressure sensor is insensitive to a measuring medium, can meet the capability of simultaneously monitoring liquid and gas, and is applied to the technical field of optical fiber sensing.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to an extrinsic optical fiber Fabry-Perot interference pressure sensor.
Background
Pressure measurement has wide requirements in engineering technology and daily life, and has the widest market. The most familiar are "atmospheric pressure" and "vacuum," which are the most typical pressure expressions. In order to meet the pressure measurement requirements in different places, various advanced pressure measurement sensors are generated, and the pressure measurement sensors are of mechanical structure pointer type, electromechanical type, piezoresistive type, resonant type and the like.
However, the existing traditional mechanical pointer interference pressure sensor cannot realize automatic acquisition and reading of data, and has low precision; the electromechanical and piezoresistive pressure sensors have large attenuation of long-distance transmission signals, complex structural design and higher production process requirements; the resonant sensor is sensitive to a measuring medium and cannot meet the capability of simultaneously monitoring liquid and gas; the existing Fabry-Perot optical fiber sensor also has the problems of sensitivity to media, poor anti-interference capability, insufficient measurement precision and the like; therefore, the existing sensor generally has the defects of low precision, sensitivity to a measuring medium, complex process structure and the like.
Disclosure of Invention
The invention aims to provide an extrinsic optical fiber Fabry-Perot interference pressure sensor insensitive to a measuring medium.
The basic scheme provided by the invention is as follows: an extrinsic optical fiber Fabry-Perot interference pressure sensor is characterized by comprising a stress cylinder, a shell, a support ring and a ferrule with an optical fiber;
one end face of the stress cylinder is connected with the shell through threads, the end face penetrates into the shell and is fixedly connected with the support ring, a cavity is reserved between the end face penetrating into the shell and the support ring, and the inserting core is fixed at a central hole of the support ring; the optical fiber inside the inserting core is vertical to the end face of the stress cylinder, and the end face of the stress cylinder, the optical fiber inside the inserting core and a gap between the end face of the stress cylinder and the optical fiber inside the inserting core form a Fabry-Perot cavity of the extrinsic Fabry-Perot interference pressure sensor.
The principle and the advantages of the invention are as follows: the main sensitive element in the scheme is the stress cylinder, the displacement generated by the deformation of the end face of the stress cylinder is mainly measured through light interference, the measurement principle and the structure are simple, and compared with the traditional electromechanical pressure sensor, the complex processing technology of the sensitive element for obtaining larger deformation and the complex mechanism for converting mechanical displacement into electrical signals such as resistance, inductance or capacitance are reduced; compared with the most fiery silicon piezoresistive interference pressure sensor in the current market, the input and research and development of the silicon core body MEMS processing technology are reduced, and the technical difficulty is greatly reduced; the pressure of the whole extrinsic type optical fiber Fabry-Perot interference pressure sensor is only transmitted into the stress cylinder, and the risk of pressure and leakage of a measuring medium does not exist; meanwhile, the end face of the Fabry-Perot cavity of the extrinsic optical fiber Fabry-Perot interference pressure sensor is arranged on the outer end face of the stress cylinder and is in a sealed state, and the Fabry-Perot cavity is not in contact with a measuring medium and the external environment, so that the extrinsic optical fiber Fabry-Perot interference pressure sensor is insensitive to the measuring medium.
Furthermore, the stress cylinder is made of a corrosion-resistant metal material with constant elastic modulus at high and low temperatures.
Has the advantages that: the stress cylinder in the scheme adopts a corrosion-resistant metal material with constant elastic modulus at high and low temperatures, so that the constant sensitivity coefficient of the stress cylinder can be ensured, and the extrinsic optical fiber Fabry-Perot interference pressure sensor can be suitable for high-temperature, high-pressure and corrosive environments.
Furthermore, the roughness range of the end face of the stress cylinder is Ra0.2-Ra0.05.
Has the advantages that: the grinding smoothness improves the reflectivity of the end face and the measurement accuracy.
Furthermore, a circular boss is arranged on the end face of the stress cylinder corresponding to the central hole of the support ring.
The pressure sensor with the stress cylinder has the advantages that the diameter, the thickness and the deflection of the end face of the stress cylinder can be changed to manufacture pressure sensors with different ranges, the circular bosses are arranged on the end face of the stress cylinder, workers only need to operate the circular bosses when manufacturing the pressure sensors with different ranges, and the workers only need to arrange the circular bosses in the areas where incident light is reflected and can only polish the circular bosses when polishing the stress cylinder, so that the operation of the workers is facilitated.
Further, the end face of the stress cylinder is connected with the support ring through threads.
Has the advantages that: the end face of the stress cylinder is connected with the support ring through threads, the dismounting process is simple, and the working personnel can conveniently replace the extrinsic optical fiber Fabry-Perot interference pressure sensors with different ranges to measure.
Further, the support ring is also provided with a through hole.
Has the advantages that: through holes are formed in the support ring, and the ventilation gauge pressure sensor can be formed.
Further, the surface of the support ring is also provided with a pressure connection joint.
Has the advantages that: providing a pressure connection joint on the support ring surface may form a differential pressure sensor.
Furthermore, the end face of the stress cylinder which does not go deep into the shell is also provided with a threaded interface.
Has the advantages that: through the threaded interface on the stress cylinder, threaded connection can be carried out when measuring water pressure, so that connection is stable, and measurement accuracy is higher.
Further, the device also comprises a photoelectric demodulator and a transmission optical cable;
the photoelectric demodulator comprises a wavelength scanning laser, an optical isolator, an optical coupler, an electric signal processing module, a first photoelectric detection module, a second photoelectric detection module and a CPU (central processing unit);
the wavelength scanning laser, the optical isolator and the optical coupler are sequentially connected through an optical path, the first photoelectric detection module and the second photoelectric detection module are both connected with the optical path of the optical coupler, the first photoelectric detection module and the second photoelectric detection module are both electrically connected with the electric signal processing module, and the electric signal processing module is electrically connected with the CPU;
the optical coupler is connected with the inserting core through a transmission optical cable.
Has the advantages that: the photoelectric demodulator in the scheme is a wavelength scanning type demodulator, when the photoelectric demodulator is continuously scanned from a low waveband to a high waveband, coherent light meets the condition that the light intensity is increased when the interference level is integral multiple under certain frequency spectrums, and the light intensity is cancelled when the interference level is integral multiple plus 0.5, so that a similar sinusoidal curve with unequal periods containing relevant change characteristics of the Fabry-Perot cavity length can be formed when a curve is drawn according to the light intensity in the spectrum frequency domain range, and the photoelectric demodulator realizes the calculation of the absolute cavity length by extracting relevant information; the photoelectric demodulator is connected to the inserting core through the transmission optical cable, only optical signals are transmitted in the optical fiber, excitation of electric signals such as voltage, current, capacitance and inductance is not needed, no electric signal is generated, and the photoelectric demodulator is applied to the fields of petroleum, chemical engineering, mines, underground pipe galleries, nuclear radiation and the like and has the advantages of being safe and reliable in nature, long in service life and the like.
Furthermore, the photoelectric demodulator is also used for multi-channel synchronous measurement, and the photoelectric demodulator can connect a plurality of sensors and the multi-channel photoelectric demodulator into an optical fiber sensing network.
Has the advantages that: the Mige sensor is connected with the radio and television demodulator through a single optical fiber, the transmission distance can reach nearly 20km, a plurality of sensors share one photoelectric demodulator, the number of demodulation modules, communication base stations and the like of the traditional electric sensor are reduced, and the sensor network is easy to monitor on line and form by networking.
Drawings
Fig. 1 is a schematic structural diagram of a fabry-perot interference device of an extrinsic optical fiber fabry-perot interference pressure sensor according to an embodiment of the present invention.
Fig. 2 is an enlarged view of a portion a in fig. 1.
Fig. 3 is a schematic structural diagram of a photoelectric demodulator of the extrinsic optical fiber fabry-perot interference pressure sensor according to the embodiment of the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the device comprises a stress cylinder 1, a support ring 2, a shell 3, an FC/UPC ceramic ferrule 4, an optical fiber 5, a transmission optical cable 6 and a Fabry-Perot cavity 7.
The embodiment is basically as shown in the attached figure 1:
the specific implementation process is as follows:
example one
An extrinsic optical fiber Fabry-Perot interference pressure sensor comprises a Fabry-Perot interference device, a transmission optical cable 6 and a photoelectric demodulator.
The Fabry-Perot interference device comprises a stress cylinder 1, a shell 3, a support ring 2 and an FC/UPC ceramic ferrule 4 with a single-mode fiber 5;
as shown in the attached figure 1, one end face of the stress cylinder 1 is connected with the shell 3 through threads, the end face extends into the shell 3 and is fixedly connected with the support ring 2, a cavity is reserved between the end face and the support ring 2, and the FC/UPC ceramic ferrule 4 is fixed at a central hole of the support ring 2 through an adhesive; as shown in fig. 2, the optical fiber 5 inside the FC/UPC ferrule 4 is perpendicular to the end face of the stress cylinder 1, and the end face of the stress cylinder 1, the optical fiber 5 inside the FC/UPC ferrule 4 and the air in the gap between the two constitute a fabry-perot cavity 7 of the fabry-perot interference device; when the pressure of the stress cylinder 1 is increased or decreased, the end face of the stress cylinder 1 can be bent and deformed to increase or decrease the cavity length of the Fabry-Perot cavity 7, the change quantity of the cavity length of the Fabry-Perot cavity 7 is in a direct proportion relation with the pressure change, and the end face of the stress cylinder 1 in the scheme can be slightly deformed from several micrometers to dozens of micrometers under the condition of changing from zero pressure to full-scale pressure.
Wherein, the end face of the stress cylinder 1 in this embodiment is provided with a circular boss corresponding to the central hole of the support ring 2, the roughness of the surface of the circular boss after polishing is Ra0.2, and the stress cylinder 1 is made of corrosion-resistant metal high-temperature alloy (GH4145) with constant elastic modulus at high and low temperatures: (American Standard ASTM): Inconel x-750/W. Nr.2.4669.
The photoelectric demodulator comprises a wavelength scanning laser, an optical isolator, an optical coupler, an electric signal processing module, a first photoelectric detection module, a second photoelectric detection module and a CPU (central processing unit);
as shown in fig. 3, the wavelength scanning laser, the optical isolator and the optical coupler are sequentially connected through an optical path, the first photoelectric detection module and the second photoelectric detection module are both connected with the optical path of the optical coupler, the first photoelectric detection module and the second photoelectric detection module are both electrically connected with the electric signal processing module, and the electric signal processing module is electrically connected with the CPU;
the transmission optical cable 6 is connected to the optical coupler and inserted into the FC/UPC ceramic ferrule 4, so that light emitted by the photoelectric demodulator can be effectively transmitted to the Fabry-Perot interference device, and meanwhile, optical signals reflected by the Fabry-Perot interference device are received.
The photoelectric demodulator in the embodiment belongs to a wavelength scanning type demodulator, and can be simultaneously and respectively connected with 40 Fabry-Perot interference devices through a single optical fiber 5, and the transmission distance can reach 20 km; the wavelength scanning light signal is generated by a wavelength scanning laser, the wavelength scanning laser outputs a narrow-band wavelength which is monotonously changed along with time under the driving of scanning driving voltage, the wavelength scanning is realized, and light beams are distributed to each channel, so that each Fabry-Perot interference device of a plurality of channels is scanned by taking time as a variable according to time sequence; incident light passes through the optical coupling isolator and the coupler, an optical signal is output to the Fabry-Perot interference device along the transmission optical cable 6 and reflected, and the photoelectric detector detects the intensity of the optical signal reflected by the Fabry-Perot interference device; therefore, each time the wavelength scanning laser scans once, the photoelectric detector can obtain a reflected light spectrum signal, the combination of the intensity of the light corresponding to different wavelengths in the reflected light spectrum signal group comprises the pressure information of the Fabry-Perot interference device, and the photoelectric demodulator sets and stores each parameter of the Fabry-Perot cavity 7 in the Fabry-Perot interference device, so as to read the pressure.
Specifically, incident light emitted by a photoelectric demodulator is transmitted to the end face of an optical fiber 5 at the FC/UPC ceramic ferrule 4 along a transmission optical cable 6, light with a certain proportion of intensity is reflected along the original optical fiber 5 to form first reflected light, the rest light is transmitted out, the transmitted light is incident on a circular boss of the stress cylinder 1 after passing through an air gap of hundreds of microns, the surface of the boss can be polished to form mirror reflection, the incident light is reflected and then re-incident into the optical fiber 5 inside the FC/UPC ceramic ferrule 4 to form second reflected light, the wavelength reflected by the photoelectric demodulator still belongs to the same-frequency light at the moment when the first reflected light meets the second reflected light, the second reflected light and the first reflected light have an optical path difference which is 2 times of the cavity length of the Fabry-Perot cavity 7, and the two beams of reflected light meet the interference condition of parallel beams to form coherent light.
Under the condition that the Fabry-Perot cavity 7 is fixed, when the photoelectric demodulator continuously scans from a low waveband to a high waveband, the scanning speed is higher than 500kHz, the time consumption is very short and is far lower than the time for changing the cavity length caused by the pressure change of the interference pressure sensor in a dynamic range, the relative distance change of two reflecting light end faces can be accurately measured, and the accurate measurement accuracy can reach 0.01 mu m; in addition, when the interference order of the coherent light is integral multiple under certain frequency spectrums, the light intensity is increased; when the interference order is an integer times plus 0.5 times, the light intensity is cancelled; at the moment, a curve is drawn in the whole spectrum frequency domain range according to light intensity, the curve can form a similar sinusoidal curve with a constant period containing the relevant change characteristics of the Fabry-Perot cavity 7 cavity length, and the photoelectric demodulator realizes absolute cavity length calculation by extracting relevant information.
In addition, the stress cylinder 1 in the scheme can be made into extrinsic type optical fiber Fabry-Perot interference pressure sensors with different ranges only by changing the diameter and the end part thickness of the stress cylinder 1 and designing the deflection of the end part according to the pressure range, and the extrinsic type optical fiber Fabry-Perot interference pressure sensors with other ranges can be more conveniently replaced by connecting the stress cylinder 1 and the shell 3 through threads.
Example two
The difference between the second embodiment and the first embodiment is that the surface of the support ring 2 is provided with through holes, so that the ambient pressure enters the Fabry-Perot interference device, and the initial pressure formed by the expansion of the air inside the Fabry-Perot interference device due to the temperature change is eliminated, thereby forming the ventilation gauge pressure sensor.
EXAMPLE III
The difference between the third embodiment and the first embodiment is that the surface of the support ring 2 is provided with a pressure sensor joint, so that the fabry-perot interference device can measure the difference between the pressure of the medium and the pressure of the atmospheric pressure to form a differential pressure sensor.
Example four
The fourth embodiment is different from the first embodiment only in that a circular boss is arranged at the end face of the stress cylinder 1 corresponding to the central hole of the support ring 2 in the first embodiment, the surface of the circular boss is polished to have a roughness of Ra0.05, and the other end face of the stress cylinder 1 is further provided with a threaded connector which can be used for connecting a water pipe and is fixed through threaded connection, so that the accuracy of the result of measuring the water pressure is higher.
The foregoing are merely exemplary embodiments of the present invention, and no attempt is made to show structural details of the invention in more detail than is necessary for the fundamental understanding of the art, the description taken with the drawings making apparent to those skilled in the art how the several forms of the invention may be embodied in practice with the teachings of the invention. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (10)
1. An extrinsic optical fiber Fabry-Perot interference pressure sensor is characterized by comprising a stress cylinder, a shell, a support ring and a ferrule with an optical fiber;
one end face of the stress cylinder is connected with the shell through threads, the end face penetrates into the shell and is fixedly connected with the support ring, a cavity is reserved between the end face penetrating into the shell and the support ring, and the inserting core is fixed at a central hole of the support ring; the optical fiber inside the inserting core is vertical to the end face of the stress cylinder, and the end face of the stress cylinder, the optical fiber inside the inserting core and a gap between the end face of the stress cylinder and the optical fiber inside the inserting core form a Fabry-Perot cavity of the extrinsic Fabry-Perot interference pressure sensor.
2. The extrinsic fiber Fabry-Perot interferometric pressure sensor according to claim 1, characterized in that the stress cylinder is made of a corrosion-resistant metal material with constant modulus of elasticity at high and low temperatures.
3. The extrinsic fiber Fabry-Perot interference pressure sensor according to claim 1, wherein the roughness of the end face of the stress cylinder ranges from Ra0.2 to Ra0.05.
4. The extrinsic fiber Fabry-Perot interference pressure sensor according to claim 3, wherein the end face of the stress cylinder is provided with a circular boss corresponding to the central hole of the support ring.
5. The extrinsic fiber Fabry-Perot interference pressure sensor according to claim 4, wherein the end face of the stress cylinder is screwed to the support ring.
6. The extrinsic fiber Fabry-Perot interferometric pressure sensor according to claim 1, characterized in that the surface of the support ring is further provided with through holes.
7. The extrinsic fiber Fabry-Perot interferometric pressure sensor according to claim 1, characterized in that the surface of the support ring is further provided with a pressure connection joint.
8. The extrinsic fiber Fabry-Perot interferometric pressure sensor according to claim 1, characterized in that the end face of the stress cylinder not penetrating into the housing is further provided with a threaded interface.
9. The extrinsic fiber Fabry-Perot interferometric pressure sensor of claim 1, further comprising a photo-electric demodulator and a transmission cable;
the photoelectric demodulator comprises a wavelength scanning laser, an optical isolator, an optical coupler, an electric signal processing module, a first photoelectric detection module, a second photoelectric detection module and a CPU (central processing unit);
the wavelength scanning laser, the optical isolator and the optical coupler are sequentially connected through an optical path, the first photoelectric detection module and the second photoelectric detection module are both connected with the optical path of the optical coupler, the first photoelectric detection module and the second photoelectric detection module are both electrically connected with the electric signal processing module, and the electric signal processing module is electrically connected with the CPU;
the optical coupler is connected with the inserting core through a transmission optical cable.
10. The extrinsic fiber Fabry-Perot interferometric pressure sensor according to claim 9, characterized in that the optical demodulator is also used for multi-channel synchronous measurement, and the optical demodulator can connect multiple sensors with a multi-channel optical demodulator to form a fiber-optic sensing network.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113586958A (en) * | 2021-08-26 | 2021-11-02 | 湖南金博碳素股份有限公司 | Automatic gas filling equipment |
| CN116086686A (en) * | 2022-09-22 | 2023-05-09 | 重庆大学 | High-temperature and high-frequency-response-resistant aeroengine pulse pressure sensor and manufacturing method thereof |
| CN116164781A (en) * | 2023-04-21 | 2023-05-26 | 西北工业大学 | MEMS sensor based on optical fiber F-P cavity and packaging method thereof |
-
2021
- 2021-04-01 CN CN202110358327.6A patent/CN112903154A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113586958A (en) * | 2021-08-26 | 2021-11-02 | 湖南金博碳素股份有限公司 | Automatic gas filling equipment |
| CN116086686A (en) * | 2022-09-22 | 2023-05-09 | 重庆大学 | High-temperature and high-frequency-response-resistant aeroengine pulse pressure sensor and manufacturing method thereof |
| CN116164781A (en) * | 2023-04-21 | 2023-05-26 | 西北工业大学 | MEMS sensor based on optical fiber F-P cavity and packaging method thereof |
| CN116164781B (en) * | 2023-04-21 | 2023-07-07 | 西北工业大学 | MEMS sensor based on optical fiber F-P cavity and packaging method thereof |
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