CN112901968A - Linear guide rail type lifting platform and laser direct-writing type imaging equipment - Google Patents
Linear guide rail type lifting platform and laser direct-writing type imaging equipment Download PDFInfo
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- CN112901968A CN112901968A CN202110134122.XA CN202110134122A CN112901968A CN 112901968 A CN112901968 A CN 112901968A CN 202110134122 A CN202110134122 A CN 202110134122A CN 112901968 A CN112901968 A CN 112901968A
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- 238000003384 imaging method Methods 0.000 title abstract description 6
- 230000000712 assembly Effects 0.000 claims description 23
- 238000000429 assembly Methods 0.000 claims description 23
- 238000003825 pressing Methods 0.000 claims description 12
- 230000003028 elevating effect Effects 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000009434 installation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/24—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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Abstract
The invention provides a linear guide rail type lifting platform and laser direct-writing imaging equipment, wherein the lifting platform comprises a lifting platform body, and the lifting platform body comprises a platform, a wedge block assembly, a guide rail assembly and a driving assembly; the platform comprises a top platform and a bottom platform, the wedge block assembly comprises a first wedge block and a second wedge block, the first wedge block is matched with the second wedge block, the first wedge block is fixedly connected with the lower surface of the top platform, the guide rail assembly comprises a first guide rail and a second guide rail which are linear, and the first guide rail and the second guide rail are respectively and fixedly arranged on the second wedge block; the drive assembly is fixedly mounted on the bottom platform, and the second wedge block moves in the horizontal direction under the driving force of the drive assembly, so that the top platform moves in the vertical direction. According to the lifting platform provided by the invention, the linear guide rail assembly is arranged between the wedge block assembly and the platform, so that the lifting precision is ensured, and meanwhile, the processing difficulty of the wedge-shaped inclined plane and the assembly difficulty are reduced.
Description
Technical Field
The invention relates to the field of exposure equipment, in particular to a linear guide rail type lifting platform and laser direct-writing type imaging equipment.
Background
The Z-axis lifting platform in the DI exposure equipment is used as one of key mechanical structures and is used for compensating and exposing the PCB with different thicknesses, so that the accurate focusing of the PCB exposure surface is realized to ensure good exposure performance, and the lifting precision of the Z-axis lifting platform plays an important role in the exposure performance.
In order to ensure the precision and stably bear the anisotropic force of a Z-axis lifting platform mechanism in the prior art, a crossed guide rail is used between a platform and a guide rail connecting part of a wedge-shaped sliding block, and the crossed guide rail is horizontally arranged close to a high-precision inclined plane so as to carry out high-precision control on the installation inclined plane. However, the installation adjustment of the cross guide is more complicated than that of the general linear guide, and the lifting platform mechanism including the cross guide becomes difficult in terms of both the difficulty of processing and the difficulty of assembling.
Disclosure of Invention
In view of this, the present invention provides a linear guide type lifting platform, which utilizes a common linear guide, thereby reducing the processing difficulty and the assembly difficulty.
In order to solve the technical problems, the invention adopts the following technical scheme:
the linear guide rail type lifting platform comprises a lifting platform body, wherein the lifting platform body comprises:
a platform comprising a top platform and a bottom platform, the top platform being parallel to the bottom platform;
a wedge assembly located between the top deck and the bottom deck; the wedge assembly comprises a first wedge and a second wedge, the first wedge is matched with the second wedge, and the first wedge is fixedly connected with the lower surface of the top platform;
the guide rail assembly comprises a first sliding block, a second sliding block, a linear first guide rail and a linear second guide rail, the first guide rail and the second guide rail are respectively and fixedly installed on the second wedge block, and the second guide rail is parallel to the plane of the upper surface of the second wedge block; the first sliding block is fixedly arranged on the upper surface of the bottom platform, and the second sliding block is fixedly connected with the first wedge block; the first guide rail is connected with the first sliding block in a sliding mode, and the second guide rail is connected with the second sliding block in a sliding mode;
and the driving assembly is fixedly arranged on the bottom platform, and the second wedge block moves along the horizontal direction under the driving force of the driving assembly so as to enable the top platform to move in the vertical direction.
Preferably, one end of the second wedge block close to the first wedge block is provided with a first notch, and the first notch is positioned on the side edge of the first wedge block; the second guide rail is fixedly arranged in the first gap.
Preferably, a plurality of guide rail pressing blocks are installed at the first notch, and the guide rail pressing blocks are fixedly installed on the second wedge block; part of the guide rail pressing block is positioned in the first notch.
Preferably, a second notch is formed in one end, close to the bottom platform, of the second wedge block, the second notch is located at the bottom end of the second wedge block, the first guide rail is matched with the second notch, and the first guide rail is fixedly installed in the second notch.
Preferably, the lifting platform body comprises two wedge assemblies symmetrically arranged at two sides of the bottom platform.
Preferably, the lifting platform body further comprises a connecting piece, and the connecting piece is fixedly connected with the two wedge block assemblies; the connecting piece and the upper surfaces of the two wedge block assemblies are positioned on the same plane.
Preferably, the driving assembly comprises a motor and a lead screw assembly, the lead screw assembly is fixedly connected with the wedge block assembly, and the wedge block assembly is driven by the motor to reciprocate along the first guide rail direction along with the lead screw assembly.
Preferably, the lifting platform body further comprises a plurality of guide assemblies, and the guide assemblies are fixedly mounted on the bottom platform; the guide assembly comprises a base, a vertical sliding block and a vertical guide rail; the base is fixedly installed on the bottom platform, the base is fixedly connected with the vertical sliding block, the vertical sliding block is connected with the vertical guide rail in a sliding mode, and the vertical guide rail moves in the vertical direction.
Preferably, a fixing column matched with the vertical guide rail is fixedly installed on the top platform, and the fixing column is fixedly connected with the vertical guide rail; when the top platform moves, the vertical guide rail guides the top platform to move along the vertical direction.
The invention also provides laser direct-writing type imaging equipment which comprises any one of the linear guide rail type lifting platform.
The technical scheme of the invention at least has one of the following beneficial effects:
according to the linear guide rail type lifting platform disclosed by the invention, the linear guide rail assembly is arranged between the wedge block assembly and the platform, so that the lifting precision is ensured, and meanwhile, the processing difficulty of the wedge-shaped inclined plane and the assembly difficulty are reduced.
Drawings
FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;
FIG. 2 is a schematic partial structure diagram according to an embodiment of the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2;
fig. 4 is a schematic structural diagram of a top platform in an embodiment of the invention.
Reference numerals:
100. a lifting platform body; 11. a top platform; 111. fixing a column; 1111. a fixing hole; 12. a bottom platform; 21. a first wedge; 22. a second wedge; 221. a first notch; 222. a second notch; 23. a connecting member; 31. a first guide rail; 32. a second guide rail; 33. a first slider; 34. a second slider; 35. a guide rail pressing block; 40. a guide assembly; 41. a vertical guide rail; 42. a vertical slide block; 43. a base; 51. a drive assembly; 52. lead screw subassembly.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In order to ensure the precision and stably bear the anisotropic force of a Z-axis lifting platform mechanism in the prior art, a cross guide rail is used between a platform and a guide rail connecting part of a wedge-shaped sliding block. However, in the embodiment of the present application, the guide rails in two directions are used for simultaneously guiding, while the assembly requirement of the cross guide rail is higher, especially the machining requirement on the wedge inclined surface, when the guide rails in two directions are simultaneously guided, the lifting precision of the lifting platform cannot be achieved, and the main reason is that the machining precision requirement of the wedge is too high.
To above-mentioned problem this application embodiment replaces cross guide through linear type guide rail, has not only reduced the machining precision of voussoir and has reduced the assembly degree of difficulty when guaranteeing lift platform elevating accuracy.
First, a linear guide type elevating platform according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
Specifically, as shown in fig. 1 and fig. 2, the linear guide type lifting platform provided in the embodiment of the present invention includes a lifting platform body 100, where the lifting platform body 100 includes a platform, a wedge assembly, a guide assembly, and a driving assembly; wherein the platform comprises a top platform 11 and a bottom platform 12, the top platform 11 is parallel to the bottom platform 12. The wedge assembly is located between the top platform 11 and the bottom platform 12; the wedge assembly comprises a first wedge 21 and a second wedge 22, the first wedge 21 matches the second wedge 22, and the first wedge 21 is fixedly connected with the lower surface of the top platform 11. The guide rail assembly comprises a first sliding block 33, a second sliding block 34, a linear first guide rail 31 and a second guide rail 32, the first guide rail 31 and the second guide rail 32 are respectively and fixedly arranged on the second wedge block 22, and the second guide rail 32 is parallel to the plane of the upper surface of the second wedge block 22; the first sliding block 33 is fixedly arranged on the upper surface of the bottom platform 12, and the second sliding block 34 is fixedly connected with the first wedge block 21; the first guide rail 31 is slidably connected to the first slider 33, and the second guide rail 32 is slidably connected to the second slider 34. The drive assembly is fixedly mounted on the bottom platform 12 and the second wedge 22 is moved in a horizontal direction under the drive of the drive assembly to move the top platform 11 in a vertical direction. When the second wedge 22 moves in the horizontal direction, the top deck 11 and the first wedge 21 and the second wedge 22 fixedly connected to the top deck 11 are displaced relative to each other. Since the top platform 11 degrees of freedom have been controlled, the relative displacement is decomposed into two partial displacements, the vertical direction in which the top platform 11 is not controlled and the horizontal direction in which the guide rails are guided. The relative partial displacement in the horizontal direction of the second wedge 22 has enough reserved space, and the vertical direction partial displacement becomes a direct factor for controlling the vertical direction movement of the top platform 11 because the vertical direction freedom degree of the top platform 11 is not limited, so that the top platform 11 is lifted, and the lifting function of the whole lifting platform is realized.
In an embodiment of the present invention, a first notch 221 is formed at an end of the second wedge 22 close to the first wedge 21, the first notch 221 is located at a side of the first wedge 21, and the second rail 32 is fixedly installed in the first notch 221. As shown in fig. 2, the second rail 32 is laterally hung in the first notch 221 of the first wedge 21. The second guide rail 32 is a guide rail placed obliquely, and the second wedge 22 is guided to move by the guide rails in two directions, that is, the horizontal direction guided by the first guide rail 31 and the inclined direction guided by the second guide rail 32, where the inclined direction is the planar direction of the upper surface of the second wedge 22. The second guide rail 32 is fixedly arranged in the first notch 221, so that the volume of the whole equipment can be reduced, and the equipment is compact and reasonable in structure.
Furthermore, a plurality of guide rail pressing blocks 35 are installed at the first notch 221, the guide rail pressing blocks 35 are fixedly installed on the second wedge 22, and a part of the guide rail pressing block 35 is located in the first notch 221. As shown in fig. 3, the part of the guide rail pressing block 35 extends into the first gap 221, the second guide rail 32 is controlled to be laterally moved to avoid the precision deviation of the second guide rail 32, the second guide rail 32 which is obliquely installed adopts a side-hanging installation mode, the precision is directly controlled by assembling the guide rail, the processing requirement of the traditional guide rail installation inclined plane is reduced, and the guide rail pressing block is easier to process and adjust.
In an embodiment of the present invention, a second notch 222 is formed at an end of the second wedge 22 close to the bottom platform 12, the second notch 222 is located at a bottom end of the second wedge 22, the first rail 31 matches the second notch 222, and the first rail 31 is fixedly installed in the second notch 222. The second notch 222 is located below the first notch 221, and the second notch 222 and the first notch 221 have similar functions, i.e. the volume of the whole device can be reduced and the device is compact and reasonable in structure.
In one embodiment of the present invention, the lifting platform body 100 includes two wedge assemblies symmetrically disposed on both sides of the bottom platform 12. Two separate wedge assemblies are fixedly mounted on either side of the bottom platform 12 to provide the same operation for lifting and lowering the top platform 11 to increase the stability of the entire lifting platform.
Further, the lifting platform body 100 further comprises a connecting piece 23, the connecting piece 23 is fixedly connected with the two wedge block assemblies, the connecting piece 23 and the two wedge block assemblies are integrally formed, and the connecting piece 23 and the upper surfaces of the two wedge block assemblies are located on the same plane. Two voussoir subassemblies share a drive assembly, guarantee lift platform's uniformity. Two voussoir subassemblies and connecting piece 23 integrated into one piece have avoided two independent voussoir subassemblies to appear asynchronous phenomenon, improve whole lift platform's stability and security. The two wedge assemblies include two sets of guide rail assemblies to limit all degrees of freedom except vertical displacement, the horizontal displacement of the second wedge 22, and the movement direction of the top platform 11 is converted into vertical movement through the inclined guide rails, namely the second guide rails 32, so that the accuracy of controlling the lifting height is improved.
In an embodiment of the present invention, the driving assembly includes a motor and a lead screw assembly 52, the lead screw assembly 52 is fixedly connected with a wedge assembly, and the wedge assembly reciprocates along the direction of the first guide rail 31 along with the lead screw assembly 52 under the driving force of the motor. The motor is preferably a servomotor, although not limited to a servomotor.
In an embodiment of the present invention, as shown in fig. 2, the lifting platform body 100 further includes a plurality of guiding assemblies 40, the plurality of guiding assemblies 40 are fixedly installed on the bottom platform 12, and each guiding assembly 40 includes a base 43, a vertical sliding block 42 and a vertical guiding rail 41; the base 43 is fixedly installed on the bottom platform 12, the base 43 is fixedly connected with the vertical sliding block 42, the vertical sliding block 42 is slidably connected with the vertical guide rail 41, and the vertical guide rail 41 moves in the vertical direction. In this embodiment, the lifting platform body 100 preferably includes four guiding assemblies 40, and the four guiding assemblies 40 are respectively and uniformly distributed at the edge of the bottom platform 12. When the top platform 11 is moved in the vertical direction by the servo motor, the vertical guide rail 41 follows the top platform 11 to move in the vertical direction with respect to the vertical slider 42. The plurality of guide assemblies 40 play a role in guiding the movement of the top platform 11, and avoid the phenomenon of route deviation in the movement process of the top platform 11.
Further, as shown in fig. 4, a fixing column 111 matched with the vertical guide rail 41 is fixedly installed on the top platform 11, and the fixing column 111 is fixedly connected with the vertical guide rail 41. When the top platform 11 moves, the vertical guide rail 41 guides the top platform 11 to move in the vertical direction. Fixed column 111 is fixedly installed on top platform 11, and vertical guide rail 41 and fixed column 111 fixed connection, for example: by using the fixing holes 1111 of the fixing posts 111 to be fixedly connected with the vertical guide rail 41, the top platform 11 moves to drive the vertical guide rail 41 to move in the vertical direction along the vertical sliding block 42.
The invention also provides laser direct-writing type imaging equipment which comprises the linear guide rail type lifting platform.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (10)
1. A linear guide rail type lifting platform, comprising a lifting platform body (100), the lifting platform body (100) comprising:
-a platform comprising a top platform (11) and a bottom platform (12), the top platform (11) being parallel to the bottom platform (12);
a wedge assembly located between the top deck (11) and the bottom deck (12); the wedge block assembly comprises a first wedge block (21) and a second wedge block (22), the first wedge block (21) is matched with the second wedge block (22), and the first wedge block (21) is fixedly connected with the lower surface of the top platform (11);
the guide rail assembly comprises a first sliding block (33), a second sliding block (34), a linear first guide rail (31) and a linear second guide rail (32), the first guide rail (31) and the second guide rail (32) are respectively and fixedly installed on the second wedge block (22), and the second guide rail (32) is parallel to the plane of the upper surface of the second wedge block (22); the first sliding block (33) is fixedly arranged on the upper surface of the bottom platform (12), and the second sliding block (34) is fixedly connected with the first wedge block (21); the first guide rail (31) is connected with the first sliding block (33) in a sliding manner, and the second guide rail (32) is connected with the second sliding block (34) in a sliding manner;
a drive assembly (51), the drive assembly (51) being fixedly mounted on the bottom platform (12), the second wedge (22) being moved in a horizontal direction under the driving force of the drive assembly (51) to move the top platform (11) in a vertical direction.
2. A lifting platform of the linear guide type according to claim 1, characterized in that the second wedge (22) is provided with a first notch (221) at the end close to the first wedge (21), the first notch (221) being located at the side of the first wedge (21); the second guide rail (32) is fixedly arranged in the first notch (221).
3. The linear guide type elevating platform according to claim 2, wherein a plurality of guide pressing blocks (35) are installed at the first notch (221), and a plurality of guide pressing blocks (35) are fixedly installed on the second wedge (22); part of the guide rail pressing block (35) is positioned in the first notch (221).
4. A lifting platform of the linear guide type according to claim 1, characterized in that the end of the second wedge (22) close to the bottom platform (12) is provided with a second notch (222), the second notch (222) being located at the bottom end of the second wedge (22), the first guide rail (31) matching the second notch (222), the first guide rail (31) being fixedly mounted in the second notch (222).
5. A lifting platform of the linear guide type according to claim 1, characterized in that the lifting platform body (100) comprises two of said wedge assemblies symmetrically arranged on both sides of the bottom platform (12).
6. The linear guide type elevating platform according to claim 5, wherein the elevating platform body (100) further comprises a connecting member (23), the connecting member (23) fixedly connecting two of the wedge assemblies; the connecting piece (23) and the upper surfaces of the two wedge block assemblies are positioned on the same plane.
7. The linear guide type elevating platform according to claim 1, wherein the driving assembly (51) comprises a motor and a lead screw assembly (52), the lead screw assembly (52) is fixedly connected with the wedge assembly, and the wedge assembly is driven by the motor to reciprocate along the direction of the first guide rail (31) along with the lead screw assembly (52).
8. The linear guide type elevating platform according to claim 1, wherein the elevating platform body (100) further comprises a plurality of guide members (40), the plurality of guide members (40) being fixedly installed on the bottom platform (12); the guide assembly (40) comprises a base (43), a vertical sliding block (42) and a vertical guide rail (41); the base (43) is fixedly installed on the bottom platform (12), the base (43) is fixedly connected with a vertical sliding block (42), the vertical sliding block (42) is connected with a vertical guide rail (41) in a sliding mode, and the vertical guide rail (41) moves in the vertical direction.
9. The linear guide rail type lifting platform according to claim 8, wherein a fixing column (111) matched with the vertical guide rail (41) is fixedly installed on the top platform (11), and the fixing column (111) is fixedly connected with the vertical guide rail (41); when the top platform (11) moves, the vertical guide rail (41) guides the top platform (11) to move in the vertical direction.
10. A laser direct write type image forming apparatus comprising the linear guide type elevating platform according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134122.XA CN112901968A (en) | 2021-01-28 | 2021-01-28 | Linear guide rail type lifting platform and laser direct-writing type imaging equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134122.XA CN112901968A (en) | 2021-01-28 | 2021-01-28 | Linear guide rail type lifting platform and laser direct-writing type imaging equipment |
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| Publication Number | Publication Date |
|---|---|
| CN112901968A true CN112901968A (en) | 2021-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110134122.XA Pending CN112901968A (en) | 2021-01-28 | 2021-01-28 | Linear guide rail type lifting platform and laser direct-writing type imaging equipment |
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| CN (1) | CN112901968A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115334816A (en) * | 2022-07-28 | 2022-11-11 | 中国工程物理研究院应用电子学研究所 | Laser device box body suitable for array type beam combination |
| CN116580759A (en) * | 2023-07-14 | 2023-08-11 | 上海隐冠半导体技术有限公司 | Micro-motion bench |
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| CN102962684A (en) * | 2012-12-17 | 2013-03-13 | 厦门大学 | Elevated working platform |
| CN209414943U (en) * | 2018-11-26 | 2019-09-20 | 华北理工大学 | A kind of computer lifting device |
| CN210088351U (en) * | 2019-04-25 | 2020-02-18 | 昆山钧沃光电有限公司 | Lifting platform for optical positioning |
| CN210193303U (en) * | 2019-07-12 | 2020-03-27 | 德中(苏州)激光技术有限公司 | Automatic lifting device suitable for precision machining |
| CN111810802A (en) * | 2020-07-24 | 2020-10-23 | 苏州天准科技股份有限公司 | Lifting platform and laser direct imaging equipment |
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2021
- 2021-01-28 CN CN202110134122.XA patent/CN112901968A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102962684A (en) * | 2012-12-17 | 2013-03-13 | 厦门大学 | Elevated working platform |
| CN209414943U (en) * | 2018-11-26 | 2019-09-20 | 华北理工大学 | A kind of computer lifting device |
| CN210088351U (en) * | 2019-04-25 | 2020-02-18 | 昆山钧沃光电有限公司 | Lifting platform for optical positioning |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115334816A (en) * | 2022-07-28 | 2022-11-11 | 中国工程物理研究院应用电子学研究所 | Laser device box body suitable for array type beam combination |
| CN115334816B (en) * | 2022-07-28 | 2024-04-30 | 中国工程物理研究院应用电子学研究所 | Laser instrument box suitable for array beam combination |
| CN116580759A (en) * | 2023-07-14 | 2023-08-11 | 上海隐冠半导体技术有限公司 | Micro-motion bench |
| CN116580759B (en) * | 2023-07-14 | 2023-10-17 | 上海隐冠半导体技术有限公司 | Micro-motion bench |
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Application publication date: 20210604 |