CN112888127A - Atmospheric pressure low temperature plasma jet diagnosis device based on microwave resonant cavity - Google Patents
Atmospheric pressure low temperature plasma jet diagnosis device based on microwave resonant cavity Download PDFInfo
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- CN112888127A CN112888127A CN202011382108.3A CN202011382108A CN112888127A CN 112888127 A CN112888127 A CN 112888127A CN 202011382108 A CN202011382108 A CN 202011382108A CN 112888127 A CN112888127 A CN 112888127A
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- 238000003745 diagnosis Methods 0.000 title description 9
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 239000011521 glass Substances 0.000 claims abstract description 16
- 238000001228 spectrum Methods 0.000 claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000011889 copper foil Substances 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 4
- 210000002381 plasma Anatomy 0.000 description 42
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000005624 perturbation theories Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
本发明提出了一种基于微波谐振腔的大气压低温等离子体射流诊断装置，属于等离子体和微波技术领域。解决了测量大气压等离子体射流的电子密度的问题。它包括所述谐振腔放置在试验台上，所述谐振腔内部由金属铜箔全面覆盖，所述谐振腔上开设有放置孔，所述放置孔内放置射流放电玻璃管，所述射流放电玻璃管内设置射流等离子体并连接电极，所述第一探测天线和第二探测天线对称设置在谐振腔的腔体内，所述第一探测天线和第二探测天线分别连接频谱分析仪的输入端和输出端。它主要用于具有较低电子密度的低温常压等离子体。
The invention provides an atmospheric pressure low-temperature plasma jet diagnostic device based on a microwave resonant cavity, which belongs to the technical field of plasma and microwave. Solved the problem of measuring the electron density of an atmospheric pressure plasma jet. It includes that the resonant cavity is placed on a test bench, the inside of the resonant cavity is fully covered by metal copper foil, a placement hole is opened on the resonant cavity, and a jet discharge glass tube is placed in the placement hole, and the jet discharge glass tube is placed in the placement hole. The jet plasma is arranged in the tube and the electrodes are connected, the first detection antenna and the second detection antenna are symmetrically arranged in the cavity of the resonant cavity, and the first detection antenna and the second detection antenna are respectively connected to the input end and the output of the spectrum analyzer end. It is mainly used in low temperature atmospheric pressure plasma with lower electron density.
Description
Technical Field
The invention belongs to the technical field of plasma and microwave, and particularly relates to an atmospheric pressure low-temperature plasma jet diagnosis device based on a microwave resonant cavity.
Background
The electron density of the plasma is one of the most important features of the plasma, and for low temperature plasma at atmospheric pressure, the electron density of the plasma can be very low (about 10)12-1013cm-3). Methods of measuring electron density are various. However, currently available methods are either not sensitive enough or do not allow tracking of dynamic processes in non-stationary discharges.
The plasma electron density can be measured by a method using the interaction of electromagnetic waves with plasma. At present, a great deal of research is already carried out on ionized layers and different types of gas discharge plasmas by utilizing radio wave detection technologies of different frequency bands, however, the research for researching low-temperature atmospheric pressure plasmas by using the method is still few, which means that a new method for diagnosing the low-temperature plasmas needs to be developed.
Disclosure of Invention
The invention provides an atmospheric pressure low-temperature plasma jet diagnosis device based on a microwave resonant cavity, aiming at solving the problems in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme: the utility model provides an atmospheric pressure low temperature plasma efflux diagnostic device based on microwave cavity, it includes first detection antenna, second detection antenna, resonant cavity, places hole, spectral analysis appearance, test bench and efflux discharge glass pipe, the resonant cavity is placed on the test bench, resonant cavity lateral shifting can be followed to the test bench, the inside comprehensive cover by the metal copper foil of resonant cavity, seted up on the resonant cavity and placed the hole, place downthehole efflux discharge glass pipe of placing, set up efflux plasma and connect the electrode in the efflux discharge glass pipe, first detection antenna and second detection antenna are symmetrical to be set up in the cavity of resonant cavity, the input and the output of spectral analysis appearance are connected respectively to first detection antenna and second detection antenna.
Furthermore, the number of the placing holes is two, and the two placing holes are symmetrically formed in the resonant cavity.
Furthermore, the resonant cavity is of a cylindrical structure and is fixed through a support.
Furthermore, the resonant cavity has a diameter of 152mm and a length of 480 mm.
Further, the first detection antenna and the second detection antenna are equal in length.
Further, the first detection antenna and the second detection antenna are both 30mm in length.
Furthermore, the outer diameter of the jet flow discharge glass tube is 8mm, and the wall thickness is 1.5 mm.
Furthermore, the model of the spectrum analyzer is Rigol DSA 815-TG.
Further, the maximum operating frequency range of the spectrum analyzer is 9kHz-1.5 GHz.
Furthermore, the power supply of the diagnostic device is a sinusoidal voltage source, the frequency is 28kHz, and the amplitude is 3 kV.
Compared with the prior art, the invention has the beneficial effects that: the invention solves the problem of measuring the electron density of the atmospheric pressure plasma jet. The present invention provides the possibility for diagnosing stable and unstable atmospheric pressure discharge plasmas. The method can be used for low-temperature normal-pressure plasma with lower electron density, an experimental device of a cylindrical resonant cavity is described and tested, the average electron density of the plasma and the frequency of electron collision are determined through well-known disturbance theory and dielectric constant and conductivity expressions of the plasma, and the obtained values are consistent with known data in the literature in an order of magnitude. Provides a new idea for researching the diagnosis of the plasma jet under the atmospheric pressure.
Drawings
FIG. 1 is a schematic structural diagram of an atmospheric pressure low-temperature plasma jet diagnosis device based on a microwave resonant cavity according to the present invention;
FIG. 2 is a diagram of the position of the plasma in the resonant cavity for the helium gas jet discharge according to the present invention;
FIG. 3 is a graph showing the time dependence of electron density of helium gas flow jet discharge plasma when the layout of the discharge chambers in the resonator is at the position of FIG. 2 in accordance with the present invention;
FIG. 4 is a diagram of the position of the plasma in the resonant cavity for the helium gas jet discharge according to the present invention;
FIG. 5 is a graph showing the time dependence of the electron density of a helium gas jet discharge plasma when the layout of the discharge chambers in the resonator is at the position of FIG. 4.
1-a first detection antenna, 2-a second detection antenna, 3-a resonant cavity, 4-a placing hole, 6-a spectrum analyzer and 7-a test bed.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely explained below with reference to the drawings in the embodiments of the present invention.
Referring to fig. 1 to illustrate the present embodiment, an atmospheric pressure low temperature plasma jet diagnosis device based on a microwave resonant cavity includes a first detecting antenna 1, a second detecting antenna 2, a resonant cavity 3, a placing hole 4, a spectrum analyzer 6, a test bed 7 and a jet discharge glass tube, wherein the resonant cavity 3 is placed on the test bed 7, the inside of the resonant cavity 3 is fully covered by a metal copper foil, the placing hole 4 is formed on the resonant cavity 3, the jet discharge glass tube is placed in the placing hole 4, the jet discharge glass tube is internally provided with a jet plasma and connected with an electrode, the first detecting antenna 1 and the second detecting antenna 2 are symmetrically arranged in the cavity of the resonant cavity 3, and the first detecting antenna 1 and the second detecting antenna 2 are respectively connected with an input end and an output end of the spectrum analyzer 6.
In this embodiment, the first detecting antenna 1 and the second detecting antenna 2 are disposed at a quarter of the cavity of the resonant cavity 3 from the edge, and the jet plasma is disposed at a quarter of the cavity edge of the resonant cavity 3 at the other side. The number of the placing holes 4 is one or two, the two placing holes 4 are symmetrically arranged on the resonant cavity 3, the resonant cavity 3 is of a cylindrical structure and is fixed through a support, the diameter of the resonant cavity 3 is 152mm, the length of the resonant cavity is 480mm, the outer diameter of the jet flow discharge glass tube is 8mm, the wall thickness of the jet flow discharge glass tube is 1.5mm, and the jet flow plasma state observation device is used for observing the state of jet flow plasma. The lengths of the first detection antenna 1 and the second detection antenna 2 are equal and are both 30mm, the model of the spectrum analyzer 6 is Rigol DSA815-TG, and the highest operating frequency range is 9kHz-1.5 GHz. The power supply of the diagnosis device is a sinusoidal voltage source, the frequency is 28kHz, and the amplitude is 3 kV. The spectrum analyzer 6 comprises two connectors, one for input and the other for tracking the output of the generator, the input and output terminals being connected to the first detecting antenna 1 and the second detecting antenna 2, respectively, so that one antenna acts as a transmitter and excites eigenmodes within a certain bandwidth, while the other becomes a receiver and records the spectrum of the excited eigenmodes.
In this embodiment, two placing holes 4 with a diameter of 10mm are provided at a position 120mm away from the wall of the cylindrical cavity 3, and the jet plasma is placed through the two placing holes 4. The first three eigenmodes TE111, TE112 and TE113 of the cylindrical cavity 3 have frequencies in the range 1-1.5GHz, and the experiment uses the TE112 eigenmode of the cylindrical cavity 3. First, it is necessary to measure the spectral characteristics of the cylindrical resonator 3 without studying the plasma and to record with the spectrum analyzer 6 in order to observe the TE112 spectrum of the eigenmode of the cylindrical resonator 3. The eigenmode has two maxima of the radial component of the electric field along the cylindrical resonator 3, at a distance from each of the two end walls of the cylindrical resonator 3 equal to a quarter of the length of the cylindrical resonator 3. After tuning the spectrum analyzer 6, the frequency and quality factor Q of the eigenmode of the TE112 of the cylindrical cavity 3 needs to be determined. Then, the plasma under study was installed through the placement hole 4, and the frequency of the TE112 mode and the variation of the quality factor Q were determined. From the changes in the frequency of the TE112 mode and the quality factor Q, the average electron density and the frequency of electron collisions in the plasma within the cavity can be determined using well-known perturbation theory and the dielectric constant and conductivity expressions for the plasma. In studying a discharge or plasma jet of non-uniform length, a movable jet discharge glass tube gradually pushes the studied plasma into the resonant cavity 3, and the frequency of the TE112 mode and the change in the quality factor Q are measured at each step. The noise generated by the change in electron density with time has two causes, the first being some malfunction in a short time, and the second being related to the sensitivity of the experimental apparatus. Although the measurements given are of somewhat estimated nature, the plasma electron density obtained is consistent with known data for a barrier discharge jet in helium. The results of the experiments confirm the achievement of the specified technical result, the device being able to measure the electron density in stable and unstable discharge plasmas, and the electron concentration distribution of the low-temperature plasma jet along the atmospheric pressure.
The atmospheric pressure low-temperature plasma jet diagnosis device based on the microwave resonant cavity provided by the invention is described in detail, a specific example is applied in the text to explain the principle and the implementation mode of the invention, and the description of the example is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011382108.3A CN112888127B (en) | 2020-12-01 | 2020-12-01 | An Atmospheric Pressure Low Temperature Plasma Jet Diagnosis Device Based on a Microwave Resonator |
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| CN202011382108.3A CN112888127B (en) | 2020-12-01 | 2020-12-01 | An Atmospheric Pressure Low Temperature Plasma Jet Diagnosis Device Based on a Microwave Resonator |
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| CN112888127A true CN112888127A (en) | 2021-06-01 |
| CN112888127B CN112888127B (en) | 2023-05-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115243438A (en) * | 2022-07-08 | 2022-10-25 | 哈尔滨工业大学 | A diagnostic system and method for low temperature jet plasma at atmospheric pressure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225740A (en) * | 1992-03-26 | 1993-07-06 | General Atomics | Method and apparatus for producing high density plasma using whistler mode excitation |
| JP2006127914A (en) * | 2004-10-28 | 2006-05-18 | Tokyo Univ Of Science | Microwave plasma processing equipment |
| US20120187842A1 (en) * | 2011-01-21 | 2012-07-26 | Axcelis Technologies, Inc. | Microwave plasma electron flood |
-
2020
- 2020-12-01 CN CN202011382108.3A patent/CN112888127B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225740A (en) * | 1992-03-26 | 1993-07-06 | General Atomics | Method and apparatus for producing high density plasma using whistler mode excitation |
| JP2006127914A (en) * | 2004-10-28 | 2006-05-18 | Tokyo Univ Of Science | Microwave plasma processing equipment |
| US20120187842A1 (en) * | 2011-01-21 | 2012-07-26 | Axcelis Technologies, Inc. | Microwave plasma electron flood |
Non-Patent Citations (2)
| Title |
|---|
| 江涛等: "光电离等离子体密度的微波诊断技术研究" * |
| 罗澄候等: "等离子体电子浓度的空腔微扰诊断" * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115243438A (en) * | 2022-07-08 | 2022-10-25 | 哈尔滨工业大学 | A diagnostic system and method for low temperature jet plasma at atmospheric pressure |
| CN115243438B (en) * | 2022-07-08 | 2024-03-26 | 哈尔滨工业大学 | A diagnostic system and method for low-temperature jet plasma under atmospheric pressure |
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| CN112888127B (en) | 2023-05-09 |
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