CN112881288A - MicroLED detection equipment - Google Patents

MicroLED detection equipment Download PDF

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Publication number
CN112881288A
CN112881288A CN202110043730.XA CN202110043730A CN112881288A CN 112881288 A CN112881288 A CN 112881288A CN 202110043730 A CN202110043730 A CN 202110043730A CN 112881288 A CN112881288 A CN 112881288A
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China
Prior art keywords
lens
camera
mount
light source
micro led
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Granted
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CN202110043730.XA
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Chinese (zh)
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CN112881288B (en
Inventor
王忠祥
陆豪亮
姚毅
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Suzhou Lingyunguang Industrial Intelligent Technology Co Ltd
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Suzhou Lingyunguang Industrial Intelligent Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Studio Devices (AREA)
  • Lens Barrels (AREA)

Abstract

The invention belongs to the technical field of MicroLED detection, and relates to MicroLED detection equipment. The device comprises a camera adjusting device and a carrying platform. The camera adjusting device comprises a fixed seat, a camera and a lens. The camera and the lens can move along the first direction, can rotate around the second direction and can be rotatably arranged on the fixed seat around the third direction. The first direction, the second direction and the third direction are perpendicular to each other. The carrier comprises a base plate and a carrier body, and the carrier body is movably arranged on the base plate along a second direction and a third direction. The camera adjusting device can adjust the position of the lens in four degrees of freedom, and two degrees of freedom are reduced compared with the existing camera adjusting device. The degree of freedom of movement in the second direction and the third direction can be assumed by the stage, so that the structure of the camera adjusting device can be simplified, and the simplification of the structure is beneficial to improving the position adjusting precision of the camera and the lens.

Description

MicroLED detection equipment
Technical Field
The invention belongs to the technical field of MicroLED detection, and relates to MicroLED detection equipment.
Background
The MicroLED is the future development direction of the display screen industry. The micro led may be detected using a camera. In the process of camera detection, the camera and the lens need to be adjusted in six degrees of freedom through the camera adjusting device, so that the lens is opposite to the micro led to be detected on the carrying platform.
In order to improve the detection precision, a camera and lens combination with higher resolution can be adopted to detect the micro LED. In such a combination, the length of the lens is relatively long and the weight is relatively heavy. In order to maintain six degrees of freedom of the camera and the lens in the case of a long lens, the structure of the camera adjustment device is complicated, the design cost is high, and the position adjustment accuracy is reduced.
Disclosure of Invention
The invention aims to provide a micro LED detection device which can improve the position adjustment precision of a camera and a lens.
In order to achieve the purpose, the invention adopts the following technical scheme:
a kind of MicroLED detection device, including camera adjusting device and carrying platform; the camera adjusting device comprises a fixed seat, a camera and a lens; the camera and the lens are mounted on the fixed seat in a manner of moving along a first direction, rotating around the first direction, rotating around a second direction and rotating around a third direction; the first direction, the second direction and the third direction are perpendicular to each other; the stage includes a base plate and a carrier movably mounted to the base plate along the second direction and the third direction.
Preferably, in the above micro led detection apparatus, the camera adjusting device further includes a first mount and a lens mount, the first mount being movable along the first direction and rotatable around the second direction and rotatably mounted on the mount around the third direction; the lens is mounted on the lens mounting piece; the lens mount is rotatably mounted to the first mount about the first direction.
Preferably, in the above micro led detection device, the micro led detection device further includes an optical filter turntable device, the optical filter turntable device includes a mounting bracket, and the mounting bracket is located between the fixing base and the lens.
Preferably, in the above micro led detection device, the bottom end of the lens is lower than the first support.
Preferably, in the above micro led detection device, the mounting frame is higher than the bottom end of the lens.
Preferably, in the above micro led detection apparatus, the micro led detection apparatus further includes a light source assembly disposed between the base plate and the lens.
Preferably, in the above micro led inspection apparatus, the light source assembly includes a light source base and a light source movably mounted to the light source base along the third direction.
Preferably, in the above micro led detection apparatus, the light source assembly is located between the plane where the outermost side of the lens mounting member is located and the fixing seat.
Preferably, in the above micro led detection device, the lens is mounted on the fixing base through a driving assembly, and the driving assembly and the lens are both located on the same side of the fixing base.
Preferably, in the above micro led detection device, the fixing base is mounted on the bottom plate.
The invention has the beneficial effects that: the camera adjusting device can adjust the position of the lens in four degrees of freedom, and two degrees of freedom are reduced compared with the existing camera adjusting device. The freedom degree of movement along the second direction and the third direction can be borne by the carrier, namely the carrier adjusts the micro LED to move along the second direction or the third direction to adjust the position between the lens and the micro LED, so that the structure of the camera adjusting device can be simplified, the structure is simplified, and the improvement of the position adjusting precision of the camera and the lens is facilitated.
Drawings
FIG. 1 is a perspective view of a MicroLED detection device according to an embodiment of the present invention;
FIG. 2 is a perspective view of a mounting bracket according to an embodiment of the present invention;
FIG. 3 is a top view of a mounting bracket according to an embodiment of the present invention;
FIG. 4 is a perspective view of a lens mount and carrier assembly according to an embodiment of the present invention;
FIG. 5 is an assembled perspective view of the first support and the mobile base in accordance with the embodiment of the present invention;
FIG. 6 is an assembled perspective view of the movable base and the rotary base according to the embodiment of the present invention;
FIG. 7 is a perspective view of the rotary seat and the fixed seat of the present invention;
FIG. 8 is a side view of a MicroLED inspection device in accordance with an embodiment of the present invention.
The component names and designations in the drawings are as follows:
the optical lens module comprises a lens mounting piece 10, an accommodating space 11, an anti-slip piece 12, a first arc-shaped groove 13, a first locking piece 14, a first support 20, a main body 21, a supporting body 22, a projection 23, an adjusting plate 24, a first bearing 25, a second arc-shaped groove 26, a fixed seat 30, a rotating seat 40, a sliding rail 41, a second bearing 42, a motor 50, a movable seat 60, a sliding block 70, a camera 81, a lens 82, a carrier 91, a bottom plate 911, a movable seat assembly 912, a carrier 913, an optical filter rotating disc device 92, a mounting frame 921, a light source assembly 93, a light source seat 931, a light source 932, a first direction 101, a second direction 102, a third direction 103 and a plane 104.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
As shown in fig. 1, the lens 82 of the present embodiment has a long length and a heavy weight. The center of gravity of this embodiment is shifted to the lens 82 relative to the conventional camera and lens arrangement. The existing camera adjusting device is not suitable for the structure of the camera 81 and the lens 82 of the present embodiment. Regarding the structures of the camera 81 and the lens 82 of the present embodiment, the present embodiment discloses a new camera adjusting device.
The camera adjusting device of the present embodiment includes a camera 81, a lens 82, and a mounting bracket. The camera 81 is mounted on the top end of the lens 82 and is connected to the lens 82 by a mount. The lens 82 is mounted to the mounting bracket by the lens mount 10, and the camera 81 and the lens 82 are integrally mounted to the mounting bracket. It is known to connect a camera to a mounting bracket and then integrally connect the camera and lens to the mounting bracket. The present embodiment is modified to connect the lens 82 with the mounting bracket to improve the mounting reliability of the camera 81 and the lens 82.
In order to further improve the mounting reliability of the lens 82, the number of the lens mounts 10 may be two, and the two lens mounts 10 are spaced apart in the length direction of the lens 82. One lens mount 10 is connected to the top of the lens 82 and the other lens mount 10 is connected to the middle of the lens 82. In other alternative embodiments, the number of the lens mount 10 may also be one or more than three.
As shown in fig. 1-3, the mounting bracket of the present embodiment further includes a fixing base 30 and a first support 20. The first mount 20 is movable along a first direction 101 and rotatable about a second direction 102 and rotatably mounted to the mount 30 about a third direction 103. The lens mount 10 is rotatably mounted to the first mount 20 about a first direction 101. The first direction 101, the second direction 102 and the third direction 103 are perpendicular to each other. In this embodiment, the first direction 101 is a vertical direction, the second direction 102 is a Y direction, and the third direction 103 is an X direction.
The mounting bracket of the present embodiment is capable of adjusting the lens 82 to move in a first direction 101, rotate about the first direction 101, rotate about a second direction 102, and rotate about a third direction 103. That is, the mounting bracket is capable of adjusting the position of the lens 82 in four degrees of freedom, which is two degrees of freedom less than conventional mounting brackets. The freedom of movement along the second direction 102 and the third direction 103 can be assumed by the stage 91, that is, the position between the lens 82 and the micro led can be adjusted by adjusting the movement of the micro led along the second direction 102 or the third direction 103 by the stage 91, so that the structure of the mounting bracket can be simplified, and the position adjustment precision of the mounting bracket can be improved accordingly.
Continuing with fig. 1, stage 91 includes a base plate 911, a motion stage assembly 912, and a carrier 913, with mount 30 mounted to base plate 911. The movable seat assembly 912 is movably mounted to the base plate 911 along the second direction 102 and the third direction 103. The carrier 913 is mounted to the top surface of the motion stage assembly 912. The carrier 913 is used for placing the micro led. The distance between the lens 82 and the micro led is approximately 138mm in this embodiment.
In this embodiment, the micro led detection device further includes an optical filter carousel device 92, the optical filter carousel device 92 includes a mounting rack 921, a carousel connected to the mounting rack 921, and three optical filters arranged on the carousel, and the mounting rack 921 is located between the fixing base 30 and the lens 82. The working distance between the filter and the lens 82 is approximately 10 mm.
In this embodiment, the bottom end of the lens 82 is lower than the bottom ends of the first support 20 and the mounting frame 921 is higher than the bottom end of the lens 82, which is beneficial to fully utilizing the space and improving the compactness of the micro led detection device.
In this embodiment, the micro led detection device further includes a light source assembly 93, and the light source assembly 93 is disposed between the bottom plate 911 and the lens 82 to improve the light-emitting effect.
In this embodiment, the light source assembly 93 includes a light source seat 931 and a light source 932, and the light source 932 is movably mounted on the light source seat 931 along the third direction 103. Since the width direction of the fixing base 30 coincides with the third direction 103. Therefore, the moving direction of the light source 932 is consistent with the width direction of the fixing seat 30, so that the occupied space is reduced, and the compactness of the micro led detection device is improved. The number of the light sources 932 in this embodiment is two, one is an annular light source and one is a coaxial light source. The distance between the annular light source and the MicroLED is 70-110 mm and is adjustable. The distance between the coaxial light source and the lens 82 may be a fixed 20 mm.
In this embodiment, the light source assembly 93 is located between the plane 104 where the outermost side of the lens mounting member 10 is located and the fixing base 30, so as to fully utilize the space and reduce the occupied space of the whole micro led detection device. The occupied space of the micro LED detection device refers to the space surrounded by the peripheral outline of the micro LED detection device.
In this embodiment, the lens 82 is installed on the fixing base 30 through the driving component, and the driving component and the lens 82 are both located on the same side of the fixing base 30. The driving assembly herein refers to all components that realize the movement of the lens 82 in the present embodiment. Sufficient installation space is formed between the driving assembly and the bottom plate 911 for installing the filter turntable device 92 and the light source assembly 93, which is beneficial to improving the compactness of the micro led detection device.
As shown in fig. 4, in the present embodiment, the lens mount 10 is formed by detachably splicing at least two parts, and the at least two parts surround the accommodating space 11 for accommodating the lens 82. For example, the lens mount 10 is formed by splicing two parts, and the lens mount 10 is easily attached and detached. The inner wall of the lens mount 10 is provided with an anti-slip member 12 or an anti-slip layer to increase a frictional force with the outer circumferential surface of the lens 82 so that the lens 82 is reliably mounted on the lens mount 10.
As shown in fig. 3-5, the first support 20 includes a main body 21, a supporting body 22 vertically connected to the main body 21, and two protrusions 23 connected to the supporting body 22. The lens mount 10 is supported by a support 22. The two projections 23 are oppositely disposed. The supporting body 22 is substantially a U-shaped structure, and the accommodating space 11 of the lens mount 10 is opposite to the hollow portion of the supporting body 22. The two projections 23 are respectively provided with a positioning piece. The portion of the lens mount 10 provided with the first arc-shaped groove 13 is located in a space between the two projections 23 to limit the rotational stroke of the lens mount 10 to some extent, so as to improve the convenience of adjusting the lens mount 10. Two positioning members are used to hold and fix the lens mount 10. Wherein, the positioning piece can be an adjusting screw.
In this embodiment, the mounting bracket further includes a first locking member 14, the lens mount 10 is provided with a first arc-shaped groove 13 that cooperates with the first locking member 14, and the first locking member 14 is configured to lock or unlock the lens mount 10 to the first mount 20. The number of first arcuate slots 13 may be one, two, three, etc. By releasing the first locking member 14, the rotation angle of the lens mount 10 about the first direction 101 can be adjusted. After adjustment, the first locking member 14 is locked to fix the position of the lens mount 10 on the first mount 20. To further fix the position of the lens mount 10 on the first mount 20, the lens mount 10 is held by two positioning members.
As shown in fig. 5 and 6, the center of the first support 20 is mounted to the movable base 60 through the first bearing 25, such that the first support 20 can be supported on the movable base 60 and can rotate relative to the movable base 60 to rotate the lens 82 around the second direction 102. Further, two sides of the first support 20 are respectively provided with a second arc-shaped groove 26, and the two second arc-shaped grooves 26 are distributed on the same arc. The first support 20 is mounted to the moving base 60 by a second locker and a second arc-shaped groove 26. By releasing the second locking member, the angle of the first support 20 about the second direction 102 can be adjusted. The second locking member is locked to fix the position of the first holder 20 on the moving base 60.
Further, an adjusting plate 24 is attached to a surface of the first support 20 facing the moving base 60, and the adjusting plate 24 may be located above the moving base 60. In other alternative embodiments, the adjustment plate 24 may also be located below the movable seat 60. A gap is left between the adjusting plate 24 and the movable base 60. The adjustment plate 24 is mounted with at least two adjustment members (not shown) that respectively abut against the movable seat 60 to position the first support 20. For example, one adjusting member is installed at each end of the adjusting plate 24. After the second locking member is released, the rotation angle of the first support 20 around the second direction 102 can be adjusted through the two adjusting members, which is labor-saving, and after the adjusting members are adjusted, the first support 20 can be positioned. Then, the first support 20 is further positioned through the second locking piece, so that double positioning is realized, and the positioning precision is high. The adjusting member of this embodiment may be a screw.
The movable base 60 is mounted on a slide block 70, and correspondingly, the rotary base 40 is provided with a slide rail 41 extending along the first direction 101, and the slide block 70 can move along the slide rail 41 under the driving of the motor 50 and the screw mechanism. The movable base 60 moves along the first direction 101 to move the lens 82 along the first direction 101.
As shown in fig. 6 and 7, the rotary seat 40 is rotatably mounted to the fixed seat 30 around a third direction 103, and is positioned by at least two fasteners, at least one of the fasteners abuts against the fixed seat 30, and the other fasteners lock the rotary seat 40 and the fixed seat 30. The rotation of the rotary base 40 rotates the lens 82 around the third direction 103.
Specifically, the rotary base 40 is rotatably mounted to the fixed base 30 through a second bearing 42. The at least two fasteners may be divided into two groups, each group being three in number. Two sets are respectively arranged at both sides of the rotary base 40. In each set of fasteners, two fasteners are used to lock the rotary seat 40 and the fixed seat 30 to provide a force to the rotary seat 40 to approach the fixed seat 30. One fastener is used to abut the fixed seat 30 to provide a force to the rotating seat 40 away from the fixed seat 30. Two opposing forces position the swivel 40. Set up two fasteners and be used for locking roating seat 40 and fixing base 30, a fastener is used for butt fixing base 30, is favorable to reducing the deformation of roating seat 40 to further improve roating seat 40's position accuracy. The fasteners may be screws.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, adaptations and substitutions will occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. The MicroLED detection equipment is characterized by comprising a camera adjusting device and a carrying platform (91); the camera adjusting device comprises a fixed seat (30), a camera (81) and a lens (82); the camera (81) and the lens (82) are mounted on the fixed base (30) so as to be movable along a first direction (101), rotatable about the first direction (101), rotatable about a second direction (102) and rotatable about a third direction (103); the first direction (101), the second direction (102) and the third direction (103) are perpendicular to each other; the stage (91) comprises a base plate (911) and a carrier (913), and the carrier (913) is movably mounted on the base plate (911) along the second direction (102) and the third direction (103).
2. A micro led detection apparatus according to claim 1, wherein the camera adjustment device further comprises a first mount (20) and a lens mount (10), the first mount (20) being mounted to the holder (30) movable along the first direction (101) and rotatable about the second direction (102) and rotatable about the third direction (103); the lens (82) is mounted to the lens mount (10); the lens mount (10) is rotatably mounted to the first mount (20) about the first direction (101).
3. A micro led inspection apparatus according to claim 2, further comprising a filter carousel device (92), the filter carousel device (92) comprising a mounting bracket (921), the mounting bracket (921) being located between the fixed base (30) and the lens (82).
4. A micro led detection device according to claim 3, wherein a bottom end of the lens (82) is lower than the first support (20).
5. A MicroLED detection apparatus according to claim 4, wherein the mounting block (921) is higher than a bottom end of the lens (82).
6. A micro led inspection apparatus according to claim 2, further comprising a light source assembly (93), the light source assembly (93) being disposed between the base plate (911) and the lens (82).
7. A MicroLED inspection apparatus according to claim 6, wherein the light source assembly (93) comprises a light source mount (931) and a light source (932), the light source (932) being movably mounted to the light source mount (931) along the third direction (103).
8. A MicroLED inspection apparatus according to claim 6, wherein the light source assembly (93) is located between the plane (104) of the outermost side of the lens mount (10) and the holder (30).
9. A micro led detection apparatus according to claim 1, wherein the lens (82) is mounted to the holder (30) via a driving assembly, and the driving assembly and the lens (82) are both located on the same side of the holder (30).
10. A micro led detection device according to any of claims 1-9, wherein the holder (30) is mounted to the base plate (911).
CN202110043730.XA 2021-01-13 2021-01-13 MicroLED detection equipment Active CN112881288B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114576480A (en) * 2022-01-18 2022-06-03 航天科工空间工程发展有限公司 Equipment for space observation
CN115980071A (en) * 2023-03-17 2023-04-18 中科慧远视觉技术(北京)有限公司 Visual detection mechanism and detection equipment

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CN101750702A (en) * 2009-12-30 2010-06-23 东莞华中科技大学制造工程研究院 Five-freedom lens adjusting device
CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device
CN103499308A (en) * 2013-09-26 2014-01-08 吉林大学 Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform
CN207132045U (en) * 2017-08-29 2018-03-23 长沙麦斯森信息科技有限公司 Camera adjustments device for machine visual detection device
CN110400502A (en) * 2019-07-26 2019-11-01 邵东智能制造技术研究院有限公司 Machine vision teaching platform
CN210015058U (en) * 2018-11-19 2020-02-04 深圳市和田古德自动化设备有限公司 PCB visual detection mechanism

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101750702A (en) * 2009-12-30 2010-06-23 东莞华中科技大学制造工程研究院 Five-freedom lens adjusting device
CN201589883U (en) * 2009-12-30 2010-09-22 东莞华中科技大学制造工程研究院 Five-degree-of-freedom lens adjusting device
CN103499308A (en) * 2013-09-26 2014-01-08 吉林大学 Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform
CN207132045U (en) * 2017-08-29 2018-03-23 长沙麦斯森信息科技有限公司 Camera adjustments device for machine visual detection device
CN210015058U (en) * 2018-11-19 2020-02-04 深圳市和田古德自动化设备有限公司 PCB visual detection mechanism
CN110400502A (en) * 2019-07-26 2019-11-01 邵东智能制造技术研究院有限公司 Machine vision teaching platform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114576480A (en) * 2022-01-18 2022-06-03 航天科工空间工程发展有限公司 Equipment for space observation
CN115980071A (en) * 2023-03-17 2023-04-18 中科慧远视觉技术(北京)有限公司 Visual detection mechanism and detection equipment

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