CN112880912A - Space resolution pressure measurement system and method based on vacuum holographic optical tweezers - Google Patents
Space resolution pressure measurement system and method based on vacuum holographic optical tweezers Download PDFInfo
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Abstract
The invention discloses a system and a method for measuring space resolution pressure intensity based on vacuum holographic optical tweezers. The device comprises a vacuum cavity, micro-nano particles, an optical tweezers device, a feedback cooling device, a driving electric field device, a spatial light modulator, a polarization control and detection device and a residual gas analyzer; laser light is emitted from a laser source, is incident to a first polarization spectroscope through a first spectroscope and is transmitted, is reflected and modulated through a spatial light modulator and is transmitted and converged through a first convex lens to form capture light, the capture light irradiates micro-nano particles to form a light trap capture area, the capture light is incident to a second polarization spectroscope after being transmitted and converged through a second convex lens after passing through the micro-nano particles to be reflected and transmitted, and light beams reflected by the second polarization spectroscope are incident to a first photodiode; six electrodes are arranged around the optical trap trapping region. According to the invention, the pressure distribution measurement of the micro-nano scale spatial resolution under high vacuum can be realized by utilizing the control flexibility of the holographic optical tweezers and combining the local detection means of the micro-nano particles.
Description
Technical Field
The invention relates to an instrument and a method for measuring micro-nano scale local pressure intensity spatial distribution, belongs to the technical field of precision measurement, and particularly relates to a spatial resolution pressure intensity measuring system and method based on vacuum holographic optical tweezers.
Background
A vacuum gauge is an instrument that measures the degree of vacuum or pressure. Has wide application in scientific research and industrial fields. The traditional vacuum measuring means include ionization vacuum gauge, capacitance film vacuum gauge, magnetic suspension rotor vacuum gauge, etc., and the principle and calibration means are different. For example, ionization vacuum gauges ionize gas molecules by applying an electric field, and then measure the conductivity. The magnitude of the electrical conductivity depends on the density of the surrounding ionized gas molecules, so that the magnitude of the pressure can be deduced; the capacitance film vacuum gauge uses a film as a polar plate of a capacitor, and when the external pressure intensity changes, the movement of the film can cause the change of the capacitor, so as to measure the pressure intensity; the magnetic suspension rotor vacuum gauge is characterized in that a sphere is suspended through a magnetic field, and the pressure intensity can be obtained by measuring the retardation force of surrounding gas on the rotation of the sphere.
All the above methods measure the pressure at the macro scale, and the pressure is not necessarily equal at the micro scale due to problems such as pumping impedance during the vacuum pumping. The current methods for measuring local pressure are limited. The vacuum optical tweezers system can suspend micro-nano particles, and naturally has the local detection capability of micro-nano scale.
Since 1971 the optical tweezers was invented by Ashkin et al, a physicist of the united states, this technology was applied to the fields of medical treatment, thermodynamic research, and the like. Then, a vacuum optical tweezers technology is developed, so that the method can be well decoupled from the environment, and very high measurement accuracy is obtained. For example, optical tweezers may be used to measure weak forces, accelerations, displacements, etc. The trapping light of the vacuum optical tweezers has no influence on the rotational freedom for trapping the micro-nano particles if pure linear polarized light is used. And because the effect of the suspended micro-nano particles on the environment is little, the rotational freedom degree of the particles is simply retarded by surrounding gas molecules, and therefore the particles can be used for measuring the surrounding pressure. Meanwhile, the interaction between the gas molecules and the micro-nano particles can only be realized in a collision mode, so that the pressure measured by the micro-nano particles is the local pressure equivalent to the size of the micro-nano particles. Moreover, the micro-nano particles are slightly interfered by the outside, so that the measuring method can still have higher measuring precision under high vacuum.
By exploiting the interference properties of light, the way a light beam propagates in space can be manipulated by modulating the wavefront. The holographic optical tweezers adjust the intensity or phase distribution of a light beam to a specific form through a spatial light modulator and the like, so that a plurality of focusing positions can be formed in space, or a focusing point can be moved in a preset track. The control flexibility of the holographic optical tweezers is combined with the local pressure measurement means of the vacuum optical tweezers, and the obtained vacuum holographic optical tweezers can measure the micro-nano scale resolution ratio of the pressure distribution in the space.
The traditional pressure measurement means is difficult to realize for the pressure distribution measurement of micro-nano scale spatial resolution, especially under high vacuum. The particle is suspended at different positions in the space by using the vacuum holographic optical tweezers technology, so that the particle is almost only influenced by the collision of surrounding gas molecules, and the pressure measurement means is greatly expanded. Industrially and academically, in particular, the development of vacuum technology is of great significance.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a spatial resolution pressure measurement system and method based on vacuum holographic optical tweezers.
The technical scheme adopted by the invention is as follows:
a spatial resolution pressure measurement system based on vacuum holographic optical tweezers comprises:
the vacuum holographic optical tweezers spatial resolution pressure measurement system comprises a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device, a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device and a residual gas analyzer RGA;
the driving electric field device E comprises six electrodes, the polarization control and detection device comprises a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, the polarization detection device comprises a second polarization beam splitter PBS2 and a first photodiode PD1, the optical tweezers device comprises a laser source LS, a first convex lens L1 and a second convex lens L2, and the feedback cooling device comprises a first beam splitter BS1, a second beam splitter BS2, a first reference light source LO1, a second photodiode PD2, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD;
an optical tweezers device, a driving electric field device E, a micro-nano particle MS and a residual gas analyzer RGA are arranged in a vacuum cavity VC, a second convex lens L2 and a first convex lens L1 are respectively symmetrically positioned at the upper side and the lower side of the micro-nano particle MS and are arranged on the same optical axis, a spatial light modulator SLM, a first polarizing beam splitter PBS1, a first beam splitter BS1, a second beam splitter BS2, a laser source LS, a first reference light source LO1 and a second photodiode PD2 are arranged outside the vacuum cavity VC below the first convex lens L1, a second polarizing beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, and a first photodiode PD1, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD are arranged outside the vacuum cavity VC;
original laser is emitted from a laser source LS, is transmitted through a first beam splitter BS1 and then enters a first polarization beam splitter PBS1 to be transmitted, so that a light beam is changed into p polarization, the p polarization is parallel to an incident surface, the s polarization is vertical to the incident surface, then the light beam is subjected to reflection modulation by a spatial light modulator SLM and transmission convergence by a first convex lens L1 in sequence to form captured light, the captured light irradiates a micro-nano particle MS to form a light trap capturing area, meanwhile, the captured light passes through the micro-nano particle and then is transmitted and converged by a second convex lens L2 and then enters a second polarization beam splitter PBS2 to be reflected and transmitted, wherein the reflected light only contains the s polarization, the transmitted light only contains the p polarization, the light beam reflected by a second polarization beam splitter PBS2 enters a first photodiode PD1, the light beam transmitted by a second polarization beam splitter PBS2 enters a third beam splitter BS3 to be transmitted, and the light beam transmitted by a third beam BS3, a light beam emitted by the second reference light source LO2 is reflected by the third beam splitter BS3 and then is incident on the four-quadrant detector QPD;
a reflected light beam of the captured light irradiating the micro-nano particles MS is reversely reflected to a first beam splitter BS1 to be reflected and then enters a second polarization beam splitter PBS2 to be transmitted, a light beam transmitted by the second polarization beam splitter PBS2 enters a second photodiode PD2, and a light beam emitted by a first reference light source LO1 is reflected by a second polarization beam splitter PBS2 and then enters a second photodiode PD 2;
the six electrodes are respectively arranged beside the side of the solid six sides around the optical trap capturing area.
The light beam transmitted by the second polarizing beam splitter PBS2 is combined with light emitted by a second reference light source LO2 at a third beam splitter BS3, and the light beam is incident to a four-quadrant detector for detection and heterodyne interferometry to obtain displacement of the micro-nano particles on a two-dimensional plane vertical to the direction of captured light;
the light beam reflected back to the first polarizing beam splitter PBS1 after the micro-nano particles MS are irradiated by the captured light is reflected by the first beam splitter BS1, then is combined with the light emitted by the first reference light source LO1 at the position of the second beam splitter BS2, and is incident to the second photodiode PD2 for detection and heterodyne interferometry, so that the displacement of the micro-nano particles in the direction parallel to the captured light is obtained;
and performing feedback cooling adjustment on the light intensity I output by the laser source LS by using the displacement of the measured micro-nano particles in three dimensions which are vertical to the direction of the captured light and parallel to the direction of the captured light.
And a light-transmitting optical window for light beam transmission/passing is formed on the cavity wall of the vacuum cavity.
The laser source LS outputs the laser beam, and the laser beam is modulated by the spatial light modulator SLM and converged by the first convex lens L1 to form the vacuum holographic optical tweezers in the vacuum cavity.
Secondly, a pressure measurement method of a space resolution pressure measurement system based on the vacuum holographic optical tweezers is characterized in that: the method comprises the following steps:
1) starting a spatial resolution pressure measurement system, irradiating the micro-nano particles MS in the vacuum cavity VC by using captured light to form a light trap capture area, and generating optical power on the micro-nano particles MS by using the captured light;
2) releasing a micro-nano particle from the upper part of the optical trap capturing area, then enabling the micro-nano particle MS to make free falling body movement downwards under the action of gravity, enabling the micro-nano particle MS to reach the optical trap capturing area to be captured, and stabilizing the micro-nano particle MS at the center of the optical trap capturing area through feedback cooling;
3) applying voltage to six electrodes around the optical trap trapping region to form a vertical upward electric field, wherein the electric field generates an electric field force F to the micro-nano particles MSEAdjusting the light intensity I of the trapped light to make the micro-nano particles MS in the electric field force FEKeeping balance under the stress of the light force and the gravity, and measuring the electric field force and the light intensity of the captured light;
4) gradually increasing the electric field in the preset electric field value range from small to large, repeating the step 4) for multiple times of measurement, and utilizing the linear relation I between the electric field force obtained by multiple times of measurement and the light intensity I of the captured light according to the following formula ═ alpha FEFitting the + beta to obtain a first fitting parameter alpha and a second fitting parameter beta to obtain a linear relation;
5) the linear relation I-alpha F is entered when the light intensity I-0 of the non-captured light is equal toEThe electric field force F obtained in + betaEObtaining the mass m of the micro-nano particles as the gravity of the micro-nano particles, and calculating by combining the known density of the micro-nano particles to obtain the radius r of the micro-nano particles;
6) measuring molecular mass m of residual gas in vacuum cavity VC by residual gas analyzer RGA0；
7) Under the condition of no electric field, the micro-nano particles MS are kept balanced under the stress of optical force and gravity by adjusting the light intensity I of the captured light, and the rotation frequency of the micro-nano particles at the moment is measured by a polarization control and detection device to be used as the stable rotation frequency f of the micro-nano particles without the electric fieldopt；
8) Modulating through a Spatial Light Modulator (SLM), moving an optical trap capturing area of the vacuum holographic optical tweezers, and moving to a required position to be measured;
9) opening an electric field, and controlling the electric field to drive the micro-nano particles to be higher than the stable rotation frequency f of the micro-nano particles without the electric fieldoptRotating, keeping the micro-nano particles MS in balance under the stress of light force and gravity by adjusting the light intensity I of the captured light, and utilizing the deviationThe vibration control and detection device measures and measures the rotation frequency of the micro-nano particles at the moment as the stable rotation frequency f with an electric field0；
10) Closing the electric field, measuring the data of the change of the rotation frequency of the micro-nano particles along with the time after the electric field is closed, and fitting the following formula by substituting to obtain the relaxation time tau:
wherein f (t) represents the rotation frequency of the micro-nano particles at the moment t, t represents the moment, e represents a natural constant, tau represents relaxation time, t represents0Indicating the moment when the electric field is switched off;
then, the retardation coefficient beta of the gas is calculated according to the following formula based on the relaxation time taurot：
τ＝J/βrot
Wherein, betarotThe retardation coefficient of the gas is represented, J represents the moment of inertia of the micro-nano particles, and the moment of inertia J of the micro-nano particles is obtained through the mass m and the radius r of the micro-nano particles;
finally according to the retardation coefficient beta of the gasrotMolecular mass m of residual gas0And processing the radius r of the micro-nano particles by adopting the following formula to obtain the pressure of the position to be measured:
wherein, k represents the pressure coefficient, P represents the pressure of the position to be measured, T represents the temperature of the residual gas molecules in the vacuum chamber, kBRepresents Boltzmann constants;
11) and continuously repeating the steps 8) to 10), and measuring the pressure intensities of different positions in the vacuum cavity to form pressure intensity distribution.
In the polarization control and detection device, a first photodiode PD1 receives an optical signal and analyzes the optical signal to obtain the light intensity change frequency of s polarization vertical to captured light, and 1/2 of the light intensity change frequency of s polarization is taken as the rotation frequency of the micro-nano particles.
The micro-nano particles are uniform silica spheres with known density, and the size of the micro-nano particles determines the spatial resolution of the pressure intensity measured by the method. Before the implementation of the method is started, the micro-nano particles can be adsorbed on a supporting device by Van's force, and the micro-nano particles are released by high-frequency vibration of piezoelectric ceramics at the beginning of measurement and enter an optical trap capturing area to be captured.
The laser is adjusted to be linearly polarized by a polarization control device, and after the laser interacts with the micro-nano particles, the change frequency f of the s-polarized light intensity is detected by a polarization detection devicePSo as to obtain the rotation frequency f of the micro-nano particlesP/2。
Driving micro-nano particles to f using electric field and electric dipole moment coupling of micro-nano particlesopt×102Or higher frequency, to rotate stably. And then, the driving electric field is closed, so that the rotation speed of the micro-nano particles is gradually reduced under the retardation action of residual gas molecules around. By measuring the change of the rotation frequency along with the time, the local pressure at the current position can be obtained.
The measurement of the electric field force is obtained by obtaining the electric field at the micro-nano particles by using the known voltage and electrode position and combining the electric charge quantity of the micro-nano particles. The charge amount of the micro-nano particles is controlled by irradiating the electrodes with ultraviolet light to discharge the electrodes to the micro-nano particles. The charge quantity of the micro-nano particles can be accurately regulated and controlled to a single electron electric quantity by utilizing the quantization characteristic of the charge.
The spatial light modulator is used for generating holographic optical tweezers in the form of diffraction gratings and Fresnel lenses, and the capture positions of micro-nano particles can be changed in a three-dimensional mode, so that different positions in space can be measured.
The pressure intensity measured by the method is the local pressure intensity of the micro scale, and the pressure intensity distribution of each position in the space can be measured by combining the characteristic that the holographic optical tweezers can change the capture position of the micro-nano particles. The holographic optical tweezers are a method for changing the capture position of the holographic optical tweezers by modulating the phase or intensity distribution of light by using the interference characteristics of light.
In the invention, the optical tweezers device outputs laser through a laser source, and the laser is converged in a vacuum cavity through a convex lens to form vacuum optical tweezers; the feedback cooling device collects light reflected and transmitted by the micro-nano particles, utilizes the spectroscope and light output by the reference light source to perform heterodyne interferometry, and generates a feedback signal to adjust the power of laser output by the laser source; the micro-nano particle release device is positioned in the vacuum cavity and provides micro-nano particles as a measuring medium; the electric field and the electric dipole moment of the micro-nano particles are driven to be coupled so as to rotate at a high speed; the spatial light modulator generates holographic optical tweezers by modulating the wave front of the captured light; the polarization control and detection device detects the rotating speed of the micro-nano particles by utilizing the coupling of the electric dipole moment of the micro-nano particles and the polarization of light, and achieves the effect of measuring pressure by combining a gas component measuring device.
The spatial resolution pressure measurement system provided by the invention utilizes the high spatial resolution of the vacuum optical tweezers to suspend the micro-nano particles, combines the easy controllability of the holographic optical tweezers, and measures the pressure distribution of the micro-nano scale through the retardation of the rotational freedom of the micro-nano particles by gas molecules.
The invention has the beneficial effects that:
the invention provides a system and a method for measuring the spatial resolution pressure intensity based on vacuum holographic optical tweezers for the first time, the pressure intensity is measured by utilizing the collision between the micro-nano particles and the surrounding gas, and the measured resolution can reach the size of the micro-nano particles due to the local interaction. And because the vacuum holographic optical tweezers system well eliminates the interference of the external environment on the micro-nano particles, the micro-nano particles are almost only influenced by the gas to be measured, and thus, the good measurement precision can be achieved. And by combining the characteristic that the holographic optical tweezers can change the capture position of the micro-nano particles, the method can realize the measurement of the spatial pressure distribution of the micro-nano scale resolution. Provides a novel measuring means for industrial and scientific research, especially for the technical field of vacuum.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a flow chart of the spatially resolved pressure measurement of the present invention;
fig. 3 is a schematic diagram of the holographic optical tweezers adjusting the trapping position according to the present invention.
In the figure: the device comprises a vacuum cavity VC, a micro-nano particle MS, a first convex lens L1, a second convex lens L2, a first polarization beam splitter PBS1, a second polarization beam splitter PBS2 and a photodiode PD.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
the vacuum holographic optical tweezers spatial resolution pressure measurement system comprises a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device, a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device and a residual gas analyzer RGA; the driving electric field device E comprises six electrodes, the polarization control and detection device comprises a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, the polarization detection device comprises a second polarization beam splitter PBS2 and a first photodiode PD1, the first photodiode PD1 is used for detecting optical signals, and the optical tweezer device comprises a first convex lens L1 and a second convex lens L2; an optical tweezers device, a driving electric field device E, a micro-nano particle MS, a release device of the micro-nano particle MS and a residual gas analyzer RGA are arranged in a vacuum cavity VC, a second convex lens L2 and a first convex lens L1 are symmetrically arranged at the upper side and the lower side of the micro-nano particle MS respectively and are arranged on the same optical axis, the driving electric field device E is six electrodes and is arranged beside the side of the six-side of a three-dimensional surface of the micro-nano particle MS to form six surfaces of a cube, a spatial light modulator SLM is arranged outside the vacuum cavity VC below the first convex lens L1, a first polarization beam splitter PBS1, a first beam splitter BS1, a second beam splitter BS2, a laser source LS, a first reference light source LO1 and a second photodiode PD2, and a second polarization beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, a first photodiode PD1, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector; the optical tweezers device outputs laser through a laser source LS, and the SLM and the first convex lens L1 are modulated through the spatial light modulator and converged in the vacuum cavity VC to form vacuum holographic optical tweezers; the feedback cooling device collects light reflected and transmitted by the micro-nano particles MS, the reflected light and the light combined beam output by the first reference light source LO1 are incident to the second photodiode PD2 through the second beam splitter BS2 for heterodyne interference measurement, the transmitted light and the light combined beam output by the second reference light source LO2 are incident to the four-quadrant detector QPD through the third beam splitter BS3 for heterodyne interference measurement, and a feedback signal is generated to adjust the power of the laser output by the laser source LS. Captured light emitted from a laser source LS is incident to a first polarization beam splitter PBS1 through a first beam splitter BS1 to be transmitted, then is subjected to reflection modulation through a spatial light modulator SLM and is transmitted and converged through a first convex lens L1 in sequence to form captured light, light beams are converged in a vacuum cavity to form vacuum holographic optical tweezers, the captured light irradiates a micro-nano particle MS to form a single-beam light trap capturing area aiming at micro-nano particles, meanwhile, the captured light is incident to a second polarization beam splitter PBS2 to be reflected and transmitted after being subjected to transmission and convergence through a second convex lens L2 after passing through the micro-nano particles, and light beams reflected by a second polarization beam splitter PBS2 are incident to a first photodiode PD 1; the light beam transmitted by the second PBS2 is combined with the laser emitted by the second reference light source LO2 at the third beam splitter BS3 and then is incident on the four-quadrant detector QPD for heterodyne interferometry; the captured light reflected by the micro-nano particles MS is reflected by a first spectroscope BS1 after passing through a first convex lens L1, a spatial light modulator SLM and a first polarizing beam splitter PBS1, and is incident to a second photodiode PD2 for heterodyne interference measurement after passing through a second spectroscope BS2 and the light beam emitted by a first reference light source LO 1; the micro-nano particles MS are positioned in the center of the vacuum cavity VC, and six electrodes are symmetrically arranged on the sides of the six sides of the solid around the optical trap capturing area to form six sides of a cube.
And receiving a light beam transmitted by the second polarizing beam splitter PBS2 and a light beam reflected back to the first polarizing beam splitter PBS1 after the micro-nano particles MS are irradiated by the captured light. For the light beam transmitted by the second polarization beam splitter PBS2, the light beam is combined with the light beam emitted by the second reference light source LO2 by the third beam splitter BS3, and heterodyne interferometry is performed by a four-quadrant detector, so that the displacement of the micro-nano particles in the direction perpendicular to the captured light is obtained. And for the light beam returning to the first polarizing beam splitter PBS1, the light beam is reflected by the first beam splitter BS1, and under the action of the second beam splitter BS2, the light beam is combined with the light beam emitted from the first reference light source LO1 and enters the second photodiode PD2 to perform heterodyne interferometry, so that the displacement of the micro-nano particles in the direction parallel to the captured light is obtained. And (3) carrying out feedback cooling regulation on the light intensity I output by the laser source LS by using the measured displacement of the micro-nano particles.
The micro-nano particle MS is a medium for pressure measurement and is provided by a micro-nano particle release device in each measurement process; the micro-nano particles MS are made of silicon materials.
The vacuum cavity provides a measuring environment close to vacuum for the micro-nano particles, a light-transmitting optical window is arranged on the cavity wall of the vacuum cavity, and optical signals inside and outside the vacuum cavity are transmitted through the optical window.
Six electrodes of the driving electric field apply voltages for driving the particles to rotate.
The spatial light modulator modulates the wave front phase of the captured light to form the holographic optical tweezers, and is further used for changing the optical trap capturing area of the holographic optical tweezers.
The polarization control and detection device is used for detecting the rotation frequency of the micro-nano particles, and the rotation frequency of the micro-nano particles is obtained by analyzing and processing light signals received by the first photodiode PD 1.
The original laser is processed into laser in a p polarization direction through the first polarizing beam splitter PBS1, then the captured light is in the p polarization direction, the captured light in the p polarization direction is influenced by rotation of the micro-nano particles in the vacuum cavity to generate light in an s polarization direction, and then the light is reflected to the first photodiode PD1 through the second polarizing beam splitter PBS2, and then the light intensity change frequency in the s polarization direction is analyzed to obtain the rotation frequency of the micro-nano particles.
The residual gas analyzer is used for the composition and quality of gas molecules in the vacuum chamber.
The specific implementation process of the invention is as follows:
1) starting a spatial resolution pressure measurement system, irradiating the micro-nano particles MS in the vacuum cavity VC with captured light to form a single-beam light trap capture area aiming at the micro-nano particles, and capturing light to generate light force on the micro-nano particles MS;
2) releasing a micro-nano particle from the upper part of the optical trap capturing area, then enabling the micro-nano particle MS to make free falling body movement downwards under the action of gravity, enabling the micro-nano particle MS to reach the optical trap capturing area to be captured, and stabilizing the micro-nano particle MS at the center of the optical trap capturing area through feedback cooling;
3) applying voltage to six electrodes around the optical trap trapping region to form a vertical upward electric field, wherein the electric field generates an electric field force F to the micro-nano particles MSEAdjusting the light intensity I of the captured light through feedback cooling to enable the micro-nano particles MS to have the electric field force FEKeeping balance under the stress of the light force and the gravity, and measuring the electric field force and the light intensity of the captured light;
4) gradually increasing the electric field from small to large in a preset electric field value range, specifically from 1 × 103V/m is gradually increased to 1X 105V/m, repeating the step 4) for multiple times of measurement, reducing the light intensity I of the captured light through feedback cooling during each measurement, enabling the micro-nano particles to be always in a stress balance state, and measuring the electric field force and the light intensity of the captured light; the linear relation I between the electric field force obtained by multiple times of measurement and the light intensity I of the captured light according to the following formula is alpha FEFitting the + beta to obtain a first fitting parameter alpha and a second fitting parameter beta to obtain a linear relation;
5) the linear relation I-alpha F is entered when the light intensity I-0 of the non-captured light is equal toEThe electric field force F obtained in + betaECalculating to obtain the radius r of the micro-nano particles by combining the known density of the micro-nano particles as the gravity of the micro-nano particles, namely the mass m of the micro-nano particles;
6) measuring residual gas molecular mass m in vacuum cavity VC by residual gas analyzer0；
7) Under the condition of no electric field, the light intensity of the captured light is adjusted through feedback cooling to keep the micro-nano particles MS in balance under the stress of light force and gravity, the micro-nano particles reach a stable motion state under the action of the captured light, and the rotation frequency of the micro-nano particles at the moment is measured by a polarization control and detection device to be used as the stable rotation frequency f of the micro-nano particles without the electric fieldopt；
A first photodiode PD1 in the polarization control and detection device receives an optical signal and analyzes the optical signal to obtain the change frequency of the polarized light intensity vertical to the captured light, and 1/2 of the change frequency of the polarized light intensity vertical to the captured light is taken as the rotation frequency of the micro-nano particles.
8) Modulating through a Spatial Light Modulator (SLM), moving an optical trap capturing area of the holographic optical tweezers, and moving to a position to be measured;
9) opening an electric field, and controlling the electric field to drive the micro-nano particles to be higher than the stable rotation frequency f of the micro-nano particles without the electric fieldoptRotating, adjusting the light intensity of the captured light through feedback cooling to keep the micro-nano particles MS balanced under the stress of light force and gravity, and measuring the rotation frequency of the micro-nano particles at the moment by using a polarization control and detection device as the stable rotation frequency f with an electric field0；
The specific implementation generally needs to be more than two orders of magnitude higher, and here the higher the rotation frequency, the lower limit of the air pressure that can be measured.
Sinusoidal voltage signals with equal amplitude and frequency are applied to the front, back, left and right electrodes on the same plane, and the phase of the driving signals between the two adjacent electrodes is different by a quarter of a cycle. Thus, an electric field with constant size and direction rotating in a plane is generated at the micro-nano particles. Due to the electric dipole moment coupling of the electric field and the micro-nano particles, the micro-nano particles can rotate along with the electric field.
10) Closing the electric field, measuring the data of the change of the rotation frequency of the micro-nano particles along with the time after the electric field is closed, and fitting the following formula by substituting to obtain the relaxation time tau:
wherein f (t) represents the rotation frequency of the micro-nano particles at the moment t, t represents the moment, e represents a natural constant, tau represents relaxation time, t represents0Indicating the moment when the electric field is switched off;
then, the retardation coefficient beta of the gas is calculated according to the following formula based on the relaxation time taurot：
τ＝I/βrot
Wherein, betarotThe retardation coefficient of the gas is expressed, I represents the moment of inertia of the micro-nano particles, and I is the moment of inertia of the micro-nano particlesObtaining the mass m and the radius r of the nano particles;
finally according to the retardation coefficient beta of the gasrotMolecular mass m of residual gas0And processing the radius r of the micro-nano particles by adopting the following formula to obtain the pressure of the position to be measured:
wherein, k represents the pressure coefficient, P represents the pressure of the position to be measured, T represents the temperature of the residual gas in the vacuum chamber, kBRepresents Boltzmann constants;
11) and continuously repeating the steps 8) to 10), and measuring the pressure intensities of different positions in the vacuum cavity to form pressure intensity distribution.
Fig. 3 is a schematic diagram of changing the trapping position using holographic optical tweezers. Where a), c), e) represent three phase distributions on the spatial light modulator, for convenience represented by a transmissive spatial light modulator, and b), d), f) are the corresponding three trapping patterns. In an optical path diagram, collimated capture light beams sequentially pass through a spatial light modulator and a converging lens from left to right, and are finally focused at a designated position in an image space to form a capture area. a) The spatial light modulator does not modulate the captured light, the phase of the captured light is equal everywhere on the exit surface of the spatial light modulator, and correspondingly in b), the captured light is focused on the center of the focal plane of the lens after being converged by the lens. c) The medium spatial light modulation adjusts the phase of the trapped light in the form of a diffraction grating, as shown in fig. d), causing the focus position of the trapped light to shift laterally. The distance and direction of movement can be adjusted by varying the groove density and groove direction of the diffraction grating. e) The medium spatial light modulator adjusts the phase of the trapped light in the form of a Fresnel lens such that the focal position of the trapped light in f) is moved axially by a distance that is adjustable by the axial reticle density on the spatial light modulator. Scalar sum is carried out on the two phase modulations of c) and e), and 2 pi is subjected to residue, so that a phase adjusting mode for simultaneously changing the transverse and axial focusing positions can be obtained.
Therefore, the implementation shows that the pressure distribution measurement of the micro-nano scale spatial resolution under high vacuum can be realized by utilizing the control flexibility of the holographic optical tweezers and combining the local detection means of the micro-nano particles.
Claims (6)
1. The utility model provides a spatial resolution pressure measurement system based on vacuum holographic optical tweezers which characterized in that:
the vacuum holographic optical tweezers spatial resolution pressure measurement system comprises a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device, a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device and a residual gas analyzer RGA;
the driving electric field device E comprises six electrodes, the polarization control and detection device comprises a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, the polarization detection device comprises a second polarization beam splitter PBS2 and a first photodiode PD1, the optical tweezers device comprises a laser source LS, a first convex lens L1 and a second convex lens L2, and the feedback cooling device comprises a first beam splitter BS1, a second beam splitter BS2, a first reference light source LO1, a second photodiode PD2, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD; an optical tweezers device, a driving electric field device E, a micro-nano particle MS and a residual gas analyzer RGA are arranged in a vacuum cavity VC, a second convex lens L2 and a first convex lens L1 are respectively symmetrically positioned at the upper side and the lower side of the micro-nano particle MS and are arranged on the same optical axis, a spatial light modulator SLM, a first polarizing beam splitter PBS1, a first beam splitter BS1, a second beam splitter BS2, a laser source LS, a first reference light source LO1 and a second photodiode PD2 are arranged outside the vacuum cavity VC below the first convex lens L1, a second polarizing beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, and a first photodiode PD1, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD are arranged outside the vacuum cavity VC;
original laser is emitted from a laser source LS, is transmitted through a first beam splitter BS1 and then enters a first polarization beam splitter PBS1 to be transmitted, so that light beams are changed into p polarization, and then are subjected to reflection modulation through a spatial light modulator SLM and transmission convergence through a first convex lens L1 in sequence to form captured light, the captured light irradiates a micro-nano particle MS to form a light trap capturing area, meanwhile, the captured light is transmitted and converged by a second convex lens L2 after passing through the micro-nano particles, and then is incident to a second polarizing beam splitter PBS2 for reflection and transmission, the reflected light only contains s polarization, the transmitted light only contains p polarization, the light beam reflected by the second polarization beam splitter PBS2 is incident to the first photodiode PD1, the light beam transmitted by the second polarization beam splitter PBS2 is incident to the third beam splitter BS3 and transmitted, the light beam transmitted by the third beam splitter BS3 is incident to the four-quadrant detector QPD, and the light beam emitted by the second reference light source LO2 is reflected by the third beam splitter BS3 and incident to the four-quadrant detector QPD; a reflected light beam of the captured light irradiating the micro-nano particles MS is reversely reflected to a first beam splitter BS1 to be reflected and then enters a second polarization beam splitter PBS2 to be transmitted, a light beam transmitted by the second polarization beam splitter PBS2 enters a second photodiode PD2, and a light beam emitted by a first reference light source LO1 is reflected by a second polarization beam splitter PBS2 and then enters a second photodiode PD 2; the six electrodes are respectively arranged beside the side of the solid six sides around the optical trap capturing area.
2. The vacuum holographic optical tweezers-based spatially resolved pressure measurement system of claim 1, wherein: the light beam transmitted by the second PBS2 is combined with the light emitted by the second reference light source LO2 at the third spectroscope BS3, and the light beam is incident to a four-quadrant detector for detection and heterodyne interferometry to obtain the displacement of the micro-nano particles in the direction vertical to the captured light; the light beam reflected back to the first polarizing beam splitter PBS1 after the micro-nano particles MS are irradiated by the captured light is reflected by the first beam splitter BS1, then is combined with the light emitted by the first reference light source LO1 at the position of the second beam splitter BS2, and is incident to the second photodiode PD2 for detection and heterodyne interferometry, so that the displacement of the micro-nano particles in the direction parallel to the captured light is obtained; and performing feedback cooling adjustment on the light intensity I output by the laser source LS by using the displacement of the measured micro-nano particles in the direction vertical to the captured light and the direction parallel to the captured light.
3. The vacuum holographic optical tweezers-based spatially resolved pressure measurement system of claim 1, wherein: and a light-transmitting optical window for light beam transmission/passing is formed on the cavity wall of the vacuum cavity.
4. The vacuum holographic optical tweezers-based spatially resolved pressure measurement system of claim 1, wherein: the laser source LS outputs the laser beam, and the laser beam is modulated by the spatial light modulator SLM and converged by the first convex lens L1 to form the vacuum holographic optical tweezers in the vacuum cavity.
5. The pressure measurement method of the vacuum holographic optical tweezers based spatial resolution pressure measurement system according to any one of claims 1 to 4, wherein: the method comprises the following steps:
1) starting a spatial resolution pressure measurement system, irradiating the micro-nano particles MS in the vacuum cavity VC by using captured light to form a light trap capture area, and generating optical power on the micro-nano particles MS by using the captured light;
2) releasing a micro-nano particle from the upper part of the optical trap capturing area, then enabling the micro-nano particle MS to make free falling body movement downwards under the action of gravity, enabling the micro-nano particle MS to reach the optical trap capturing area to be captured, and stabilizing the micro-nano particle MS at the center of the optical trap capturing area through feedback cooling;
3) applying voltage to six electrodes around the optical trap trapping region to form a vertical upward electric field, wherein the electric field generates an electric field force F to the micro-nano particles MSEAdjusting the light intensity I of the trapped light to make the micro-nano particles MS in the electric field force FEKeeping balance under the stress of the light force and the gravity, and measuring the electric field force and the light intensity of the captured light;
4) gradually increasing the electric field in the preset electric field value range from small to large, repeating the step 4) for multiple times of measurement, and utilizing the linear relation I between the electric field force obtained by multiple times of measurement and the light intensity I of the captured light according to the following formula ═ alpha FEFitting the + beta to obtain a first fitting parameter alpha and a second fitting parameter beta to obtain a linear relation;
5) the linear relation I-alpha F is entered when the light intensity I-0 of the non-captured light is equal toEThe electric field force F obtained in + betaEAs microObtaining the mass m of the micro-nano particles by the gravity of the nano particles, and calculating by combining the known density of the micro-nano particles to obtain the radius r of the micro-nano particles;
6) measuring molecular mass m of residual gas in vacuum cavity VC by residual gas analyzer RGA0；
7) Under the condition of no electric field, the micro-nano particles MS are kept balanced under the stress of optical force and gravity by adjusting the light intensity I of the captured light, and the rotation frequency of the micro-nano particles at the moment is measured by a polarization control and detection device to be used as the stable rotation frequency f of the micro-nano particles without the electric fieldopt；
8) Modulating through a Spatial Light Modulator (SLM), moving an optical trap capturing area of the vacuum holographic optical tweezers, and moving to a required position to be measured;
9) opening an electric field, and controlling the electric field to drive the micro-nano particles to be higher than the stable rotation frequency f of the micro-nano particles without the electric fieldoptRotating, keeping the micro-nano particles MS balanced under the stress of light force and gravity by adjusting the light intensity I of the captured light, and measuring the rotation frequency of the micro-nano particles at the moment by using a polarization control and detection device as the stable rotation frequency f with an electric field0；
10) Closing the electric field, measuring the data of the change of the rotation frequency of the micro-nano particles along with the time after the electric field is closed, and fitting the following formula by substituting to obtain the relaxation time tau:
wherein f (t) represents the rotation frequency of the micro-nano particles at the moment t, t represents the moment, e represents a natural constant, tau represents relaxation time, t represents0Indicating the moment when the electric field is switched off;
then, the retardation coefficient beta of the gas is calculated according to the following formula based on the relaxation time taurot：
τ＝J/βrot
Wherein, betarotThe retardation coefficient of the gas is expressed, J represents the moment of inertia of the micro-nano particles, and the moment of inertia J of the micro-nano particles is expressed by the mass m and the radius r of the micro-nano particlesObtaining;
finally according to the retardation coefficient beta of the gasrotMolecular mass m of residual gas0And processing the radius r of the micro-nano particles by adopting the following formula to obtain the pressure of the position to be measured:
wherein, k represents the pressure coefficient, P represents the pressure of the position to be measured, T represents the temperature of the residual gas molecules in the vacuum chamber, kBRepresents Boltzmann constants;
11) and continuously repeating the steps 8) to 10), and measuring the pressure intensities of different positions in the vacuum cavity to form pressure intensity distribution.
6. A pressure measurement method as claimed in claim 5, characterized by:
in the polarization control and detection device, a first photodiode PD1 receives an optical signal and analyzes the optical signal to obtain the s-polarized light intensity change frequency, and 1/2 of the s-polarized light intensity change frequency is taken as the rotation frequency of the micro-nano particles.
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