CN112867811A - Surface treatment liquid and surface treatment method for nickel-containing material - Google Patents
Surface treatment liquid and surface treatment method for nickel-containing material Download PDFInfo
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- CN112867811A CN112867811A CN201980068276.4A CN201980068276A CN112867811A CN 112867811 A CN112867811 A CN 112867811A CN 201980068276 A CN201980068276 A CN 201980068276A CN 112867811 A CN112867811 A CN 112867811A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/48—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 not containing phosphates, hexavalent chromium compounds, fluorides or complex fluorides, molybdates, tungstates, vanadates or oxalates
- C23C22/50—Treatment of iron or alloys based thereon
Abstract
To provide a surface treatment liquid for a nickel-containing material, which suppresses the formation of stains when etching the nickel-containing material and can improve the adhesion between a resist pattern and the nickel-containing material; and a surface treatment method for a nickel-containing material using the same. A surface treatment liquid for treating the surface of a nickel-containing material, and a method for treating the surface of a nickel-containing material, which comprises a step of bringing the surface treatment liquid into contact with the surface of the nickel-containing material. The surface treatment liquid is an aqueous solution containing: (A) 0.05-5 mass% of iron ions; (B) 0.5-20% by mass of an inorganic acid; (C) 1 to 20 mass% of at least 1 compound selected from the group consisting of triammonium citrate, ammonium lactate, ammonium formate, diammonium hydrogen citrate, ammonium glycolate and ammonium malate; and water.
Description
Technical Field
The present invention relates to a surface treatment liquid for treating a surface of a nickel-containing material, and a surface treatment method for a nickel-containing material using the same. More specifically, the present invention relates to a surface treatment liquid for treating the surface of a nickel-containing material such as invar material, e.g., Fe — Ni 36%, or austenitic stainless steel, and a method for treating the surface of a nickel-containing material using the same.
Background
Nickel-containing materials are used for precision electronic parts such as printed circuit boards, lead frames, connector terminals, package substrates, and the like; shadow mask, high-definition display member, etc. Above all, the invar material is suitable for use in these members and the like because of its small thermal expansion coefficient.
A technique of forming a thin line by processing a metal material on which a resist pattern is formed by wet etching is known. In the wet etching method, fine foreign matter called "smut" may be formed on the surface of the metal material, and the adhesion between the metal material and the resist pattern may be reduced. Therefore, a method has been developed in which the surface of a metal material is treated with a surface treatment liquid to suppress the formation of stains and improve the adhesion between the metal material and a resist pattern.
For example, patent document 1 discloses a surface treatment agent containing hydrogen peroxide, an inorganic acid, an azole, silver ions, and halogen ions as a surface treatment agent for improving adhesion between a copper-plated substrate and a dry film resist. Further, patent document 2 discloses a surface treatment agent for copper or copper alloys containing a nitrogen-containing heterocyclic compound and an acid such as an inorganic acid or an organic acid.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2003-003283
Patent document 2: japanese patent laid-open No. 2008-045156
Disclosure of Invention
Problems to be solved by the invention
The surface treatment agents disclosed in patent documents 1 and 2 are effective to some extent for copper. However, even when these surface treatment agents are applied to a nickel-containing material such as an invar material or austenitic stainless steel, it is difficult to suppress the formation of stains, and it is not possible to improve the adhesion between the nickel-containing material and the resist pattern after wet etching. If the substrate made of a nickel-containing material or the like has low adhesion to the resist pattern, the resist pattern is easily peeled off, and it is difficult to form fine wiring conforming to the resist pattern. Therefore, a surface treatment liquid capable of suppressing the formation of stains and improving the adhesion between a nickel-containing material and a resist pattern is desired.
Accordingly, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a surface treatment liquid for a nickel-containing material, which can suppress the formation of stains when etching a nickel-containing material and can improve the adhesion between a resist pattern and the nickel-containing material. Another object of the present invention is to provide a method for surface treatment of a nickel-containing material using the surface treatment liquid.
Means for solving the problems
The present inventors have conducted extensive studies and found that: the present inventors have completed the present invention by solving the above problems with a surface treatment solution for nickel-containing materials, which is an aqueous solution containing specific components.
That is, according to the present invention, there is provided a surface treatment liquid for treating a surface of a nickel-containing material, which is an aqueous solution containing: (A) 0.05-5 mass% of iron ions; (B) 0.5-20% by mass of an inorganic acid; (C) 1 to 20 mass% of at least 1 compound selected from the group consisting of triammonium citrate, ammonium lactate, ammonium formate, diammonium hydrogen citrate, ammonium glycolate and ammonium malate; and water.
Further, according to the present invention, there can be provided a surface treatment method of a nickel-containing material, having: and a step of bringing the surface treatment liquid into contact with the surface of the nickel-containing material.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, it is possible to provide a surface treatment liquid for a nickel-containing material, which can suppress the formation of stains when etching a nickel-containing material and can improve the adhesion between a resist pattern and a nickel-containing material. Further, according to the present invention, there is provided a surface treatment method for a nickel-containing material using the surface treatment liquid.
Detailed Description
Hereinafter, embodiments of the present invention will be specifically described. The "nickel-containing material" in the present specification means a metal material containing at least 1 mass% of nickel. Examples of the nickel-containing material include: a simple substance of nickel; Fe-Ni 36%, Fe-Ni 32% -Co 5%, Fe-Ni 29% -Co 17%, Fe-Ni 42% -Cr-Ti, Ni-Mo 28% -Fe 2% and other low thermal expansion iron-nickel alloys (also called invar materials); austenitic stainless steels such as SUS301, SUS304, and SUS 316; copper-nickel alloys such as cupronickel and zinc cupronickel; a nickel-titanium alloy; a nickel-zinc alloy; a nickel-chromium alloy; nickel-cobalt alloys, and the like. The nickel-containing material to be the surface-treated material is preferably the above-mentioned invar material or stainless steel, and particularly preferably an invar material.
A surface treatment liquid according to an embodiment of the present invention is a liquid composition for treating a surface of a nickel-containing material, and is an aqueous solution containing: (A) 0.05-5 mass% of iron ions; (B) 0.5-20% by mass of an inorganic acid; (C) 1 to 20 mass% of at least 1 compound selected from the group consisting of triammonium citrate, ammonium lactate, ammonium formate, diammonium hydrogen citrate, ammonium glycolate and ammonium malate; and water.
The surface treatment liquid contains (a) iron ions (hereinafter also referred to as "component (a)"). (A) The component (b) may be any compound as long as it can supply (generate) iron ions into the surface treatment liquid. As a supply source of iron ions, an iron (III) compound can be used. Examples of the iron (III) compound include iron (III) chloride, iron (III) bromide, iron (III) iodide, iron (III) sulfate, iron (III) nitrate, and iron (III) acetate. Since the supply source of the component (a) can suppress the formation of the sludge more effectively, iron (III) chloride and iron (III) sulfate are preferable, and iron (III) sulfate is particularly preferable. (A) The source of the component (C) may be an anhydride or a hydrate.
The concentration of the component (A) in the surface treatment liquid is 0.05 to 5% by mass, preferably 0.1 to 3% by mass, and more preferably 0.2 to 1% by mass. (A) The concentration of the component means the concentration of iron ions. For example, in the case of a surface treatment liquid containing 10 mass% of iron (III) sulfate, the concentration of the component (a) is about 2.8 mass%. If the concentration of the component (a) is less than 0.05 mass%, the time required for the surface treatment becomes extremely long, and therefore, the productivity is lowered. On the other hand, if the concentration of component (a) exceeds 5 mass%, it is difficult to suppress the formation of stains.
The surface treatment liquid contains (B) an inorganic acid (hereinafter also referred to as "component (B)"). Examples of the component (B) include sulfuric acid, nitric acid, boric acid, and hydrogen chloride. Among these, sulfuric acid and hydrogen chloride are preferable, and sulfuric acid is particularly preferable, because the effect of inhibiting the formation of stains is high. The sulfuric acid may be any one of concentrated sulfuric acid and dilute sulfuric acid. The commercially available sulfuric acid can be used as it is or diluted appropriately. The supply source of hydrogen chloride may be either concentrated hydrochloric acid or dilute hydrochloric acid. The commercially available hydrochloric acid can be used as it is or diluted as appropriate.
The concentration of the component (B) in the surface treatment liquid is 0.5 to 20% by mass, preferably 1 to 10% by mass, and more preferably 1 to 5% by mass. If the concentration of the component (B) is less than 0.5 mass%, the time required for the surface treatment becomes extremely long, and therefore, the productivity is lowered. On the other hand, if the concentration of the component (B) exceeds 20 mass%, it is difficult to suppress the formation of stains.
The surface treatment liquid contains (C) at least 1 compound selected from the group consisting of triammonium citrate, ammonium lactate, ammonium formate, diammonium hydrogen citrate, ammonium glycolate and ammonium malate (hereinafter also referred to as "(C) component"). As the component (C), commercially available products can be used. The component (C) is particularly preferably triammonium citrate because of its high effect of inhibiting the formation of stains.
The concentration of the component (C) in the surface treatment liquid is 1 to 20 mass%, preferably 2 to 17 mass%, and more preferably 3 to 15 mass%. If the concentration of the component (C) is less than 1 mass%, the effect of suppressing the formation of stains cannot be sufficiently obtained. On the other hand, even if the concentration of component (C) exceeds 20 mass%, the effect obtained by blending component (C) is not substantially improved, and it is difficult to dissolve component (C).
The surface treatment liquid preferably further contains (D) formic acid (hereinafter also referred to as "component (D)"). By containing the component (D), the effect of inhibiting the formation of stains can be further improved. The concentration of the component (D) in the surface treatment liquid is preferably 0.05 to 5% by mass, more preferably 0.1 to 3% by mass, and particularly preferably 0.2 to 1% by mass. If the concentration of the component (D) is less than 0.05 mass%, the effect obtained by blending the component (D) is slightly insufficient. On the other hand, even if the concentration of the component (D) exceeds 5 mass%, the effect obtained by blending the component (D) is not substantially improved.
The surface treatment liquid preferably further contains (E) phosphoric acid (hereinafter also referred to as "component (E)"). The effect of inhibiting the formation of stains can be further improved by containing the component (E). The concentration of the component (E) in the surface treatment liquid is preferably 0.05 to 5% by mass, more preferably 0.1 to 4% by mass, and particularly preferably 0.3 to 2% by mass. If the concentration of component (E) is less than 0.05 mass%, the effect obtained by blending component (E) is slightly insufficient. On the other hand, even if the concentration of the component (E) exceeds 5 mass%, the effect obtained by blending the component (E) is not substantially improved.
The surface treatment liquid is an aqueous solution in which each component is dissolved in water. Therefore, the surface treatment liquid contains water as a solvent. The amount of water in the surface treatment liquid is preferably set to the balance according to the concentrations of the components (a) to (E). The water content in the surface treatment liquid when additives or the like described later are used is preferably set to the balance in accordance with the concentrations of the components (a) to (E) and the additives or the like. The water content in the surface treatment liquid may be about 60 to 99 mass%.
The surface treatment liquid may further contain known additives in addition to the above-described components and water within a range not impairing the effects of the present invention. Examples of the additives include stabilizers, solubilizers for respective components, antifoaming agents, pH adjusters, specific gravity adjusters, viscosity adjusters, wettability improvers, chelating agents, oxidizing agents, reducing agents, and surfactants. The concentrations of these additives are usually in the range of 0.001 to 10% by mass, respectively.
A surface treatment method for a nickel-containing material (hereinafter also simply referred to as "surface treatment method") according to an embodiment of the present invention includes a step of bringing the surface treatment liquid into contact with a surface of the nickel-containing material. By performing surface treatment by bringing the surface treatment liquid into contact with the surface, a nickel-containing material which can be etched while suppressing the formation of stains can be obtained. The method of bringing the surface treatment liquid into contact with the surface of the nickel-containing material is not particularly limited, and a general pretreatment method can be employed. Specifically, the surface treatment liquid can be brought into contact with the surface of the nickel-containing material by a pretreatment method such as an immersion method, a spray method, or a rotary method.
When the surface of the nickel-containing material is treated by the immersion method, the nickel-containing material may be immersed in the surface treatment liquid adjusted to a temperature range of 10 to 90 ℃ for about 1 to 600 seconds.
In addition, when the surface of the nickel-containing material is treated by spraying, for example, a surface treatment liquid adjusted to a temperature range of 10 to 90 ℃ may be sprayed onto the surface of the nickel-containing material at a pressure in a range of 0.01 to 1.0 MPa.
The surface treatment liquid is brought into contact with the surface of the nickel-containing material to treat the surface, and then washed with pure water and dried. Next, a resist pattern is formed on the surface of the nickel-containing material by a conventionally known method, and then the nickel-containing material is etched with an etching solution, whereby fine wiring having good adhesion to the resist pattern can be formed.
The surface treatment liquid and the surface treatment method using the same can be suitably used for processing a nickel-containing material for electrodes and wiring of devices such as liquid crystal displays, plasma displays, touch panels, organic EL, solar cells, and lighting fixtures.
Examples
The present invention will be described in detail below with reference to examples and comparative examples, but the present invention is not limited to these examples.
< ingredient (A) >
As the component (A), A-1 and A-2 shown below were prepared.
A-1: iron sulfate (III)
A-2: ferric chloride (III)
< ingredient (B) >
As the component (B), B-1 and B-2 shown below were prepared.
B-1: sulfuric acid
B-2: hydrochloric acid
< ingredient (C) >
As the component (C), C-1 to C-7 shown below were prepared.
C-1: citric acid triammonium salt
C-2: ammonium lactate
C-3: ammonium formate
C-4: diammonium hydrogen citrate
C-5: ammonium tartrate
C-6: ammonium sulfate
C-7: citric acid
< ingredient (D) >
As component (D), D-1 shown below was prepared.
D-1: formic acid
< ingredient (E) >
As component (E), E-1 shown below was prepared.
E-1: phosphoric acid
< liquid for surface treatment of Nickel-containing Material >
(example 1 and comparative example 1)
The respective components were mixed so as to have the formulation shown in Table 1, to obtain treatment liquids No.1 to 17. In table 1, the concentration of component (a) represents the concentration of iron ions, and the concentration of component (B) represents the concentration of sulfuric acid or hydrogen chloride. The water is mixed so that the total amount of the components becomes 100 mass%.
TABLE 1
< surface treatment of Nickel-containing Material >
(example 2-1)
An Fe-Ni 36% foil (hereinafter also referred to as "untreated" substrate ") having a length of 100 mm. times.a width of 100 mm. times.a thickness of 0.030mm was prepared. The surface was sprayed with the treatment liquid No.1 by a spraying method at 35 ℃ under a spraying pressure of 0.1MPa, and then washed with 3 mass% hydrochloric acid and ion-exchanged water in this order. Using a dry film resist, resist patterns having a line/space of 10 μm/10 μm were formed at 30 sites on a substrate. Next, an iron chloride-based pattern etching solution (trade name "ADEKA CHELUMICA IN-654", manufactured by ADEKA) was sprayed (150 seconds) under a spray pressure of 0.1MPa by a spray method to etch the pattern, and then washed with 3 mass% hydrochloric acid and ion-exchanged water IN this order to obtain example substrate No. 1.
(example 2-2 to 2-10)
Example substrates No.2 to 10 were obtained in the same manner as in example 2-1 except that treatment liquids No.2 to 10 were used instead of treatment liquid No.1, respectively.
Comparative examples 2-1 to 2-7
Comparative example substrates 1 to 7 were obtained in the same manner as in example 2-1 except that treatment liquids No.11 to 17 were used instead of treatment liquid No.1, respectively.
Comparative examples 2-8 to 2-9
Using a dry film resist, resist patterns of 10 μm/10 μm in line/space were formed at 30 sites on an untreated substrate. Next, an iron chloride-based pattern etching solution (trade name "ADEKA CHELUMICA IN-654", manufactured by ADEKA) was sprayed (150 seconds) under a spray pressure of 0.1MPa by a spray method to etch the pattern, and then washed with 3 mass% hydrochloric acid and ion-exchanged water IN this order to obtain a substrate 8 of comparative example. In addition, an untreated substrate was used as comparative example substrate 9.
< evaluation example 1 and comparative evaluation example 1>
(evaluation of soil)
The maximum thickness of the stains deposited on the surfaces of the substrates of examples 1 to 10 and comparative examples 1 to 9 was measured by an X-ray photoelectron spectroscopy apparatus, and evaluated according to the evaluation criteria shown below. The results are shown in Table 2.
+++: maximum thickness of dirt less than 10nm
++: the maximum thickness of the dirt is more than 10nm and less than 30nm
+: the maximum thickness of the dirt is more than 30nm and less than 50nm
-: the maximum thickness of the dirt is more than 50nm and less than 100nm
- -: the maximum thickness of the dirt is more than 100nm and less than 300nm
- - -: the maximum thickness of the dirt is more than 300nm
(evaluation of adhesion)
The substrate was observed, and the adhesiveness of the resist pattern was evaluated according to the evaluation criteria shown below. The results are shown in Table 2.
+++: all the resist patterns of 30 sites were held on the substrate.
++: 28 to 29 portions of the resist pattern are held on the substrate.
+: the resist patterns of 26 to 27 portions are held on the substrate.
- -: the resist patterns of 24 to 25 portions are held on the substrate.
- - -: the resist patterns of 20 to 23 portions are held on the substrate.
- - - -: the resist patterns of 19 or less portions are held on the substrate.
TABLE 2
From the results shown in table 2, it can be seen that: in the example substrates nos. 1 to 10, the formation of stains was sufficiently suppressed and the adhesion of the resist pattern was good as compared with the comparative example substrates 1 to 8. Further, when the results of evaluation examples 1-1 to 1-7 were compared with the results of evaluation examples 1-8 to 1-9, it was found that: when iron sulfate is used as the component (a) and sulfuric acid is used as the component (B), the adhesion of the resist pattern is particularly good. Further, when the results of evaluation examples 1-1 to 1-9 were compared with the results of evaluation examples 1-10, it was found that: good results were obtained when a treatment liquid containing formic acid or phosphoric acid was used.
Further, when the results of evaluation examples 1-1 to 1-2 were compared with the results of evaluation examples 1-6 to 1-7, it was found that: particularly good results are obtained when a treatment liquid containing both formic acid and phosphoric acid is used. Further, when the results of evaluation examples 1-1 to 1-2 were compared with the results of evaluation examples 1-3 to 1-5, it was found that: particularly good results can be obtained when triammonium citrate is used as component (C).
When a treatment solution containing triammonium citrate, formic acid and phosphoric acid at a predetermined concentration was used, the maximum thickness of the stain was as thin as the untreated substrate, and the adhesion of the resist pattern was the best (evaluation examples 1-1 to 1-2). Further, when ammonium tartrate or ammonium sulfate was used as the component (C), the formation of stains was not suppressed, and the adhesion of the resist pattern was also lowered (comparative examples 1-1 to 1-2). From these cases, it can be seen that: when an ammonium salt of a specific organic acid is used as the component (C), an initial effect can be obtained.
As described above, according to the present invention, it is possible to provide a surface treatment liquid for a nickel-containing material and a surface treatment method for a nickel-containing material, which can suppress the formation of stains when etching a nickel-containing material and can improve the adhesion between a resist pattern and the nickel-containing material.
Claims (4)
1. A surface treatment liquid for treating the surface of a nickel-containing material, which is an aqueous solution containing:
(A) 0.05-5 mass% of iron ions;
(B) 0.5-20% by mass of an inorganic acid;
(C) 1 to 20 mass% of at least 1 compound selected from the group consisting of triammonium citrate, ammonium lactate, ammonium formate, diammonium hydrogen citrate, ammonium glycolate and ammonium malate; and
and (3) water.
2. The surface treatment liquid according to claim 1, further comprising (D) 0.05 to 5% by mass of formic acid.
3. The surface treatment liquid according to claim 1 or 2, further comprising (E) 0.05 to 5% by mass of phosphoric acid.
4. A method of surface treating a nickel-containing material, comprising: a step of bringing the surface treatment liquid according to any one of claims 1 to 3 into contact with the surface of a nickel-containing material.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018195566 | 2018-10-17 | ||
| JP2018-195566 | 2018-10-17 | ||
| PCT/JP2019/034713 WO2020079977A1 (en) | 2018-10-17 | 2019-09-04 | Surface treatment solution, and method for treating surface of nickel-containing material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112867811A true CN112867811A (en) | 2021-05-28 |
Family
ID=70284580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980068276.4A Pending CN112867811A (en) | 2018-10-17 | 2019-09-04 | Surface treatment liquid and surface treatment method for nickel-containing material |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2020079977A1 (en) |
| KR (1) | KR20210075151A (en) |
| CN (1) | CN112867811A (en) |
| TW (1) | TW202024394A (en) |
| WO (1) | WO2020079977A1 (en) |
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| AU638121B2 (en) * | 1990-04-30 | 1993-06-17 | Atochem North America, Inc. | Apparatus and process to regenerate a trivalent chromium bath |
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| JP5299887B2 (en) * | 2008-03-26 | 2013-09-25 | 奥野製薬工業株式会社 | Electrolytic solution for trivalent chromium plating film |
| JP2016060918A (en) * | 2014-09-16 | 2016-04-25 | 株式会社Ｊｃｕ | Decorative trivalent chromium plating solution and decorative chromium plating method utilizing the same |
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2019
- 2019-09-04 WO PCT/JP2019/034713 patent/WO2020079977A1/en active Application Filing
- 2019-09-04 JP JP2020552935A patent/JPWO2020079977A1/en active Pending
- 2019-09-04 CN CN201980068276.4A patent/CN112867811A/en active Pending
- 2019-09-04 KR KR1020217014245A patent/KR20210075151A/en active Search and Examination
- 2019-10-04 TW TW108136074A patent/TW202024394A/en unknown
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| CA903649A (en) * | 1972-06-27 | J. Striedieck Walter | Preferential etching composition and method | |
| GB430111A (en) * | 1933-09-13 | 1935-06-13 | Multigraph Co | Improvements in compositions for treating planographic printing plates |
| GB1275088A (en) * | 1968-08-02 | 1972-05-24 | Chemcut Corp | Preferential etching composition and method |
| SU1275060A1 (en) * | 1985-07-04 | 1986-12-07 | Рижское Ордена Ленина Производственное Объединение Вэф Им.В.И.Ленина | Solution for pickling permalloy |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW202024394A (en) | 2020-07-01 |
| JPWO2020079977A1 (en) | 2021-09-16 |
| KR20210075151A (en) | 2021-06-22 |
| WO2020079977A1 (en) | 2020-04-23 |
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