CN112864062A - Silicon carbide etching tool - Google Patents

Abstract

The invention discloses a silicon carbide etching tool, and relates to the technical field of silicon carbide etching. The silicon carbide etching tool comprises a support rod and a plurality of brackets. The bracing piece is vertical to be set up, and the side of bracing piece has seted up a plurality of first connecting gap. A plurality of brackets all are the level setting, and all are used for accepting the carborundum substrate, and a plurality of brackets detachably card one by one is in a plurality of first connection notches. The silicon carbide etching tool can etch a plurality of silicon carbide substrates simultaneously, and has the advantages of being high in etching efficiency and etching flexibility.

Description

Silicon carbide etching tool

Technical Field

The invention relates to the technical field of silicon carbide etching, in particular to a silicon carbide etching tool.

Background

In the processing and production process of silicon carbide (SiC), the quality of a silicon carbide substrate is important, and the qualification rate of grinding and polishing is directly influenced, and even the qualification rate of a chip end is influenced. The current method for inspecting the quality of the silicon carbide substrate needs to etch the silicon carbide substrate in a KOH solution with high temperature. However, the existing etching jig can only etch one silicon carbide substrate at a time, resulting in low etching efficiency.

In view of the above, it is important to develop a silicon carbide etching tool capable of solving the above technical problems.

Disclosure of Invention

The invention aims to provide a silicon carbide etching tool which can etch a plurality of silicon carbide substrates simultaneously and has the characteristics of high etching efficiency and high etching flexibility.

The invention provides a technical scheme that:

in a first aspect, an embodiment of the present invention provides a silicon carbide etching tool, including a support rod and a plurality of brackets;

the supporting rod is vertically arranged, and a plurality of first connecting gaps are formed in the side surface of the supporting rod;

a plurality of the brackets are all horizontally arranged and are all used for bearing the silicon carbide substrate, and the brackets are detachably clamped in the first connecting notches one by one.

With reference to the first aspect, in a first implementation manner of the first aspect, a second connection notch is formed in the top and/or the bottom of the bracket, and when the bracket is clamped in the first connection notch, a part of an inner wall of the first connection notch is clamped in the second connection notch.

With reference to the first aspect and the foregoing implementation manner, in a second implementation manner of the first aspect, the plurality of first connection notches are respectively formed in two opposite side surfaces of the support rod.

With reference to the first aspect and the foregoing implementation manner, in a third implementation manner of the first aspect, the number of the support rods is two, the two support rods are arranged at intervals, the two support rods are both provided with the first connection notches, and the bracket is detachably clamped in the first connection notches of the two support rods.

With reference to the first aspect and the foregoing implementation manner, in a fourth implementation manner of the first aspect, the bracket includes a connecting pipe and a bearing rod that are connected to each other, the bearing rod is used for bearing the silicon carbide substrate, the connecting pipe is a rectangular pipe, and the first connecting gap is matched with the connecting pipe.

With reference to the first aspect and the foregoing implementation manner, in a fifth implementation manner of the first aspect, the connecting pipe includes a first connecting section, a second connecting section, and a third connecting section that are sequentially connected, where the first connecting section, the second connecting section, and the third connecting section are collectively in a u shape, and the second connecting section is configured to be detachably clamped in the first connecting notch; and two ends of the bearing rod are respectively connected to the bottom of the first connecting section and the bottom of the third connecting section.

With reference to the first aspect and the foregoing implementation manner, in a sixth implementation manner of the first aspect, the silicon carbide etching tool further includes a fixing ring having an opening, and the fixing ring is connected to the first connection section and the third connection section and has elasticity;

the tail end of the fixing ring and the middle of the fixing ring are used for abutting against the edge of the silicon carbide substrate so as to fix the silicon carbide substrate on the bracket together.

With reference to the first aspect and the foregoing implementation manner, in a seventh implementation manner of the first aspect, two corresponding side surfaces of the first connection section and the second connection section are both provided with a connection hole, and the connection hole is a strip hole extending along a horizontal direction;

the upper part of the fixing ring movably extends into the connecting hole to be connected with the first connecting section and the third connecting section.

With reference to the first aspect and the foregoing implementation manner, in an eighth implementation manner of the first aspect, the two ends of the fixing ring are both provided with a fixing column, the fixing column is vertically arranged, a fixing notch is formed in a side surface of the fixing column, and a bottom wall of the fixing notch is used for abutting against an edge of the silicon carbide substrate.

With reference to the first aspect and the foregoing implementation manner, in a ninth implementation manner of the first aspect, the fixing columns are further disposed in the middle of the fixing ring, so that the silicon carbide substrate is fixed by the three fixing columns.

Compared with the prior art, the silicon carbide etching tool provided by the embodiment of the invention has the beneficial effects that:

this carborundum etching frock includes bracing piece and a plurality of bracket, and wherein, the vertical setting of bracing piece, and a plurality of first connecting gap have been seted up to the side of bracing piece. And a plurality of brackets are all horizontally arranged and are all used for bearing the silicon carbide substrate, and the brackets are detachably clamped in the first connecting notches one by one. Thus, when the silicon carbide etching tool is used, the support rods can be connected with the plurality of brackets at the same time, so that a plurality of silicon carbide substrates can be etched at the same time, the etching efficiency is high, the number of the brackets connected to the support rods can be adjusted according to etching requirements, a plurality of silicon carbide substrates corresponding to the number of the brackets can be etched at the same time, and the flexibility of the silicon carbide etching tool is improved.

In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below. It is appreciated that the following drawings depict only certain embodiments of the invention and are therefore not to be considered limiting of its scope. For a person skilled in the art, it is possible to derive other relevant figures from these figures without inventive effort.

Fig. 1 is a schematic perspective view of a silicon carbide etching tool according to an embodiment of the present invention.

Fig. 2 is a schematic perspective view illustrating a silicon carbide etching tool having a second connection notch according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a silicon carbide etching tool in a side view according to an embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a silicon carbide etching tool in a top view according to an embodiment of the present invention.

Icon: 10-silicon carbide etching tooling; 11-a support bar; 111-a first connection gap; 112-hanging hook; 12-a bracket; 120-connecting tube; 121 — a first connecting section; 122-a second connection segment; 123-a third connecting section; 125-connecting hole; 126-a carrier bar; 127-a second connection gap; 13-a fixed ring; 131-fixed columns; 900-silicon carbide substrate.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. The terms "upper", "lower", "inner", "outer", "left", "right", and the like, refer to an orientation or positional relationship as shown in the drawings, or as would be conventionally found in use of the inventive product, or as would be conventionally understood by one skilled in the art, and are used merely to facilitate the description and simplify the description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the present invention. The terms "first," "second," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. The terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

It is also to be understood that, unless expressly stated or limited otherwise, the terms "disposed," "connected," and the like are intended to be open-ended, and mean "connected," i.e., fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

The following detailed description of embodiments of the invention refers to the accompanying drawings.

Example (b):

referring to fig. 1, fig. 1 is a schematic perspective view of a silicon carbide etching tool 10 according to an embodiment of the present invention.

The embodiment of the invention provides a silicon carbide etching tool 10, wherein the silicon carbide etching tool 10 can etch a plurality of silicon carbide substrates 900 at the same time, and has the characteristics of high etching efficiency and high etching flexibility.

The structural composition, the operation principle and the beneficial effects of the silicon carbide etching tool 10 provided by the embodiment of the invention will be specifically described below.

Referring to fig. 1, and fig. 2 and 3, fig. 2 is a schematic perspective view illustrating a silicon carbide etching tool 10 having a second connection notch 127 according to an embodiment of the invention. Fig. 3 is a schematic structural diagram of a silicon carbide etching tool 10 in a side view according to an embodiment of the present invention.

This carborundum etching frock 10 includes bracing piece 11 and a plurality of bracket 12, and wherein, the vertical setting of bracing piece 11, and a plurality of first connection breach 111 have been seted up to the side of bracing piece 11. The plurality of carriers 12 are all horizontally disposed and are used for receiving the silicon carbide substrate 900, and the plurality of carriers 12 are detachably clamped in the plurality of first connecting notches 111 one by one. In this way, when the silicon carbide etching tool 10 is used, the plurality of brackets 12 can be simultaneously connected to the support rods 11 to simultaneously etch the plurality of silicon carbide substrates 900, so that the etching efficiency is high, and the number of brackets 12 connected to the support rods 11 can be adjusted according to the etching requirement to simultaneously etch the corresponding number of silicon carbide substrates 900, thereby improving the flexibility of the silicon carbide etching tool 10.

The existing etching jig can only etch one silicon carbide substrate 900 at a time, resulting in low etching efficiency. Moreover, for a plurality of different crystal bars after wire cutting, a plurality of silicon carbide substrates 900 may sometimes need to be etched, but the existing etching jig is difficult to meet the requirement, and the silicon carbide etching tool 10 provided in this embodiment can etch a corresponding number of silicon carbide substrates 900 by adjusting the number of the brackets 12, so that the flexibility is high, and the efficiency is high.

It should be noted that, in the present embodiment, the first connecting notches 111 are respectively opened on two opposite side surfaces of the supporting rod 11. Thereby increasing the number of the silicon carbide substrate 900 etched by the silicon carbide etching tool 10 and improving the flexibility of the silicon carbide etching tool 10. In other embodiments, the first connecting notches 111 may also be formed on the peripheral side of the supporting rod 11, so that the number of the brackets 12 can be expanded under the condition of changing the size of the etching crucible, thereby improving the productivity. Furthermore, the number of the support rods 11 can be two, the two support rods 11 are arranged at intervals, the two support rods 11 are both provided with first connecting gaps 111, and the bracket 12 is detachably clamped in the first connecting gaps 111 of the two support rods 11 at the same time, in other words, the bracket 12 is connected with the support rods 11 through being clamped in the two first connecting gaps 111, so as to improve the stability of the bracket 12 connected to the support rods 11.

In addition, a hook 112 may be further protruded from a side surface of the support rod 11, and the hook 112 is disposed near the top of the support rod 11 and forms an included angle with the support rod 11, so that when the silicon carbide etching tool 10 is used, the silicon carbide etching tool 10 is moved by pulling the hook 112.

It should be noted that, in this embodiment, the supporting rod 11 is a rod with a rectangular cross section, the first connecting notches 111 are respectively formed in two opposite side surfaces of the supporting rod 11, and the first connecting notches 111 are notches horizontally penetrating through the supporting rod 11.

In addition, the top and/or the bottom of the bracket 12 may further have a second connection notch 127, and when the bracket 12 is retained in the first connection notch 111, a part of the inner wall of the first connection notch 111 is retained in the second connection notch 127. In other words, when the bracket 12 is horizontally placed in the first connecting notch 111, the inner wall of the first connecting notch 111 and the inner wall of the second connecting notch 127 are matched to be clamped with each other, so that the second connecting notch 127 limits the displacement range of the bracket 12 relative to the supporting rod 11, thereby further improving the stability of the bracket 12 clamped on the supporting rod 11.

Further, the bracket 12 includes a connecting tube 120 and a carrying rod 126, the carrying rod 126 is connected to the connecting tube 120, and the carrying rod 126 is used for carrying the sic substrate 900, the connecting tube 120 is a rectangular tube, and the first connecting gap 111 is matched with the connecting tube 120, in other words, the inner wall of the first connecting gap 111 is also substantially rectangular, and the inner wall of the first connecting gap 111 abuts against the side surface of the connecting tube 120 with a rectangular cross section, so as to detachably hold the bracket 12.

The connecting tube 120 includes a first connecting section 121, a second connecting section 122, and a third connecting section 123 connected in sequence, wherein the first connecting section 121, the second connecting section 122, and the third connecting section 123 are disposed in a u shape, as shown in fig. 1, and the second connecting section 122 is detachably clamped in the first connecting gap 111. Both ends of the carrier bar 126 are respectively connected to the bottom of the first connection segment 121 and the bottom of the third connection segment 123, so that when the silicon carbide substrate 900 is located on the carrier bar 126, the first connection segment 121, the second connection segment 122 and the third connection segment 123 surround the periphery of the silicon carbide substrate 900, so as to limit the position of the silicon carbide substrate 900 and improve the reliability of the carrier 12 for carrying the silicon carbide substrate 900.

It should be noted that, in the present embodiment, the second connection notches 127 are opened at the top and the bottom of the second connection section 122, so as to limit the movement of the bracket 12 relative to the support rod 11 along the extending direction of the second connection section 122. In other embodiments, the second connection notch 127 may be opened only at the bottom or the top of the second connection section 122.

With continuing reference to fig. 1, 2 and 3, and with further reference to fig. 4, fig. 4 is a schematic structural diagram of a silicon carbide etching tool 10 according to an embodiment of the present invention in a top view.

The silicon carbide etching tool 10 may further include a fixing ring 13 having an opening, the fixing ring 13 being connected to the first connection section 121 and the third connection section 123, and the fixing ring 13 having elasticity. The end of the fixing ring 13 and the middle of the fixing ring 13 are both used to abut against the edge of the silicon carbide substrate 900, so as to fix the silicon carbide substrate 900 on the bracket 12 together. In other words, both ends of the elastic fixing ring 13 and the middle portion of the fixing ring 13 have a tendency to move toward the center of the silicon carbide substrate 900, thereby clamping the silicon carbide substrate 900 together to more firmly fix the silicon carbide substrate 900 on the carrier 12.

It should be noted that, in this embodiment, the middle portion refers to a position corresponding to the middle portion when the corresponding object is divided into three equal portions according to the length direction of the corresponding object.

Further, the first connecting section 121 and the second connecting section 122 are respectively provided with a connecting hole 125 on two corresponding sides, and the connecting hole 125 is a bar hole extending along the horizontal direction, as shown in fig. 1.

The upper portion of the fixing ring 13 can movably extend into the connecting hole 125 to connect with the first connecting section 121 and the third connecting section 123, in other words, the extending path of the fixing ring 13 first extends into the connecting hole 125 and then extends out from the connecting hole 125, or an arc-shaped section of the fixing ring 13 is located in the connecting hole 125 and can slide in the connecting hole 125. Thus, when the silicon carbide substrate 900 is placed or taken, if an error operation occurs to drive the silicon carbide substrate 900 to move in a horizontal plane, the movable fixing ring 13 is always clamped on the periphery of the silicon carbide substrate 900 to protect the silicon carbide substrate 900. Further, when the silicon carbide substrate 900 is placed in the fixing ring 13, since the fixing ring 13 is movable, the end and the middle of the fixing ring 13 are sequentially sandwiched between the silicon carbide substrate 900, and convenience in placing and fixing the silicon carbide substrate 900 is improved.

Further, the two ends of the fixing ring 13 may be respectively provided with a fixing column 131, the fixing column 131 is vertically disposed, and a fixing notch (not shown) is formed in a side surface of the fixing column 131, a bottom wall of the fixing notch is used for abutting against an edge of the silicon carbide substrate 900, in other words, the fixing column 131 limits the silicon carbide substrate 900 to move up and down through the fixing notch, and stability of the bracket 12 for fixing the silicon carbide substrate 900 is further improved.

In addition, the fixing column 131 may be further disposed in the middle of the fixing ring 13, so that the silicon carbide substrate 900 is fixed by the three fixing columns 131 together, and the stability of the carrier 12 for fixing the silicon carbide substrate 900 is further improved.

The working principle of the silicon carbide etching tool 10 provided by the embodiment of the invention is as follows:

this carborundum etching frock 10 includes bracing piece 11 and a plurality of bracket 12, and wherein, the vertical setting of bracing piece 11, and a plurality of first connection breach 111 have been seted up to the side of bracing piece 11. The plurality of carriers 12 are all horizontally disposed and are used for receiving the silicon carbide substrate 900, and the plurality of carriers 12 are detachably clamped in the plurality of first connecting notches 111 one by one. In this way, when the silicon carbide etching tool 10 is used, the plurality of brackets 12 can be simultaneously connected to the support rod 11 to simultaneously etch the plurality of silicon carbide substrates 900, so that the etching efficiency is high, and the number of brackets 12 connected to the support rod 11 can be adjusted according to the etching requirement to simultaneously etch the corresponding number of silicon carbide substrates 900, thereby improving the flexibility of the silicon carbide etching tool 10.

In summary, the following steps:

the embodiment of the invention provides a silicon carbide etching tool 10, which can etch a plurality of silicon carbide substrates 900 simultaneously and has the characteristics of high etching efficiency and high etching flexibility.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it is obvious to those skilled in the art that the features in the above embodiments may be combined with each other and the present invention may be variously modified and changed without conflict. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. The present embodiments are to be considered as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (10)

1. The silicon carbide etching tool is characterized by comprising a support rod (11) and a plurality of brackets (12);

the supporting rod (11) is vertically arranged, and a plurality of first connecting gaps (111) are formed in the side surface of the supporting rod (11);

the brackets (12) are horizontally arranged and used for bearing the silicon carbide substrate (900), and the brackets (12) are detachably clamped in the first connecting gaps (111) one by one.

2. The silicon carbide etching tool as claimed in claim 1, wherein a second connecting notch (127) is formed at the top and/or bottom of the bracket (12), and when the bracket (12) is retained in the first connecting notch (111), a part of the inner wall of the first connecting notch (111) is retained in the second connecting notch (127).

3. The silicon carbide etching tool according to claim 1, wherein the first connecting notches (111) are respectively formed in two opposite side surfaces of the support rod (11).

4. The silicon carbide etching tool according to claim 1, wherein the number of the support rods (11) is two, the two support rods (11) are arranged at intervals, the first connecting notches (111) are formed in the two support rods (11), and the bracket (12) is detachably clamped in the first connecting notches (111) of the two support rods (11) at the same time.

5. The silicon carbide etching tool of claim 1, wherein the bracket (12) comprises a connecting pipe (120) and a bearing rod (126) which are connected with each other, the bearing rod (126) is used for bearing the silicon carbide substrate (900), the connecting pipe (120) is a rectangular pipe, and the first connecting notch (111) is matched with the connecting pipe (120).

6. The silicon carbide etching tool as claimed in claim 5, wherein the connecting pipe (120) comprises a first connecting section (121), a second connecting section (122) and a third connecting section (123) which are connected in sequence, the first connecting section (121), the second connecting section (122) and the third connecting section (123) are arranged in a U shape, and the second connecting section (122) is detachably clamped in the first connecting notch (111); two ends of the bearing rod (126) are respectively connected to the bottom of the first connecting section (121) and the bottom of the third connecting section (123).

7. The silicon carbide etching tool according to claim 6, wherein the silicon carbide etching tool (10) further comprises a fixing ring (13) having an opening, the fixing ring (13) being connected to the first connecting section (121) and the third connecting section (123) and having elasticity;

the tail end of the fixing ring (13) and the middle part of the fixing ring (13) are used for abutting against the edge of the silicon carbide substrate (900) so as to fix the silicon carbide substrate (900) on the bracket (12) together.

8. The silicon carbide etching tool according to claim 7, wherein the first connecting section (121) and the second connecting section (122) are provided with connecting holes (125) on two corresponding side surfaces, and the connecting holes (125) are bar holes extending along the horizontal direction;

the upper part of the fixing ring (13) movably extends into the connecting hole (125) to be connected with the first connecting section (121) and the third connecting section (123).

9. The silicon carbide etching tool according to claim 8, wherein fixing columns (131) are arranged at two ends of the fixing ring (13), the fixing columns (131) are vertically arranged, a fixing notch is formed in the side surface of each fixing column (131), and the bottom wall of each fixing notch is used for abutting against the edge of the silicon carbide substrate (900).

10. The silicon carbide etching tool according to claim 9, wherein the fixing columns (131) are further arranged in the middle of the fixing ring (13) so as to jointly fix the silicon carbide substrate (900) through the three fixing columns (131).

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