CN112859667B - Signal acquisition control circuit of vacuum evaporation machine - Google Patents
Signal acquisition control circuit of vacuum evaporation machine Download PDFInfo
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- CN112859667B CN112859667B CN202011623253.6A CN202011623253A CN112859667B CN 112859667 B CN112859667 B CN 112859667B CN 202011623253 A CN202011623253 A CN 202011623253A CN 112859667 B CN112859667 B CN 112859667B
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- 238000007738 vacuum evaporation Methods 0.000 title description 5
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 229910052734 helium Inorganic materials 0.000 claims description 12
- 239000001307 helium Substances 0.000 claims description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 12
- 239000000523 sample Substances 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 7
- 230000005236 sound signal Effects 0.000 claims description 6
- 238000012790 confirmation Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 230000008929 regeneration Effects 0.000 claims description 3
- 238000011069 regeneration method Methods 0.000 claims description 3
- 238000013500 data storage Methods 0.000 claims description 2
- 230000003993 interaction Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/25—Pc structure of the system
- G05B2219/25257—Microcontroller
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application provides a signal acquisition control circuit of a vacuum evaporator, which comprises: the PC is connected with the CPU in a bidirectional mode, the CPU is connected with the digital signal input port, the digital signal output port, the analog signal input port and the analog signal output port in series, the analog signal output port is connected with the analog signal output module, the digital signal output module and the analog signal output module are connected with the input end of the CPU, when the PC sends out a certain action command, the CPU comprehensively analyzes signals input by the digital signal input port and the analog signal input port and feedback signals input by the digital signal output module and the analog signal output module, and then the CPU executes the action command and displays the execution status in the PC.
Description
Technical Field
The invention relates to the field of evaporation coating machines and electricity, in particular to a signal acquisition control circuit of a vacuum evaporation coating machine.
Background
The vacuum evaporator is to evaporate and gasify the film coating material (or film material) under vacuum condition by means of electric current heating, electron beam bombardment heating, ion assisted bombardment substrate pre-cleaning, ion assisted film coating and the like, and then to fly gasified particles to the surface of the substrate to condense, and finally to form a film. The vacuum evaporation has the advantages of simple film forming method, high purity and compactness of the film, unique film structure and performance and the like, so the vacuum evaporation is widely applied.
However, most of the existing vacuum vapor deposition machines are semi-automatic, the production efficiency is low, and in order to improve the production efficiency, the full-automatic vacuum vapor deposition machines are more ideal, but due to the fact that the number of components of the vacuum vapor deposition machines is large, the design of the signal acquisition control circuit of the existing vacuum vapor deposition machines is insufficient for being applied to the signal acquisition control circuit of the full-automatic vacuum vapor deposition machines.
In view of the above, the present invention provides a signal acquisition control circuit of a vacuum evaporator, which can be applied to a fully-automatic vacuum evaporator and has stable circuit control and operation.
Disclosure of Invention
The invention aims to provide a signal acquisition control circuit of a vacuum evaporator, which can be applied to the full-automatic vacuum evaporator and has stable circuit control and operation.
A signal acquisition control circuit of a vacuum evaporator, comprising: the PC is connected with the CPU in a bidirectional mode, the CPU is connected with the digital signal input port, the digital signal output port, the analog signal input port and the analog signal output port in series, the output end of the digital signal input module of the control unit is connected with the input end of the digital signal input port, the output end of the analog signal input module is connected with the analog signal input port, the digital signal output port is connected with the digital signal output module, the analog signal output port is connected with the analog signal output module, the digital signal output module and the analog signal output module are connected with the input end of the CPU, the digital signal output ports are divided into two digital signal output modules and a relay output module, the first digital signal output port is connected with the electronic tube output module, the second digital signal output port is connected with the relay output module, the electronic tube output module is used for processing simple switching signals, the relay output module is used for processing combined control or public-end signals or weak-current control strong-electricity scenes, when the PC performs the digital signal feedback control on the input state of the digital signal and the analog signal output module, and the analog signal output module performs the analysis on the state of the digital signal input and the digital signal output module, and the digital signal output module performs the analysis on the state of the digital signal input and the digital signal output module.
In some embodiments, the PC is a human-computer interactive industrial computer and has the functions of control, state display and data storage.
In some embodiments, the digital signal input port and the control unit digital input module are both two, the first control unit digital input module is connected to the first digital signal input port, and the second control unit digital input module is connected to the second digital signal input port.
Further, the first control unit digital input module comprises an input switch signal, a cold pump signal, an oil pump signal and a water flow signal.
Further, the switch signals comprise a room door switch, a main valve in place, a plating pot open, a high-voltage cabinet open, a low-temperature pump open, a crucible baffle close in place, a crucible baffle open in place, a main valve close in place, a heating lamp open, a rotating speed switch, a probe baffle close in place and a probe baffle open in place; the water flow signals comprise a crucible water flow signal, a main pump water flow signal, a probe water flow signal and a cavity water flow signal; the cold pump signal comprises cold pump starting completion, cold pump regeneration completion, cold pump starting and cold pump atmosphere confirmation; the oil pump signal includes an oil pump protection signal.
Further, the second control unit digital input module comprises an input encoder signal, a crystal control output signal, a power switch signal and a sparking signal; there are 8 encoder signals and 8 crystal control output signals.
In some embodiments, the analog signal input port and the analog signal input module are both two, the first analog signal input module is connected to the first analog signal input port, the second analog signal input module is connected to the second analog signal input port, and the analog signal input module is used for inputting analog signals.
In some embodiments, there are two valve output modules, the first valve output module being connected in parallel with the second valve output module.
Further, the first valve output module comprises an output probe baffle valve signal, a crucible baffle valve signal, a helium valve signal, a main valve signal, a backing valve signal and an extraction valve signal; the second electronic tube output module comprises an alarm sound signal, a cryopump starting signal, a workpiece rotation signal, an alarm prompt sound signal and an indicator light signal.
Further, the helium valve comprises a helium release valve, a helium filling valve, a quick filling valve and a slow filling valve.
In some embodiments, there are two relay output modules, the first relay output module being connected in series with the second relay output module.
Further, the first relay output module comprises output 8 crystal control input signals, and the second relay output module comprises output control power supply signals, heating lamp starting signals, backing pump signals and water flow signals.
In some embodiments, the CPU includes a PLC (programmable logic controller ) that is present within the CPU in the form of a ladder diagram.
Further, when a certain action command is operated on the PC, the PC directly transmits the action command to the CPU, the CPU starts corresponding PLC program action signals according to the command, and input signals of all control units are input into the PLC program, so that the command is conducted, the mechanical unit is output to control and drive, after the mechanical unit executes the PLC command action, the output signals are fed back to the PLC through own sensors, and the PLC outputs corresponding signals to the PC interface.
Drawings
Fig. 1 is a schematic diagram of a signal acquisition control circuit of a vacuum evaporator according to the present application.
The drawings will be described in detail with reference to specific embodiments.
Detailed Description
The following examples are described to aid in the understanding of the application and are not, nor should they be construed in any way to limit the scope of the application.
In the following description, those skilled in the art will recognize that components may be described as separate functional units (which may include sub-units) throughout this discussion, but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including integration within a single system or component).
Meanwhile, connections between components or systems are not intended to be limited to direct connections, but rather, data between these components may be modified, reformatted, or otherwise changed by intermediate components. In addition, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" are to be understood to include direct connection, indirect connection via one or more intermediary devices, and wireless connection.
Example 1:
A signal acquisition control circuit of a vacuum evaporator, as shown in fig. 1, comprises: the PC is connected with the CPU in a bidirectional mode, the CPU is connected with the digital signal input port, the digital signal output port, the analog signal input port and the analog signal output port in series, the output end of the digital signal input module of the control unit is connected with the input end of the digital signal input port, the output end of the analog signal input module is connected with the analog signal input port, the digital signal output port is connected with the digital signal output module, the analog signal output port is connected with the analog signal output module, the digital signal output module and the analog signal output module are connected with the input end of the CPU, the digital signal output ports are divided into two digital signal output modules and a relay output module, the first digital signal output port is connected with the electronic tube output module, the second digital signal output port is connected with the relay output module, the electronic tube output module is used for processing simple switching signals, the relay output module is used for processing combined control or public-end signals or weak-current control strong-electricity scenes, when the PC performs the digital signal feedback control on the input state of the digital signal and the analog signal output module, and the analog signal output module performs the analysis on the state of the digital signal input and the digital signal output module, and the digital signal output module performs the analysis on the state of the digital signal input and the digital signal output module.
The PC is an industrial personal computer with functions of controlling, displaying state and storing data. The digital signal input port and the control unit digital input module are both two, the first control unit digital input module is connected with the first digital signal input port, and the second control unit digital input module is connected with the second digital signal input port. The first control unit digital input module comprises an input switch signal, a cold pump signal, an oil pump signal and a water flow signal. The switch signals comprise a room door switch, a main valve opening in place, a plating pot opening, a high-voltage cabinet opening, a low-temperature pump opening, a crucible baffle closing in place, a crucible baffle opening in place, a main valve closing in place, a heating lamp opening in place, a rotating speed switch, a probe baffle closing in place and a probe baffle opening in place; the water flow signals comprise a crucible water flow signal, a main pump water flow signal, a probe water flow signal and a cavity water flow signal; the cold pump signal comprises cold pump starting completion, cold pump regeneration completion, cold pump starting and cold pump atmosphere confirmation; the oil pump signal includes an oil pump protection signal. The second control unit digital input module comprises an input encoder signal, a crystal control output signal, a power switch signal and a sparking signal; there are 8 encoder signals and 8 crystal control output signals. The analog signal input port and the analog signal input module are both two, the first analog signal input module is connected with the first analog signal input port, the second analog signal input module is connected with the second analog signal input port, and the analog signal input module is used for inputting analog signals.
The valve output modules are two, and the first valve output module is connected with the second valve output module in parallel. The first electron tube output module comprises an output probe baffle valve signal, a crucible baffle valve signal, a helium valve signal, a main valve signal, a backing valve signal and an extraction valve signal; the second electronic tube output module comprises an alarm sound signal, a cryopump starting signal, a workpiece rotation signal, an alarm prompt sound signal and an indicator light signal. The helium valve comprises a helium release valve, a helium filling valve, a quick filling valve and a slow filling valve. The number of the relay output modules is 2, and the first relay output module is connected with the second relay output module in series. The first relay output module comprises output 8 crystal control input signals, and the second relay output module comprises output control power supply signals, heating lamp starting signals, backing pump signals and water flow signals. The CPU includes a PLC (programmable logic controller ) whose program exists in the form of a ladder diagram within the CPU. When a certain action command is operated on the PC, the PC directly transmits the action command to the CPU, the CPU starts corresponding PLC program action signals according to the command, and input signals of all control units are input into the PLC program, so that the command is conducted, the mechanical unit is output to control and drive, after the mechanical unit executes the PLC command action, output signals are fed back to the PLC through own sensors, and the PLC outputs corresponding signals to a PC interface.
While the application has been disclosed in terms of various aspects and embodiments, other aspects and embodiments will be apparent to those skilled in the art in view of this disclosure, and many changes and modifications can be made without departing from the spirit of the application. The various aspects and embodiments of the present application are disclosed for illustrative purposes only and are not intended to limit the application, the true scope of which is set forth in the following claims.
Claims (5)
1. A signal acquisition control circuit of a vacuum evaporator is characterized by comprising: the PC is connected with the CPU in a bidirectional manner, the CPU is connected with the digital signal input port, the digital signal output port, the analog signal input port and the analog signal output port in series, the output end of the digital input module of the control unit is connected with the input end of the digital signal input port, the output end of the analog signal input module is connected with the analog signal input port, The digital signal output port is connected with the digital signal output module, the analog signal output port is connected with the analog signal output module, the digital signal output module and the analog signal output module are connected with the input end of the CPU, the number of the digital signal output ports is two, the digital signal output module is divided into an electron tube output module and a relay output module, the first digital signal output port is connected with the electron tube output module, the second digital signal output port is connected with the relay output module, the electron tube output module is used for processing simple switching signals, the relay output module is used for processing the combined control or the signal with a public end or the scene of weak current control strong current, When a PC sends out a certain action instruction, a CPU (Central processing Unit) comprehensively analyzes signals input by a digital signal input port and an analog signal input port and feedback signals input by a digital signal output module and an analog signal output module, then the CPU executes the action instruction and displays the execution status in the PC, the digital signal input port and the digital input module of a control unit are both two, the digital input module of the first control unit is connected with the first digital signal input port, the digital input module of the second control unit is connected with the second digital signal input port, and the digital input module of the first control unit comprises an input switch signal, a cold pump signal, an oil pump signal, and a water flow signal; The second control unit digital input module comprises an input encoder signal, a crystal control output signal, a power switch signal and a sparking signal; the number of encoder signals is 8, the number of crystal control output signals is 8, the number of electron tube output modules is two, the first electron tube output module is connected with the second electron tube output module in parallel, and the first electron tube output module comprises an output probe baffle valve signal, a crucible baffle valve signal, a helium valve signal, a main valve signal, a backing valve signal and an exhaust valve signal; The second electron tube output module comprises an alarm sound signal, a low-temperature pump starting signal, a workpiece rotation signal, an alarm prompting sound signal and an indicator light signal, the helium valve comprises a helium discharge valve, a helium filling valve, a quick filling valve and a slow filling valve, the CPU comprises a PLC, a PLC program exists in the CPU in a trapezoid form, when a certain action command is operated on the PC, the PC directly transmits the action command to the CPU, the CPU starts a corresponding PLC program action signal according to the command, the input signals of each control unit are input into the PLC program, so that the command is conducted, the mechanical unit is driven to be output and controlled, and after the mechanical unit executes the action of the PLC command, The output signal is fed back to the PLC through the sensor of the PLC, and the PLC outputs the corresponding signal to the PC interface.
2. The signal acquisition control circuit of the vacuum evaporator according to claim 1, wherein the PC is an industrial personal computer with man-machine interaction, and has functions of control, status display and data storage.
3. The signal acquisition control circuit of the vacuum evaporator of claim 1, wherein the switch signals include a door switch, a main valve in place, a plating pot open, a high-voltage cabinet open, a low-temperature pump open, a crucible baffle in place, a main valve in place, a heating lamp open, a rotation speed switch, a probe baffle in place, and a probe baffle in place; the water flow signals comprise a crucible water flow signal, a main pump water flow signal, a probe water flow signal and a cavity water flow signal; the cold pump signal comprises cold pump starting completion, cold pump regeneration completion, cold pump starting and cold pump atmosphere confirmation; the oil pump signal includes an oil pump protection signal.
4. The signal acquisition control circuit of a vacuum evaporator according to claim 1, wherein the analog signal input port and the analog signal input module are both two, the first analog signal input module is connected to the first analog signal input port, the second analog signal input module is connected to the second analog signal input port, and the analog signal input module is used for inputting analog signals.
5. The signal acquisition control circuit of a vacuum evaporator according to claim 1, wherein the number of relay output modules is 2, the first relay output module is connected in series with the second relay output module, the first relay output module includes 8 crystal control input signals, and the second relay output module includes an output control power signal, a heating lamp start signal, a backing pump signal, and a water flow signal.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011623253.6A CN112859667B (en) | 2020-12-31 | 2020-12-31 | Signal acquisition control circuit of vacuum evaporation machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011623253.6A CN112859667B (en) | 2020-12-31 | 2020-12-31 | Signal acquisition control circuit of vacuum evaporation machine |
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| CN112859667B true CN112859667B (en) | 2024-09-27 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN214335502U (en) * | 2020-12-31 | 2021-10-01 | 苏州佑伦真空设备科技有限公司 | Signal acquisition control circuit of vacuum evaporation machine |
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| JP2595048B2 (en) * | 1988-06-22 | 1997-03-26 | 株式会社日立製作所 | Vacuum processing system and control method thereof |
| CN100545300C (en) * | 2008-04-03 | 2009-09-30 | 南京邮电大学 | The automatic alternate plating control apparatus of sample and method in the organic vacuum film forming procedure |
| CN110359015B (en) * | 2019-08-06 | 2021-11-23 | 江苏集萃有机光电技术研究所有限公司 | Automatic switching circuit, evaporation device and evaporation control method |
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| CN214335502U (en) * | 2020-12-31 | 2021-10-01 | 苏州佑伦真空设备科技有限公司 | Signal acquisition control circuit of vacuum evaporation machine |
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