CN112859451A - Alignment film drying device, alignment film preparation equipment and alignment film preparation method - Google Patents
Alignment film drying device, alignment film preparation equipment and alignment film preparation method Download PDFInfo
- Publication number
- CN112859451A CN112859451A CN202110215399.5A CN202110215399A CN112859451A CN 112859451 A CN112859451 A CN 112859451A CN 202110215399 A CN202110215399 A CN 202110215399A CN 112859451 A CN112859451 A CN 112859451A
- Authority
- CN
- China
- Prior art keywords
- drying
- alignment film
- unit
- alignment
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
- F26B3/06—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air the gas or vapour flowing through the materials or objects to be dried
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/18—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Microbiology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Drying Of Solid Materials (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides an alignment film drying device, alignment film preparation equipment and a preparation method, wherein the alignment film drying device comprises a drying cavity, a heating unit and a gas circulation unit; the heating unit comprises a first heating unit for heating a substrate coated with alignment liquid; the gas circulation unit comprises a first gas circulation unit and a second gas circulation unit; the drying cavity is communicated with the outside through a first gas circulation unit, and the second gas circulation unit comprises an exhaust unit used for exhausting gas in the drying cavity. According to the invention, the drying cavity is communicated with the outside, so that the drying cavity forms an open baking environment, and the temperature and the gas circulation in the drying cavity are controlled, so that a uniform alignment film with stable quality is formed on the substrate, and the display effect of the display panel is improved.
Description
Technical Field
The invention relates to the technical field of liquid crystal display, in particular to an alignment film drying device, alignment film preparation equipment and an alignment film preparation method.
Background
With the continuous development of the electro-optical technology and the semiconductor technology, the liquid crystal panel has been widely used in various fields of society. Currently, a liquid crystal panel main body is mainly composed of two glass substrates and a liquid crystal layer disposed between the two glass substrates. In the manufacturing process of sealing liquid crystal between two glass substrates to form a liquid crystal display unit, the liquid crystal display unit areas of the two glass substrates are respectively provided with a layer of alignment film, and the alignment films arranged in the substrate display areas generate alignment capability through a rubbing process, so that the liquid crystal layer is aligned, and the liquid crystal is uniformly arranged along a fixed direction.
The alignment layer is formed by coating an alignment solution on a substrate (such as an array substrate or a color film substrate), and the commonly used method for manufacturing the alignment layer is as follows: an alignment liquid is coated on a substrate, and then a desired alignment film is formed on the substrate through an alignment process (e.g., a rubbing alignment process/photo-alignment) and other processes. And then, baking the alignment liquid coated on the substrate, and removing the solvent in the alignment liquid to form the final alignment film. Because a large amount of solvent is volatilized in the film forming process of the alignment liquid, the film forming uniformity is disturbed, and the physicochemical properties such as the solvent components, the viscosity, the surface tension and the like of different alignment liquids are different, the existing alignment film drying device is difficult to control the heating uniformity of all kinds of alignment liquids in place, so that the film forming of the alignment liquid is uneven, and a plurality of poor quality problems in the aspects of uneven display brightness and the like of a liquid crystal panel occur.
Disclosure of Invention
The invention provides an alignment film drying device, alignment film preparation equipment and an alignment film preparation method, which are used for solving the technical problem that alignment films with different thicknesses are formed due to nonuniform heating of alignment liquid in the prior art.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the invention provides an alignment film drying device, comprising:
the drying device comprises a drying cavity, a heating unit and a gas circulation unit;
the heating unit comprises a first heating unit for heating a substrate coated with alignment liquid;
the gas circulation unit comprises a first gas circulation unit and a second gas circulation unit;
the drying cavity is communicated with the outside through the first gas circulation unit, and the second gas circulation unit comprises an exhaust unit for exhausting gas in the drying cavity.
In the alignment film drying device provided by the invention, the first gas circulation unit comprises an openable top cover, an oven door and a side wall, and the drying cavity is communicated with the outside by opening at least one of the top cover, the oven door and the side wall.
In the alignment film drying device provided by the invention, the second gas circulation unit further comprises a gas inlet unit, and the gas inlet unit is used for injecting dry gas into the drying cavity; the heating unit further comprises a second heating unit for heating the drying gas, and the drying gas is compressed drying air.
In the alignment film drying device provided by the invention, the first heating unit and the substrate coated with the alignment liquid are arranged at intervals, and the heating temperature of the first heating unit is higher than that of the second heating unit.
In the alignment film drying device provided by the invention, the heating temperature of the first heating unit is more than 70 ℃ and less than 110 ℃; the flow rate of the drying gas is greater than or equal to 0.0167m3S; the air exhaust negative pressure value of the exhaust unit is greater than or equal to 900 Pa; the alignment film drying device also comprises a time control unit, and the time control unit is used for controlling the drying time of the substrate coated with the alignment liquid in the alignment film drying device to be more than or equal to 150 s.
In addition, the present invention provides an alignment film preparation apparatus, including:
the coating device is used for coating the alignment liquid on the substrate to obtain the substrate coated with the alignment liquid;
the alignment film drying device is used for drying the alignment liquid on the substrate to prepare the alignment film;
and a conveying device for conveying the substrate coated with the alignment liquid from the coating device to the alignment film drying device.
In the alignment film preparing apparatus provided by the present invention, the transfer device includes a control unit for controlling a time for transferring the alignment liquid-coated substrate from the coating device to the alignment film drying device to be less than 70 s.
Meanwhile, the invention also provides a preparation method of the alignment film, which comprises the following steps:
step S1: providing a substrate to be coated, and placing the substrate to be coated in a coating device;
step S2: coating the alignment liquid on the substrate to be coated to obtain the substrate coated with the alignment liquid;
step S3: transferring the substrate coated with the alignment liquid from the coating device to an alignment film drying device by a transfer device;
step S4: placing the substrate coated with the alignment liquid in a drying cavity of the alignment film drying device for drying to obtain the alignment film;
in step S4, the alignment film drying apparatus heats the substrate coated with the alignment solution through the first heating unit, the drying cavity is communicated with the outside through the first gas circulation unit, and the gas in the drying cavity is exhausted through the exhaust unit in the second gas circulation unit.
In the preparation method of the alignment film, the first gas circulation unit comprises an openable top cover, an openable door and a side wall, and at least one of the openable top cover, the openable door and the side wall in the first gas circulation unit is opened to enable the drying cavity to be communicated with the outside; and injecting dry gas into the drying cavity through an air inlet unit in the second gas circulation unit, and heating the dry gas through a second heating unit, wherein the dry gas is compressed dry air.
In the alignment film preparation method provided by the invention, the time for conveying the substrate coated with the alignment liquid from the coating device to the alignment film drying device is less than 70 s; the first heating unit and the substrate coated with the alignment liquid are arranged at intervals, and the heating temperature of the first heating unit is higher than that of the second heating unit; the above-mentionedThe heating temperature of the first heating unit is above 70 ℃ and below 110 ℃; and the flow rate of the drying gas is greater than or equal to 0.0167m3S; the air exhaust negative pressure value of the exhaust unit is greater than or equal to 900 Pa; the drying time of the substrate coated with the alignment liquid in the alignment film drying device is greater than or equal to 150 s.
The invention has the advantages that the drying cavity is communicated with the outside, so that the drying cavity forms an open baking environment, low-temperature and slow film forming is carried out, a large amount of drying gas with proper temperature is introduced to promote the surface of the substrate to uniformly form a film, the concentration of the volatile solvent is controlled by the exhaust unit, the film forming process is controlled, the substrate is uniformly heated in the drying process, the solvent in the alignment liquid is rapidly and uniformly volatilized, and a uniform alignment film with stable quality is formed on the substrate, thereby improving the display effect of the display panel.
Drawings
In order to more clearly illustrate the embodiments or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of an alignment film drying apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of another embodiment of an alignment film drying apparatus according to the present invention;
FIG. 3 is a schematic diagram showing the arrangement of air outlets in the alignment film drying apparatus according to the present invention;
FIG. 4 is a schematic view of an alignment film manufacturing apparatus according to the present invention;
FIG. 5 is a flow chart of an embodiment of a method for preparing an alignment film according to the present invention.
Detailed Description
Specific structural and functional details disclosed herein are merely representative and are provided for purposes of describing example embodiments of the present application. This application may, however, be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless otherwise specified. Furthermore, the term "comprises" and any variations thereof is intended to cover non-exclusive inclusions.
The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
For the convenience of understanding the technical solutions of the present invention, the technical solutions of the present invention will be described in detail below with reference to the accompanying drawings and the detailed description.
As shown in fig. 1, fig. 1 is a schematic view showing an embodiment of an alignment film drying apparatus according to the present invention.
In the embodiment shown in fig. 1, the alignment film drying apparatus 1 includes: a drying chamber 10, a heating unit 20, and a gas circulation unit 30; the heating unit 20 includes a first heating unit 21 for heating a substrate 11 coated with alignment liquid;
the gas circulation unit 30 includes a first gas circulation unit 31 and a second gas circulation unit 32; the drying chamber 10 is communicated with the outside through the first gas circulation unit 31, and the second gas circulation unit 32 includes an exhaust unit 34 for exhausting gas in the drying chamber 10.
In the above embodiment, the drying cavity 10 is communicated with the outside through the first gas circulation unit 31, so as to facilitate the rapid volatilization of the solvent in the alignment liquid on the substrate 11 coated with the alignment liquid, effectively reduce the concentration of the volatile solvent in the drying cavity 10, avoid the film formation pollution, promote the uniform film formation on the surface of the substrate 11 coated with the alignment liquid, and improve the film formation quality of the alignment film.
In order to further improve the volatilization of the solvent in the alignment solution, preferably, the alignment film drying apparatus 1 includes a second gas flow unit 32, the second gas flow unit 32 includes an exhaust unit 34 for exhausting the gas in the drying chamber 10, and the concentration of the volatilized solvent can be controlled by the exhaust unit 34 to control the film forming process. In fig. 1, the exhaust direction of the exhaust unit 34 is downward exhaust, but the present invention is not limited to the exhaust direction of the exhaust unit 34, the exhaust unit 34 can exhaust upward or downward, the position of the exhaust unit 34 can also be designed according to specific needs, the exhaust amount of the exhaust unit 34 can be adjusted, and the exhaust operation of the exhaust unit 34 can be performed at intervals or continuously according to needs.
In one embodiment, the alignment film drying apparatus 1 further includes a volatile solvent concentration monitoring device (not shown), and the volatile solvent concentration monitoring device includes a volatile solvent concentration detector for detecting the concentration of the volatile solvent in the drying chamber 10. In the process of drying the alignment film, the alignment liquid solvent is heated and then volatilized into the drying cavity 10, the volatile solvent concentration monitoring device is used for detecting the concentration of the volatile solvent in the drying cavity 10, and after the concentration of the volatile solvent reaches a set value, the exhaust unit 34 is controlled to exhaust the volatile solvent out of the drying cavity 10, so that the phenomenon that the volatilization of the alignment liquid solvent is influenced by the overhigh concentration of the volatile solvent in the drying cavity 10 is avoided. Because the temperature is higher in the drying cavity 10, the orientation liquid solvent after volatilizing is heated and moves to the top of drying cavity 10, at this moment, can with the volatile solvent concentration detector sets up drying cavity 10 top, the solvent concentration that volatilizees that can be more accurate acquires.
In one embodiment, the alignment film drying apparatus 1 further includes a control device (not shown), and the control device controls the air-extracting negative pressure value of the air-exhausting unit 34 when the volatile solvent concentration detector detects that the concentration of the air molecules in the drying chamber 10 exceeds a predetermined value. Specifically, the control device is respectively connected with the volatile solvent concentration detector and the exhaust unit 34, wherein the exhaust unit 34 is evacuated by a blower. The volatile solvent concentration detector transmits the detected volatile solvent concentration to the control device, the control device compares the detected volatile solvent concentration, and when the detected volatile solvent concentration exceeds a set value, the control device controls the air suction negative pressure value of the air blower in the exhaust unit 34 so as to rapidly discharge the volatile solvent in the drying cavity 10.
In one embodiment, the alignment film drying apparatus 1 further includes a recycling device (not shown), and the recycling device recycles the volatile solvent discharged from the drying cavity 10, so as to avoid discharging the volatile solvent in the drying cavity 10 into the atmosphere, thereby preventing environmental pollution.
As shown in fig. 2, fig. 2 is a schematic view showing another embodiment of the alignment film drying apparatus according to the present invention.
In the embodiment shown in fig. 2, the drying cavity 10 is communicated with the outside through the first gas circulation unit 31, the first gas circulation unit 31 includes an openable top cover 311, an oven door 312 and a side wall (not shown), and the drying cavity 10 is communicated with the outside by opening at least one of the top cover 311, the oven door 312 and the side wall, so that the drying cavity 10 forms an open baking environment, thereby facilitating the rapid volatilization of the alignment solution solvent on the alignment solution coated substrate 11, effectively reducing the concentration of the volatile solvent in the drying cavity 10, avoiding the film formation pollution, and promoting the uniform film formation on the surface of the alignment solution coated substrate 11.
As shown in fig. 2, the drying chamber 10 has a first door 314 and a second door 316 which can be opened and closed, when the substrate 11 coated with the alignment liquid needs to be fed into the drying chamber 10, the first door 314 is opened first, then the substrate 11 coated with the alignment liquid is fed into the drying chamber 10, and after feeding, the first door 314 and/or the second door 316 are kept opened to communicate with the outside through the drying chamber 10, so that the drying chamber 10 forms an open baking environment. After the alignment film is dried, the processed substrate 11 coated with the alignment solution is taken out through the second oven door 316. In addition, as shown in fig. 1, the drying chamber 10 may be configured to communicate the drying chamber 10 with the outside through the openable and closable top cover 311, and it should be understood that the manner of communicating the drying chamber 10 with the outside is determined according to a specific alignment film drying apparatus 1, which is not limited in the present invention.
In one embodiment, the second gas flow unit further comprises a gas inlet unit 32, wherein the gas inlet unit 32 is used for injecting the drying gas into the drying cavity 10; the heating unit 20 includes a second heating unit 22 for heating the dry gas. The gas flowing in from the gas inlet unit 36 is heated by the second heating unit 22 and flows to the substrate 11 coated with the alignment liquid, and the alignment liquid on the substrate 11 coated with the alignment liquid is heated by the dry gas, so that the alignment liquid is dried, and an alignment film is formed on the substrate 11 coated with the alignment liquid.
Preferably, the drying gas is Compressed Dry Air (CDA), which has advantages of safety and low cost compared to a conventional inert gas environment.
As shown in fig. 3, fig. 3 is a schematic view of the arrangement of the air outlets in the alignment film drying apparatus of the present invention. Specifically, the dry gas is heated by the second heating unit 22 as a gas source and then introduced into the gas inlet unit 36, when the gas flowing in from the gas inlet unit 36 is blown out from the plurality of uniformly and densely distributed gas outlet holes 361, a vertically downward hot air flow 362 with uniform temperature is formed, and the hot air flow 362 flows to the substrate 11 coated with the alignment liquid, so as to heat the alignment liquid on the substrate 11 coated with the alignment liquid. It should be noted that the air outlets in the alignment film drying device according to the present invention shown in fig. 3 are not limited to the shape, position and arrangement shown in the drawings, and may be arranged according to specific situations.
In one embodiment, the first heating unit 21 is disposed at a distance from the substrate 11 coated with the alignment liquid, and specifically, the first heating unit 21 includes a heating stage 212 disposed at a distance from the substrate 11 coated with the alignment liquid; a support is disposed above the heating stage 212 to support the substrate 11 coated with the alignment liquid, and the support forms a gap between the substrate 11 coated with the alignment liquid and the heating stage 212, so that heat can be better transferred to the substrate 11 coated with the alignment liquid. Wherein the support member includes a plurality of spaced support posts 214. Preferably, the support post 214 is a quartz support post. The quartz support column has a good heat-resistant effect, so that the stability of the support is ensured. In addition, when the supporting columns 214 are specifically arranged, a plurality of supporting columns 214 are uniformly arranged on the heating table 212 in an array manner, so that the supported substrate 11 coated with the alignment liquid is uniformly stressed, and the supporting effect is ensured. In fig. 1, the number of the supporting members is 2, but the number and the positions of the supporting members are not limited in the present invention, and the number and the positions of the supporting members may be appropriately changed according to the specific situation.
In one embodiment, the alignment film drying apparatus 1 further includes a temperature control device (not shown) for adjusting the temperature of the first heating unit 21 and the second heating unit 22, wherein the heating temperature of the first heating unit 21 is T1, the heating temperature of the second heating unit 22 is T2, and the heating temperature of the second heating unit 22 is lower than the heating temperature of the first heating unit 21. As can be seen from fig. 2, the alignment liquid coated substrate 11 and the heating stage 212 are spaced apart from each other, and when the heating temperature of the first heating unit 21 is T1, the heating temperature of the alignment liquid on the alignment liquid coated substrate 11 by the heating stage 212 in the first heating unit 21 is generally lower than T1, and therefore, the heating temperature of the second heating unit 22 is controlled by the temperature control device to be lower than the heating temperature of the first heating unit 21, so that the heating temperature of the alignment liquid on the alignment liquid coated substrate 11 by the drying gas is close to the heating temperature of the alignment liquid on the alignment liquid coated substrate 11 by the first heating unit 21, thereby avoiding the problem of uneven alignment film thickness caused by uneven heating during the heat energy transfer in the alignment liquid.
In a specific implementation process, the heating temperature of the first heating unit 21 in the alignment film drying device 1 provided by the invention is above 70 ℃ and below 110 ℃. Preferably, the flow rate of the drying gas is greater than or equal to 0.0167m3S; the negative pressure value of the air exhaust of the exhaust unit 34 is greater than or equal to 900 Pa; the alignment film drying device further comprises a time control unit, the time control unit controls the drying time of the substrate 11 coated with the alignment liquid in the alignment film drying device 1 to be greater than or equal to 150s, low-temperature slow film formation is achieved, and therefore a uniform alignment film with stable quality is formed on the substrate 11 coated with the alignment liquid.
In addition, the present invention provides an alignment film preparation apparatus, as shown in fig. 4, and fig. 4 is a schematic view of the alignment film preparation apparatus according to the present invention.
In the embodiment shown in fig. 4, the alignment film preparing apparatus includes: a coating device 5 for coating the alignment liquid on the substrate 55 to obtain a substrate 11 coated with the alignment liquid; the alignment film drying apparatus 1 is used for drying the alignment liquid on the substrate 11 coated with the alignment liquid to obtain the alignment film; and a transfer device 6 for transferring the alignment liquid-coated substrate 11 from the coating device 5 to the alignment film drying device 1.
In the above embodiment, the coating device 5 includes at least one coating nozzle 51 for spraying the alignment liquid 511 onto the substrate 55 to be coated; a carrying platform 52 for carrying and fixing the substrate 55 to be coated; a support structure 521 is provided on the carrying platform 52 for supporting the substrate 55 to be coated. The alignment liquid is coated on the substrate 55 to be coated by the coating device 5 to obtain the substrate 11 coated with the alignment liquid, and then the substrate 11 coated with the alignment liquid is conveyed from the coating device 5 to the alignment film drying device 1 by the conveying device 6, and the alignment liquid on the substrate 11 coated with the alignment liquid is dried in the drying chamber 10 to obtain the alignment film. When the substrate 11 coated with the alignment liquid needs to be fed into the drying cavity 10, the first oven door 314 is firstly opened, then the substrate 11 coated with the alignment liquid is fed onto the heating table 212, and after the substrate is fed, the first oven door 314 and/or the second oven door 316 are kept open, and the drying cavity 10 is communicated with the outside, so that the drying cavity 10 forms an open baking environment. The heating stage 212 is disposed under the alignment liquid-coated substrate 11 at an interval, heats the alignment liquid-coated substrate 11, and the dry gas flowing from the gas inlet unit 36 is heated by the second heating unit 22 and then flows to the alignment liquid-coated substrate 11, thereby further achieving rapid drying of the alignment liquid. Moreover, the exhaust unit 34 exhausts the gas in the drying chamber 10, so as to control the concentration of the volatile solvent, thereby controlling the film forming process and promoting the uniform film formation on the surface of the substrate 11 coated with the alignment liquid.
In one embodiment, the conveying device 6 includes a control unit 61, and the control unit 61 is used for controlling the time for conveying the substrate 11 coated with the alignment liquid from the coating device 5 to the alignment film drying device 1. Preferably, the time for transferring the alignment liquid-coated substrate 11 from the coating device 5 to the alignment film drying device 1 is less than 70 s. As can be understood, in the present invention, by setting the time for the substrate 11 coated with the alignment liquid to be transferred from the coating device 5 to the alignment film drying device 1 to be less than 70s, before the film formation of the alignment liquid on the substrate 11 coated with the alignment liquid is started, the substrate 11 coated with the alignment liquid can be transferred to the alignment film drying device 1, so that the alignment liquid on the substrate 11 coated with the alignment liquid is uniformly volatilized, and the technical problem of the uneven film formation distribution of the substrate 11 coated with the alignment liquid is avoided.
Meanwhile, corresponding to the alignment film preparation apparatus shown in fig. 4, the present invention further provides an alignment film preparation method, as shown in fig. 5, the alignment liquid coating method includes:
step S1: providing a substrate to be coated, and placing the substrate to be coated in a coating device;
step S2: coating the alignment liquid on the substrate to be coated to obtain the substrate coated with the alignment liquid;
step S3: transferring the substrate coated with the alignment liquid from the coating device to an alignment film drying device by a transfer device;
step S4: and placing the substrate coated with the alignment liquid in a drying cavity of the alignment film drying device for drying to obtain the alignment film.
In step S4, the alignment film drying apparatus heats the substrate coated with the alignment solution through the first heating unit, the drying cavity is communicated with the outside through the first gas circulation unit, and the gas in the drying cavity is exhausted through the exhaust unit in the second gas circulation unit.
In one embodiment, the first gas flow unit includes an openable/closable top cover, an oven door, and a side wall, and the drying chamber is communicated with the outside by opening at least one of the openable/closable top cover, the oven door, and the side wall of the first gas flow unit. The drying cavity is communicated with the outside through the first gas circulation unit, so that the quick volatilization of the alignment liquid solvent on the substrate coated with the alignment liquid is facilitated, the concentration of the volatilized solvent in the drying cavity is effectively reduced, the film forming pollution is avoided, and the uniform film forming of the surface of the substrate coated with the alignment liquid is promoted.
In one embodiment, a drying gas is injected into the drying cavity through a gas inlet unit in the second gas circulation unit, the drying gas is compressed drying air, and the drying gas is heated through a second heating unit; the drying gas flowing in from the gas inlet unit flows to the substrate coated with the alignment liquid after being heated by the second heating unit, and further the alignment liquid on the substrate coated with the alignment liquid is quickly dried; and the gas in the dry cavity is exhausted by the exhaust unit, so that the concentration of the volatile solvent in the dry cavity can be controlled, the film forming process is controlled, and the uniform film forming on the surface of the substrate coated with the alignment liquid is promoted.
In one embodiment, the time for conveying the substrate coated with the alignment liquid from the coating device to the alignment film drying device is controlled by the first time control unit to be less than 70s, before the film formation of the alignment liquid on the substrate coated with the alignment liquid is started, the substrate coated with the alignment liquid can be conveyed to the alignment film drying device, so that the alignment liquid on the substrate coated with the alignment liquid is uniformly volatilized, and the problem of uneven film formation distribution of the substrate coated with the alignment liquid is avoided.
In one embodiment, the first heating unit is spaced apart from the substrate coated with the alignment liquid, and specifically, the first heating unit includes a heating stage spaced apart from the substrate coated with the alignment liquid, and a support is disposed on the heating stage to support the substrate coated with the alignment liquid, and the support forms a space between the substrate coated with the alignment liquid and the heating stage, so that heat can be better transferred to the substrate coated with the alignment liquid.
In one embodiment, the heating temperature of the first heating unit is higher than that of the second heating unit, and the heating temperature of the first heating unit is controlled to be higher than that of the second heating unit, so that the heating temperature of the drying gas to the alignment liquid coated substrate is close to the heating temperature of the first heating unit to the alignment liquid coated substrate, thereby avoiding the problem of uneven alignment film thickness caused by uneven heating during the transfer of the alignment liquid.
In one embodiment, the heating temperature of the first heating unit is above 70 ℃ and below 110 ℃; and the flow rate of the drying gas is greater than or equal to 0.0167m3S; the air exhaust negative pressure value of the exhaust unit is greater than or equal to 900 Pa; the second time control unit controls the drying time of the substrate coated with the alignment liquid in the alignment film drying device to be greater than or equal to 150s, so that the aim of drying the substrate is achievedAnd forming the film at a low temperature and a low speed, thereby forming a uniform alignment film with stable quality on the substrate coated with the alignment liquid.
In summary, the present application provides an alignment film drying apparatus, an alignment film manufacturing apparatus and a manufacturing method. The alignment film drying device comprises a drying cavity, a heating unit and a gas circulation unit; the heating unit comprises a first heating unit for heating a substrate coated with alignment liquid; the gas circulation unit comprises a first gas circulation unit and a second gas circulation unit; the drying cavity is communicated with the outside through the first gas circulation unit, and the second gas circulation unit comprises an exhaust unit used for exhausting gas in the drying cavity. The invention avoids the problem of uneven thickness of the alignment film caused by uneven heating in the drying process of the alignment film, can form the uniform alignment film with stable quality on the substrate coated with the alignment liquid, and improves the display effect of the display panel.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (10)
1. An alignment film drying device, comprising:
the drying device comprises a drying cavity, a heating unit and a gas circulation unit;
the heating unit comprises a first heating unit for heating a substrate coated with alignment liquid;
the gas circulation unit comprises a first gas circulation unit and a second gas circulation unit;
the drying cavity is communicated with the outside through the first gas circulation unit, and the second gas circulation unit comprises an exhaust unit for exhausting gas in the drying cavity.
2. The alignment film drying device according to claim 1, wherein the first gas circulation unit comprises an openable/closable top cover, a door, and a sidewall, and the drying chamber is in communication with the outside by opening at least one of the top cover, the door, and the sidewall.
3. The alignment film drying device according to claim 1, wherein the second gas flow cell further comprises a gas inlet unit, and the gas inlet unit is configured to inject a dry gas into the dry cavity; the heating unit further comprises a second heating unit for heating the drying gas, and the drying gas is compressed drying air.
4. The alignment film drying apparatus according to claim 3, wherein the first heating unit is disposed at an interval from the substrate coated with the alignment liquid, and a heating temperature of the first heating unit is higher than a heating temperature of the second heating unit.
5. The alignment film drying device according to claim 4, wherein a heating temperature of the first heating unit is 70 ℃ or higher and 110 ℃ or lower; the flow rate of the drying gas is greater than or equal to 0.0167m3S; the air exhaust negative pressure value of the exhaust unit is greater than or equal to 900 Pa; the alignment film drying device also comprises a time control unit, and the time control unit is used for controlling the drying time of the substrate coated with the alignment liquid in the alignment film drying device to be more than or equal to 150 s.
6. An alignment film manufacturing apparatus, comprising:
the coating device is used for coating the alignment liquid on the substrate to obtain the substrate coated with the alignment liquid;
the alignment film drying apparatus of any one of claims 1 to 5, for drying the alignment liquid on the substrate to produce an alignment film;
and a conveying device for conveying the substrate coated with the alignment liquid from the coating device to the alignment film drying device.
7. The alignment film manufacturing apparatus of claim 6, wherein the transfer device comprises a control unit for controlling a time for transferring the alignment liquid-coated substrate from the coating device to the alignment film drying device to be less than 70 s.
8. A method for preparing an alignment film is characterized by comprising the following steps:
step S1: providing a substrate to be coated, and placing the substrate to be coated in a coating device;
step S2: coating the alignment liquid on the substrate to be coated to obtain the substrate coated with the alignment liquid;
step S3: transferring the substrate coated with the alignment liquid from the coating device to an alignment film drying device by a transfer device;
step S4: placing the substrate coated with the alignment liquid in a drying cavity of the alignment film drying device for drying to obtain the alignment film;
in step S4, the alignment film drying apparatus heats the substrate coated with the alignment solution through the first heating unit, the drying cavity is communicated with the outside through the first gas circulation unit, and the gas in the drying cavity is exhausted through the exhaust unit in the second gas circulation unit.
9. The method of preparing an alignment film according to claim 8, wherein the first gas flow cell comprises an openable top cover, an oven door and a sidewall, and the drying chamber is communicated with the outside by opening at least one of the openable top cover, the oven door and the sidewall of the first gas flow cell; and injecting dry gas into the drying cavity through an air inlet unit in the second gas circulation unit, and heating the dry gas through a second heating unit, wherein the dry gas is compressed dry air.
10. Such asThe method of claim 9, wherein the time for the alignment liquid-coated substrate to be transferred from the coating device to the alignment film drying device is less than 70 s; the first heating unit and the substrate coated with the alignment liquid are arranged at intervals, and the heating temperature of the first heating unit is higher than that of the second heating unit; the heating temperature of the first heating unit is above 70 ℃ and below 110 ℃; and the flow rate of the drying gas is greater than or equal to 0.0167m3S; the air exhaust negative pressure value of the exhaust unit is greater than or equal to 900 Pa; the drying time of the substrate coated with the alignment liquid in the alignment film drying device is greater than or equal to 150 s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110215399.5A CN112859451A (en) | 2021-02-26 | 2021-02-26 | Alignment film drying device, alignment film preparation equipment and alignment film preparation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110215399.5A CN112859451A (en) | 2021-02-26 | 2021-02-26 | Alignment film drying device, alignment film preparation equipment and alignment film preparation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112859451A true CN112859451A (en) | 2021-05-28 |
Family
ID=75990120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110215399.5A Pending CN112859451A (en) | 2021-02-26 | 2021-02-26 | Alignment film drying device, alignment film preparation equipment and alignment film preparation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112859451A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115682652A (en) * | 2021-10-09 | 2023-02-03 | 广东聚华印刷显示技术有限公司 | Baking equipment and baking method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3073493B1 (en) * | 1999-08-03 | 2000-08-07 | 株式会社石井表記 | Method for forming alignment film of liquid crystal display element |
| CN1423159A (en) * | 2001-11-30 | 2003-06-11 | 株式会社日立制作所 | Method for making liquid crystal display assembly and drying device thereof |
| CN1885108A (en) * | 2005-06-20 | 2006-12-27 | Lg.菲利浦Lcd株式会社 | Jig for alignment film printing mask, apparatus and method for cleaning alignment film printing mask using the same |
| CN101825808A (en) * | 2009-03-03 | 2010-09-08 | 北京京东方光电科技有限公司 | Alignment film heating device |
| CN104932150A (en) * | 2015-07-14 | 2015-09-23 | 京东方科技集团股份有限公司 | Light alignment film postbaking treatment device and light alignment film postbaking treatment method |
-
2021
- 2021-02-26 CN CN202110215399.5A patent/CN112859451A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3073493B1 (en) * | 1999-08-03 | 2000-08-07 | 株式会社石井表記 | Method for forming alignment film of liquid crystal display element |
| CN1423159A (en) * | 2001-11-30 | 2003-06-11 | 株式会社日立制作所 | Method for making liquid crystal display assembly and drying device thereof |
| CN1885108A (en) * | 2005-06-20 | 2006-12-27 | Lg.菲利浦Lcd株式会社 | Jig for alignment film printing mask, apparatus and method for cleaning alignment film printing mask using the same |
| CN101825808A (en) * | 2009-03-03 | 2010-09-08 | 北京京东方光电科技有限公司 | Alignment film heating device |
| CN104932150A (en) * | 2015-07-14 | 2015-09-23 | 京东方科技集团股份有限公司 | Light alignment film postbaking treatment device and light alignment film postbaking treatment method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115682652A (en) * | 2021-10-09 | 2023-02-03 | 广东聚华印刷显示技术有限公司 | Baking equipment and baking method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3950327B2 (en) | Manufacturing method of liquid crystal display element | |
| KR101844807B1 (en) | Casting apparatus and solution film-forming method | |
| US20120167626A1 (en) | Apparatus and method for manufacturing patterned tempered glass | |
| KR20090030231A (en) | Normal pressure drying device, substrate processing apparatus and substrate processing method | |
| CN112859451A (en) | Alignment film drying device, alignment film preparation equipment and alignment film preparation method | |
| CN107505739A (en) | Substrate support and alignment film preliminary drying roasting device | |
| CN101825808A (en) | Alignment film heating device | |
| KR20090031271A (en) | Normal pressure drying device, substrate processing apparatus and substrate processing method | |
| CN202330958U (en) | Oriented film-precuring device | |
| KR20100128854A (en) | Batch type substrate treatment apparatus | |
| CN101311786B (en) | Liquid crystal display panel preparation method and drying device | |
| WO2014134887A1 (en) | Alignment film preparation method and system | |
| US9803921B2 (en) | Alignment film drying system and a method for drying alignment films | |
| JP5622701B2 (en) | Vacuum dryer | |
| TW201216365A (en) | Thermal treatment device and thermal treatment method | |
| CN102566144B (en) | Alignment film drying system and alignment film drying method | |
| KR102671334B1 (en) | Apparatus for loading substrate and apparatus for processing substrate | |
| JP3373413B2 (en) | Heat treatment equipment for uniformly heating flat workpieces by changing the wind speed | |
| JP2005049021A (en) | Paste material drying method and device | |
| CN113156673B (en) | Alignment detection device and detection method thereof | |
| JPH05309301A (en) | Apparatus for coating and prebaking hard substrate | |
| JPH1194470A (en) | Heating furnace | |
| CN111413813B (en) | Heating device and heating method for display panel | |
| KR101002339B1 (en) | Method for forming alignment layer | |
| JP4166848B2 (en) | Liquid crystal injection apparatus and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20210528 |