CN112857264A - Simple oblique illumination type color confocal measurement system and detection method - Google Patents
Simple oblique illumination type color confocal measurement system and detection method Download PDFInfo
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
Abstract
The invention relates to a simple oblique illumination type color confocal measurement system which comprises a polychromatic point light source module, a dispersion lens module, a moving object carrying module, a reflector and a light collection and calculation module. The light emitted by the multi-color point light source module obliquely downwards penetrates through the dispersive lens module, reaches the moving carrier module, is reflected to the reflector obliquely upwards, and is reflected to the light collection and calculation module for the second time. The moving object carrying module is used for loading the object to be measured. The method comprises the steps of projecting incident light to the surface of a measured object at an inclined angle, focusing light with different wavelengths to different axial heights, forming light spots on the surface of the measured object, receiving and analyzing light wave signals by a light acquisition and calculation module, moving the measured object, acquiring all sampling point information of the measured object by the light acquisition and calculation module, and performing point cloud modeling to generate surface three-dimensional morphology information. The measuring system and the detecting method are suitable for measuring the surface appearance of the sample which cannot be detected in the vertical direction, such as surface appearance measurement of rotor blades of aircraft engines and thickness measurement of transparent materials such as glass.
Description
Technical Field
The invention relates to the field of non-contact surface three-dimensional topography detection, in particular to a simple oblique illumination type color confocal measurement system and a detection method.
Background
The rapid development of scientific technology drives the industrial upgrading of manufacturing industry, so that the produced and processed products are more and more precise, and the society also puts higher requirements on the surface three-dimensional shape detection technology of high-precision products. Surface measurement technology spans many different fields such as science and industry, and is widely applied in the fields of biomedicine, geological samples, processing materials, mechanical parts, integrated circuits, micro-electromechanical systems, optical elements and the like.
At present, in the field of surface three-dimensional morphology detection, an optical detection method surpasses the traditional contact measurement and becomes a mainstream detection method due to the advantages of non-contact, high precision, high speed, strong adaptability and the like. Conventional optical detection methods generally include white light interferometry, laser triangulation, astigmatism, laser confocal, and the like. Compared with the traditional optical detection methods, the color confocal technology has the advantages of shorter scanning time and higher precision, and can meet the requirements of industrial detection.
The color confocal technology principle is that the surface of a measured object is scanned by combining a mechanical displacement device, and position information is reflected according to the change of spectral information acquired by a sensor. Compared with the traditional laser confocal measurement method, the color confocal measurement method does not need axial scanning, saves the detection time, improves the detection speed and can realize the detection precision of submicron level.
The color confocal measurement technique usually requires that the measurement light is perpendicularly irradiated on the surface of the measured object to ensure that the measurement light is reflected back to the detection device, so the illumination system of the conventional color confocal measurement device usually can only measure perpendicularly to the surface of the measured object. In practice there are some special cases, which limit the above conventional measurement scheme: for example, when the method is applied to the detection of the surface topography of the rotor blade of an aircraft engine, the geometric space measured in the vertical direction is compressed due to the very narrow space between the two blades; for example, when measuring the thickness of glass, the light incident perpendicularly is reflected on the upper and lower surfaces of the glass, and the reflected light is overlapped, thereby causing interference with the receiving end. The situation similar to this in which the measurement cannot be performed in the vertical direction is also common in other industrial detection fields.
Disclosure of Invention
The invention aims to solve the technical problem that the existing color confocal measurement system can only measure the object to be measured in a vertical direction and cannot measure the surface appearance in a non-vertical direction.
In order to solve the technical problems, the invention provides a color confocal measurement system for collecting surface information of an object in an oblique illumination mode, which can realize measurement at different geometric angles, and the scheme can be applied and popularized to other related surface topography measurement fields. The technical scheme of the invention is as follows.
A simple oblique illumination type chromatic confocal measuring system comprises a polychromatic point light source module, a dispersion lens module, a moving object carrying module, a reflector and a light collection and calculation module. The incident light emitted by the polychromatic point light source module obliquely downwards penetrates through the dispersion lens module, obliquely downwards emits to the moving carrier module, then is obliquely upwards reflected to the reflector, and is obliquely downwards secondarily reflected to the light collection and calculation module; the light emitting port of the polychromatic point light source module faces the dispersive lens module, and the moving carrier module is arranged on the outer focus of the emergent end of the dispersive lens module; the moving object carrying module comprises an object carrying table used for carrying an object to be measured. The light collection and calculation module is also connected to the moving object carrying module.
The invention uses the chromatic confocal distance measuring method to collect the information of the surface of the measured object in an inclined mode, the measuring light rays irradiate to the surface of the measured object at an inclined angle which can be 20 degrees, 40 degrees, 65 degrees, 70 degrees and the like. The middle part of the light passes through the dispersion module on the incident light channel, so that the light with different wavelengths is focused to different axial height positions of the optical axis, and the surface of the measured object displays light spots with different colors at different axial heights. The light spots are reflected to the reflector by the surface of the measured object and are finally received by the light ray acquisition and calculation module. In the process, when the axial position of the object to be measured changes, the position of the reflector also changes correspondingly, and meanwhile, the light collection and calculation module collects corresponding focused light wavelength changes. The surface of the measured object is measured by moving the moving object carrying module, the focused light wavelength of the measured point at each different axial height position on the surface of the measured object is collected, the relative height information of the measured point is obtained, and the light ray collecting and calculating module carries out modeling according to the information to generate the three-dimensional appearance of the surface of the measured object. The system solves the problem that the prior chromatic confocal measurement system can only measure the surface appearance perpendicular to a measured object, and can be applied to the surface appearance measurement in specific scenes such as the measurement in the vertical direction.
As a further improvement of the simple oblique illumination type color confocal measurement system, the multi-color point light source module comprises a light source, an incident optical fiber and a small hole mechanism; the small hole mechanism is provided with a small hole; one end of the incident optical fiber is connected to the light source, and the other end of the incident optical fiber faces the small hole and the incident end of the dispersion lens module at the rear end of the small hole.
As a further improvement of the simple oblique illumination type chromatic confocal measurement system, the dispersive lens module comprises a first dispersive tube lens and an objective lens; the incident light emitted by the multi-color point light source module sequentially passes through the first dispersion tube lens and the objective lens.
As a further improvement of the simple oblique illumination type color confocal measurement system, the moving object carrying module comprises an object carrying table and a displacement control system, and the displacement control system controls the displacement of the object carrying table; the object stage is provided with three overlapped moving layers, the bottom layer is fixed on the vertical moving shaft, the middle layer horizontally and longitudinally moves relative to the bottom layer, the upper layer horizontally and transversely moves relative to the middle layer, and the upper layer is used for loading a measured object.
As a further improvement of the simple oblique illumination type color confocal measurement system, the light collection and calculation module comprises a focusing lens, a second dispersion tube lens, an optical sensor and a computer; the secondary reflected light reaches the optical sensor through the focusing mirror and the second dispersing tube mirror, and the optical sensor is connected to the computer.
As a further improvement of the simple oblique illumination type color confocal measurement system, the computer is also connected to the moving object carrying module.
As a further improvement of the simple oblique illumination type color confocal measuring system, the reflecting mirror is parallel to the object stage.
The invention also provides a simple oblique illumination type color confocal detection method, which is applied to the simple oblique illumination type color confocal measurement system and comprises the following steps:
p1, the polychromatic light beam emitted by the polychromatic point light source module enters the dispersion lens module and is firstly collimated, then refracted out of the dispersion lens module, the light with different wavelengths is focused to different axial positions of an incident optical axis, and the moving carrier module is moved to enable the incident light to be focused on the surface of a measured object loaded on the moving carrier module to form light spots;
p2, the light spot is reflected to the reflector on the surface of the measured object, and then reflected to the light collection and calculation module through the reflector for the second time;
p3, the light collection and calculation module collects the wavelength information of the light spot reflected by the surface of the measured object, and then calculates the relative height data of the surface of the measured object by combining the wavelength information with the displacement information of the moving carrier module;
and P4, repeatedly and synchronously moving the moving object carrying module and the reflector to enable the surface of the measured object to display light spots with different colors at different positions in the direction of the incident optical axis, the light spots are reflected to the reflector on the surface of the measured object and then reflected to the light collecting and calculating module through the reflector for the second time, image information collection of each position on the surface of the measured object is carried out, and three-dimensional point cloud modeling is carried out on the axial height of the sampling point information and the corresponding horizontal position coordinate information to generate a surface appearance image of the measured object.
As a further improvement of the simple oblique illumination type chromatic confocal detection method, the light source emits polychromatic light, the polychromatic light is transmitted to the first small hole through the incident optical fiber to generate a polychromatic point light source, the polychromatic light emitted by the polychromatic point light source becomes collimated light after passing through the first dispersion tube mirror, the polychromatic light is dispersed into light beams with different wavelengths after passing through the objective lens, the light beams with different wavelengths are respectively focused on the incident optical axis, and the focuses of the wavelengths are sequentially arranged at the axial positions according to the wavelength change; and scanning and sampling each position point on the surface of the measured object by controlling the moving track of the moving object carrying module.
As a further improvement of the simple oblique illumination type color confocal detection method of the present invention, in step P4, the moving object carrying module and the reflecting mirror are moved repeatedly and synchronously to make the surface of the object to be detected display different color light spots at different positions along the incident optical axis, and the method specifically includes:
the horizontal direction removes the motion carries thing module to and adjust the vertical position of motion carries the thing module, makes each position department of measured object surface all form the facula, wherein the speculum position along with the motion carries the thing module synchronization adjustment, through the reflection signal of facula is received to light collection calculation module, models and generates the measured object surface topography image.
The simple oblique illumination type color confocal measurement system and the detection method provided by the invention use a color confocal technology, the oblique incident illumination light beams are dispersed by a dispersion module to generate light rays with different wavelengths and are focused at different axial height positions according to the wavelength rule, the light rays are reflected by the surface of a measured object and then sequentially pass through a reflector and a focusing mirror, and the focusing mirror focuses the measurement light rays into an optical sensor to be received. The measuring device measures the surface of the measured object by controlling the movement of the objective table, and the optical sensor transmits the acquired wavelength information of the measured point to the computer for processing and generating the three-dimensional shape. The measuring system and the detecting method are suitable for the situations that the detection cannot be carried out in the vertical direction and the like, such as the application scenes of detecting the surface appearance of the rotor blade of the aircraft engine, measuring the thickness of transparent materials such as glass and the like.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a general structural diagram of a simple oblique illumination type color confocal measurement system according to the present invention;
FIG. 2 is a schematic diagram of a polychromatic light beam emitted by the light source in FIG. 1, which is dispersed into a plurality of light beams with different wavelengths after passing through a dispersion lens module, and the focal points of the light beams with different wavelengths are sequentially arranged at axial positions according to wavelength changes;
fig. 3 is a schematic structural view of the stage of fig. 1.
FIG. 4 is a schematic flow chart of a simple oblique illumination type confocal color inspection method according to the present invention.
The labels in the figure are: the device comprises a light source 1, an incident optical fiber 2, a pinhole mechanism 3, a first dispersion tube lens 4-1, an objective lens 5, a measured object 6, an objective table 7, a reflecting mirror 8, a focusing mirror 9, a second dispersion tube lens 4-2, an optical sensor 10 and a computer 11.
Detailed Description
The invention discloses a simple oblique illumination type color confocal measurement system and a detection method, and aims to provide a novel method for measuring the three-dimensional topography of the surface of an object in an oblique manner under the condition that the conventional vertical measurement manner is limited by space. The structure and operation steps of the technical solution of the present invention are described in detail below with reference to the accompanying drawings so as to facilitate the understanding and understanding of the objects, structures and functions of the present invention, but not to limit the scope of the present invention as set forth in the appended claims.
The simple oblique illumination type color confocal measurement system comprises a polychromatic point light source module, a dispersion lens module, a moving object carrying module, a reflector 8 and a light collection and calculation module. The incident light emitted by the polychromatic point light source module obliquely downwards penetrates through the dispersion lens module, obliquely downwards emits to the moving carrier module, then is obliquely upwards reflected to the reflector, and is obliquely downwards secondarily reflected to the light collection and calculation module; the light emitting port of the compound color point light source module faces the dispersive lens module, the compound color point light source module can be arranged on the outer focus of the incident end of the dispersive lens module, and the moving carrier module is arranged on the outer focus of the emergent end of the dispersive lens module; the moving object carrying module comprises an object carrying platform for carrying an object to be measured 6. The light collection and calculation module is also connected to the moving object carrying module.
The invention utilizes a chromatic confocal distance measuring method to collect the information of the surface of the measured object in an inclined mode, the measuring light rays are emitted to the surface of the measured object in an inclined angle, the light rays pass through the dispersive lens module on the incident light channel in the middle, so that the light rays with different wavelengths are focused to different axial height positions of the optical axis, and the surface of the measured object displays light spots with different colors at different axial heights. The light spots are reflected to the reflector by the surface of the measured object and are finally received by the light ray acquisition and calculation module. In the process, when the axial position of the object to be measured changes, the position of the reflector also changes correspondingly, and meanwhile, the light collection and calculation module collects corresponding focused light wavelength changes. The surface of the measured object is measured by moving the moving object carrying module, the focused light wavelength of the measured point at each different axial height position on the surface of the measured object is collected, the relative height information of the measured point is obtained, and the light ray collecting and calculating module carries out modeling according to the information to generate the three-dimensional appearance of the surface of the measured object. The system solves the problem that the existing color confocal measurement system can only measure the surface appearance perpendicular to a measured object, and can be applied to surface appearance measurement in specific scenes such as the situation that measurement cannot be carried out in the perpendicular direction, for example, the surface appearance measurement of rotor blades of aircraft engines and the thickness measurement of transparent materials such as glass.
As shown in fig. 1, the multi-color point light source module includes a light source 1, an incident optical fiber 2 and an aperture mechanism 3; the small hole mechanism 3 is a plate, and a small hole is formed in the middle of the plate; one end of the incident optical fiber 2 is connected to the light source 1, and the other end faces the pinhole and the incident end of the dispersive lens module at the rear end of the pinhole. Wherein, the light source 1 is HL-2000-fhsa halogen tungsten lamp light source of ocean optics company, the polychromatic light beam emitted by the light source 1 is white light with continuous spectrum information, and the spectrum wavelength comprises from 400nm to 800 nm. The incident optical fiber 2 is made of a silica material and includes a core, a cladding and a coating layer. The light source 1 transmits polychromatic light to the aperture through the incident optical fiber 2 to generate a point light source.
As shown in fig. 1, the dispersive lens module includes a first dispersive tube lens 4-1 and an objective lens 5. The incident light emitted by the multi-color point light source module passes through the first dispersion tube lens 4-1 and the objective lens 5 in sequence. The first dispersion tube lens 4-1 is a lens combination with special design, and converges the light of the point light source into collimated light with different colors. The objective lens 5 is a semi-convex lens, and focuses the collimated light emitted by the first dispersion tube lens 4-1 and projects the collimated light onto the object to be measured 6 to form a light spot.
Referring to fig. 2, the polychromatic light emitted by the light source 1 becomes a point light source after passing through the small hole, and is dispersed into light beams with different wavelengths after passing through the dispersion lens module, and the focal points of the wavelengths are sequentially arranged at the axial positions according to the wavelength change. Specifically, when the point light source enters the first dispersion tube lens 4-1, the light with different wavelengths is different in refraction angle due to different wavelengths in the same medium glass, axial chromatic aberration is formed after refraction, and the light with different wavelengths is focused to different axial heights along the optical axis direction through the objective lens 5 to generate a group of focused light spots with continuously changing wavelengths.
As shown in fig. 1, the moving carrier module comprises a carrier 7 and a displacement control system comprising a drive motor and a computer 11.
As shown in fig. 3, the stage 7 is composed of three metal plates, wherein the metal plate at the bottom layer is fixed on a vertical moving shaft, and the vertical moving shaft is driven by a motor; the middle layer metal flat plate moves horizontally and longitudinally (in the y direction) relative to the bottom layer metal flat plate, and the middle layer metal flat plate is driven by a second motor; the upper metal flat plate horizontally moves (in the x direction) relative to the middle metal flat plate, and is used for loading the measured object 6 and driven by a third motor. The computer 11 controls the motor controller to send instructions to control the rotation of the motor, so that the moving tracks of the metal flat plate on the x-axis, the y-axis and the z-axis are controlled, and the scanning sampling of each position point of the whole surface of the sample to be detected can be realized.
As shown in FIG. 1, the light collection and calculation module comprises a focusing mirror 9, a second dispersing tube mirror 4-2, an optical sensor 10 and a computer 11. The focusing lens 9 is a semi-convex lens, and the second dispersion tube lens 4-2 and the first dispersion tube lens 4-1 have the same structure. The light reflected twice reaches the optical sensor 10 through the focusing mirror 9 and the second dispersing tube mirror 4-2, and the optical sensor 10 is connected to the computer 11. The computer 11 is also connected to the moving object module for controlling the movement of the object table 7.
The mirror 8 is parallel to the stage 7 to facilitate synchronous position adjustment. The reflecting mirror 8 and the bottom layer of the object stage 7 can be connected and fixed by using a connecting device, so that the reflecting mirror 8 and the object stage 7 are linked to keep parallel and the distance between the reflecting mirror and the object stage constant.
Referring to the optical path diagram of fig. 1, the simple oblique illumination color confocal measurement system is utilized to perform oblique illumination color confocal measurement to detect the three-dimensional surface topography of a sample, and the simple oblique illumination color confocal measurement method includes the following steps:
p1, the light source 1 emits polychromatic light, the polychromatic light is transmitted to the first small hole through the incident optical fiber 2 to generate a polychromatic point light source, the polychromatic light emitted by the polychromatic point light source becomes collimated light after passing through the first dispersion tube lens 4-1 arranged obliquely, the polychromatic light is dispersed into light beams with different wavelengths after passing through the objective lens 5, the light beams with different wavelengths are sequentially focused on the optical axis behind the objective lens 5, the focal points are sequentially arranged at the axial position of the center of the incident light according to the wavelength change, and the moving track of the objective table 7 is controlled by the computer 11 to enable the focal points to be displayed on the surface of the measured object 6 loaded on the objective table 7 to form light spots;
p2, the light spot is reflected to the reflector 8 on the surface of the object to be measured 6, and then reflected for the second time by the reflector 8, the light is dispersed and becomes focused light through the focusing mirror 9, and the focused light is converged to the optical sensor 10 after passing through the second dispersion tube lens 4-2, and the optical sensor 10 converts the optical signal into an electrical signal;
p3, the optical sensor 10 collects the wavelength information of the light spot reflected by the surface of the object to be measured, converts the optical signal into an electrical signal and transmits the electrical signal to the computer 11, and the computer 11 calculates the relative height data of the surface of the object to be measured by combining the wavelength information with the displacement information of the moving carrier module;
p4, set up sampling time interval and sampling number of times through the collection procedure in computer 11, realize moving in the horizontal direction the motion carries thing module to and adjust in the vertical direction the vertical position of motion carries thing module makes each position department on the measured object surface homoenergetic form the facula, and wherein the speculum position is followed the motion carries thing module synchronous adjustment, and the facula reflects to the speculum at the surface of measured object, and the speculum secondary reflection arrives again light gathers the calculation module, and computer 11 gathers the colour and the wavelength information of the facula that each position department on the measured object surface, calculates the relative height data of each position department on measured object surface again, carries out three-dimensional point cloud with the axial height of sampling point information and the horizontal position coordinate information that corresponds and generates measured object 6 surface topography image. In fig. 1, two focus points on the object to be measured 6 represent light spots respectively formed at different positions on the surface of the object to be measured 6 after the stage 7 is moved up and down in the two testing processes, and the two light spots are on the same focus axis.
Referring to fig. 4, the simple oblique illumination type color confocal detection method is further summarized as follows:
s1: the method comprises the steps of projecting illumination light of a color confocal measurement system onto the surface of a measured object at an inclined angle, connecting and fixing an objective table 7 and a reflector 8 by using a connecting device, adjusting a plane mirror (namely the reflector 8) to enable the plane mirror to be parallel to the plane of the objective table, and adjusting the reflector 8 and a focusing mirror 9 to the optimal positions to focus the light into a collection end (an optical sensor 10);
s2: placing a sample to be tested on an object stage 7, setting parameters such as sampling frequency, scanning path, scanning speed and the like in control software of a computer 11 to control the object stage 7 and a reflector 8 to move together, and scanning the sample;
s3: carrying out standard correction on the color confocal measurement system;
s4: starting an image acquisition device through upper computer software, controlling an object stage 7 and a reflector 8 to move together, starting the object stage 7 to acquire the surface of a measured object sample according to a preset scanning speed and a preset path, and acquiring wavelength information of different measured points on the surface in real time by an optical sensor 10 according to sampling frequency and uploading the wavelength information to a computer 11;
s5: and (11) carrying out three-dimensional point cloud modeling on the axial heights of the information of the plurality of measured points and the corresponding horizontal position coordinate information to generate a surface topography image.
The measuring system and the detecting method are suitable for detecting the surface appearance, the step height, the surface roughness, the flatness, the thickness of the transparent material and the like of a sample under the condition that the geometric space such as the surface appearance of the rotor blade of the aircraft engine is limited, and can realize the acquisition of two-dimensional outline and three-dimensional appearance information of the sample under the condition of an inclination angle. For example, the present system and method may be applied to measure glass thickness. When the traditional color confocal measurement system measures in the vertical direction, light rays reflected on the upper surface and the lower surface of the glass are mixed, and the oblique illumination type measurement system can separate light rays reflected by the upper surface and the lower surface, eliminate light ray interference factors and ensure that the measurement result is more accurate.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A simple oblique illumination type chromatic confocal measurement system is characterized in that: the measuring system comprises a polychromatic point light source module, a dispersion lens module, a moving carrier module, a reflector and a light collection and calculation module; the incident light emitted by the polychromatic point light source module obliquely downwards penetrates through the dispersion lens module, obliquely downwards emits to the moving carrier module, then is obliquely upwards reflected to the reflector, and is obliquely downwards secondarily reflected to the light collection and calculation module; the light emitting port of the polychromatic point light source module faces the dispersive lens module, and the moving carrier module is arranged on the outer focus of the emergent end of the dispersive lens module; the moving object carrying module comprises an object carrying table used for carrying an object to be measured; the light collection and calculation module is also connected to the moving object carrying module.
2. The system of claim 1, wherein: the multi-color point light source module comprises a light source (1), an incident optical fiber (2) and a small hole mechanism (3); the small hole mechanism (3) is provided with a small hole; one end of the incident optical fiber (2) is connected to the light source (1), and the other end faces the small hole and the incident end of the dispersive lens module at the rear end of the small hole.
3. The system of claim 2, wherein: the dispersion lens module comprises a first dispersion tube lens (4-1) and an objective lens (5); incident light emitted by the multi-color point light source module sequentially passes through the first dispersion tube lens (4-1) and the objective lens (5).
4. The system of claim 1, wherein: the moving object carrying module comprises an object carrying platform (7) and a displacement control system, wherein the displacement control system controls the displacement of the object carrying platform (7); the object stage (7) is provided with three overlapped moving layers, the bottom layer is fixed on the vertical moving shaft, the middle layer horizontally and longitudinally moves relative to the bottom layer, the upper layer horizontally and transversely moves relative to the middle layer, and the upper layer is used for loading a measured object (6).
5. The system of claim 1, wherein: the light ray acquisition and calculation module comprises a focusing lens (9), a second dispersion tube lens (4-2), an optical sensor (10) and a computer (11); the secondary reflected light penetrates through the focusing mirror (9) and the second dispersion tube mirror (4-2) to reach the optical sensor (10), and the optical sensor (10) is connected to the computer (11).
6. The system of claim 5, wherein: the computer (11) is also connected to the moving carrier module.
7. The system of claim 1, wherein: the mirror is parallel to the stage.
8. A simple oblique illumination type color confocal measurement method is applied to the simple oblique illumination type color confocal measurement system of any one of claims 1 to 7, and comprises the following steps:
p1, the polychromatic light beam emitted by the polychromatic point light source module enters the dispersion lens module, then becomes collimated light, and is refracted out of the dispersion lens module, the light with different wavelengths is focused to different axial positions of an incident optical axis, and the moving carrier module is moved to enable the incident light to be focused on the surface of a measured object loaded on the moving carrier module to form light spots;
p2, the light spot is reflected to the reflector on the surface of the measured object, and then reflected to the light collection and calculation module through the reflector for the second time;
p3, the light collection and calculation module collects the wavelength information of the light spot reflected by the surface of the measured object, and then calculates the relative height data of the surface of the measured object by combining the wavelength information with the displacement information of the moving carrier module;
and P4, repeatedly and synchronously moving the moving object carrying module and the reflector to enable the surface of the measured object to display light spots with different colors at different positions in the direction of the incident optical axis, the light spots are reflected to the reflector on the surface of the measured object and then reflected to the light collecting and calculating module through the reflector for the second time, image information collection of each position on the surface of the measured object is carried out, and three-dimensional point cloud modeling is carried out on the axial height of the sampling point information and the corresponding horizontal position coordinate information to generate a surface appearance image of the measured object.
9. The simple oblique illumination type color confocal detection method according to claim 8, applied to the simple oblique illumination type color confocal measurement system according to claim 3, wherein the light source (1) emits polychromatic light, the polychromatic light is transmitted to the first small hole through the incident optical fiber (2) to generate a polychromatic point light source, the polychromatic light emitted by the polychromatic point light source becomes collimated light after passing through the first dispersion tube lens (4-1), the polychromatic light is dispersed into light beams with different wavelengths after passing through the objective lens (5), the light beams with different wavelengths are respectively focused on the incident optical axis, and the focuses of each wavelength are sequentially arranged at the axial position according to the wavelength variation; and scanning and sampling each position point on the surface of the measured object by controlling the moving track of the moving object carrying module.
10. The simple oblique illumination type color confocal detection method according to claim 8, wherein in step P4, the moving object module and the reflector are repeatedly moved synchronously to make each position on the surface of the object to be detected display different color light spots at different positions along the incident optical axis, and the method specifically comprises:
the horizontal direction removes the motion carries thing module to and adjust the vertical position of motion carries the thing module, makes each position department of measured object surface all form the facula, wherein the speculum position along with the motion carries the thing module synchronization adjustment, through the reflection signal of facula is received to light collection calculation module, models and generates the measured object surface topography image.
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